CN106950237B - A Scanning Laue Diffraction Spectrum Analysis Method Based on Peak-to-Peak Angle Comparison - Google Patents
A Scanning Laue Diffraction Spectrum Analysis Method Based on Peak-to-Peak Angle Comparison Download PDFInfo
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Abstract
Description
技术领域technical field
本发明涉及晶体微观结构的表征方法技术领域,具体涉及一种分析扫描式劳厄衍射图谱,对扫描式劳厄衍射图谱中衍射峰进行标定的同时获得扫描式劳厄衍射实验扫描区域的晶/相界分部信息的方法。The present invention relates to the technical field of characterization methods for crystal microstructures, in particular to an analysis of scanning Laue diffraction patterns, in which the diffraction peaks in the scanning Laue diffraction patterns are calibrated and at the same time the crystals/crystals in the scanning area of scanning Laue diffraction experiments are obtained. Method for Phase Boundary Segmentation Information.
背景技术Background technique
材料的微观结构对材料的力学性能有显著的影响,从而影响材料的服役使用。因此对材料的微观结构进行表征对研究材料的力学行为、失效机制从而改进相关材料的材料加工工艺等具有重要意义。现对材料微观结构的常用表征方法有光学显微镜、扫描电子显微镜(SEM)、透射电子显微镜(TEM)、电子背散射衍射(EBSD),传统的X射线衍射(XRD)、中子衍射等。The microstructure of materials has a significant impact on the mechanical properties of materials, thus affecting the service use of materials. Therefore, it is of great significance to characterize the microstructure of materials to study the mechanical behavior and failure mechanism of materials, so as to improve the material processing technology of related materials. The commonly used characterization methods for the microstructure of materials include optical microscope, scanning electron microscope (SEM), transmission electron microscope (TEM), electron backscatter diffraction (EBSD), traditional X-ray diffraction (XRD), neutron diffraction, etc.
金相显微法使用光学显微镜观察材料的表面形貌。但由于光学显微镜的分辨率限制,无法实现对材料微观结构的观测。扫描电子显微镜(SEM)的观测通常有两种信号源,其分别是二次电子和背散射电子。其中二次电子信号对样品表面形貌敏感、背散射电子对样品的元素分布敏感,而对于小尺度下的结构,如位错、小角晶界等,该方法难以区分。而传统的XRD和中子衍射的空间分辨率也不足以分辨晶体取向、缺陷、孪晶等材料微观结构特征。虽然透射电子显微镜(TEM)分辨率较高,但其效率较低,样品的制备复杂,观测区域较小,难以进行统计观测,对应变的分辨能力较弱。Metallographic microscopy uses an optical microscope to observe the surface topography of materials. However, due to the limited resolution of optical microscopes, it is impossible to observe the microstructure of materials. Scanning electron microscope (SEM) observations generally have two signal sources, which are secondary electrons and backscattered electrons. Among them, the secondary electron signal is sensitive to the surface morphology of the sample, and the backscattered electrons are sensitive to the element distribution of the sample. However, for small-scale structures, such as dislocations and small-angle grain boundaries, this method is difficult to distinguish. However, the spatial resolution of traditional XRD and neutron diffraction is not enough to distinguish the microstructural characteristics of materials such as crystal orientation, defects, and twins. Although the transmission electron microscope (TEM) has a high resolution, its efficiency is low, the preparation of the sample is complicated, the observation area is small, it is difficult to perform statistical observation, and the ability to distinguish strain is weak.
扫描式劳厄衍射技术(Scanning Laue Diffraction)是将同步辐射光源作为X射线源,具有空间分辨率高(亚微米级别)(Kunz,M.,et al.,A dedicated superbend x-raymicrodiffraction beamline for materials,geo-,and environmental sciences atthe advanced light source[J],Rev.Sci.Instrum.,2009),角分辨率高(~0.01°)(Tamura,N.,et al.,High spatial resolution grain orientation and strainmapping in thin films using polychromatic submicron x-ray diffraction[J],Appl.Phys.Lett.,2002),穿透力能力强、样品制备简单等优点。而扫描式劳厄衍射技术的这些优点,对上述各种材料表征技术的不足是极大的补充,从而体现了该技术在材料分析表征领域的重要性。Scanning Laue Diffraction uses a synchrotron radiation source as an X-ray source with high spatial resolution (submicron level) (Kunz, M., et al., A dedicated superbend x-raymicrodiffraction beamline for materials , geo-, and environmental sciences at the advanced light source[J],Rev.Sci.Instrum.,2009), high angular resolution (~0.01°)(Tamura,N.,et al.,High spatial resolution grain orientation and strainmapping in thin films using polychromatic submicron x-ray diffraction[J], Appl. Phys. Lett., 2002), strong penetrating power, simple sample preparation and other advantages. The advantages of the scanning Laue diffraction technique are a great complement to the shortcomings of the above-mentioned various material characterization techniques, thus reflecting the importance of this technique in the field of material analysis and characterization.
