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CN106054365B - A kind of lighting system of multiband LED fluorescence microscope - Google Patents

A kind of lighting system of multiband LED fluorescence microscope Download PDF

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Publication number
CN106054365B
CN106054365B CN201610585172.9A CN201610585172A CN106054365B CN 106054365 B CN106054365 B CN 106054365B CN 201610585172 A CN201610585172 A CN 201610585172A CN 106054365 B CN106054365 B CN 106054365B
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light source
led light
dichronic mirror
lighting system
film layer
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CN106054365A (en
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张克奇
邱慧
姚晨
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YONGXIN OPTICS CO Ltd NINGBO
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YONGXIN OPTICS CO Ltd NINGBO
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    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/06Means for illuminating specimens

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Abstract

The invention discloses a kind of lighting systems of multiband LED fluorescence microscope, including key lighting system, it further include the different N number of auxiliary lighting system of wavelength, N is the integer more than or equal to 1, the wavelength of auxiliary lighting system is different from the wavelength of key lighting system, auxiliary lighting system includes the first LED light source, the second LED light source, the first dichronic mirror and the second dichronic mirror, the wavelength difference of the wavelength of the first LED light source and the second LED light source;Second dichronic mirror is arranged in the optical path of key lighting system, angle between second dichronic mirror and the optical path of key lighting system is 45 degree, the light beam of first LED light source is gone out by the second dichroic mirror again after first passing through the first dichroic mirror, the light beam of second LED light source is gone out by the second dichroic mirror again after first passing through the transmission of the first dichronic mirror, and the light beam of key lighting system is transmitted away by the second dichronic mirror;Advantage is that efficiency is higher, and easy to operate, structure is simple, and cost is relatively low.

Description

A kind of lighting system of multiband LED fluorescence microscope
Technical field
The present invention relates to a kind of lighting systems of fluorescence microscope, more particularly, to a kind of multiband LED fluorescence microscope Lighting system.
Background technique
Traditional fluorescence microscope, it is most of all to use light source of the mercury lamp as its lighting system, but the energy consumption of mercury lamp It is larger, at present just gradually by low energy consumption and LED light source small in size replaced.LED light source as lighting system, at present It is widely applied in single-range fluorescence microscope.But in multiwave fluorescence microscope, due to need 2 and Above wavelength period, and the wavelength of LED light source is single, thus LED light source is above encountered in the application of multiwave fluorescence microscope Many difficulties.It is glimmering that we will be known as multiband LED as the multiband fluorescence microscope of lighting system light source using LED light source Light microscope.Existing multiband LED fluorescence microscope is in order to obtain multiwave exciting light, or uses manual type pair LED light source is replaced, or is switched over using mechanical switching devices to LED light source.But using manual type to LED It is lower that light source is replaced efficiency, and trivial operations, although using mechanical switching devices to LED light source switch over efficiency compared with Height, but the increase of mechanical switching devices so that multiband LED fluorescence microscope structure is complicated, higher cost.
Summary of the invention
Technical problem to be solved by the invention is to provide a kind of efficiency is higher, structure is simple, and lower-cost more waves The lighting system of section LED fluorescence microscope.
The technical scheme of the invention to solve the technical problem is: a kind of photograph of multiband LED fluorescence microscope Bright system, including key lighting system further include the different N number of auxiliary lighting system of wavelength, and N is the integer more than or equal to 1, described The wavelength of auxiliary lighting system is different from the wavelength of key lighting system, the auxiliary lighting system include the first LED light source, Second LED light source, the first dichronic mirror and the second dichronic mirror, the wavelength of first LED light source 1 and second LED light The wavelength in source is different;Second dichronic mirror is arranged in the optical path of the key lighting system, second dichronic mirror Angle between the optical path of the key lighting system is 45 degree, and the light beam of first LED light source first passes through described It is gone out again by second dichroic mirror after first dichroic mirror, the light beam of second LED light source first passes through It is gone out again by second dichroic mirror after the first dichronic mirror transmission, the light beam of the key lighting system is logical Second dichronic mirror is crossed to transmit away.
