CN106225730A - Portable combined zeroing high-precision laser big working distance autocollimation and method - Google Patents

Abstract

The invention belongs to the field of precision measurement technology and optical engineering, and specifically relates to a portable combined zeroing high-precision laser large working distance self-collimation device and method; the device is composed of a light source, a collimating mirror, a reflecting mirror, and a feedback imaging system; The method adjusts the reflector so that the reflected light beam returns to the center of the image plane of the feedback imaging system, and then uses the angle deflection measurement device on the reflector to obtain the angle change of the surface of the measured object; The reflector is added, so it can avoid the problem that the reflected light of the measured object deviates from the measurement system and cause the problem that it cannot be measured, and then has the advantage of increasing the self-collimation working range under the same working distance, or increasing the working distance under the same working range; in addition , the specific design of the collimating mirror, the feedback imaging system, the mirror, etc., make the present invention small and portable, with high measurement accuracy; meanwhile, it can also monitor the stability of the measurement environment; and the technical advantages of rapid measurement.

Description

Portable combined zeroing high precision laser large working distance autocollimation device and method

technical field

The invention belongs to the field of precision measurement technology and the field of optical engineering, and in particular relates to a portable combined zeroing high-precision laser large working distance self-collimation device and method.

Background technique

In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields.

In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hundreds of meters; resolution from 0.1 arcsecond to 0.001 arcsecond.

In the field of optical engineering and cutting-edge scientific experiments, the combination of laser autocollimator and two-dimensional circular gratings that are perpendicular to each other can measure the spatial angle; the position reference composed of two laser autocollimators can be used for two Measurement of the angle or parallelism between two optical axes. The angular working range is tens of arc seconds to tens of arc minutes.

In the field of cutting-edge scientific experimental devices and high-end precision equipment manufacturing, laser autocollimators can be used to measure the angular rotation accuracy of cutting-edge scientific experimental devices and high-end precision equipment rotary motion benchmarks, measure the space linear accuracy of linear motion benchmarks and pairwise motion benchmarks parallelism and perpendicularity.

Laser self-collimation technology has the advantages of non-contact, high measurement accuracy, and convenient use, and has been widely used in the above fields.

A traditional autocollimator is shown in Figure 1. The system includes a light source 1, a transmissive collimator 21, and a feedback imaging system 6; the light beam emitted by the light source 1 is collimated into a parallel beam by the transmissive collimator 21. Incident to the reflective surface of the measured object 5 ; the light beam reflected from the reflected surface of the measured object 5 is collected and imaged by the feedback imaging system 6 . Under this structure, only the light beam reflected from the surface of the measured object 5 returns to the original path, and can be collected and imaged by the feedback imaging system 6, thereby realizing effective measurement. The conditional limitation of returning to the original path makes the system have the following two disadvantages:

First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, which will lead to failure to achieve self-collimation Straight and micro angle measurement;

Second, the distance from the mirror surface of the measured object 5 to measure the entrance pupil of the laser autocollimator should not be too far away, otherwise as long as the reflected optical axis deviates from the optical axis of the autocollimator by a small angle, the reflected beam will deviate from the optical system of the laser autocollimator The entrance pupil, which leads to the inability to achieve self-collimation and micro-angle measurement.

The above two problems limit the use of traditional autocollimation instruments to small angles and small working distances.

Contents of the invention

Aiming at the two problems existing in the traditional autocollimator, the present invention discloses a portable combined zeroing high-precision laser large working distance autocollimation device and method. Compared with the traditional autocollimator, it has the same working distance The technical advantage of significantly increasing the autocollimation working range, or significantly increasing the working distance under the same autocollimation working range.

The purpose of the present invention is achieved like this:

Portable combined zero-adjustment high-precision laser large working distance self-collimation device, including a light source, a reflective collimator, a reflector, and a feedback imaging system. The reflector is equipped with an angle adjustment measurement device; the beam emitted by the light source passes After the reflective collimator is collimated into a parallel beam, it is reflected by the mirror and incident on the surface of the measured object; the beam reflected from the surface of the measured object is reflected by the mirror and then collected and imaged by the feedback imaging system;

The feedback imaging system is in the following two forms:

First, the feedback imaging system includes an image sensor imaging system and a four-quadrant detector imaging system;

The image sensor imaging system includes a first feedback beam splitter and an image sensor arranged at the focal point of the reflective collimator; the light beam reflected from the surface of the measured object is reflected by the reflective mirror and projected successively through the reflective collimator , The first feedback spectroscopic mirror is reflected, and the image is collected by the image sensor; under the condition that the surface of the measured object is perpendicular to the optical axis, the point image formed by the image sensor is at the center of the image plane;

or

The image sensor imaging system includes a first feedback beam splitter, a first feedback objective lens and an image sensor arranged at the focal point of the first feedback objective lens; the light beam reflected from the surface of the measured object passes through the first The reflection of the feedback beam splitter, the transmission of the first feedback objective lens, and imaging are collected by the image sensor; under the condition that the surface of the measured object is perpendicular to the optical axis, the point image formed by the image sensor is at the center of the image plane;

The four-quadrant detector imaging system includes a second feedback beam splitter and a four-quadrant detector arranged at the focus of the reflective collimator; the light beam reflected from the surface of the measured object is reflected by the reflective mirror, and then successively passes through the reflective collimator. Projected by the collimating mirror, reflected by the first feedback beam splitter, and imaged by the four-quadrant detector; under the condition that the surface of the measured object is perpendicular to the optical axis, the point image formed by the four-quadrant detector is at the center of the image plane;

or

The four-quadrant detector imaging system includes a second feedback beam splitter, a second feedback objective lens and a four-quadrant detector arranged at the focal point of the second feedback objective lens; the light beam reflected from the surface of the measured object is reflected by a mirror, After being reflected by the second feedback beam splitter and transmitted by the second feedback objective lens, the imaging is collected by the four-quadrant detector; under the condition that the surface of the measured object is perpendicular to the optical axis, the point image formed by the four-quadrant detector is at the center of the image plane;

Second, the feedback imaging system includes a first feedback beam splitter, an image sensor and a four-quadrant detector carried by a guide rail, and the guide rail has two stop positions in total, and one stop position makes the center of the image surface of the image sensor correspond to a reflective collimator The focus position of the other stop position makes the center of the image plane of the four-quadrant detector correspond to the focus position of the reflective collimator;

or

The feedback imaging system includes a first feedback beamsplitter, a first feedback objective lens, an image sensor and a four-quadrant detector carried by a guide rail, and the guide rail has two stop positions, and one stop position makes the center of the image surface of the image sensor be located in the first feedback The focus position of the objective lens, and another stop position makes the center of the image plane of the four-quadrant detector be located at the focus position of the first feedback objective lens;

The angle adjustment measurement device includes an angle adjustment device arranged on the mirror, an angle deflection measurement device, and a universal shaft, the angle adjustment device includes a first driver and a second driver; the angle deflection measurement device includes a first metal sheet, a second Two metal sheets, a first capacitive sensor corresponding to the position of the first metal sheet, and a second capacitive sensor corresponding to the position of the second metal sheet; the first driver, the first metal sheet, and the cardan shaft are on a straight line, and the second driver , the second metal sheet, and the cardan shaft are on a straight line, and the connection line between the first driver and the cardan shaft is perpendicular to the connection line between the second driver and the cardan shaft; the angle deflection measurement device also includes a common optical path autocollimator .

