CN106391623A - Automated system for cleaning a flat panel member - Google Patents

Abstract

The invention discloses an automatic system for cleaning a flat plate member, which comprises a base, a groove body, a clamping box structure and a transfer mechanism, wherein the groove body is arranged on the base, at least a first chamber and a second chamber are partitioned in the cassette structure, the cassette structure is arranged in the first chamber or the second chamber, the transferring mechanism comprises a first rail and a first driving device, the first rail is arranged on the base, the first driving device comprises a first base and a first driving member, the first base is slidably disposed on the first rail, and moves between a first slot position corresponding to the first slot chamber and a second slot position corresponding to the second slot chamber, the first driving member is telescopically mounted on the first base and is held on the cassette structure so as to drive the cassette structure to leave or enter the first slot chamber or the second slot chamber.

Description

Automated system for cleaning a flat member

technical field

The present invention relates to an automated system, in particular to an automated system for cleaning a flat member.

Background technique

Recently, glass substrates are widely used in different products, especially display panels. Therefore, various manufacturers have introduced different automation processes and equipment to increase production capacity, so as to cope with the increasing demand. How to provide a An automatic system to improve the production efficiency of glass substrates has become one of the subjects of the industry.

Contents of the invention

Therefore, in order to solve the above problems, the present invention provides an automatic system for cleaning a plate member, which simplifies the overall operation procedure and makes more effective use of the overall operation space on the production line, thereby improving production efficiency.

In order to achieve the above object, the present invention discloses an automatic system for cleaning a plate member, which includes a base, a tank body, a cassette structure and a transfer mechanism, the tank body is arranged on the base, At least one first tank chamber and one second tank chamber are separated therein, and the cassette structure is selectively arranged in the first tank chamber or the second tank chamber to carry the flat member, so The transfer mechanism includes a first track and a first driving device, the first track is arranged on the base, the first track has a first axial direction, and the first driving device includes a first a base and a first driving member, the first base is slidably arranged on the first track, and the first base can be moved along a first direction parallel to the first axial direction by a corresponding A first slot of the first tank chamber moves to a second slot corresponding to the second tank chamber or moves from the second slot to a second direction opposite to the first direction. The first slot, the first base has a second axial direction, the first driving member is telescopically installed on the first base and fixed on the cassette structure, when the When the first driving member protrudes from the first base along an extending direction parallel to the second axis, the first driving member drives the cartridge structure to leave the first chamber or the In the second chamber, when the first driving member retracts to the first base along a retracting direction opposite to the extending direction, the first driving member drives the cassette structure into the The first tank chamber or the second tank chamber.

According to one embodiment of the present invention, the transfer mechanism further includes a second track and a second driving device, the second track is arranged on the base and parallel to the first track, and the first track The second driving device includes a second base and a second driving member, the second base is slidably arranged on the second track, and the second base can move synchronously with the first base While moving from the first slot to the second slot along the first direction or from the second slot to the first slot along the second direction, the second drive A part is telescopically installed on the second base and fixed on the cassette structure, and the second driving part can move together with the first driving part to protrude from the a second base to drive the cassette structure away from the first chamber or the second chamber, or to retract in the second base along the retracting direction to drive the cassette structure A structure enters either the first chamber or the second chamber.

According to one embodiment of the present invention, the first driving device and the second driving device are respectively a pneumatic cylinder mechanism, the first base and the second base are respectively a pneumatic cylinder seat, and The first driving member and the second driving member are respectively a pneumatic ejector rod.

According to one embodiment of the present invention, the first driving device is a pneumatic cylinder mechanism, the first base is a pneumatic cylinder seat, and the first driving member is a pneumatic jack.

According to one embodiment of the present invention, the first axis is perpendicular to the second axis.

According to one embodiment of the present invention, the tank body includes a bottom wall, a first side wall, a second side wall, a first partition wall, a second partition wall and a first channel side wall, so The bottom wall is arranged on the base, the first side wall is connected to a first side of the bottom wall, a water inlet hole is formed on the first side wall, and the second side wall is connected to the bottom a second side of the wall opposite to the first side, the first partition wall is arranged between the first side wall and the second side wall, and the first partition wall and the first side wall The first compartment is defined between the walls, the first partition has an upper end of the first partition and a lower end of the first partition, the lower end of the first partition is connected to the bottom wall, and the first partition A first wall height is defined between the upper end of the partition wall and the bottom wall, the second partition wall is arranged between the first partition wall and the second side wall, and the second partition wall has a second gap The upper end of the partition wall and the lower end of a second partition wall, the lower end of the second partition wall is connected to the bottom wall, a second wall height is defined between the upper end of the second partition wall and the bottom wall, and the first flow channel side The wall is arranged between the first partition wall and the second partition wall, a first flow channel is defined between the first flow channel side wall and the first partition wall, and the first flow channel side wall and the The second groove chamber is defined between the second partition walls, the side wall of the first flow channel has an upper end of the side wall of the first flow channel and a lower end of the side wall of the first flow channel, and the upper end of the side wall of the first flow channel is connected to the first side wall of the first flow channel A first flow channel inlet is defined between the upper ends of the partition walls, and there is a first gap between the lower end of the side wall of the first flow channel and the bottom wall, so that the first flow channel communicates with the second tank chamber, and a cleaning liquid Inject the first tank chamber through the water inlet hole, the height of the first wall is higher than the second wall height, and the cleaning liquid injected into the first tank chamber through the water inlet hole passes through the first chamber The upper end of the partition wall enters the inlet of the first flow channel, and enters the second tank chamber through the first gap.

