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CN104852266A - Intracavity-frequency-multiplication-optic-parameter-oscillator-based femto-second near-infrared laser light source and method - Google Patents

Intracavity-frequency-multiplication-optic-parameter-oscillator-based femto-second near-infrared laser light source and method Download PDF

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CN104852266A
CN104852266A CN201510290400.5A CN201510290400A CN104852266A CN 104852266 A CN104852266 A CN 104852266A CN 201510290400 A CN201510290400 A CN 201510290400A CN 104852266 A CN104852266 A CN 104852266A
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concave mirror
femtosecond
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infrared laser
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魏志义
田文龙
朱江峰
王兆华
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Xidian University
Institute of Physics of CAS
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Abstract

本发明公开了一种基于腔内倍频光学参量振荡器飞秒近红外激光光源及方法,包括依次放置的全固态飞秒锁模Yb激光器、隔离器、半波片、聚焦透镜、第一凹面镜、第一PPLN晶体、第二凹面镜、第三凹面镜、第二PPLN晶体、第四凹面镜和输出耦合镜。本发明利用全固态锁模飞秒Yb激光器输出功率大、结构紧凑、成本低的优点,实现了波长在1.4-1.8μm以及0.7-0.9μm连续可调谐的相干飞秒近红外激光;相比于传统的基于锁模钛宝石激光器产生0.7-0.9μm的近红外激光光源,本发明提供的基于腔内倍频光学参量振荡器的飞秒近红外光源具有结构简单、性能稳定、价格低廉等优势。

The invention discloses a femtosecond near-infrared laser light source and method based on an intracavity frequency-doubling optical parametric oscillator, which includes an all-solid-state femtosecond mode-locked Yb laser, an isolator, a half-wave plate, a focusing lens, and a first concave surface placed in sequence. mirror, first PPLN crystal, second concave mirror, third concave mirror, second PPLN crystal, fourth concave mirror and output coupling mirror. The invention utilizes the advantages of high output power, compact structure and low cost of the all-solid-state mode-locked femtosecond Yb laser to realize continuously tunable coherent femtosecond near-infrared lasers with wavelengths of 1.4-1.8 μm and 0.7-0.9 μm; compared to The traditional mode-locked Ti:Sapphire laser produces a 0.7-0.9 μm near-infrared laser source. The femtosecond near-infrared source based on an intracavity frequency-doubling optical parametric oscillator provided by the present invention has the advantages of simple structure, stable performance, and low price.

Description

基于腔内倍频光学参量振荡器飞秒近红外激光光源及方法Femtosecond near-infrared laser source and method based on intracavity frequency doubling optical parametric oscillator

技术领域technical field

本发明属于超快激光技术领域,尤其涉及一种基于腔内倍频光学参量振荡器飞秒近红外激光光源及方法。The invention belongs to the field of ultrafast laser technology, and in particular relates to a femtosecond near-infrared laser light source and method based on an intracavity frequency doubling optical parametric oscillator.

