CN106024679A

CN106024679A - Sorting device and sorting method

Info

Publication number: CN106024679A
Application number: CN201610578537.5A
Authority: CN
Inventors: 王之奇
Original assignee: China Wafer Level CSP Co Ltd
Current assignee: China Wafer Level CSP Co Ltd
Priority date: 2016-07-21
Filing date: 2016-07-21
Publication date: 2016-10-12

Abstract

The invention provides a sorting device and a sorting method. The sorting device comprises a first die accommodating plate, a second die accommodating plate and a sorting mechanism, wherein the first die accommodating plate comprises a first surface used for accommodating dies to be sorted; the second die accommodating plate comprises a second surface used for accommodating the sorted dies, and the second surface faces to the first surface; and the sorting mechanism comprises a rotating part and a sorting part connected with the rotating part, the rotating part rotates around a rotating center, the rotating center is positioned between the first surface and the second surface when the sorting mechanism conducts sorting operation, and the sorting part moves between the first surface and the second surface through rotation of the rotating part. The sorting device and the sorting method increase the die sorting efficiency, and reduce possibility that the dies are contaminated during the sorting operation.

Description

Pick device and pick method

Technical field

The present invention relates to grain sorting technical field, pick device particularly to one and pick method.

Background technology

Along with the progress of science and technology, the kind of electronic product also gets more and more with style now.At electronic product Manufacture and in production process, manufacturer can according to client to the quality requirements of product and actually used required, It is equipped with the production element with different quality.

Different types of crystal grain (die or chip, be also called chip) is commonly used in electronic product, described Crystal grain is obtained by wafer (wafer) cutting.After cutting crystal wafer obtains multiple crystal grain, must be according to it Quality, performance and product attribute are classified, and are applied to different with the crystal grain by grade inequality Field.Such as, in light emitting diode (Light Emitted Diode, LED) industry, diode Luminosity, wavelength, colour temperature, operation voltage etc. can be because of the little bit different of process conditions, even if same In wafer, how much all can there is diversity between each crystal grain, therefore can cut on same wafer Cut the multiple crystal grain obtained to pick, to complete the classification to crystal grain.

But, prior art, during picking crystal grain, exists and picks inefficiency and crystal grain is the most dirty The problem of dye.

Summary of the invention

The problem that the present invention solves is to provide one and picks device and pick method, improves crystal grain and picks effect Rate, reduces the probability that crystal grain is contaminated.

For solving the problems referred to above, the present invention provides one to pick device, including: first puts brilliant dish, described First puts brilliant dish has first for placing crystal grain to be picked；Second puts brilliant dish, and described second puts crystalline substance Dish has has picked second of crystal grain for placing, and described second is oppositely arranged with described first face； Picking mechanism, described picking mechanism includes rotary part and picks parts with described rotary part is connected, Wherein, described rotary part is rotated about the center of rotation, described picking mechanism when carrying out picking work, institute State center of rotation between described first and second, and described in pick parts through described rotary part Be rotated between described first and second and move.

Optionally, described second is parallel to each other with described first face.

Optionally, described first perpendicular with horizontal plane；And described second perpendicular with horizontal plane.

Optionally, between described first and second the 3rd of described center of rotation, wherein, Distance between described 3rd and first is equal to the distance between described 3rd and second.

Optionally, described in pick parts and include: at least one picks arm, described in pick arm and have relative First end and the second end, described first end is connected with described rotary part；Pick and place parts, described in pick and place Parts are connected with described second end.

Optionally, picking and placeing parts described in is suction nozzle or pickup folder.

Optionally, described in pick device and also include, the first load carrier, described first load carrier is suitable to Carry described first and put brilliant dish；Described first load carrier is removable load carrier, described first carrying Mechanism is suitable to make described first to put brilliant dish and moves in the direction being parallel to described first.

Optionally, described first load carrier is further adapted for making described first to put brilliant dish along being perpendicular to described first The axis in face rotates, and described axis intersects with described first.

Optionally, described in pick device and also include, the second load carrier, described second load carrier is suitable to Carry described second and put brilliant dish；Described second load carrier is removable load carrier, described second carrying Mechanism is suitable to make described second to put brilliant dish and moves in the direction being parallel to described second.

Optionally, described second load carrier is further adapted for making described second to put brilliant dish along being perpendicular to described second The axis in face rotates, and described axis intersects with described second.

Optionally, described in pick device and also include, the 3rd load carrier, described 3rd load carrier is suitable to Carry described picking mechanism；Described 3rd load carrier is movable mechanism, and described 3rd load carrier is fitted Move up in the side being parallel to described first or second in making described picking mechanism.

Optionally, described first put brilliant dish and have and described first the relative back side；Described pick device Also including, ejector pin mechanism, described ejector pin mechanism is positioned at described first back side putting brilliant dish, is suitable to first Crystal grain to be picked on face ejects.

Optionally, described first being provided with the first pad pasting, described first pad pasting is used for carrying to be waited to pick Crystal grain；Being provided with the second pad pasting on described second, described second pad pasting has picked crystal grain for carrying.

Optionally, described first pad pasting is UV film or blue film；Described second pad pasting is UV film or blue film.

Optionally, pick device described in also to include: image observation module, described image observation module is used for Obtain the image on described first or second；Data obtaining module, described data obtaining module is used for The quality of the crystal grain to be picked on obtaining first；Pick control module, described in pick control module for According to the quality of crystal grain to be picked obtained, control described picking mechanism treat pick crystal grain pick work.

The present invention also provides for one and picks method, including: provide aforesaid and pick device；Described first Put first some crystal grain to be picked of upper placement of brilliant dish；Described picking mechanism is used to carry out picking work, Pick in work described, described in pick parts through described rotary part be rotated in described first with the Move between two, the crystal grain to be picked on described first is picked to the second put brilliant dish second

Optionally, pick in work described in carrying out, described first with in the rotation of described rotary part Heart relative movement；Described second with the center of rotation relative movement of described rotary part.

Optionally, before picking work described in carrying out, described first is being parallel to space with second It is oppositely arranged in Y direction in the system of axis, and the Z-direction in being parallel to solid axes system On mutually stagger setting；Pick in work described in carrying out, described in the method for picking include: make described first Edge, face is parallel to Z-direction and moves；Make described second edge be parallel to Z-direction to move, and described Two moving directions and first moving direction are contrary so that in picking work process, described first And relative area increases between second.

Optionally, the Z axis being parallel in solid axes system is row, uses column scan mode to carry out described Pick work；The described method of picking includes: makes described first edge be parallel to Z-direction and moves, with complete Become every string crystal grain to be picked pick work；And complete every string crystal grain to be picked pick work After work, make described first edge be parallel to Y direction and move, to carry out the crystal grain to be picked of next column Pick work.

Optionally, the Y-axis being parallel in solid axes system is row, uses row scan mode to carry out described Pick work；The described method of picking includes: makes described first edge be parallel to Y direction and moves, with complete Become every a line crystal grain to be picked pick work；Complete every a line crystal grain to be picked pick work Afterwards, make described first edge be parallel to Z-direction and move, to carry out the crystal grain to be picked of next line Pick work.

Optionally, before picking work described in carrying out, described first is being parallel to space with second Mutually stagger in Y direction in the system of axis setting, and the Z axis in being parallel to solid axes system It is oppositely arranged on direction；Pick in work described in carrying out, described in the method for picking include: make described first Edge, face is parallel to Y direction and moves；Make described second edge be parallel to Y direction to move, and described Two moving directions and first moving direction are contrary so that in picking work process, described first And relative area increases between second.

