CN105866348A - Technological cavity oxygen concentration detecting system and technological cavity oxygen concentration detecting method - Google Patents
Technological cavity oxygen concentration detecting system and technological cavity oxygen concentration detecting method Download PDFInfo
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- CN105866348A CN105866348A CN201610355245.5A CN201610355245A CN105866348A CN 105866348 A CN105866348 A CN 105866348A CN 201610355245 A CN201610355245 A CN 201610355245A CN 105866348 A CN105866348 A CN 105866348A
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- oxygen concentration
- process cavity
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- way valve
- nitrogen
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0011—Sample conditioning
- G01N33/0018—Sample conditioning by diluting a gas
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- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
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- Combustion & Propulsion (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
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- Pathology (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
Abstract
The invention provides a technological cavity oxygen concentration detecting system and a technological cavity oxygen concentration detecting method. The technological cavity oxygen concentration detecting system comprises a foreline, a three-way valve, a mass flow controller and an oxygen concentration detector. Gas from a technological cavity is introduced into the first input end of the three-way cavity through the foreline, the mass flow controller is installed at the second input end of the three-way valve, and the second input end of the three-way valve receives nitrogen making the temperature of gas from the technological cavity reduced, and the output end of the three-way valve is connected to the oxygen concentration detector.
Description
Technical field
The present invention relates to field of semiconductor manufacture, be specifically related to gas piping and control technical field；More specifically
Say, the present invention relates to a kind of process cavity oxygen concentration detecting system and process cavity oxygen concentration detection side
Method.
Background technology
Currently, the nitrogen purge flow of oxygen concentration detector is usually set to less than 5ppm, and actual can
Adjust monitoring dial gauge minimum zone be 50ppm, thus cause engineer regulate flow time can only be big
Cause to judge pointer near scale 0 for standard, and finally judged to detect by technique department use test wafer
Whether the nitrogen purge flow of oxygen concentration detector sets normally.
Due to the inaccuracy of setting operation, cause the nitrogen amount flowing into oxygen concentration detector uncertain, make work
The degree that in skill cavity, the gas of sampling is diluted by nitrogen is uncertain, finally affects oxygen concentration detector detecting
The mistake of process cavity oxygen content.
Meanwhile, between homotype board due to nitrogen set cannot ensure completely the same, make board each other without
Method well completes coupling.
It would thus be desirable to provide the technology of a kind of accurately detection that can effectively carry out process cavity oxygen concentration
Scheme.
Summary of the invention
The technical problem to be solved is for there is drawbacks described above in prior art, it is provided that Yi Zhongneng
The system and method for enough accurately detections effectively carrying out process cavity oxygen concentration.
In order to realize above-mentioned technical purpose, according to the present invention, it is provided that a kind of process cavity oxygen concentration detection
System, including: fore line, three-way valve, mass flow controller and oxygen concentration detector；Wherein,
Gas from process cavity is switched to the first input end of three-way valve, mass flow controller by fore line
It is arranged on the second input end of three-way valve, and the second input of three-way valve receives and is used for making from process cavity
The nitrogen that the temperature of the gas of body reduces, the outfan of three-way valve is connected to oxygen concentration detector.
Preferably, the gas from process cavity is mixed gas.
Preferably, the gas from process cavity comprises oxygen.
Preferably, the gas from process cavity comprises oxygen and nitrogen.
According to the present invention, additionally provide a kind of process cavity oxygen concentration detection method and include:
First step: by fore line, the gas from process cavity is passed through the first input end of three-way valve；
Second step: mass flow controller is arranged on the second input end of three-way valve；
Third step: according to the predetermined amount of flow of the diluent nitrogen of the setting of mass flow controller, to three-way valve
The second input be passed through the dilution nitrogen for the predetermined amount of flow making the temperature of the gas from process cavity reduce
Gas；
4th step: utilize oxygen concentration detector to measure in the mixed gas of outfan output of three-way valve
Oxygen concentration.
Preferably, described process cavity oxygen concentration detection method also includes: according to mass flow controller
The oxygen concentration that the predetermined amount of flow of the diluent nitrogen set and gas concentration detecting device are measured, calculates from technique
Oxygen concentration in the gas of cavity.
Preferably, the gas from process cavity is mixed gas.
