CN105784212B - A kind of ceramic capacitive pressure sensor and preparation method - Google Patents
A kind of ceramic capacitive pressure sensor and preparation method Download PDFInfo
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- CN105784212B CN105784212B CN201610177293.XA CN201610177293A CN105784212B CN 105784212 B CN105784212 B CN 105784212B CN 201610177293 A CN201610177293 A CN 201610177293A CN 105784212 B CN105784212 B CN 105784212B
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- 239000000919 ceramic Substances 0.000 title claims abstract description 51
- 238000002360 preparation method Methods 0.000 title claims abstract description 20
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 100
- 239000010408 film Substances 0.000 claims description 128
- 239000000463 material Substances 0.000 claims description 37
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 26
- 238000009413 insulation Methods 0.000 claims description 18
- 239000004809 Teflon Substances 0.000 claims description 17
- 229920006362 Teflon® Polymers 0.000 claims description 17
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 17
- 229910052737 gold Inorganic materials 0.000 claims description 17
- 239000010931 gold Substances 0.000 claims description 17
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 15
- 229910018487 Ni—Cr Inorganic materials 0.000 claims description 15
- 239000000956 alloy Substances 0.000 claims description 15
- 229910045601 alloy Inorganic materials 0.000 claims description 15
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 claims description 15
- 229910052802 copper Inorganic materials 0.000 claims description 15
- 239000010949 copper Substances 0.000 claims description 15
- 239000011521 glass Substances 0.000 claims description 15
- 229910052709 silver Inorganic materials 0.000 claims description 15
- 239000004332 silver Substances 0.000 claims description 15
- 238000005516 engineering process Methods 0.000 claims description 14
- 229910052697 platinum Inorganic materials 0.000 claims description 14
- 239000002002 slurry Substances 0.000 claims description 13
- 238000005507 spraying Methods 0.000 claims description 12
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 11
- 238000007650 screen-printing Methods 0.000 claims description 10
- 229920005560 fluorosilicone rubber Polymers 0.000 claims description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 5
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 4
- 238000001771 vacuum deposition Methods 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims description 2
- 239000007921 spray Substances 0.000 claims 2
- 238000005245 sintering Methods 0.000 claims 1
- 239000004020 conductor Substances 0.000 abstract description 15
- 239000012530 fluid Substances 0.000 abstract description 13
- 238000005259 measurement Methods 0.000 abstract description 7
- 239000007788 liquid Substances 0.000 description 3
- 230000003071 parasitic effect Effects 0.000 description 3
- 230000001680 brushing effect Effects 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000010721 machine oil Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
- G01L1/148—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors using semiconductive material, e.g. silicon
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention discloses a kind of ceramic capacitive pressure sensor and preparation methods, pressure sensor includes pedestal, base top surface is equipped with pressure sensitive film, plane electrode is equipped between top surface and pressure sensitive film, pressure-sensitive film surface is provided with conductive shielding layer and insulating waterproof layer, base bottom surface is provided with conductive shielding layer, pedestal side wall forms groove or through-hole, groove or through-hole surfaces are provided with conductive shielding layer and insulating waterproof layer, the conductive shielding layer of conductive shielding layer connection pressure-sensitive film surface and base bottom surface in groove or through-hole.Base top surface, bottom surface conductive shielding layer connect with ASIC circuit ground wire, form electro-magnetic shielding cover, solve interference problem of the conductor fluid to measurement capacitance, make completely insulated between conductor fluid and pedestal, the groove of pedestal side wall or the conductive shielding layer of through-hole surfaces, the insulating waterproof layer of reliable electrical connection, pressure-sensitive face and groove or through-hole inner surface can be formed with top surface, bottom surface, conductive shielding layer and tested conductor fluid and shell can be kept apart.
Description
Technical field
The invention belongs to pressure sensor technique fields, relate in particular to a kind of ceramic capacitor-type for surveying conductor fluid
Pressure sensor and preparation method.
Background technology
Pressure sensor is one of modern surveying and the important technology of automated system, with small, light-weight, clever
Sensitivity is high, it is reliable and stable, convenient for integrated advantage, can be widely applied to the measurement of pressure, height, acceleration, flow velocity, pressure
With control.In numerous pressure sensor materials, ceramics are a kind of generally acknowledged high resiliency, anticorrosive, wear-resistant, shock resistance and shake
Dynamic material.The thermal stability property of ceramic capacitive pressure sensor can make its operating temperature range be up to -40~135
DEG C, and with high-precision, the high stability measured.Its anti-overload ability reaches as high as 100 times of range, thoroughly solves other
The disadvantage of type sensor overload capacity difference in small-range, ceramic capacitive pressure sensor are made due to the transmission of not no liquid
With without any filling liquid, not will produce process contamination, therefore have in food, medicine, refrigeration, automobile and other industries and widely answer
With, it is dry type ceramic diaphragm in addition, therefore do not influenced by installation direction, the pressure transmitter produced using it as sensing element is wide
It is applied generally in the various occasions for measuring pressure.