但扫描式劳厄衍射实验需要对样品实验区域进行驻点扫描,得到海量(少则几千张、多则数十万张)衍射图谱。现有的对衍射图谱的处理技术,是对每张图谱独立地进行指标化计算。而后再进行其他分析。而这个过程计算量巨大、极其耗时。在集群计算机上进行计算,尚需少则数十小时、多则数周时间。而这一劣势严重限制的该技术的应用。However, the scanning Laue diffraction experiment requires stationary point scanning of the sample experimental area to obtain a large number of diffraction patterns (ranging from a few thousand to hundreds of thousands). The existing technology for processing diffraction patterns is to perform index calculation independently for each pattern. Then do other analyses. This process is computationally intensive and extremely time-consuming. Computing on cluster computers still takes tens of hours or weeks. This disadvantage severely limits the application of this technology.
实际上,由于晶体中同一晶粒内个点的取向差别极小,对于同一晶粒内的点,其扫描式劳厄衍射图谱有极大的相似性。故对每个晶粒只选取其中的某几个点进行指标化计算,通过寻找并利用属于同一晶粒的点对应的衍射图谱的相似性,即可完成对这些衍射图谱的指标化处理。这使得实际进行的指标化计算的次数大幅减小,从而极大地缩短了整个数据处理过程的耗时,并且节省了计算机资源。不仅如此, 通过这一方法,在完成各衍射图谱的指标化处理的同时,还获得了扫描式劳厄衍射实验扫描区域的晶/相界分布,对后续的分析过程带来了方便。In fact, because the orientation difference of points in the same crystal grain is very small, the scanning Laue diffraction patterns of points in the same crystal grain have great similarity. Therefore, only a few points of each crystal grain are selected for index calculation, and the index processing of these diffraction patterns can be completed by finding and utilizing the similarity of the diffraction patterns corresponding to the points belonging to the same grain. This greatly reduces the number of index calculations actually performed, thereby greatly shortening the time consumption of the entire data processing process and saving computer resources. Not only that, through this method, while completing the indexing processing of each diffraction pattern, the crystal/phase boundary distribution in the scanning area of the scanning Laue diffraction experiment is also obtained, which brings convenience to the subsequent analysis process.
发明内容Contents of the invention
为满足上述技术要求,本发明旨在提供一种基于峰间夹角比对的扫描式劳厄衍射图谱分析方法,本方法与当前的其他对扫描式劳厄衍射图谱的分析方法相比,具有计算量小,耗时短的特点。In order to meet the above-mentioned technical requirements, the present invention aims to provide a scanning Laue diffraction pattern analysis method based on peak-to-peak angle comparison. Compared with other current analysis methods for scanning Laue diffraction patterns, this method has the advantages of The calculation amount is small and the time consumption is short.