Preferably, the gas from process cavity comprises oxygen.
Preferably, the gas from process cavity comprises oxygen and nitrogen.
The present invention is by increasing flow controller in the purification circuit of oxygen detector, it is achieved in process cavity
The accurate detection of oxygen concentration, and present invention achieves the concordance of homotype board oxygen concentration detecting result,
Avoid the product defects caused due to detecting results abnormity simultaneously.
Accompanying drawing explanation
In conjunction with accompanying drawing, and by with reference to detailed description below, it will more easily the present invention is had more complete
Understand and its adjoint advantage and feature is more easily understood, wherein:
Fig. 1 schematically shows the system signal to the detection of process cavity oxygen concentration according to prior art
Figure.
Fig. 2 schematically shows process cavity oxygen concentration detecting system according to the preferred embodiment of the invention
Schematic diagram.
Fig. 3 schematically shows process cavity oxygen concentration detection method according to the preferred embodiment of the invention
Flow chart.
It should be noted that accompanying drawing is used for illustrating the present invention, and the unrestricted present invention.Note, represent structure
Accompanying drawing may be not necessarily drawn to scale.Further, in accompanying drawing, same or like element indicate identical or
The label that person is similar to.
Detailed description of the invention
In order to make present disclosure more clear and understandable, below in conjunction with specific embodiments and the drawings to this
Bright content is described in detail.
At present, as it is shown in figure 1, when process cavity being carried out oxygen concentration detection, from process cavity
Gas flows into three-way valve via fore line, and nitrogen dilution loop flows simultaneously into three-way valve, and gas mixes
It is flowed into oxygen concentration detector afterwards to detect.When oxygen concentration is higher than the setting value of technological parameter,
Be passed through nitrogen in process cavity to be diluted, until oxygen concentration detector measurement to concentration set less than technique
During definite value, stopping the detection of oxygen concentration, three-way valve is closed, and process cavity starts follow-up process conditions,
Finally ensure that the oxygen concentration in process cavity is less than setting requirement, it is to avoid product and oxygen reaction cause finally
Product rejection.
But, owing to the temperature of process cavity is higher than 1000 DEG C, in order to improve the use of oxygen concentration detector
In the life-span, employ three-way valve, increase nitrogen dilution loop, make the mixed gas of entrance oxygen concentration detector
Temperature reduces.When the nitrogen of dilution is excessive, with regard to oxygen concentration detector detected value less than actual process cavity
Concentration, cause process cavity dilution not, product is impacted.
Effusion meter is increased on present invention nitrogen purge loop in oxygen concentration detector sampling circuit, it is ensured that
The dilution of process cavity concentration is realized consistent by nitrogen.Mass flowmenter is a kind of accurate measurement gas flow
Instrument, its measured value is not because of temperature or the fluctuation of pressure and misalignment, it is not necessary to temperature pressure compensation；It can
Automatically control gas flow, i.e. user can carry out flow set as required, makes mass flowmenter automatically will
Constant flow, in setting value, even if system pressure has fluctuation or temperature to change, also will not cause a deviation from
Setting value.
After increasing mass flow controller by nitrogen dilution loop, no matter whether factory service pressure fluctuates, all
It is capable of the consistent of inflow gas, solves under present circumstances only pressure regulator valve simultaneously, and precision is the highest leads
The mutual board pressure caused sets cannot be consistent.
After increasing mass flow controller by nitrogen dilution loop, it is ensured that nitrogen amount of dilution is fixed, and makes work
Skill cavity oxygen concentration inspection keeps consistent, is capable of coupling between homotype board simultaneously.
Fig. 2 schematically shows process cavity oxygen concentration detecting system according to the preferred embodiment of the invention
Schematic diagram.
Specifically, as in figure 2 it is shown, according to the preferred embodiment of the invention process cavity oxygen concentration detection system
System includes: fore line, three-way valve, mass flow controller and oxygen concentration detector；Wherein, front
Gas from process cavity is switched to the first input end of three-way valve by level pipeline, and mass flow controller is pacified
It is contained in the second input end of three-way valve, and the second input of three-way valve receives and is used for making from process cavity
Gas temperature reduce nitrogen, the outfan of three-way valve is connected to oxygen concentration detector.
