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CN106024551B - A kind of device generating ultrafast electronics using ultrafast ultra-intense laser excitation carbon nanotube - Google Patents

A kind of device generating ultrafast electronics using ultrafast ultra-intense laser excitation carbon nanotube Download PDF

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CN106024551B
CN106024551B CN201610404988.7A CN201610404988A CN106024551B CN 106024551 B CN106024551 B CN 106024551B CN 201610404988 A CN201610404988 A CN 201610404988A CN 106024551 B CN106024551 B CN 106024551B
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ultrafast
carbon nanotube
ultra
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intense laser
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CN106024551A (en
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戴庆
李驰
周旭
李振军
白冰
刘开辉
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National Center for Nanosccience and Technology China
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/30Cold cathodes, e.g. field-emissive cathode
    • H01J1/304Field-emissive cathodes
    • H01J1/3042Field-emissive cathodes microengineered, e.g. Spindt-type
    • H01J1/3044Point emitters

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Abstract

The present invention provides a kind of devices generating ultrafast electronics using ultrafast ultra-intense laser excitation carbon nanotube, including electron emission source, excitation light source and light focusing system, the electron emission source includes carbon nano-tube emitter and is used to prepare the cathode substrate of the carbon nanotube;The electron emission source cathode is set to one end in vacuum chamber, and the anode of electronics is collected in the other end setting in the vacuum chamber, and the vacuum chamber is equipped with the entrance window for laser light incident;The light source is ultrafast superpower pulse laser, for emitting ultrafast ultra intense laser pulse;The optical focusing system includes half-wave plate, polarizing film and condenser lens, and the optical focusing system is focused ultrafast ultra intense laser pulse;The ultrafast ultra intense laser pulse passes through half-wave plate, polarizing film and condenser lens and focuses successively;The ultrafast ultra intense laser pulse converges to the carbon nanotube tip region excitation carbon nanotube through the entrance window after focusing and generates ultrafast superpower electronic impulse.

Description

一种利用超快超强激光激发碳纳米管产生超快电子的装置A device that uses ultrafast and ultraintense lasers to excite carbon nanotubes to generate ultrafast electrons

技术领域technical field

本发明涉及真空电子发射技术领域,特别涉及一种超快超强激光激发碳纳米管产生超快电子的装置The invention relates to the technical field of vacuum electron emission, in particular to a device for exciting carbon nanotubes to generate ultrafast electrons with an ultrafast and ultrastrong laser

背景技术Background technique

自上世纪后期,超快超强激光器的诞生使得超快分子动力学成为研究的热点,起初对于超快过程的探究大多采用时间分辨反射/透射光谱或拉曼光谱等全光学方法。这些方法固然能探测到原子分子结构变化的信息,但光谱与原子分子结构信息之间的关系至今仍未有全面的解释,这无疑增大了对瞬态快速反应动力学中结构变化信息的分析难度。此外,受到材料光学性质的影响,这些方法的适用范围有很大的局限性。而超快电子显微/衍射技术恰恰弥补了这一不足,可以直观反映分子结构,为直接研究某些复杂的超快反应过程提供了强有力的工具。由于超快电子显微镜技术同时具有空间分辨率和时间分辨率高的巨大优势,逐渐成为研究物理、化学、生物以及材料科学中许多基本现象和机理的重要技术手段。Since the late last century, the birth of ultrafast and ultra-intense lasers has made ultrafast molecular dynamics a research hotspot. At first, all-optical methods such as time-resolved reflection/transmission spectroscopy or Raman spectroscopy were mostly used to explore ultrafast processes. Although these methods can detect the information of atomic and molecular structure changes, the relationship between spectra and atomic and molecular structure information has not been fully explained so far, which undoubtedly increases the analysis of structural change information in transient fast reaction kinetics difficulty. In addition, due to the influence of the optical properties of materials, the scope of application of these methods is very limited. The ultrafast electron microscopy/diffraction technology just makes up for this deficiency, can directly reflect the molecular structure, and provides a powerful tool for directly studying some complex ultrafast reaction processes. Due to the great advantages of high spatial resolution and high temporal resolution, ultrafast electron microscopy has gradually become an important technical means for studying many basic phenomena and mechanisms in physics, chemistry, biology and material science.