为了达到上述目的,本发明的技术方案如下:In order to achieve the above object, technical scheme of the present invention is as follows:
一种基于峰间夹角比对的扫描式劳厄衍射图谱分析方法,包括如下步骤:A scanning Laue diffraction pattern analysis method based on peak-to-peak angle comparison, comprising the steps of:
步骤一:对扫描式劳厄衍射实验(Scanning Laue Diffraction)所得的所有劳厄衍射图谱进行寻峰操作,得到每张劳厄衍射图谱上所有衍射峰的位置和积分强度;Step 1: Perform a peak-finding operation on all the Laue diffraction patterns obtained by the Scanning Laue diffraction experiment (Scanning Laue Diffraction), to obtain the positions and integral intensities of all diffraction peaks on each Laue diffraction pattern;
步骤二:计算指标化点的劳厄衍射图谱上所有被标定衍射峰的标准峰角度差序列DS,i,包括如下具体操作步骤:Step 2: Calculate the standard peak angle difference sequence D S,i of all the calibrated diffraction peaks on the Laue diffraction pattern of the indexed point, including the following specific operation steps:
1)对指标化点对应的劳厄衍射图谱进行指标化计算,得到所有被标定衍射峰的位置、积分强度和晶面米勒指数(Miller indices);取适当的计算包含峰数n(一般n取总衍射峰数的八分之一),根据峰的积分强度,计算所有被标定衍射峰中积分强度最高的n个被标定衍射峰在探测器坐标系下的方向向量kS,i(1≤i≤n);1) Carry out indexing calculation on the Laue diffraction pattern corresponding to the indexing point, and obtain the positions, integral intensities and crystal plane Miller indices of all the calibrated diffraction peaks; take appropriate calculations including the number of peaks n (generally n Take one-eighth of the total number of diffraction peaks), according to the integrated intensity of the peak, calculate the direction vector k S,i (1 ≤i≤n);
2)对方向向量kS,i,计算其与其他的方向向量的夹角,得到由 (n-1)个夹角组成的标准角度差序列DS,i(1≤i≤n);有2) For the direction vector k S,i , calculate the angle between it and other direction vectors, and obtain the standard angle difference sequence D S,i (1≤i≤n) composed of (n-1) angles;
步骤三:判定扫描式劳厄衍射实验区域内两点是否为同一晶粒,包括如下具体操作步骤:Step 3: Determine whether the two points in the scanning Laue diffraction experiment area are the same grain, including the following specific steps:
1)定义标准角度差序列DS,i已知的点为比较原点,标准角度差序列DS,i未知的点为被比较点;1) Define the standard angle difference sequence D S, the known point of i is the comparison origin, the standard angle difference sequence D S, the unknown point of i is the compared point;
2)取适当的扩展包含峰数Δn(Δn一般取n的四分之一),根据衍射峰的积分强度,计算被比较点的劳厄衍射图谱中所有衍射峰中最强的(n+Δn)个衍射峰在探测器坐标系下的方向向量ki(1≤i≤n+Δn);2) Take an appropriate extension to include the number of peaks Δn (Δn is generally taken as a quarter of n), and calculate the strongest (n+Δn) of all diffraction peaks in the Laue diffraction pattern of the compared point according to the integrated intensity of the diffraction peak ) direction vector k i (1≤i≤n+Δn) of the diffraction peaks in the detector coordinate system;
3)对方向向量ki,计算其与其他的方向向量的夹角,得到由(n+Δn-1)个夹角组成的比较角度差序列Di(1≤i≤n+Δn);有3) For the direction vector k i , calculate the angle between it and other direction vectors, and obtain the comparison angle difference sequence D i (1≤i≤n+Δn) composed of (n+Δn-1) angles;
4)确定对于比较原点的每个标准角度差序列DS,i,是否存在一个被比较点的比较角度差序列Di与之对应;其具体方法如下:4) Determine whether there is a comparison angle difference sequence D i of the compared point corresponding to each standard angle difference sequence D S,i of the comparison origin; the specific method is as follows:
a)定义被比较点的比较角度差序列Di中的组元为δi,j。将其与比较原点的标准角度差序列DS,i中的组元δS,i,j进行比较。若a) Define the component in the comparison angle difference sequence D i of the compared point as δ i,j . Compare it with the component δ S,i,j in the standard angle difference sequence D S,i of the comparison origin. like
认为δi,j与δS,i,j相等。一般T1取0.05;It is considered that δ i,j is equal to δ S,i,j . Generally T 1 takes 0.05;
b)假设Di与DS,i中相等的组元数为mi,若满足b) Assume that the number of equal components in D i and D S,i is m i , if satisfy
mi≥T2·nm i ≥ T 2 ·n
认为Di与DS,i对应,且其对应的峰也相对应;一般取T2取0.8;It is considered that D i corresponds to D S,i , and its corresponding peaks also correspond; generally T 2 is taken as 0.8;
5)假设比较原点和被比较点相对应的Di与DS,i的总数为s,若满足5) Assuming that the total number of D i and D S,i corresponding to the comparison origin and the compared point is s, if it satisfies
s≥T3·ns≥T 3 ·n
认为比较原点与被比较点属于同一晶粒。并将比较原点中被标定衍射峰的晶面米勒指数赋给被比较点中相对应的衍射峰,同时将被赋予晶面米勒指数也定义为被标定衍射峰;若不满足,则比较原点和被比较点不属于同一晶粒。一般T3取0.9;It is considered that the comparison origin and the compared point belong to the same grain. And the crystal plane Miller index of the calibrated diffraction peak in the comparison origin is assigned to the corresponding diffraction peak in the compared point, and the crystal plane Miller index is also defined as the calibrated diffraction peak; if not satisfied, compare The origin and the compared point do not belong to the same grain. Generally, T3 takes 0.9;
步骤四:从扫描式遍历法和辐射式遍历法中选择一种作为对扫描式劳厄衍射实验扫描区域内所有点的遍历方法;在开始遍历之前将整个区域的边界置为晶界;而后依据选定的遍历方法完成对扫描式劳厄衍射实验区域内所有点的遍历,并得到这些点对应衍射图谱上所有被标定衍射峰的晶面米勒指数。Step 4: Choose one of the scanning traversal method and the radial traversal method as the traversal method for all points in the scanning area of the scanning Laue diffraction experiment; set the boundary of the entire area as a grain boundary before starting the traversal; and then according to The selected traversal method completes the traversal of all points in the scanning Laue diffraction experiment area, and obtains the crystal plane Miller indices of all calibrated diffraction peaks corresponding to these points on the diffraction pattern.
