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CN107228623A - absolute distance measurement method and system without guide rail - Google Patents

absolute distance measurement method and system without guide rail Download PDF

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Publication number
CN107228623A
CN107228623A CN201710413162.1A CN201710413162A CN107228623A CN 107228623 A CN107228623 A CN 107228623A CN 201710413162 A CN201710413162 A CN 201710413162A CN 107228623 A CN107228623 A CN 107228623A
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pulse sequence
target
interference signal
optical
light pulse
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方占军
林百科
曹士英
林弋戈
王强
赫明钊
孟飞
李烨
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National Institute of Metrology
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National Institute of Metrology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02015Interferometers characterised by the beam path configuration
    • G01B9/02027Two or more interferometric channels or interferometers
    • G01B9/02028Two or more reference or object arms in one interferometer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

本发明公开一种无导轨的绝对距离测量方法和系统,涉及激光测距领域。其中激光器输出具有不同中心波长和重复频率的第一和第二光脉冲序列,第一光学处理器件将第一光脉冲序列进行光谱扩展,以便使第一和第二光脉冲序列的光谱重叠;待测距装置使第一光脉冲序列分别通过目标镜和参考镜的反射,以生成目标脉冲序列和参考脉冲序列;光学干涉装置使第二光脉冲序列分别与目标脉冲序列和参考脉冲序列进行干涉,以生成目标干涉信号和参考干涉信号;信息处理装置利用目标干涉信号和参考干涉信号的相位谱线之差,得到目标臂和参考臂之间的距离差。本发明极大简化了测距系统复杂程度,使无导轨绝对测距方法可真正应用在实际测量场合。

The invention discloses a guide rail-free absolute distance measurement method and system, and relates to the field of laser distance measurement. Wherein the laser outputs first and second optical pulse sequences with different central wavelengths and repetition frequencies, and the first optical processing device performs spectrum expansion on the first optical pulse sequence so that the spectra of the first and second optical pulse sequences overlap; to be The distance measuring device makes the first light pulse sequence pass through the reflection of the target mirror and the reference mirror respectively to generate the target pulse sequence and the reference pulse sequence; the optical interference device makes the second light pulse sequence interfere with the target pulse sequence and the reference pulse sequence respectively, to generate a target interference signal and a reference interference signal; the information processing device obtains the distance difference between the target arm and the reference arm by using the difference between the phase spectrum lines of the target interference signal and the reference interference signal. The invention greatly simplifies the complexity of the distance measuring system, so that the absolute distance measuring method without guide rails can be truly applied to actual measurement occasions.

Description

无导轨的绝对距离测量方法和系统Absolute distance measurement method and system without guide rail

技术领域technical field

本发明涉及激光测距领域,特别涉及一种无导轨的绝对距离测量方法和系统。The invention relates to the field of laser ranging, in particular to an absolute distance measuring method and system without a guide rail.

背景技术Background technique

长度测量是最基本的测量,长度单位“米(m)”在国际单位制(SI)中被列为七个基本单位之一。大长度或大尺寸的精确测量在高端装备制造、空间工程和计量技术等领域有着广泛的应用,在前沿科学和先进技术的基础研究方面具有重要的科学意义。Length measurement is the most basic measurement, and the length unit "meter (m)" is listed as one of the seven basic units in the International System of Units (SI). The precise measurement of large length or large size has a wide range of applications in the fields of high-end equipment manufacturing, space engineering and metrology technology, and has important scientific significance in the basic research of cutting-edge science and advanced technology.

激光干涉法是长度测量中精度最高的方法,但传统的激光干涉仪通常采用增量式的位移测量方法,需要预先配备供测量镜移动的、长度至少大于被测距离的精密平直导轨,并且测量过程中条纹计数不能中断,这极大地限制了它的应用。在导轨不能铺设、导轨长距离平直度不够或者测量过程不能连续进行的场合,上述方法根本无法使用。因此,开展大长度、高精度的绝对距离测量技术研究及仪器研制,对提升我国重大精密工程、空间科学实验研究和精密计量技术的原始创新能力具有重要科学意义。Laser interferometry is the method with the highest precision in length measurement, but traditional laser interferometers usually use incremental displacement measurement methods, which need to be equipped with precision straight guide rails for the movement of the measuring mirror and whose length is at least greater than the measured distance, and The fringe count cannot be interrupted during the measurement, which greatly limits its application. In the occasions where the guide rail cannot be laid, the long-distance straightness of the guide rail is not enough, or the measurement process cannot be carried out continuously, the above method cannot be used at all. Therefore, carrying out large-length, high-precision absolute distance measurement technology research and instrument development is of great scientific significance for improving my country's original innovation capabilities in major precision engineering, space science experimental research, and precision metrology technology.