The light of the light beam of first LED light source, the light beam of second LED light source and the key lighting system Beam is overlapped after passing through second dichronic mirror.
The key lighting system includes third LED light source, the 4th LED light source and third dichronic mirror, the 3rd LED Light source is different with the wavelength of the 4th LED light source, and the light of the 4th LED light source is arranged in the third dichronic mirror On the road, the angle of the third dichronic mirror and the 4th LED light source is 45 degree, the light beam of the third LED light source It is gone out by the third dichroic mirror, the light beam of the 4th LED light source is transmitted by the third dichronic mirror It goes out.
The light beam of the light beam of the third LED light source and the 4th LED light source passes through second dichronic mirror After be overlapped.
The quantity of the auxiliary lighting system is one, and the wavelength of first LED light source is 400nm-410nm, institute The wavelength for the second LED light source stated is 465nm-488nm, and the wavelength of the third LED light source is 625nm-647nm, described The 4th LED light source wavelength be 515nm-545nm.
The upper and lower surfaces of first dichronic mirror are provided with the first spectro-film, second dichronic mirror Upper and lower surfaces are provided with the second spectro-film, and the upper and lower surfaces of the third dichronic mirror are provided with third Spectro-film.
First spectro-film is formed by least 18 first unit film layers are folded, and the first unit film is by first Upper film layer and the first lower film layer stackup form, and described first descends the material of film layer for Nb2O5, TiO2 or Ta2O5, described The material of film layer is SiO2 on first, the described first lower film layer with a thickness of 92.2nm~151.8nm, film on described first Layer with a thickness of 38.16nm~155.2nm;Second spectro-film is formed by least 18 second unit film layers are folded, institute The second unit film stated is formed by film layer on second and the second lower film layer stackup, the material of the described second lower film layer be Nb2O5, TiO2 or Ta2O5, the material of film layer is SiO2 on described second, the described second lower film layer with a thickness of 103nm~ 172.5nm, film layer with a thickness of 40.56nm~105.4nm on described second;The third spectro-film is by least 18 Third unit film layer is folded to be formed, and the third unit film is formed by film layer in third and third lower film layer stackup, and described the The material of three lower film layers is Nb2O5, TiO2 or Ta2O5, and the material of film layer is SiO2 in the third, under the third Film layer with a thickness of 130.1nm~214.3nm, film layer with a thickness of 20.3nm~209.9nm in the third.
Compared with the prior art, the advantages of the present invention are as follows by the way that the different N number of auxiliary illumination of wavelength is arranged in lighting system System, N are the integer more than or equal to 1, and the wavelength of auxiliary lighting system is different from the wavelength of key lighting system, and auxiliary lighting system includes First LED light source, the second LED light source, the first dichronic mirror and the second dichronic mirror, the wavelength and the second LED light of the first LED light source 1 The wavelength in source is different, and the second dichronic mirror is arranged in the optical path of key lighting system, the optical path of the second dichronic mirror and key lighting system Between angle be 45 degree, the light beam of the first LED light source first passes through after the first dichroic mirror again by the second dichroic mirror It goes out, the light beam of the second LED light source is gone out by the second dichroic mirror again after first passing through the transmission of the first dichronic mirror, key lighting system The light beam of system is transmitted away by the second dichronic mirror, and thus user does not need to be replaced LED light source using manual type, It only needs to be turned on or off each auxiliary lighting system and the switching of LED light source can be realized in key lighting system, efficiency is higher, operation Simply, it meanwhile, does not need mechanical switching devices additionally are arranged yet LED light source is switched over, structure is simple, and cost is relatively low;
