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CN105942585A - Electronic cigarette based on MEMS atomization chip - Google Patents

Electronic cigarette based on MEMS atomization chip Download PDF

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Publication number
CN105942585A
CN105942585A CN201610566355.6A CN201610566355A CN105942585A CN 105942585 A CN105942585 A CN 105942585A CN 201610566355 A CN201610566355 A CN 201610566355A CN 105942585 A CN105942585 A CN 105942585A
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mems
atomization
electronic cigarette
chip
micro
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Inventor
韩熠
朱东来
李廷华
徐溢
陈李
陈永宽
李寿波
吴俊�
巩效伟
张霞
洪鎏
缪明明
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China Tobacco Yunnan Industrial Co Ltd
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China Tobacco Yunnan Industrial Co Ltd
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    • A24F47/002

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Abstract

The invention discloses an electronic cigarette based on an MEMS atomization chip. The electronic cigarette comprises a battery rod (1), an atomizer (2) and a suction nozzle (3), wherein the battery rod (1) is internally provided with a battery (4); the atomizer (2) comprises a shell (9) and an oil storage warehouse (10) and the MEMS atomization chip (11) contained in the shell (9); the suction nozzle (3) is provided with a center channel (14). The MEMS atomization chip (11) comprises a liquid cavity (22) enclosed by a sealing micro ring (19), a micro spray hole plate (17) and a vibration membrane (21), the outer side of the vibration membrane (21) is provided with a driver (18), and the micro spray hole plate (17) is provided with a micro hole array (13), a liquid inlet (15) and a micro valve (20); the battery rod (1), the atomizer (2) and the suction nozzle (3) are connected in sequence to form the electronic cigarette based on the MEMS atomization chip.

Description

一种基于MEMS雾化芯片的电子烟An electronic cigarette based on MEMS atomization chip

技术领域technical field

本发明涉及电子烟技术领域,特别涉及一种基于MEMS(微机电系统)雾化芯片的电子烟。The invention relates to the technical field of electronic cigarettes, in particular to an electronic cigarette based on a MEMS (micro-electromechanical system) atomization chip.

背景技术:Background technique:

电子烟是将液态烟油变为雾状气溶胶而被抽吸者吸入的装置。现有市售电子烟主要是用电加热雾化方式将液态烟油变为雾状气溶胶,很多超声波电子烟专利(CN201410151376.2《具有超声波雾化功能的电子烟及烟液》,CN201410522444.1《超声波雾化型的电子烟抽吸装置》,CN201520096477.4《超声波型电子烟》,CN201610007620.7《超声波振动式电子烟雾化装置及电子烟》)则是采用超声雾化方式来雾化烟油。其中,烟油雾化是发生在电子烟雾化器中。Electronic cigarettes are devices that turn liquid e-liquid into mist aerosols and are inhaled by smokers. The existing commercially available e-cigarettes mainly use electric heating and atomization to change liquid e-liquid into mist aerosol. Many ultrasonic e-cigarette patents (CN201410151376.2 "Electronic cigarettes and e-liquids with ultrasonic atomization function", CN201410522444. 1 "Ultrasonic Atomization Electronic Cigarette Suction Device", CN201520096477.4 "Ultrasonic Electronic Cigarette", CN201610007620.7 "Ultrasonic Vibration Electronic Cigarette Vacuumization Device and Electronic Cigarette") uses ultrasonic atomization to atomize smoke oil. Among them, the atomization of e-liquid occurs in the electronic cigarette atomizer.