Existing ceramic capacitive pressure sensor core is set to pedestal top as shown in Figure 1, including pedestal 1
Plane electrode 2, the pressure-sensitive diaphragm 3 for being set to 2 top of plane electrode, pressure process act directly on the upper surface of pressure-sensitive diaphragm 3,
Electric capacitance change between the plane electrode 2 and pressure-sensitive diaphragm 3 proportional relationship with pressure size.Sensor core collocation is corresponding
ASIC number modulate circuits assemble in the shell, become complete capacitance pressure transducer, the pressure sensing of above-mentioned kind of structure
Device can be used for the pressure measurement of the non conducting fluids such as machine oil or freon, but will for the liquids and gases containing a large amount of moisture content
Failure, because water is conductor fluid, is equivalent to form a new plane electrode on ceramic condenser pressure-sensitive face, with ceramic flat surface
New parasitic capacitance is formed between electrode, shell, causes to measure the great offset of capacitance.
In order to solve the above technical problems, usually in ceramic condenser pressure-sensitive face increase electro-magnetic screen layer, and and cage connection, this
Sample, which is done, can only generate effectiveness, cannot solve interference problem of the conductors such as water to measurement capacitance, and reason has two：If
Shielded layer discord wiring board ground wire connection, conductor fluid, which still can generate parasitic capacitance, causes measurement capacitance value great partially
It moves；If the shielded layer is connected with wiring board ground wire, any variation of such external environment can be measured by grounding interference
Capacitance, and ground wire and shell are directly connected to not meet safety requirement.
Invention content
For this purpose, being only capable of measuring non-lead technical problem to be solved by the present invention lies in existing ceramic capacitive pressure sensor
Electrofluid easily forms new parasitic capacitance when measuring conductor fluid in ceramic condenser pressure-sensitive face, causes measurement capacitance great partially
It moves, increases the interference problem that electro-magnetic screen layer can not solve conductor to measurement capacitance, to propose a kind of measurable electrical conduction current
Ceramic capacitive pressure sensor of body and preparation method thereof.
In order to solve the above technical problems, the technical scheme is that：
The present invention provides a kind of ceramic capacitive pressure sensor, including, pedestal, the pedestal has a top surface and bottom
Face, the top surface are provided with pressure sensitive film, and a pair of parallel plane electrode is provided between the top surface and the pressure sensitive film, described
Pressure-sensitive film surface has been sequentially arranged conductive shielding layer and insulating waterproof layer from the bottom to top, and the base bottom surface is provided with conductive shield
Layer；The pedestal side wall forms perforative groove or through-hole up and down, and the groove or through-hole inner surface are along far from the pedestal
Direction be disposed with conductive shielding layer and insulating waterproof layer, conductive shielding layer in the groove or through-hole is connected to the sense
The conductive shielding layer on press mold surface and base bottom surface.
Preferably, the material of the conductive shielding layer is one or more of gold, silver, copper, nickel chromium triangle, ambrose alloy.
Preferably, the sheet resistivity of the conductive shielding layer is not more than 100 Ω/.
Preferably, the insulating waterproof layer is inorganic or organic insulation waterproof layer.
Preferably, the material of the insulating waterproof layer is one kind in glass glaze, fluorine silicone rubber or Teflon.
The present invention also provides a kind of preparation methods of ceramic capacitive pressure sensor, include the following steps：
S1, a pedestal is provided, pressure sensitive film is arranged in the base top surface, and plane electricity is provided between base top surface and pressure sensitive film
Pole prepares conductive shielding layer in the pressure-sensitive film surface, the groove of base bottom surface and the pedestal side wall or through-hole inner surface；
S2, the conductive shielding layer on the pressure sensitive film and the conductive shield layer surface in the groove or through-hole prepare exhausted
Edge waterproof layer.
Preferably, the preparation process of conductive shielding layer described in the step S1 is thick film print technology, spraying process
Or one kind in thin-film technique；The thick film print technology is：By conductive metal slurry by screen-printing deposition in pressure sensitive film
Conductive metal slurry is coated in the groove or through-hole, is then sintered at 450-900 DEG C by surface, base bottom surface by hand
15-30min；The spraying process is：Conductive metal slurry is sprayed at the pressure-sensitive film surface, base bottom surface and groove or is led to
In hole, then 15-30min is sintered at 450-900 DEG C；The thin-film technique is one in magnetron sputtering or technique for vacuum coating
Kind.
Preferably, using conductive layer thickness prepared by thick film print technology or spraying process for 5-30 μm, using film
Conductive layer thickness prepared by technique is 0.1-3 μm.
Preferably, in the step S2, the preparation process of the insulating waterproof layer is thick film print technology or spraying work
One kind in skill；The thick film print technology is：Insulative water-proof material web is printed in the conductive shielding layer in the pressure-sensitive face
Insulative water-proof material is coated on conductive shield layer surface in the groove or through-hole by surface by hand, is then sintered or is dried；Institute
When to state insulative water-proof material be glass glaze, it is sintered 15-30min at 450-850 DEG C, the insulative water-proof material is fluorine silicone rubber
Or when Teflon, 1-3h is dried at 100~200 DEG C；The spraying process is：By insulative water-proof material spraying in the pressure-sensitive
Then the surface of conductive shielding layer in the conductive shield layer surface and groove or through-hole of film is sintered or dries；The insulative water-proof
When material is glass glaze, 15-30min is sintered at 450-850 DEG C, the insulative water-proof material is fluorine silicone rubber or Teflon
When, dry 1-3h at 100~200 DEG C.
Preferably, insulative water-proof layer thickness prepared by the thick film print technology or spraying process is 5-100 μm.