According to one embodiment of the present invention, the tank body further includes a first splitter plate, which is arranged between the lower end of the side wall of the first flow channel and the lower end of the first partition wall, and the first splitter plate forms There are a plurality of first distribution holes, and the cleaning liquid injected from the water inlet hole enters the first gap through the plurality of first distribution holes.

According to one embodiment of the present invention, the first splitter plate is obliquely connected to the first partition wall and the side wall of the first flow channel.

According to one embodiment of the present invention, a first plate height is defined between the upper end of the side wall of the first flow channel and the bottom wall, and the first plate height is greater than the second wall height.

According to one embodiment of the present invention, the first board height is smaller than the first wall height.

According to one embodiment of the present invention, the upper end of the first partition wall and the upper end of the second partition wall are respectively formed with a corrugated structure.

According to one of the embodiments of the present invention, the tank body is further divided into a third tank chamber and a fourth tank chamber, and the cassette structure is selectively arranged in the first tank chamber and the second tank chamber. chamber, the third chamber or the fourth chamber, the first base is located in the first chamber corresponding to the first chamber and in the second chamber corresponding to the second chamber. The slot, a third slot corresponding to the third slot, and a fourth slot corresponding to the fourth slot move, and the second base is positioned on the corresponding first slot. The first position, the second position corresponding to the second slot, a third position corresponding to the third slot, and a fourth position corresponding to the fourth slot are connected to the first base The seat moves together, and the groove body also includes a third partition wall, a second flow channel side wall and a third flow channel side wall, and the third partition wall is arranged between the second partition wall and the Between the second side walls, the third partition wall has an upper end of a third partition wall and a lower end of a third partition wall, the lower end of the third partition wall is connected to the bottom wall, and the upper end of the third partition wall is connected to the bottom wall. A third wall height is defined between the bottom walls, the second flow channel side wall is arranged between the third partition wall and the second partition wall, and the second flow channel side wall and the second partition wall A second flow channel is defined between the second flow channel side wall and the third partition wall to define the third chamber, the second flow channel side wall has an upper end of the second flow channel side wall and The lower end of the side wall of a second flow channel, the upper end of the side wall of the second flow channel and the upper end of the second partition wall define a second flow channel inlet, the lower end of the side wall of the second flow channel and the bottom wall There is a second gap, so that the second flow channel communicates with the third chamber, the side wall of the third flow channel is arranged between the third partition wall and the second side wall, the A third flow channel is defined between the side wall of the third flow channel and the third partition wall, the fourth groove chamber is defined between the side wall of the third flow channel and the second side wall, and the third flow channel The side wall of the channel has an upper end of the side wall of the third channel and a lower end of the side wall of the third channel, and a third channel inlet is defined between the upper end of the side wall of the third channel and the upper end of the third partition wall. There is a third gap between the lower end of the side wall of the third channel and the bottom wall, so that the third channel communicates with the fourth chamber, wherein the height of the second wall is greater than the height of the third wall , the cleaning liquid entering the second chamber through the first gap enters the second channel inlet through the upper end of the second partition wall, and enters the third chamber through the second gap , and the cleaning liquid entering the third tank chamber through the second gap enters the third channel inlet through the upper end of the third partition wall, and enters the fourth tank through the third gap room.

According to one embodiment of the present invention, the tank body further includes a first diverter plate, a second diverter plate and a third diverter plate, and the first diverter plate is arranged between the lower end of the side wall of the first flow channel and the third diverter plate. Between the lower ends of the first partition wall, a plurality of first distribution holes are formed on the first distribution plate, and the cleaning liquid injected from the water inlet hole enters the first distribution hole through the plurality of first distribution holes. A gap, the second splitter plate is arranged between the lower end of the side wall of the second channel and the lower end of the second partition wall, and a plurality of second splitter holes are formed on the second splitter plate, which enter the The cleaning liquid in the second tank chamber enters the second gap through the plurality of second distribution holes, and the third distribution plate is arranged between the lower end of the side wall of the third channel and the third gap. Between the lower ends of the partition walls, a plurality of third distribution holes are formed on the third distribution plate, and the cleaning liquid entering the third chamber enters the third gap through the plurality of third distribution holes.

According to one embodiment of the present invention, the first splitter plate is obliquely connected to the first partition wall and the side wall of the first flow channel, and the second splitter plate is mitered to be connected to the second partition wall and the side wall of the first flow channel. The side wall of the second flow channel, and the third splitter plate is obliquely connected to the third partition wall and the side wall of the third flow channel.

According to one embodiment of the present invention, a first plate height is defined between the upper end of the side wall of the first flow channel and the bottom wall, and a second plate height is defined between the upper end of the side wall of the second flow channel and the bottom wall. height, a third plate height is defined between the upper end of the third channel side wall and the bottom wall, the first plate height is greater than the second wall height, and the second plate height is greater than the third wall high.

According to one embodiment of the present invention, the first board height is smaller than the first wall height, the second board height is smaller than the second wall height, and the third board height is smaller than the third wall height .

According to one embodiment of the present invention, the second side wall is formed with a water outlet hole communicating with the fourth chamber, and the cleaning liquid flowing into the fourth chamber flows out through the water outlet hole.