背景技术Background technique

飞秒激光脉冲的产生经历几十年的研究,人们已经成功地利用克尔透镜锁模(KLM)、SESAM被动锁模等原理在许多种增益介质中获得从可见光到2μm左右的近红外飞秒脉冲。相对于利用粒子数反转提供激光增益的激光器而言,飞秒光参量振荡器(OPO)利用在非线性光学介质中(如BBO,KTP以及周期极化铌酸锂等)泵浦光、信号光以及空闲光能量相互耦合的原理来产生超短激光脉冲,从而具有独特的优势:首先,采用同步泵浦方式抽运的飞秒OPO,利用同一种晶体、同一飞秒泵浦源,可以同时产生多种波长的飞秒脉冲输出;其次,飞秒OPO具有从可见光到中红外的调谐范围,大大扩展了基于锁模原理的激光器的输出波长范围,并且其波长是可连续调谐的;此外,由于参量互作用有很宽的参量带宽,不受限于原子或分子的能级带宽,从理论上可以获得比泵浦光更窄的脉冲输出。随着钛宝石KLM锁模技术的成熟,以飞秒钛宝石振荡器为泵浦源的飞秒OPO得到了飞速的发展,国内外相继报道了利用不同增益介质、基频和倍频钛宝石泵浦的飞秒OPO。国内首次利用飞秒钛宝石振荡器实现同步泵浦的飞秒OPO是在2007年(文献1.J.Zhu et al.Chin.Phys.Lett.24(9)2603(2007)),随后又相继实现了大功率钛宝石泵浦的双波长飞秒OPO(文献2.L.Xuet al.Opt.Lett.37(9)1436(2012))和腔内倍频飞秒OPO(文献3.J.Zhu et al.ChinPhys.B 22(5)054210)。虽然利用钛宝石激光器泵浦飞秒OPO具有工作稳定、光束质量好等优点,但是由于钛宝石振荡器需要价格昂贵的532nm激光器作为泵浦源,因此整套系统成本非常之高,限制了在许多大众化行业的研究和应用。因此发展价格低廉的激光二极管泵浦的全固态锁模飞秒Yb激光器作为飞秒OPO的泵浦源,一方面可以极大地节省成本,另一方面飞秒Yb激光器可以输出更高的平均功率,从而能够获得更高功率的可调谐近-中红外激光。因此建立一种利用全固态锁模飞秒Yb激光器作为泵浦源的同步泵浦飞秒光学参量振荡器具有重要的意义和价值。此外,0.7-0.9μm的近红外超快激光光源在许多重要领域如生物光子学,光学显微镜及非斯托克斯拉曼光谱测量等领域具有重要的应用。目前主流的0.7-0.9μm的近红外超短激光光源就是钛宝石飞秒锁模激光器,如前所说,钛宝石飞秒锁模激光器虽然存在各种各样的优势,但是需要价格昂贵的532nm激光器作为泵浦源,因此整套系统成本非常之高,而且不管是532nm的泵浦源还是钛宝石激光器都需要进行水冷,这就决定了其体积比较大,不够紧凑。因此,提出一种低成本,结构简单的0.7-0.9μm超快中红外激光光源势在必行。After decades of research on the generation of femtosecond laser pulses, people have successfully used the principles of Kerr lens mode-locking (KLM) and SESAM passive mode-locking to obtain near-infrared femtosecond pulses from visible light to about 2 μm in many kinds of gain media. pulse. Compared with lasers that use population inversion to provide laser gain, femtosecond optical parametric oscillators (OPO) use pump light, signal The principle of mutual coupling of light and idle light energy to generate ultrashort laser pulses has unique advantages: First, the femtosecond OPO pumped by synchronous pumping can use the same crystal and the same femtosecond pumping source to simultaneously Generate femtosecond pulse output of multiple wavelengths; secondly, femtosecond OPO has a tuning range from visible light to mid-infrared, which greatly expands the output wavelength range of lasers based on the mode-locking principle, and its wavelength is continuously tunable; in addition, Since the parametric interaction has a very wide parametric bandwidth, which is not limited to the energy level bandwidth of atoms or molecules, theoretically a narrower pulse output than that of pump light can be obtained. With the maturity of Ti:Sapphire KLM mode-locking technology, the femtosecond OPO with femtosecond Ti:Sapphire oscillator as the pumping source has been developed rapidly. It has been reported at home and abroad that the use of different gain media, fundamental frequency and double frequency Ti:Sapphire pump Pu's femtosecond OPO. The first domestic femtosecond OPO using femtosecond Ti:Sapphire oscillator to achieve synchronous pumping was in 2007 (document 1.J.Zhu et al.Chin.Phys.Lett.24(9)2603(2007)), followed by successive Realized high-power Ti:Sapphire pumped dual-wavelength femtosecond OPO (document 2.L.Xuet al.Opt.Lett.37(9)1436(2012)) and intracavity frequency-doubling femtosecond OPO (document 3.J. Zhu et al. ChinPhys. B 22(5)054210). Although the use of Ti:sapphire laser to pump femtosecond OPO has the advantages of stable operation and good beam quality, but because the Ti:sapphire oscillator requires an expensive 532nm laser as the pump source, the cost of the entire system is very high, which limits the use in many popular applications. Industry research and application. Therefore, the development of low-cost laser diode-pumped all-solid-state mode-locked femtosecond Yb lasers as the pump source for femtosecond OPO can greatly save costs on the one hand, and on the other hand femtosecond Yb lasers can output higher average power. Thus, a higher-power tunable near-mid-infrared laser can be obtained. Therefore, it is of great significance and value to establish a synchronously pumped femtosecond optical parametric oscillator using an all-solid-state mode-locked femtosecond Yb laser as a pump source. In addition, the 0.7-0.9 μm near-infrared ultrafast laser light source has important applications in many important fields such as biophotonics, optical microscopy and non-Stokes Raman spectroscopy. At present, the mainstream 0.7-0.9μm near-infrared ultra-short laser source is Ti:Sapphire femtosecond mode-locked laser. As mentioned above, although Ti:Sapphire femtosecond mode-locked laser has various advantages, it needs expensive 532nm The laser is used as the pump source, so the cost of the whole system is very high, and both the 532nm pump source and the Ti:sapphire laser need to be water-cooled, which determines that its volume is relatively large and not compact enough. Therefore, it is imperative to propose a low-cost, simple-structured 0.7-0.9 μm ultrafast mid-infrared laser source.

发明内容Contents of the invention

本发明的目的在于提供一种基于腔内倍频光学参量振荡器飞秒近红外激光光源及方法,旨在解决现有的近红外飞秒激光器存在的结构不紧凑、价格较高、波长不能连续可调的问题。The purpose of the present invention is to provide a femtosecond near-infrared laser light source and method based on an intracavity frequency-doubling optical parametric oscillator, aiming to solve the problems of existing near-infrared femtosecond lasers such as uncompact structure, high price, and non-continuous wavelength. Adjustable question.

本发明是这样实现的,一种基于腔内倍频光学参量振荡器飞秒近红外激光光源,所述基于腔内倍频光学参量振荡器飞秒近红外激光光源包括依次放置的全固态飞秒锁模Yb激光器、隔离器、半波片、聚焦透镜、第一凹面镜、第一PPLN晶体、第二凹面镜、第三凹面镜、第二PPLN晶体、第四凹面镜和输出耦合镜;The present invention is achieved in this way, a femtosecond near-infrared laser light source based on an intracavity frequency-doubling optical parametric oscillator, the femtosecond near-infrared laser light source based on an intracavity frequency-doubling optical parametric oscillator includes all solid-state femtosecond laser sources placed in sequence Mode-locked Yb laser, isolator, half-wave plate, focusing lens, first concave mirror, first PPLN crystal, second concave mirror, third concave mirror, second PPLN crystal, fourth concave mirror and output coupling mirror;

所述全固态飞秒锁模Yb激光器,用于产生飞秒脉冲宽度的泵浦激光;The all-solid-state femtosecond mode-locked Yb laser is used to generate a pump laser with a femtosecond pulse width;

所述隔离器,用于隔离从参量振荡器返回的部分锁模激光,避免返回激光干扰Yb振荡器锁模状态,避免返回激光干扰Yb振荡器锁模状态;The isolator is used to isolate the part of the mode-locked laser returning from the parametric oscillator, avoiding returning the laser to interfere with the mode-locking state of the Yb oscillator, and avoiding returning the laser to interfere with the mode-locking state of the Yb oscillator;

所述半波片,用于调整泵浦锁模激光的偏振状态,实现泵浦光、信号光与空闲光的相位匹配,改变泵浦激光的偏振方向;The half-wave plate is used to adjust the polarization state of the pumping mode-locked laser, realize the phase matching of the pumping light, the signal light and the idle light, and change the polarization direction of the pumping laser;

