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CN105762632B - High power laser high brightness spectrum synthesis system - Google Patents

High power laser high brightness spectrum synthesis system Download PDF

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Publication number
CN105762632B
CN105762632B CN201610296484.8A CN201610296484A CN105762632B CN 105762632 B CN105762632 B CN 105762632B CN 201610296484 A CN201610296484 A CN 201610296484A CN 105762632 B CN105762632 B CN 105762632B
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plane
mirror
plane mirror
reflection
light beam
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CN105762632A (en
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许晓军
韩凯
刘泽金
王小林
马阎星
张烜喆
宁禹
周朴
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National University of Defense Technology
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

The invention discloses a kind of high power laser high brightness spectrum synthesis systems, comprising: N block plane mirror, a convergent lens and a photoelectric position detector；Plane mirror includes substrate, and the two sides of substrate is respectively reflecting surface and transmission plane；Wavelength is λ1Light beam λ1It is sequentially reflected into plane mirror M alwaysNReflecting surface on, by plane mirror MNIt is exported after reflection；Wavelength is λiLight beam be sequentially reflected into plane mirror M alwaysNReflecting surface on, by plane reflector MNIt is exported after reflection；Across plane mirror MNN beam weak laser after convergent lens, focus on photoelectric position detector, form N number of luminous point；The optical axis for adjusting the road N incident laser, makes N number of luminous point on photoelectric position detector coincide together, to realize Spectral beam combining.The present invention can be suitable for the multiple beam of high brightness, more powerful output can be achieved.

Description

High power laser high brightness spectrum synthesis system
Technical field
Present invention relates generally to laser technology fields, refer in particular to a kind of high brightness Spectral beam combining suitable for high power laser System.
Background technique
With the continuous expansion of laser technology application field, the requirement to laser output power and beam quality is increasingly It is high.In numerous areas, the power of single laser, brightness have been unable to meet application demand.Carrying out synthesis to multiple laser is to be promoted The important channel of laser brightness, power.
As a kind of important way of light beam synthesis, Spectral beam combining can be relatively narrow by several beam center wavelength differences, line width Laser beam, beam of laser is synthesized by Spectral beam combining element (the usually dispersion elements such as grating).Spectral beam combining is to each road The coherence of light beam, power consistency, power stability do not require, do not need complicated phase controlling measure, Er Qieneng The enough total aperture output for realizing synthesis light beam, far-field energy concentration degree is good, is a kind of rising light beam synthesis mode.
In recent years, Spectral beam combining technology have developed rapidly, and the optical-fiber laser Spectral beam combining output power based on grating has reached Myriawatt magnitude is arrived.Barrier is but encountered however, carrying out Spectral beam combining using dispersion elements such as gratings and further promoting output power Hinder, there is no the Spectral beam combining scheme of ten mature myriawatt grades at present, because mainly there is the following aspects:
(1) grating is difficult to be resistant to the high power laser light irradiation of ten myriawatt grades.
It is (2) more demanding to the line width, polarization state, beam quality of each way light beam in order to guarantee grating diffration efficiency, Which has limited the power levels of each way light beam.
(3) grating is that receiving optical power highest, the thermal deformation of pressure the best part, grating can be led in entire Spectral beam combining The variation for causing optical axis, in existing Spectral beam combining scheme, it is more difficult to realize the High Efficiency Thermal management of pairing beam grating and to each road light The Corrective control of axis.
Summary of the invention
The technical problem to be solved in the present invention is that, for technical problem of the existing technology, the present invention provides one Kind can be suitable for the multiple beam of high brightness, the high power laser high brightness spectrum synthesis system of more high-power output can be achieved.