According to one embodiment of the present invention, the upper end of the first partition wall, the upper end of the second partition wall and the upper end of the third partition wall are respectively formed with a corrugated structure.

To sum up, the automation system of the present invention utilizes the transfer mechanism to move the plate member between the slots corresponding to the chambers, and the automation system of the present invention also utilizes the first drive member and the second drive member of the transfer mechanism to drive the The above-mentioned cassette structure enters or leaves the corresponding tank chamber, so the automation system of the present invention not only simplifies the overall operation procedure of dipping or cleaning the flat plate member, but also makes the overall operation space of the production line more effectively utilized. The aforementioned and other technical contents, features and effects of the present invention will be clearly presented in the following detailed description of the embodiments with reference to the accompanying drawings.

Description of drawings

FIG. 1 and FIG. 2 are schematic diagrams of the appearance of the automation system in different viewing angles according to the embodiment of the present invention.

Fig. 3 is a top view of the automation system of the embodiment of the present invention.

Fig. 4 is a schematic diagram of the appearance of the tank body of the embodiment of the present invention.

Fig. 5 is a top view of the tank body of the embodiment of the present invention.

FIG. 6 is a schematic cross-sectional view of the tank body along line A-A in FIG. 5 according to an embodiment of the present invention.

FIG. 7 is a side view of the automation system shown in FIG. 1 .

Fig. 8 is a schematic diagram of the automation system in a retracted state according to an embodiment of the present invention.

Wherein, the reference signs are explained as follows:

1 Automation system

10 base

11 tank

110 bottom wall

1101 First side

1102 Second side

111 First side wall

1111 water inlet

112 Second side wall

1121 outlet hole

113 First partition wall

1131 Upper end of the first partition wall

1132 The lower end of the first partition wall

114 Second partition wall

1141 The upper end of the second partition wall

1142 The lower end of the second partition wall

115 First runner side wall

1151 The upper end of the side wall of the first runner

1152 The lower end of the side wall of the first runner

116 third partition wall

1161 The upper end of the third partition wall

1162 The lower end of the third partition wall

117 Second runner side wall

1171 The upper end of the side wall of the second runner

1172 The lower end of the side wall of the second runner

118 Third runner side wall

1181 The upper end of the side wall of the third runner

1182 The lower end of the side wall of the third runner

119 First manifold

1190 First diverter hole

120 Second manifold

1200 Second diverter hole

121 Third manifold

1210 Third diverter hole

122 wave structure

12 cassette structure

13 transfer mechanism

130 First track

131 First drive unit

1310 First Pedestal

1311 first driver

132 Second track

133 Second drive unit

1330 Second Pedestal

1331 Second driver

2 plate members

C1 first chamber

C2 second chamber

C3 third chamber

C4 fourth chamber

D1 first direction

D2 second direction

D3 Extension direction

D4 retraction direction

E1 first runner inlet

E2 Second runner inlet

E3 third runner inlet

F cleaning fluid

G1 first gap

G2 second gap

G3 third gap

H1 first wall height

H2 second wall height

H3 third wall height

L1 first board height

L2 second plate height

L3 third plate height

P1 first runner

P2 second runner

P3 third runner

S1 first axis

S2 second axis

detailed description

The directional terms mentioned in the following embodiments, such as: up, down, left, right, front or back, etc., are only directions referring to the attached drawings. Accordingly, the directional terms are used to illustrate and not to limit the invention. Please refer to FIG. 1 to FIG. 3 . FIG. 1 and FIG. 2 are schematic appearance diagrams of an automation system 1 according to an embodiment of the present invention at different viewing angles. FIG. 3 is a top view of an automation system 1 according to an embodiment of the present invention. As shown in Figures 1 to 3, the automation system 1 is used to clean a plate member 2, and includes a base 10, a tank body 11, a cassette structure 12 and a transfer mechanism 13, the tank body 11 is arranged on the base 10 , and inside it is divided into a first chamber C1, a second chamber C2, a third chamber C3 and a fourth chamber C4, the cassette structure 12 can be selectively arranged in the first chamber C1 , the second tank chamber C2, the third tank chamber C3 or the fourth tank chamber C4 and used to carry the plate member 2, the transfer mechanism 13 includes a first track 130, a first driving device 131, a second track 132 and A second driving device 133, the first track 130 is arranged on the base 10 and has a first axis S1, the first driving device 131 includes a first base 1310 and a first driving member 1311, the first base 1310 Slidably disposed on the first track 130 , one end of the first driving member 1311 is fixed on one side of the cassette structure 12 . The second track 132 is arranged on the base 10 and is parallel to the first track 130. The second driving device 133 includes a second base 1330 and a second driving member 1331. The second base 1330 is slidably arranged on the second track. 132 , one end of the second driving member 1331 is fixed on the other side of the cassette structure 12 .