所述聚焦透镜,用于将泵浦锁模激光聚焦到第一PPLN晶体上;The focusing lens is used to focus the pumping mode-locked laser light onto the first PPLN crystal;

所述第一凹面镜和第二凹面镜,用于形成共焦的紧聚焦腔型;The first concave mirror and the second concave mirror are used to form a confocal tight-focus cavity;

所述第一PPLN晶体,位于第一凹面镜与第二凹面镜之间,用于实现高效率参量振荡和波长调谐;The first PPLN crystal is located between the first concave mirror and the second concave mirror, and is used to realize high-efficiency parametric oscillation and wavelength tuning;

所述第三凹面镜和第四凹面镜,用于形成共焦结构,以减小第二PPLN晶体上的光斑大小,其中第四凹面镜还起到按原路返回反射参量信号光,用于构成参量谐振腔的一个端镜并输出全部的倍频光的作用;The third concave mirror and the fourth concave mirror are used to form a confocal structure to reduce the spot size on the second PPLN crystal, wherein the fourth concave mirror also plays the role of returning and reflecting the parametric signal light in the original way, for It constitutes an end mirror of the parametric resonant cavity and outputs all frequency-doubled light;

所述第二PPLN晶体,位于第三凹面镜与第四凹面镜之间,用于实现高效率倍频和波长调谐;The second PPLN crystal is located between the third concave mirror and the fourth concave mirror, and is used to realize high-efficiency frequency doubling and wavelength tuning;

所述输出镜,用于将输出信号光放置在一个一维精密平移台上。The output mirror is used to place the output signal light on a one-dimensional precision translation stage.

进一步,所述全固态飞秒锁模Yb激光器为LD泵浦的Yb掺杂增益介质的半导体可饱和吸收镜被动锁模飞秒振荡器,中心波长在1μm附近,泵浦激光的输出平均功率大于500mW,脉冲宽度小于300fs、重复频率约为80MHz。Further, the all-solid-state femtosecond mode-locked Yb laser is a semiconductor saturable absorber mirror passively mode-locked femtosecond oscillator of a Yb-doped gain medium pumped by LD, with a center wavelength around 1 μm, and the output average power of the pump laser is greater than 500mW, pulse width less than 300fs, repetition frequency about 80MHz.

进一步,所述聚焦透镜两面镀有对泵浦激光波长增透的介质膜,焦距为100mm或75mm。Further, both sides of the focusing lens are coated with a dielectric film that is anti-reflective to the pump laser wavelength, and the focal length is 100mm or 75mm.

进一步,所述第一凹面镜和第二凹面镜的一面镀有1000nm~1100nm的增透膜,另一面镀有1400nm~1800nm的高反膜,曲率半径为R=100mm。Further, one side of the first concave mirror and the second concave mirror is coated with an anti-reflection coating of 1000nm-1100nm, and the other side is coated with a high-reflection coating of 1400nm-1800nm, and the radius of curvature is R=100mm.

进一步,所述第一PPLN晶体为掺杂5%MgO的周期极化铌酸锂晶体,通光截面为1mm×8mm,通光长度为1mm,有七个极化周期,分别为28/28.5、29/29.5/30/30.5/31m,每极化周期的长度为1mm、两个极化周期之间的间隔为0.2mm,晶体两端各有0.1mm的未极化区;晶体两通光面分别镀有对1000nm~1100nm/1400nm~1900nm/2300nm~4000nm的增透膜。Further, the first PPLN crystal is a periodically poled lithium niobate crystal doped with 5% MgO, with a cross-section of 1 mm×8 mm, a length of 1 mm, and seven polarization periods, respectively 28/28.5, 29/29.5/30/30.5/31m, the length of each polarization period is 1mm, the interval between two polarization periods is 0.2mm, there are 0.1mm unpolarized areas at both ends of the crystal; They are respectively coated with anti-reflection coatings for 1000nm~1100nm/1400nm~1900nm/2300nm~4000nm.

进一步,所述第三凹面镜和第四凹面镜的一面镀有700nm~900nm的增透膜,另一面镀有1400nm~1800nm的高反膜,曲率半径为R=100mm;Further, one side of the third concave mirror and the fourth concave mirror is coated with an antireflection coating of 700nm to 900nm, and the other side is coated with a high reflection coating of 1400nm to 1800nm, and the radius of curvature is R=100mm;

所述第二PPLN晶体为掺杂5%MgO的周期极化铌酸锂晶体,通光截面为1mm×6mm,通光长度为1mm,有五个极化周期,分别为19.5/19.7/19.9/20.1/20.3m,每极化周期的长度为1mm、两个极化周期之间的间隔为0.2mm,两端各有0.1mm的未极化区;两通光面分别镀有对700nm~900nm/1400nm~1900nm的增透膜;The second PPLN crystal is a periodically poled lithium niobate crystal doped with 5% MgO, with a light cross-section of 1mm×6mm, a light length of 1mm, and five polarization periods, respectively 19.5/19.7/19.9/ 20.1/20.3m, the length of each polarization period is 1mm, the interval between two polarization periods is 0.2mm, and there are 0.1mm unpolarized areas at both ends; /1400nm~1900nm AR coating;

所述输出镜面向谐振腔内的一面镀有在信号光波段具有输出耦合率的介质膜,另一面镀有信号光波段的增透介质膜。The side of the output mirror facing the inside of the resonant cavity is coated with a dielectric film with an output coupling rate in the signal light band, and the other side is coated with an anti-reflection dielectric film in the signal light band.

