CN105319393A - MEMS Components with Constructed MEMS Sensing Cells - Google Patents

Abstract

The invention provides a micro-electromechanical system element with a co-constructed micro-electromechanical sensing unit, which comprises: the first and second MEMS sensing units are of different sensing types, wherein part of the structure of the first MEMS sensing unit and part of the structure of the second MEMS sensing unit are overlapped and arranged in the same projection area.

Description

MEMS Components with Constructed MEMS Sensing Cells

technical field

The present invention relates to a micro-electro-mechanical system element with a co-structured micro-electro-mechanical sensing unit, in particular, a plurality of co-structured micro-electro-mechanical sensing units are electrically coupled to at least one common contact to collect frequency responses corresponding to the micro-electro-mechanical sensing unit , and reduce the external wiring of the MEMS components and the MEMS components required for the space.

Background technique

MEMS components are widely used in everyday life. A MEMS element integrates a MEMS sensing unit and an integrated circuit, but in the prior art, a single MEMS element has only a single sensing type MEMS sensing unit, that is, has only a single sensing function. (A "three-axis" accelerometer is still a single-sensing type for purposes of the definition of the present invention, since it can only sense acceleration.) , angular velocity meter, accelerometer, etc.) to perform different types of sensing, the prior art must use two separate and independent MEMS components. In this case, multiple MEMS components need to take up a large volume, and related circuits and signal connections also take up a lot of space, hindering product miniaturization.

Therefore, how to integrate multiple different types of MEMS sensing units into a single MEMS device to save space, pads and circuits is an important key to product development.

Contents of the invention

The purpose of the present invention is to overcome the deficiencies and defects of the prior art, and propose a micro-electro-mechanical system element with a co-structure micro-electro-mechanical sensing unit, which can integrate a plurality of different types of micro-electro-mechanical sensing units into a single micro-electro-mechanical system element, so as to Save space, pads and lines, and realize product miniaturization.

In order to achieve the above purpose, from one viewpoint, the present invention provides a micro-electro-mechanical system element with a co-structured micro-electro-mechanical sensing unit, including: first and second micro-electro-mechanical sensing units of different sensing types, wherein the first The partial structure of the microelectromechanical sensing unit and the partial structure of the second microelectromechanical sensing unit are overlapped and arranged in the same projected area.

In one embodiment, the MEMS device having a co-structured MEMS unit further includes a resonator connected to at least one of the first MEMS unit and the second MEMS unit, so as to give at least The vibration frequency of the connected first micro-electromechanical sensing unit or the second micro-electromechanical sensing unit.

In one embodiment, the resonator imparts different vibration frequencies to the first MEMS sensing unit and the second MEMS sensing unit, and the MEMS device with the co-structured MEMS unit further includes at least one common contact , to receive the sensing results of the first micro-electromechanical sensing unit and the second micro-electromechanical sensing unit to generate a multi-band signal, which is output through the common contact.

In one embodiment, the first MEMS sensing unit and the second MEMS sensing unit are linear accelerometers and Corioles accelerometers respectively.

In one embodiment, the second microelectromechanical sensing unit is a Coriolis accelerometer, including at least one Coriolis acceleration movable electrode, the periphery of the Coriolis acceleration movable electrode defines the projected area, and the first microelectromechanical sensing unit At least one electrode structure is included, and the electrode structure falls completely within the projected area.

In one embodiment, the second microelectromechanical sensing unit is a Coriolis accelerometer, including at least one Coriolis acceleration movable electrode, the periphery of the Coriolis acceleration movable electrode defines the projected area, and the first microelectromechanical sensing unit At least one electrode structure is included, the electrode structure includes a main mass portion, the main mass portion falls within the projected area.

In one embodiment, the first MEMS sensing unit is a linear accelerometer, and the electrode structure is a movable electrode of one axis of the linear accelerometer.

In one embodiment, the first MEMS sensing unit is a two-axis or three-axis linear accelerometer.

In one embodiment, the microelectromechanical system element with a co-structured microelectromechanical sensing unit includes a plurality of microelectromechanical sensing units of different sensing types, and the plurality of microelectromechanical sensing units of different sensing types include linear accelerometers, A couple of angular velocity meters and magnetometers.

The following will be described in detail through specific embodiments, so that it is easier to understand the purpose, technical content, characteristics and effects of the present invention.