In practical applications, a control chip (not shown in the figure) can be used to control the first base 1310 and the second base 1330 to move synchronously, so that the first base 1310 and the second base 1330 can move along the first base 1330 simultaneously. An axis S1 moves toward a first direction D1 or moves along the first axis S1 toward a second direction D2 opposite to the first direction D1. Further, the first driving element 1311 has a second axial direction S2, the first driving element 1311 is telescopically installed on the first base 1310, and the second driving element 1331 is telescopically installed on the second base 1330 . It is worth noting that the control chip can also control the first driving member 1311 and the second driving member 1331 to move together, so that the first driving member 1311 and the second driving member 1331 can simultaneously protrude toward a direction along the second axis S2. The direction D3 protrudes from the first base 1310 and the second base 1330 respectively or retracts from the first base 1310 and the second base 1330 respectively along the second axis S2 toward a retraction direction D4 opposite to the protruding direction D3. The second base 1330 . In this embodiment, the first axis S1 is perpendicular to the second axis S2, that is, the first track 130 is perpendicular to the first base 1310, and the second track 132 is perpendicular to the second base 1330. However, the present invention It is not limited to this.

Please refer to Fig. 4 to Fig. 6, Fig. 4 is the appearance schematic diagram of the tank body 11 of the embodiment of the present invention, Fig. 5 is the top view of the tank body 11 of the embodiment of the present invention, Fig. 6 is the embodiment of the present invention along the groove body 11 in Fig. 5 Schematic cross-sectional view of line A-A. As shown in Figures 4 to 6, the tank body 11 includes a bottom wall 110, a first side wall 111, a second side wall 112, a first partition wall 113, a second partition wall 114, a first flow channel The side wall 115 , a third partition wall 116 , a second channel side wall 117 , a third channel side wall 118 , a first distribution plate 119 , a second distribution plate 120 and a third distribution plate 121 .

The bottom wall 110 is arranged on the base 10, the first side wall 111 is connected to a first side 1101 of the bottom wall 110, the first side wall 111 is formed with a water inlet 1111, and the second side wall 112 is connected to the bottom wall 110 relative to the first side 1101. A second side 1102 of one side 1101, the second side wall 112 is formed with a water outlet hole 1121, the first partition wall 113 is arranged between the first side wall 111 and the second side wall 112, the first partition wall 113 and the first The first tank chamber C1 is defined between the side walls 111, and a cleaning fluid F is injected into the first tank chamber C1 through the water inlet hole 1111. The first partition wall 113 has a first partition wall upper end 1131 and a first partition wall lower end 1132. The lower end 1132 of the partition wall is connected to the bottom wall 110, a first wall height H1 is defined between the upper end 1131 of the first partition wall and the bottom wall 110, and the second partition wall 114 is arranged between the first partition wall 113 and the second side wall 112, The second partition wall 114 has a second partition wall upper end 1141 and a second partition wall lower end 1142, the second partition wall lower end 1142 is connected to the bottom wall 110, and a second partition wall is defined between the second partition wall upper end 1141 and the bottom wall 110 Height H2, the first flow channel side wall 115 is arranged between the first partition wall 113 and the second partition wall 114, a first flow channel P1 is defined between the first flow channel side wall 115 and the first partition wall 113, the first flow channel side wall 115 and the second partition wall 114 define the second chamber C2, the first flow channel side wall 115 has a first flow channel side wall upper end 1151 and a first flow channel side wall lower end 1152, the first flow channel side wall upper end 1151 and the bottom wall A first plate height L1 is defined between 110, a first flow channel inlet E1 is defined between the upper end 1151 of the side wall of the first flow channel and the upper end 1131 of the first partition wall, and there is a first gap between the lower end 1152 of the side wall of the first flow channel and the bottom wall 110 G1, making the first channel P1 communicate with the second chamber C2.

The third partition wall 116 is arranged between the second partition wall 114 and the second side wall 112, the third partition wall 116 has a third partition wall upper end 1161 and a third partition wall lower end 1162, the third partition wall lower end 1162 is connected to The bottom wall 110, the third partition wall upper end 1161 and the bottom wall 110 define a third wall height H3, the second flow channel side wall 117 is arranged between the third partition wall 116 and the second partition wall 114, the second flow channel A second channel P2 is defined between the side wall 117 and the second partition wall 114, a third groove chamber C3 is defined between the second channel side wall 117 and the third partition wall 116, and the second channel side wall 117 has a second channel P2. The upper end 1171 of the side wall of the flow channel and the lower end 1172 of the side wall of the second flow channel define a second plate height L2 between the upper end 1171 of the side wall of the second flow channel and the bottom wall 110, and the upper end 1171 of the side wall of the second flow channel and the second space A second channel inlet E2 is defined between the upper end 1141 of the partition wall, and there is a second gap G2 between the lower end 1172 of the side wall of the second channel and the bottom wall 110, so that the second channel P2 communicates with the third chamber C3, and the third channel The channel side wall 118 is arranged between the third partition wall 116 and the second side wall 112, a third channel P3 is defined between the third channel side wall 118 and the third partition wall 116, and the third channel side wall 118 and The fourth chamber C4 is defined between the second side walls 112, the third flow channel side wall 18 has a third flow channel side wall upper end 1181 and a third flow channel side wall lower end 1182, the third flow channel side wall upper end 1181 and A third plate height L3 is defined between the bottom wall 110, a third flow channel inlet E3 is defined between the upper end 1181 of the side wall of the third flow channel and the upper end 1161 of the third partition wall, and a third flow channel inlet E3 is defined between the lower end 1182 of the side wall of the third flow channel and the bottom wall 110 There is a third gap G3, which communicates the third channel P3 with the fourth chamber C4. In this embodiment, the first wall height H1 is greater than the first plate height L1, the first plate height L1 is greater than the second wall height H2, the second wall height H2 is greater than the second plate height L2, and the second plate height L2 is greater than the third wall height. The wall height H3, the third wall height H3 is greater than the third plate height L3, however, the present invention is not limited thereto. In this embodiment, the upper end 1131 of the first partition wall, the upper end 1141 of the second partition wall and the upper end 1161 of the third partition wall may respectively form a wave structure 122 .