本发明的另一目的在于提供一种利用基于腔内倍频光学参量振荡器飞秒近红外激光光源产生飞秒近红外激光的方法,所述产生飞秒近红外激光的方法包括:Another object of the present invention is to provide a method for generating femtosecond near-infrared laser light using a femtosecond near-infrared laser source based on an intracavity frequency-doubling optical parametric oscillator. The method for generating femtosecond near-infrared laser includes:

全固态飞秒锁模Yb激光器产生飞秒脉冲宽度的泵浦激光,通过光学隔离器和半波片后,经聚焦透镜聚焦进入第一PPLN晶体中;The all-solid-state femtosecond mode-locked Yb laser generates a femtosecond pulse width pump laser, which passes through an optical isolator and a half-wave plate, and then is focused into the first PPLN crystal by a focusing lens;

第一凹面镜、第二凹面镜、第三凹面镜、第四凹面镜和输出镜构成参量振荡谐振腔;第二PPLN晶体置于第三凹面镜和第四凹面镜形成的共焦结构的中心产生腔内倍频;第一凹面镜和第二凹面镜形成共焦的紧聚焦腔型,使得第一PPLN晶体上的信号光束腰尺寸与泵浦光的束腰尺寸相匹配;The first concave mirror, the second concave mirror, the third concave mirror, the fourth concave mirror and the output mirror constitute a parametric oscillation resonator; the second PPLN crystal is placed in the center of the confocal structure formed by the third concave mirror and the fourth concave mirror Intra-cavity frequency doubling is generated; the first concave mirror and the second concave mirror form a confocal tight-focus cavity, so that the signal beam waist size on the first PPLN crystal matches the beam waist size of the pump light;

第三凹面镜和第四凹面镜形成另一个共焦结构以减小第二PPLN晶体上的信号光光斑尺寸,得到高效率的腔内倍频,产生的倍频光全部通过第四凹面镜输出;The third concave mirror and the fourth concave mirror form another confocal structure to reduce the spot size of the signal light on the second PPLN crystal to obtain high-efficiency frequency doubling in the cavity, and the generated frequency doubling light is all output through the fourth concave mirror ;

输出镜输出一部分信号光,并另一部分信号光原路返回同时实现参量谐振腔的腔长调谐。The output mirror outputs a part of the signal light, and returns the other part of the signal light through the original path to realize the cavity length tuning of the parametric resonant cavity.

本发明的另一目的在于提供一种利用所述基于腔内倍频光学参量振荡器飞秒近红外激光光源的激光雷达。Another object of the present invention is to provide a laser radar using the femtosecond near-infrared laser light source based on an intracavity frequency doubling optical parametric oscillator.

本发明的另一目的在于提供一种利用所述基于腔内倍频光学参量振荡器飞秒近红外激光光源的超快光通信。Another object of the present invention is to provide an ultrafast optical communication using the femtosecond near-infrared laser light source based on an intracavity frequency doubling optical parametric oscillator.

本发明的另一目的在于提供一种利用所述基于腔内倍频光学参量振荡器飞秒近红外激光光源的超快光谱学。Another object of the present invention is to provide an ultrafast spectroscopy using the femtosecond near-infrared laser light source based on the intracavity frequency doubling optical parametric oscillator.

本发明提供的基于腔内倍频光学参量振荡器飞秒近红外激光光源及方法,利用全固态锁模飞秒Yb激光器输出功率大、结构紧凑、成本低的优点,可以方便地实现波长在1.4-1.8μm(信号光)以及0.7-0.9μm(倍频光)连续可调谐的相干飞秒近红外激光;相比于传统的基于锁模钛宝石激光器产生0.7-0.9μm的近红外激光光源。本发明提供的基于腔内倍频光学参量振荡器的飞秒近红外光源具有结构简单、性能稳定、价格低廉等优势,较好的解决了现有的飞秒激光器存在的结构不紧凑、价格较高、波长不能连续可调的问题。The femtosecond near-infrared laser source and method based on the intracavity frequency doubling optical parametric oscillator provided by the present invention can conveniently realize the wavelength at 1.4 - 1.8μm (signal light) and 0.7-0.9μm (frequency doubled light) continuously tunable coherent femtosecond near-infrared laser; compared to the traditional mode-locked Ti:Sapphire laser to generate 0.7-0.9μm near-infrared laser light source. The femtosecond near-infrared light source based on the intracavity frequency-doubling optical parametric oscillator provided by the present invention has the advantages of simple structure, stable performance, and low price, and better solves the problems of existing femtosecond lasers such as uncompact structure and relatively low price. The problem that the height and wavelength cannot be continuously adjusted.

附图说明Description of drawings

图1是本发明实施例提供的基于腔内倍频光学参量振荡器飞秒近红外激光光源结构示意图;Fig. 1 is a schematic structural diagram of a femtosecond near-infrared laser light source based on an intracavity frequency doubling optical parametric oscillator provided by an embodiment of the present invention;

图2是本发明实施例提供的信号光波长调谐的示意图;FIG. 2 is a schematic diagram of signal light wavelength tuning provided by an embodiment of the present invention;

图3是本发明实施例提供的信号光功率与波长的关系的示意图;3 is a schematic diagram of the relationship between signal optical power and wavelength provided by an embodiment of the present invention;

图4是本发明实施例提供的倍频光波长调谐的示意图;Fig. 4 is a schematic diagram of wavelength tuning of frequency-doubled light provided by an embodiment of the present invention;

图5是本发明实施例提供的采用强度自相关仪测得的输出信号光脉冲宽度的示意图;5 is a schematic diagram of the output signal optical pulse width measured by an intensity autocorrelator provided by an embodiment of the present invention;

图6是本发明实施例提供的采用强度自相关仪测得的输出倍频光脉冲宽度的示意图;Fig. 6 is a schematic diagram of the output frequency-doubled light pulse width measured by an intensity autocorrelator provided by an embodiment of the present invention;

图中:1、全固态飞秒锁模Yb激光器;2、隔离器;3、半波片;4、聚焦透镜;5、第一凹面镜;6、第一PPLN晶体;7、第二凹面镜;8、第三凹面镜;9、第二PPLN晶体;10、第四凹面镜;11、输出耦合镜。In the figure: 1. All-solid-state femtosecond mode-locked Yb laser; 2. Isolator; 3. Half-wave plate; 4. Focusing lens; 5. The first concave mirror; 6. The first PPLN crystal; 7. The second concave mirror ; 8, the third concave mirror; 9, the second PPLN crystal; 10, the fourth concave mirror; 11, the output coupling mirror.