The above technical solution of the present invention has the following advantages over the prior art：
(1) ceramic capacitive pressure sensor of the present invention, including, pedestal, the pedestal has a top and bottom,
Top surface is provided with pressure sensitive film, a pair of parallel plane electrode is provided between top surface and pressure sensitive film, pressure-sensitive film surface is from the bottom to top
It is sequentially arranged conductive shielding layer and insulating waterproof layer, base bottom surface is provided with conductive shielding layer；Pedestal side wall forms up and down
Perforative groove or through-hole, groove or through-hole inner surface are disposed with conductive shielding layer along the direction far from pedestal and insulation is anti-
The conductive shielding layer of conductive shielding layer connection pressure-sensitive film surface and base bottom surface in water layer, groove or through-hole.Base top surface,
Conductive shielding layer is arranged in bottom surface, and the conductive shielding layer is connect with ASIC circuit ground wire, forms electro-magnetic shielding cover, solves conduction
Fluid is to the interference problem of measurement capacitance, and when conducting fluid contacts to pressure-sensitive face, shielding cavity can thoroughly eliminate conductor fluid
Caused by electrostatic interference and electromagnetic interference, make completely insulated between conductor fluid and pedestal, meet test request；The base side
Wall forms the conductive shielding layer of perforative groove or through-hole up and down, groove or through-hole inner surface, can be formed with top surface, bottom surface
Reliable electrical connection；The insulating waterproof layer in pressure-sensitive face and groove or through-hole inner surface, can be by conductive shielding layer and tested electrical conduction current
Body and shell are kept apart, and the pressure resistance of shielded layer and shell fully meets test request up to 500-2000VAC.
(2) preparation method of ceramic capacitive pressure sensor of the present invention, including step：S1, a pedestal is provided,
Conductive shielding layer is prepared in pressure-sensitive film surface, the groove of base bottom surface and pedestal side wall or through-hole inner surface；S2, on pressure sensitive film
Conductive shielding layer and the groove or through-hole in conductive shield layer surface prepare insulating waterproof layer.This method is simple, is easy to
Operation, the ceramic capacitive pressure sensor suitable for mass production for surveying conductor fluid pressure.
Description of the drawings
In order to make the content of the present invention more clearly understood, it below according to specific embodiments of the present invention and combines
Attached drawing, the present invention is described in further detail, wherein
Fig. 1 is the sectional view of ceramic capacitive pressure sensor in the prior art；
Fig. 2 is the sectional view of the ceramic capacitive pressure sensor described in the embodiment of the present invention 1；
Fig. 3 is the schematic diagram of pedestal in ceramic capacitive pressure sensor described in the embodiment of the present invention 1.
Label is expressed as in figure：1- pedestals；2- plane electrodes；3- pressure sensitive films；4- conductive shielding layers；5- insulating waterproof layers；
6- grooves.
Specific implementation mode
Embodiment 1
The present embodiment provides a kind of ceramic capacitive pressure sensors, as shown in Figures 2 and 3 comprising, pedestal 1 is described
Pedestal 1 has a top surface and a bottom surface, and the top surface is provided with pressure sensitive film 3, a pair is provided between the top surface and pressure sensitive film 3
Parallel plane electrode 2, distance is 10-30 μm between two panels plane electrode 2, capacitance is formed, when pressure sensitive film 3 is occurred by external force
It deforms, capacitance changes between plane electrode 2, and the size changed according to capacitance can measure pressure size.The pressure-sensitive
3 surface of film has been sequentially arranged conductive shielding layer 4 and insulating waterproof layer 5 from the bottom to top；1 side wall of the pedestal forms to be run through up and down
Groove 6, the groove 6 inner surface is disposed with conductive shielding layer 4 and insulating waterproof layer along the direction far from the pedestal 1
5, the conductive shielding layer 4 in the groove 6 is connected to the conductive shielding layer 4 of 1 bottom surface of 3 surface of the pressure sensitive film and pedestal.
As disposable embodiment, the groove 6 or the through-hole for running through the pedestal 1 up and down are described logical
Hole inner wall is also provided with conductive shielding layer 4 and insulating waterproof layer 5 from inside to outside.
In the present embodiment, the material of the conductive shielding layer 4 is one in gold, silver, copper, platinum, nickel chromium triangle, ambrose alloy conductive material
Kind is several, and sheet resistivity is not more than 100 Ω/, and 4 material of conductive shielding layer is gold, the insulating waterproof layer 5 in the present embodiment
For insulating glass glaze layer.
The present embodiment also provides a kind of preparation method of ceramic capacitive pressure sensor, includes the following steps：
S1, a pedestal 1 is provided, 1 top surface of pedestal is provided with pressure sensitive film 3, plane is provided between base top surface and pressure sensitive film 3
Electrode 2 prepares conductive shielding layer 4 in 3 surface of pressure sensitive film, 1 bottom surface of pedestal and 6 inner surface of groove, Gold conductor is passed through screen printing
Brushing is overlying on 3 surface of pressure sensitive film, 1 bottom surface of pedestal, and above-mentioned slurry is coated in the groove 6 by hand, is then burnt at 450 DEG C
15min is tied, 4 thickness of conductive shielding layer obtained is 5 μm；
It is prepared by 4 surface of conductive shielding layer in S2,4 surface of conductive shielding layer and the groove 6 on the pressure sensitive film 3
Insulating waterproof layer 5 will be exhausted by conductive shielding layer 4 surface of the insulative water-proof glass glaze slip silk-screen printing above the pressure sensitive film 3
Edge waterproof glass glaze slip manual application is sintered 15min in 4 surface of conductive shielding layer in the groove 6 at 450 DEG C, is made
5 thickness of insulating waterproof layer be 5 μm.