As shown in Figures 4 to 6, the cleaning fluid F is injected into the first tank chamber C1 through the water inlet hole 1111. When the liquid level height of the cleaning fluid F in the first tank chamber C1 is greater than the first wall height H1, the cleaning fluid F When a liquid level C10 in the first tank chamber C1 is higher than the first partition wall upper end 1131 of the first partition wall 113, the cleaning liquid F can overflow from the liquid level C10 over the first partition wall upper end 1131 and pass through the first flow The channel entrance E1 enters the first flow channel P1. Further, when the cleaning liquid F overflows the upper end 1131 of the first partition wall from the liquid level C10, the wave structure 122 located at the upper end 1131 of the first partition wall can evenly overflow the cleaning liquid F over the upper end 1131 of the first partition wall, that is, the cleaning liquid F F can evenly overflow the first tank chamber C1 along the length direction of the first partition wall 113 (that is, a direction X, as shown in FIG. 5 ) by means of the wave structure 122, and enter the first flow channel P1 through the first flow channel inlet E1 .

Similarly, when a liquid level height of the cleaning fluid F in the second tank chamber C2 is greater than the second wall height H2, that is, a liquid level C20 of the cleaning fluid F in the second tank chamber C2 is higher than the second partition wall 114 When the upper end 1141 of the second partition wall is closed, the cleaning liquid F can overflow from the liquid level C20 to the upper end 1141 of the second partition wall, and enter the second flow channel P2 through the second flow channel inlet E2. Further, when the cleaning liquid F overflows the upper end 1141 of the second partition wall from the liquid level C20, the wave structure 122 located at the upper end 1141 of the second partition wall can evenly overflow the cleaning liquid F over the upper end 1141 of the second partition wall, that is, the cleaning liquid F F can evenly overflow the second tank chamber C2 along the length direction of the second partition wall 114 (that is, the direction X, as shown in FIG. Runner P2. By analogy, the process of the cleaning liquid F overflowing the third chamber C3 and the cleaning liquid F overflowing the fourth chamber C4 is similar to the process of the above-mentioned cleaning liquid F overflowing the first chamber C1 or the cleaning liquid F overflowing the second chamber C2, No more details here.

As shown in FIG. 6 and FIG. 7 , the first splitter plate 119 is arranged between the lower end 1152 of the side wall of the first flow channel and the lower end 1132 of the first partition wall, and is obliquely connected to the first partition wall 113 and the side wall of the first flow channel 115 , The first splitter plate 119 is formed with a plurality of first splitter holes 1190 , the second splitter plate 120 is arranged between the lower end 1172 of the side wall of the second channel and the lower end 1142 of the second partition wall, and is obliquely connected to the second partition wall 114 With the second channel side wall 117, a plurality of second channel holes 1200 are formed on the second distributor plate 120, and the third distributor plate 121 is arranged between the lower end 1182 of the third channel side wall and the lower end 1162 of the third partition wall, And it is obliquely connected to the third partition wall 116 and the third channel sidewall 118 , and a plurality of third distribution holes 1210 are formed on the third distribution plate 121 .

When the cleaning fluid F enters the first flow channel P1 through the first flow channel inlet E1 , the cleaning fluid F entering the first flow channel P1 through the first flow channel inlet E1 can flow down to the first distributor plate 119 through the first flow channel P1 . When the cleaning liquid F flows down to the first distribution plate 119, the cleaning liquid F can pass through the first distribution hole 1190 on the first distribution plate 119 and flow through the first distribution plate 119, so that the cleaning liquid F is divided by the first distribution hole 1190 , and then evenly pass through the first gap G1 into the second tank chamber C2, so that the first splitter plate 119 can make the cleaning liquid F flow into the second tank chamber C2 evenly and stably, and then make the second tank chamber C2 The cleaning solution F maintains a steady state. Similarly, when the cleaning liquid F enters the second flow channel P2 through the second flow channel inlet E2, the cleaning liquid F entering the second flow channel P2 through the second flow channel inlet E2 can flow down to the second flow channel P2 through the second flow channel P2. Two splitter plates 120 . When the cleaning liquid F flows down to the second distribution plate 120, the cleaning liquid F can flow through the second distribution plate 120 through the second distribution hole 1200 on the second distribution plate 120, so that the cleaning liquid F is divided by the second distribution hole 1200 , and then evenly pass through the second gap G2 into the third chamber C3, so that the second diverter plate 20 can make the cleaning liquid F flow into the third chamber C3 evenly and stably, and then make the third chamber C3 The cleaning solution F maintains a steady state. By analogy, the process of the cleaning liquid F coming to the fourth chamber C4 through the third gap G3 is the same as the process of the cleaning liquid F passing through the first gap G1 to the second chamber C2 or the cleaning liquid F passing through the second gap G2. The process to the third tank chamber C3 is similar and will not be repeated here. Finally, the cleaning fluid F entering the fourth tank chamber C4 flows out through the outlet hole 1121 .