Description of drawings

1A-1D show a microelectromechanical system device with a co-constructed microelectromechanical sensing unit according to an embodiment of the present invention;

2-5 show various embodiments of MEMS components with co-constructed MEMS sensing units according to the present invention;

6A and 6B show two embodiments of MEMS components with magnetometer co-structured MEMS sensing units according to the present invention.

Explanation of symbols in the figure

10, 20, 30, 40, 50 MEMS components

11 linear accelerometer

11a axis

11e fixed electrode

11xy coplanar movable electrodes

11z out of the plane movable electrode

12 angular velocity meter

12e fixed electrode

12x, 12y, 12z Coriolis acceleration movable electrodes

14 resonators

14m main frame

14s connection structure

14w angular direction vibrator

14xX axis vibrator

14yY axis vibrator

21x, 21z linear acceleration movable electrodes

22x, 22z Coriolis acceleration movable electrodes

23 springs

24 support arms

31y, 31z linear acceleration movable electrodes

32y, 32z Coriolis acceleration movable electrodes

41x, 41y linear acceleration movable electrodes

42z1, 42z2 Coriolis acceleration movable electrodes

51z1, 51z2 linear acceleration movable electrode

52x, 52y Coriolis acceleration movable electrodes

61x, 61y linear acceleration movable electrodes

62z1, 62z2, 71x, 71y electrode structure

72z1, 72z2 Coriolis Acceleration Movable Electrode

C common contact

C11x1, C11x2, C11y1, C11y2, C11z, C12x, C12y, C12z, C21x, C21z, C22x, C22z, C31y, C31z, C32y, C32z, C41x, C41y, C42z1, C42z2, C52x, C52y, C52z1, C52x2 C61y, C71x, C71y, C72z1, C72z2 capacitors

C62z1, C62z2 induction structure

f11, f12 frequency

FR11, FR12 frequency response

Fm multi-band signal

X, Y, Z direction

detailed description

The foregoing and other technical contents, features and effects of the present invention will be clearly presented in the following detailed description of a preferred embodiment with reference to the drawings. The directional terms mentioned in the following embodiments, such as: up, down, left, right, front or back, etc., are only directions referring to the attached drawings. The drawings in the present invention are all schematic, mainly intended to show the functional relationship between each device and each component, and the shapes, thicknesses and widths are not drawn to scale.

Referring to the top plan views of FIGS. 1A-1D , a MEMS device 10 with a co-structured MEMS sensing unit is shown according to an aspect of the present invention. For ease of reading, the same structure is illustrated with four icons.

FIG. 1A shows that the MEMS device 10 includes a resonator 14 (the black part in FIG. 1A ), which is used to receive vibration generated by a vibration source and impart a frequency to the sensing signal of the MEMS sensing unit. The effect of assigning frequency will be described later. In this embodiment, the resonator 14 includes a main frame 14m to receive and transmit vibrations, a connecting structure 14s to connect the main frame 14m and the micro-electromechanical sensing unit, and an X-axis vibrator 14x for generating X-direction vibrations and Y-direction vibrations The Y-axis vibrator 14y and the angular vibrator 14w vibrate in the angular direction.

In this embodiment, the resonator 14 includes two main frames 14m, which are respectively located at the outermost part of the MEMS element 10 and at a position shrinking from the outside to the middle by 1/4 of the side length, which is only one of the implementation modes; resonance The device 14 may have only one main frame 14m or a greater number of main frames 14m, and the position is not limited as shown in the figure.

According to the present invention, the MEMS device 10 includes a plurality of different types of MEMS sensing units, such as linear accelerometers and angular velocity meters. FIG. 1B shows that in this embodiment, the MEMS device 10 includes a linear accelerometer 11 capable of three-axis detection. The linear accelerometer 11 comprises at least one coplanar movable electrode 11xy, at least one outplane movable electrode 11z, and fixed electrodes 11e corresponding to the above movable electrodes (only the fixed electrodes 11e corresponding to the coplanar movable electrodes 11xy are shown). ), wherein, the same-plane movable electrode 11xy and the corresponding fixed electrode 11e form an acceleration sensing unit in the XY direction, and the out-plane movable electrode 11z and the corresponding fixed electrode (not shown, may be located in the out-plane movable electrode 11z Below, that is, the direction away from the reader, or above, that is, the direction close to the reader) constitutes the acceleration sensing unit in the Z direction. In this embodiment, the acceleration sensing unit in the XY direction includes differential capacitors C11x1 and C11x2 (used to detect acceleration in the X direction) formed by the movable electrode 11xy on the same plane and the corresponding fixed electrode 11e (for detecting acceleration in the X direction) The differential capacitances C11y1 and C11y2 formed by the moving electrodes 11xy and the corresponding fixed electrodes 11e (used to detect acceleration in the Y direction). In addition, the acceleration sensing unit in the Z direction includes a capacitor C11z formed by an out-of-plane movable electrode 11z and a corresponding fixed electrode (not shown). In this embodiment, the out-of-plane movable electrode 11z has an axis 11a, and when the MEMS element 10 moves in the Z direction, the out-of-plane movable electrode 11z can rotate relative to the axis 11a, so that the capacitor C11z becomes differential capacitance. In addition, in a preferred embodiment, the shaft 11a can be arranged eccentrically, and/or the mass of the out-of-plane movable electrode 11z can be unevenly distributed on both sides of the shaft 11a, so as to improve the sensing accuracy. It should be noted that the above description is only one of the preferred implementation modes; the design of differential capacitors may not be adopted, and the layout positions of the capacitors are not limited to those shown in the figure.