Embodiment 2
The present embodiment provides a kind of ceramic capacitive pressure sensors, as shown in Figures 2 and 3 comprising, pedestal 1 is described
Pedestal 1 has a top surface and a bottom surface, and the top surface is provided with pressure sensitive film 3, a pair is provided between the top surface and pressure sensitive film 3
Parallel plane electrode 2, distance is 10-30 μm between two panels plane electrode 2, capacitance is formed, when pressure sensitive film 3 is occurred by external force
It deforms, capacitance changes between plane electrode 2, and the size changed according to capacitance can measure pressure size.
3 surface of the pressure sensitive film has been sequentially arranged conductive shielding layer 4 and insulating waterproof layer 5 from the bottom to top；1 side of the pedestal
Wall forms perforative groove 6 up and down, and 6 inner surface of the groove is disposed with conducting screen along the direction far from the pedestal 1
Layer 4 and insulating waterproof layer 5 are covered, the conductive shielding layer 4 in the groove 6 is connected to leading for 3 surface of the pressure sensitive film and 1 bottom surface of pedestal
Shield layer 4.
As disposable embodiment, the groove 6 or the through-hole for running through the pedestal 1 up and down are described logical
Hole inner wall is also provided with conductive shielding layer 4 and insulating waterproof layer 5 from inside to outside.
In the present embodiment, the material of the conductive shielding layer 4 is gold, silver, copper, platinum, nickel chromium triangle, one kind in ambrose alloy or several
Kind, in the present embodiment, the conductive shielding layer material is silver-colored, copper conductive material, sheet resistivity is not more than 100 Ω/, described
Insulating waterproof layer 5 is fluorosilicone rubber layer.
The present embodiment also provides a kind of preparation method of ceramic capacitive pressure sensor, includes the following steps：
S1, a pedestal 1 is provided, 1 top surface of pedestal is provided with pressure sensitive film 3, plane is provided between base top surface and pressure sensitive film 3
Electrode 2 prepares conductive shielding layer 4 in 3 surface of pressure sensitive film, 1 bottom surface of pedestal and 6 inner surface of groove, and silver, copper slurry are sprayed at institute
6 inner surface of 3 surface of pressure sensitive film, 1 bottom surface of pedestal and the groove is stated, 20min, conducting screen obtained are then sintered at 650 DEG C
It is 15 μm to cover 4 thickness of layer；
It is prepared by 4 surface of conductive shielding layer in S2,4 surface of conductive shielding layer and the groove 6 on the pressure sensitive film 3
Insulating waterproof layer 5,4 table of conductive shielding layer fluorine silicone rubber being sprayed in the conductive shielding layer 4 and groove 7 in the pressure-sensitive face
Face, dries 1min at 100 DEG C, and 5 thickness of insulating waterproof layer obtained is 20 μm.
Embodiment 3
The present embodiment provides a kind of ceramic capacitive pressure sensors, as shown in Figures 2 and 3 comprising, pedestal 1 is described
Pedestal 1 has a top surface and a bottom surface, and the top surface is provided with pressure sensitive film 3, a pair is provided between the top surface and pressure sensitive film 3
Parallel plane electrode 2, distance is 10-30 μm between two panels plane electrode 2, capacitance is formed, when pressure sensitive film 3 is occurred by external force
It deforms, capacitance changes between plane electrode 2, and the size changed according to capacitance can measure pressure size.
3 surface of the pressure sensitive film has been sequentially arranged conductive shielding layer 4 and insulating waterproof layer 5 from the bottom to top；1 side of the pedestal
Wall forms perforative groove 6 up and down, and 6 inner surface of the groove is disposed with conducting screen along the direction far from the pedestal 1
Layer 4 and insulating waterproof layer 5 are covered, the conductive shielding layer 4 in the groove 6 is connected to leading for 3 surface of the pressure sensitive film and 1 bottom surface of pedestal
Shield layer 4.
As disposable embodiment, the groove 6 or the through-hole for running through the pedestal 1 up and down are described logical
Hole inner wall is also provided with conductive shielding layer 4 and insulating waterproof layer 5 from inside to outside.
In the present embodiment, the material of the conductive shielding layer 4 is gold, silver, copper, platinum, nickel chromium triangle, one kind in ambrose alloy or several
Kind, in the present embodiment, 4 material of the conductive shielding layer is nickel chromium triangle, and sheet resistivity is not more than 100 Ω/, the insulating waterproof layer
5 be insulating glass glaze layer.
The present embodiment also provides a kind of preparation method of ceramic capacitive pressure sensor, includes the following steps：
S1, a pedestal 1 is provided, 1 top surface of pedestal is provided with pressure sensitive film 3, is provided between 1 top surface of pedestal and pressure sensitive film 3 flat
Face electrode 2 prepares conductive shielding layer 4 in 3 surface of the pressure sensitive film, 1 bottom surface of pedestal and 6 inner surface of groove, nickel chromium triangle slurry is led to
It crosses screen printing brushing and is overlying on 3 surface of the pressure sensitive film, 1 bottom surface of pedestal, conductive metal slurry is coated on the groove 6 by hand
It is interior, 30min is then sintered at 900 DEG C, 4 thickness of conductive shielding layer obtained is 30 μm；
4 surface of conductive shielding layer in S2, conductive shielding layer 4 and the groove 6 on the pressure sensitive film 3 prepares insulation
Waterproof layer 5, the conductive shielding layer 4 insulative water-proof glass glaze slip being sprayed in the conductive shielding layer 4 and groove 6 in the pressure-sensitive face
Surface, is sintered 30min at 850 DEG C, and 5 thickness of insulating waterproof layer obtained is 100 μm.