超快电子源是上述先进科学装备的核心部件,主要是将超快激光引入到电子枪阴极,激发超快光电子脉冲的发射。超快电子实验中,时间分辨率决定了电子团的长度,很多实验要求电子束团短至百超快超强以下并含有足够数量的电子,才能达到足够的成像对比度。目前用于超快电子源的材料主要有:1.金属材料,存在亮度低、电流小、所需光强大等瓶颈问题。2.低功函数半导体材料,存在可承受的光功率低,制备工艺复杂,真空度要求高,容易被污染等缺点。The ultrafast electron source is the core component of the above-mentioned advanced scientific equipment. It mainly introduces the ultrafast laser into the cathode of the electron gun to stimulate the emission of ultrafast photoelectron pulses. In ultrafast electron experiments, the time resolution determines the length of electron clusters. Many experiments require electron clusters to be as short as ultrafast and contain a sufficient number of electrons in order to achieve sufficient imaging contrast. At present, the materials used for ultrafast electron sources mainly include: 1. Metal materials, which have bottleneck problems such as low brightness, low current, and strong light required. 2. Low work function semiconductor materials have the disadvantages of low optical power, complicated preparation process, high vacuum requirement, and easy contamination.

与上述材料相比,碳纳米管具有尖端半径小、结构稳定性高、耐高温、导电性好、局域电子态等特点,由此带来场增强因子大、功函数低、发射电流大等优点,是一种优秀的电子发射电子发射材料。因此,本发明提出一种超快超强激光器激发碳纳米管产生超快电子的电子源装置。Compared with the above materials, carbon nanotubes have the characteristics of small tip radius, high structural stability, high temperature resistance, good electrical conductivity, localized electronic state, etc., resulting in large field enhancement factor, low work function, and large emission current. The advantage is that it is an excellent electron-emitting electron-emitting material. Therefore, the present invention proposes an electron source device that excites carbon nanotubes to generate ultrafast electrons with an ultrafast and ultraintense laser.

发明内容Contents of the invention

本发明的目的在于提供一种超快超强激光激发碳纳米管产生超快电子的装置,包括电子发射源阴极、激发光源和光调制系统,所述电子发射源阴极包括高亮度碳纳米管和用于制备所述碳纳米管的阴极衬底;The object of the present invention is to provide a device for exciting carbon nanotubes to generate ultrafast electrons with an ultrafast and ultra-intensive laser, including an electron emission source cathode, an excitation light source and a light modulation system, and the electron emission source cathode includes a high-brightness carbon nanotube and a for preparing the cathode substrate of the carbon nanotubes;

所述电子发射源阴极设置于真空腔内一端,所述真空腔内另一端设置收集电子的阳极,所述真空腔设有供激光入射的入射窗;The cathode of the electron emission source is arranged at one end of the vacuum chamber, the other end of the vacuum chamber is provided with an anode for collecting electrons, and the vacuum chamber is provided with an incident window for laser light;

所述光源为超快超强脉冲激光器,所述超快超强脉冲激光器用于发射超快超强激光脉冲;所述光学调制系统包括半波片、偏振片和聚焦透镜,所述光学调制系统对超快超强激光脉冲的峰值功率、偏振方向、焦点大小等参数进行调制;The light source is an ultra-fast ultra-intense pulse laser, and the ultra-fast ultra-intense pulse laser is used to emit ultra-fast ultra-intensive laser pulses; the optical modulation system includes a half-wave plate, a polarizer and a focusing lens, and the optical modulation system Modulate the parameters such as the peak power, polarization direction, and focus size of ultrafast and ultraintense laser pulses;

所述超快超强激光脉冲依次经过半波片、偏振片和聚焦透镜聚焦;所述超快超强激光脉冲聚焦后经所述入射窗汇聚至所述碳纳米管尖端区域激发碳纳米管产生超快超强电子脉冲。The ultra-fast and ultra-intense laser pulses are sequentially focused by a half-wave plate, a polarizer, and a focusing lens; the ultra-fast and ultra-intensive laser pulses are focused and converged to the tip region of the carbon nanotubes through the incident window to excite the carbon nanotubes to generate Ultra-fast and ultra-intense electron pulses.