具体实施方式detailed description

为了使本发明的目的、技术方案及优点更加清楚明白,以下结合实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。In order to make the object, technical solution and advantages of the present invention more clear, the present invention will be further described in detail below in conjunction with the examples. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

本发明的基于腔内倍频光学参量振荡器产生飞秒近红外激光光源,可以输出波长在1.4μm~1.8μm以及0.7μm~0.9μm连续可调谐的相干飞秒近红外激光,该飞秒光源在激光雷达、生物成像、超快光谱学、超快光通信等领域具有重要的潜在应用。The femtosecond near-infrared laser light source generated by the intracavity frequency-doubling optical parametric oscillator of the present invention can output continuously tunable coherent femtosecond near-infrared lasers with wavelengths of 1.4 μm to 1.8 μm and 0.7 μm to 0.9 μm. The femtosecond light source It has important potential applications in lidar, biological imaging, ultrafast spectroscopy, ultrafast optical communication and other fields.

下面结合附图1对本发明的应用原理作详细的描述。The application principle of the present invention will be described in detail below in conjunction with FIG. 1 .

如图1所示,本发明实施例的基于腔内倍频光学参量振荡器飞秒近红外激光光源主要由:全固态飞秒锁模Yb激光器1、隔离器2、半波片3、聚焦透镜4、第一凹面镜5、第一PPLN晶体6、第二凹面镜7、第三凹面镜8、第二PPLN晶体9、第四凹面镜10、和输出耦合镜11组成。As shown in Figure 1, the femtosecond near-infrared laser light source based on the intracavity frequency doubling optical parametric oscillator in the embodiment of the present invention is mainly composed of: an all-solid-state femtosecond mode-locked Yb laser 1, an isolator 2, a half-wave plate 3, and a focusing lens 4. A first concave mirror 5, a first PPLN crystal 6, a second concave mirror 7, a third concave mirror 8, a second PPLN crystal 9, a fourth concave mirror 10, and an output coupling mirror 11.

全固态飞秒锁模Yb激光器1,为一台LD泵浦的Yb掺杂增益介质的半导体可饱和吸收镜(SESAM)被动锁模飞秒振荡器,中心波长在1μm附近,根据Yb增益介质的不同,中心波长有所不同,泵浦激光的输出平均功率大于500mW,脉冲宽度小于300fs、重复频率约为80MHz。All-solid-state femtosecond mode-locked Yb laser 1 is a semiconductor saturable absorber mirror (SESAM) passively mode-locked femtosecond oscillator pumped by an LD-pumped Yb-doped gain medium. The center wavelength is around 1 μm. According to the Yb gain medium Different, the central wavelength is different, the average output power of the pump laser is greater than 500mW, the pulse width is less than 300fs, and the repetition frequency is about 80MHz.

隔离器2,用于隔离从参量振荡器返回的部分锁模激光,避免返回激光干扰Yb振荡器锁模状态。The isolator 2 is used to isolate part of the mode-locked laser returning from the parametric oscillator, so as to prevent the returning laser from interfering with the mode-locking state of the Yb oscillator.

半波片3,用于调整泵浦锁模激光的偏振状态,以实现泵浦光、信号光与空闲光的相位匹配。The half-wave plate 3 is used to adjust the polarization state of the pump mode-locked laser light, so as to realize the phase matching of the pump light, the signal light and the idle light.

聚焦透镜4,用于将泵浦锁模激光聚焦到第一PPLN晶体上,透镜两面镀有对泵浦激光波长增透的介质膜,焦距为100mm或75mm。The focusing lens 4 is used to focus the pumping mode-locked laser light onto the first PPLN crystal. The two sides of the lens are coated with a dielectric film that is anti-reflective to the wavelength of the pumping laser light, and the focal length is 100mm or 75mm.

第一凹面镜5和第二凹面镜7,用于形成共焦的紧聚焦腔型,使得第一PPLN晶体上的信号光束腰尺寸与泵浦光的束腰尺寸相匹配,实现高的参量转换效率;两凹面镜均镀1000nm~1100nm的增透膜(R<3%)以及对1400nm~1800nm(R>99.8%)的高反膜,曲率半径为R=100mm。The first concave mirror 5 and the second concave mirror 7 are used to form a confocal tight-focus cavity, so that the signal beam waist size on the first PPLN crystal matches the beam waist size of the pump light to achieve high parametric Conversion efficiency: Both concave mirrors are coated with antireflection coating (R<3%) of 1000nm~1100nm and high reflection coating of 1400nm~1800nm (R>99.8%), and the radius of curvature is R=100mm.

第一PPLN晶体6,为掺杂5%MgO的周期极化铌酸锂晶体,晶体通光截面为1mm×8mm,通光长度为1mm,晶体上面有七个极化周期,分别为28/28.5/29.5/30/30.5/31m,每极化周期的长度为1mm、两个极化周期之间的间隔为0.2mm,晶体两端各有0.1mm的未极化区;晶体两通光面分别镀有对1000nm~1100nm(R<1%)/1400nm~1900nm(R<1%)/2300nm~4000nm(R<10%)的增透膜。晶体放置在一个五维平移台上,可以微调方位角和XYZ方向位置,实现高效率参量振荡和波长调谐。The first PPLN crystal 6 is a periodically poled lithium niobate crystal doped with 5% MgO. The crystal light cross section is 1mm×8mm, the light length is 1mm, and there are seven polarization periods on the crystal, which are 28/28.5 /29.5/30/30.5/31m, the length of each polarization period is 1mm, the interval between two polarization periods is 0.2mm, and there are 0.1mm unpolarized regions at both ends of the crystal; Coated with antireflection coating for 1000nm~1100nm(R<1%)/1400nm~1900nm(R<1%)/2300nm~4000nm(R<10%). The crystal is placed on a five-dimensional translation stage, which can fine-tune the azimuth and XYZ direction position to achieve high-efficiency parametric oscillation and wavelength tuning.