Embodiment 4
The present embodiment provides a kind of ceramic capacitive pressure sensors, as shown in Figures 2 and 3 comprising, pedestal 1 is described
Pedestal 1 has a top surface and a bottom surface, and the top surface is provided with pressure sensitive film 3, a pair is provided between the top surface and pressure sensitive film 3
Parallel plane electrode 2, distance is 10-30 μm between two panels plane electrode 2, capacitance is formed, when pressure sensitive film 3 is occurred by external force
It deforms, capacitance changes between plane electrode 2, and the size changed according to capacitance can measure pressure size.
3 surface of the pressure sensitive film has been sequentially arranged conductive shielding layer 4 and insulating waterproof layer 5 from the bottom to top；1 side of the pedestal
Wall forms perforative groove 6 up and down, and 6 inner surface of the groove is disposed with conducting screen along the direction far from the pedestal 1
Layer 4 and insulating waterproof layer 5 are covered, the conductive shielding layer 4 in the groove 6 is connected to leading for 3 surface of the pressure sensitive film and base bottom surface
Shield layer 4.
As disposable embodiment, the groove 6 or the through-hole for running through the pedestal 1 up and down are described logical
Hole inner wall is also provided with conductive shielding layer 4 and insulating waterproof layer 5 from inside to outside.
In the present embodiment, the material of the conductive shielding layer 4 is gold, silver, copper, platinum, nickel chromium triangle, one kind in ambrose alloy or several
Kind, in the present embodiment, the conductive shielding layer 4 is platinum layer, and sheet resistivity is not more than 100 Ω/, and the insulating waterproof layer 5 is
Teflon layer.
The present embodiment also provides a kind of preparation method of ceramic capacitive pressure sensor, includes the following steps：
S1, make silver in 6 inner surface shape of 3 surface of the pressure sensitive film, 1 bottom surface of pedestal and the groove by magnetron sputtering technique
At platinum conductive shielding layer 4,4 thickness of conductive shielding layer obtained is 0.1 μm；
4 surface of conductive shielding layer in S2, conductive shielding layer 4 and the groove 6 on the pressure sensitive film 3 prepares insulation
Teflon is sprayed at conductive shielding layer 4 in 4 surface of conductive shielding layer and groove 6 of 3 top of the pressure sensitive film by waterproof layer 5
Surface, then dries 3h at 200 DEG C, and the waterproof insulation layer thickness is 70 μm.
Embodiment 5
The present embodiment provides a kind of ceramic capacitive pressure sensors, as shown in Figures 2 and 3 comprising, pedestal 1 is described
Pedestal 1 has a top surface and a bottom surface, and the top surface is provided with pressure sensitive film 3, a pair is provided between the top surface and pressure sensitive film 3
Parallel plane electrode 2, distance is 10-30 μm between two panels plane electrode 2, capacitance is formed, when pressure sensitive film 3 is occurred by external force
It deforms, capacitance changes between plane electrode 2, and the size changed according to capacitance can measure pressure size.
3 surface of the pressure sensitive film has been sequentially arranged conductive shielding layer 4 and insulating waterproof layer 5 from the bottom to top；1 side of the pedestal
Wall forms perforative groove 6 up and down, and 6 inner surface of the groove is disposed with conducting screen along the direction far from the pedestal 1
Layer 4 and insulating waterproof layer 5 are covered, the conductive shielding layer 4 in the groove 6 is connected to leading for 3 surface of the pressure sensitive film and base bottom surface
Shield layer 4.
As disposable embodiment, the groove 6 or the through-hole for running through the pedestal 1 up and down are described logical
Hole inner wall is also provided with conductive shielding layer 4 and insulating waterproof layer 5 from inside to outside.
In the present embodiment, the material of the conductive shielding layer 4 is gold, silver, copper, platinum, nickel chromium triangle, one kind in ambrose alloy or several
Kind, in the present embodiment, the material of the conductive shielding layer 4 is ambrose alloy, sheet resistivity is not more than 100 Ω/, and the insulation is anti-
Water layer 5 is Teflon layer.
The present embodiment also provides a kind of preparation method of ceramic capacitive pressure sensor, includes the following steps：
S1, make silver in 6 inner surface shape of 3 surface of the pressure sensitive film, 1 bottom surface of pedestal and the groove by technique for vacuum coating
At ambrose alloy conductive shielding layer 4,4 thickness of conductive shielding layer obtained is 3 μm；
4 surface of conductive shielding layer in S2, conductive shielding layer 4 and the groove 6 on the pressure sensitive film 3 prepares insulation
Teflon is coated on by waterproof layer 5 by conductive shielding layer 4 surface of the Teflon silk-screen printing above the pressure sensitive film 3 by hand
The surface of conductive shielding layer 4 in groove 6, then dries 2h at 150 DEG C, and the waterproof insulation layer thickness is 80 μm.