The portable combined zero-adjustment high-precision laser large-working-distance self-collimation method realized on the above-mentioned portable combined zero-adjustment high-precision laser large-working-distance self-collimation device includes the following steps:

Step a, turn on the light source, image the image sensor, and adjust the angle of the reflector by using the first driver and the second driver according to the direction that the point image deviates from the center of the image plane, so that the point image returns to the central area of the image sensor image plane;

Step b, four-quadrant detector imaging, after the end of step a, the point image deviates from the center position Δx and Δy of the image surface of the four-quadrant detector, and the first driver and the second driver are used to adjust the angle of the mirror, so that the point image returns to the four-quadrant detection The center position of the image surface of the device;

Step c, read the capacitance change ΔC1 of the first capacitive sensor, and the capacitance change ΔC2 of the second capacitive sensor, and then convert them into the angle changes Δθ1 and At the same time, the angle change Δθ2 and Then get the angular changes Δα and Δβ on the surface of the measured object; where, Δθ1=f1(ΔC1, ΔC2), and f1, f2, f3, and f4 represent four functions.

The above-mentioned portable combined zeroing high-precision laser large working distance self-collimation device also includes a wavefront detection system and a wavefront compensation system;

The wavefront detection system includes a wavefront detection beamsplitter, and at least one of an air disturbance wavefront detector and a mirror deformation wavefront detector; the wavefront detection beamsplitter is arranged between the mirror and the measured object , the air disturbance wavefront detector is set on the reflection light path of the wavefront detection spectroscope, and the mirror deformation wavefront detector is set on the secondary reflection light path of the reflection mirror;

The wavefront compensation system includes a compensating light source, a compensating collimating mirror, and a transmissive liquid crystal spatial light modulator; the beam emitted by the compensating light source is collimated into a parallel beam by the compensating collimating mirror, and then modulated by the transmissive liquid crystal spatial light modulated and incident on the wavefront detection beamsplitter.

The portable combined zero-adjustment high-precision laser large-working-distance self-collimation method implemented on the above-mentioned portable combined zero-adjustment high-precision laser large-working-distance self-collimation method requires that the wavefront detection system only include wavefront detection beamsplitters and air disturbances wavefront detector;

Include the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b. Turn on the light source, place the reference objects selected in step a at the working position A and the near working position B respectively, and obtain two sets of data of GA and GB respectively by the air disturbance wavefront detector;

Step c, G1=GA-GB, obtain the wavefront change caused by air disturbance;

Step d, adjusting the parameters of the transmissive liquid crystal spatial light modulator according to f5 (G1), lighting up the compensation light source, and compensating for air disturbance;

Step e, image sensor imaging, according to the direction that the point image deviates from the center of the image plane, use the first driver and the second driver to adjust the angle of the mirror, so that the point image returns to the center area of the image sensor image plane;

Step f, four-quadrant detector imaging, after step a is completed, the point image deviates from the center position Δx and Δy of the image surface of the four-quadrant detector, and the first driver and the second driver are used to adjust the angle of the mirror, so that the point image returns to the four-quadrant detection The center position of the image surface of the device;

Step g, read the capacitance change ΔC1 of the first capacitive sensor, and the capacitance change ΔC2 of the second capacitive sensor, and then convert them into the angle changes Δθ1 and At the same time, the angle change Δθ2 and Then get the angular changes Δα and Δβ on the surface of the measured object; where, Δθ1=f1(ΔC1, ΔC2), and f1, f2, f3, and f4 represent four functions.

The portable combined zero-adjustment high-precision laser large-working-distance self-collimation method implemented on the above-mentioned portable combined zero-adjustment high-precision laser large-working-distance self-collimation method requires that the wavefront detection system only include wavefront detection beamsplitters and reflectors. Mirror shaped wavefront detectors;

Include the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b. Turn on the light source, place the reference objects selected in step a at the working position A and the near working position B respectively, and obtain two sets of data of GC and GD respectively by the mirror deformable wavefront detector;

Step c, G2=GC-GD, obtain the wavefront change caused by air disturbance and mirror deformation;

Step d. Adjust the parameters of the transmissive liquid crystal spatial light modulator according to f5 (G2), turn on the compensation light source, and compensate for air disturbance and mirror deformation;

Step e, image sensor imaging, according to the direction that the point image deviates from the center of the image plane, use the first driver and the second driver to adjust the angle of the mirror, so that the point image returns to the center area of the image sensor image plane;

Step f, four-quadrant detector imaging, after step a is completed, the point image deviates from the center position Δx and Δy of the image surface of the four-quadrant detector, and the first driver and the second driver are used to adjust the angle of the mirror, so that the point image returns to the four-quadrant detection The center position of the image surface of the device;

Step g, read the capacitance change ΔC1 of the first capacitive sensor, and the capacitance change ΔC2 of the second capacitive sensor, and then convert them into the angle changes Δθ1 and At the same time, the angle change Δθ2 and Then get the angular changes Δα and Δβ on the surface of the measured object; where, Δθ1=f1(ΔC1, ΔC2), and f1, f2, f3, and f4 represent four functions.

The portable combined zero-adjustment high-precision laser large-working-distance self-collimation method realized on the above-mentioned portable combined zero-adjustment high-precision laser large-working-distance self-collimation method requires the wavefront detection system to include wavefront detection spectroscopes, air Disturbed wavefront detectors and mirror deformed wavefront detectors;

Include the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b. Turn on the light source, and place the reference objects selected in step a at the working position A and the near working position B respectively. The air disturbance wavefront detector obtains two sets of data of GA and GB respectively. Get GC and GD two sets of data;

Step c, G1=GA-GB, get the wavefront change caused by air disturbance; G2=GC-GD, get the wavefront change caused by air disturbance and mirror deformation; G=G2-G1, get the wavefront change caused by mirror deformation wavefront variation;

step d.