技术方案中步骤四中所述的扫描式遍历法包括如下具体步骤:The scanning traversal method described in
步骤1:对进行扫描式劳厄衍射实验的整个实验区域按列扫描遍历;定义在进行的列的扫描方向为前进方向,向下一列的换列方 向为旁列方向;遍历过程从区域的某一个角开始;Step 1: Scan and traverse the entire experimental area of the scanning Laue diffraction experiment by column; define the scanning direction of the ongoing column as the forward direction, and the direction of changing columns to the next column as the side column direction; the traversal process starts from a certain area of the area. start at a corner;
步骤2:遍历开始后进行到区域中某一点后,判断该点前进方向的反方向和旁列方向的反方向的的相邻点是否被置为晶界,而后区分以下几种情况进行不同操作:Step 2: After the traversal starts and proceeds to a certain point in the area, judge whether the adjacent point in the opposite direction of the forward direction of the point and the opposite direction of the side row direction is set as a grain boundary, and then distinguish the following situations and perform different operations :
1)若前进方向的反方向和旁列方向的反方向相邻点都为晶界,认为该点为指标化点,对计算该点的标准峰角度差序列DS,i;1) If the adjacent points in the opposite direction of the forward direction and the opposite direction of the side row direction are all grain boundaries, this point is considered as an index point, and the standard peak angle difference sequence D S,i of this point is calculated;
2)若前进方向反方向的相邻点为晶界,旁列方向反方向的相邻点不为晶界,认为该点和前进方向反方向的相邻点属于同一晶粒,该点的标准峰角度差序列DS,i亦与前进方向反方向的相邻点的标准峰角度差序列相同;2) If the adjacent point in the opposite direction of the forward direction is a grain boundary, and the adjacent point in the opposite direction of the side column is not a grain boundary, it is considered that this point and the adjacent point in the opposite direction of the forward direction belong to the same grain, and the standard of this point The peak angle difference sequence D S,i is also the same as the standard peak angle difference sequence of the adjacent point in the opposite direction of the forward direction;
3)若前进方向反方向的相邻点不为晶界,旁列方向反方向的相邻点为晶界,认为该点和旁列方向反方向的相邻点属于同一晶粒,该点的标准峰角度差序列DS,i亦与旁列方向反方向的相邻点的标准峰角度差序列相同;3) If the adjacent point in the opposite direction of the forward direction is not a grain boundary, and the adjacent point in the opposite direction of the side row direction is a grain boundary, it is considered that this point and the adjacent point in the opposite direction of the side row direction belong to the same grain, and the point’s The standard peak angle difference sequence D S,i is also the same as the standard peak angle difference sequence of the adjacent point in the opposite direction of the side row direction;
4)若前进方向的反方向和旁列方向的反方向相邻点都不为晶界,认为该点和旁列方向反方向的相邻点属于同一晶粒,该点标准峰角度差序列DS,i取与旁列方向反方向的相邻点的标准峰角度差序列相同;4) If the adjacent point in the opposite direction of the forward direction and the opposite direction of the side column direction is not a grain boundary, it is considered that this point and the adjacent point in the opposite direction of the side column direction belong to the same grain, and the standard peak angle difference sequence D of this point S,i is taken to be the same as the standard peak angle difference sequence of adjacent points in the opposite direction to the side column direction;
步骤3:运用技术方案中步骤三所定义的方法分别判断该点前进方向和旁列方向相邻点与该点是否属于同一晶粒;若其中存在一点与其不为同一晶粒,则将该点置为晶界;Step 3: Use the method defined in step 3 of the technical plan to judge whether the adjacent points in the forward direction and side column direction of the point belong to the same grain as the point; Set as a grain boundary;
步骤4:根据步骤1确定的扫描方向,计算下一个点,重复步骤2 和步骤3,直到完成对扫描式劳厄衍射实验区域内所有点的遍历。Step 4: According to the scanning direction determined in step 1, calculate the next point, repeat step 2 and step 3, until the traversal of all points in the scanning Laue diffraction experiment area is completed.