优选地,所述碳纳米管尖端半径小于20nm,所述碳纳米管长径比大于100。Preferably, the tip radius of the carbon nanotube is less than 20 nm, and the aspect ratio of the carbon nanotube is greater than 100.

优选地,所述碳纳米管排列成碳纳米管阵列。Preferably, the carbon nanotubes are arranged into a carbon nanotube array.

优选地,所述碳纳米管阵列是单根碳纳米管阵列。Preferably, the carbon nanotube array is a single carbon nanotube array.

优选地,所述碳纳米管阵列是碳纳米管簇阵列。Preferably, the carbon nanotube array is a carbon nanotube cluster array.

优选地,所述超快超强脉冲激光器中心波长为800nm,输出功率为30mW,重复频率为80MHz。Preferably, the central wavelength of the ultrafast ultraintense pulse laser is 800nm, the output power is 30mW, and the repetition frequency is 80MHz.

优选地,所述超快超强激光脉冲入射方向与所述电子发射源碳纳米管尖端竖直方向夹角在0‐90°之间。Preferably, the angle between the incident direction of the ultrafast and ultraintense laser pulse and the vertical direction of the carbon nanotube tip of the electron emission source is between 0-90°.

本发明所提供的一种超快超强激光激发碳纳米管产生超快电子的装置,采用超快超强激光脉冲激发碳纳米管,产生飞秒或者亚飞秒量级电子脉冲。同时,采用碳纳米管作为电子发射源阴极,克服采用金属材料作为阴极所需光强度大、发射电流小、亮度低的缺点。The present invention provides a device for exciting carbon nanotubes to generate ultrafast electrons with ultrafast and superintense laser pulses. Ultrafast and superintense laser pulses are used to excite carbon nanotubes to generate femtosecond or subfemtosecond electronic pulses. At the same time, the use of carbon nanotubes as the cathode of the electron emission source overcomes the shortcomings of using metal materials as the cathode that require high light intensity, small emission current, and low brightness.

应当理解,前述大体的描述和后续详尽的描述均为示例性说明和解释,并不应当用作对本发明所要求保护内容的限制。It should be understood that both the foregoing general description and the following detailed description are exemplary illustrations and explanations, and should not be used as limitations on the claimed content of the present invention.

附图说明Description of drawings

参考随附的附图,本发明更多的目的、功能和优点将通过本发明实施方式的如下描述得以阐明,其中:With reference to the accompanying drawings, more objects, functions and advantages of the present invention will be clarified through the following description of the embodiments of the present invention, wherein:

图1示意性示出了本发明一种超快超强激光激发碳纳米管产生超快电子的装置结构示意图;Fig. 1 schematically shows a schematic structural diagram of a device for exciting carbon nanotubes to generate ultrafast electrons by an ultrafast and ultraintensive laser in the present invention;

图2示意性示出了本发明超快超强脉冲激光激发碳纳米管尖端产生超快电子的示意图;Fig. 2 schematically shows the schematic diagram of the ultrafast ultra-intense pulsed laser excitation of the carbon nanotube tip to generate ultrafast electrons in the present invention;

图3示出了本发明一个实施例中单根碳纳米管阵列示意图;Fig. 3 shows a schematic diagram of a single carbon nanotube array in one embodiment of the present invention;

图4示出了本发明一个实施例中激光功率与激发电流关系图;Fig. 4 shows the relationship between laser power and excitation current in one embodiment of the present invention;

图5示出了本发明另一个实施例中单根碳纳米管陈列示意图;Figure 5 shows a schematic diagram of a single carbon nanotube arrangement in another embodiment of the present invention;

图6示出了本发明另一个实施例中激光功率与激发电流关系图;Fig. 6 shows the relationship between laser power and excitation current in another embodiment of the present invention;

图7示出了本发明又一个实施例中碳纳米管簇阵列示意图;Figure 7 shows a schematic diagram of a carbon nanotube cluster array in another embodiment of the present invention;

图8示出了本发明另一个实施例中激光功率与激发电流关系图;Fig. 8 shows the relationship between laser power and excitation current in another embodiment of the present invention;

图9示出了本发明再一个实施例中碳纳米管簇阵列示意图;Fig. 9 shows a schematic diagram of a carbon nanotube cluster array in another embodiment of the present invention;

图10示出了本发明再一个实施例中激光功率与激发电流关系图。Fig. 10 shows the relationship between laser power and excitation current in another embodiment of the present invention.