目前,主流电子烟雾化器多采用电加热方式雾化烟油,需要电热元件将电能转化为热能并将热量传递给烟油使其雾化。尽管电加热方式可以快速加热雾化烟油形成气溶胶,但由于主流雾化器本身的结构和材料等原因,会带来以下缺陷:一是常用发热丝本身的结构及与导油元件的位置关系可能引起发热丝局部过热甚至干烧产生异味和潜在的有害物质,导致感官品质严重下降并带来健康隐患;二是高温发热丝与烟油的长期直接接触可能使发热丝中金属元素随烟油雾化蒸汽被吸入,这同样会带来健康隐患;三是与烟油直接接触的玻纤或有机棉在高温下不仅有糊芯的风险使感官变差,而且也可能因其所含物质的脱落、热解或碳化等而引发健康问题;四是由于被动式导油,使得烟油从导油元件向发热元件输送的方向和输送的烟油量不可控,烟油的雾化量不可控,引起每口抽吸感官的不一致;五是烟油雾化产生气溶胶的粒径不可控,如果粒径过大,会在口腔、咽喉和肺部长时间附着而产生腻感、干燥感或其他不适感;如果粒径过小,会造成电子烟烟雾在口腔等部位的停留时间过短而造成口腔饱满度及生理满足感不足。At present, mainstream electronic cigarette atomizers mostly use electric heating to atomize e-liquid, which requires electric heating elements to convert electrical energy into heat energy and transfer the heat to the e-liquid to atomize it. Although the electric heating method can quickly heat the atomized e-liquid to form an aerosol, due to the structure and materials of the mainstream atomizer itself, it will bring the following defects: First, the structure of the commonly used heating wire itself and the position of the oil guide element The relationship may cause local overheating of the heating wire or even dry burning to produce odors and potentially harmful substances, resulting in a serious decline in sensory quality and bringing health risks; second, the long-term direct contact between the high-temperature heating wire and the e-liquid may cause the metal elements in the heating wire to be released with the smoke. The inhalation of oil atomized steam will also bring health hazards; the third is that the glass fiber or organic cotton that is in direct contact with the e-liquid not only has the risk of burning the core at high temperature, which will deteriorate the sensory perception, but also may cause it to be damaged due to the substances contained in it. The shedding, pyrolysis or carbonization of the vape oil can cause health problems; the fourth is that due to the passive oil guide, the direction and the amount of e-liquid transported from the oil-guiding element to the heating element are uncontrollable, and the atomization amount of the e-liquid is uncontrollable Fifth, the particle size of the aerosol generated by the atomization of e-liquid is uncontrollable. If the particle size is too large, it will adhere to the mouth, throat and lungs for a long time, resulting in greasy, dry or Other discomfort; if the particle size is too small, the residence time of e-cigarette smoke in the mouth and other parts will be too short, resulting in insufficient mouth fullness and physiological satisfaction.

而且,电加热型大功率电子烟(特别是肺吸式电子烟)为保证大的烟雾量,通常需要低电阻和大功率雾化器,不仅功耗较大,而且存在烟雾烫嘴的缺陷。Moreover, electric heating high-power electronic cigarettes (especially lung suction electronic cigarettes) generally require low resistance and high-power atomizers in order to ensure a large amount of smoke, which not only consumes a lot of power, but also has the disadvantage of burning the mouth of the smoke.

超声波雾化电子烟如果要实现烟油的雾化,一般需要MHz级的高频振荡来将烟油碎裂为细小的雾状颗粒,结构复杂、体积较大、功耗较高,气溶胶粒径不易控制,抽吸体验较差。If the ultrasonic atomization electronic cigarette is to realize the atomization of e-liquid, it generally needs MHz-level high-frequency oscillation to break the e-liquid into fine mist particles. The structure is complex, the volume is large, and the power consumption is high. The aerosol particles The diameter is not easy to control, and the suction experience is poor.

发明内容Contents of the invention

本发明的目的在于解决现有技术存在的问题,采用先进的MEMS(微机电系统)技术,发明一种基于MEMS雾化芯片的电子烟。MEMS(微机电系统)是微电路和微机械按功能要求在芯片上的集成,尺寸通常在毫米或微米级。具有体积小、重量轻、功耗低、耐用性好、价格低廉、性能稳定等优点。在汽车、消费电子和医疗等领域应用广泛。The purpose of the present invention is to solve the problems existing in the prior art, and to invent an electronic cigarette based on the MEMS atomization chip by adopting advanced MEMS (micro-electromechanical system) technology. MEMS (Micro-Electro-Mechanical System) is the integration of micro-circuits and micro-machines on a chip according to functional requirements, and the size is usually on the millimeter or micron scale. It has the advantages of small size, light weight, low power consumption, good durability, low price, and stable performance. It is widely used in automotive, consumer electronics and medical fields.

本发明的一种基于MEMS雾化芯片的电子烟实现电子烟烟油非加热直接雾化,具有结构简单、功耗低、粒径均匀可控、MEMS芯片可批量加工、一致性较好、无需额外导油部件等显著优势。The electronic cigarette based on the MEMS atomization chip of the present invention realizes the non-heating direct atomization of electronic cigarette smoke oil, has the advantages of simple structure, low power consumption, uniform and controllable particle size, batch processing of MEMS chips, good consistency, and no need Significant advantages such as additional oil guide components.