Adjust the parameters of the transmissive liquid crystal spatial light modulator according to f5 (G1), light up the compensation light source, and compensate for air disturbance;

or

Adjust the parameters of the transmissive liquid crystal spatial light modulator according to f5 (G2), turn on the compensation light source, and compensate for air disturbance and mirror deformation;

or

Adjust the parameters of the transmissive liquid crystal spatial light modulator according to f5(G), turn on the compensation light source, and compensate the deformation of the mirror;

Step e, image sensor imaging, according to the direction that the point image deviates from the center of the image plane, use the first driver and the second driver to adjust the angle of the mirror, so that the point image returns to the center area of the image sensor image plane;

Step f, four-quadrant detector imaging, after step a is completed, the point image deviates from the center position Δx and Δy of the image surface of the four-quadrant detector, and the first driver and the second driver are used to adjust the angle of the mirror, so that the point image returns to the four-quadrant detection The center position of the image surface of the device;

Step g, read the capacitance change ΔC1 of the first capacitive sensor, and the capacitance change ΔC2 of the second capacitive sensor, and then convert them into the angle changes Δθ1 and At the same time, the angle change Δθ2 and Then get the angular changes Δα and Δβ on the surface of the measured object; where, Δθ1=f1(ΔC1, ΔC2), and f1, f2, f3, and f4 represent four functions.

Beneficial effect:

Compared with the traditional autocollimator, the present invention adds a reflector and an angle adjustment measuring device arranged on the reflector. This structural arrangement can have a larger deflection angle or In the case of a large lateral displacement, adjust the attitude of the mirror by adjusting the angle of the measuring device to ensure that the reflected light returns to the original path and is received by the feedback imaging system, thereby effectively avoiding the problem that the reflected light of the measured object deviates from the measurement system and cannot be measured. Furthermore, the present invention has the technical advantage of significantly increasing the working range of self-collimation under the same working distance, or significantly increasing the working distance under the same working distance of self-collimation.

In addition, the present invention also has the following technical advantages:

First, choose a reflective collimator, although it increases the difficulty of production and increases the production cost, but this structure has the following three irreplaceable technical advantages: First, the reflective collimator is conducive to the miniaturization of instruments, making portable instruments ;Secondly, the reflective collimator has no chromatic aberration, and the wider the frequency band of the light source, the more obvious the advantage of its measurement accuracy; the third is that through the coating technology, the heat absorption of the reflective collimator can be much smaller than that of the transmissive collimator, effectively avoiding collimation The problem of thermal deformation of the mirror occurs, which not only enables the entire system to match high-power light sources, but also helps to ensure the measurement accuracy of the system;

Second, the image sensor and the four-quadrant detector are selected as the imaging device in the feedback imaging system, which combines the advantages of large area of the image sensor and high position resolution of the four-quadrant detector; among them, the image sensor can ensure that the reflection of the measured object In the case of a large deviation angle between the light and the incident light, the reflected light can still enter the entrance pupil of the optical system and will not exceed the receiving range; Adjusting to the position of the four-quadrant detector can obtain higher angle measurement accuracy according to the high position resolution advantage of the four-quadrant detector; therefore, combining the image sensor and the four-quadrant detector not only makes the present invention self-align The straight working range or working distance is greatly extended, and it is beneficial to improve the accuracy of angle measurement;

Third, select the capacitive sensor and the common optical path autocollimator together as the angle deflection measurement device, so that the present invention can not only utilize the ultra-high displacement sensitivity characteristics of the capacitive sensor and the excellent characteristics that the linear displacement is easily converted into an angular displacement in a small angle range, The present invention can have very high measurement accuracy under the condition of low sampling frequency (20Hz and below), and the highest measurement resolution of the angle can be improved from 0.005 arc seconds of the traditional autocollimator to 0.0005 arc seconds, which is an order of magnitude improvement; and can Utilizing the excellent characteristics that the measurement accuracy of the common optical path autocollimator is less affected by the change of the air environment, the present invention can ensure the effective measurement in the measurement environment where the air environment is unstable; the combination of the two can also monitor the measurement environment The role of stability;

Fourth, the present invention also adopts the following technology: the first driver, the first metal sheet, and the cardan shaft are on a straight line, the second driver, the second metal sheet, and the cardan shaft are on a straight line, and the first The connection line between the driver and the cardan shaft is perpendicular to the connection line between the second driver and the cardan shaft; this two-dimensional setting of the two lines perpendicular to each other makes the data in different connection directions not interfere with each other, and no decoupling calculation is required. It can facilitate calibration, simplify the calculation process and improve the measurement speed.

Description of drawings

Fig. 1 is a schematic structural diagram of a traditional self-collimation angle measurement system.

Fig. 2 is a structural schematic diagram of Embodiment 1 of a portable combined zeroing high-precision laser large working distance self-collimation device of the present invention.

Fig. 3 is a schematic structural view of the angle adjustment device in the angle adjustment measurement device.

Fig. 4 is a schematic diagram of the first structure of the angle deflection measurement device in the angle adjustment measurement device.

Fig. 5 is a schematic diagram of the second structure of the angle deflection measurement device in the angle adjustment measurement device.

FIG. 6 is a second structural schematic diagram of an image sensor imaging system.

Fig. 7 is a second structural schematic diagram of a four-quadrant detector imaging system.

Fig. 8 is a schematic diagram of the first structure of the second embodiment of the portable combined zeroing high-precision laser large working distance self-collimation device of the present invention.

Fig. 9 is a schematic diagram of the second structure of the second embodiment of the portable combined zeroing high-precision laser large working distance self-collimation device of the present invention.

Fig. 10 is a schematic structural view of Embodiment 3 of a portable combined zeroing high-precision laser large working distance self-collimation device of the present invention.

Fig. 11 is a schematic structural diagram of Embodiment 4 of the portable combined zeroing high-precision laser large working distance self-collimation device of the present invention.

Fig. 12 is a schematic structural view of Embodiment 5 of a portable combined zeroing high-precision laser large working distance self-collimation device of the present invention.