When the light beam of the light beam of the first LED light source, the light beam of the second LED light source and key lighting system passes through the second dichronic mirror After when being overlapped, when using the first LED light source and the second LED light source at the same time, the first LED light source beam and second can be improved The polymerism of the light beam of LED light source;
When key lighting system includes third LED light source, the 4th LED light source and third dichronic mirror, third LED light source and the 4th The wavelength of LED light source is different, and third dichronic mirror is arranged in the optical path of the 4th LED light source, third dichronic mirror and the 4th LED light source Angle be 45 degree, the light beam of third LED light source is gone out by third dichroic mirror, and the light beam of the 4th LED light source passes through the When three dichronic mirrors transmit away, by being turned on or off third LED light source and the 4th LED light source, available three kinds of differences The light beam of wave band has further expanded the wave band of lighting system;
When the light beam of the light beam of third LED light source and the 4th LED light source after the second dichronic mirror by being overlapped, make at the same time When with third LED light source and four LED light sources, the polymerization of the light beam of third LED light source beam and the 4th LED light source can be improved Property;
When the quantity of auxiliary lighting system is one, the wavelength of the first LED light source is 400nm-410nm, the second LED light source Wavelength is 465nm-488nm, and the wavelength of third LED light source is 625nm-647nm, and the wavelength of the 4th LED light source is 515nm- When 545nm, it is ensured that the light beam of the first LED light source, the light beam of the second LED light source, third LED light source light beam and Shi Transmissivity or refractive index of the light beam of LED light source at dichronic mirror are larger;
When the upper and lower surfaces of the first dichronic mirror are provided with the first spectro-film, the upper surface of the second dichronic mirror is under Surface is provided with the second spectro-film, when the upper and lower surfaces of third dichronic mirror are provided with third spectro-film, further Increase the light beam of the light beam of the first LED light source, the light beam of the second LED light source, the light beam of third LED light source and Shi LED light source Transmissivity or refractive index at dichronic mirror;
Formed when the first spectro-film is laminated by least 18 unit membranes, unit membrane by upper film layer and lower film layer stackup and Material at, lower film layer is Nb2O5, TiO2 or Ta2O5, and the material of upper film layer is SiO2, lower film layer with a thickness of 92.2nm ~151.8nm, upper film layer with a thickness of 38.16nm~155.2nm, the second spectro-film is folded by least 18 second unit film layers It is formed, second unit film is formed by film layer on second and the second lower film layer stackup, and the material of the second lower film layer is Nb2O5, TiO2 Or Ta2O5, the material of film layer is SiO2 on second, the second lower film layer with a thickness of 103nm~172.5nm, film layer on second With a thickness of 40.56nm~105.4nm;Third spectro-film is formed by least 18 third unit film layers are folded, third unit film It is formed by film layer in third and third lower film layer stackup, the material of film layer is Nb2O5, TiO2 or Ta2O5 under third, in third The material of film layer is SiO2, under third film layer with a thickness of 130.1nm~214.3nm, film layer with a thickness of 20.3nm in third When~209.9nm, reflectivity of the light beam of the first LED light source at the first dichronic mirror can be made to reach 99% or more, the 2nd LED Transmissivity of the light beam of light source at the first dichronic mirror reaches 98% or more, and the light beam of third LED light source is at third dichronic mirror Reflectivity reach 99% or more, anti-transmissivity of the light beam of the 4th LED light source at third dichronic mirror reaches 97% or more, Reflectivity of the light beam of the light beam of one LED light source and the second LED light source at third dichronic mirror reaches 98% or more, the 2nd LED Transmissivity of the light beam of the light beam of light source and the 4th LED light source at third dichronic mirror reaches 99% or more, the light of lighting system It is lost smaller.