一种基于MEMS雾化芯片的电子烟,包括:An electronic cigarette based on a MEMS atomization chip, including:

电池杆1,内部设置电池4;A battery pole 1 with a battery 4 inside;

雾化器2,包括壳体9和容纳在其内的储油仓10和MEMS雾化芯片11,所述壳体9和所述储油仓10之间留有间隙,所述壳体9上有空气进气孔12与所述间隙相通;所述MEMS雾化芯片11包括由密封微环19、微喷孔板17、和振动膜21围成的液体腔22,其中所述振动膜21外侧布置有驱动器18,所述微喷孔板17上有微孔阵列13、进液口15和微阀20;所述进液口15与所述储油仓10的出液口连通;The atomizer 2 includes a housing 9 and an oil storage bin 10 and a MEMS atomizing chip 11 accommodated therein. There is a gap between the housing 9 and the oil storage bin 10 . On the housing 9 An air inlet hole 12 communicates with the gap; the MEMS atomization chip 11 includes a liquid chamber 22 surrounded by a sealing microring 19, a micro-orifice plate 17, and a vibrating membrane 21, wherein the vibrating membrane 21 outside A driver 18 is arranged, and the micro-spray orifice plate 17 has a micro-hole array 13, a liquid inlet 15 and a micro-valve 20; the liquid inlet 15 communicates with the liquid outlet of the oil storage bin 10;

吸嘴3,有中心通道14,所述中心通道14与所述MEMS雾化芯片11上的所述微孔阵列13连通;The suction nozzle 3 has a central channel 14, and the central channel 14 communicates with the microhole array 13 on the MEMS atomization chip 11;

所述电池杆1与所述雾化器2和所述吸嘴3顺序连接构成所述的基于MEMS雾化芯片的电子烟。The battery rod 1 is sequentially connected with the atomizer 2 and the suction nozzle 3 to form the electronic cigarette based on the MEMS atomization chip.

优选地,所述储油仓10与所述MEMS雾化芯片11一体化封装或组合式安装。Preferably, the oil storage bin 10 and the MEMS atomization chip 11 are packaged integrally or installed in combination.

优选地,所述微孔阵列13的微孔的入口直径大于出口直径,所述出口直径为微米或纳米级。Preferably, the inlet diameter of the microholes of the microwell array 13 is larger than the outlet diameter, and the outlet diameter is in the order of microns or nanometers.

优选地,所述电池杆1内部还设有控制器5,外部壳体上设置电源开关6、雾化驱动开关7和电池充电口8。Preferably, a controller 5 is arranged inside the battery rod 1 , and a power switch 6 , an atomization drive switch 7 and a battery charging port 8 are arranged on the outer casing.

本发明的有益结果:Beneficial results of the present invention:

本发明不使用电热元件来加热烟油、不使用传统玻纤或有机棉等导油材料来导油,从而避免了干烧和健康隐患等问题;采用主动式压力驱动导油方式和不同孔径尺寸的阵列微喷孔设计,实现定向定量导油和雾化,精确控制雾化量和气溶胶粒径从而有效改善了感官品质;无需高温元件,功耗较低,改善了用户体验;利用MEMS技术制造雾化芯片可显著减小雾化器重量、体积并提高集成度;另外,MEMS技术有利于实现电子烟雾化器的批量化、标准化生产,从而减少现有电子烟雾化器制造过程中因存在非标准化制造环节而造成的产品品质差异化缺陷,同时可大幅降低生产成本。The invention does not use electric heating elements to heat the smoke oil, and does not use traditional glass fiber or organic cotton and other oil-conducting materials to guide the oil, thereby avoiding problems such as dry burning and hidden health hazards; it adopts active pressure-driven oil-conducting methods and different aperture sizes The unique array micro-nozzle design realizes directional and quantitative oil conduction and atomization, and precisely controls the amount of atomization and aerosol particle size, thereby effectively improving the sensory quality; no high-temperature components are required, and the power consumption is low, which improves user experience; manufactured using MEMS technology The atomization chip can significantly reduce the weight and volume of the atomizer and improve the integration level; in addition, MEMS technology is conducive to the mass production and standardized production of the electronic atomizer, thereby reducing the existing electronic atomizer in the manufacturing process due to abnormal Defects in product quality differentiation caused by standardized manufacturing processes can greatly reduce production costs.