In the figure: 1 light source, 22 reflective collimating mirror, 3 reflecting mirror, 4 angle adjustment measuring device, 411 first driver, 412 second driver, 421 first metal sheet, 422 second metal sheet, 423 first capacitive sensor , 424 second capacitive sensor, 429 traditional autocollimation system, 43 gimbal axis, 5 measured object, 6 feedback imaging system, 61 first feedback beam splitter, 62 second feedback beam splitter, 63 first feedback objective lens, 64 Second feedback objective lens, 65 image sensor, 66 four-quadrant detector, 68 guide rail, 7 wavefront detection system, 71 wavefront detection spectroscope, 72 air disturbance wavefront detector, 73 mirror deformation wavefront detector, 8 wave Front compensation system, 81 compensation light source, 82 compensation collimation mirror, 83 transmissive liquid crystal spatial light modulator.

specific embodiment

The specific embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.

Specific embodiment one

This embodiment is an embodiment of a portable combined zero-setting high-precision laser large working distance self-collimation device.

The structure schematic diagram of the portable combined zeroing high-precision laser large working distance self-collimation device of this embodiment is shown in FIG. 2 . The self-collimation device includes a light source 1, a reflective collimator 22, a reflector 3, and a feedback imaging system 6. The reflector 3 is provided with an angle adjustment measuring device 4; the light beam emitted by the light source 1 passes through a reflective collimator After the straight mirror 22 is collimated into a parallel light beam, it is reflected by the mirror 3 and incident on the surface of the measured object 5; the light beam reflected from the surface of the measured object 5 is then reflected by the mirror 3 and collected by the feedback imaging system 6 imaging;

The feedback imaging system 6 includes an image sensor imaging system and a four-quadrant detector imaging system;

The image sensor imaging system includes a first feedback beam splitter 61 and an image sensor 65 arranged at the focal point of the transmissive collimator 21; the light beam reflected from the surface of the measured object 5 is reflected by the reflector 3, and then successively passes through the Type collimating mirror 21 projection, first feedback spectroscopic mirror 61 reflection, is collected imaging by image sensor 65; Under the condition that the surface of measured object 5 is perpendicular to the optical axis, the point image formed by image sensor 65 is at the center of the image plane;

The four-quadrant detector imaging system includes a second feedback beam splitter 62, a second feedback objective lens 64 and a four-quadrant detector 66 arranged at the focal point of the second feedback objective lens 64; the light beam reflected from the surface of the measured object 5 passes through After reflection by the reflector 3, it is reflected by the second feedback beam splitter 62, transmitted by the second feedback objective lens 64, and collected by the four-quadrant detector 66; under the condition that the surface of the measured object 5 is perpendicular to the optical axis, the four-quadrant detector The 66 point images are at the center of the image plane;

Described angle adjustment measurement device 4 comprises the angle adjustment device that is arranged on the reflection mirror 3, angle deflection measurement device, and cardan shaft 43, and angle adjustment device comprises first driver 411 and second driver 412; Angle deflection measurement device comprises the first A metal sheet 421, a second metal sheet 422, a first capacitance sensor 423 corresponding to the position of the first metal sheet 421, and a second capacitance sensor 424 corresponding to the position of the second metal sheet 422; the first driver 411, the first metal sheet 421 , and the cardan shaft 43 are on a straight line, the second driver 412, the second metal sheet 422, and the cardan shaft 43 are on a straight line, and the line connecting the first driver 411 and the cardan shaft 43 is perpendicular to the second driver 412 With the connection of cardan shaft 43, as shown in Figure 3; Angle deflection measuring device also comprises common optical path autocollimator 429, and described common optical path autocollimator 429 can be installed on any side of reflecting mirror 3, as shown 4 and Figure 5.

It should be noted:

First, in this embodiment, the image sensor imaging system can also choose the following structure: comprising the first feedback beam splitter 61, the first feedback objective lens 63 and the image sensor 65 arranged at the focal point of the first feedback objective lens 63; The light beam reflected on the surface of the object 5 is reflected by the reflector 3, reflected by the first feedback beam splitter 61, transmitted by the first feedback objective lens 63, and imaged by the image sensor 65; Under conditions, the point image formed by the image sensor 65 is at the center of the image plane; as shown in FIG. 6 , in this figure, the four-quadrant detector imaging system is omitted.

Second, in this embodiment, the four-quadrant detector imaging system can also choose the following structure: including the second feedback beam splitter 62 and the four-quadrant detector 66 arranged at the focal point of the transmissive collimator 21; 5, the light beam reflected by the surface is reflected by the reflector 3, projected by the transmissive collimator 21, reflected by the first feedback beam splitter 61, and collected and imaged by the four-quadrant detector 66; Under the vertical condition, the point image formed by the four-quadrant detector 66 is at the center of the image plane; as shown in FIG. 7 , in this figure, the image sensor imaging system is omitted.

Specific embodiment two

This embodiment is an embodiment of a portable combined zero-setting high-precision laser large working distance self-collimation device.

The portable combined zero-setting high-precision laser large working distance self-collimation device of this embodiment is different from the specific embodiment 1 in the structure of the feedback imaging system 6; the structure of the feedback imaging system 6 of the present embodiment is the following two forms: A sort of:

First, the feedback imaging system 6 includes a first feedback beam splitter 61, and an image sensor 65 and a four-quadrant detector 66 carried by a guide rail 68, as shown in Figure 8; the guide rail 68 has two rest positions, one rest position Make image sensor 65 image plane centers correspond to the focal position of reflective collimator mirror 22, another pause position makes four-quadrant detector 66 image plane centers correspond to the focal position of reflective collimator mirror 22;

Second, the feedback imaging system 6 includes a first feedback beam splitter 61, a first feedback objective lens 63, and an image sensor 65 and a four-quadrant detector 66 carried by a guide rail 68, as shown in Figure 9; the guide rail 68 has two Stop position, one stop position makes the center of the image plane of the image sensor 65 be located at the focus position of the first feedback objective lens 63 , and the other stop position makes the center of the image plane of the four-quadrant detector 66 be located at the focus position of the first feedback objective lens 63 .

Specific embodiment three

This embodiment is an embodiment of a portable combined zero-setting high-precision laser large working distance self-collimation device.