第三凹面镜8和第四凹面镜10,用于形成共焦结构,使得第二PPLN晶体上的信号光束腰尽量小,实现高的腔内倍频效率。两凹面镜均镀有700nm~900nm的增透膜(R<3%)以及对1400nm~1800nm(R>99.8%)的高反膜,曲率半径为R=100mm。The third concave mirror 8 and the fourth concave mirror 10 are used to form a confocal structure so that the signal beam waist on the second PPLN crystal is as small as possible to achieve high intracavity frequency doubling efficiency. The two concave mirrors are coated with an anti-reflection coating of 700nm-900nm (R<3%) and a high-reflection coating of 1400nm-1800nm (R>99.8%), and the radius of curvature is R=100mm.

第二PPLN晶体9,为一块掺杂5%MgO的周期极化铌酸锂晶体,晶体通光截面为1mm×6mm,通光长度为1mm,晶体上面有五个极化周期,分别为19.5/19.7/19.9/20.1/20.3m,每极化周期的长度为1mm、两个极化周期之间的间隔为0.2mm,晶体两端各有0.1mm的未极化区;晶体两通光面分别镀有对700nm~900nm(R<1%)/1400nm~1900nm(R<1%)的增透膜;晶体放置在一个五维平移台上,可以微调方位角和XYZ方向位置,实现高效率倍频和波长调谐。The second PPLN crystal 9 is a periodically poled lithium niobate crystal doped with 5% MgO. The crystal cross-section is 1mm×6mm, and the length of the light is 1mm. There are five polarization periods on the crystal, respectively 19.5/ 19.7/19.9/20.1/20.3m, the length of each polarization period is 1mm, the interval between two polarization periods is 0.2mm, and there are 0.1mm unpolarized areas at both ends of the crystal; Coated with anti-reflection coating for 700nm~900nm (R<1%)/1400nm~1900nm (R<1%); the crystal is placed on a five-dimensional translation stage, which can fine-tune the azimuth and XYZ direction position to achieve high efficiency times frequency and wavelength tuning.

输出镜11,1220nm~1750nm的输出率为2%,用于输出信号光放置在一个一维精密平移台上面,可以精密改变参量谐振腔的腔长,实现与Yb谐振腔的腔长匹配。The output mirror 11, with an output rate of 2% at 1220nm to 1750nm, is used to output signal light and is placed on a one-dimensional precision translation stage, which can precisely change the cavity length of the parametric resonant cavity to match the cavity length of the Yb resonant cavity.

下面结合具体实施例对本发明的应用原理作进一步描述。The application principle of the present invention will be further described below in conjunction with specific embodiments.

本发明的具体实施例:Specific embodiments of the present invention:

在图1中,全固态飞秒锁模Yb激光器1,用于产生飞秒脉冲宽度的泵浦激光,通过光学隔离器2和半波片3后,经聚焦透镜4聚焦进入第一PPLN晶体6中;第一凹面镜5、第二凹面镜7、第三凹面镜8、第四凹面镜10和输出镜11构成参量振荡谐振腔;第二PPLN晶体9置于第三凹面镜8和第四凹面镜10形成的共焦结构的中心用于产生腔内倍频;其中第一凹面镜5和第二凹面镜7形成共焦的紧聚焦腔型,使得第一PPLN晶体6上的信号光束腰尺寸与泵浦光的束腰尺寸相匹配;第三凹面镜8和第四凹面镜10形成另一个共焦结构以减小第二PPLN晶体9上的信号光光斑尺寸,得到高效率的腔内倍频,产生的倍频光全部通过第四凹面镜10输出;输出镜11输出一部分信号光,并另一部分信号光原路返回同时可以实现参量谐振腔的腔长调谐;在满足相位匹配、腔长匹配、稳定腔条件和达到信号光振荡阈值的条件下,该光学参量振荡器可以实现稳定工作,信号光在参量谐振腔内往返传播,并每次到达输出耦合镜11时耦合输出一部分信号光能量,到达第二PPLN晶体9时产生倍频光,从第四凹面镜10输出。In Fig. 1, an all-solid-state femtosecond mode-locked Yb laser 1 is used to generate a pump laser with a femtosecond pulse width. After passing through an optical isolator 2 and a half-wave plate 3, it is focused by a focusing lens 4 and enters the first PPLN crystal 6. Middle; the first concave mirror 5, the second concave mirror 7, the third concave mirror 8, the fourth concave mirror 10 and the output mirror 11 constitute a parametric oscillation resonant cavity; the second PPLN crystal 9 is placed in the third concave mirror 8 and the fourth The center of the confocal structure formed by the concave mirror 10 is used to generate frequency doubling in the cavity; wherein the first concave mirror 5 and the second concave mirror 7 form a confocal tight-focus cavity, so that the signal beam on the first PPLN crystal 6 The waist size matches the beam waist size of the pump light; the third concave mirror 8 and the fourth concave mirror 10 form another confocal structure to reduce the signal light spot size on the second PPLN crystal 9, and obtain a high-efficiency cavity Internal frequency doubling, the generated frequency doubling light is all output through the fourth concave mirror 10; the output mirror 11 outputs a part of the signal light, and the other part of the signal light returns to the original path, and at the same time, the cavity length tuning of the parametric resonator can be realized; when the phase matching, Under the conditions of cavity length matching, stable cavity conditions and reaching the signal light oscillation threshold, the optical parametric oscillator can realize stable operation, the signal light propagates back and forth in the parametric resonant cavity, and couples out a part of the signal every time it reaches the output coupling mirror 11 When the light energy reaches the second PPLN crystal 9 , frequency-doubled light is generated, which is output from the fourth concave mirror 10 .

