CN105154880B - Preparation Technology of TiCN Multilayer Composite Coating on the Surface of Steam Turbine Rotor Groove Milling Cutter - Google Patents
Preparation Technology of TiCN Multilayer Composite Coating on the Surface of Steam Turbine Rotor Groove Milling Cutter Download PDFInfo
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- 238000000576 coating method Methods 0.000 title claims abstract description 92
- 239000011248 coating agent Substances 0.000 title claims abstract description 77
- 239000002131 composite material Substances 0.000 title claims abstract description 23
- 238000003801 milling Methods 0.000 title claims abstract description 21
- 238000002360 preparation method Methods 0.000 title claims abstract description 18
- 238000005516 engineering process Methods 0.000 title claims abstract description 11
- 238000004140 cleaning Methods 0.000 claims abstract description 26
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 19
- 239000011159 matrix material Substances 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 claims description 38
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 24
- 238000005488 sandblasting Methods 0.000 claims description 22
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 16
- 238000005507 spraying Methods 0.000 claims description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 12
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 claims description 6
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 claims description 6
- 239000007789 gas Substances 0.000 claims description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims description 6
- 239000007921 spray Substances 0.000 claims description 6
- 239000012535 impurity Substances 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims description 4
- 230000008021 deposition Effects 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 2
- 238000001816 cooling Methods 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000005728 strengthening Methods 0.000 abstract description 3
- 125000004432 carbon atom Chemical group C* 0.000 abstract description 2
- 238000010276 construction Methods 0.000 abstract 1
- 238000012545 processing Methods 0.000 description 11
- 239000000463 material Substances 0.000 description 9
- 238000005520 cutting process Methods 0.000 description 5
- 238000003754 machining Methods 0.000 description 4
- 230000035882 stress Effects 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000002203 pretreatment Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229910000997 High-speed steel Inorganic materials 0.000 description 1
- 229920003355 Novatec® Polymers 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 239000008199 coating composition Substances 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- RLAWWYSOJDYHDC-BZSNNMDCSA-N lisinopril Chemical compound C([C@H](N[C@@H](CCCCN)C(=O)N1[C@@H](CCC1)C(O)=O)C(O)=O)CC1=CC=CC=C1 RLAWWYSOJDYHDC-BZSNNMDCSA-N 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 238000004663 powder metallurgy Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000005482 strain hardening Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
- C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
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- Chemical & Material Sciences (AREA)
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Abstract
Description
技术领域technical field
本发明涉及一种金属加工刀具涂层，具体涉及一种用于汽轮机转子轮槽加工用的枞树型铣刀表面TiCN多层复合涂层制备工艺，该多层复合涂层采用的是TiN和TiCN的交替涂层形式。The invention relates to a metal processing tool coating, in particular to a preparation process for a TiCN multi-layer composite coating on the surface of a fir tree-shaped milling cutter used for processing steam turbine rotor wheel grooves. The multi-layer composite coating adopts TiN and Alternate coating forms of TiCN.
背景技术Background technique
转子是汽轮机生产中难度最高、周期最长、价格最贵的核心部件之一，其枞树型轮槽形状复杂、尺寸精度高，而且转子目前常用新型材料26NiCrMov145，该材料韧性好，但导热性差，加工硬化较严重，所以加工转子枞树型轮槽时切削热大，排屑差，切削温度高，轮槽刀具磨损严重，刀具寿命低，影响转子加工效率和质量。对于轮槽铣刀，老旧刀具涂层工艺制备方法已不能满足新型转子材料的加工要求。解决转子加工刀具的有效方法是采用先进的纳米多层复合涂层技术，新型涂层应具有更高的硬度、耐磨性、高温稳定性、高的结合强度与抗粘附性，提高加工26NiCrMov145材料的涂层刀具的综合性能和使用寿命。The rotor is one of the most difficult, longest and most expensive core components in the production of steam turbines. Its fir tree-shaped wheel groove has complex shape and high dimensional accuracy, and the rotor is currently commonly used as a new material 26NiCrMov145, which has good toughness but poor thermal conductivity. , The work hardening is serious, so when machining the rotor fir tree groove, the cutting heat is large, the chip removal is poor, the cutting temperature is high, the groove tool wear is serious, the tool life is low, and the rotor processing efficiency and quality are affected. For wheel groove milling cutters, the old tool coating process preparation methods can no longer meet the processing requirements of new rotor materials. An effective way to solve the problem of rotor machining tools is to use advanced nano-multilayer composite coating technology. The new coating should have higher hardness, wear resistance, high temperature stability, high bonding strength and anti-adhesion, and improve processing 26NiCrMov145 The comprehensive performance and service life of the coating tool of the material.