FIG. 1C shows that in this embodiment, the MEMS device 10 includes an angular velocity meter 12 . In this embodiment, the angular velocity meter 12 is a Coriolis accelerometer, including at least one Coriolis acceleration movable electrode 12x in the X direction, at least one Corios acceleration movable electrode 12y in the Y direction, and at least one Corioles acceleration in the Z direction The movable electrode 12z, and the fixed electrode 12e corresponding to the above movable electrode (only the fixed electrode 12e corresponding to the Coriolis acceleration movable electrode 12z is shown); wherein, the Coriolis acceleration movable electrode 12x and the corresponding fixed electrode ( Not shown, it can be located below the Corian acceleration movable electrode 12x, that is, away from the reader, or above, that is, close to the reader) to form a capacitor C12x (such as but not limited to the position marked by the dotted line box in the figure), Corian The acceleration movable electrode 12y and the corresponding fixed electrode (not shown, may be located below the Coriolis acceleration movable electrode 12y, that is, away from the reader, or above, that is, close to the reader) form a capacitance C12y (such as but not limited to include The position marked by the dotted line box), the Coriolis acceleration movable electrode 12z in the Z direction and the corresponding fixed electrode 12e form a capacitor C12z (such as but not limited to including the position marked by the dotted line box in the figure).

Comparing FIGS. 1B and 1C , it is worth noting that the partial structures of the linear accelerometer 11 and the angular velocity meter 12 are overlapped and arranged in the same projected area, thus saving space. (The invention name of the present invention " microelectromechanical system element with co-structure microelectromechanical sensing unit ", wherein " co-structure " refers to this meaning.) For example, the coplanar movable electrode 11xy and the Corian acceleration movable electrode 12z They are overlapped and arranged in the same projected area, and the out-plane movable electrode 11z and the Coriolis acceleration movable electrode 12x (or the Coresian acceleration movable electrode 12y) are overlapped and arranged in the same projected area. In detail, the so-called "overlapping and setting in the same projected area" means: define a projected area with the periphery of the larger part of the structure (for example, define a projected area with the periphery of the Coriolis acceleration movable electrode 12x), then another part The structure, at least its main mass part (for example, mass block) falls completely within the projected area, and more preferably the other part of the structure as a whole falls within the projected area (for example, the out-of-plane movable electrode 11z is a mass block structure, It falls within the projected area of the outer periphery of the Coriolis acceleration movable electrode 12x). It should be noted that the outer circumference of the larger part of the structure does not have to be a closed shape (although the Coriolis acceleration movable electrode shown in the figure is a closed ring, it can also be a non-closed C-shape, U-shape, etc.), if it is larger If the outer periphery of part of the structure is not a closed shape, the projected area is defined by the line connecting the outermost points.