When cleaning the plate member 2, the plate member 2 can be placed in the fourth chamber C4, the third chamber C3, the second chamber C2, and the first chamber C1 in sequence, that is, the plate member 2 passes through the fourth chamber in sequence. The tank chamber C4, the third tank chamber C3, the second tank chamber C2, and the first tank chamber C1 are cleaned, and when the plate member 2 passes through the fourth tank chamber C4, the third tank chamber C3, the second tank chamber C2, the first tank chamber During the sequential cleaning of a tank chamber C1, the cleanliness of the plate member 2 before entering each tank chamber is that the cleanliness of the plate member 2 before entering the fourth tank chamber C4 is less than that before the plate member 2 enters the third tank chamber C3 Cleanliness, the cleanliness of the plate member 2 before entering the third chamber C3 is less than the cleanliness of the plate member 2 before entering the second chamber C2, and the cleanliness of the plate member 2 before entering the second chamber C2 is less than that of the plate member 2 entering the second chamber C2 Cleanliness before the first chamber C1.

It is worth mentioning that as the cleaning liquid F is continuously injected into the first chamber C1 from the water inlet 1111, the cleaning liquid F continuously overflows from the first chamber C1, so that the cleaning liquid F flows through the first chamber C1, The first flow path P1, the second chamber C2, the second flow path P2, the third chamber C3, the third flow path P3 and the fourth chamber C4, plus the cleanliness of the above-mentioned plate member 2 before entering each chamber, A particle concentration of the cleaning solution F in the first tank chamber C1 is lower than a particle concentration of the cleaning solution F in the second tank chamber C2, and the particle concentration of the cleaning solution F in the second tank chamber C2 is lower than that in the third tank chamber C3 A particle concentration of the cleaning solution F, the particle concentration of the cleaning solution F in the third tank chamber C3 is less than a particle concentration of the cleaning solution F in the fourth tank chamber, that is, the cleaning solution in the first tank chamber C1 to the fourth tank chamber C4 The concentration of the particles of F decreases sequentially. Therefore, when it is desired to clean the flat member 2, a better cleaning effect can be achieved by sequentially cleaning the planar member 2 in the fourth chamber C4, the third chamber C3, the second chamber C2 and the first chamber C1. . In addition, the present invention can also include a circulating filter system, which is connected to the water inlet 1111 and the water outlet 1121, and the cleaning liquid F discharged from the fourth tank chamber C4 from the water outlet 1121 can be purified by the circulating filter system, and then sent to the water inlet 1111 , to reduce the consumption of cleaning fluid F. In addition, since the cleaning fluid F overflowed from each tank chamber flows through the corresponding flow channel and the gap and is poured into the next tank chamber from bottom to top, the overflowing cleaning fluid will not directly fall on the liquid surface of the next tank chamber, so that each The liquid level in the tank does not fluctuate too much, thereby maintaining the flatness of the plate member 2 .

The following describes how the automation system 1 of the present invention utilizes the transfer mechanism 13 to selectively arrange the cassette structure 12 and the plate member 2 in the first chamber C1, the second chamber C2, the third chamber C3 or the fourth chamber C4 . For example, in the above cleaning process, the lithographic member 2 needs to be sequentially placed in the fourth chamber C4, the third chamber C3, the second chamber C2, and the first chamber C1, please refer to FIG. 1 and FIG. 7 and FIG. 8 , FIG. 7 is a side view of the automation system 1 shown in FIG. 1 , and FIG. 8 is a schematic diagram of the automation system 1 in a retracted state according to an embodiment of the present invention. As shown in Figure 1, Figure 7 and Figure 8, firstly, the control chip controls the positioning of the first base 1310 and the second base 1330 in a fourth slot corresponding to the fourth chamber C4, and controls the first driving member 1311 and the second driving member 1331 protrude from the first base 1310 and the second base 1330 respectively along the protruding direction D3, and then the plate member 2 is placed in the cassette structure 12 and the cassette structure 12 is fixed on the first base 1330. The driving member 1311 and the second driving member 1331 (as shown in FIG. 7 ), and then the control chip controls the first driving member 1311 and the second driving member 1331 to retract respectively to the first base 1310 and the second driving member 1331 along the retraction direction D4. The second base 1330 enables the cassette structure 12 carrying the flat member 2 to enter the fourth tank chamber C4 to clean the flat member 2 . After the plate member 2 is cleaned in the fourth chamber C4, the control chip controls the first driver 1311 and the second driver 1331 to protrude from the first base 1310 and the second base respectively along the extending direction D3. 1330, make the cassette structure 12 carrying the flat member 2 leave the fourth chamber C4. When the planar member 2 is to be switched to the third chamber C3 for the next stage of cleaning, the control chip controls the first base 1310 and the second base 1330 to move from one corresponding to the fourth chamber C4 along the first direction D1. The fourth slot moves to a third slot corresponding to the third chamber C3, and then the control chip controls the first driving member 1311 and the second driving member 1331 to retract respectively to the first base 1310 along the retracting direction D4 With the second base 1330, the cassette structure 12 carrying the flat member 2 enters the third tank chamber C3, and then the next stage of cleaning of the flat member 2 can be performed in the third tank chamber C3. By analogy, after the plate member 2 is cleaned in the third tank chamber C3, the plate member 2 will be switched to the second tank chamber C2 for the next stage of cleaning, and when the plate member 2 is in the second tank chamber C2 After the cleaning is completed, and it is desired to switch the plate member 2 to the first tank chamber C1 for the next stage of cleaning, the operation process of the control chip controlling the transfer mechanism 13 is the same as the operation process of the control chip controlling the transfer mechanism 13 described above. The process is similar and will not be repeated here.