Embodiment 6
The present embodiment provides a kind of ceramic capacitive pressure sensors, as shown in Figures 2 and 3 comprising, pedestal 1 is described
Pedestal 1 has a top surface and a bottom surface, and the top surface is provided with pressure sensitive film 3, a pair is provided between the top surface and pressure sensitive film 3
Parallel plane electrode 2, distance is 10-30 μm between two panels plane electrode 2, capacitance is formed, when pressure sensitive film 3 is occurred by external force
It deforms, capacitance changes between plane electrode 2, and the size changed according to capacitance can measure pressure size.
3 surface of the pressure sensitive film has been sequentially arranged conductive shielding layer 4 and insulating waterproof layer 5 from the bottom to top；1 side of the pedestal
Wall forms perforative groove 6 up and down, and 6 inner surface of the groove is disposed with conducting screen along the direction far from the pedestal 1
Layer 4 and insulating waterproof layer 5 are covered, the conductive shielding layer 4 in the groove 6 is connected to leading for 3 surface of the pressure sensitive film and base bottom surface
Shield layer 4.
As disposable embodiment, the groove 6 or the through-hole for running through the pedestal 1 up and down are described logical
Hole inner wall is also provided with conductive shielding layer 4 and insulating waterproof layer 5 from inside to outside.
In the present embodiment, the material of the conductive shielding layer 4 is gold, silver, copper, platinum, nickel chromium triangle, one kind in ambrose alloy or several
Kind, in the present embodiment, the conductive shielding layer 4 is nickel chromium triangle, silver-colored material, sheet resistivity is not more than 100 Ω/, and the insulation is anti-
Water layer 5 is Teflon layer.
The present embodiment also provides a kind of preparation method of ceramic capacitive pressure sensor, includes the following steps：
S1, make nickel chromium triangle, silver in 3 surface of the pressure sensitive film, 1 bottom surface of pedestal and the groove 6 by magnetron sputtering technique
Surface forms silver-colored conductive shielding layer 4, and 4 thickness of conductive shielding layer obtained is 1 μm；
It is prepared by 4 surface of conductive shielding layer in S2,4 surface of conductive shielding layer and the groove 6 on the pressure sensitive film 3
Insulating waterproof layer 5 will be exhausted by conductive shielding layer 4 surface of the insulative water-proof glass glaze slip silk-screen printing above the pressure sensitive film 3
Edge waterproof glass glaze slip manual application is sintered 30min in 4 surface of conductive shielding layer in the groove 6 at 850 DEG C, is made
5 thickness of insulating waterproof layer be 100 μm.
Embodiment 7
The present embodiment provides a kind of ceramic capacitive pressure sensors, as shown in Figures 2 and 3 comprising, pedestal 1 is described
Pedestal 1 has a top surface and a bottom surface, and the top surface is provided with pressure sensitive film 3, a pair is provided between the top surface and pressure sensitive film 3
Parallel plane electrode 2, distance is 10-30 μm between two panels plane electrode 2, capacitance is formed, when pressure sensitive film 3 is occurred by external force
It deforms, capacitance changes between plane electrode 2, and the size changed according to capacitance can measure pressure size.
3 surface of the pressure sensitive film has been sequentially arranged conductive shielding layer 4 and insulating waterproof layer 5 from the bottom to top；1 side of the pedestal
Wall forms perforative groove 6 up and down, and 6 inner surface of the groove is disposed with conducting screen along the direction far from the pedestal 1
Layer 4 and insulating waterproof layer 5 are covered, the conductive shielding layer 4 in the groove 6 is connected to leading for 3 surface of the pressure sensitive film and base bottom surface
Shield layer 4.
As disposable embodiment, the groove 6 or the through-hole for running through the pedestal 1 up and down are described logical
Hole inner wall is also provided with conductive shielding layer 4 and insulating waterproof layer 5 from inside to outside.
In the present embodiment, the material of the conductive shielding layer 4 is gold, silver, copper, platinum, nickel chromium triangle, one kind in ambrose alloy or several
Kind, in the present embodiment, the material of the conductive shielding layer 4 is gold, platinum, and sheet resistivity is not more than 100 Ω/, and the insulation is anti-
Water layer 5 is Teflon layer.
The present embodiment also provides a kind of preparation method of ceramic capacitive pressure sensor, includes the following steps：
S1, a pedestal 1 is provided, 1 top surface of pedestal is provided with pressure sensitive film 3, plane is provided between base top surface and pressure sensitive film 3
Electrode 2 prepares conductive shielding layer 4 in 3 surface of pressure sensitive film, 1 bottom surface of pedestal and 6 inner surface of groove, and gold, platinum slurry are sprayed at institute
6 inner surface of 3 surface of pressure sensitive film, 1 bottom surface of pedestal and the groove is stated, 30min, conducting screen obtained are then sintered at 900 DEG C
It is 90 μm to cover 4 thickness of layer；
It is prepared by 4 surface of conductive shielding layer in S2,4 surface of conductive shielding layer and the groove 6 on the pressure sensitive film 3
Insulating waterproof layer 5 will be exhausted by conductive shielding layer 4 surface of the insulative water-proof glass glaze slip silk-screen printing above the pressure sensitive film 3
Edge waterproof glass glaze slip manual application is sintered 20min in 4 surface of conductive shielding layer in the groove 6 at 550 DEG C, is made
5 thickness of insulating waterproof layer be 40 μm.