根据同步泵浦的飞秒OPO的物理原理,可以通过以下方法调谐信号光的波长:1、改变泵浦光的波长;2、改变PPLN晶体的极化周期;3、改变PPLN晶体的温度;4、改变OPO谐振腔的腔长。通过以上步骤,可以实现信号光运转在1.4-1.8m连续可调谐的相干飞秒近红外激光输出,在得到可调谐信号光的同时,相应的改变第二PPLN晶体9的极化周期或温度,可同时得到相应的0.7-0.9um连续可调谐的相干飞秒近红外激光输出。According to the physical principle of synchronously pumped femtosecond OPO, the wavelength of the signal light can be tuned by the following methods: 1. Changing the wavelength of the pumping light; 2. Changing the polarization period of the PPLN crystal; 3. Changing the temperature of the PPLN crystal; 4. , Change the cavity length of the OPO resonant cavity. Through the above steps, the coherent femtosecond near-infrared laser output with signal light running at 1.4-1.8m can be continuously tunable, and while the tunable signal light is obtained, the polarization period or temperature of the second PPLN crystal 9 can be changed accordingly, The corresponding 0.7-0.9um continuously tunable coherent femtosecond near-infrared laser output can be obtained at the same time.

全固态飞秒锁模Yb激光器的激光增益介质是Yb:LYSO晶体,输出平均功率为2W,脉冲宽度300fs,中心波长为1042nm,重复频率为**MHz。The laser gain medium of the all-solid-state femtosecond mode-locked Yb laser is Yb:LYSO crystal, the average output power is 2W, the pulse width is 300fs, the center wavelength is 1042nm, and the repetition frequency is **MHz.

本发明通过调节OPO谐振腔的腔长,得到了信号光1428nm~1763nm,倍频光767nm~874nm的调谐范围;信号光光谱调谐曲线如图2所示。输出功率随信号光波长不同在100mW~400mW之间,如图3所示;倍频光的调谐曲线如图4所示;利用商用的强度自相关仪测得的信号光和倍频光的的典型脉冲宽度分别为465fs和313fs,如图5和图6所示,对应的信号光和倍频光的波长在1511nm和792nm。In the present invention, by adjusting the cavity length of the OPO resonant cavity, the tuning range of signal light from 1428nm to 1763nm and frequency doubled light from 767nm to 874nm is obtained; the signal light spectrum tuning curve is shown in FIG. 2 . The output power is between 100mW and 400mW depending on the wavelength of the signal light, as shown in Figure 3; the tuning curve of the frequency-doubled light is shown in Figure 4; Typical pulse widths are 465fs and 313fs, respectively, as shown in Figure 5 and Figure 6, and the corresponding wavelengths of signal light and frequency-doubled light are 1511nm and 792nm.

以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention should be included in the protection of the present invention. within range.

Claims (10)