元素掺杂成为当前涂层技术研究热点，通过掺杂第三元素可以显著提高刀具涂层性能。TiN属于间隙相，可对其添加金属或者非金属元素形成三元涂层，TiCN涂层相比较于TiN涂层具有更高的强度、硬度。单一的涂层虽然也具有高的硬度和良好的抗腐蚀性，但是在较高温度下还是容易被氧化而失去原有性能。采用多层复合涂层技术，不仅可以获得单一涂层所具有的性能，而且使涂层的综合性能得到很大程度的提高。多层结构缓和涂层的本征应力，且与刀具基体的结合力也显著提高。采用先进的TiCN纳米多层复合涂层技术可以有效解决26NiCrMov145材料转子加工难题。Element doping has become a hotspot in the current coating technology research, and the performance of tool coatings can be significantly improved by doping the third element. TiN belongs to the interstitial phase, and metal or non-metal elements can be added to it to form a ternary coating. Compared with TiN coating, TiCN coating has higher strength and hardness. Although a single coating also has high hardness and good corrosion resistance, it is still easily oxidized and loses its original performance at higher temperatures. The multi-layer composite coating technology can not only obtain the performance of a single coating, but also greatly improve the comprehensive performance of the coating. The multi-layer structure relieves the intrinsic stress of the coating, and the bonding force with the tool substrate is also significantly improved. Adopting advanced TiCN nanometer multi-layer composite coating technology can effectively solve the problem of 26NiCrMov145 material rotor processing.
发明内容Contents of the invention
为了提高刀具的使用寿命，保证汽轮机转子加工精度，本发明提供一种汽轮机转子轮槽铣刀表面TiCN多层复合涂层制备工艺。该工艺提供一套严格的涂层刀具前处理与后处理方案，前处理有效提高涂层与刀具基体的结合力，解决涂层易剥落等技术问题，后处理通过对涂层表面去液滴等工艺可有效提高加工精度与表面加工质量，使轮槽铣刀表面有更高的硬度、耐磨性和高温稳定性。In order to improve the service life of the cutter and ensure the machining accuracy of the steam turbine rotor, the invention provides a preparation process of a TiCN multilayer composite coating on the surface of the steam turbine rotor groove milling cutter. This process provides a set of strict pre-treatment and post-treatment solutions for coated tools. The pre-treatment effectively improves the bonding force between the coating and the tool substrate, and solves technical problems such as easy peeling of the coating. The post-treatment removes droplets on the coating surface, etc. The process can effectively improve the processing accuracy and surface processing quality, so that the surface of the groove milling cutter has higher hardness, wear resistance and high temperature stability.
本发明的技术方案是：一种汽轮机转子轮槽铣刀表面TiCN多层复合涂层制备工艺，包括以下步骤：The technical scheme of the present invention is: a kind of TiCN multi-layer composite coating preparation process on the surface of steam turbine rotor wheel slot milling cutter, comprising the following steps:
（1）刀具基体表面预处理：用无水酒精及喷砂对刀具基体表面进行除油、去毛刺、清除氧化物处理，粗化基体表面，提高膜基结合力；(1) Surface pretreatment of the tool substrate: use absolute alcohol and sandblasting to degrease, deburr, and remove oxides on the surface of the tool substrate, roughen the surface of the substrate, and improve the bonding force of the film base;
（2）清洗：将预处理后的刀具再用无水酒精进行清洗并吹干，并将清洗后的刀具基体装夹送入超声波清洗机中进行超声波清洗；(2) Cleaning: Clean the pretreated tool with absolute alcohol and dry it, and clamp the cleaned tool matrix into an ultrasonic cleaning machine for ultrasonic cleaning;
（3）装夹及载入刀具基体：将超声波清洗后并烘干的刀具装夹在喷涂架上，并载入喷涂炉腔内；(3) Clamping and loading of the tool base: clamp the tool after ultrasonic cleaning and drying on the spraying frame, and load it into the spraying furnace cavity;
（4）多层复合涂层制备：(4) Preparation of multi-layer composite coating:
a．将预处理后的刀具基体均匀地固定在带有自传和公转功能的旋转喷膜架锥形套内，喷膜架公转转速为3转/分钟；将喷涂炉腔抽成真空，加热至450℃，加热时间为100分钟，通入氩气，当真空度达到5.0×10-3mBar时，设置偏压为800V，清洁刀具基体，清洁时间为12分钟；a. Evenly fix the pretreated tool base in the tapered sleeve of the rotary spray film stand with autopropagation and revolution functions, and the revolution speed of the spray film stand is 3 revolutions per minute; vacuumize the spray furnace chamber and heat it to 450°C , the heating time is 100 minutes, argon gas is passed through, when the vacuum degree reaches 5.0×10 -3 mBar, the bias voltage is set to 800V, and the tool substrate is cleaned, and the cleaning time is 12 minutes;
b．Ti靶通电，通电电流为180A，向喷涂炉腔中通入氮气与乙炔气体，保持真空度为9.0×10-3mBar，设置偏压为150V，通过调节氮气和乙炔的流量，溅射Ti靶，制备TiN和TiCN交替涂层，TiN为打底层，最外层为TiCN，沉积时间为85分钟，制备50层的多层结构；结束涂层后，待炉温冷却至150-200℃后取出刀具，冷却至常温；b. The Ti target is energized, the energizing current is 180A, nitrogen and acetylene gas are passed into the spraying furnace chamber, the vacuum degree is kept at 9.0×10 -3 mBar, the bias voltage is set at 150V, and the Ti target is sputtered by adjusting the flow rate of nitrogen and acetylene , prepare alternate coatings of TiN and TiCN, TiN is the base layer, the outermost layer is TiCN, the deposition time is 85 minutes, and a multi-layer structure of 50 layers is prepared; after the coating is completed, the furnace temperature is cooled to 150-200°C and taken out Tool, cooled to room temperature;
（5）后处理：将冷却至室温的涂层刀具再进行喷砂处理，用于去除涂层过程中产生的液滴，并起到表面强化作用。(5) Post-treatment: The coated tool cooled to room temperature is subjected to sandblasting to remove the droplets generated during the coating process and to strengthen the surface.
所述步骤（1）包括以下步骤：The step (1) includes the following steps:
a．将刀具基体完全浸入无水酒精中，利用人工对表面进行除油除杂清洗；a. Immerse the tool base completely in absolute alcohol, and use manual cleaning to remove oil and impurities on the surface;
b．将酒精清洗后并蒸发干燥的刀具基体放入喷砂设备中，使得喷嘴与刀具基体的距离为100～200mm，喷射方向与刀具基体表面法线方向间夹角为20°～30°；b. Put the alcohol-cleaned and evaporated tool substrate into the sand blasting equipment, so that the distance between the nozzle and the tool substrate is 100-200 mm, and the angle between the spraying direction and the normal direction of the tool substrate surface is 20°-30°;
所述步骤（2）包括以下步骤：The step (2) includes the following steps:
a．将刀具基体完全浸入无水酒精中，利用人工对表面进行除油除杂清洗；a. Immerse the tool base completely in absolute alcohol, and use manual cleaning to remove oil and impurities on the surface;
b．将超声波清洗机的各个装有清洗液的水腔预加热至60℃，并将酒精清洗后的刀具基体装夹，送入超声波清洗机的炉腔内清洗，清洗时间为35分钟；b. Preheat the water chambers of the ultrasonic cleaning machine filled with cleaning liquid to 60°C, clamp the tool substrate after alcohol cleaning, and send it to the furnace cavity of the ultrasonic cleaning machine for cleaning. The cleaning time is 35 minutes;
c．清洗完成后，随炉烘干、冷却，取出刀具基体。c. After the cleaning is completed, it is dried and cooled with the furnace, and the tool matrix is taken out.
所述步骤（5）中将冷却至室温的涂层刀具再进行喷砂处理具体方法是：将涂层后的刀具基体装夹于喷砂机的旋转架上，设置旋转速度为3转/分钟，喷砂时间为10分钟，启动程序进行喷砂。In the step (5), the coated tool cooled to room temperature is then subjected to sandblasting treatment. The specific method is: clamp the coated tool substrate on the rotating frame of the sandblasting machine, and set the rotation speed to 3 rpm , the sandblasting time is 10 minutes, start the program for sandblasting.