与专利CN200410048792.6(电子香烟)相比,本专利有以下不同:Compared with patent CN200410048792.6 (electronic cigarette), this patent has the following differences:

专利CN200410048792.6中的电子香烟是在载气作用下经喷头喷出大液滴后,再经加热雾化或超声雾化将大液滴转变成小液滴,再与载气混合成气溶胶后,被人吸入。实际检测发现,该喷头的喷口直径为毫米级。The electronic cigarette in the patent CN200410048792.6 is to spray large droplets through the nozzle under the action of the carrier gas, and then convert the large droplets into small droplets by heating atomization or ultrasonic atomization, and then mix with the carrier gas to form an aerosol Afterwards, it was inhaled. The actual test found that the diameter of the nozzle nozzle is millimeter.

本专利,使用微喷孔阵列来代替传统的喷头,其微喷孔直径为微米级或纳米级,通过控制驱动压力和微喷孔阵列尺寸来共同调节气溶胶粒径,一步到位直接雾化烟油形成尺寸为微米级甚至纳米级的小液滴,并与空气混合后形成气溶胶,无需额外的加热、振动、超声等雾化装置,结构更加简单,同时节省了空间、降低了功耗。In this patent, a micro-nozzle array is used to replace the traditional nozzle. The diameter of the micro-nozzle is micron or nano-sized. By controlling the driving pressure and the size of the micro-nozzle array, the particle size of the aerosol can be adjusted together, and the smoke can be directly atomized in one step. The oil forms small droplets with a size of micron or even nanometer, and forms an aerosol after mixing with air, without additional heating, vibration, ultrasonic atomization devices, etc., the structure is simpler, and at the same time, it saves space and reduces power consumption.

与已有超声波雾化电子烟专利相比,MEMS喷射雾化芯片结构简单,大幅降低了雾化功耗(从超声波所需MHz级降低至KHz级),使得雾化器完全可以匹配现有的锂电池电源,同时也解决了超声波雾化中气溶胶粒径不一致和雾化装置体积较大的问题。而且,本发明的雾化芯片体积小、集成度高、易于批量加工Compared with the existing ultrasonic atomization e-cigarette patents, the structure of the MEMS jet atomization chip is simple, which greatly reduces the power consumption of atomization (from the MHz level required by ultrasonic waves to the KHz level), so that the atomizer can completely match the existing The lithium battery power supply also solves the problems of inconsistent aerosol particle size and large volume of the atomization device in ultrasonic atomization. Moreover, the atomization chip of the present invention is small in size, highly integrated, and easy to process in batches

附图说明Description of drawings

图1为本发明的基于MEMS雾化芯片的电子烟示意图Fig. 1 is a schematic diagram of the electronic cigarette based on the MEMS atomization chip of the present invention

图2为本发明的基于MEMS雾化芯片的电子烟的MEMS雾化芯片处于泵出状态的示意图Fig. 2 is a schematic diagram of the MEMS atomization chip of the electronic cigarette based on the MEMS atomization chip of the present invention in a pumping state

图3为本发明的基于MEMS雾化芯片的电子烟的MEMS雾化芯片处于吸入状态的示意图Fig. 3 is a schematic diagram of the MEMS atomization chip of the electronic cigarette based on the MEMS atomization chip of the present invention in an inhalation state

附图标记为:电池杆1,雾化器2,吸嘴3,电池4,控制器5,电源开关6,雾化驱动开关7,电池充电口8,壳体9,储油仓10,MEMS雾化芯片11,空气进气孔12,微孔阵列13,中心通道14,进液口15,烟油16,微喷孔板17,驱动器18,密封微环19,微阀20,振动膜21、液体腔22;Reference signs are: battery rod 1, atomizer 2, suction nozzle 3, battery 4, controller 5, power switch 6, atomization drive switch 7, battery charging port 8, housing 9, oil storage tank 10, MEMS Atomization chip 11, air inlet hole 12, microhole array 13, central channel 14, liquid inlet 15, smoke oil 16, micro-orifice plate 17, driver 18, sealing micro-ring 19, micro-valve 20, vibrating membrane 21 , liquid cavity 22;