The structure schematic diagram of the portable combined zeroing high-precision laser large working distance self-collimation device of this embodiment is shown in FIG. 10 . On the basis of the specific embodiment 1, the portable combined zeroing high-precision laser large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

The wavefront detection system 7 includes a wavefront detection spectroscope 71 and an air disturbance wavefront detector 72; the wavefront detection spectroscope 71 is arranged between the reflector 3 and the measured object 5, and the air disturbance wavefront detector 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary reflected optical path of the reflector 3;

The wavefront compensation system 8 includes a compensating light source 81, a compensating collimating mirror 82, and a transmissive liquid crystal spatial light modulator 83; the beam emitted by the compensating light source 81 is collimated into a parallel beam by the compensating collimating mirror 82, and then The transmissive liquid crystal spatial light modulator 83 modulates and incident on the wavefront detection beam splitter 71 .

Specific embodiment four

This embodiment is an embodiment of a portable combined zero-setting high-precision laser large working distance self-collimation device.

The structure schematic diagram of the portable combined zeroing high-precision laser large working distance self-collimation device of this embodiment is shown in FIG. 11 . On the basis of the specific embodiment 1, the portable combined zeroing high-precision laser large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

The wavefront detection system 7 includes a wavefront detection beamsplitter 71 and a mirror deformation wavefront detector 73; the wavefront detection beamsplitter 71 is arranged between the mirror 3 and the measured object 5, and the air disturbance wavefront detection The device 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary reflected optical path of the reflector 3;

The wavefront compensation system 8 includes a compensating light source 81, a compensating collimating mirror 82, and a transmissive liquid crystal spatial light modulator 83; the beam emitted by the compensating light source 81 is collimated into a parallel beam by the compensating collimating mirror 82, and then The transmissive liquid crystal spatial light modulator 83 modulates and incident on the wavefront detection beam splitter 71 .

Specific embodiment five

This embodiment is an embodiment of a portable combined zero-setting high-precision laser large working distance self-collimation device.

The structure schematic diagram of the portable combined zeroing high-precision laser large working distance self-collimation device of this embodiment is shown in FIG. 12 . On the basis of the specific embodiment 1, the portable combined zeroing high-precision laser large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

The wavefront detection system 7 includes a wavefront detection beamsplitter 71, an air disturbance wavefront detector 72 and a mirror deformation wavefront detector 73; the wavefront detection beamsplitter 71 is arranged between the mirror 3 and the measured object 5 Between, the air disturbance wavefront detector 72 is arranged on the reflection light path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary reflection light path of the mirror 3;

The wavefront compensation system 8 includes a compensating light source 81, a compensating collimating mirror 82, and a transmissive liquid crystal spatial light modulator 83; the beam emitted by the compensating light source 81 is collimated into a parallel beam by the compensating collimating mirror 82, and then The transmissive liquid crystal spatial light modulator 83 modulates and incident on the wavefront detection beam splitter 71 .

For the above embodiment of the autocollimation device, there are three points to be explained:

First, the first driver 411 and the second driver 412 in the angle adjustment device can choose a stepper motor or a servo motor driver with a faster driving speed, or a piezoelectric ceramic driver with higher driving precision, or A stepper motor or a servo motor driver can be mixed with a piezoelectric ceramic driver; those skilled in the art can make a reasonable choice according to actual needs.

Second, although the third embodiment, the fourth embodiment, and the fifth embodiment all set the wavefront detection system 7 and the wavefront compensation system 8 on the basis of the first embodiment, but in the second embodiment Based on the setup of the wavefront detection system 7 and the wavefront compensation system 8, it is also established. Those skilled in the art can combine the differences between the system described in the first embodiment and the system described in the second embodiment, and easily set the wavefront detection system 7 and the wavefront compensation system on the basis of the second embodiment 8 system is built, so it will not be described in detail here.

Third, in all the above embodiments of the self-collimation device, the angle deflection measurement device only includes a combination of two pairs of metal sheets and a capacitive sensor. This design is made by default that the reflector 3 does not translate during work. If it is considered that reflector 3 produces translation during work and affects measurement accuracy, the combination of the third pair of metal sheets and capacitive sensors can be placed at the cardan shaft 43 positions to offset the same translation produced by the three capacitive sensors to ensure measurement precision.

Specific embodiment six

This embodiment is an embodiment of a portable combined zeroing high precision laser large working distance self-collimation method implemented on the portable combined zeroing high precision laser large working distance self-collimation device described in the first specific embodiment.

The portable combined zeroing high-precision laser large working distance self-collimation method of this embodiment includes the following steps:

Step a, light the light source 1, the image sensor 65 forms an image, and use the first driver 411 and the second driver 412 to adjust the angle of the mirror 3 according to the point image deviation from the center of the image plane, so that the point image returns to the central area of the image sensor 65 image plane ;

Step b, four-quadrant detector 66 imaging, after step a is completed, the point image deviates from the center position Δx and Δy of the image plane of the four-quadrant detector 66, and the first driver 411 and the second driver 412 are used to adjust the angle of the mirror 3 to make the point image Get back to the central position of the four-quadrant detector 66 image planes;

Step c, read the capacitance change ΔC1 of the first capacitive sensor 423 and the capacitance change ΔC2 of the second capacitive sensor 424, and then convert them into the angle changes Δθ1 and At the same time, the angle change Δθ2 and Then obtain the angular changes Δα and Δβ on the surface of the measured object 5; wherein, Δθ1=f1(ΔC1, ΔC2), and f1, f2, f3, and f4 represent four functions.

It should be noted that if this embodiment is the method implemented on the device described in Embodiment 2, then after the point image returns to the central area of the image plane of the image sensor 65, the guide rail 68 is adjusted from one stop position to another stop position , make the center of the image plane of the four-quadrant detector 66 correspond to the focus position of the transmissive collimator 21, and then make the four-quadrant detector 66 perform imaging.

The main innovation point of the present invention is to increase the reflector 3 and the angle adjustment measuring device 4 arranged on the reflector 3. This structure can have a larger deflection angle or a relatively large angle between the incident light and the reflected light of the measured object 5. In the case of large lateral displacement, the attitude of the reflector is adjusted by the angle adjustment measurement device, so that the reflected light returns to the original path and is received by the feedback imaging system 6, effectively avoiding the problem that the reflected light of the measured object deviates from the measurement system and cannot be measured.

However, with the introduction of the reflector 3, the surface error will be transmitted to the final result, reducing the measurement accuracy of the system; at the same time, the increase of the working distance makes the air disturbance between the reflector 3 and the measured object 5 not negligible, and also It will reduce the measurement accuracy of the system. It can be seen that in order to achieve high-precision measurement, it is necessary to consider the influence of the surface shape error of the mirror 3 and the air disturbance between the mirror 3 and the measured object 5 on the measurement results. For this reason, a specific embodiment 7 is designed. Example eight, and specific embodiment nine.