Embodiment 8
The present embodiment provides a kind of ceramic capacitive pressure sensors, as Figure 2-3 comprising, pedestal 1, the base
There is seat 1 top surface and a bottom surface, the top surface to be provided with pressure sensitive film 3, is provided between the top surface and pressure sensitive film 3 a pair of flat
Capable plane electrode 2, distance is 10-30 μm between two panels plane electrode 2, capacitance is formed, when pressure sensitive film 3 is become by external force
Shape, capacitance changes between plane electrode 2, and the size changed according to capacitance can measure pressure size.
3 surface of the pressure sensitive film has been sequentially arranged conductive shielding layer 4 and insulating waterproof layer 5 from the bottom to top；1 side of the pedestal
Wall forms perforative groove 6 up and down, and 6 inner surface of the groove is disposed with conducting screen along the direction far from the pedestal 1
Layer 4 and insulating waterproof layer 5 are covered, the conductive shielding layer 4 in the groove 6 is connected to leading for 3 surface of the pressure sensitive film and base bottom surface
Shield layer 4.
As disposable embodiment, the groove 6 or the through-hole for running through the pedestal 1 up and down are described logical
Hole inner wall is also provided with conductive shielding layer 4 and insulating waterproof layer 5 from inside to outside.
In the present embodiment, the material of the conductive shielding layer 4 is gold, silver, copper, platinum, nickel chromium triangle, one kind in ambrose alloy or several
Kind, in this implementation, the material of the conductive shielding layer 4 is copper, and sheet resistivity is not more than 100 Ω/, the insulating waterproof layer 5
For Teflon layer.
The present embodiment also provides a kind of preparation method of ceramic capacitive pressure sensor, includes the following steps：
S1, a pedestal 1 is provided, 1 top surface of pedestal is provided with pressure sensitive film 3, plane is provided between base top surface and pressure sensitive film 3
Electrode 2 prepares conductive shielding layer 4 in 3 surface of pressure sensitive film, 1 bottom surface of pedestal and 6 inner surface of groove, copper slurry is sprayed at described
6 inner surface of 3 surface of pressure sensitive film, 1 bottom surface of pedestal and the groove, is then sintered 15min, conductive shield obtained at 450 DEG C
4 thickness of layer are 30 μm；
4 surface of conductive shielding layer in S2, conductive shielding layer 4 and the groove 6 on the pressure sensitive film 3 prepares insulation
Teflon is sprayed at conductive shielding layer 4 in 4 surface of conductive shielding layer and groove 6 of 3 top of the pressure sensitive film by waterproof layer 5
Surface, then dries 2h at 150 DEG C, and the waterproof insulation layer thickness is 50 μm.
Embodiment 9
The present embodiment provides a kind of ceramic capacitive pressure sensors, as Figure 2-3 comprising, pedestal 1, the base
There is seat 1 top surface and a bottom surface, the top surface to be provided with pressure sensitive film 3, is provided between the top surface and pressure sensitive film 3 a pair of flat
Capable plane electrode 2, distance is 10-30 μm between two panels plane electrode 2, capacitance is formed, when pressure sensitive film 3 is become by external force
Shape, capacitance changes between plane electrode 2, and the size changed according to capacitance can measure pressure size.
3 surface of the pressure sensitive film has been sequentially arranged conductive shielding layer 4 and insulating waterproof layer 5 from the bottom to top；1 side of the pedestal
Wall forms perforative groove 6 up and down, and 6 inner surface of the groove is disposed with conducting screen along the direction far from the pedestal 1
Layer 4 and insulating waterproof layer 5 are covered, the conductive shielding layer 4 in the groove 6 is connected to leading for 3 surface of the pressure sensitive film and base bottom surface
Shield layer 4.
As disposable embodiment, the groove 6 or the through-hole for running through the pedestal 1 up and down are described logical
Hole inner wall is also provided with conductive shielding layer 4 and insulating waterproof layer 5 from inside to outside.
In the present embodiment, the material of the conductive shielding layer 4 is gold, silver, copper, platinum, nickel chromium triangle, one kind in ambrose alloy or several
Kind, in the present embodiment, 4 material of the conductive shielding layer is gold, ambrose alloy, and sheet resistivity is not more than 100 Ω/, and the insulation is anti-
Water layer 5 is Teflon layer.
The present embodiment also provides a kind of preparation method of ceramic capacitive pressure sensor, includes the following steps：
S1, a pedestal 1 is provided, 1 top surface of pedestal is provided with pressure sensitive film 3, plane is provided between base top surface and pressure sensitive film 3
Electrode 2 prepares conductive shielding layer 4 in 3 surface of pressure sensitive film, 1 bottom surface of pedestal and 6 inner surface of groove, and gold, ambrose alloy slurry are sprayed at
6 inner surface of 3 surface of the pressure sensitive film, 1 bottom surface of pedestal and the groove, is then sintered 18min, conduction obtained at 700 DEG C
4 thickness of shielded layer is 60 μm；
4 surface of conductive shielding layer in S2, conductive shielding layer 4 and the groove 6 on the pressure sensitive film 3 prepares insulation
Then waterproof layer 5 dries on conductive shielding layer 4 surface of the Teflon silk-screen printing above the pressure sensitive film 3 at 100 DEG C
2h, the waterproof insulation layer thickness are 40 μm.