Optionally, the Y-axis being parallel in solid axes system is row, uses row scan mode to carry out described Pick work；Make described first edge be parallel to Y direction to move, to complete the crystalline substance to be picked of every a line Grain pick work；And complete every a line crystal grain to be picked pick work after, described in the side of picking Method also includes: makes described first edge be parallel to Z-direction and moves, to carry out the crystalline substance to be picked of next line Grain pick work.

Optionally, the Z axis being parallel in solid axes system is row, uses column scan direction to carry out described Pick work；Described method of picking also includes: make described first edge be parallel in Z-direction move, Work is picked with complete the crystal grain to be picked of every string；And complete the choosing of crystal grain to be picked of every string After picking work, make described first edge be parallel to Y direction and move, with carry out next column wait pick Crystal grain pick work.

Optionally, before picking work described in carrying out, described first is being parallel to space with second It is oppositely arranged on YZ face in the system of axis；The described method of picking includes: make described first edge be parallel to Z-direction moves, and makes described second to move along parallel Z-direction；Or, make described first Move along being parallel to Y direction, and make described second edge be parallel to Y direction to move.

Optionally, use column scan mode carry out described in pick work；Described first edge is made to be parallel to Z Direction of principal axis moves, and picks work with complete the crystal grain to be picked of every string；And complete treating of every string Pick crystal grain pick work after, described in pick method and also include: make described first edge be parallel to Y Direction of principal axis moves, and picks work with carry out next line crystal grain to be picked.

Optionally, use row scan mode carry out described in pick work；Described first edge is made to be parallel to Y Direction of principal axis moves, and picks work with complete the crystal grain to be picked of every a line；And complete treating of every a line Pick crystal grain pick work after, described in pick method and also include: make described first edge be parallel to Z Direction of principal axis moves, and picks work with carry out next column crystal grain to be picked.

Optionally, before picking work described in carrying out, described first is being parallel to space with second It is oppositely arranged on YZ face in the system of axis；The described method of picking includes: make described picking mechanism along parallel Move in Y direction；And make described picking mechanism move along being parallel to Z-direction.

Optionally, use column scan mode carry out described in pick work, described in the method for picking include: make institute State picking mechanism and move along being parallel to Z-direction, pick work with complete every string crystal grain to be picked； Complete every string crystal grain to be picked pick work after, make described picking mechanism along being parallel to Y-axis side To movement, pick work with carry out next column crystal grain to be picked.

Optionally, use row scan mode carry out described in pick work, described in the method for picking include: make institute State picking mechanism and move along being parallel to Y direction, pick work with complete every a line crystal grain to be picked； Complete every a line crystal grain to be picked pick work after, make described picking mechanism along being parallel to Z axis side To movement, pick work with carry out next line crystal grain to be picked.

Compared with prior art, technical scheme has the advantage that

In the technical scheme picking device that the present invention provides, the first put brilliant dish first treats for placement Picking crystal grain, second puts second crystal grain picked for placement of brilliant dish, described first with second Face is oppositely arranged；Therefore, use picking mechanism pick on first in time picking crystal grain, pick parts The displacement rotated on mobile to second from first of rotated parts is short, thus reduces crystalline substance Grain, from first movement time required to second, improves and picks efficiency, and reduction crystal grain is being moved through The probability being contaminated in journey.

In alternative, described first is parallel to each other with the second face, therefore first upper each point and second Beeline between face is equal so that on first upper each region, crystal grain to be picked moves on second Displacement the most equal, therefore pick the time needed on first needed for picking crystal grain short.

In alternative, between first and second the 3rd of described center of rotation, and Distance between three and first, equal to the distance between described 3rd and second, therefore uses length What degree was fixing picks parts, i.e. can pick crystal grain to be picked from first, and will pick crystal grain Place on the second surface.

In alternative, described in pick parts and include that even number picks arm, and described even number pick arm with In waiting angle distribution centered by described rotary part so that when one picks arm and is positioned on first and carries out crystal grain When picking action, there is all the time and pick arm and be positioned on second and be placed on second by picking crystal grain On, thus improve further and pick efficiency.

In alternative, putting the first load carrier that brilliant dish is connected with first for may move load carrier, making Obtaining the first load carrier can drive the first face to move, so that between first and center of rotation There is relative displacement, it is ensured that pick parts and first upper zones of different crystal grain to be picked is picked.

In alternative, putting the second load carrier that brilliant dish is connected with second for may move load carrier, making Obtaining the second load carrier can drive the second face to move, so that between second and center of rotation There is relative displacement, pick parts and can place zones of different on the second surface by picking crystal grain.

In alternative, the 3rd load carrier being connected with picking mechanism is removable load carrier, passes through Described 3rd load carrier can drive the center of rotation of picking mechanism to move so that first and rotation Turn between center and relative displacement occurs between second and center of rotation, therefore picking parts permissible Pick the crystal grain to be picked of first upper zones of different, and place picking crystal grain the most not Same region.

Accompanying drawing explanation

Fig. 1 picks apparatus structure schematic diagram for a kind of crystal grain；

Fig. 2 is the plan structure schematic diagram of Fig. 1 chips carrier and silicon chip frame；

The structural representation picking device that Fig. 3 provides for the embodiment of the present invention；

Fig. 4 and Fig. 5 is that picking of one embodiment of the invention picks apparatus structure schematic diagram in method；

Fig. 6 and Fig. 7 is that picking of another embodiment of the present invention picks apparatus structure schematic diagram in method；

Fig. 8 is that picking of further embodiment of this invention picks apparatus structure schematic diagram in method.

Detailed description of the invention

From background technology, prior art exists during picking crystal grain picks that efficiency is low and crystal grain The problem being vulnerable to pollute.

It is analyzed in conjunction with a kind of crystal grain method of picking, picks device with reference to Fig. 1, Fig. 1 for a kind of crystal grain Structural representation, the crystal grain method of picking includes: provide a chip bearing disc 10 (chip tray), in institute State the first loading end 11 of chip bearing disc 10 for placing some crystal grain to be picked 12；One silicon chip is provided Frame 20 (wafer frame), the second loading end 21 of described silicon chip frame 20 has picked crystal grain 12 for placing； There is provided picking mechanism 30, described picking mechanism 30 include a rotary part 32 and with described rotary part 32 be connected pick parts 31, described rotary part 32 drive described in pick parts 31 and hold described first Move between section 11 and the second loading end 21, will be located in chip bearing disc by described parts 31 of picking Crystal grain to be picked 12 on 10 carries out picking and being placed on the second loading end 21 of silicon chip frame 20.

In conjunction with the vertical view knot showing Fig. 1 chips carrier 10 and silicon chip frame 20 with reference to Fig. 2, Fig. 2 Structure schematic diagram, described chip bearing disc 10 and the orientation of described silicon chip frame 20 and described first carrying Face 11 is parallel, and described chip bearing disc 10 holds with described second with the orientation of described silicon chip frame 20 Section 21 is parallel.Described picking mechanism 30 be positioned at described chip bearing plate 10 and silicon chip frame 20 it Between, by described pick parts 31 between described first loading end 11 and the second loading end 21 move with Complete crystal grain picks work；In other words, described chip bearing disc 10 and described silicon chip frame 20 are along water Square place to the left and right.

Work is picked, it is desirable to described in order to be fully completed by the crystal grain to be picked on described chip bearing disc 10 Pick parts 31 and can pick the crystal grain to be picked being positioned at chip bearing plate 10 marginal area I, therefore institute Stating that to pick the length of parts 31 longer, causing the crystal grain to be picked will be located on chip bearing disc 10 to choose During picking and be placed on the second loading end 21 of silicon chip frame 20, the transmitting range of described crystal grain is long Thus it is low and the longest to cause crystal grain to pick efficiency；Further, owing to the transmitting range of crystal grain is long, cause The probability that during transmission crystal grain, crystal grain is contaminated is big, and the crystal grain picked easily is contaminated.