1. one kind based on intracavity frequency doubling optical parametric oscillator femtosecond near-infrared laser light source, it is characterized in that, describedly comprise all solid state femtosecond locked mode Yb laser, isolator, half-wave plate, condenser lens, the first concave mirror, a PPLN crystal, the second concave mirror, the 3rd concave mirror, the 2nd PPLN crystal, the 4th concave mirror and the output coupling mirror placed successively based on intracavity frequency doubling optical parametric oscillator femtosecond near-infrared laser light source;
Described all solid state femtosecond locked mode Yb laser, for generation of the pumping laser of femto-second pulse duration;
Described isolator, for isolating the part mode-locked laser returned from parametric oscillator, avoids return laser light to disturb Yb oscillator mode-lock status;
Described half-wave plate, for adjusting the polarization state of pumping mode-locked laser, realizes the phase matched of pump light, flashlight and idle light;
Described condenser lens, for focusing on a PPLN crystal by pumping mode-locked laser;
Described first concave mirror and the second concave mirror, for the formation of confocal tight focusing lumen type;
A described PPLN crystal, is placed in the middle of the first concave mirror and the second concave mirror, for realizing high efficiency parametric oscillation and wavelength tuning;
Described 3rd concave mirror and the 4th concave mirror, for the formation of confocal arrangement;
Described 2nd PPLN crystal, is placed in the middle of the 3rd concave mirror and the 4th concave mirror, for realizing efficient frequency doubling and wavelength tuning;
Described outgoing mirror, for being placed on an one-dimensional precise translation stage by output signal light.
2. as claimed in claim 1 based on intracavity frequency doubling optical parametric oscillator femtosecond near-infrared laser light source, it is characterized in that, described all solid state femtosecond locked mode Yb laser is the semiconductor saturable absorbing mirror passive mode locking femtosecond oscillator of the Yb doping gain media of LD pumping, centre wavelength is near 1 μm, the output average power of pumping laser is greater than 500mW, and pulse duration is less than 300fs, repetition rate is 80MHz.
3. as claimed in claim 1 based on intracavity frequency doubling optical parametric oscillator femtosecond near-infrared laser light source, it is characterized in that, described condenser lens two sides is coated with the anti-reflection deielectric-coating of pumping laser wavelength, and focal length is 100mm or 75mm.
4. as claimed in claim 1 based on intracavity frequency doubling optical parametric oscillator femtosecond near-infrared laser light source, it is characterized in that, the one side of described first concave mirror and the second concave mirror is coated with the anti-reflection film of 1000nm ~ 1100nm, another side is coated with the high-reflecting film of 1400nm ~ 1800nm, and radius of curvature is R=100mm.
5. as claimed in claim 1 based on intracavity frequency doubling optical parametric oscillator femtosecond near-infrared laser light source, it is characterized in that, a described PPLN crystal is the periodically poled lithium niobate crystal of doping 5%MgO, logical optical cross-section is 1mm × 8mm, logical light length is 1mm, has seven polarization cycles, is respectively 28/28.5/29/29.5/30/30.5/31m, the length of every polarization cycle is 1mm, be spaced apart 0.2mm between two polarization cycles, and respectively there is the non-polarized area of 0.1mm at crystal two ends; Crystal two leads to light face and is coated with anti-reflection film to 1000nm ~ 1100nm/1400nm ~ 1900nm/2300nm ~ 4000nm respectively.
6. as claimed in claim 1 based on intracavity frequency doubling optical parametric oscillator femtosecond near-infrared laser light source, it is characterized in that, the one side of described 3rd concave mirror and the 4th concave mirror is coated with the anti-reflection film of 700nm ~ 900nm, another side is coated with the high-reflecting film of 1400nm ~ 1800nm, and radius of curvature is R=100mm;
Described 2nd PPLN crystal is the periodically poled lithium niobate crystal of doping 5%MgO, logical optical cross-section is 1mm × 6mm, logical light length is 1mm, there are five polarization cycles, be respectively 19.5/19.7/19.9/20.1/20.3m, the length of every polarization cycle is 1mm, be spaced apart 0.2mm between two polarization cycles, and respectively there is the non-polarized area of 0.1mm at two ends; Two logical light faces are coated with the anti-reflection film to 700nm ~ 900nm/1400nm ~ 1900nm respectively;
Described outgoing mirror is coated with towards the one side in resonant cavity has at flashlight wave band the deielectric-coating exporting coupling efficiency, and another side is coated with the anti-reflection deielectric-coating of flashlight wave band.
7. utilize the method producing femtosecond near-infrared laser based on intracavity frequency doubling optical parametric oscillator femtosecond near-infrared laser light source, it is characterized in that, the method for described generation femtosecond near-infrared laser comprises:
All solid state femtosecond locked mode Yb laser produces the pumping laser of femto-second pulse duration, and after optical isolator and half-wave plate, line focus lens focus enters in a PPLN crystal;
First concave mirror, the second concave mirror, the 3rd concave mirror, the 4th concave mirror and outgoing mirror form parametric oscillation resonant cavity; The center that 2nd PPLN crystal is placed in the confocal arrangement of the 3rd concave mirror and the formation of the 4th concave mirror produces intracavity frequency doubling; First concave mirror and the second concave mirror form confocal tight focusing lumen type, and the beam waist of the flashlight beam waist on a PPLN crystal and pump light is matched;
3rd concave mirror and the 4th concave mirror form another confocal arrangement to reduce the flashlight spot size on the 2nd PPLN crystal, obtain high efficiency intracavity frequency doubling, and the frequency doubled light of generation is all exported by the 4th concave mirror;
Outgoing mirror exports a part of flashlight, and to return to the chamber simultaneously realizing parametric reasonance chamber long tuning on another part flashlight former road.
8. one kind utilizes the laser radar based on intracavity frequency doubling optical parametric oscillator femtosecond near-infrared laser light source described in claim 1-7 any one.
9. one kind utilizes the ultrafast optical communication based on intracavity frequency doubling optical parametric oscillator femtosecond near-infrared laser light source described in claim 1-7 any one.
10. one kind utilizes the Ultrafast spectrum based on intracavity frequency doubling optical parametric oscillator femtosecond near-infrared laser light source described in claim 1-7 any one.
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CN105428988A (en) * 2016-01-04 2016-03-23 中国科学院物理研究所 Femtosecond optical parameter oscillator of femtosecond green light synchronous pump
CN107104361B (en) * 2017-06-19 2023-05-05 中科和光(天津)应用激光技术研究所有限公司 Miniaturized blue laser with direct frequency multiplication of semiconductor laser
CN107104361A (en) * 2017-06-19 2017-08-29 中科和光(天津)应用激光技术研究所有限公司 A kind of miniaturization blue laser of semiconductor laser direct frequency doubling
CN107490461A (en) * 2017-07-14 2017-12-19 中国航发沈阳发动机研究所 Periodically adjustable frequency-doubled signal generation method
CN107978961A (en) * 2017-12-18 2018-05-01 西安电子科技大学 Femto-second laser synchronous pump high power broadband degeneracy Femtosecond OPO
CN107994453A (en) * 2017-12-29 2018-05-04 西南大学 The Yb of laser diode-pumped tungsten disulfide tune Q:GYSO all solid state lasers
CN107994453B (en) * 2017-12-29 2024-05-14 西南大学 Tungsten disulfide phosphor QYb of laser diode pump: GYSO all-solid-state laser
CN108567442A (en) * 2018-04-27 2018-09-25 周新福 A kind of cardiovascular intervention angiographic imaging system
CN112640231A (en) * 2018-09-20 2021-04-09 烟台龙驰光电技术有限公司 Near-infrared laser and laser generation method
CN111446613A (en) * 2019-01-16 2020-07-24 中国科学院物理研究所 High-contrast ultrafast laser generation device and corresponding method
CN111697425A (en) * 2020-06-05 2020-09-22 中国科学院苏州生物医学工程技术研究所 Human eye safety wave band cascade frequency doubling optical parametric oscillator
WO2022246967A1 (en) * 2021-05-27 2022-12-01 长春理工大学 Multi-wavelength mid-infrared laser pulse serial cavity emptying laser based on nd:mgo:apln crystal
CN113451872A (en) * 2021-06-28 2021-09-28 长春理工大学 Quick start intermediate infrared laser and corresponding polycrystal switching device
CN119726338A (en) * 2025-03-03 2025-03-28 西安电子科技大学 A high-power multi-GHz repetition rate femtosecond optical parametric oscillator
CN119726338B (en) * 2025-03-03 2025-05-06 西安电子科技大学 Femtosecond optical parametric oscillator with high power and multiple GHz repetition frequency

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