Wherein, the gas from process cavity is mixed gas.And, the gas from process cavity comprises
Oxygen.Preferably, the gas from process cavity comprises oxygen and nitrogen, such as from the gas of process cavity
Body is combined by oxygen and nitrogen.
Fig. 3 schematically shows process cavity oxygen concentration detection method according to the preferred embodiment of the invention
Flow chart.Process cavity oxygen concentration detection method have employed Fig. 2 institute according to the preferred embodiment of the invention
The system shown.
Specifically, as it is shown on figure 3, process cavity oxygen concentration detection side according to the preferred embodiment of the invention
Method includes:
First step S1: by fore line, the gas from process cavity is passed through the first input of three-way valve
End；
Second step S2: mass flow controller is arranged on the second input end of three-way valve；
Third step S3: according to the predetermined amount of flow of the diluent nitrogen of the setting of mass flow controller, to threeway
Second input of valve is passed through the dilution nitrogen for the predetermined amount of flow making the temperature of the gas from process cavity reduce
Gas；
4th step S4: utilize oxygen concentration detector to measure in the mixed gas of outfan output of three-way valve
Oxygen concentration；
5th step S5: predetermined amount of flow and gas according to the diluent nitrogen of the setting of mass flow controller are dense
The oxygen concentration that degree detector is measured, calculates from the oxygen concentration in the gas of process cavity.
Effusion meter is increased, it is ensured that nitrogen by the nitrogen purge loop in oxygen concentration detector sampling circuit
Flow consistent.When process gas is detected by oxygen concentration detector, diluent nitrogen will be with process gas one
Play mixing, then flow in oxygen concentration detector and detect.Owing to process gas temperature is higher than 1000 DEG C,
It is accomplished by nitrogen cooling, extends the service life of oxygen concentration detector, when the nitrogen flowed into is excessive, just
The process gas being sampled can be made too to dilute, and concentration is less than actual process to make oxygen concentration detector detect
The concentration of cavity, makes residual oxygen in process cavity, causes product rejection.By increasing stream at nitrogen circuit
Gauge, it is possible to well realize firm discharge control, it is ensured that service life of oxygen concentration detector and detecing
Survey the accuracy of result.Meet the coupling of oxygen concentration testing result between homotype board simultaneously.
After installing mass flowmenter according to the present invention, by experimental verification, determine the setting of nitrogen flow,
Ensure that the oxygen concentration of cavity can be detected accurately, extend the service life of oxygen concentration detector simultaneously.
Final guarantee product is not affected by oxygen concentration.
The present invention is by increasing flow controller in the purification circuit of oxygen detector, it is achieved in process cavity
The accurate detection of oxygen concentration, and present invention achieves the concordance of homotype board oxygen concentration detecting result,
Avoid the product defects caused due to detecting results abnormity simultaneously.
Furthermore, it is necessary to explanation, unless stated otherwise or point out, otherwise the term in description " first ",
" second ", " the 3rd " etc. describe be used only for distinguishing in description each assembly, element, step etc., and not
It is intended to indicate that the logical relation between each assembly, element, step or ordering relation etc..
Although it is understood that the present invention discloses as above with preferred embodiment, but above-described embodiment is also
It is not used to limit the present invention.For any those of ordinary skill in the art, without departing from skill of the present invention
In the case of art aspects, technical solution of the present invention is made many by the technology contents that all may utilize the disclosure above
Possible variation and modification, or it is revised as the Equivalent embodiments of equivalent variations.Therefore, every without departing from this
The content of bright technical scheme, according to the present invention technical spirit to any simple modification made for any of the above embodiments,
Equivalent variations and modification, all still fall within the range of technical solution of the present invention protection.
Claims (9)
1. a process cavity oxygen concentration detecting system, it is characterised in that including: fore line, three-way valve,
Mass flow controller and oxygen concentration detector；Wherein, fore line is by the gas from process cavity
Being switched to the first input end of three-way valve, mass flow controller is arranged on the second input end of three-way valve,
And the nitrogen that the second input reception of three-way valve reduces for making the temperature of the gas from process cavity, three
The outfan of logical valve is connected to oxygen concentration detector.
Process cavity oxygen concentration detecting system the most according to claim 1, it is characterised in that from
The gas of process cavity is mixed gas.