In order to solve the above technical problems, the invention adopts the following technical scheme:
A kind of high power laser high brightness spectrum synthesis system, comprising: N block plane mirror, a convergent lens and one A photoelectric position detector；The plane mirror includes substrate, and the two sides of the substrate is respectively reflecting surface and transmission plane；Institute Stating plane mirror is Mi, i=1,2 ... ... N, wavelength λ1Light beam be incident on plane mirror M1Reflecting surface on, pass through Plane mirror M1After reflection, it is incident on plane mirror M2Reflecting surface on, by M2After reflection, it is incident on plane mirror M3Reflecting surface on, and so on described in wavelength be λ1Light beam λ1It is sequentially reflected into plane mirror M alwaysNReflecting surface on, By plane mirror MNIt is exported after reflection；Wavelength is λiLight beam be incident on plane mirror Mi-1Transmission plane on, i= 2 ... ... N pass through plane mirror Mi-1Afterwards, it is incident on plane mirror MiReflecting surface on, by plane mirror MiReflection Afterwards, it is incident on plane mirror Mi+1Reflecting surface on, and so on described in wavelength be λiLight beam be sequentially reflected into plane always Reflecting mirror MNReflecting surface on, by plane reflector MNIt is exported after reflection；Across plane mirror MNN beam weak laser pass through It after the convergent lens, focuses on the photoelectric position detector, forms N number of luminous point；The optical axis of the road N incident laser is adjusted, N number of luminous point on the photoelectric position detector is set to coincide together, to realize Spectral beam combining；
The plane mirror Mi(i=1,2 ... ... N-1) reflecting surface, to light beam λ1、λ2、……、λiSpectral reflectivity > 99.99%, to light beam λi+1Spectral-transmission favtor > 99.9%；
The plane mirror Mi(i=1,2 ... ... N-1) transmission plane, to light beam λi+1Spectral-transmission favtor > 99.9%；
The plane mirror MNReflecting surface, to light beam λ1、λ2、……、λNSpectral reflectivity be 99.9%；
The plane mirror MNTransmission plane, to light beam λ1、λ2、……、λNSpectral transmission > 99.9%；
The angle of the light beam plane of incidence reflecting mirror is less than 20 °.
As a further improvement of the present invention: plating is formed with high-reflecting film, the transmission of the substrate on the reflecting surface of the substrate Plating is formed with anti-reflection film on face.
As a further improvement of the present invention: the plane mirror MiReflecting surface to light beam λ1、λ2、……、λiIt is high Instead, to light beam λi+1It is high saturating, i=1,2 ... ... N-1；The plane mirror MiTransmission plane to light beam λi+1It is high saturating, i=1, 2,……N-1；The plane mirror MNReflecting surface to light beam λ1、λ2、……、λNIt is high anti-；The plane mirror MNIt is saturating It penetrates in face of light beam λ1、λ2、……、λNIt is high saturating.
As a further improvement of the present invention: the plane mirror is using the small material of absorptivity as substrate.
As a further improvement of the present invention: the clear aperture of the convergent lens be greater than light beam bore, coaxiality < 3arcmin。
As a further improvement of the present invention: the photoelectric position detector uses PSD, is linear displacement type, test surface Product is greater than beam cross section product.
Compared with the prior art, the advantages of the present invention are as follows:
1, high power laser high brightness spectrum synthesis system of the invention, without using dispersion elements such as gratings, can bear ten Myriawatt magnitude power is easy to optical axis adjustment, can (wavelength is respectively λ by the different laser of N beam wavelength1、λ2、……、λN, In, λ1<λ2<……λN-1<λN) synthesize beam of laser.
2, high power laser high brightness spectrum synthesis system of the invention is designed, most of laser using emergency light reflex formula Energy reflects between two groups of plane mirrors, across the only single channel light beam of plane mirror, the function that plane mirror is born Rate pressure is smaller.
3, high power laser high brightness spectrum synthesis system of the invention, plane mirror use the material of absorptivity very little Production, to the energy absorption very little for passing through plane mirror.
4, high power laser high brightness spectrum synthesis system of the invention is avoided not using dispersion elements such as gratings The requirement of each road light beam line width for being limited by grating, polarization state, beam quality etc. is, it can be achieved that bigger power output.