Detailed description of the invention
Fig. 1 is the structure chart of the lighting system of multiband LED fluorescence microscope of the invention;
Fig. 2 is the spectrogram of the first dichronic mirror of the lighting system of multiband LED fluorescence microscope of the invention;
Fig. 3 is the spectrogram of the second dichronic mirror of the lighting system of multiband LED fluorescence microscope of the invention;
Fig. 4 is the spectrogram of the third dichronic mirror of the lighting system of multiband LED fluorescence microscope of the invention.
Specific embodiment
The present invention will be described in further detail below with reference to the embodiments of the drawings.
Embodiment one: as shown in Figure 1, a kind of lighting system of multiband LED fluorescence microscope, including key lighting system, It further include the different N number of auxiliary lighting system of wavelength, N is the integer more than or equal to 1, the wavelength and key lighting system of auxiliary lighting system Wavelength it is different, auxiliary lighting system includes the first LED light source 1, the second LED light source 2, the first dichronic mirror 3 and the second dichronic mirror 4, The wavelength of the wavelength of first LED light source 1 and the second LED light source 2 is different;The optical path of key lighting system is arranged in second dichronic mirror 4 On, the angle between the second dichronic mirror 4 and the optical path of key lighting system is 45 degree, and the light beam of the first LED light source 1 first passes through first Dichronic mirror 3 is reflected away by the second dichronic mirror 4 again after reflecting, and the light beam of the second LED light source 2 first passes through the first dichronic mirror 3 thoroughly It is reflected away again by the second dichronic mirror 4 after penetrating, the light beam of key lighting system is transmitted away by the second dichronic mirror 4.
In the present embodiment, the light beam of the light beam of the first LED light source 1, the light beam of the second LED light source 2 and key lighting system is logical It is overlapped after crossing the second dichronic mirror 4.
In the present embodiment, key lighting system includes third LED light source 5, the 4th LED light source 6 and third dichronic mirror 7, third LED light source 5 is different with the wavelength of the 4th LED light source 6, and third dichronic mirror 7 is arranged in the optical path of the 4th LED light source 6, third point The angle of Look mirror 7 and the 4th LED light source 6 is 45 degree, and the light beam of third LED light source 5 is reflected away by third dichronic mirror 7, the The light beam of four LED light sources 6 is transmitted away by third dichronic mirror 7.
In the present embodiment, the light beam of the light beam of third LED light source 5 and the 4th LED light source 6 passes through weight after the second dichronic mirror 4 It closes.
In the present embodiment, the wavelength of the first LED light source 1 is 400nm-410nm, and the wavelength of the second LED light source 2 is 465nm- 488nm, the wavelength of third LED light source 5 are 625nm-647nm, and the wavelength of the 4th LED light source 6 is 515nm-545nm.
In the present embodiment, the upper and lower surfaces of the first dichronic mirror 3 are provided with the first spectro-film, the second dichronic mirror 4 Upper and lower surfaces be provided with the second spectro-film, the upper and lower surfaces of third dichronic mirror 7 are provided with third point Light film.
Embodiment two: as shown in Figure 1, a kind of lighting system of multiband LED fluorescence microscope, including key lighting system, It further include an auxiliary lighting system, the wavelength of auxiliary lighting system is different from the wavelength of key lighting system, and auxiliary lighting system includes the One LED light source 1, the second LED light source 2, the first dichronic mirror 3 and the second dichronic mirror 4, the wavelength and the 2nd LED of the first LED light source 1 The wavelength of light source 2 is different;Second dichronic mirror 4 is arranged in the optical path of key lighting system, the second dichronic mirror 4 and key lighting system Angle between optical path is 45 degree, and the light beam of the first LED light source 1 passes through the second color separation after first passing through the reflection of the first dichronic mirror 3 again Mirror 4 reflects away, and the light beam of the second LED light source 2 is reflected by the second dichronic mirror 4 again after first passing through the transmission of the first dichronic mirror 3 It goes, the light beam of key lighting system is transmitted away by the second dichronic mirror 4.