Figure 1D shows that in a preferred embodiment, the resonator 14 gives the linear accelerometer 11 and the angular velocity meter 12 different vibration frequencies f11 and f12 respectively, so the sensing signals of the capacitors C11x1, C11x2, C11y1, C11y2, and C11z have The frequency response is FR11, and the sensing signals of the capacitors C12x, C12y, C12z have a frequency response FR12. If the angular velocity meter 12 is the aforementioned Coriolis accelerometer, the frequency response FR12 can have a frequency response in phase with the vibration signal of the angular velocity meter and a Coriolis acceleration frequency response, both of which have a phase difference of 90 degrees. The phase difference is produced by the characteristics of Coriolis Acceleration. In addition, the frequency response of Coriolis acceleration is not limited to a single one, and multiple frequency responses of Coriolis acceleration can be generated according to multiple vibration signals (such as three-dimensional Coriolis acceleration frequency responses in X, Y, and Z directions, etc.). How the Cortesian accelerometer detects and distinguishes the main-frequency and non-main-frequency signals with different phases is a prior art, and will not be repeated here. The sensing signals of all the above capacitances can be connected to one or more joints, and in a preferred embodiment, the signals sensed by two or more capacitances with different functions or different axes can be connected to a common joint C to generate at least one multi-band signal fm, and output the multi-band signal fm to a demodulator for analyzing the sensing result of the MEMS device 10 .

For the modulation and subsequent demodulation methods of the aforementioned multi-band signal fm, please refer to the TW patent application No. 103119982 of the same applicant, and the People's Republic of China patent application No. 201410271756.X, which have detailed descriptions.

In addition to the resonator 14 shown in the figure, other vibration sources or resonators can be provided for the aforementioned needs of generating the multi-band signal fm; for example, the frame part of the coplanar movable electrode 11xy can be used to receive another vibration source of vibration, and so on. It should be noted that it is only a preferred embodiment of the present invention to modulate the signals sensed by two or more capacitors with different functions or different axial directions into a multi-band signal fm and output them at a common contact C; the present invention also covers In the embodiment where the signals sensed by the capacitors with different functions or different axes are output separately, and in the case where the signals sensed by the capacitors are output separately, if the vibration frequency does not need to be applied during the sensing, then it is not necessary A resonator 14 is provided (the above embodiment uses a Coriolis accelerometer as an example for the angular velocity meter, so the vibration frequency needs to be provided).

The above Figures 1A-1D show that: according to the present invention, the microelectromechanical system element with a co-structured microelectromechanical sensing unit includes a first microelectromechanical sensing unit and a second microelectromechanical sensing unit of different sensing types, and the first microelectromechanical sensing unit Partial structures of the measuring unit and the second microelectromechanical sensing unit are overlapped and arranged in the same projected area to save area. In a preferred embodiment of the present invention, a resonator may be further provided to endow the first microelectromechanical sensing unit and/or the second microelectromechanical sensing unit with a vibration frequency. In a preferred implementation form of the present invention, in addition to providing sensing requirements, the resonator can also generate multiple vibration frequencies by giving the first micro-electromechanical sensing unit and the second micro-electromechanical sensing unit different vibration frequencies. Frequency band signals are output through a common contact to save external contacts.

FIG. 2 shows another embodiment of a microelectromechanical system element 20 with a co-constructed microelectromechanical sensing unit. Due to different sensing purposes, for example, the microelectromechanical system element 20 is used to sense movement in the X and Z directions on a plane and The rotational angular velocity in the out-of-plane direction is different from the design form of the micro-electromechanical sensing unit in Fig. 1, but the principle is the same. The multiple micro-electromechanical sensing units contained therein are angular velocity meters and linear accelerometers. As shown in the figure, the linear accelerometer includes two sets of linear acceleration movable electrodes 21x, 21z, which are composed of corresponding fixed electrodes (not shown). Capacitors C21x, C21z can sense acceleration components in the X and Z directions; the angular velocity meter includes two sets of Coriolis acceleration movable electrodes 22x, 22z, and corresponding fixed electrodes (not shown) form capacitances C22x, C22z to Sensing angular velocity. Depending on the design and requirements of the sensing structure, the movable electrodes can be connected to other parts of the MEMS element 20 through springs 23 (such as movable electrodes 21x, 22z) or support arms 24 (such as movable electrodes 21z, 22x). part. For other operating principles, reference may be made to the descriptions of the foregoing embodiments.

FIG. 3 shows another embodiment of a MEMS device 30 with a co-constructed MEMS sensing unit. Compared with Fig. 2, the sensing direction in Fig. 3 is different. For example, the MEMS element 30 is used for the movement in the Y and Z directions and the rotational angular velocity in the out-of-plane direction, so it is slightly different from the design of the MEMS sensing unit in Fig. 2 Different, but the principle is the same. The multiple micro-electromechanical sensing units included are angular velocity meters and linear accelerometers. As shown in the figure, the linear accelerometer includes two sets of linear acceleration movable electrodes 31y, 31z and component sensors C31y, C31z connected to them. The angular velocity meter includes The two sets of Coriolis acceleration movable electrodes 32y, 32z and their connection components are shown in the figure. The linear accelerometer includes two sets of linear acceleration movable electrodes 31y, 31z, which form a capacitor C31y with the corresponding fixed electrodes (not shown). , C31z and can sense the components of acceleration in the Y and Z directions; the angular velocity meter includes two sets of Coriolis acceleration movable electrodes 32y, 32z, and corresponding fixed electrodes (not shown) form capacitances C32y, C32z and can sense angular velocity. The movable electrodes are connected to the rest of the MEMS element 20 by springs or support arms. For other operating principles, reference may be made to the descriptions of the foregoing embodiments.