具体实施方式Detailed ways

通过参考示范性实施例,本发明的目的和功能以及用于实现这些目的和功能的方法将得以阐明。然而,本发明并不受限于以下所公开的示范性实施例;可以通过不同形式来对其加以实现。说明书的实质仅仅是帮助相关领域技术人员综合理解本发明的具体细节。The objects and functions of the present invention and methods for achieving the objects and functions will be clarified by referring to the exemplary embodiments. However, the present invention is not limited to the exemplary embodiments disclosed below; it can be implemented in various forms. The essence of the description is only to help those skilled in the relevant art comprehensively understand the specific details of the present invention.

在下文中,将参考附图描述本发明的实施例。在附图中,相同的附图标记代表相同或类似的部件,或者相同或类似的步骤。Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the drawings, the same reference numerals represent the same or similar components, or the same or similar steps.

实施例1Example 1

如图1所示本发明一种超快超强激光激发碳纳米管产生超快电子的装置结构示意图。所述电子源装置包括电子发射源阴极、激发光源和光调制系统,所述电子发射源阴极包括碳纳米管101和用于制备所述碳纳米管的阴极衬底102。电子发射源阴极设置于真空腔111内,位于真空腔内一端;真空腔的另一端设置收集电子的阳极109;所述真空腔111设有供激光入射的入射窗108。阴极发射超快电子脉冲110,在真空腔内传播,在阳极109一端收集。优选地,本发明产生的超快电子的装置可用于电子显微镜系统,也可用于电子衍射系统。需要说明的是,实施例中所说真空腔为示意性的事例,应当理解,本发明所述真空腔可用于所有可用到电子源的设备上。As shown in FIG. 1 , a schematic structural diagram of a device for exciting carbon nanotubes to generate ultrafast electrons by an ultrafast and ultraintense laser according to the present invention. The electron source device includes an electron emission source cathode, an excitation light source and a light modulation system, and the electron emission source cathode includes a carbon nanotube 101 and a cathode substrate 102 for preparing the carbon nanotube. The cathode of the electron emission source is arranged in the vacuum chamber 111 at one end of the vacuum chamber; the other end of the vacuum chamber is provided with an anode 109 for collecting electrons; the vacuum chamber 111 is provided with an incident window 108 for laser light to enter. The cathode emits ultrafast electron pulses 110 , which propagate in the vacuum chamber and are collected at the anode 109 end. Preferably, the device for ultrafast electrons produced by the present invention can be used in an electron microscope system, and can also be used in an electron diffraction system. It should be noted that the vacuum chamber mentioned in the embodiments is a schematic example, and it should be understood that the vacuum chamber described in the present invention can be used in all devices that can be used in electron sources.

本发明中光源采用超快超强脉冲激光器103,所述超快超强脉冲激光器103中心波长为800nm,输出功率为30mW,重复频率为80MHz,所述超快超强脉冲激光器103用于发射超快超强激光脉冲106。出于说明的目的,本实施例以及下述实施例中超快超强脉冲激光器为飞秒激光器,对于激光器的选择本发明中不做具体限制,根据实际电子设备的需要,采用不同中心波长、输出功率和重复频率的超快超强激光器。In the present invention, the light source adopts an ultra-fast ultra-intense pulse laser 103, the central wavelength of the ultra-fast ultra-intense pulse laser 103 is 800nm, the output power is 30mW, and the repetition frequency is 80MHz. The ultra-fast ultra-intense pulse laser 103 is used to emit ultra-fast Fast ultra-intense laser pulses 106 . For the purpose of illustration, the ultra-fast ultra-intense pulse laser in this embodiment and the following embodiments is a femtosecond laser, and the selection of the laser is not specifically limited in the present invention. According to the needs of actual electronic equipment, different central wavelengths, output Power and repetition rate of ultrafast ultraintense lasers.