In the present embodiment, the light beam of the light beam of the first LED light source 1, the light beam of the second LED light source 2 and key lighting system is logical It is overlapped after crossing the second dichronic mirror 4.
In the present embodiment, key lighting system includes third LED light source 5, the 4th LED light source 6 and third dichronic mirror 7, third LED light source 5 is different with the wavelength of the 4th LED light source 6, and third dichronic mirror 7 is arranged in the optical path of the 4th LED light source 6, third point The angle of Look mirror 7 and the 4th LED light source 6 is 45 degree, and the light beam of third LED light source 5 is reflected away by third dichronic mirror 7, the The light beam of four LED light sources 6 is transmitted away by third dichronic mirror 7.
In the present embodiment, the light beam of the light beam of third LED light source 5 and the 4th LED light source 6 passes through weight after the second dichronic mirror 4 It closes.
In the present embodiment, the wavelength of the first LED light source 1 is 400nm-410nm, and the wavelength of the second LED light source 2 is 465nm- 488nm, the wavelength of third LED light source 5 are 625nm-647nm, and the wavelength of the 4th LED light source 6 is 515nm-545nm.
In the present embodiment, the upper and lower surfaces of the first dichronic mirror 3 are provided with the first spectro-film, the second dichronic mirror 4 Upper and lower surfaces be provided with the second spectro-film, the upper and lower surfaces of third dichronic mirror 7 are provided with third point Light film.
In the present embodiment, the first spectro-film is laminated by 25 unit membranes and is formed, and unit membrane is by upper film layer and lower film layer Be laminated, the material of lower film layer is Nb2O5, TiO2 or Ta2O5, and the material of upper film layer is SiO2, lower film layer with a thickness of 92.2nm, upper film layer with a thickness of 38.16nm, the second spectro-film is formed by 25 second unit film layers are folded, second unit Film is formed by film layer on second and the second lower film layer stackup, and the material of the second lower film layer is Nb2O5, TiO2 or Ta2O5, and second The material of upper film layer is SiO2, the second lower film layer with a thickness of 103nm, film layer with a thickness of 40.56nm on second;Third light splitting Film is formed by 25 third unit film layers are folded, and third unit film is formed by film layer in third and third lower film layer stackup, the The material of three lower film layers is Nb2O5, TiO2 or Ta2O5, and the material of film layer is SiO2 in third, under third film layer with a thickness of 130.1nm, film layer with a thickness of 20.3nm in third.
Embodiment three: as shown in Figure 1, a kind of lighting system of multiband LED fluorescence microscope, including key lighting system, It further include an auxiliary lighting system, the wavelength of auxiliary lighting system is different from the wavelength of key lighting system, and auxiliary lighting system includes the One LED light source 1, the second LED light source 2, the first dichronic mirror 3 and the second dichronic mirror 4, the wavelength and the 2nd LED of the first LED light source 1 The wavelength of light source 2 is different;Second dichronic mirror 4 is arranged in the optical path of key lighting system, the second dichronic mirror 4 and key lighting system Angle between optical path is 45 degree, and the light beam of the first LED light source 1 passes through the second color separation after first passing through the reflection of the first dichronic mirror 3 again Mirror 4 reflects away, and the light beam of the second LED light source 2 is reflected by the second dichronic mirror 4 again after first passing through the transmission of the first dichronic mirror 3 It goes, the light beam of key lighting system is transmitted away by the second dichronic mirror 4.
In the present embodiment, the light beam of the light beam of the first LED light source 1, the light beam of the second LED light source 2 and key lighting system is logical It is overlapped after crossing the second dichronic mirror 4.
In the present embodiment, key lighting system includes third LED light source 5, the 4th LED light source 6 and third dichronic mirror 7, third LED light source 5 is different with the wavelength of the 4th LED light source 6, and third dichronic mirror 7 is arranged in the optical path of the 4th LED light source 6, third point The angle of Look mirror 7 and the 4th LED light source 6 is 45 degree, and the light beam of third LED light source 5 is reflected away by third dichronic mirror 7, the The light beam of four LED light sources 6 is transmitted away by third dichronic mirror 7.