本发明得到的涂层刀具的有益效果是：本发明得到的TiCN多层复合涂层厚度为单面4-5微米，刀具涂层表面的摩擦系数不大于0.25，涂层的耐热及抗高温氧化温度大于600℃，涂层的表面硬度为HV3500，与以往涂层相比，刀具的综合性能得到提高，寿命大大延长。The beneficial effects of the coated tool obtained by the present invention are: the thickness of the TiCN multilayer composite coating obtained by the present invention is 4-5 microns on one side, the friction coefficient of the tool coating surface is not more than 0.25, and the heat resistance and high temperature resistance of the coating The oxidation temperature is greater than 600°C, and the surface hardness of the coating is HV3500. Compared with the previous coating, the overall performance of the tool is improved and the service life is greatly extended.
附图说明Description of drawings
图1是汽轮机转子轮槽半精加工轮槽表面形状示意图；Figure 1 is a schematic diagram of the surface shape of the semi-finishing wheel groove of the steam turbine rotor wheel groove;
图2是本发明的汽轮机转子轮槽铣刀复合多层刀具涂层结构示意图。Fig. 2 is a schematic diagram of the composite multi-layer tool coating structure of the steam turbine rotor slot milling cutter of the present invention.
具体实施方式detailed description
本发明所采用的涂层制备工艺技术方案是：依据转子材料、刀具材料、切削加工方式、刀具几何形状（图1）、切削加工要求等进行涂层设计，包括涂层成份、涂层结构、涂层工艺。该涂层采用多层结构，以TiN和TiCN做为交替涂层，在轮槽铣刀表面制备层数为50的TiN涂层1和TiCN涂层2的交替涂层（图2），TiN为打底层，最外层是TiCN。采用阴极电弧技术沉积TiN/TiCN多层复合涂层，沉积温度低，对刀具基体3没有损伤，制备的涂层热应力小，表面均匀致密，光洁度好。采用TiN作为打底层和中间过渡层，缓和涂层生长的本征应力，使涂层与刀具基体结合程度提高，避免涂层脱落。The technical scheme of the coating preparation process adopted in the present invention is to design the coating according to the rotor material, tool material, cutting processing method, tool geometry (Figure 1), cutting processing requirements, etc., including coating composition, coating structure, coating process. The coating adopts a multi-layer structure, with TiN and TiCN as alternate coatings, and an alternate coating of 50 layers of TiN coating 1 and TiCN coating 2 is prepared on the surface of the groove milling cutter (Fig. 2). TiN is The bottom layer, the outermost layer is TiCN. The TiN/TiCN multi-layer composite coating is deposited by cathodic arc technology, the deposition temperature is low, and there is no damage to the tool substrate 3. The prepared coating has small thermal stress, uniform and dense surface, and good finish. TiN is used as the base layer and intermediate transition layer to ease the intrinsic stress of coating growth, improve the bonding degree of coating and tool substrate, and avoid coating peeling off.
本发明所采用的涂层工艺技术方案对刀具基体进行严格的涂层前处理，并对涂层后的刀具进行了相应的后处理。采用先进的喷砂设备，可彻底清除刀具表面的油脂、污垢、氧化皮、锈、腐蚀物、氧化物和其他杂质，可有效提高涂层与刀具基体表面的附着力。对涂层后的刀具进行喷砂处理，可去除刀具涂层后表面产生的液滴现象，还可对刀具表面起到强化作用。The coating technology scheme adopted in the present invention carries out strict pre-coating treatment on the tool substrate, and carries out corresponding post-treatment on the coated tool. The use of advanced sandblasting equipment can completely remove grease, dirt, scale, rust, corrosion, oxides and other impurities on the surface of the tool, and can effectively improve the adhesion between the coating and the surface of the tool substrate. Sandblasting the coated tool can remove the droplet phenomenon on the coated surface of the tool, and can also strengthen the surface of the tool.
本发明所采用的涂层制备工艺方案主要步骤有：The main steps of the coating preparation process scheme adopted in the present invention are:
（1）刀具基体表面的预处理：利用无水酒精及喷砂对刀具基体表面进行除油、去毛刺、清除氧化物处理，粗化基体表面，提高膜基结合力；(1) Pretreatment of the surface of the tool substrate: use anhydrous alcohol and sandblasting to degrease, deburr, and remove oxides on the surface of the tool substrate, roughen the surface of the substrate, and improve the bonding force of the film base;
（2）清洗：将预处理后的刀具再次利用无水酒精进行清洗并吹干，并将清洗后的刀具基体进行装夹送入超声波清洗机中进行超声波清洗；(2) Cleaning: The pretreated tool is cleaned again with absolute alcohol and dried, and the cleaned tool substrate is clamped and sent to an ultrasonic cleaning machine for ultrasonic cleaning;
（3）装夹及载入刀具基体：将超声波清洗后并已烘干的刀具装夹在喷涂架上，并载入喷涂炉腔内；(3) Clamping and loading of the tool substrate: clamp the ultrasonically cleaned and dried tool on the spraying frame, and load it into the spraying furnace cavity;
（4）多层复合涂层的制备：关闭炉腔门，启动程序，开始制备复合多层涂层。(4) Preparation of multi-layer composite coating: close the door of the furnace chamber, start the program, and begin to prepare the composite multi-layer coating.