所述光学调制系统包括半波片104、偏振片105和聚焦透镜107,半波片104、偏振片105和聚焦透镜107依次布置于超快超强激光器103与真空腔111之间。光学调制系统对超快超强激光脉冲106的峰值功率、偏振方向、焦点大小等参数进行调制。The optical modulation system includes a half-wave plate 104 , a polarizer 105 and a focusing lens 107 , and the half-wave plate 104 , polarizer 105 and focusing lens 107 are sequentially arranged between the ultrafast and ultra-intense laser 103 and the vacuum cavity 111 . The optical modulation system modulates parameters such as the peak power, polarization direction, and focus size of the ultrafast and ultraintense laser pulse 106 .

本发明提供的超快超强脉冲激光激发碳纳米管产生超快电子的装置,通过超快超强脉冲激光器103发射超快超强激光脉冲106,超快超强激光脉冲传播过程中,依次经过半波片104、偏振片105和聚焦透镜106进行聚焦,聚焦后的超快超强激光脉冲106穿过真空腔入射窗108与真空腔一端制备的碳纳米管101作用,产生超短电子团。图2所示,本发明超快超强脉冲激光激发碳纳米管尖端产生超快电子的示意图,超快超强激光脉冲经光学调制系统调制后以一定角度汇聚于碳纳米管尖端区域,超快超强激光脉冲入射方向与碳纳米管101尖端竖直方向成一定角度112,所述角度在0‐90°之间。优选地,在本实施例中,采用超快超强激光脉冲入射方向与碳纳米管尖端竖直方向成60°。The ultrafast ultraintense pulse laser provided by the present invention excites carbon nanotubes to generate ultrafast electrons. Ultrafast ultraintensive laser pulses 106 are emitted by ultrafast ultraintensive pulse lasers 103. During the propagation of ultrafast ultraintensive laser pulses, successively The half-wave plate 104, the polarizer 105 and the focusing lens 106 are focused, and the focused ultrafast and ultra-intense laser pulse 106 passes through the incident window 108 of the vacuum cavity and interacts with the carbon nanotube 101 prepared at one end of the vacuum cavity to generate ultrashort electron groups. As shown in Figure 2, the schematic diagram of the ultrafast and ultraintensive pulsed laser of the present invention exciting the tip of the carbon nanotube to generate ultrafast electrons, the ultrafast and ultraintensive laser pulse converges at the tip area of the carbon nanotube at a certain angle after being modulated by the optical modulation system, ultrafast The incident direction of the ultra-intensive laser pulse forms a certain angle 112 with the vertical direction of the tip of the carbon nanotube 101, and the angle is between 0-90°. Preferably, in this embodiment, the incident direction of the ultrafast and ultraintense laser pulse is 60° from the vertical direction of the tip of the carbon nanotube.

实施例2Example 2

本实施例具体说明碳纳米管与碳纳米管阴极衬底的布置方式,本实施中,碳纳米管尖端半径小于20nm,碳纳米管长径比大于100。如图3所示,本实施例中单根碳纳米管阵列示意图,在阴极衬底202b上制备单根碳纳米管阵列,优选地,碳纳米管尖端213b半径约为10nm;碳纳米管201b长度约为5μm。This embodiment specifically illustrates the arrangement of carbon nanotubes and carbon nanotube cathode substrates. In this implementation, the tip radius of carbon nanotubes is less than 20 nm, and the aspect ratio of carbon nanotubes is greater than 100. As shown in Figure 3, the schematic diagram of a single carbon nanotube array in this embodiment, a single carbon nanotube array is prepared on the cathode substrate 202b, preferably, the radius of the carbon nanotube tip 213b is about 10nm; the length of the carbon nanotube 201b about 5 μm.

