CN104897078B - A kind of measuring method of the ultra-precise cutting finished surface three-dimensional micro-morphology based on visible reflectance spectrum characteristic - Google Patents
A kind of measuring method of the ultra-precise cutting finished surface three-dimensional micro-morphology based on visible reflectance spectrum characteristic Download PDFInfo
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Abstract
一种基于可见光反射光谱特性的超精密车削加工表面三维微观形貌的测量方法，步骤如下：准直透镜对可见光光源输出的入射光进行调制，使其成为准直光；准直光经过线性衰减片，再经过小孔光阑后，中心光斑照射到装卡在回转工作台上的被测工件表面；光斑在被测工件表面发生衍射现象，被色散开的单色波会按照不同波长和级次依次排开，形成光谱；光谱通过透镜后，反射光谱被调制为准直光，通过安装在直线位移台上的光纤测头，在不同扫描位置对各个波长的±1级光谱进行测量，测量结果输入到光谱仪中；利用平面反射光栅方程对测量结果进行计算分析，得到被测工件表面三维微观形貌信息。本发明实现了非接触、无破坏地定量测量，而且光路容易调整，测量精度高。A method for measuring the three-dimensional microscopic topography of an ultra-precision turning surface based on the reflection spectrum characteristics of visible light. The steps are as follows: the collimating lens modulates the incident light output by the visible light source to make it collimated; the collimated light is linearly attenuated After passing through the small hole diaphragm, the central light spot is irradiated on the surface of the workpiece to be tested which is clamped on the rotary table; the light spot is diffracted on the surface of the workpiece to be tested, and the monochromatic waves dispersed by the dispersion will be separated according to different wavelengths and The stages are arranged in sequence to form a spectrum; after the spectrum passes through the lens, the reflected spectrum is modulated into collimated light, and the ±1-order spectrum of each wavelength is measured at different scanning positions through the optical fiber probe installed on the linear displacement stage. The measurement results are input into the spectrometer; the measurement results are calculated and analyzed by using the plane reflection grating equation, and the three-dimensional microscopic topography information of the surface of the measured workpiece is obtained. The invention realizes non-contact and non-destructive quantitative measurement, and the optical path is easy to adjust, and the measurement accuracy is high.
Description
技术领域technical field
本发明属于非接触光学精密测量技术领域，涉及一种通过测量已加工表面的可见光反射光谱特性进而实现对表面微观形貌测量的方法。The invention belongs to the technical field of non-contact optical precision measurement, and relates to a method for measuring the surface microscopic topography by measuring the visible light reflection spectrum characteristics of a processed surface.
背景技术Background technique
近年来，随着航空航天、激光惯性约束核聚变、微光学系统等高科技领域的快速发展，对零部件的表面质量提出了越来越高的要求，它关系到零部件的使用性能和可靠性，因此，表面微观形貌的测量对于评价表面质量具有重要意义。In recent years, with the rapid development of high-tech fields such as aerospace, laser inertial confinement fusion, and micro-optical systems, higher and higher requirements have been placed on the surface quality of parts, which is related to the performance and reliability of parts. Therefore, the measurement of surface microscopic topography is of great significance for evaluating surface quality.
超精密车削加工技术是利用天然金刚石刀具在超精密机床上对零件进行加工。超精密车削技术可加工的材料种类很多，包括各种有色金属，如单晶锗、铝合金、黄铜、无氧铜、非电解镍等，还可以加工某些非金属材料，如光学塑料、KDP晶体等，并具有加工效率高、可进行确定性加工、加工表面质量好(表面粗糙度Ra达到纳米级)等优点，因此成为当前国际先进制造领域的研究热点。Ultra-precision turning technology uses natural diamond tools to process parts on ultra-precision machine tools. Ultra-precision turning technology can process many kinds of materials, including various non-ferrous metals, such as single crystal germanium, aluminum alloy, brass, oxygen-free copper, electroless nickel, etc., and can also process some non-metallic materials, such as optical plastics, KDP crystal, etc., and has the advantages of high processing efficiency, deterministic processing, and good surface quality (surface roughness Ra reaches nanometer level), so it has become a research hotspot in the field of international advanced manufacturing.