技术方案中步骤四中所述的辐射式遍历法包括如下具体步骤:The radial traversal method described in
步骤1:在进行扫描式劳厄衍射实验的整个实验区域中未被判断的点中随机选取一个点作为指标化点,计算该点的标准峰角度差序列DS,i;Step 1: Randomly select a point from the unjudged points in the entire experimental area of the scanning Laue diffraction experiment as an index point, and calculate the standard peak angle difference sequence D S,i of this point;
步骤2:对本晶粒边界上的各点,若与之相邻的点不都为晶界,定义该点为可扩展点,而后运用技术要求中步骤二和步骤三所定义的方法判断该点和与之相邻的非晶界的点是否属于同一晶粒。若属于同一晶粒则,将该相邻点记录为本晶粒中的点,且此相邻点的标准峰角度差序列DS,i与可扩展点的标准峰角度差序列DS,i相同;若不属于则将该相邻点置为晶界。反复进行上述定义可扩建点与判断其是否为晶粒的操作,直到本晶粒边界上不存在可扩展点;Step 2: For each point on the grain boundary, if the adjacent points are not all grain boundaries, define this point as an expandable point, and then use the method defined in step 2 and step 3 in the technical requirements to judge the point Whether the point of the non-grain boundary and the point adjacent to it belong to the same grain. If they belong to the same grain, record the adjacent point as a point in this grain, and the standard peak angle difference sequence D S,i of the adjacent point is the same as the standard peak angle difference sequence D S ,i of the extensible point The same; if not, set the adjacent point as a grain boundary. Repeat the above operations of defining an expandable point and judging whether it is a grain until there is no expandable point on the boundary of the grain;
步骤3:反复进行步骤1和步骤2的操作,直到完成对扫描式劳厄衍射实验区域内所有点的遍历。Step 3: Repeat steps 1 and 2 until the traversal of all points in the scanning Laue diffraction experiment area is completed.
和现有技术相比较,本发明具备如下优点:Compared with the prior art, the present invention has the following advantages:
本发明方法可快速获得对扫描式劳厄衍射实验数据的可视化分析,且处理过程的计算量小;本方法较现有处理扫描式劳厄衍射的方法,整个数据处理过程耗时更短、消耗计算机资源少,使原需要在集群计算机上进行的集群计算在个人电脑上更进行普通计算即可完成。The method of the present invention can quickly obtain the visual analysis of the scanning Laue diffraction experimental data, and the calculation amount of the processing process is small; compared with the existing method for processing the scanning Laue diffraction, the entire data processing process takes less time and consumes less time. The computer resources are few, so that the cluster calculation that originally needs to be performed on the cluster computer can be completed by ordinary calculation on the personal computer.
附图说明Description of drawings
图1为本发明方法的流程图。Fig. 1 is the flowchart of the method of the present invention.
图2为实施例样品的[0 0 1]方向与样品表面法向的夹角。Fig. 2 is the included angle between the [0 0 1] direction and the normal direction of the sample surface of the samples of the examples.
图3为实施例中实验区域上A点对应衍射图谱与其上峰的标定。Fig. 3 is the calibration of the diffraction pattern corresponding to point A on the experimental area and its upper peak in the embodiment.
图4为实施例中实验区域上B点对应衍射图谱与其上峰的标定。Fig. 4 is the calibration of the diffraction pattern corresponding to point B on the experimental area and its upper peak in the embodiment.