超快超强激光脉冲经光学调制系统调制后以一定角度汇聚于碳纳米管尖端区域,超快超强激光脉冲入射方向与碳纳米管尖端竖直方向成0‐90°。优选地,本实施例中采用超快超强激光脉冲入射方向与碳纳米管尖端竖直方向成60°。经聚焦超快超强激光脉冲汇聚于碳纳米管尖端区域,强度增大,一方面,当电子吸收足够的光子能量之后,可以超越势垒向真空逸出;另一方面,强激光光场可以压缩碳纳米管尖端的真空势垒,当势垒宽度与电子波长相近时,碳纳米管电子隧穿势垒而逸出。本发明实施例中,产生的电子为超快超强量级电子脉冲,如图4所示,本实施例中激光功率与激发产生电流关系图。The ultra-fast and ultra-intense laser pulses are modulated by the optical modulation system and converge at the tip area of the carbon nanotubes at a certain angle. Preferably, in this embodiment, the incident direction of the ultrafast and ultraintense laser pulse is 60° from the vertical direction of the carbon nanotube tip. The focused ultra-fast and ultra-intense laser pulses converge on the tip region of the carbon nanotubes, and the intensity increases. On the one hand, when the electrons absorb enough photon energy, they can escape to the vacuum beyond the potential barrier; on the other hand, the strong laser light field can The vacuum barrier at the tip of the carbon nanotube is compressed, and when the barrier width is close to the electron wavelength, the carbon nanotube electrons tunnel through the barrier and escape. In the embodiment of the present invention, the electrons generated are ultra-fast and ultra-intensive electron pulses, as shown in FIG. 4 , the relationship between laser power and excitation current in this embodiment.

实施例3Example 3

本实施例具体说明碳纳米管与碳纳米管阴极衬底的布置方式,本实施碳纳米管尖端半径小于20nm,碳纳米管长径比大于100。如图5所示,本实施例中单根碳纳米管阵列示意图,碳纳米管以单根方式制备,阵列于阴极衬底202a上,优选地,碳纳米管尖端213a半径约为5nm;碳纳米管201a长度约为10μm。This embodiment specifically illustrates the arrangement of carbon nanotubes and carbon nanotube cathode substrates. In this embodiment, the tip radius of carbon nanotubes is less than 20 nm, and the aspect ratio of carbon nanotubes is greater than 100. As shown in Figure 5, a schematic diagram of a single carbon nanotube array in this embodiment, the carbon nanotube is prepared in a single way, and the array is on the cathode substrate 202a, preferably, the radius of the carbon nanotube tip 213a is about 5nm; The length of the tube 201a is about 10 μm.

超快超强激光脉冲经光学调制系统调制后以一定角度汇聚于碳纳米管尖端区域,超快超强激光脉冲入射方向与碳纳米管尖端竖直方向成0‐90°,优选地,本实施例中采用超快超强激光脉冲入射方向与碳纳米管尖端竖直方向成60°。经聚焦超快超强激光脉冲汇聚于碳纳米管尖端区域,强度增大,一方面,当电子吸收足够的光子能量之后,可以超越势垒向真空逸出;另一方面,强激光光场可以压缩碳纳米管尖端的真空势垒,当势垒宽度与电子波长相近时,碳纳米管电子隧穿势垒而逸出。本发明实施例中,产生的电子为超快超强量级电子脉冲,如图6所示,本实施例中激光功率与激发产生电流关系图。本实施例与实施例2相比,在相同的激光功率下,采用更细的碳纳米管尖端激发电子,得到电子团束更短,电子数目更多,亮度更高。The ultra-fast and ultra-intense laser pulses are modulated by the optical modulation system and converge at the tip area of the carbon nanotubes at a certain angle. In the example, the incident direction of the ultrafast and ultraintense laser pulse is 60° to the vertical direction of the tip of the carbon nanotube. The focused ultra-fast and ultra-intense laser pulses converge on the tip region of the carbon nanotubes, and the intensity increases. On the one hand, when the electrons absorb enough photon energy, they can escape to the vacuum beyond the potential barrier; on the other hand, the strong laser light field can The vacuum barrier at the tip of the carbon nanotube is compressed, and when the barrier width is close to the electron wavelength, the carbon nanotube electrons tunnel through the barrier and escape. In the embodiment of the present invention, the electrons generated are ultra-fast and ultra-intensive electron pulses, as shown in FIG. 6 , the relationship between laser power and excitation current in this embodiment. Compared with Embodiment 2, this embodiment uses thinner carbon nanotube tips to excite electrons under the same laser power, resulting in shorter electron clusters, more electrons, and higher brightness.