5, high power laser high brightness spectrum synthesis system of the invention, the spectral reflectivity of each plane mirror is according to each The spectrum of road light beam is customized, and the wavelength selection of each road light beam has more flexibility.
6, high power laser high brightness spectrum synthesis system of the invention, using optical axis overall-in-one control schema, only with a light Electric position detector (PSD) can it is easy, effectively the optical axis control of each road light beam in the same direction.
Detailed description of the invention
Fig. 1 is principle schematic diagram of the present invention in an application example.
Fig. 2 is plane mirror MiThe spectral reflectivity schematic diagram of (i=1,2 ... N-1) reflecting surface.
Fig. 3 is plane mirror MiThe spectral-transmission favtor schematic diagram of (i=1,2 ... N-1) transmission plane.
Fig. 4 is plane mirror MNThe spectral reflectivity schematic diagram of reflecting surface.
Fig. 5 is that antiplane penetrates mirror MNThe spectral-transmission favtor schematic diagram of transmission plane.
Fig. 6 is principle schematic diagram of the present invention in another application example.
Specific embodiment
The present invention is described in further details below with reference to Figure of description and specific embodiment.
As shown in Figure 1, high power laser high brightness spectrum synthesis system of the invention, comprising: N block plane mirror, one A convergent lens and a photoelectric position detector；Plane mirror includes substrate, after the tow sides polishing of substrate respectively It is coated with high-reflecting film and anti-reflection film, forms reflecting surface and transmission plane.Wherein, it is illustrated in figure 2 plane mirror Mi(i=1, 2 ... ... N-1) reflecting surface spectral reflectivity, with guarantee to light beam λ1、λ2、……、λiHigh anti-(> 99.99%), to light beam λi+1 High saturating (> 99.9%).It is illustrated in figure 3 plane mirror MiThe spectral-transmission favtor of (i=1,2 ... ... N-1) transmission plane, to protect Card is to light beam λi+1High saturating (> 99.9%).It is illustrated in figure 4 plane mirror MNThe spectral reflectivity of reflecting surface, to guarantee To light beam λ1、λ2、……、λNHigh anti-(~99.9%), is illustrated in figure 5 plane mirror MNThe spectral-transmission favtor of transmission plane, with Guarantee to light beam λ1、λ2、……、λNHigh saturating (> 99.9%).
In light path layout shown in Fig. 1, wavelength λ1Light beam be incident on low-angle (such as: less than 20 ° of angles) Plane mirror M1Reflecting surface on, by M1After reflection, plane mirror M is incident on low-angle2Reflecting surface on, pass through M2After reflection, plane mirror M is incident on low-angle3Reflecting surface on ... ..., like this, light beam λ1It is sequentially reflected into always Plane mirror MNReflecting surface on, by MNIt is exported after reflection.Wavelength is λiThe light beam of (i=2 ... N) is incident on reflecting mirror Mi-1Transmission plane on, pass through reflecting mirror Mi-1Afterwards, plane mirror M is incident on low-angleiReflecting surface on, by MiReflection Afterwards, plane mirror M is incident on low-anglei+1Reflecting surface on ... ..., like this, light beam λiIt is sequentially reflected into plane always Reflecting mirror MNReflecting surface on, by MNIt is exported after reflection.
The spatial arrangement pattern of 8 tunnels (N=8 is even number) laser spectrum synthesis is given in example in Fig. 1,8 pieces flat Face reflecting mirror is arranged into the structure in open strong light cabin in the way of in Fig. 1.In another example, as shown in fig. 6, being The spatial arrangement pattern of 9 tunnels (N=9 is odd number) laser spectrum synthesis, principle is with above-mentioned almost the same.
Most energy (~99.9%) of the road N light beam pass through plane mirror MNIt exports, still has a small amount of after reflection (~0.1%) laser energy pass through MN.Across plane mirror MNN beam weak laser after convergent lens, focus on photoelectricity On position sensor, N number of luminous point is formed.