图5为实施例中实验区域上C点对应衍射图谱与其上峰的标定。Fig. 5 is the calibration of the diffraction pattern corresponding to point C on the experimental region and its upper peak in the embodiment.
图6为实施例通过本发明得到的晶界分布结果。Fig. 6 is the grain boundary distribution result obtained by the present invention in the embodiment.
具体实施方法Specific implementation method
为使本发明的上述目的、特征和优点更加明显易懂,下面结合图2所示的实施例样品对本发明的具体实施方法做详细说明。In order to make the above-mentioned purpose, features and advantages of the present invention more obvious and easy to understand, the specific implementation method of the present invention will be described in detail below in conjunction with the example sample shown in FIG. 2 .
图2所示的实施例样品为304不锈钢,在图2中可以看到该样品中各点的晶体取向信息,明显可见晶界的分布情况。The example sample shown in Fig. 2 is 304 stainless steel. In Fig. 2, the crystal orientation information of each point in the sample can be seen, and the distribution of grain boundaries can be clearly seen.
如图1所示,本实施例基于峰间夹角比对的扫描式劳厄衍射图谱分析方法,包括如下步骤:As shown in Figure 1, the scanning Laue diffraction pattern analysis method based on the angle between peaks in this embodiment includes the following steps:
步骤一:运用公知的方法,对扫描式劳厄衍射实验所得的所有劳厄衍射图谱进行寻峰操作,得到每张劳厄衍射图谱上所有衍射峰的位置和积分强度。Step 1: Using a known method, perform a peak-finding operation on all the Laue diffraction patterns obtained from the scanning Laue diffraction experiment, and obtain the positions and integral intensities of all diffraction peaks on each Laue diffraction pattern.
步骤二:计算指标化点的劳厄衍射图谱上所有被标定衍射峰的标准峰角度差序列DS,i,包括如下具体操作步骤:Step 2: Calculate the standard peak angle difference sequence D S,i of all the calibrated diffraction peaks on the Laue diffraction pattern of the indexed point, including the following specific operation steps:
1)对指标化点对应的劳厄衍射图谱用公知的方法进行指标化计算,得到所有被标定衍射峰的位置、积分强度和晶面迷勒指数。取适当的计算包含峰数n=6,根据峰的积分强度,计算所有被标定衍射峰中积分强度最高的6个被标定衍射峰在探测器坐标系下的方向向量kS,i(1≤i≤6)。1) Perform indexing calculation on the Laue diffraction pattern corresponding to the indexing point by a known method, and obtain the positions, integral intensities and crystal plane Muller indices of all calibrated diffraction peaks. Take appropriate calculations including peak number n=6, according to the integrated intensity of the peaks, calculate the direction vector k S,i of the six calibrated diffraction peaks in the detector coordinate system with the highest integrated intensity among all the calibrated diffraction peaks (1≤ i≤6).
kS,i的计算方法为:读取探测器的空间转角α(pitch)、β(roll)、γ(yaw)。有The calculation method of k S,i is: read the space rotation angle α (pitch), β (roll) and γ (yaw) of the detector. Have
得到矩阵A后,读取该点样品上照射点到探测器平面的距离d,利用公式可得After obtaining the matrix A, read the distance d from the irradiation point on the sample to the detector plane, and use the formula to get
2)对方向向量kS,i,计算其与其他的方向向量的夹角,得到由5个夹角组成的标准角度差序列DS,i(1≤i≤6)。有2) For the direction vector k S,i , calculate the included angles between it and other direction vectors, and obtain the standard angle difference sequence D S,i (1≤i≤6) composed of 5 included angles. Have
步骤三:定义判定扫描式劳厄衍射实验区域内两点是否为同一晶粒的方法,包括如下具体操作步骤:Step 3: Define the method for judging whether two points in the scanning Laue diffraction experiment area are the same grain, including the following specific steps:
1)定义标准角度差序列DS,i已知的点为比较原点,标准角度差序列DS,i未知的点为被比较点。1) Define the point where the standard angle difference sequence D S,i is known as the comparison origin, and the point where the standard angle difference sequence D S,i is unknown is the compared point.
2)取扩展包含峰数Δn=4,根据衍射峰的积分强度,计算被比较点的劳厄衍射图谱中所有衍射峰中最强的10个衍射峰在探测器坐标系下的方向向量ki(1≤i≤10)。其计算方法与步骤二中所述方法相同。2) Take the number of peaks included in the extension Δn=4, and calculate the direction vector k i of the ten strongest diffraction peaks among all the diffraction peaks in the Laue diffraction pattern of the compared point in the detector coordinate system according to the integrated intensity of the diffraction peaks (1≤i≤10). Its calculation method is the same as that described in Step 2.