实施例4Example 4

本实施具体说明碳纳米管与碳纳米管阴极衬底的另一种布置方式,本实施碳纳米管尖端半径小于20nm,碳纳米管长径比大于100。如图7所示,本实施例中碳纳米管簇阵列示意图,碳纳米管制备成谈纳米管簇314b,阵列于阴极衬底302b上,优选地,碳纳米管簇中碳纳米管尖端313b半径约为10nm;碳纳米管长度约为5μm。This implementation specifically illustrates another arrangement of carbon nanotubes and carbon nanotube cathode substrates. In this implementation, the tip radius of carbon nanotubes is less than 20 nm, and the aspect ratio of carbon nanotubes is greater than 100. As shown in Figure 7, the schematic diagram of the array of carbon nanotube clusters in this embodiment, the carbon nanotubes are prepared as nanotube clusters 314b, arrayed on the cathode substrate 302b, preferably, the radius of the carbon nanotube tip 313b in the carbon nanotube clusters It is about 10nm; the length of carbon nanotube is about 5μm.

超快超强激光脉冲经光学调制系统调制后以一定角度汇聚于碳纳米管尖端区域,超快超强激光脉冲入射方向与碳纳米管尖端竖直方向成0‐90°,优选地,本实施例中采用超快超强激光脉冲入射方向与碳纳米管尖端竖直方向成60°。经聚焦超快超强激光脉冲汇聚于碳纳米管尖端区域,强度增大,一方面,当电子吸收足够的光子能量之后,可以超越势垒向真空逸出;另一方面,强激光光场可以压缩碳纳米管尖端的真空势垒,当势垒宽度与电子波长相近时,碳纳米管电子隧穿势垒而逸出。。本发明实施例中,产生的电子为超快超强量级电子脉冲,如图8所示,本实施例中激光功率与激发产生电流关系图。The ultra-fast and ultra-intense laser pulses are modulated by the optical modulation system and converge at the tip area of the carbon nanotubes at a certain angle. In the example, the incident direction of the ultrafast and ultraintense laser pulse is 60° to the vertical direction of the tip of the carbon nanotube. The focused ultra-fast and ultra-intense laser pulses converge on the tip region of the carbon nanotubes, and the intensity increases. On the one hand, when the electrons absorb enough photon energy, they can escape to the vacuum beyond the potential barrier; on the other hand, the strong laser light field can The vacuum barrier at the tip of the carbon nanotube is compressed, and when the barrier width is close to the electron wavelength, the carbon nanotube electrons tunnel through the barrier and escape. . In the embodiment of the present invention, the electrons generated are ultra-fast and ultra-intensive electron pulses, as shown in FIG. 8 , the relationship between the laser power and the excitation current in this embodiment.

实施例5Example 5

本实施具体说明碳纳米管与碳纳米管阴极衬底的又一种布置方式,本实施碳纳米管尖端半径小于20nm,碳纳米管长径比大于100。如图9所示,本实施例中碳纳米管簇阵列示意图,碳纳米管制备成碳纳米管簇314a,阵列于阴极衬底302a上,优选地,碳纳米管簇中碳纳米管尖端313a半径约为5nm;碳纳米管长度约为10μm。This implementation specifically illustrates another arrangement of carbon nanotubes and carbon nanotube cathode substrates. In this implementation, the tip radius of carbon nanotubes is less than 20 nm, and the aspect ratio of carbon nanotubes is greater than 100. As shown in Figure 9, the schematic diagram of the array of carbon nanotube clusters in this embodiment, the carbon nanotubes are prepared as carbon nanotube clusters 314a, arrayed on the cathode substrate 302a, preferably, the radius of the carbon nanotube tip 313a in the carbon nanotube clusters About 5nm; carbon nanotube length about 10μm.