（5）冷却出炉：涂层程序完成后，基体在真空下随炉冷却至120℃，然后出炉空冷至室温；(5) Cooling out of the furnace: After the coating process is completed, the substrate is cooled to 120°C with the furnace under vacuum, and then air-cooled to room temperature after being out of the furnace;
（6）涂层后工件后处理：将冷却至室温的工件再次进行喷砂处理，一方面可以去除涂层过程中产生的液滴，另一方面可以起到表面强化的作用。(6) Post-treatment of the workpiece after coating: The workpiece cooled to room temperature is subjected to sandblasting treatment again. On the one hand, it can remove the droplets generated during the coating process, and on the other hand, it can play a role in surface strengthening.
采用该方法制备的涂层缓解消除了涂层与刀具基体的残余应力，使得基体与涂层的结合力更大强，涂层结合程度更高，不易剥落。此外，在TiN的基础上引入C原子，引起晶格畸变与固溶强化的作用，使得刀具基体表面的硬度可以达到HV3500，提高刀具耐磨性，延长刀具使用寿命，保证汽轮机转子的加工精度，降低生产成本。The coating prepared by the method relieves and eliminates the residual stress between the coating and the tool substrate, so that the bonding force between the substrate and the coating is stronger, the coating has a higher bonding degree, and is not easy to peel off. In addition, C atoms are introduced on the basis of TiN to cause lattice distortion and solid solution strengthening, so that the hardness of the tool substrate surface can reach HV3500, improve the wear resistance of the tool, prolong the service life of the tool, and ensure the machining accuracy of the steam turbine rotor. reduce manufacturing cost.
本发明所使用的阴极电弧涂层技术设备是由瑞士生产，其型号为PlFC-04 ARC/PRO。所使用的清洗机是意大利Novatec 2CRD 200超声波清洗机生产线，自动完成清洗、烘干、冷却。所使用的喷砂设备是由中国生产，其型号为FLB-D-84 。The cathodic arc coating technology equipment used in the present invention is produced by Switzerland, and its model is PlFC-04 ARC/PRO. The cleaning machine used is Italian Novatec 2CRD 200 ultrasonic cleaning machine production line, which automatically completes cleaning, drying and cooling. The blasting equipment used is produced in China, and its model is FLB-D-84.
为了更好的理解本发明，下面说明汽轮机转子加工整体式粉末冶金高速钢（M42）轮槽铣刀涂层制备实施过程：In order to better understand the present invention, the implementation process of preparing the coating of the integrated powder metallurgy high-speed steel (M42) wheel groove milling cutter for processing the rotor of the steam turbine is described below:
（1）刀具基体表面的预处理：先利用无水酒精人工清洗刀具表面，然后将轮槽铣刀放于喷砂机中，使喷嘴距刀具基体表面150mm，喷射方向与刀具基体表面法线的方向的夹角为25°；(1) Pretreatment of the surface of the tool substrate: first use anhydrous alcohol to manually clean the surface of the tool, and then place the wheel groove milling cutter in the sandblasting machine so that the nozzle is 150mm away from the surface of the tool substrate, and the spraying direction is equal to the normal line of the tool substrate surface. The angle between the directions is 25°;
（2）清洗：将预处理后的刀具再次利用无水酒精进行清洗并吹干，将超声波清洗机的各个装有清洗液的水腔预加热至60℃，并将清洗后的刀具基体进行装夹送入超声波清洗机中进行超声波清洗，清洗时间为35分钟，清洗完成后，轮槽铣刀随机内烘干、冷却，待完全烘干后取出轮槽铣刀，要求保证刀具基体上无水渍痕迹；(2) Cleaning: Clean the pretreated tool with absolute alcohol and dry it, preheat the water chambers of the ultrasonic cleaner to 60°C, and install the cleaned tool matrix. The clip is sent into the ultrasonic cleaning machine for ultrasonic cleaning. The cleaning time is 35 minutes. After the cleaning is completed, the wheel groove milling cutter is randomly dried and cooled. After it is completely dried, the wheel groove milling cutter is taken out. stain marks;