In the present embodiment, the light beam of the light beam of third LED light source 5 and the 4th LED light source 6 passes through weight after the second dichronic mirror 4 It closes.
In the present embodiment, the wavelength of the first LED light source 1 is 400nm-410nm, and the wavelength of the second LED light source 2 is 465nm- 488nm, the wavelength of third LED light source 5 are 625nm-647nm, and the wavelength of the 4th LED light source 6 is 515nm-545nm.
In the present embodiment, the upper and lower surfaces of the first dichronic mirror 3 are provided with the first spectro-film, the second dichronic mirror 4 Upper and lower surfaces be provided with the second spectro-film, the upper and lower surfaces of third dichronic mirror 7 are provided with third point Light film.
In the present embodiment, the first spectro-film is laminated by 25 unit membranes and is formed, and unit membrane is by upper film layer and lower film layer Be laminated, the material of lower film layer is Nb2O5, TiO2 or Ta2O5, and the material of upper film layer is SiO2, lower film layer with a thickness of 151.8nm, upper film layer with a thickness of 155.2nm, the second spectro-film is formed by 25 second unit film layers are folded, second unit Film is formed by film layer on second and the second lower film layer stackup, and the material of the second lower film layer is Nb2O5, TiO2 or Ta2O5, and second The material of upper film layer is SiO2, the second lower film layer with a thickness of 172.5nm, film layer with a thickness of 105.4nm on second;Third point Light film is formed by 25 third unit film layers are folded, and third unit film is formed by film layer in third and third lower film layer stackup, The material of film layer is Nb2O5, TiO2 or Ta2O5 under third, and the material of film layer is SiO2 in third, the thickness of film layer under third For 214.3nm, film layer with a thickness of 209.9nm in third.
In the present embodiment, simultaneously by the first LED light source 1, the second LED light source 2, third LED light source 5 and the 4th LED light source 6 It opens, the light beam of the first LED light source 1, the light beam of the second LED light source 2, the light beam of third LED light source 5 and the 4th LED light source 6 Light beam forms multiband mixing light source after passing through the second dichronic mirror 4.The illumination system of the multiband LED fluorescence microscope of the present embodiment The spectrogram of first dichronic mirror of system is as shown in Figure 2;The second of the lighting system of the multiband LED fluorescence microscope of the present embodiment The spectrogram of dichronic mirror is as shown in Figure 3;The third dichronic mirror of the lighting system of the multiband LED fluorescence microscope of the present embodiment Spectrogram is as shown in Figure 4.
Analysis chart 2 is it is found that reflectivity of the light beam at the first dichronic mirror 3 of the first LED light source 1 is about 99.7%, and Transmissivity of the light beam of two LED light sources 2 at the first dichronic mirror 3 is about 98.6%.The reflectivity of first dichronic mirror 3 is 99% More than, transmissivity ensures that light beam is reflected or transmitted to greatest extent, light loss greatly reduces 98.5% or more.Point Fig. 3 is analysed it is found that reflectivity of the mixed light beam of the first LED light source 1 and the second LED light source 2 at the second dichronic mirror 4 is about 99.9%, transmissivity of the mixed light beam of third LED light source 5 and the 4th LED light source 6 at the second dichronic mirror 4 be about 98.9%.For the reflectivity of second dichronic mirror 4 99% or more, transmissivity ensures that light beam is anti-to greatest extent 98.5% or more It penetrates or transmits, light loss greatly reduces.Analysis chart 4 it is found that the light beam of third LED light source 5 at third dichronic mirror 7 Reflectivity is about 98.9%, and be transmissivity of the light beam of LED light source 6 at third dichronic mirror 7 is about 99.9%.Third For the reflectivity of dichronic mirror 7 98.5% or more, transmissivity ensures that light beam is reflected or transmitted to greatest extent 99% or more, Light loss greatly reduces.