FIG. 4 shows another embodiment of a MEMS device 40 with a co-constructed MEMS sensing unit. Compared with Figures 2 and 3, the sensing directions in Figures 2 and 3 are different. For example, the MEMS element 30 is used for the movement in the X and Y plane directions and the rotational angular velocity in the out-of-plane direction Z, so it is the same as in Figures 2 and 3. The design of the MEMS sensing unit is slightly different, but the principle is the same. The multiple micro-electromechanical sensing units included are angular velocity meters and linear accelerometers. As shown in the figure, the linear accelerometer includes two sets of linear acceleration movable electrodes 41x, 41y, which are composed of corresponding fixed electrodes (not shown). Capacitors C41x, C41y can sense the components of acceleration in the X and Y directions; the angular velocity meter includes two sets of Coriolis acceleration movable electrodes 42z1, 42z2, and the corresponding fixed electrodes (not shown) form capacitors C42z1, C42z2 and can Sensing angular velocity. Depending on the design and requirements of the sensing structure, the movable electrodes can be connected to other parts of the MEMS element 20 through springs 23 (such as movable electrodes 21x, 22z) or support arms 24 (such as movable electrodes 21z, 22x). part. For other operating principles, reference may be made to the descriptions of the foregoing embodiments.

FIG. 5 shows another embodiment of a MEMS device 50 with a co-constructed MEMS sensing unit. Compared with FIGS. 2, 3, and 4, the sensing direction in FIG. 5 is different. For example, the MEMS element 50 senses the movement in the Z plane direction and the rotational angular velocity in the out-of-plane direction X, Y, so it is the same as in FIGS. 2, 3 , The design of the micro-electromechanical sensing unit of 4 is slightly different, but the principle is the same. The multiple micro-electromechanical sensing units contained therein are angular velocity meters and linear accelerometers. As shown in the figure, the linear accelerometer includes two sets of linear acceleration movable electrodes 51z1, 51z2, which are composed of corresponding fixed electrodes (not shown). Capacitors C51z1, C51z2; the angular velocity meter includes two sets of Coriolis acceleration movable electrodes 52x, 52y, which form capacitors C52x, C52y with corresponding fixed electrodes (not shown) to sense angular velocity. Depending on the design and requirements of the sensing structure, the movable electrodes can be connected to other parts of the MEMS element 20 through springs 23 (such as movable electrodes 21x, 22z) or support arms 24 (such as movable electrodes 21z, 22x). part. For other operating principles, reference may be made to the descriptions of the foregoing embodiments.

The two or more different types of micro-electromechanical sensing units of the present invention are not limited to the above-mentioned angular velocity meters and linear accelerometers. Referring to FIG. 6A, the MEMS element 60 may also include a magnetometer and a linear accelerometer, wherein the magnetometer may have electrode structures 62z1, 62z2 (such as the form of an induction coil (CoilSensor)) as shown in the figure, and the linear accelerometer then There are linear acceleration movable electrodes 61x, 61y, and each linear acceleration movable electrode 61x, 61y respectively forms capacitances C61x, C61y with corresponding fixed electrodes (not shown) for sensing, and electrode structures 62z1, 62z2 are connected with corresponding Structures (not shown) constitute sensing structures C62z1, C62z2 for sensing.

FIG. 6B shows another MEMS element 70 having a co-constructed structure of an angular velocity meter and a magnetometer, wherein the magnetometer may have electrode structures 71x, 71y as shown in the drawing (for example, in the form of a Hall Effect Sensor), The angular velocity meter has Coriolis acceleration movable electrodes 72z1, 72z2, which respectively form capacitances C72z1, C72z2 with corresponding fixed electrodes (not shown) for sensing, and electrode structures 71x, 71y are connected with corresponding structures (not shown). Out) constitute the sensing structure C71x, C71y for sensing. In addition, the implementation of the magnetometer is not limited to the foregoing embodiments. According to the present invention, a capacitive structure can also be designed according to the principle of Lorentz Force to form various component sensors.