在绝对大长度测量领域,测量量程、测量精度和测量速度这三个要素是最受关注的重点。传统大长度绝对距离测量可分为飞行时间法和干涉测量法两大类。In the field of absolute large length measurement, the three elements of measurement range, measurement accuracy and measurement speed are the focus of most attention. Traditional large-length absolute distance measurement can be divided into two categories: time-of-flight method and interferometry method.

飞行时间法通过测量脉冲发射和返回之间的时间间隔来确定测量距离,虽然测量范围大,但是由于光速极快,电子器件直接测量时间间隔的精度难以突破皮秒量级,受到探测光脉冲到达时间精度的限制,距离测量精度只能达到毫米量级。The time-of-flight method determines the measurement distance by measuring the time interval between pulse emission and return. Although the measurement range is large, due to the extremely fast speed of light, it is difficult for the accuracy of electronic devices to directly measure the time interval to exceed the picosecond level. Due to the limitation of time accuracy, the distance measurement accuracy can only reach the order of millimeters.

传统的干涉测量法是基于迈克尔逊干涉仪结构的光路,通过测量参考臂和测量臂之间的光相位信息得到测量距离,测量分辨率最高可到纳米,但单纯相位分辨无法确定大于2π的整数周期因而量程受限,即使通过干涉条纹计数来得到被测距离的光波整周期倍数,也只适合于增量式的位移测量,无法实现绝对距离测量。The traditional interferometry method is based on the optical path of the Michelson interferometer structure. The measurement distance is obtained by measuring the optical phase information between the reference arm and the measurement arm. The measurement resolution can reach nanometers, but the pure phase resolution cannot determine integers greater than 2π The period is therefore limited in range. Even if the multiple of the entire period of the light wave of the measured distance is obtained by counting interference fringes, it is only suitable for incremental displacement measurement and cannot achieve absolute distance measurement.

在飞秒光梳出现之前,传统的干涉测量方法所使用的光源是单一频率的连续激光,而飞秒光梳出现改变了这一切,因为其在时域上看是脉宽极窄(飞秒量级,一飞秒等于10-15秒)的超短脉冲,而在频域上则对应为由多个离散谱线组成的宽光谱,相当于同时输出多个单频激光。因此飞秒光梳可以同时使用以上两种方法测距,从而兼顾绝对距离测量对量程和精度的要求,其中代表性的方法如飞秒脉冲光学平衡互相关法、合成波长法、光谱分辨干涉法。而基于两台重复频率略有差异的光梳来作为光源进行绝对距离测量方法,则是对传统的单光梳测距方法的重大革新。这种方法利用两台光梳之间的重复频率的微小差异,在时域上用其中一台光梳(本地光梳)的脉冲来异步扫描另一台光梳(信号光梳)的脉冲,得到异步采样信号并由此解算出待测距离。这种方法第一个优点是使时域测量过程“变慢”,降低了对探测器带宽要求,从而实现脉冲的时域探测,同时也扩大测量范围,测量无死角。同时,由于测量过程中两脉冲重合过程是自动实时并且周而复始的,不需要移动导轨等辅助机械设备,这是一种全新的绝对距离测量方法,有别于传统增量式的位移测量方法,并且由于测量速度取决于两脉冲重频之差,因此测量速度很快,有利于提高系统的实时性,便于实时反馈。因此,双光梳法不仅结合了普通单光梳方法兼具大量程和高精度测量的特点,而且还具有很快的测量速度,真正把长度测量的三大要素——量程、精度和速度三者完美结合在一起,并且有别于传统增量式的位移测量方法,这是一种绝对距离测量方法,不需要移动导轨等机械器件,避免由此引入的误差。但这种方法对两台光梳的相干性有着很苛刻的要求,通常做法是将两台光梳锁定到超稳腔来压窄光梳梳齿的线宽,如美国NIST的Coddington等人利于这种方法实现了测量了一段约1.14km长光纤的长度,测量精度达到5nm。但由于系统要实现高精度,同时需要光梳锁定和超稳激光技术,技术门槛高、操作复杂,实现极其困难。Before the femtosecond optical comb appeared, the light source used in the traditional interferometry method was a single-frequency continuous laser, but the appearance of the femtosecond optical comb changed all this, because it has an extremely narrow pulse width in the time domain (femtosecond On the order of magnitude, one femtosecond is equal to 10 -15 seconds) ultrashort pulse, and in the frequency domain, it corresponds to a wide spectrum composed of multiple discrete spectral lines, which is equivalent to simultaneously outputting multiple single-frequency lasers. Therefore, the femtosecond optical comb can use the above two methods to measure distance at the same time, so as to take into account the requirements of absolute distance measurement for range and accuracy. Representative methods such as femtosecond pulse optical balance cross-correlation method, synthetic wavelength method, spectral resolution interferometry . The absolute distance measurement method based on two optical combs with slightly different repetition frequencies as the light source is a major innovation to the traditional single optical comb distance measurement method. This method utilizes the slight difference in the repetition frequency between two optical combs, and uses the pulses of one optical comb (local optical comb) to asynchronously scan the pulses of the other optical comb (signal optical comb) in the time domain, The asynchronous sampling signal is obtained and the distance to be measured is calculated from it. The first advantage of this method is that it "slows down" the time-domain measurement process and reduces the requirements for the detector bandwidth, thereby realizing the time-domain detection of pulses, and at the same time expanding the measurement range without dead ends. At the same time, since the two-pulse coincidence process is automatic, real-time and repeated in the measurement process, there is no need to move auxiliary mechanical equipment such as guide rails. This is a new absolute distance measurement method, which is different from the traditional incremental displacement measurement method, and Because the measurement speed depends on the difference between the two pulse repetition frequencies, the measurement speed is very fast, which is beneficial to improve the real-time performance of the system and facilitate real-time feedback. Therefore, the dual-comb method not only combines the characteristics of large-scale and high-precision measurement of the ordinary single-comb method, but also has a very fast measurement speed. It truly combines the three elements of length measurement—range, accuracy and speed. The two are perfectly combined together, and different from the traditional incremental displacement measurement method, this is an absolute distance measurement method that does not need to move mechanical devices such as guide rails to avoid errors introduced thereby. However, this method has very strict requirements on the coherence of the two optical combs. The usual method is to lock the two optical combs to the ultra-stable cavity to narrow the linewidth of the comb teeth of the optical comb. For example, Coddington et al. This method realizes the measurement of the length of a section of optical fiber about 1.14km long, and the measurement accuracy reaches 5nm. However, since the system needs to achieve high precision, optical comb locking and ultra-stable laser technology are required at the same time, the technical threshold is high, the operation is complicated, and it is extremely difficult to realize.

