CN106411174B - Linear surface acoustic wave motor - Google Patents

Abstract

The invention relates to a three-dimensional linear surface acoustic wave motor. The surface acoustic wave motor is mainly composed of a surface acoustic wave base, an interdigital transducer, a slider, a lifting mechanism, a support rod, a lifting plate, a pin, a slide rail, and a protrusion. , Composed of sound-absorbing partitions. There are at least two interdigital transducers on both sides of the sound-absorbing partition in the middle of the two sliders. By applying electric signals to different interdigital transducers to excite surface acoustic waves to drive the slider to move in the X and Y directions on the plane, in order to convert the plane movement into the Z-direction movement in space, the present invention adds to the slider The lifting mechanism uses the characteristics of the lifting mechanism to convert the plane linear motion into Z-direction linear motion, so as to realize the three-direction motion of the surface acoustic wave motor in X, Y, and Z. The invention has the advantages of simple structure, high precision, easy control and low cost.

Description

Three-dimensional linear surface acoustic wave motor

technical field

The invention belongs to the field of motors, in particular to a three-dimensional linear surface acoustic wave motor.

Background technique

With the rapid development of modern industry, the application range of motors is becoming wider and wider. Although the traditional electromagnetic motor has fast speed, high power and high energy utilization rate, it uses the electromagnetic force between the rotor magnet and the stator coil to drive the rotor to rotate. , vulnerable to external electromagnetic interference, low precision.

Due to the gradual emergence of some application drawbacks of traditional electromagnetic motors, piezoelectric motors have entered people's field of vision. Piezoelectric motors have the characteristics of high positioning accuracy, low speed and high torque, and no electromagnetic interference. The application occasions are limited, which is not conducive to large-scale production.

In the mid-1990s, the surface acoustic wave motor was proposed by Kurosawa et al. The surface acoustic wave motor manufactured by high-precision surface micromachining technology has higher reliability and work efficiency than the piezoelectric motor produced by general manufacturing technology. , and the surface acoustic wave motor has nano-level positioning accuracy, is easy to control, small in size, and suitable for miniaturization. But most of the current surface acoustic wave motors are single linear, rotary or two-dimensional linear, and three-dimensional surface acoustic wave motors have not been studied in depth.

In view of the problems existing in traditional motors and piezoelectric motors and the current research status of surface acoustic wave motors, the present invention proposes a three-dimensional linear motion surface acoustic wave motor, which uses surface acoustic waves to drive the slider to move, and the plane of the slider The movement drives the lifting mechanism to move up and down, realizing the three-dimensional linear movement of the lifting mechanism.

Contents of the invention

The purpose of the present invention is to provide a three-dimensional linear surface acoustic wave motor to solve the problem that the current surface acoustic wave motor can only realize one-dimensional or two-dimensional movement, but cannot realize three-dimensional movement.

In the three-dimensional linear surface acoustic wave motor of the present invention, multiple pairs of interdigital transducers are formed on the surface acoustic wave substrate, and different interdigital transducers excite surface acoustic waves under the action of electric signals to drive two sliders Movement, the movement of the slider in the plane drives the lifting mechanism to move in the three directions of X, Y and Z.

In the three-dimensional linear surface acoustic wave motor of the present invention, there are at least two interdigital transducers on both sides of the sound-absorbing baffle in the middle of the two sliders, and the sound-absorbing baffle can be made of rubber, silica gel or other materials with high elasticity. Made of good sound-absorbing material.

In the three-dimensional linear surface acoustic wave motor of the present invention, the interdigital transducers on the base are designed in pairs and arranged symmetrically, and the interdigital transducers arranged in the X direction are exactly the same, and are symmetrical with the sound-absorbing partition as the center Arrangement, the interdigital transducers arranged in the Y direction may be different.

The three-dimensional linear surface acoustic wave motor of the present invention applies electrical signals to two pairs of interdigital transducers to excite surface acoustic waves to drive the two sliders to produce a linear movement toward or away from each other, and converts it into a Z-direction up and down movement through the lifting mechanism. sports.

According to the slider of the present invention, there are regularly arranged protrusions on the bottom surface of the slider, and there is a pre-pressure effect before the slider works.

In the slider described in the present invention, the speed at which the two sliders are driven by the interdigital transducer to move is always the same.

Description of drawings

Figures 1 and 2 are isometric views of the front of the invention.

Fig. 3 is an exploded view of the structure of the present invention.

Figure 4 is an isometric view of the lift plate.

Figure 5 is an isometric view of the slider.

Fig. 6 is a front view of an interdigital transducer 1 (101) (102) (103) (104).

The front view of Fig. 7 interdigital transducer 2 (201) (202) (203) (204).

Detailed ways

Referring to Fig. (1-7), the three-dimensional linear surface acoustic wave motor of the present invention consists of a surface acoustic wave substrate (3), an interdigital transducer 1 (101) (102) (103) (104) 2 (201) ( 202) (203) (204), slider 4 (401) (402), lifting mechanism 7 (701) (702), support rod 5 (501) (502), lifting plate (6), pin (10) ( 1001) (1002) (1003)(1004) (1005) (1006) (1007) (1008) (1009) (1010) (1011) (1012) (1013) 11(1101) (1102), rail 8( 801) (802), sound-absorbing partition (9), projection (4010) form.