超精密加工表面微观形貌的测量方法主要包括接触式测量和非接触式测量方法。接触式测量方法又可分为二维和三维触针式测量，常用的测量仪器有表面粗糙度轮廓仪和原子力扫描显微镜。非接触式测量方法主要采用光学法(包括光的散射和干涉原理)和计算机视觉技术。目前这些测量方法均有一定的局限性，例如，接触式测量方法测量速度慢，有可能损伤测量表面，表面粗糙度轮廓仪只能对工件表面进行二维形貌的测量，原子力扫描显微镜可以测量工件的三维形貌，但测量区域受到限制，一般小于100μm。非接触式测量方法测量范围比较小，如白光干涉仪，测量区域只有200μm，对整个待测表面而言具有某种不可靠性；此外，其对测试环境要求高，且在加工现场使用时精度无法保证。The measurement methods of ultra-precision machining surface micro-topography mainly include contact measurement and non-contact measurement methods. Contact measurement methods can be divided into two-dimensional and three-dimensional stylus measurement. Commonly used measurement instruments include surface roughness profilers and atomic force scanning microscopes. Non-contact measurement methods mainly use optical methods (including light scattering and interference principles) and computer vision technology. At present, these measurement methods have certain limitations. For example, the contact measurement method has a slow measurement speed and may damage the measurement surface. The surface roughness profiler can only measure the two-dimensional shape of the workpiece surface, and the atomic force scanning microscope can measure The three-dimensional shape of the workpiece, but the measurement area is limited, generally less than 100μm. The non-contact measurement method has a relatively small measurement range, such as white light interferometer, the measurement area is only 200μm, which has certain unreliability for the entire surface to be measured; Can not guarantee.
发明内容Contents of the invention
本发明的目的是提供一种基于可见光反射光谱特性的超精密车削加工表面三维微观形貌的测量方法，通过测量超精密车削加工表面的可见光反射光谱，实现对工件表面三维微观形貌特征的测量，进而为表面微观形貌的测量与评价提供一种高精度、高效率、可靠稳定的测量手段。The purpose of the present invention is to provide a method for measuring the three-dimensional micro-topography of the ultra-precision turning surface based on the characteristics of the visible light reflection spectrum. By measuring the visible light reflection spectrum of the ultra-precision turning processing surface, the measurement of the three-dimensional micro-topography of the workpiece surface , and then provide a high-precision, high-efficiency, reliable and stable measurement method for the measurement and evaluation of surface microscopic topography.
本发明的目的是通过以下技术方案实现的：The purpose of the present invention is achieved through the following technical solutions:
一种基于可见光反射光谱特性的超精密车削加工表面三维微观形貌的测量方法，包括如下步骤：A method for measuring the three-dimensional micro-topography of an ultra-precision turning surface based on the characteristics of the visible light reflection spectrum, comprising the following steps:
一、可见光光源输出连续而强度均匀的入射光；1. The visible light source outputs incident light with continuous and uniform intensity;
二、准直透镜对可见光光源输出的光谱进行调制，使其成为准直光；2. The collimating lens modulates the spectrum output by the visible light source to make it collimated light;
三、准直光经过线性衰减片，光强会有一定的减弱，再经过小孔光阑后，只有中心光斑通过，照射到装卡在回转工作台上的被测工件表面，光斑的大小由小孔光阑的直径决定；3. After the collimated light passes through the linear attenuation sheet, the light intensity will be weakened to a certain extent. After passing through the aperture diaphragm, only the central light spot passes through and irradiates the surface of the workpiece to be tested on the rotary table. The size of the light spot is determined by The diameter of the aperture diaphragm is determined;
四、光斑在被测工件表面会发生衍射现象，被色散开的单色波会按照不同波长和级次依次排开，形成光谱；4. Diffraction will occur on the surface of the workpiece under test, and the dispersed monochromatic waves will be arranged in sequence according to different wavelengths and orders to form a spectrum;
五、光谱通过透镜后，反射光谱被调制为准直光，通过安装在直线位移台上的光纤测头，在不同扫描位置对各个波长的±1级光谱进行测量，测量结果输入到光谱仪中；5. After the spectrum passes through the lens, the reflected spectrum is modulated into collimated light, and the ±1-order spectrum of each wavelength is measured at different scanning positions through the optical fiber probe installed on the linear displacement stage, and the measurement results are input into the spectrometer;
六、利用光栅方程对测量结果进行计算分析，得到被测工件表面三维微观形貌信息。Sixth, use the grating equation to calculate and analyze the measurement results, and obtain the three-dimensional microscopic topography information of the surface of the measured workpiece.