超快超强激光脉冲经光学聚焦系统聚焦后以一定角度汇聚于碳纳米管尖端区域,超快超强激光脉冲入射方向与碳纳米管尖端竖直方向成0‐90°,优选地,本实施例中采用超快超强激光脉冲入射方向与碳纳米管尖端竖直方向成60°。经聚焦超快超强激光脉冲汇聚于碳纳米管尖端区域,强度增大,一方面,当电子吸收足够的光子能量之后,可以超越势垒向真空逸出;另一方面,强激光光场可以压缩碳纳米管尖端的真空势垒,当势垒宽度与电子波长相近时,碳纳米管电子隧穿势垒而逸出。。本发明实施例中,产生的电子为超快超强量级电子脉冲,如图10所示,本实施例中激光功率与激发产生电流关系图。本实施例与实施例4相比,在相同的激光功率下,采用更细的碳纳米管尖端激发电子,得到电子团束更短,电子数目更多,亮度更高。The ultra-fast and ultra-intense laser pulses are focused by the optical focusing system and converge at the tip area of the carbon nanotube at a certain angle. In the example, the incident direction of the ultrafast and ultraintense laser pulse is 60° to the vertical direction of the tip of the carbon nanotube. The focused ultra-fast and ultra-intense laser pulses converge on the tip region of the carbon nanotubes, and the intensity increases. On the one hand, when the electrons absorb enough photon energy, they can escape to the vacuum beyond the potential barrier; on the other hand, the strong laser light field can The vacuum barrier at the tip of the carbon nanotube is compressed, and when the barrier width is close to the electron wavelength, the carbon nanotube electrons tunnel through the barrier and escape. . In the embodiment of the present invention, the electrons generated are ultra-fast and ultra-intensive electron pulses, as shown in FIG. 10 , the relationship between the laser power and the excitation current in this embodiment. Compared with Embodiment 4, this embodiment uses thinner carbon nanotube tips to excite electrons under the same laser power, resulting in shorter electron clusters, more electrons, and higher brightness.

结合这里披露的本发明的说明和实践,本发明的其他实施例对于本领域技术人员都是易于想到和理解的。说明和实施例仅被认为是示例性的,本发明的真正范围和主旨均由权利要求所限定。Other embodiments of the invention will be apparent to and understood by those skilled in the art from consideration of the specification and practice of the invention disclosed herein. The description and examples are considered exemplary only, with the true scope and spirit of the invention defined by the claims.

Claims (5)

1. a kind of device generating ultrafast electronics using ultrafast ultra-intense laser excitation carbon nanotube, including electron emission source cathode, Excitation light source and light modulation system, which is characterized in that the electron emission source cathode includes carbon nano-tube emitter and cathode lining Bottom prepares carbon nanotube in the cathode substrate, wherein the carbon nanotube tip radius is less than 20nm, the carbon nanometer Pipe draw ratio is more than 100, and the carbon nanotube arrangement is at carbon nano pipe array;
The electron emission source cathode is set to one end in vacuum chamber, and the sun for collecting electronics is arranged in the other end in the vacuum chamber Pole, the vacuum chamber are equipped with the entrance window for laser light incident;
The light source is ultrafast superpower pulse laser, and the ultrafast superpower pulse laser is for emitting ultrafast ultra-intense laser arteries and veins Punching;The light modulation system includes half-wave plate, polarizing film and condenser lens, and the light modulation system is to ultrafast ultra intense laser pulse Intensity, polarization and focus parameter be modulated;
The ultrafast ultra intense laser pulse passes through half-wave plate, polarizing film and condenser lens successively;The ultrafast ultra intense laser pulse The carbon nanotube tip region excitation carbon nanotube is converged to through the entrance window generate ultrafast electronic impulse after modulation.
2. the apparatus according to claim 1, which is characterized in that the carbon nano pipe array is single-root carbon nano-tube array.
3. the apparatus according to claim 1, which is characterized in that the carbon nano pipe array is carbon nanotube cluster array.
4. the apparatus according to claim 1, which is characterized in that the ultrafast superpower pulse laser centre wavelength is 800nm, output power 30mW, repetition rate 80MHz.
5. the apparatus according to claim 1, which is characterized in that the ultrafast ultra intense laser pulse incident direction and carbon nanometer Tip end vertical direction angle is between 0-90 °.
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