Process cavity oxygen concentration detecting system the most according to claim 1 and 2, it is characterised in that
Gas from process cavity comprises oxygen.
Process cavity oxygen concentration detecting system the most according to claim 1 and 2, it is characterised in that
Gas from process cavity comprises oxygen and nitrogen.
5. a process cavity oxygen concentration detection method, it is characterised in that including:
First step: by fore line, the gas from process cavity is passed through the first input end of three-way valve；
Second step: mass flow controller is arranged on the second input end of three-way valve；
Third step: according to the predetermined amount of flow of the diluent nitrogen of the setting of mass flow controller, to three-way valve
The second input be passed through the dilution nitrogen for the predetermined amount of flow making the temperature of the gas from process cavity reduce
Gas；
4th step: utilize oxygen concentration detector to measure in the mixed gas of outfan output of three-way valve
Oxygen concentration.
Process cavity oxygen concentration detection method the most according to claim 5, it is characterised in that also include:
The oxygen that the predetermined amount of flow of the diluent nitrogen of the setting according to mass flow controller and gas concentration detecting device are measured
Gas concentration, calculates from the oxygen concentration in the gas of process cavity.
7. according to the process cavity oxygen concentration detection method described in claim 5 or 6, it is characterised in that
Gas from process cavity is mixed gas.
8. according to the process cavity oxygen concentration detection method described in claim 5 or 6, it is characterised in that
Gas from process cavity comprises oxygen.
9. according to the process cavity oxygen concentration detection method described in claim 5 or 6, it is characterised in that
Gas from process cavity comprises oxygen and nitrogen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610355245.5A CN105866348A (en) | 2016-05-25 | 2016-05-25 | Technological cavity oxygen concentration detecting system and technological cavity oxygen concentration detecting method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610355245.5A CN105866348A (en) | 2016-05-25 | 2016-05-25 | Technological cavity oxygen concentration detecting system and technological cavity oxygen concentration detecting method |
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| CN105866348A true CN105866348A (en) | 2016-08-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610355245.5A Pending CN105866348A (en) | 2016-05-25 | 2016-05-25 | Technological cavity oxygen concentration detecting system and technological cavity oxygen concentration detecting method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109541140A (en) * | 2018-11-23 | 2019-03-29 | 上海华力微电子有限公司 | A method of monitoring buffering cavity oxygen concentration |
Citations (3)
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| US5487312A (en) * | 1993-10-08 | 1996-01-30 | Mannesmann Aktiengesellschaft | Gas analyzer with regulated measurement gas feed and dynamic dilution of samples |
| US5756360A (en) * | 1995-09-29 | 1998-05-26 | Horiba Instruments Inc. | Method and apparatus for providing diluted gas to exhaust emission analyzer |
| US20080060453A1 (en) * | 2006-09-11 | 2008-03-13 | Cummins Filtration Ip, Inc. | Thermophoresis-resistant gas dilution apparatus for use in emissions analysis |
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2016
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Patent Citations (3)
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|---|---|---|---|---|
| US5487312A (en) * | 1993-10-08 | 1996-01-30 | Mannesmann Aktiengesellschaft | Gas analyzer with regulated measurement gas feed and dynamic dilution of samples |
| US5756360A (en) * | 1995-09-29 | 1998-05-26 | Horiba Instruments Inc. | Method and apparatus for providing diluted gas to exhaust emission analyzer |
| US20080060453A1 (en) * | 2006-09-11 | 2008-03-13 | Cummins Filtration Ip, Inc. | Thermophoresis-resistant gas dilution apparatus for use in emissions analysis |
Non-Patent Citations (5)
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| MICHAEL QUIRK: "《半导体制造技术》", 31 January 2004 * |
| 宜昌半导体厂: "半导体器件生产中微量氧的比色分析法", 《半导体技术》 * |
| 李继东: "《1997/1998传感器与执行器大全（年卷）传感技术分会》", 31 May 1998 * |
| 王华彬: "自蔓延高温合成氮化硅的生长机理", 《材料科学与工艺》 * |
| 贾万琼: "氢、氮气体中的微量氧测定", 《半导体光电》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109541140A (en) * | 2018-11-23 | 2019-03-29 | 上海华力微电子有限公司 | A method of monitoring buffering cavity oxygen concentration |
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Application publication date: 20160817 |
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