上述方法中，通过线性衰减片和小孔光阑对准直光的光强和光斑大小进行调整，根据测量环境、不同类型工件以及光谱仪的光强测量范围，线性衰减片把准直光的强度调整在其强度20-80％的范围内，小孔光阑的直径范围为200-1000μm，其中以500μm直径的小孔光阑为宜。In the above method, the light intensity and spot size of the collimated light are adjusted through the linear attenuation film and the aperture diaphragm. According to the measurement environment, different types of workpieces and the light intensity measurement range of the spectrometer, the linear attenuation film adjusts the intensity of the collimated light to Adjust the intensity within the range of 20-80%, and the diameter of the aperture aperture is in the range of 200-1000 μm, wherein the aperture aperture with a diameter of 500 μm is suitable.
上述方法中，工件装卡在回转工作台上，通过回转工作台的转动调整入射角的大小，入射角调整在30°-60°的范围内。In the above method, the workpiece is clamped on the rotary table, and the size of the incident angle is adjusted through the rotation of the rotary table, and the incident angle is adjusted within the range of 30°-60°.
本发明将光学衍射理论应用到超精密车削表面微观形貌测量上。之所以会在表面看到色散现象，是因为已加工表面并不是理想的光滑表面，它会有刀具切削过后残留的纹理，这些特定的纹理相当于平面衍射光栅，对入射光有分光作用。由于入射光为复色光，通过色散系统(如棱镜、光栅)分光之后，被色散开的单色光会按照不同波长和级次依次排开，形成光谱。The invention applies the optical diffraction theory to the measurement of the microscopic topography of the ultra-precision turning surface. The reason why the dispersion phenomenon is seen on the surface is that the machined surface is not an ideal smooth surface, and it will have the texture left after the cutting tool. These specific textures are equivalent to a plane diffraction grating, which has a spectroscopic effect on the incident light. Since the incident light is polychromatic light, after being split by a dispersion system (such as a prism, a grating), the dispersed monochromatic light will be sequentially arranged according to different wavelengths and orders to form a spectrum.
平面反射光栅的方程式为：The equation for a planar reflective grating is:
nλ＝d(sinα±sinβ) (1)。nλ=d(sinα±sinβ) (1).
当衍射光线和入射光线在光栅法线同侧时，为+；当衍射光线和入射光线在光栅法线两侧时，为-；其中：When the diffracted ray and the incident ray are on the same side of the grating normal, it is +; when the diffracted ray and the incident ray are on both sides of the grating normal, it is -; where:
n-光谱级次，n＝0，±1，±2，…；n-spectral order, n=0, ±1, ±2,...;
λ-波长；λ-wavelength;
d-光栅常数；d- grating constant;
α-入射角；α - incident angle;
β-衍射角。β-diffraction angle.
从光栅方程看出，当n＝0时，即零级光谱，衍射角β与波长λ无关，即无分光作用，它的特点是强度最大，但无分光作用；当n＝±1时，为一级光谱，此时，如果波长λ短时，衍射角β小，靠近零级光谱；波长λ长时，衍射角β大，远离零级光谱，实现了分光作用。一级光谱强度大，一般用于分析测定。因此，针对±1级反射光谱，测量不同波长光的强度和衍射角，计算出光栅常数d。光栅常数d就是工件表面微观形貌的横向周期信息，而工件表面微观形貌的横向周期信息是与衍射角相对应，纵向高度信息是与衍射光的强度相对应，通过光谱仪和光纤测头在不同位置的扫描测量，得到不同波长和级次的衍射角和光谱强度，将测量结果代入到光栅方程，计算出工件表面三维形貌的大小。It can be seen from the grating equation that when n=0, that is, the zero-order spectrum, the diffraction angle β has nothing to do with the wavelength λ, that is, there is no spectroscopic effect, and its characteristic is that the intensity is the largest, but there is no spectroscopic effect; when n=±1, it is First-order spectrum, at this time, if the wavelength λ is short, the diffraction angle β is small, close to the zero-order spectrum; when the wavelength λ is long, the diffraction angle β is large, far away from the zero-order spectrum, and the spectroscopic effect is realized. The intensity of the first-order spectrum is large, and it is generally used for analysis and determination. Therefore, the grating constant d is calculated by measuring the intensity and diffraction angle of light of different wavelengths for the ±1st-order reflection spectrum. The grating constant d is the transverse periodic information of the microscopic topography of the workpiece surface, and the transverse periodic information of the microscopic topography of the workpiece surface corresponds to the diffraction angle, and the longitudinal height information corresponds to the intensity of diffracted light. Scanning measurements at different positions can obtain diffraction angles and spectral intensities of different wavelengths and orders, and substitute the measurement results into the grating equation to calculate the size of the three-dimensional topography of the workpiece surface.