The lighting system of multiband LED fluorescence microscope of the invention can by be turned on or off be arranged inside it is each A LED light source realizes the switching of LED light source, and easy to operate, efficiency is higher, and structure is simple, and cost is relatively low;Also, by setting The first spectro-film, the second spectro-film and the third spectro-film set substantially increase the transmissivity and reflectivity of dichronic mirror, greatly Reduce light loss.

Claims (1)

1. a kind of lighting system of multiband LED fluorescence microscope, including key lighting system, it is characterised in that further include one auxiliary Lighting system, the wavelength of the auxiliary lighting system is different from the wavelength of key lighting system, the auxiliary lighting system Including the first LED light source, the second LED light source, the first dichronic mirror and the second dichronic mirror, the wavelength of first LED light source and The wavelength of second LED light source is different;Second dichronic mirror is arranged in the optical path of the key lighting system, institute Angle between the optical path of the second dichronic mirror and the key lighting system stated is 45 degree, the light of first LED light source Beam is gone out by second dichroic mirror again after first passing through first dichroic mirror, second LED light The light beam in source is gone out by second dichroic mirror again after first passing through the first dichronic mirror transmission, the main photograph The light beam of bright system is transmitted away by second dichronic mirror;
The light beam of the light beam of first LED light source, the light beam of second LED light source and the key lighting system is logical It is overlapped after crossing second dichronic mirror;
The key lighting system includes third LED light source, the 4th LED light source and third dichronic mirror, the third LED light source Different with the wavelength of the 4th LED light source, the optical path of the 4th LED light source is arranged in the third dichronic mirror On, the angle of the third dichronic mirror and the 4th LED light source is 45 degree, and the light beam of the third LED light source is logical It crosses the third dichroic mirror to go out, the light beam of the 4th LED light source is transmitted by the third dichronic mirror It goes;
The light beam of the light beam of the third LED light source and the 4th LED light source passes through weight after second dichronic mirror It closes;
The wavelength of first LED light source is 400nm-410nm, and the wavelength of second LED light source is 465nm- 488nm, the wavelength of the third LED light source are 625nm-647nm, and the wavelength of the 4th LED light source is 515nm- 545nm;
The upper and lower surfaces of first dichronic mirror are provided with the first spectro-film, the upper table of second dichronic mirror Face and lower surface are provided with the second spectro-film, and the upper and lower surfaces of the third dichronic mirror are provided with third light splitting Film;
First spectro-film is formed by least 18 first unit film layers are folded, and the first unit film is by film on first Layer and the first lower film layer stackup form, and described first descends the material of film layer for Nb2O5, TiO2 or Ta2O5, and described first The material of upper film layer is SiO2, the described first lower film layer with a thickness of 92.2nm~151.8nm, film layer on described first With a thickness of 38.16nm~155.2nm;Second spectro-film is formed by least 18 second unit film layers are folded, described Second unit film is formed by film layer on second and the second lower film layer stackup, and the material of the described second lower film layer is Nb2O5, TiO2 Or Ta2O5, the material of film layer is SiO2 on described second, the described second lower film layer with a thickness of 103nm~ 172.5nm, film layer with a thickness of 40.56nm~105.4nm on described second;The third spectro-film is by least 18 Third unit film layer is folded to be formed, and the third unit film is formed by film layer in third and third lower film layer stackup, and described the The material of three lower film layers is Nb2O5, TiO2 or Ta2O5, and the material of film layer is SiO2 in the third, under the third Film layer with a thickness of 130.1nm~214.3nm, film layer with a thickness of 20.3nm~209.9nm in the third.
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CN205899120U (en) * 2016-07-21 2017-01-18 宁波永新光学股份有限公司 Multiband LED fluorescence microscope's lighting system

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