Specific embodiment seven

This embodiment is an embodiment of a portable combined zeroing high precision laser large working distance self-collimation method implemented on the portable combined zeroing high precision laser large working distance self-collimation device described in the third embodiment.

The portable combined zeroing high-precision laser large working distance self-collimation method of this embodiment includes the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b. Turn on the light source 1, place the reference objects selected in step a at the working position A and the near working position B respectively, and the air disturbance wavefront detector 72 obtains two sets of data of GA and GB respectively;

Step c, G1=GA-GB, obtain the wavefront change caused by air disturbance;

Step d, adjusting the parameters of the transmissive liquid crystal spatial light modulator 83 according to f5 (G1), lighting the compensation light source 81, and compensating for air disturbance;

Step e, image sensor 65 imaging, according to the point image deviates from the direction of the center of the image plane, use the first driver 411 and the second driver 412 to adjust the angle of the mirror 3, so that the point image returns to the central area of the image sensor 65 image plane;

Step f, four-quadrant detector 66 imaging, after obtaining step a, the point image deviates from the center position Δx and Δy of the image plane of the four-quadrant detector 66, and utilizes the first driver 411 and the second driver 412 to adjust the angle of the mirror 3 to make the point image Get back to the central position of the four-quadrant detector 66 image planes;

Step g, read the capacitance change ΔC1 of the first capacitive sensor 423 and the capacitance change ΔC2 of the second capacitive sensor 424, and convert them into the angle changes Δθ1 and At the same time, the angle change Δθ2 and Then obtain the angular changes Δα and Δβ on the surface of the measured object 5; wherein, Δθ1=f1(ΔC1, ΔC2), and f1, f2, f3, and f4 represent four functions.

The method of this embodiment is implemented on the device of the specific embodiment 3, the air disturbance can be separated by the air disturbance wavefront detector 72, and then the air disturbance can be compensated by the wavefront compensation system 8, finally realizing the effect of no air disturbance High precision measurement.

Embodiment 8

This embodiment is an embodiment of a portable combined zeroing high precision laser large working distance self-collimation method implemented on the portable combined zeroing high precision laser large working distance self-collimation device described in Embodiment 4.

The portable combined zeroing high-precision laser large working distance self-collimation method of this embodiment includes the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b. Turn on the light source 1, place the reference objects selected in step a at the working position A and the near working position B respectively, and the mirror deformable wavefront detector 73 obtains two sets of data of GC and GD respectively;

Step c, G2=GC-GD, obtain the wavefront change caused by air disturbance and mirror deformation;

Step d, adjust the parameters of the transmissive liquid crystal spatial light modulator 83 according to f5 (G2), turn on the compensation light source 81, and compensate for air disturbance and mirror deformation;

Step e, image sensor 65 imaging, according to the point image deviates from the direction of the center of the image plane, use the first driver 411 and the second driver 412 to adjust the angle of the mirror 3, so that the point image returns to the central area of the image surface of the image sensor 65;

Step f, four-quadrant detector 66 imaging, after obtaining step a, the point image deviates from the center position Δx and Δy of the image plane of the four-quadrant detector 66, and utilizes the first driver 411 and the second driver 412 to adjust the angle of the mirror 3 to make the point image Get back to the central position of the four-quadrant detector 66 image planes;

Step g, read the capacitance change ΔC1 of the first capacitive sensor 423 and the capacitance change ΔC2 of the second capacitive sensor 424, and convert them into the angle changes Δθ1 and At the same time, the angle change Δθ2 and Then obtain the angular changes Δα and Δβ on the surface of the measured object 5; wherein, Δθ1=f1(ΔC1, ΔC2), and f1, f2, f3, and f4 represent four functions.

The method of this embodiment is implemented on the device of Embodiment 4, and the air disturbance and mirror deformation can be separated as a whole by using the mirror deformation wavefront detector 73, and then the air disturbance and mirror deformation can be completely separated by using the wavefront compensation system 8. Carry out overall compensation, and finally realize high-precision measurement without the influence of air disturbance and mirror deformation.

Specific embodiment nine

This embodiment is an embodiment of a portable combined zeroing high precision laser large working distance self-collimation method implemented on the portable combined zeroing high precision laser large working distance self-collimation device described in the fifth embodiment.

The portable combined zeroing high-precision laser large working distance self-collimation method of this embodiment includes the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b: Turn on the light source 1, place the reference objects selected in step a at the working position A and the near working position B respectively, the air disturbance wavefront detector 72 obtains two sets of data of GA and GB respectively, and the mirror deformation wavefront detection Device 73 respectively obtains GC and GD two groups of data;

Step c, G1=GA-GB, get the wavefront change caused by air disturbance; G2=GC-GD, get the wavefront change caused by air disturbance and mirror deformation; G=G2-G1, get the wavefront change caused by mirror deformation wavefront variation;

step d.

Adjust the parameters of the transmissive liquid crystal spatial light modulator 83 according to f5 (G1), turn on the compensation light source 81, and compensate for the air disturbance;

or

Adjust the parameters of the transmissive liquid crystal spatial light modulator 83 according to f5 (G2), turn on the compensation light source 81, and compensate for air disturbance and mirror deformation;

or

Adjust the parameters of the transmissive liquid crystal spatial light modulator 83 according to f5(G), turn on the compensation light source 81, and compensate the deformation of the mirror;

Step e, image sensor 65 imaging, according to the point image deviates from the direction of the center of the image plane, use the first driver 411 and the second driver 412 to adjust the angle of the mirror 3, so that the point image returns to the central area of the image sensor 65 image plane;

Step f, four-quadrant detector 66 imaging, after obtaining step a, the point image deviates from the center position Δx and Δy of the image plane of the four-quadrant detector 66, and utilizes the first driver 411 and the second driver 412 to adjust the angle of the mirror 3 to make the point image Get back to the central position of the four-quadrant detector 66 image planes;

Step g, read the capacitance change ΔC1 of the first capacitive sensor 423 and the capacitance change ΔC2 of the second capacitive sensor 424, and convert them into the angle changes Δθ1 and At the same time, the angle change Δθ2 and Then obtain the angular changes Δα and Δβ on the surface of the measured object 5; wherein, Δθ1=f1(ΔC1, ΔC2), and f1, f2, f3, and f4 represent four functions.