By the optical axis of the adjusting road N incident laser fine respectively, it is overlapped N number of luminous point on photoelectric position detector Together.This completes the adjustment of the road N incident beam optical axis, by plane mirror MNAfter reflection, the optical axis one of the road N light beam It causes, realizes Spectral beam combining.
In specific application example, N block plane mirror (M1、M2、……、MN) it is all made of the minimum material work of absorptivity For substrate, absorptivity can be < 0.1%, for example, without silhydrite.
In specific application example, convergent lens is greater than light beam using achromatism, the convergent lens of low aberrations, clear aperture Bore, coaxiality < 3arcmin.
In specific application example, photoelectric position detector uses PSD, is linear displacement type, position resolution < 1um@ 100uW, detection area is greater than beam cross section product.
The above is only the preferred embodiment of the present invention, protection scope of the present invention is not limited merely to above-described embodiment, All technical solutions belonged under thinking of the present invention all belong to the scope of protection of the present invention.It should be pointed out that for the art For those of ordinary skill, several improvements and modifications without departing from the principles of the present invention should be regarded as protection of the invention Range.

Claims (5)

1.一种大功率激光高亮度光谱合成系统，其特征在于，包括：N块平面反射镜、一个会聚透镜和一个光电位置探测器；所述平面反射镜包括基底，所述基底的两面分别为反射面和透射面；所述平面反射镜为Mi，i＝1,2,……N，波长为λ1的光束入射到平面反射镜M1的反射面上，经过平面反射镜M1反射后，入射到平面反射镜M2的反射面上，经过M2反射后，入射到平面反射镜M3的反射面上，以此类推所述波长为λ1的光束λ1一直顺次反射到平面反射镜MN的反射面上，经过平面反射镜MN反射后输出；波长为λi的光束入射到平面反射镜Mi-1的透射面上，i＝2,……N，穿过平面反射镜Mi-1后，入射到平面反射镜Mi的反射面上，经过平面反射镜Mi反射后，入射到平面反射镜Mi+1的反射面上，以此类推所述波长为λi的光束一直顺次反射到平面反射镜MN的反射面上，经过平面反射镜MN反射后输出；穿过平面反射镜MN的N束弱激光经过所述会聚透镜后，聚焦在所述光电位置探测器上，形成N个光点；调节N路入射激光的光轴，使所述光电位置探测器上的N个光点重合在一起，以实现光谱合成；1. a high-power laser high-brightness spectral synthesis system, is characterized in that, comprises: N pieces of plane reflection mirror, a convergent lens and a photoelectric position detector; Described plane reflection mirror comprises substrate, and the two sides of described substrate are respectively Reflecting surface and transmitting surface; the plane reflecting mirror is M i , i=1,2,...N, the light beam with wavelength λ 1 is incident on the reflecting surface of the plane reflecting mirror M 1 and is reflected by the plane reflecting mirror M 1 Then, it is incident on the reflective surface of the plane mirror M2 , and after being reflected by M2 , it is incident on the reflective surface of the plane mirror M3, and so on. The reflection surface of the plane mirror MN is reflected by the plane mirror MN and then output; the light beam with wavelength λ i is incident on the transmission surface of the plane mirror M i-1 , i=2,... N , passes through After the plane reflector Mi -1 , it is incident on the reflective surface of the plane reflector Mi, and after being reflected by the plane reflector Mi , it is incident on the reflective surface of the plane reflector Mi +1 , and so on. The light beam of λ i has been reflected to the reflection surface of the plane mirror MN in sequence, and then output after being reflected by the