具体实施方式detailed description

抽吸本发明基于MEMS雾化芯片的电子烟时,首先将注油的雾化器2、电池杆1和吸嘴3端连接,在按压设置在电子烟壳体上的电源开关6和雾化驱动开关7的同时进行抽吸,MEMS雾化芯片中的驱动器18立即工作,储油仓10中的烟油16迅速吸入液体腔22,然后立即通过微喷孔板17上的微孔阵列13直接喷射雾化形成气溶胶,同时,开设在电子烟壳体9上的空气进气孔12吸入的空气负载气溶胶一同吸入吸烟者口中。When smoking the electronic cigarette based on the MEMS atomization chip of the present invention, first connect the oil-filled atomizer 2, the battery rod 1 and the suction nozzle 3, and then press the power switch 6 arranged on the electronic cigarette case and drive the atomization Simultaneously pumping with the switch 7, the driver 18 in the MEMS atomization chip works immediately, the e-liquid 16 in the oil storage tank 10 is quickly sucked into the liquid chamber 22, and then immediately sprayed directly through the micro-hole array 13 on the micro-spray orifice plate 17 Atomization forms an aerosol, and at the same time, the air-loaded aerosol inhaled by the air intake hole 12 opened on the electronic cigarette housing 9 is inhaled into the mouth of the smoker together.

当芯片处于泵出雾化状态时,振动膜21受到驱动器18的驱动力作用变形,液体腔22体积缩小,压力增大,腔体内的烟油获得的动能足够克服烟油表面张力,烟油经阵列微孔13散射,实现直接雾化,由于微阀15受结构限制不会打开,在泵出状态时没有烟油供给(图2);When the chip is in the pumping and atomizing state, the vibrating membrane 21 is deformed by the driving force of the driver 18, the volume of the liquid chamber 22 shrinks, the pressure increases, and the kinetic energy obtained by the e-liquid in the cavity is enough to overcome the surface tension of the e-liquid. The array of microholes 13 scatter to realize direct atomization. Since the microvalve 15 is limited by the structure, it will not open, and there is no supply of e-liquid when it is pumped out (Figure 2);

当芯片处于吸入烟油的状态时,振动膜片回复使液体腔22体积扩大,内部压力下降,进液口15外部压力大于内部压力,微阀15被压力冲开,烟油进入液体腔22内,由于在压差下降的方向受微喷孔结构的限制,烟油在吸入状态时不会喷出(图3)。When the chip is in the state of inhaling e-liquid, the vibrating diaphragm returns to expand the volume of the liquid chamber 22, and the internal pressure drops. The external pressure of the liquid inlet 15 is greater than the internal pressure, the microvalve 15 is opened by the pressure, and the e-liquid enters the liquid chamber 22 , due to the restriction of the micro-orifice structure in the direction of pressure drop, the e-liquid will not be ejected when it is inhaled (Figure 3).

驱动器18可以采用多种方式,如压电驱动、蠕动驱动、液压驱动、电热驱动、气动驱动、静电驱动、电磁驱动等,芯片主要依靠驱动器18的位移产生压力,其优点是柔性变形较小、可以准确控制流量,另外,压力驱动的微流体受流体和管道特性的影响较小。The driver 18 can adopt various methods, such as piezoelectric drive, peristaltic drive, hydraulic drive, electrothermal drive, pneumatic drive, electrostatic drive, electromagnetic drive, etc. The chip mainly relies on the displacement of the driver 18 to generate pressure, which has the advantage of less flexible deformation, Flow rates can be precisely controlled, and pressure-driven microfluidics is less affected by fluid and tubing properties.

所述典型微孔阵列采用MEMS工艺在单晶硅、玻璃上进行加工,并通过键合工艺将芯片各部分进行微组装。The typical microhole array is processed on single crystal silicon and glass by MEMS technology, and each part of the chip is micro-assembled by bonding technology.

通过驱动器18驱动烟油发生定量定向雾化,实现电子烟烟油高品质雾化效果。Quantitative and directional atomization of e-liquid is driven by the driver 18 to realize high-quality atomization effect of e-liquid.

微孔的入口直径大于出口直径,且气溶胶直径等于出口直径。这有利于所形成的气溶胶快速而有力的喷出。The inlet diameter of the micropore is larger than the outlet diameter, and the aerosol diameter is equal to the outlet diameter. This facilitates a quick and powerful ejection of the formed aerosol.

雾化器储油仓可以更换和清洗并用于不同的烟油,也可将储油仓和MEMS雾化芯片集成为一体式不可更换雾化器。The tank of the atomizer can be replaced and cleaned and used for different e-liquids, and the tank and MEMS atomizing chip can also be integrated into a non-replaceable atomizer.