For solving the problems referred to above, the present invention provides one to pick device, including: first puts brilliant dish, described First puts brilliant dish has first for placing crystal grain to be picked；Second puts brilliant dish, and described second puts crystalline substance Dish has has picked second of crystal grain for placing, and described second is oppositely arranged with described first face； Picking mechanism, described picking mechanism includes rotary part and picks parts with described rotary part is connected, Wherein, described rotary part rotates around a center of rotation, described center of rotation be positioned at described first with the Between two, and described in pick parts through described rotary part be rotated in described first with second it Between move.

Present invention decreases picking mechanism by wait pick crystal grain pick put on brilliant dish to second time crystal grain move Distance so that pick efficiency and be improved, and owing to crystal grain displacement is short, crystal grain is contaminated Probability reduces.

Understandable, below in conjunction with the accompanying drawings for enabling the above-mentioned purpose of the present invention, feature and advantage to become apparent from The specific embodiment of the present invention is described in detail.

The structural representation picking device that Fig. 3 provides for the embodiment of the present invention.

The device of picking that the present embodiment provides includes:

First puts brilliant dish 101, and described first puts brilliant dish 101 has first for placing crystal grain to be picked 111；

Second puts brilliant dish 102, and described second puts brilliant dish 102 has and picked second of crystal grain for placing 112, and described second face 112 is oppositely arranged with described first face 111；

Picking mechanism 103, described picking mechanism 103 include rotary part 113 and with described rotary part 113 be connected pick parts 123, wherein, described rotary part 113 is rotated about the center of rotation, described When picking mechanism 103 carries out picking work, described center of rotation is positioned at described first face 111 and second Between 112, and described in pick parts 123 and be rotated in described first face 111 through described rotary part 113 And move between the second face 112.

Below with reference to accompanying drawing, the present embodiment offer is picked device to be described in detail.

Described first puts brilliant dish 101 for carrying crystal grain to be picked.In the present embodiment, described first puts crystalline substance Dish 101 is to place with horizontal plane；Described first face 111 is perpendicular with horizontal plane, and described Simultaneously 111 is also parallel with the YZ face in solid axes system, it is therefore contemplated that described solid axes XY face in system and described plane-parallel.

In the present embodiment, in order to crystal grain to be picked is sticked to described first is put on brilliant dish 101, described the Simultaneously being provided with the first pad pasting (not shown) on 111, described first pad pasting is used for carrying crystal grain to be picked. Described first pad pasting is UV film (UV tape) or blue film (blue tape).

Described device of picking also includes, the first load carrier 201, and described second load carrier 202 is with described First puts brilliant dish 101 is connected, and is suitable to carry described first and puts brilliant dish 101.

In the present embodiment, described first load carrier 201 is positioned at described first back side putting brilliant dish 101, The back side putting brilliant dish 101 with described first is connected, and described first back side putting brilliant dish 101 is and described the Simultaneously 111 relative face.In other embodiments, described first load carrier may be located on described One side putting brilliant dish, wherein, described side is between described first and the back side.

Pick device and treat to coordinate and pick the effect of picking of crystal grain, improve and pick efficiency, and reduce and choose Pick mechanism 103 zones of different crystal grain to be picked on first face 111 is picked work to pick difficulty, Described first load carrier 201 is removable load carrier, by the shifting of described first load carrier 201 Dynamic drive described first is put brilliant dish 101 and is moved, to complete to treat zones of different on described first face 111 That picks crystal grain picks work.

In the present embodiment, described first face 111 is perpendicular with horizontal plane, and described first face 111 and space YZ face in the system of axis is parallel；Described first load carrier 201 is suitable to make described first to put brilliant dish 101 Move along Y direction, it should be noted that being perpendicular to paper orientation in Fig. 3 is Y direction, accordingly X-axis and Z axis are set；In other embodiments, it is also possible to be perpendicular to paper orientation for X-axis side To, Y-axis and Z axis are set accordingly.Concrete, described first load carrier 201 is suitable to make described First puts brilliant dish 101 moves along positive Y direction or negative Y direction, to facilitate picking mechanism 103 right The crystal grain to be picked being in same string on first face 111 is picked.

Described first load carrier 201 can be adapted to make described first to put brilliant dish 101 and moves along Z-direction Dynamic.Concrete, described first load carrier 201 is suitable to make described first to put brilliant dish 101 along positive Z axis side To or negative Z-direction move, to facilitate picking mechanism 103 to be in same a line on the first face 111 Crystal grain to be picked is picked.

In the present embodiment, described first load carrier 201 both can make described first to put brilliant dish 101 along Y Direction of principal axis moves, it is also possible to makes first to put brilliant dish 101 and moves along Z-direction.In other embodiments, Described first load carrier is suitable to make first to put a brilliant dish direction along Y direction or Z-direction Mobile.

In addition it is also necessary to explanation, in other embodiments, treat according to picking mechanism and pick crystal grain The difference picking rule, described first load carrier can also make described first to put brilliant dish to be perpendicular to The axis stating first rotates, and described axis intersects with described first, say, that described One load carrier is suitable to make described first to put brilliant dish and carries out rotation being parallel on described first.

Described second puts brilliant dish 102 has picked crystal grain for carrying.Described second puts the second of brilliant dish 102 Face 112 is oppositely arranged with described first face 111, parallel with first and placed side by side compared to second Scheme is compared, in the technical scheme that described second face 112 and the first face 111 are oppositely arranged, and will crystalline substance be picked The distance that when grain is picked and is placed on the second face 112 from the first face 111, crystal grain to be picked moves is shorter, Therefore can effectively improve and pick efficiency, reduce and pick what crystal grain to be picked in work process was contaminated Probability.

Owing to being parallel to each other and relatively, the distance between said two face is the shortest when two faces.Therefore, originally In embodiment, described second face 112 is parallel to each other with described first face 111, so that the first face 111 And the distance between the second face 112 is short, crystal grain to be picked moves to second from the first face 111 Displacement on 112 is short.It should be noted that in the present embodiment, described first face 111 and second 112 are parallel to each other, say, that the angle between described first face 111 and the second face 112 is 0 degree； In other embodiments, can also have between described first and second more than 0 less than or equal to 10 degree Angle, the angle between described first and second is set smaller than reason for this is that equal to 10 degree, If the angle between described first and second is excessive, then pick in work process picking section carrying out The requirement of the length of part is higher, it is difficult to use the parts of picking of same length to complete to pick work.

In the present embodiment, described second puts brilliant dish 102 is and horizontal plane placement；Described second 112 is perpendicular with horizontal plane, and described second face 112 is also parallel with the YZ face in solid axes system, It is therefore contemplated that the XY face in described solid axes system and described plane-parallel.

In the present embodiment, in order to stick to described second put on brilliant dish 102 by pick crystal grain, described the Being also provided with the second pad pasting (not shown) on two faces 112, described second pad pasting is picked for carrying Crystal grain.Described second pad pasting is UV film or blue film.

Described device of picking also includes, the second load carrier 202, and described second load carrier 202 is with described Second puts brilliant dish 102 is connected, and is suitable to carry described second and puts brilliant dish 102.

In the present embodiment, described second load carrier 202 is positioned at described second back side putting brilliant dish 102, The back side putting brilliant dish 102 with described second is connected, and described second back side putting brilliant dish 102 is and described the The face that two faces 112 are relative.In other embodiments, described second load carrier may be located on described Two sides putting brilliant dish, described side is between described second and the back side.