The method of this embodiment is implemented on the device of the fifth embodiment, the air disturbance and the mirror deformation can be separated separately by using the air disturbance wavefront detector 72 and the mirror deformation wavefront detector 73, and then the air disturbance can be selectively Individual compensation for disturbance, independent compensation for mirror deformation, or overall compensation for air disturbance and mirror deformation, and finally achieve high-precision measurement without air disturbance, or without mirror deformation, or without air disturbance and mirror deformation .

Another advantage of this embodiment is that after the air turbulence and mirror deformation are separated separately, the influence of each part on the result can be independently evaluated, not only can it be found out who is affecting the measurement in the air turbulence and mirror deformation The main contradiction of precision, and can independently evaluate the deformation of the mirror, and effectively evaluate the processing quality of the mirror at the same time.

It should also be noted that if the specific embodiment 3, the specific embodiment 4, and the specific embodiment 5 are devices built based on the specific embodiment 2, then in the specific embodiment 7, the specific embodiment 8, and the specific embodiment 9 Among them, after the point image returns to the central area of the image sensor 65 image plane, the guide rail 68 is adjusted from one stop position to another stop position, so that the center of the image plane of the four-quadrant detector 66 corresponds to the focus position of the transmissive collimator 21, and then Four-quadrant detector 66 is used for imaging.

Claims (6)

1. portable combined zeroing high-precision laser big working distance autocollimation, it is characterised in that include light source (1), reflection Formula collimating mirror (22), reflecting mirror (3) and feedback imaging system (6), described reflecting mirror (3) is provided with angle adjustment and measures Device (4)；The light beam of light source (1) outgoing, after reflective collimating mirror (22) is collimated into collimated light beam, then by reflecting mirror (3) Reflection, incides the surface of measured object (5)；From the light beam of measured object (5) surface reflection, then after reflecting mirror (3) reflects, by Feedback imaging system (6) gathers imaging；

Described feedback imaging system (6) is in following two form:

The first, feedback imaging system (6) includes imageing sensor imaging system and 4 quadrant detector imaging system；

Described imageing sensor imaging system includes the first feedback spectroscope (61) and is arranged on reflective collimating mirror (22) focus The imageing sensor (65) at place；From the light beam of measured object (5) surface reflection, then after reflecting mirror (3) reflects, successively through anti- Penetrate formula collimating mirror (22) projection, the first feedback spectroscope (61) reflection, gathered imaging by imageing sensor (65)；At measured object (5), under conditions of surface is vertical with optical axis, imageing sensor (65) is become a little as in image plane center position；

Or

Described imageing sensor imaging system includes the first feedback spectroscope (61), the first feedback object lens (63) and is arranged on first The imageing sensor (65) of feedback object lens (63) focal point；From the light beam of measured object (5) surface reflection, then through reflecting mirror (3) After reflection, successively through first feedback spectroscope (61) reflection, first feedback object lens (63) transmission, adopted by imageing sensor (65) Collection imaging；Under conditions of measured object (5) surface is vertical with optical axis, imageing sensor (65) is become a little as in image plane center position Put；

Described 4 quadrant detector imaging system includes the second feedback spectroscope (62) and is arranged on reflective collimating mirror (22) Jiao 4 quadrant detector (66) at Dian；From the light beam of measured object (5) surface reflection, then after reflecting mirror (3) reflects, warp after elder generation Cross reflective collimating mirror (22) projection, the first feedback spectroscope (61) reflection, gathered imaging by 4 quadrant detector (66)；At quilt Under conditions of survey thing (5) surface is vertical with optical axis, 4 quadrant detector (66) is become a little as in image plane center position；

Or

Described 4 quadrant detector imaging system includes the second feedback spectroscope (62), the second feedback object lens (64) and is arranged on the The 4 quadrant detector (66) of two feedback object lens (64) focal point；From the light beam of measured object (5) surface reflection, then through reflecting mirror (3) reflection after, successively through second feedback spectroscope (62) reflection, second feedback object lens (64) transmission, by 4 quadrant detector (66) imaging is gathered；Under conditions of measured object (5) surface is vertical with optical axis, 4 quadrant detector (66) is become a little as in image planes Center；

The second, feedback imaging system (6) includes the first feedback spectroscope (61) and the imageing sensor carried by guide rail (68) (65) and 4 quadrant detector (66), described guide rail (68) has two stall position, and a stall position makes imageing sensor (65) focal position of the corresponding reflective collimating mirror of image plane center (22), another stall position make 4 quadrant detector (66) as The focal position of the corresponding reflective collimating mirror (22) in center, face；

Or

Feedback imaging system (6) includes the first feedback spectroscope (61), the first feedback object lens (63) and is carried by guide rail (68) Imageing sensor (65) and 4 quadrant detector (66), described guide rail (68) has two stall position, a stall position Making imageing sensor (65) image plane center be positioned at the focal position of the first feedback object lens (63), another stall position makes four-quadrant Detector (66) image plane center is positioned at the focal position of the first feedback object lens (63)；

Described angle adjustment measurement apparatus (4) includes that dress is measured in the angular adjustment apparatus being arranged on reflecting mirror (3), angular deflection Putting and universal drive shaft (43), angular adjustment apparatus includes the first driver (411) and the second driver (412)；Angular deflection is surveyed Amount device includes that the first sheet metal (421), the second sheet metal (422), the first electric capacity of corresponding first sheet metal (421) position pass Second capacitance sensor (424) of sensor (423) and corresponding second sheet metal (422) position；First driver (411), One sheet metal (421) and universal drive shaft (43) point-blank, the second driver (412), the second sheet metal (422) and Universal drive shaft (43) point-blank, and the first driver (411) second driver vertical with the line of universal drive shaft (43) (412) with the line of universal drive shaft (43)；Angular deflection measurement apparatus also includes common light path autocollimator (429).

Portable combined the most according to claim 1 zeroing high-precision laser big working distance autocollimation, its feature exists In, also include Wavefront detecting system (7) and wavefront compensation system (8)；

Described Wavefront detecting system (7) includes Wavefront detecting spectroscope (71) and air agitation wave front detector (72) and anti- Penetrate at least one in mirror deformation wave front detector (73)；Described Wavefront detecting spectroscope (71) is arranged on reflecting mirror (3) and quilt Surveying between thing (5), air agitation wave front detector (72) is arranged on the reflected light path of Wavefront detecting spectroscope (71), reflecting mirror Deformation wave front detector (73) is arranged in the secondary reflection light path of reflecting mirror (3)；

Described wavefront compensation system (8) includes compensatory light (81), compensates collimating mirror (82) and transmission liquid crystal spatial light tune Device processed (83)；The light beam of compensatory light (81) outgoing, after overcompensation collimating mirror (82) is collimated into collimated light beam, then by transmission-type LCD space light modulator (83) is modulated, and incides on Wavefront detecting spectroscope (71).