plane mirror MN ; N beams of weak laser light passing through the plane mirror MN pass through the condensing lens, and then focus. On the photoelectric position detector, form N light spots; adjust the optical axis of the N-channel incident laser light, so that the N light spots on the photoelectric position detector overlap together, so as to realize spectrum synthesis; 所述平面反射镜Mi(i＝1,2,……N-1)反射面，对光束λ1、λ2、……、λi的光谱反射率>99.99％，对光束λi+1的光谱透射率>99.9％；The reflecting surface of the plane mirror Mi ( i =1,2,...N-1) has a spectral reflectance >99.99% for the light beams λ 1 , λ 2 ,..., λ i , and for the light beams λ i+1 The spectral transmittance of >99.9%; 所述平面反射镜Mi(i＝1,2,……N-1)透射面，对光束λi+1的光谱透射率>99.9％；The transmission surface of the plane mirror Mi ( i =1, 2,...N-1) has a spectral transmittance to the light beam λ i+1 >99.9%; 所述平面反射镜MN反射面，对光束λ1、λ2、……、λN的光谱反射率为99.9％；The reflection surface of the plane mirror MN has a spectral reflectance of 99.9% for the light beams λ 1 , λ 2 , ···, λ N ; 所述平面反射镜MN透射面，对光束λ1、λ2、……、λN的光谱透射率>99.9％；The transmission surface of the plane mirror MN has a spectral transmittance of >99.9% to the light beams λ 1 , λ 2 , ···, λ N ; 所述光束入射平面反射镜的角度小于20°；The angle of the incident plane mirror of the light beam is less than 20°; 所述平面反射镜Mi(i＝1,2,……N-1)基底的反射面上镀制有边通型膜系结构的高反膜，所述平面反射镜Mi(i＝1,2,……N-1)基底的透射面上镀制有增透膜。A high-reflection film with an edge-pass type film structure is coated on the reflecting surface of the flat mirror Mi ( i =1,2,...N-1) , and the flat mirror Mi ( i =1 ,2,...N-1) The transmission surface of the substrate is coated with an anti-reflection coating. 2.根据权利要求1所述的大功率激光高亮度光谱合成系统，其特征在于，所述平面反射镜Mi的反射面对光束λ1、λ2、……、λi高反，对光束λi+1高透，i＝1,2,……N-1；所述平面反射镜Mi的透射面对光束λi+1高透，i＝1,2,……N-1；所述平面反射镜MN的反射面对光束λ1、λ2、……、λN高反；所述平面反射镜MN的透射面对光束λ1、λ2、……、λN高透。2. The high-power laser high-brightness spectrum synthesis system according to claim 1, wherein the reflection surface of the plane mirror Mi is highly inverse to the light beams λ 1 , λ 2 , . . . , λ i λ i+1 is highly transparent, i =1,2,...N-1; the transmission surface of the plane mirror Mi is highly transparent to the light beam λ i+1 , i=1,2,...N-1; The reflection surface of the plane reflection mirror MN is highly inverse to the light beams λ 1 , λ 2 , ..., λ N ; the transmission surface of the plane reflection mirror MN is highly inverse to the light beams λ 1 , λ 2 , ..., λ N through. 3.根据权利要求1或2所述的大功率激光高亮度光谱合成系统，其特征在于，所述平面反射镜采用吸收率小的材料作为基底。3. The high-power laser high-brightness spectrum synthesis system according to claim 1 or 2, wherein the plane mirror adopts a material with low absorptivity as a substrate. 4.根据权利要求1或2或3所述的大功率激光高亮度光谱合成系统，其特征在于，所述会聚透镜的通光口径大于光束的口径，共轴性<3arcmin。4. The high-power laser high-brightness spectral synthesis system according to claim 1, 2 or 3, characterized in that, the clear aperture of the condensing lens is larger than the aperture of the light beam, and the coaxiality is less than 3 arcmin. 5.根据权利要求1或2或3所述的大功率激光高亮度光谱合成系统，其特征在于，所述光电位置探测器采用PSD，为直线位移式，探测面积大于光束截面积。5. The high-power laser high-brightness spectral synthesis system according to claim 1, 2 or 3, wherein the photoelectric position detector adopts PSD, which is a linear displacement type, and the detection area is larger than the beam cross-sectional area.
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