In order to coordinate pick device treat pick crystal grain pick effect so that picking mechanism 103 easily reaches It is placed on the purpose of zones of different on the second face 112, described second load carrier 202 to by picking crystal grain For movable mechanism, put brilliant dish 102 by the mobile drive described second of described second load carrier 202 Mobile, to be placed on zones of different on the second face 112 by picking crystal grain.

In the present embodiment, described second face 112 is perpendicular with horizontal plane, and described second face 112 is with empty Between YZ face in the system of axis parallel；Described second load carrier 202 is suitable to make described second to put brilliant dish 102 move along Y direction.Concrete, described second load carrier 202 is suitable to make described second to put crystalline substance Dish 102 moves along positive Y direction or negative Y direction, to facilitate picking mechanism 103 will to pick crystalline substance Grain is placed on the same string on the second face 112.

Described second load carrier 202 can be adapted to make described second to put brilliant dish 102 and moves along Z-direction Dynamic.Concrete, described second load carrier 202 is suitable to make described second to put brilliant dish 102 along positive Z axis side Move to mobile or negative Z-direction, to facilitate picking mechanism 103 to be placed on second by picking crystal grain Same a line on face 112.

In the present embodiment, described second load carrier 202 both can make described second to put brilliant dish 102 along Y Direction of principal axis moves, it is also possible to make second to put brilliant dish 102 along Z-direction with movement.In other embodiments, Described second load carrier is suitable to make described second to put along Y direction or Z-direction of brilliant dish Direction is moved.

In addition it is also necessary to explanation, in other embodiments, according to picking mechanism to picking crystal grain Pick the difference placing rule, described second load carrier can also make described second to put brilliant dish with vertically Rotate in the axis of described second, and described axis intersect with described second, say, that Described second load carrier is suitable to make described second to put brilliant dish and carries out rotation being parallel on described second.

Described picking mechanism 103 is used for picking the crystal grain to be picked being placed on the first face 111, and will Pick crystal grain to be placed on the second the second face 112 putting brilliant dish 102.

Described rotary part 113 is picked parts 123 and is rotated described in being used for driving so that described in pick Parts 123 move between described first face 111 and the second face 112, thus complete to pick crystal grain to be picked, And be placed on picking crystal grain on the second face 112.

Described rotary part 113 is rotated about the center of rotation, and described center of rotation is positioned at described first face 111 And between the second face 112.In the present embodiment, described first face 111 is parallel to each other with the second face 112, institute State the beeline between center of rotation and described first face 111 and described center of rotation and the second face 112 Between beeline equal.It can also be expected that described center of rotation is positioned at the 3rd, the described 3rd Face is between described first face 111 and the second face 112, and between described 3rd and the first face 111 Distance is equal with the distance between the 3rd with the second face 112.

In one embodiment, the rotation axis z at described center of rotation place and horizontal plane, and institute The rotation axis z stating center of rotation place is parallel with the Z axis in space coordinates axis so that described rotation Parts 113 are picked parts 123 and are rotated in the plane being perpendicular to described first face 111 described in driving, and institute State rotary part 113 drive described in pick in the parts 123 X/Y plane in solid axes system and rotate.

In another embodiment, the rotation axis z at described center of rotation place and horizontal plane, and institute The rotation axis z stating center of rotation place is parallel with the Y-axis in solid axes system so that described rotation Parts 113 are picked parts 123 and are rotated in the plane being perpendicular to described first face 111 described in driving, and institute State rotary part 113 drive described in pick in the parts 123 XZ plane in solid axes system and rotate.

In the present embodiment, described in pick parts 123 and include: at least one picks arm 124, described in pick arm 124 have the first relative end and the second end, and described first end is connected with described rotary part 113；Take Put parts 125, described in pick and place parts 125 and be connected with described second end.

In the present embodiment, described in pick and place parts 125 for suction nozzle, by suction nozzle, absorption is positioned at the first face 111 On crystal grain to be picked, and will be released by described suction nozzle in time picking crystal grain and move to the second face 112 Put and pick crystal grain and be placed on picking crystal grain on the second face 112.The described parts 125 that pick and place also may be used Think pickup folder.

The described quantity of arm 124 of picking is more than or equal to 1.Pick efficiency to improve, described in pick arm The quantity of 124 is more than 1.Pick parts 123 described in and and include that even number picks arm 124, described in pick arm 124 centered by described rotary part 113 in wait angle distribution so that described in pick parts 123 work Time, when one pick arm 124 pick on the first face 111 in time picking crystal grain, correspondence has another and picks Arm 124 is placed on picking crystal grain on the second face 112, so that picks device picks efficiency more High.

It should be noted that in other embodiments, described in pick the quantity of arm can also be for odd number.

In the present embodiment, there are 2 pick arm 124 as example using described parts 123 of picking.

Owing to described first face 111 is oppositely arranged with the second face 112 so that described first face 111 and second Distance between face 112 is shorter, is therefore moved to the second face 112 from the first face 111 by crystal grain to be picked On displacement shorter such that it is able to improve pick efficiency, reduce crystal grain to be picked in moving process Contamination.

Further, described first face 111 is parallel to each other with the second face 112, each on the most described first face 111 Point is the most equal with the minimum range between the second face 112, treating at each point on described first face 111 is picked The beeline that when crystal grain is placed on the second face 112, crystal grain to be picked need to move is the most equal；Described waiting is chosen Pick a length of L of parts 123, described in crystal grain to be picked move on the second face 112 from the first face 111 Time, described in crystal grain displacement to be picked be described centered by center of rotation, with length L as radius The half of circumference, say, that described in crystal grain displacement to be picked be π L.

In the present embodiment, described in pick device and also include, the 3rd load carrier 203, described 3rd carrying machine Structure 203 is connected with described picking mechanism 103, is suitable to carry described picking mechanism 103.In the present embodiment, Described 3rd load carrier 203 is connected with described rotary part 113.

In order to coordinate pick device treat pick crystal grain pick effect so that picking mechanism 103 picks Simultaneously the difficulty of the crystal grain to be picked of zones of different is relatively low on 111, and picking mechanism 103 will be chosen Picking crystal grain, to be placed on the difficulty of zones of different on the second face 112 relatively low, and described second load carrier 202 is Removable load carrier, by the described picking mechanism of mobile drive 103 of described 3rd load carrier 203 Mobile, with complete on the first face 111 zones of different crystal grain to be picked pick work, and will choose Pick crystal grain and be placed on zones of different on the second face 112.

Described 3rd load carrier 203 is suitable to make described picking mechanism 103 be parallel to described first face 111 Or second the side in face 112 move up.In the present embodiment, in described first face 111 and solid axes system YZ plane parallel；Described second plane 112 is parallel with the YZ plane in solid axes system；Described 3rd load carrier 203 is suitable to make described picking mechanism 103 move or along Y direction along Z-direction Mobile.

In one embodiment, described 3rd load carrier 203 can make described picking mechanism 103 along Z axis Direction is moved, such as, make picking mechanism 103 move along positive Z-direction or negative Z-direction.At another In embodiment, described 3rd load carrier 203 can make described picking mechanism 103 move along Y direction, Described picking mechanism 103 is such as made to move along positive Y direction or negative Y direction.In other embodiments In, described 3rd load carrier both can make picking mechanism move along Y direction can also make picking mechanism Move along Z-direction.

Described first puts brilliant dish 101 has the back side relative with described first face 111.Described pick device Can also include: ejector pin mechanism (not shown), described ejector pin mechanism is positioned at described first and puts brilliant dish 101 The back side, is suitable to eject the crystal grain to be picked on the first face 111, to facilitate picking mechanism 103 to pick institute State the crystal grain to be picked being ejected.