Obviously, the above embodiments are merely examples for clarifying the description, and does not limit the embodiments.It is right
For those of ordinary skill in the art, can also make on the basis of the above description it is other it is various forms of variation or
It changes.There is no necessity and possibility to exhaust all the enbodiments.And it is extended from this it is obvious variation or
It changes still within the protection scope of the invention.
Claims (9)
1. a kind of ceramic capacitive pressure sensor, including, pedestal, the pedestal has a top and bottom, and the top surface is set
It is equipped with pressure sensitive film, a pair of parallel plane electrode is provided between the top surface and the pressure sensitive film, which is characterized in that the sense
Press mold surface has been sequentially arranged conductive shielding layer and insulating waterproof layer from the bottom to top, and the base bottom surface is provided with conductive shield
Layer；The pedestal side wall forms perforative groove or through-hole up and down, and the groove or through-hole inner surface are along far from the pedestal
Direction be disposed with conductive shielding layer and insulating waterproof layer, conductive shielding layer in the groove or through-hole is connected to the sense
The conductive shielding layer on press mold surface and base bottom surface；
The ceramic capacitive pressure sensor is made by the steps：
S1, a pedestal being provided, the base top surface is arranged pressure sensitive film, plane electrode is provided between base top surface and pressure sensitive film,
Conductive shielding layer is prepared in the pressure-sensitive film surface, the groove of base bottom surface and the pedestal side wall or through-hole inner surface；
It is anti-that S2, the conductive shielding layer on the pressure sensitive film and the conductive shield layer surface in the groove or through-hole prepare insulation
Water layer.
2. ceramic capacitive pressure sensor according to claim 1, which is characterized in that the material of the conductive shielding layer
For one or more of gold, silver, copper, platinum, nickel chromium triangle, ambrose alloy.
3. ceramic capacitive pressure sensor according to claim 1 or 2, which is characterized in that the conductive shielding layer
Sheet resistivity is not more than 100 Ω/.
4. ceramic capacitive pressure sensor according to claim 3, which is characterized in that the insulating waterproof layer is inorganic
Or organic insulation waterproof layer.
5. ceramic capacitive pressure sensor according to claim 4, which is characterized in that the material of the insulating waterproof layer
For one kind in glass glaze, fluorine silicone rubber or Teflon.
6. ceramic capacitive pressure sensor according to claim 5, which is characterized in that conductive described in the step S1
The preparation process of shielded layer is one kind in thick film print technology, spraying process or thin-film technique；The thick film print technology is：
Conductive metal slurry is coated on by screen-printing deposition in pressure-sensitive film surface, base bottom surface by conductive metal slurry by hand
In the groove or through-hole, then 15-30min is sintered at 450-900 DEG C；The spraying process is：By conductive metal slurry
It is sprayed at the pressure-sensitive film surface, in base bottom surface and groove or through-hole, is then sintered 15-30min at 450-900 DEG C；Institute
It is one kind in magnetron sputtering or technique for vacuum coating to state thin-film technique.
7. ceramic capacitive pressure sensor according to claim 6, which is characterized in that use thick film print technology or spray
It is 5-30 μm to apply conductive layer thickness prepared by technique, uses conductive layer thickness prepared by thin-film technique for 0.1-3 μm.
8. ceramic capacitive pressure sensor according to claim 7, which is characterized in that described exhausted in the step S2
The preparation process of edge waterproof layer is one kind in thick film print technology or spraying process；The thick film print technology is：It will insulation
Insulative water-proof material is coated on the groove by waterproof material silk-screen printing by hand in the conductive shield layer surface of the pressure sensitive film
Or conductive shield layer surface in through-hole, it is then sintered or dries；When the insulative water-proof material is glass glaze, in 450-850 DEG C
Lower sintering 15-30min dries 1-3h when the insulative water-proof material is fluorine silicone rubber or Teflon at 100~200 DEG C；Institute
Stating spraying process is：By insulative water-proof material spraying in conductive in the conductive shield layer surface and groove or through-hole of the pressure sensitive film
Then the surface of shielded layer is sintered or dries；When the insulative water-proof material is glass glaze, 15- is sintered at 450-850 DEG C
30min dries 1-3h when the insulative water-proof material is fluorine silicone rubber or Teflon at 100~200 DEG C.
9. ceramic capacitive pressure sensor according to claim 8, which is characterized in that the thick film print technology or spray
It is 5-100 μm to apply insulative water-proof layer thickness prepared by technique.
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| US10233571B1 (en) * | 2017-12-26 | 2019-03-19 | GM Global Technology Operations LLC | Multi-functional textiles with integrated sensing and control elements |
| EP3751740A1 (en) * | 2019-06-12 | 2020-12-16 | Captron Electronic GmbH | Water insensitive capacitive sensor switch |
| CN110686806A (en) * | 2019-11-07 | 2020-01-14 | 徐州陀微传感科技有限公司 | Pressure sensor and preparation method thereof |
| CN113483828A (en) * | 2021-08-11 | 2021-10-08 | 深圳聚德寿科技有限公司 | Double-piece ceramic warm-pressing core body and preparation method thereof |
| CN113884225A (en) * | 2021-10-09 | 2022-01-04 | 广州九思科技有限公司 | Transient response ceramic capacitance pressure sensor and manufacturing method thereof |
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