3)对方向向量ki,计算其与其他的方向向量的夹角,得到由9个夹角组成的比较角度差序列Di(1≤i≤9)。有3) For the direction vector k i , calculate the included angles between it and other direction vectors, and obtain a comparison angle difference sequence D i (1≤i≤9) composed of 9 included angles. Have
4)确定对于比较原点的每个标准角度差序列DS,i,是否存在一个被比较点的比较角度差序列Di与之对应。其具体方法如下:4) Determine whether there is a comparison angle difference sequence D i of the compared point corresponding to each standard angle difference sequence D S,i of the comparison origin. The specific method is as follows:
a)定义被比较点的比较角度差序列Di中的组元为δi,j。将其与比较原点的标准角度差序列DS,i中的组元δS,i,j进行比较。若a) Define the component in the comparison angle difference sequence D i of the compared point as δ i,j . Compare it with the component δ S,i,j in the standard angle difference sequence D S,i of the comparison origin. like
认为δi,j与δS,i,j相等。It is considered that δ i,j is equal to δ S,i,j .
b)假设Di与DS,i中相等的组元数为mi,若满足b) Assume that the number of equal components in D i and D S,i is m i , if satisfy
mi≥0.8·nm i ≥ 0.8·n
认为Di与DS,i对应,且其对应的峰也相对应。It is considered that D i corresponds to D S,i , and its corresponding peaks also correspond.
5)假设比较原点和被比较点相对应的Di与DS,i的总数为s,若满足5) Assuming that the total number of D i and D S,i corresponding to the comparison origin and the compared point is s, if it satisfies
s≥0.9·ns≥0.9·n
认为比较原点与被比较点属于同一晶粒。并将比较原点中被标定衍射峰的晶面米勒指数赋给被比较点中相对应的衍射峰,同时将被赋予晶面米勒指数也定义为被标定衍射峰。It is considered that the comparison origin and the compared point belong to the same grain. The crystal plane Miller index of the calibrated diffraction peak in the comparison origin is assigned to the corresponding diffraction peak in the compared point, and the crystal plane Miller index is also defined as the calibrated diffraction peak.
步骤四:对于本实施例,若选择扫描式遍历法对扫描式劳厄衍射实验扫描区域内所有点进行遍历。遍历开始前,将整个实验区域的边界置为晶界。Step 4: For this embodiment, if the scanning traversal method is selected, all points in the scanning area of the scanning Laue diffraction experiment are traversed. Before the traversal begins, the boundaries of the entire experimental region are set as grain boundaries.
1)定义扫描按由下至上,由左至右的方向进行。即由下至上为前进方向,由左至右为旁列方向。遍历过程从区域的左下角(A点)开始,A点的劳厄衍射图谱与标定的衍射峰如图3所示。1) Define the scan to proceed from bottom to top and from left to right. That is, from bottom to top is the forward direction, and from left to right is the side row direction. The traversal process starts from the lower left corner of the area (point A). The Laue diffraction pattern and the calibrated diffraction peaks at point A are shown in Figure 3.
2)从左下角开始,其下方和左侧都为晶界。该点即为指标化点,计算该点的标准峰角度差序列DS,i。运用步骤三定义的方法判断它 和它右侧(B点)的点为同一晶粒,B点的劳厄衍射图谱与标定的衍射峰如图4所示,但与其上方(C点)的点不为同一晶粒,C点的劳厄衍射图谱与标定的衍射峰如图5所示。该点即被置为晶界,其右侧点的标准峰角度差序列DS,i与之相同。2) Starting from the lower left corner, there are grain boundaries below and to the left. This point is the index point, and the standard peak angle difference sequence D S,i of this point is calculated. Use the method defined in step 3 to judge that it is the same crystal grain as the point on its right side (point B). The Laue diffraction pattern of point B and the calibrated diffraction peak are shown in Figure 4, but with the point above (point C) It is not the same crystal grain, the Laue diffraction pattern of point C and the calibrated diffraction peak are shown in Figure 5. This point is set as a grain boundary, and the standard peak angle difference sequence D S,i of the point on the right is the same as it.