Described ejector pin mechanism includes at least one thimble, puts brilliant dish 101 to described first by described thimble The back side applies pressure so that be positioned at the crystal grain to be picked on the first face 111 by jack-up.

Described device of picking can also include: the 4th load carrier, described 4th load carrier and described top Pin mechanism is connected, and is suitable to carry described ejector pin mechanism.Work is picked in order to coordinate picking mechanism 103, The crystal grain to be picked of zones of different on first face 111 all can be ejected, and described 4th load carrier is Removable load carrier, makes ejector pin mechanism by the first face 111 by the movement of described 4th load carrier The crystal grain to be picked of upper zones of different ejects.

In the present embodiment, described first face 111 is parallel with the YZ face in solid axes system；Described 4th Load carrier is movable mechanism, and described 4th load carrier be suitable to make described ejector pin mechanism along X-axis, Move in Y-axis or Z-direction.Treat according to picking mechanism 103 pick crystal grain pick rule, really The direction that fixed described 4th load carrier drives described ejector pin mechanism to move.

Described device of picking can also include: image observation module, and described image observation module is used for obtaining Image on described first face 111 or the second face 112.In the present embodiment, described image observation module is positioned at Between described first face 111 and the second face 112 so that described image observation module both can obtain first The situation of crystal grain to be picked on 111, it is also possible to obtain the situation having picked crystal grain on the second face 112, and go back Picking mechanism 103 can be obtained and move the situation picking crystal grain.Described image observation module includes electric charge Rhizoma Nelumbinis seaming element imageing sensor (CCD, Charge Coupled Device).

Described device of picking also includes: data obtaining module, and described data obtaining module is used for acquisition first The quality of the crystal grain to be picked on face 111, such as, obtains the yield of crystal grain to be picked on the first face 111, Or the electrical property of crystal grain to be picked on first face 111 of acquisition.According to the yield obtained or electrical property, Work of picking for picking mechanism 103 provides basis.

Described device of picking also includes: pick control module, described in pick control module for according to obtain The quality of the crystal grain to be picked on first, controls described picking mechanism 103 and treats and pick picking of crystal grain Work.Concrete, described in pick control module and control described picking mechanism 103 and pick on the first face 111 Meet the crystal grain to be picked of demand, do not pick performance or yield does not meets the crystal grain to be picked of demand.

What the present embodiment provided picks in device, owing to the first face 111 is oppositely arranged with the second face 112, makes Distance between described first face 111 and the second face 112 is shorter, therefore will crystal grain be picked from first The displacement to the second face 112 is moved shorter such that it is able to improving and pick efficiency, reduction is treated on 111 Pick crystal grain contamination in moving process.

Further, owing to the first face 111 is parallel to each other with the second face 12, therefore on the first face 111 each point with Minimum range between second face 112 is the most equal, by the crystal grain to be picked at each point on described first face 111 The beeline that when being placed on the second face 112, crystal grain to be picked need to move is the most equal.With first and Second scheme parallel and placed side by side is compared, length L picking parts 123 required in the present embodiment Shorter.Therefore, in the present embodiment, what employing length L was shorter picks parts 123, i.e. can complete first On face 111 crystal grain to be picked pick work, and wait to pick without regulating in picking work process Length L of parts 123.

Accordingly, the present invention also provides for one and picks method, including: provide aforesaid and pick device；? Some crystal grain to be picked is prevented on first put brilliant dish first；Picking mechanism is used to carry out picking work, Pick in work described, described in pick parts through described rotary part be rotated in described first with the Move between two, the crystal grain to be picked on described first is picked to the second put brilliant dish second.

The present invention provide pick in method, described in crystal grain to be picked from first movement to second Displacement is short so that it is costly and time consuming short to pick efficiency, and due to the displacement of crystal grain to be picked short because of This crystal grain is difficult to be contaminated in moving process.

Fig. 4 and Fig. 5 is that one embodiment of the invention is picked and picked apparatus structure schematic diagram in method.Relevant choose The description picking device refers to aforesaid corresponding description, does not repeats them here.

Below with reference to accompanying drawing, the offer method of picking of the present invention is described in detail.

Fig. 4 picks for the one that the present embodiment provides and picks apparatus structure schematic diagram in method.

With reference to Fig. 4, some crystal grain to be picked is placed in the described first the first face 111 putting brilliant dish 101.

Described crystal grain to be picked is that cutting crystal wafer obtains.In the present embodiment, described some crystal grain to be picked Place in array fashion, described in crystal grain to be picked include that m row n arranges so that pick choosing of work Pick rule easily to arrange.Further, described first face 111 is perpendicular with horizontal plane, and described first face 111 Paralleling with the YZ face in solid axes system, therefore, being parallel to the Z axis in solid axes system is Row, the Y-axis being parallel in solid axes system is row.

In other embodiments, it is also possible to according to picking regular difference, adjust crystal grain to be picked first Modes of emplacement on face 111.

With continued reference to Fig. 4, use described picking mechanism 103 to carry out picking work, pick in work described, Described parts 123 of picking are rotated in described first face 111 and the second face 112 through described rotary part 113 Between move, the crystal grain to be picked on described first face 111 is picked to second and puts the second of brilliant dish 102 On face 112.

Pick in work described in carrying out, described first face 111 and the center of rotation of described rotary part 113 Relative movement；Described second face 112 and the center of rotation relative movement of described rotary part 113, thus Crystal grain to be picked in first face 111 zones of different is picked by picking mechanism 103, and, Described picking mechanism 103 can be placed on picking crystal grain in the second face 112 zones of different.

In the present embodiment, before picking work described in carrying out, described first face 111 and the second face 112 It is oppositely arranged in Y direction in being parallel to solid axes system, and is being parallel to solid axes system In Z-direction on mutually stagger setting；Accordingly, described in, the method for picking includes: make the first face 111 Move along being parallel to Z-direction；The second face 112 is made to move along being parallel to Z-direction, and described second Face 112 is moved contrary with the first face 111 moving direction.

Concrete, drive described first to put brilliant dish 101 by described first load carrier 201 and move, make Obtain described first face 111 to move along being parallel to Z-direction.Driven by described second load carrier 202 Described second puts brilliant dish 102 moves so that described second face 112 is moved along being parallel to Z-direction.

Further, described first face 111 and the second face 112 moving direction with carry out picking first first of work 111 is relevant with the original state in the second face 112.In the present embodiment, by described first load carrier 201 Make described first face 111 move along positive Z-direction, make described by described second load carrier 202 Two faces 112 are moved along negative Z-direction.In other embodiments, according to carrying out picking before work first Different relative to position between face from second, make first along negative Z-direction by the first load carrier Mobile, make second to move along positive Z-direction by the second load carrier.

In the present embodiment, use column scan mode carry out described in pick work, described in the method for picking include: Described first face 111 is made to move along being parallel to Z-direction, to complete picking of every string crystal grain to be picked Work；And complete every string crystal grain to be picked pick work after, make described first face 111 along flat Row moves in Y direction, picks work with carry out the crystal grain to be picked of next column.It should be noted that Previous column crystal grain to be picked pick in work, described first face 111 along be parallel to Z-direction move Dynamic direction is first direction；Next column crystal grain to be picked pick in work, described first face 111 Being second direction along being parallel to the direction that Z-direction moves, described second direction is contrary with first direction, Ensureing to pick in work process described, the described first moving range putting brilliant dish 101 is in fixed range In.Fig. 4 puts in brilliant dish 101 first and shows the first face 111 moving direction in arrow mode, Second puts in brilliant dish 102 and shows the second face 112 moving direction in arrow mode.Wherein, Y direction Can be that positive Y direction can also be for negative Y direction.