本发明与现有测量方法相比，具有如下优点：Compared with the existing measuring method, the present invention has the following advantages:
(1)本发明将可见光的衍射现象和平面反射光栅理论应用在超精密车削表面微观形貌的测量中，实现了非接触、无破坏地定量测量，而且光路容易调整，测量精度高，稳定性好。(1) The present invention applies the diffraction phenomenon of visible light and the plane reflection grating theory to the measurement of the microscopic topography of the ultra-precision turning surface, realizes non-contact, non-destructive quantitative measurement, and the optical path is easy to adjust, with high measurement accuracy and stability it is good.
(2)本发明的测量范围取决于照射在工件表面上的光斑大小，通过调整小孔光阑的孔径，对光斑大小进行调整。(2) The measurement range of the present invention depends on the size of the light spot irradiated on the workpiece surface, and the size of the light spot is adjusted by adjusting the aperture of the pinhole diaphragm.
(3)本发明测量速度快，不需要逐点扫描，使用环境对测量精度影响小，可以在加工现场使用该测量方法。(3) The measurement speed of the present invention is fast, no point-by-point scanning is required, the use environment has little influence on the measurement accuracy, and the measurement method can be used in the processing site.
附图说明Description of drawings
图1为本发明的测量装置整体结构示意图；Fig. 1 is a schematic diagram of the overall structure of the measuring device of the present invention;
图2为平面反射光栅分光原理示意图；Fig. 2 is a schematic diagram of the light splitting principle of a plane reflective grating;
图中：1-可见光光源，2-准直透镜，3-线性衰减片，4-小孔光阑，5-被测工件，6-回转工作台，7-透镜，8-光纤测头，9-光谱仪。In the figure: 1-visible light source, 2-collimating lens, 3-linear attenuation film, 4-aperture aperture, 5-measured workpiece, 6-rotary table, 7-lens, 8-fiber optic probe, 9 -spectrometer.
具体实施方式detailed description
下面结合附图对本发明的技术方案作进一步的说明，但并不局限于此，凡是对本发明技术方案进行修改或者等同替换，而不脱离本发明技术方案的精神和范围，均应涵盖在本发明的保护范围中。The technical solution of the present invention will be further described below in conjunction with the accompanying drawings, but it is not limited thereto. Any modification or equivalent replacement of the technical solution of the present invention without departing from the spirit and scope of the technical solution of the present invention should be covered by the present invention. within the scope of protection.
如图1所示，一种基于可见光反射光谱特性的超精密车削加工表面三维微观形貌的测量装置，由可见光光源1、准直透镜2、线性衰减片3、小孔光阑4、被测工件5、回转工作台6、透镜7、光纤测头8和光谱仪9组成，可见光光源1输出的入射光经准直透镜2调制后成为准直光，准直光依次经线性衰减片3和小孔光阑4后照射到装卡在回转工作台6上的被测工件5表面，在被测工件5表面发生衍射现象，被色散开的单色波会按照不同波长和级次依次排开，形成光谱；反射光谱通过透镜7后变成平行光，光纤测头8对光谱进行测量，测量结果输入到光谱仪9中。As shown in Figure 1, a measurement device for the three-dimensional microscopic topography of an ultra-precision turning surface based on the spectral characteristics of visible light reflection, consists of a visible light source 1, a collimating lens 2, a linear attenuation film 3, a small hole diaphragm 4, and a measured Composed of workpiece 5, rotary table 6, lens 7, fiber optic measuring head 8 and spectrometer 9, the incident light output by visible light source 1 becomes collimated light after being modulated by collimating lens 2, and the collimated light passes through linear attenuation sheet 3 and small After the aperture diaphragm 4 is irradiated to the surface of the workpiece 5 to be measured, which is clamped on the rotary table 6, diffraction occurs on the surface of the workpiece 5 to be measured, and the dispersed monochromatic waves will be arranged in sequence according to different wavelengths and orders. , to form a spectrum; the reflected spectrum becomes parallel light after passing through the lens 7, the optical fiber probe 8 measures the spectrum, and the measurement result is input into the spectrometer 9.