Claims (4)

1. an electronic cigarette based on MEMS atomization chip, it is characterised in that including:
Battery rod (1), inside arranges battery (4);
Nebulizer (2), the oil storage cabin (10) including housing (9) and being accommodated within and MEMS are atomized chip (11), leaving gap between described housing (9) and described oil storage cabin (10), described housing (9) is upper free Gas air inlet (12) communicates with described gap;Described MEMS atomization chip (11) include by seal micro-loop (19), The liquid chambers (22) that micro-spraying hole plate (17) and vibrating diaphragm (21) surround, wherein said vibrating diaphragm (21) is outward Side is disposed with driver (18), and described micro-spraying hole plate (17) has microwell array (13), inlet (15) With micro-valve (20);Described inlet (15) connects with the liquid outlet of described oil storage cabin (10);
Suction nozzle (3), has central passage (14), described central passage (14) and described MEMS atomization chip (11) On described microwell array (13) connection;
Described battery rod (1) and described nebulizer (2) and described suction nozzle (3) are linked in sequence the base described in composition Electronic cigarette in MEMS atomization chip.
Electronic cigarette based on MEMS atomization chip the most according to claim 1, it is characterised in that described Oil storage cabin (10) is installed with described MEMS atomization chip (11) integrative packaging or combination type.
Electronic cigarette based on MEMS atomization chip the most according to claim 1, it is characterised in that described The inlet diameter of the micropore of microwell array (13) is more than outlet diameter, and described outlet diameter is micron or nanoscale.
Electronic cigarette based on MEMS atomization chip the most according to claim 1, it is characterised in that described Battery rod (1) is internal is additionally provided with controller (5), external shell arranges on and off switch (6), atomization driving is opened Close (7) and battery charging port (8).
CN201610566355.6A 2016-07-19 2016-07-19 Electronic cigarette based on MEMS atomization chip Pending CN105942585A (en)

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CN108158040A (en) * 2018-01-03 2018-06-15 云南中烟工业有限责任公司 The MEMS electronic cigarettes chip and its manufacturing method of a kind of consistent heat generation
CN108354228A (en) * 2018-01-03 2018-08-03 云南中烟工业有限责任公司 A kind of the MEMS euthermic chips and its manufacturing method of integrated Pt temperature sensors
CN109198728A (en) * 2018-09-25 2019-01-15 深圳市冠世博电子科技有限公司 A kind of electronic cigarette of leak-proof ventilating
CN109832666A (en) * 2017-11-29 2019-06-04 上海新型烟草制品研究院有限公司 Liquid-jet device and electronic cigarette
CN109832668A (en) * 2017-11-29 2019-06-04 上海新型烟草制品研究院有限公司 Oil-spraying atomizer thereof structure is heated in a kind of
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CN111802706A (en) * 2020-08-07 2020-10-23 云南中烟工业有限责任公司 Electromagnetic driving liquid atomizer
CN111989005A (en) * 2018-05-16 2020-11-24 菲利普莫里斯生产公司 Atomizer and grid for same
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CN107713023A (en) * 2017-11-03 2018-02-23 深圳市新宜康电子技术有限公司 Negative pressure standard core atomizer
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CN109832666A (en) * 2017-11-29 2019-06-04 上海新型烟草制品研究院有限公司 Liquid-jet device and electronic cigarette
CN108158040A (en) * 2018-01-03 2018-06-15 云南中烟工业有限责任公司 The MEMS electronic cigarettes chip and its manufacturing method of a kind of consistent heat generation
CN108354228A (en) * 2018-01-03 2018-08-03 云南中烟工业有限责任公司 A kind of the MEMS euthermic chips and its manufacturing method of integrated Pt temperature sensors
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CN108354228B (en) * 2018-01-03 2023-07-25 云南中烟工业有限责任公司 MEMS heating chip with integrated Pt temperature sensor and manufacturing method thereof
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CN111989005A (en) * 2018-05-16 2020-11-24 菲利普莫里斯生产公司 Atomizer and grid for same
WO2019218312A1 (en) * 2018-05-17 2019-11-21 Fontem Holdings 1 B.V. Atomization system for electronic cigarette
CN109198728A (en) * 2018-09-25 2019-01-15 深圳市冠世博电子科技有限公司 A kind of electronic cigarette of leak-proof ventilating
CN110613170A (en) * 2019-09-29 2019-12-27 深圳麦克韦尔科技有限公司 Electronic atomization device and atomizer thereof
CN111802706A (en) * 2020-08-07 2020-10-23 云南中烟工业有限责任公司 Electromagnetic driving liquid atomizer
WO2023045664A1 (en) * 2021-09-22 2023-03-30 深圳市克莱鹏科技有限公司 Heating sheet and electronic cigarette

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Application publication date: 20160921