In other embodiments, use row scan mode carry out described in when picking work, described in pick method Including: make described first edge be parallel to Y direction and move, to complete the crystal grain to be picked of every a line Pick work；Complete every a line crystal grain to be picked pick work after, make described first along flat Row moves in Z-direction, picks work with carry out the crystal grain to be picked of next line.It should be noted that Picking in work at previous row crystal grain to be picked, first edge is parallel to the direction that Y direction moves and is First direction；Next line crystal grain to be picked pick in work, described first edge is parallel to Y-axis The direction that direction is moved is second direction, and described second direction is contrary with first direction, it is ensured that choose described Picking in work process, the described first moving range putting brilliant dish is in fixed range.Wherein, Z-direction Can be that positive Z-direction can also be for Z-direction.

Pick in work process described, described picking mechanism 103 via the rotation of rotary part 113, Make to pick parts 123 to move between the first face 111 and the second face 112, and described picking mechanism 103 Center of rotation position keep constant, it is also possible to think described rotary part 113 position keep constant.

In the present embodiment, described center of rotation is positioned at rotation axis z, described rotation axis z and is positioned at first Between face 111 and the second face 112, and the distance in rotation axis z to first face 111 is equal to rotation axis z Distance to the second face 112.

In the present embodiment, described in pick the surfaces of revolution that parts 123 are formed and described the around described center of rotation Simultaneously 111 and second face 112 perpendicular, and the XY face in the described surfaces of revolution and solid axes system puts down OK.In other embodiments, the surfaces of revolution and first that parts are formed around described center of rotation are picked described in And second perpendicular, and the described surfaces of revolution is parallel with the XZ face in solid axes system.

Described parts 123 of picking include that even number picks arm 124, and described even number picks arm 124 with institute State in waiting angle distribution centered by rotary part 113, therefore pick arm 124 choose on the first face 111 when one Picking in time picking crystal grain, another is picked arm 124 and is placed on picking crystal grain on the second face 112, favorably Efficiency is picked in improving further.

In the present embodiment, by described pick parts 123 include 2 pick arm 124 as a example by.Real at other Execute in example, described in pick parts and can also have 1 and pick arm.

By with described pick that arm 124 is connected pick and place parts 125, pick and be positioned at treating on the first face 111 Pick crystal grain；And described in passing through, pick and place parts 125, it is placed on picking crystal grain on the second face 112.

In the present embodiment, described in pick a length of L of parts 123, crystal grain move from the first face 111 to Displacement between second face 112 is π L, and on the first face 111 between each point and the second face 112 Beeline is the most equal, and the beeline between described rotary part 113 and the first face 111 is equal to described rotation Beeline between rotation member 113 and the second face 112；Additionally, adjusted by the first load carrier 201 The position in whole first face 111, is adjusted the position in the second face 112, thus adjusts by the second load carrier 202 Relative position between whole first face 111 and center of rotation, it is ensured that each point on center of rotation to the first face 111 Between distance equal；And by adjusting the relative position between the second face 112 and center of rotation, it is ensured that Center of rotation is equal to the distance between each point on the second face 112.

Therefore, in the present embodiment, described in pick parts 123 there is shorter length L, i.e. can complete The simultaneously crystal grain to be picked picked in work, and the first face 111 everywhere of crystal grain to be picked everywhere on 111 Mobile displacement to the second face 112 is the shortest, thus raising is picked efficiency minimizing and picked work institute The time needed, and make the contaminated probability of crystal grain reduce owing to crystal grain displacement is short.

In picking work, it is also possible to use image observation module, observe the first face 111 or the second face 112 On crystal grain situation, timely adjust picking mechanism 103 crystal grain to be picked on first face 111 is picked Situation, and picking mechanism 103 can also be adjusted in time on the second face 112, place the feelings picking crystal grain Condition.

Pick in work described in carrying out, it is also possible to use ejector pin mechanism, will be located in treating on the first face 111 Pick crystal grain to eject, facilitate picking mechanism 103 pick described in the crystal grain to be picked that is ejected.

Fig. 5 picks for the another kind that embodiment provides and picks apparatus structure schematic diagram in method.

With reference to Fig. 5, before carrying out picking work, described first face 111 is being parallel to the second face 112 Mutually stagger in Y direction in solid axes system setting, and in being parallel to solid axes system It is oppositely arranged in Z-direction；The described method of picking includes: make described first face 111 along being parallel to Y-axis Direction is moved；Make described second face 112 move along being parallel to Y direction, and described second face 112 is moved Dynamic direction is contrary with the first face 111 moving direction.

Concrete, use row scan mode carry out described in when picking work, described in the method for picking include: make Described first face 111 is moved along being parallel to Y direction, to complete picking of the crystal grain to be picked of every a line Work；And complete every a line crystal grain to be picked pick work after, make described first face 111 along flat Row moves in Z-direction, picks work with carry out the crystal grain to be picked of next line.It should be noted that Previous row crystal grain to be picked pick in work, described first face 111 along be parallel to Y direction move Dynamic direction is first direction；Next line crystal grain to be picked pick in work, described first face 111 Being second direction along being parallel to the direction that Y direction moves, described second direction is contrary with first direction. Fig. 5 puts first and shows the moving direction in the first face 111 in brilliant dish 101 in arrow mode, the Two put the brilliant interior moving direction showing the second face 112 in arrow mode of dish 102.Wherein, Z-direction can Think that positive Z-direction can also be for negative Z-direction.

Use column scan mode carry out described in when picking work, described in the method for picking include: make described first Face 111 is moved along being parallel to Z-direction, picks work with complete the crystal grain to be picked of every string；And Complete every string crystal grain to be picked pick work after, make described first face 111 along being parallel to Y Direction of principal axis moves, and picks work with carry out the crystal grain to be picked of next column.It should be noted that front The crystal grain to be picked of string pick in work, described first face 111 is along being parallel to what Z-direction moved Direction is first direction；Next column crystal grain to be picked pick in work, described first edge, face 111 Being parallel to the direction that Z-direction moves is second direction, and described second direction is contrary with first direction.Its In, Y direction can be that positive Y direction can also be for negative Y direction.

Another embodiment of the present invention also one picks method, Fig. 6 and Fig. 7 is that another embodiment of the present invention is chosen Pick and method picks apparatus structure schematic diagram, below with reference to accompanying drawing to the present embodiment offer side of picking Method is described in detail.

In conjunction with reference to Fig. 6 and Fig. 7, described in the method for picking include: put the first of brilliant dish 101 described first Some crystal grain to be picked is placed on face 111；Use picking mechanism 103 to carry out picking work, choose described Pick in work, described in pick parts 123 and be rotated in described first face 111 through described rotary part 113 And move between the second face 112, the crystal grain to be picked on described first face 111 is picked to second and put brilliant dish On second face 112 of 102.

Before picking work described in carrying out, described first face 111 and the second face 112 are being parallel to space seat It is oppositely arranged on YZ face in parameter system.The described method of picking includes: make described first face 111 along parallel Move in Z-direction, and make described second face 112 move along being parallel to Z-direction；Or, make Described first face 111 is moved along being parallel to Y direction, and makes described second face 112 along being parallel to Y-axis Direction is moved.Described first face 111 is consistent with the second face 112 moving direction.

Drive described first face 111 to move by described first load carrier 201, hold by described second Mounted mechanism 202 drives described second face 112 to move.

In the present embodiment, include that 2 are picked arm 124 as example using described picking mechanism 123.Pass through With described pick that arm 124 is connected pick and place parts 125, from the first face 111, pick crystal grain to be picked, and It is placed on picking crystal grain on the second face 112.