利用上述装置对超精密车削加工表面三维微观形貌进行测量的方法，具体实施步骤如下：The method for measuring the three-dimensional microscopic topography of the ultra-precision turning surface by using the above-mentioned device, the specific implementation steps are as follows:
一、可见光光源1输出连续而强度均匀的入射光，其波长范围为200-1100nm。1. The visible light source 1 outputs incident light with continuous and uniform intensity, and its wavelength range is 200-1100nm.
二、调整准直透镜2的焦距，对入射光进行调制使其成为准直光，保证平行光束照射在被测工件5表面。2. Adjust the focal length of the collimating lens 2, modulate the incident light to make it collimated light, and ensure that the parallel light beam is irradiated on the surface of the workpiece 5 to be measured.
三、根据实际测量环境和被测工件5类型，调整线性衰减片3，将入射光的强度调整为光谱仪9所能测量的强度范围内。3. Adjust the linear attenuation sheet 3 according to the actual measurement environment and the type of the workpiece 5 to be measured, and adjust the intensity of the incident light to be within the intensity range that the spectrometer 9 can measure.
四、通过调整小孔光阑4的直径，改变入射光的光斑大小，相应地调整了测量面积的大小，小孔光阑4的直径范围为200-1000μm，其中以500μm直径的小孔光阑为宜。4. By adjusting the diameter of the pinhole diaphragm 4, the spot size of the incident light is changed, and the size of the measurement area is adjusted accordingly. The diameter range of the pinhole diaphragm 4 is 200-1000 μm, and the diameter of the pinhole diaphragm 4 is 500 μm. It is appropriate.
五、被测工件5装卡在回转工作台6上，通过回转工作台6的转动调整入射角的大小，入射角调整在30°-60°的范围内。被测工件5是由超精密车削加工完成，其表面并不是理想的光滑表面，其表面有刀具切削过后残留的纹理，这些特定的纹理结构相当于平面衍射光栅，入射光在被测工件5表面会发生衍射现象。5. The workpiece 5 to be tested is clamped on the rotary table 6, and the incident angle is adjusted through the rotation of the rotary table 6, and the incident angle is adjusted within the range of 30°-60°. The workpiece 5 under test is processed by ultra-precision turning. Its surface is not an ideal smooth surface. It has textures left after cutting by the tool. These specific texture structures are equivalent to plane diffraction gratings. The incident light is on the surface of the workpiece 5 Diffraction occurs.
六、被色散开的单色波会按照不同波长和级次依次排开，形成光谱；反射光谱通过透镜7后变成平行光，便于测量。6. The dispersed monochromatic waves will be sequentially arranged according to different wavelengths and orders to form a spectrum; the reflected spectrum will become parallel light after passing through the lens 7, which is convenient for measurement.
七、通过安装在直线位移台上的光纤测头8，在不同扫描位置对各个波长的±1级光谱进行测量，测量结果输入到光谱仪9中。利用光栅方程对测量结果进行计算分析，得到光栅常数d。光栅常数d就是工件表面微观形貌的横向周期信息，而光强是与表面微观形貌的纵向高度信息有对应关系，通过在不同位置对反射光谱强度和衍射角的测量，计算出工件表面三维形貌信息，其平面反射光栅分光原理如图2所示。7. Measure ±1-order spectra of each wavelength at different scanning positions through the optical fiber measuring head 8 installed on the linear displacement platform, and the measurement results are input into the spectrometer 9 . Using the grating equation to calculate and analyze the measurement results, the grating constant d is obtained. The grating constant d is the transverse periodic information of the surface micro-topography of the workpiece, and the light intensity corresponds to the longitudinal height information of the surface micro-topography. By measuring the reflection spectrum intensity and diffraction angle at different positions, the three-dimensional surface of the workpiece is calculated. The shape information, and its planar reflective grating spectroscopic principle are shown in Figure 2.
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