3)以2)中所述的操作方法,按1)中的顺序,完成对实验区域内所有点的遍历。3) Complete the traversal of all points in the experimental area with the operation method described in 2) and in the order of 1).
对本实施例,若选择扫描式遍历法对扫描式劳厄衍射实验扫描区域内所有点进行遍历。遍历开始前,将整个实验区域的边界置为晶界。For this embodiment, if the scanning traversal method is selected, all points in the scanning area of the scanning Laue diffraction experiment are traversed. Before the traversal begins, the boundaries of the entire experimental region are set as grain boundaries.
1)在区域中未被判断的点中随机选取一个点作为指标化点。这里选择区域中的F点为指标化点。计算该点的标准峰角度差序列DS,i。1) Randomly select a point from the unjudged points in the area as the indexing point. Here, point F in the region is selected as the indexing point. Calculate the standard peak angle difference sequence D S,i of this point.
2)本晶粒的首个点其自身即为本晶粒边界上的点,且其不为晶界,运用步骤二和步骤三定义的方法判断其上下左右四个相邻点与其是否属于同一晶粒。发现其中左右下三个方向的相邻点与其为同一晶粒。则这三个点的标准峰角度差序列DS,i都与该点相同,为本晶粒中的点。之后以这三个相邻点为该晶粒的边界,而F点被置为晶界。再次比较本晶粒边界点的相邻的未被判断的点与其知否为同一晶粒,从而扩展该晶粒,直到该晶粒的边界都为晶界。2) The first point of this grain itself is a point on the boundary of this grain, and it is not a grain boundary. Use the method defined in step 2 and step 3 to judge whether its four adjacent points belong to the same grain. It is found that the adjacent points in the three directions of left, right, and bottom are the same grain as it. Then the standard peak angle difference sequence D S,i of these three points is the same as this point, which is a point in this grain. Then these three adjacent points are taken as the boundary of the grain, and point F is set as the grain boundary. Then compare the adjacent undetermined points of the present grain boundary point with whether they are the same grain, so as to expand the grain until the grain boundaries are all grain boundaries.
3)以1)和2)中所述的操作为例,反复进行,直到完成对扫描式劳厄衍射实验区域内所有点的遍历。3) Taking the operations described in 1) and 2) as an example, it is repeated until the traversal of all points in the scanning Laue diffraction experiment area is completed.
使用本发明方法得到的图2所示区域的晶界分布情况如图6所示,从图中可以看出,使用本方法得到的晶界分布与图2中所示的晶体取向分布相对应,说明本方法得到的结果正确。而对区域内的2550 张劳厄衍射图谱,仅对其中的108张进行的指标化计算,占4.23%,计算量远小于现有的方法。Use the grain boundary distribution of the region shown in Figure 2 that the inventive method obtains as shown in Figure 6, as can be seen from the figure, use the grain boundary distribution that this method obtains to correspond to the crystal orientation distribution shown in Figure 2, It shows that the result obtained by this method is correct. For the 2550 Laue diffraction patterns in the region, only 108 of them are indexed, accounting for 4.23%, and the amount of calculation is much smaller than the existing methods.
综上,本发明能够自动处理扫描式劳厄衍射图谱,降低了对降低了对扫描式劳厄衍射图谱进行分析计算所需的时间。是一种简单可行的方法。To sum up, the present invention can automatically process the scanning Laue diffraction pattern, reducing the time required for analysis and calculation of the scanning Laue diffraction pattern. It is a simple and feasible method.
至此,应用了具体个例对本发明的晶体扫描式劳厄衍射图谱的角度比较式分析方法的原理及实施方式进行了阐述,以上实施例的说明仅用于帮助理解本发明的方法及核心思想;同时,对于本领域的一般技术操作人员,在使用本发明时依据本发明的思想,在具体使用方式及范围上均存在改变之处。因此,本发明说明书不应理解为对本发明的应用方式及应用范围等的限制,本发明的保护范围应以权利要求书为准。So far, the principle and implementation of the angle comparison analysis method of the crystal scanning Laue diffraction pattern of the present invention have been described by using specific examples. The description of the above examples is only used to help understand the method and core idea of the present invention; At the same time, for ordinary technical operators in the field, when using the present invention, there are changes in the specific use method and scope according to the idea of the present invention. Therefore, the description of the present invention should not be interpreted as limiting the application mode and scope of the present invention, and the protection scope of the present invention should be determined by the claims.
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