With reference to Fig. 6, Fig. 6 be a kind of structural representation picked and pick device in method, described in pick method Including: use column scan direction carry out described in pick work, the relevant definition arranged refers to aforementioned corresponding theory Bright；Described first face 111 is made to move along being parallel to Z-direction, to complete the crystal grain to be picked of every string Pick work；And complete every string crystal grain to be picked pick work after, make described first 111 move along being parallel to Y direction, pick work with carry out next line crystal grain to be picked.Wherein, Y Direction of principal axis can be that positive Y direction can also be for negative Y direction.

It should be noted that previous column crystal grain to be picked pick in work, described first face 111 It is first direction along being parallel to the direction that Z-direction moves；Next column crystal grain to be picked pick work In work, the first face 111 is second direction along being parallel to the direction that Z-direction moves, described second direction Contrary with first direction.

Be that another kind is picked and picked apparatus structure schematic diagram in method with reference to Fig. 7, Fig. 7, described in pick method Including: use direction of line scan carry out shown in pick work, the definition about row refers to aforementioned corresponding theory Bright；Described first face 111 is made to move along being parallel to Y direction, to complete the crystal grain to be picked of every a line Pick work；And complete every a line crystal grain to be picked pick work after, make described first 111 move along being parallel to Z-direction, pick work with carry out that next column picks crystal grain.Wherein, Z axis Direction can be that positive Z-direction can also be for negative Z-direction.

It should be noted that pick in work at previous row crystal grain to be picked, the first face 111 is along parallel It is first direction in the direction that Y direction moves；Next line crystal grain to be picked pick in work, First face 111 is second direction along being parallel to the direction that Y direction moves, described second direction and first In opposite direction.

Additionally, in other embodiments, according to picking the difference picking rule of work, carry out described Pick in work, make described first with the center of rotation relative movement of rotary part, make described second The method of the center of rotation relative movement with rotary part can also include: by described first load carrier, Make first to put brilliant dish to rotate along the axis being perpendicular to first, and described axis intersect with described first, So that the first face carries out rotation, to facilitate picking mechanism to pick the crystalline substance to be picked of first upper zones of different Grain；By described second load carrier, the described second axis putting brilliant dish eye second is made to rotate, and institute State axis to intersect with described second, so that the second face carries out rotation, to facilitate described picking mechanism to incite somebody to action Pick crystal grain and prevent zones of different on the second surface.

Further embodiment of this invention also provides for one and picks method, and Fig. 8 provides for further embodiment of this invention Pick method picked apparatus structure schematic diagram.

The described method of picking includes: place some treating on the described first the first face 111 putting brilliant dish 101 Pick crystal grain；Use picking mechanism 103 carry out picking work, pick in work described, described in pick Parts 123 move through being rotated between described first face 111 and the second face 112 of described rotary part 113, Crystal grain to be picked on described first face 111 is picked to the second the second face 112 putting brilliant dish 102.

Before picking work described in carrying out, described first face 111 and the second face 112 are being parallel to space seat It is oppositely arranged on YZ face in parameter system.The described method of picking includes: make described picking mechanism 103 along flat Row moves in Y direction；And make described picking mechanism 103 move along being parallel to Z-direction.In Fig. 8, Show the moving direction of picking mechanism 103 with arrow in rotary part 113.

In the present embodiment, in picking work, the position in described first face 111 and the second face 112 keeps Constant, make center of rotation relative to the first face 111 by the movement of described picking mechanism 103 position and Second face 112 is moved, thus completes to pick crystal grain to be picked on the first face 111 work, and will Pick crystal grain and be placed on the second face 112 zones of different.

Described picking mechanism 103 is driven to move by described 3rd load carrier 203.

In the present embodiment, use column scan mode carry out described in pick work, described in the method for picking include: Described picking mechanism 103 is made to move along being parallel to Z-direction, to complete choosing of every string crystal grain to be picked Pick work；Complete every string crystal grain to be picked pick work after, make described picking mechanism 103 edge It is parallel to Y direction move, picks work with carry out next column crystal grain to be picked.It should be noted that Previous column crystal grain to be picked pick in work, described picking mechanism 103 is along being parallel to Z-direction The direction of movement is first direction；Next column crystal grain to be picked pick in work, described picking machine Structure 103 is second direction along being parallel to the direction that Z-direction moves, described second direction and first direction On the contrary.Wherein, Y direction can be that positive Y direction can also be for negative Y direction.

In other embodiments, it is also possible to use row scan mode carry out described in pick work, described in pick Method includes: makes described picking mechanism edge be parallel to Y direction and moves, to complete every a line crystalline substance to be picked Grain pick work；Complete every a line crystal grain to be picked pick work after, make described picking mechanism Move along being parallel to Z-direction, pick work with carry out next line crystal grain to be picked.Need explanation Be, previous row crystal grain to be picked pick in work, described picking mechanism is along being parallel to Y direction The direction of movement is first direction；Next line crystal grain to be picked pick in work, described picking machine Structure is second direction along being parallel to the direction that Y direction moves, and described second direction is contrary with first direction. Wherein, Z-direction can be that positive Z-direction can also be for negative Z-direction.

What the present embodiment provided picks in method, due to the first the first face 111 and second putting brilliant dish 101 The second face 112 putting brilliant dish 102 is oppositely arranged, and described first face 111 is parallel to each other with the second face 112； And the center that the center of rotation of described rotary part 113 is between described first face 111 and the second face 112 Position so that the beeline between center of rotation to the first face 111 is equal to center of rotation to second Beeline between 112；Additionally, adjust described picking mechanism by described 3rd load carrier 203 The position of 103, thus adjust the relative position between the first face 111 and center of rotation, and adjust second Relative position between 112 with center of rotation, it is ensured that on center of rotation and the first face 111 between each point away from From and equal with the distance between each point on the second face 112.

Therefore, in the present embodiment, described in pick parts 123 there is shorter length, both can complete institute State the work of picking of crystal grain to be picked, improve and pick efficiency, reduce the probability that crystal grain is contaminated.

Although present disclosure is as above, but the present invention is not limited to this.Any those skilled in the art, Without departing from the spirit and scope of the present invention, all can make various changes or modifications, therefore the guarantor of the present invention The scope of protecting should be as the criterion with claim limited range.

Claims

1. pick device for one kind, it is characterised in that including:

First puts brilliant dish, and described first puts brilliant dish has first for placing crystal grain to be picked；

Second puts brilliant dish, and described second puts brilliant dish has and picked second of crystal grain for placing, described Second is oppositely arranged with described first face；

Picking mechanism, described picking mechanism include rotary part and with picking that described rotary part is connected Parts, wherein, described rotary part is rotated about the center of rotation, and described picking mechanism picks work carrying out Time, described center of rotation between described first and second, and described in pick parts through described rotation Being rotated between described first and second of rotation member is moved.

Pick device the most as claimed in claim 1, it is characterised in that described second with described first phase The most parallel.

Pick device the most as claimed in claim 1, it is characterised in that described first perpendicular with horizontal plane；

And described second perpendicular with horizontal plane.

Pick device the most as claimed in claim 1 or 2, it is characterised in that described center of rotation is positioned at described In between first and second the 3rd, wherein, the distance between described 3rd and first Equal to the distance between described 3rd and second.

Pick device the most as claimed in claim 1, it is characterised in that described in pick parts and include: at least one Individual pick arm, described in pick arm there is the first relative end and the second end, described first end is with described Rotary part is connected；Pick and place parts, described in pick and place parts and be connected with described second end.

Pick device the most as claimed in claim 5, it is characterised in that described in pick and place parts be suction nozzle or gripping Part.