In this embodiment, the lifting mechanism 7 (701) (702) and the lifting plate (6) are made of lightweight materials and are lighter in weight. Because of the pre-pressure applied between the slider and the base, the level of the lifting mechanism (including the lifting plate) along the X direction The component force is much smaller than the frictional force between the slider and the acoustic surface substrate in the X direction, so the slider can remain stationary when no electric signal is applied to the IDT.

In the three-dimensional linear surface acoustic wave motor used in this embodiment, four pairs of interdigital transducers 1 (101) (102) are formed on the surface acoustic wave substrate (3) as a pair, (103) (104) as A pair, 2(201)(204) is a pair, (202)(203) is a pair. Wherein 1 (101) (102) (103) (104) four interdigital transducers are identical.

In the slider of the three-dimensional linear surface acoustic wave motor used in this embodiment, there are a plurality of contact protrusions (4010) on the surface contact part of the slider 4 (401) (402) and the surface acoustic wave substrate, and the contact protrusions The rules are arranged on the bottom surface of the slider.

In terms of the lifting mechanism of the three-dimensional linear surface acoustic wave motor used in this embodiment, the rods in the lifting mechanism are connected together by pins, and the lifting mechanism and the slider are also connected by pins.

The three-dimensional linear surface acoustic wave motor slider used in this embodiment moves in two directions, because the moving speed of the two sliders is always the same, so the lifting mechanism will not produce Z-direction movement when the slider moves in the X-direction.

The present invention will be described with reference to Figures (1-7). Before starting to drive, the two sliders are at the center of the two pairs of IDTs arranged along the X direction, as shown in Figure 1. Apply electric signal to IDT (102) IDT (104), since the surface acoustic wave excited by IDT (102) IDT (104) propagates along X positive direction, so Under the action of friction, the two sliders move in the negative X direction, and apply an electric signal to the IDT 1 (101) and the IDT (103). Since the IDT 1 (101) The surface acoustic wave excited by the transducer (103) propagates along the negative X direction, so the two sliders will move along the positive X direction, thereby realizing the movement of the lifting mechanism in the X direction. An electric signal is applied to the IDT 2 (201) and the IDT (202), since the surface acoustic waves excited by the IDT 2 (201) and the IDT (202) propagate along the Y negative direction , so the two sliders move along the Y positive direction and apply an electrical signal to the IDT (203) IDT (204), because the IDT (203) IDT (204) The excited surface acoustic wave propagates along the Y positive direction, so the two sliders move along the Y negative direction, thereby realizing the Y-direction movement of the lifting mechanism. Apply an electric signal to the interdigital transducer (102) and the interdigital transducer (103), and since the surface acoustic wave excited by the interdigital transducer (103) propagates along the negative direction of X, the slider 4 (401) moves along the X Moving in the positive direction, the surface acoustic wave excited by the interdigital transducer (102) propagates along the positive direction of X, so the slider (402) moves along the negative direction of X, so as to realize the relative movement of the two sliders and realize the upward movement of the lifting mechanism in the Z direction . Apply an electric signal to the IDT 1 (101) and the IDT (104), and since the surface acoustic wave excited by the IDT (104) moves along the positive direction X, the slider 4 (401) moves along the Moving in the negative direction of X, the surface acoustic wave excited by IDT 1 (101) moves in the negative direction of X, so the slider (402) moves in the positive direction of X, so slider 4 (401) and slider (402) Move in the direction away from each other so as to realize the Z-direction descending movement of the lifting mechanism.

Claims (5)

1. a kind of linear surface acoustic wave motor, described linear surface acoustic wave motor mainly by surface acoustic wave substrate, Interdigital transducer, slider, elevating mechanism, support bar, lifter plate, pin, slide rail, projection, sound-absorbing partition composition, its feature exist In：There is multipair interdigital transducer above surface acoustic wave substrate, applying electric signal to different interdigital transducers excites surface acoustic wave Two slider motions of driving, motion of the slider in base plane drive elevating mechanism to realize tri- direction motions of X, Y, Z.

2. linear surface acoustic wave motor according to claim 1, it is characterised in that：Telecommunications is applied to interdigital transducer Number excite surface acoustic wave to drive two sliders to produce opposite or opposite offline property movement, and Z-direction is converted into by elevating mechanism Move up and down.

3. linear surface acoustic wave motor according to claim 1, it is characterised in that：The center of slider is placed in into To the center between interdigital transducer, and in the centre of two sliders at least two interdigital transducers.

4. linear surface acoustic wave motor according to claim 1, it is characterised in that：The regular arrangement in slider bottom surface Projection, and slider motion before have precompression effect.

5. linear surface acoustic wave motor according to claim 1, it is characterised in that：Be arranged in X to interdigital transducing Device is identical, and is arranged symmetrically by symmetrical centre of sound-absorbing partition.