The above embodiments are not limited to use alone; if necessary, they can also be used in combination according to the embodiments of FIGS. 2 , 3 , 4 , 5 , 6A, and 6B of the present invention. For example, MEMS components including three or more different types of microelectromechanical sensing units can be implemented, such as three-axis accelerometers, angular velocity meters, and magnetometers, etc., wherein the partial structures of different types of microelectromechanical sensing units are overlapped and arranged on the same projected area Inside.

The present invention has been described above with reference to preferred embodiments, but the above description is only for those skilled in the art to easily understand the content of the present invention, and is not intended to limit the scope of rights of the present invention. Various equivalent changes within the spirit of the invention will immediately occur to those skilled in the art. Therefore, all equivalent changes or modifications made according to the concept and spirit of the present invention shall be included in the scope of the claims of the present invention. It is not necessary for any embodiment or claim of the present invention to achieve all the objects or advantages or features disclosed in the present invention. The abstract part and the title of the invention are only used to assist in the search of patent documents, and are not used to limit the scope of rights of the present invention.

Claims (9)

1. there is a micro-electro-mechanical systems element for the micro electronmechanical sensing cell of common structure, it is characterized in that, comprise:

First and second micro electronmechanical sensing cells of different sensing kenel, wherein the part-structure of this first micro electronmechanical sensing cell and the part-structure of the second micro electronmechanical sensing cell overlap in same projected area.

2. there is the micro-electro-mechanical systems element of the micro electronmechanical sensing cell of common structure as claimed in claim 1, wherein, also comprise a resonator, at least one of them is connected, at least to give this connected first micro electronmechanical sensing cell or this second micro electronmechanical sensing cell vibration frequency with this first micro electronmechanical sensing cell and this second micro electronmechanical sensing cell.

3. there is the micro-electro-mechanical systems element of the micro electronmechanical sensing cell of common structure as claimed in claim 1, wherein, this resonator gives this first micro electronmechanical sensing cell the vibration frequency different with this second micro electronmechanical sensing cell, and this micro-electro-mechanical systems element with the micro electronmechanical sensing cell of common structure also includes at least one common joint, produce a multiband signal to receive the sensing result of this first micro electronmechanical sensing cell and this second micro electronmechanical sensing cell, export via this common joint.

4. have the micro-electro-mechanical systems element of the micro electronmechanical sensing cell of common structure as claimed in claim 1, wherein, this first micro electronmechanical sensing cell and this second micro electronmechanical sensing cell are respectively linear accelerometer and Coriolis' acceleration meter.

5. there is the micro-electro-mechanical systems element of the micro electronmechanical sensing cell of common structure as claimed in claim 1, wherein, this second micro electronmechanical sensing cell is Coriolis acceleration meter, comprise at least one Coriolis' acceleration movable electrode, the periphery of this Coriolis' acceleration movable electrode defines this projected area, and this first micro electronmechanical sensing cell comprises at least one electrode structure, this electrode structure drops in this projected area completely.

6. there is the micro-electro-mechanical systems element of the micro electronmechanical sensing cell of common structure as claimed in claim 1, wherein, this second micro electronmechanical sensing cell is Coriolis acceleration meter, comprise at least one Coriolis' acceleration movable electrode, the periphery of this Coriolis' acceleration movable electrode defines this projected area, and this first micro electronmechanical sensing cell comprises at least one electrode structure, this electrode structure comprises a major mass part, and this major mass part drops in this projected area.

7. have the micro-electro-mechanical systems element of the micro electronmechanical sensing cell of common structure as claimed in claim 6, wherein, this first micro electronmechanical sensing cell is linear accelerometer, and this electrode structure is the movable electrode of a linear accelerometer wherein axle.

8. have the micro-electro-mechanical systems element of the micro electronmechanical sensing cell of common structure as claimed in claim 7, wherein, this first micro electronmechanical sensing cell is two axles or three axis linear accelerometers.

9. there is the micro-electro-mechanical systems element of the micro electronmechanical sensing cell of common structure as claimed in claim 1, wherein, comprise the micro electronmechanical sensing cell of multiple difference sensing kenel, it is several that the micro electronmechanical sensing cell of the plurality of difference sensing kenel comprises in linear accelerometer, turn meter and magnetometer.