Pick device the most as claimed in claim 1, it is characterised in that described in pick device and also include, first Load carrier, described first load carrier is suitable to carry described first and puts brilliant dish；Described first carrying machine Structure is removable load carrier, and described first load carrier is suitable to make described first to put brilliant dish and is being parallel to The direction of described first is moved.

Pick device the most as claimed in claim 7, it is characterised in that described first load carrier is further adapted for making Described first puts brilliant dish rotates along the axis being perpendicular to described first, and described axis and described first Face is intersected.

Pick device the most as claimed in claim 1, it is characterised in that described in pick device and also include, second Load carrier, described second load carrier is suitable to carry described second and puts brilliant dish；Described second carrying machine Structure is removable load carrier, and described second load carrier is suitable to make described second to put brilliant dish and is being parallel to The direction of described second is moved.

Pick device the most as claimed in claim 9, it is characterised in that described second load carrier is suitable to make institute State second to put brilliant dish and rotate along the axis being perpendicular to described second, and described axis with described second Intersect.

11. pick device as claimed in claim 1, it is characterised in that described in pick device and also include, the 3rd Load carrier, described 3rd load carrier is suitable to carry described picking mechanism；Described 3rd load carrier For movable mechanism, described 3rd load carrier is suitable to make described picking mechanism be parallel to described first The direction of face or second is moved.

12. pick device as claimed in claim 1, it is characterised in that described first puts brilliant dish has with described First the relative back side；Described device of picking also includes, ejector pin mechanism, and described ejector pin mechanism is positioned at Described first back side putting brilliant dish, is suitable to eject the crystal grain to be picked on first.

13. pick device as claimed in claim 1, it is characterised in that be provided with the first patch on described first Film, described first pad pasting is used for carrying crystal grain to be picked；It is provided with the second pad pasting on described second,

Described second pad pasting has picked crystal grain for carrying.

14. pick device as claimed in claim 13, it is characterised in that described first pad pasting is UV film or indigo plant Film；Described second pad pasting is UV film or blue film.

15. pick device as claimed in claim 1, it is characterised in that described in pick device and also include: image Observation module, described image observation module is for obtaining the image on described first or second；Letter Breath acquisition module, the quality of described data obtaining module crystal grain to be picked on obtaining first； Pick control module, described in pick control module for according to obtain first on crystal grain to be picked Quality, control described picking mechanism treat pick crystal grain pick work.

Pick method for 16. 1 kinds, it is characterised in that including:

There is provided and pick device as described in any one of claim 1～15；

Described first put brilliant dish first places some crystal grain to be picked；

Use described picking mechanism to carry out picking work, pick in work described, described in pick parts Move, by described first through being rotated between described first and second of described rotary part Crystal grain to be picked pick to the second put brilliant dish second.

17. pick method as claimed in claim 16, it is characterised in that pick in work described in carrying out, institute State the center of rotation relative movement of first and described rotary part；Described second and described rotating part The center of rotation relative movement of part.

18. pick method as described in claim 16 or 17, it is characterised in that pick work described in carrying out Before, described first relative with in second Y direction in being parallel to solid axes system sets Put, and setting of mutually staggering in the Z-direction in being parallel to solid axes system；Described in carrying out Pick in work, described in the method for picking include:

Make described first edge be parallel to Z-direction to move；

Make described second edge be parallel to Z-direction to move, and described second moving direction and first Face moving direction is contrary so that in picking work process, relative between described first and second Area increases.

19. pick method as claimed in claim 18, it is characterised in that be parallel to the Z in solid axes system Axle for row, use column scan mode carry out described in pick work；The described method of picking includes: make described First edge is parallel to Z-direction and moves, and picks work with complete the crystal grain to be picked of every string； And complete every string crystal grain to be picked pick work after, make described first edge be parallel to Y Direction of principal axis moves, and picks work with carry out the crystal grain to be picked of next column.

20. pick method as claimed in claim 18, it is characterised in that be parallel to the Y in solid axes system Axle for row, use row scan mode carry out described in pick work；The described method of picking includes: make described First edge is parallel to Y direction and moves, and picks work with complete the crystal grain to be picked of every a line； Complete every a line crystal grain to be picked pick work after, make described first edge be parallel to Z axis Direction is moved, and picks work with carry out the crystal grain to be picked of next line.

21. pick method as described in claim 16 or 17, it is characterised in that pick work described in carrying out Before, described first mutually wrong with in second Y direction in being parallel to solid axes system Offer and put, and be oppositely arranged in the Z-direction in being parallel to solid axes system；Described in carrying out Pick in work, described in the method for picking include:

Make described first edge be parallel to Y direction to move；

Make described second edge be parallel to Y direction to move, and described second moving direction and first Face moving direction is contrary so that in picking work process, relative between described first and second Area increases.

22. pick method as claimed in claim 21, it is characterised in that be parallel to the Y in solid axes system Axle for row, use row scan mode carry out described in pick work；Described first edge is made to be parallel to Y-axis Direction is moved, and picks work with complete the crystal grain to be picked of every a line；And complete treating of every a line Pick crystal grain pick work after, described in pick method and also include: make described first edge be parallel to Z-direction moves, and picks work with carry out the crystal grain to be picked of next line.

23. pick method as claimed in claim 21, it is characterised in that be parallel to the Z in solid axes system Axle for row, use column scan direction carry out described in pick work；Described method of picking also includes: make institute State first edge to be parallel in Z-direction move, pick work with complete the crystal grain to be picked of every string Make；And complete every string crystal grain to be picked pick work after, make described first along parallel Move in Y direction, pick work with carry out the crystal grain to be picked of next column.

24. pick method as described in claim 16 or 17, it is characterised in that pick work described in carrying out Before, described first is oppositely arranged on second YZ face in being parallel to solid axes system； The described method of picking includes:

Make described first edge be parallel to Z-direction to move, and make described second along parallel Z axis side To movement；

Or, make described first edge be parallel to Y direction and move, and make described second along parallel Move in Y direction.

25. pick method as claimed in claim 24, it is characterised in that use column scan mode carry out described in choose Pick work；Make described first edge be parallel to Z-direction to move, to complete the crystalline substance to be picked of every string Grain pick work；And complete every string crystal grain to be picked pick work after, described in pick Method also includes: makes described first edge be parallel to Y direction and moves, and waits to pick carrying out next line Crystal grain pick work.

26. pick method as claimed in claim 24, it is characterised in that use row scan mode carry out described in choose Pick work；Make described first edge be parallel to Y direction to move, to complete the crystalline substance to be picked of every a line Grain pick work；And complete every a line crystal grain to be picked pick work after, described in pick Method also includes: makes described first edge be parallel to Z-direction and moves, and waits to pick carrying out next column Crystal grain pick work.

27. pick method as described in claim 16 or 17, it is characterised in that pick work described in carrying out Before, described first is oppositely arranged on second YZ face in being parallel to solid axes system； The described method of picking includes:

Make described picking mechanism edge be parallel to Y direction to move；

And make described picking mechanism move along being parallel to Z-direction.

28. pick method as claimed in claim 27, it is characterised in that use column scan mode carry out described in choose Pick work, described in the method for picking include: make described picking mechanism move along being parallel to Z-direction, with Complete every string crystal grain to be picked picks work；Work is picked complete every string crystal grain to be picked Afterwards, make described picking mechanism edge be parallel to Y direction to move, to carry out next column crystal grain to be picked Pick work.

29. pick method as claimed in claim 27, it is characterised in that use row scan mode carry out described in choose Pick work, described in the method for picking include: make described picking mechanism move along being parallel to Y direction, with Complete every a line crystal grain to be picked picks work；Work is picked complete every a line crystal grain to be picked Afterwards, make described picking mechanism edge be parallel to Z-direction to move, to carry out next line crystal grain to be picked Pick work.