Finally, when the plate member 2 is cleaned in the final stage in the first tank chamber C1, the control chip controls the first driver 1311 and the second driver 1331 to protrude from the first base 1310 and the second pedestal respectively along the extending direction D3. Two bases 1330, so that the cassette structure 12 carrying the plate member 2 leaves the first chamber C1, at this time, the cassette structure 12 can be taken off by the first driving member 1311 and the second driving member 1331, and the flat plate The component 2 is taken out so that the next stage of manufacturing process can be performed on the flat component 2 . In this embodiment, the first driving device 131 and the second driving device 133 can be a pneumatic cylinder mechanism respectively, the first base 1310 and the second base 1330 can be a pneumatic cylinder seat respectively, and the first driving member 1311 The second driving member 1331 and the second driving member 1331 may respectively be a pneumatic ejector rod, but the present invention is not limited thereto.

Compared with the prior art, the automation system of the present invention uses the transfer mechanism to move the plate member between the slots corresponding to each chamber, and the automation system of the present invention also utilizes the first drive member and the second drive member of the transfer mechanism to drive The cassette structure enters or leaves the corresponding tank chamber, so the automation system of the present invention not only simplifies the overall operation procedure of cleaning the plate member, but also makes more effective use of the overall operation space on the production line.

The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and changes. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

Claims (18)