（3）装夹及载入刀具基体：将超声波清洗后并已烘干的轮槽铣刀装夹在带有自传和公转功能的旋转喷涂架上，并载入喷涂炉腔内，喷膜架公转转速为3转/分钟；(3) Clamping and loading of the tool base: clamp the wheel groove milling cutter after ultrasonic cleaning and drying on the rotary spraying frame with autobiography and revolution functions, and load it into the spraying furnace cavity, and the film spraying frame The revolution speed is 3 revolutions per minute;
（4）多层复合涂层的制备：将炉腔抽成真空，并利用真空炉腔内配备的加热管装置对炉腔及刀具基体进行梯度升温加热，加热至450℃，加热时间为100分钟，通入氩气，5.0×10-3mBar时，设置偏压为800V，刻蚀清洁刀具基体，清洁时间为12分钟；(4) Preparation of multi-layer composite coating: vacuumize the furnace cavity, and use the heating tube device equipped in the vacuum furnace cavity to gradually heat the furnace cavity and the tool substrate to 450°C for 100 minutes. , into the argon gas, at 5.0×10 -3 mBar, set the bias voltage to 800V, etch and clean the tool substrate, and the cleaning time is 12 minutes;
（5）Ti靶通电，通电电流为180A，向炉腔中通入氮气与乙炔气体，保持真空度为9.0×10-3mBar，设置偏压为150V，通过调节氮气和乙炔的流量，溅射Ti靶，制备TiN和TiCN交替涂层，沉积时间为85分钟，制备50层的多层结构。(5) The Ti target is energized, the energizing current is 180A, nitrogen and acetylene gas are introduced into the furnace chamber, the vacuum degree is maintained at 9.0×10 -3 mBar, and the bias voltage is set at 150V. By adjusting the flow rate of nitrogen and acetylene, sputtering Ti target, alternate coatings of TiN and TiCN were prepared, the deposition time was 85 minutes, and a multilayer structure of 50 layers was prepared.
（6）冷却出炉：待涂层完成后，基体在真空下随炉冷却至120℃，然后出炉空冷至室温；(6) Cooling out of the furnace: After the coating is completed, the substrate is cooled to 120°C with the furnace under vacuum, and then it is air-cooled to room temperature after being out of the furnace;
（7）涂层后刀具后处理：将冷却至室温的涂层刀具再次进行喷砂处理，将涂层后的轮槽铣刀装夹于喷砂机的旋转架上，设置旋转速度为3转/分钟，启动程序进行喷沙，喷砂时间为10分钟。(7) Post-treatment of the tool after coating: The coated tool cooled to room temperature is subjected to sandblasting treatment again, and the coated wheel groove milling cutter is clamped on the rotating frame of the sandblasting machine, and the rotation speed is set to 3 revolutions / minute, start the program for sandblasting, and the sandblasting time is 10 minutes.
涂层后试验证明，利用该制备工艺在刀具材料为W2Mo9Cr4VCo8（M42）的轮槽铣刀上制备的TiN/TiCN多层复合涂层，该涂层均匀致密，呈灰黑色且与刀具的结合程度好，韧性高。经检测，在该刀具材料上制备的涂层厚度为单面4-5微米，涂层的维氏硬度为HV3500，涂层与该刀具材料的结合力好，高温抗氧化性强。与以往涂层相比，刀具的综合性能得到提高，同等切削条件和工艺参数下，刀具耐用度提高20%以上，转子加工成本降低20%以上，被加工零件的表面质量明显提高。The post-coating test proves that the TiN/TiCN multilayer composite coating prepared on the wheel groove milling cutter whose tool material is W2Mo9Cr4VCo8 (M42) by using this preparation process is uniform and dense, gray-black in color and well bonded to the tool. Well, high toughness. After testing, the thickness of the coating prepared on the tool material is 4-5 microns on one side, and the Vickers hardness of the coating is HV3500. The coating has good bonding force with the tool material and has strong high temperature oxidation resistance. Compared with the previous coating, the overall performance of the tool is improved. Under the same cutting conditions and process parameters, the tool durability is increased by more than 20%, the rotor processing cost is reduced by more than 20%, and the surface quality of the machined parts is significantly improved.
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