3. realize on portable portable combined zeroing high-precision laser big working distance autocollimation described in claim 1 Portable portable combined zeroing high-precision laser big working distance auto-collimation method, it is characterised in that comprise the following steps:

Step a, some bright light source (1), imageing sensor (65) imaging, according to a picture deviation image plane center direction, utilize first to drive Dynamic device (411) and the second driver (412) adjust reflecting mirror (3) angle, make a picture return to imageing sensor (65) image plane center Region；

Step b, 4 quadrant detector (66) imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector (66) image planes Heart position Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return To 4 quadrant detector (66) image plane center position；

Step c, read the capacitance change, Δ C1 of the first capacitance sensor (423), and the electric capacity of the second capacitance sensor (424) becomes Change Δ C2, be reconverted into angle changes delta θ 1 He of reflecting mirror (3)Obtained instead by common light path autocollimator (429) simultaneously Penetrate angle changes delta θ 2 He of mirror (3)And then obtain angle changes delta α and the Δ β on measured object (5) surface；Wherein, Δ θ 1= F1 (Δ C1, Δ C2),With F1, f2, f3, f4 represent 4 functions.

4. realize on portable portable combined zeroing high-precision laser big working distance autocollimation described in claim 2 Portable portable combined zeroing high-precision laser big working distance auto-collimation method, it is desirable to Wavefront detecting system (7) only includes ripple Front detection spectroscope (71) and air agitation wave front detector (72)；

It is characterized in that, comprise the following steps:

Step a, choose surface and be perpendicular to the reference substance of optical axis direction；

Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB；

Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；

Step d, according to f5 (G1) adjust transmission liquid crystal spatial light modulator (83) parameter, light compensatory light (81), compensate Air agitation；

Step e, imageing sensor (65) imaging, according to as a deviation image plane center direction, utilize the first driver (411) and the Two drivers (412) adjust reflecting mirror (3) angle, make a picture return to imageing sensor (65) image plane center region；

Step f, 4 quadrant detector (66) imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector (66) image planes Heart position Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return To 4 quadrant detector (66) image plane center position；

Step g, read the capacitance change, Δ C1 of the first capacitance sensor (423), and the electric capacity of the second capacitance sensor (424) becomes Change Δ C2, be reconverted into angle changes delta θ 1 He of reflecting mirror (3)Reflected by common light path autocollimator (429) simultaneously Angle changes delta θ 2 He of mirror (3)And then obtain angle changes delta α and the Δ β on measured object (5) surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),With F1, f2, f3, f4 represent 4 functions.

5. realize on portable portable combined zeroing high-precision laser big working distance autocollimation described in claim 2 Portable portable combined zeroing high-precision laser big working distance auto-collimation method, it is desirable to Wavefront detecting system (7) only includes ripple Front detection spectroscope (71) and reflecting mirror deformation wave front detector (73)；

It is characterized in that, comprise the following steps:

Step a, choose surface and be perpendicular to the reference substance of optical axis direction；

Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a, Reflecting mirror deformation wave front detector (73) respectively obtains two groups of data of GC and GD；

Step c, G2=GC-GD, obtain air agitation and wavefront variation that reflecting mirror deformation causes jointly；

Step d, according to f5 (G2) adjust transmission liquid crystal spatial light modulator (83) parameter, light compensatory light (81), compensate Air agitation and reflecting mirror deformation；

Step e, imageing sensor (65) imaging, according to as a deviation image plane center direction, utilize the first driver (411) and the Two drivers (412) adjust reflecting mirror (3) angle, make a picture return to imageing sensor (65) image plane center region；

Step f, 4 quadrant detector (66) imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector (66) image planes Heart position Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return To 4 quadrant detector (66) image plane center position；

Step g, read the capacitance change, Δ C1 of the first capacitance sensor (423), and the electric capacity of the second capacitance sensor (424) Changes delta C2, is reconverted into angle changes delta θ 1 He of reflecting mirror (3)Obtained by common light path autocollimator (429) simultaneously Angle changes delta θ 2 He of reflecting mirror (3)And then obtain angle changes delta α and the Δ β on measured object (5) surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),With F1, f2, f3, f4 represent 4 functions.

6. realize on portable portable combined zeroing high-precision laser big working distance autocollimation described in claim 2 Portable portable combined zeroing high-precision laser big working distance auto-collimation method, it is desirable to Wavefront detecting system (7) includes simultaneously Wavefront detecting spectroscope (71), air agitation wave front detector (72) and reflecting mirror deformation wave front detector (73)；

It is characterized in that, comprise the following steps:

Step a, choose surface and be perpendicular to the reference substance of optical axis direction；

Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector (73) respectively obtains Two groups of data of GC and GD；

Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；G2=GC-GD, obtains air agitation and reflecting mirror The wavefront variation that deformation causes jointly；G=G2-G1, obtains the wavefront variation that reflecting mirror deformation causes；

Step d,

Adjusting transmission liquid crystal spatial light modulator (83) parameter according to f5 (G1), light compensatory light (81), make-up air is disturbed Dynamic；

Or

Adjusting transmission liquid crystal spatial light modulator (83) parameter according to f5 (G2), light compensatory light (81), make-up air is disturbed Move and reflecting mirror deformation；

Or

Adjust transmission liquid crystal spatial light modulator (83) parameter according to f5 (G), light compensatory light (81), compensatory reflex mirror shape Become；

Step e, imageing sensor (65) imaging, according to as a deviation image plane center direction, utilize the first driver (411) and the Two drivers (412) adjust reflecting mirror (3) angle, make a picture return to imageing sensor (65) image plane center region；

Step f, 4 quadrant detector (66) imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector (66) image planes Heart position Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return To 4 quadrant detector (66) image plane center position；

Step g, read the capacitance change, Δ C1 of the first capacitance sensor (423), and the electric capacity of the second capacitance sensor (424) becomes Change Δ C2, be reconverted into angle changes delta θ 1 He of reflecting mirror (3)Obtained instead by common light path autocollimator (429) simultaneously Penetrate angle changes delta θ 2 He of mirror (3)And then obtain angle changes delta α and the Δ β on measured object (5) surface；Wherein, Δ θ 1= F1 (Δ C1, Δ C2),With F1, f2, f3, f4 represent 4 functions.