1. An automated system for cleaning a flat member, characterized in that, the automated system includes: a base; A tank body, arranged on the base, in which at least a first tank chamber and a second tank chamber are separated; a cassette structure, selectively disposed in the first tank chamber or the second tank chamber, for carrying the flat member; and A transfer mechanism, including: a first track, disposed on the base, the first track has a first axial direction; and A first driving device includes: a first base, slidably arranged on the first track, and the first base can be moved along a first direction parallel to the first axial direction by a first base corresponding to the first chamber; A slot moves to a second slot corresponding to the second chamber or moves from the second slot to the first slot along a second direction opposite to the first direction, the the first base has a second axis; and A first driver, telescopically installed on the first base and fixed on the cassette structure, when the first driver protrudes in an extending direction parallel to the second axis When the first base is used, the first driving member drives the cartridge structure to leave the first chamber or the second chamber, and when the first driving member moves in a direction opposite to the extending direction When retracting to the first base in a retracting direction, the first driving member drives the cassette structure into the first chamber or the second chamber. 2. The automation system according to claim 1, wherein the transfer mechanism further comprises: a second track disposed on the base and parallel to the first track; and A second driving device, including: a second base, slidably arranged on the second track, the second base can move with the first base along the first direction from the first slot to the second slot or moving from the second slot to the first slot along the second direction; and A second driving part, telescopically installed on the second base and fixed on the cassette structure, the second driving part can move together with the first driving part along the extending direction protruding from the second base to drive the cassette structure away from the first chamber or the second chamber, or retracting to the second base along the retracting direction to Driving the cassette structure into the first chamber or the second chamber. 3. The automation system according to claim 2, wherein the first driving device and the second driving device are respectively a pneumatic cylinder mechanism, and the first base and the second base are respectively It is a pneumatic cylinder seat, and the first driving part and the second driving part are respectively a pneumatic mandrel. 4. The automation system according to claim 1, wherein the first driving device is a pneumatic cylinder mechanism, the first base is a pneumatic cylinder seat, and the first driving member is a pneumatic cylinder mechanism. mandrel. 5. The automation system of claim 1, wherein the first axis is perpendicular to the second axis. 6. automation system as claimed in claim 1, is characterized in that, described tank body comprises: a bottom wall arranged on the base; a first side wall connected to a first side of the bottom wall, and a water inlet hole is formed on the first side wall; a second side wall connected to a second side of the bottom wall opposite to the first side; a first partition, arranged between the first side wall and the second side wall, the first compartment is defined between the first partition and the first side wall, the first The partition wall has a first partition wall upper end and a first partition wall lower end, the first partition wall lower end is connected to the bottom wall, and a first wall height is defined between the first partition wall upper end and the bottom wall ; A second partition wall is arranged between the first partition wall and the second side wall, the second partition wall has a second partition wall upper end and a second partition wall lower end, the second partition wall The lower end of the partition wall is connected to the bottom wall, and a second wall height is defined between the upper end of the second partition wall and the bottom wall; and A first flow channel side wall is arranged between the first partition wall and the second partition wall, a first flow channel is defined between the first flow channel side wall and the first partition wall, and the first flow channel The second chamber is defined between the side wall of the channel and the second partition wall, the side wall of the first channel has an upper end of the side wall of the first channel and a lower end of the side wall of the first channel, and the side wall of the first channel A first channel inlet is defined between the upper end and the upper end of the first partition wall, and there is a first gap between the lower end of the side wall of the first channel and the bottom wall, so that the first channel communicates with the second groove room; Wherein, a cleaning liquid is injected into the first tank chamber through the water inlet hole, the height of the first wall is higher than the height of the second wall, and the cleaning liquid injected into the first tank chamber through the water inlet hole passes through The upper end of the first partition wall enters the inlet of the first flow channel, and enters the second tank chamber through the first gap. 7. automation system as claimed in claim 6, is characterized in that, described tank body also comprises: A first splitter plate, arranged between the lower end of the side wall of the first flow channel and the lower end of the first partition wall, a plurality of first splitter holes are formed on the first splitter plate, and the water injected from the water inlet hole The cleaning liquid enters the first gap through the plurality of first distribution holes. 8 . The automation system according to claim 7 , wherein the first splitter plate is obliquely connected to the first partition wall and the side wall of the first channel. 9. The automation system according to claim 6, wherein a first plate height is defined between the upper end of the side wall of the first flow channel and the bottom wall, and the first plate height is greater than the second wall height . 10. The automation system of claim 9, wherein the first plate height is less than the first wall height. 11. The automation system according to claim 6, wherein the upper end of the first partition wall and the upper end of the second partition wall respectively form a wave structure. 12. The automation system according to claim 6, wherein a third tank chamber and a fourth tank chamber are partitioned into the tank body, and the cassette structure is selectively arranged in the first tank chamber, the second chamber, the third chamber or the fourth chamber, the first base and the second base move together and can be in all corresponding to the first chamber Move between the first slot, the second slot corresponding to the second slot, the third slot corresponding to the third slot, and the fourth slot corresponding to the fourth slot , and the tank also includes: A third partition wall is arranged between the second partition wall and the second side wall, the third partition wall has a third partition wall upper end and a third partition wall lower end, the third partition wall The lower end of the partition wall is connected to the bottom wall, and a third wall height is defined between the upper end of the third partition wall and the bottom wall; A second flow channel side wall is arranged between the third partition wall and the second partition wall, a second flow channel is defined between the second flow channel side wall and the second partition wall, and the first The third groove chamber is defined between the side wall of the second flow channel and the third partition wall, the side wall of the second flow channel has an upper end of the side wall of the second flow channel and a lower end of the side wall of the second flow channel, and the side wall of the second flow channel has a lower end of the side wall of the second flow channel. A second flow channel inlet is defined between the upper end of the side wall of the second flow channel and the upper end of the second partition wall, and there is a second gap between the lower end of the side wall of the second flow channel and the bottom wall, so that the second channel The flow channel is connected to the third chamber; and A third flow channel side wall is arranged between the third partition wall and the second side wall, and a third flow channel is defined between the third flow channel side wall and the third partition wall, so The fourth chamber is defined between the side wall of the third flow channel and the second side wall, the side wall of the third flow channel has an upper end of the side wall of the third flow channel and a lower end of the side wall of the third flow channel, A third flow channel inlet is defined between the upper end of the side wall of the third flow channel and the upper end of the third partition wall, and there is a third gap between the lower end of the side wall of the third flow channel and the bottom wall, so that the The third flow channel is connected to the fourth chamber; Wherein, the height of the second wall is higher than the height of the third wall, and the cleaning liquid entering the second chamber through the first gap enters the inlet of the second channel through the upper end of the second partition wall , and enter the third chamber through the second gap, and the cleaning liquid entering the third chamber through the second gap enters the third flow channel through the upper end of the third partition wall entrance, and enter the fourth chamber through the third gap. 13. automation system as claimed in claim 12, is characterized in that, described tank body also comprises: A first splitter plate, arranged between the lower end of the side wall of the first flow channel and the lower end of the first partition wall, a plurality of first splitter holes are formed on the first splitter plate, and the water injected from the water inlet hole The cleaning liquid enters the first gap through the plurality of first distribution holes; A second splitter plate is arranged between the lower end of the side wall of the second flow channel and the lower end of the second partition wall, a plurality of second splitter holes are formed on the second splitter plate, and enter the second groove the cleaning fluid of the chamber enters the second gap through the plurality of second flow holes; and A third splitter plate is arranged between the lower end of the side wall of the third channel and the lower end of the third partition wall, a plurality of third splitter holes are formed on the third splitter plate, and enter the third groove The cleaning liquid in the chamber enters the third gap through the plurality of third distribution holes. 14. The automation system according to claim 13, wherein the first splitter plate is mitered to the first partition wall and the side wall of the first channel, and the second splitter plate is mitered to the side wall of the first flow channel. The second partition wall and the side wall of the second flow channel, and the third splitter plate is obliquely connected to the third partition wall and the side wall of the third flow channel. 15. The automation system according to claim 12, wherein a first plate height is defined between the upper end of the side wall of the first flow channel and the bottom wall, and the upper end of the side wall of the second flow channel is connected to the bottom wall. A second plate height is defined between the walls, a third plate height is defined between the upper end of the side wall of the third flow channel and the bottom wall, the first plate height is greater than the second wall height, and the second plate higher than the third wall. 16. The automation system of claim 15, wherein the first plate height is less than the first wall height, the second plate height is less than the second wall height, and the third plate height less than the height of the third wall. 17. The automation system according to claim 12, wherein the second side wall is formed with a water outlet hole communicating with the fourth tank chamber, and the cleaning liquid flowing into the fourth tank chamber Flow out through the outlet hole. 18. The automation system according to claim 12, wherein the upper end of the first partition wall, the upper end of the second partition wall and the upper end of the third partition wall are respectively formed with a wave structure.