发明内容Contents of the invention

本发明实施例提供一种无导轨的绝对距离测量方法和系统,Embodiments of the present invention provide a method and system for measuring absolute distance without a guide rail,

为了解决传统的测距方法中,时间分辨率不高、需要增量式位移测量,难以获取绝对距离信息的问题,同时为了克服了传统双光梳测距方法系统复杂、操作繁琐的缺点,本发明提出一种能够输出两套重复频率有微小差别的脉冲序列作为测距光源搭建的双波长脉冲绝对测距系统,既克服了传统测距方法的弊端,实现大量程、高精度、快速实时测量。In order to solve the problems of low time resolution, incremental displacement measurement and difficulty in obtaining absolute distance information in the traditional ranging method, and to overcome the shortcomings of the traditional dual-comb ranging method with complex system and cumbersome operation, this paper The invention proposes a dual-wavelength pulse absolute ranging system that can output two sets of pulse sequences with slight differences in repetition frequency as a ranging light source. .

根据本发明的一个方面,提供一种无导轨的绝对距离测量系统,包括:According to one aspect of the present invention, there is provided a guide rail-less absolute distance measuring system, comprising:

激光器,用于输出光脉冲序列,其中光脉冲序列中包括具有不同的中心波长和重复频率的第一光脉冲序列和第二光脉冲序列;A laser for outputting a sequence of optical pulses, wherein the sequence of optical pulses includes a first sequence of optical pulses and a second sequence of optical pulses with different center wavelengths and repetition frequencies;

第一光学处理器件,用于从激光器输出的光脉冲序列中分离出第一光脉冲序列和第二光脉冲序列,将第一光脉冲序列进行光谱扩展,以便使第一光脉冲序列和第二光脉冲序列的光谱重叠;The first optical processing device is used to separate the first optical pulse sequence and the second optical pulse sequence from the optical pulse sequence output by the laser, and perform spectrum expansion on the first optical pulse sequence so as to make the first optical pulse sequence and the second optical pulse sequence Spectral overlap of light pulse trains;

待测距装置,用于使光谱扩展后的第一光脉冲序列分别通过待测距装置中的目标镜和参考镜的反射,以生成目标脉冲序列和参考脉冲序列;The distance-measuring device is used to make the first optical pulse sequence after spectrum expansion pass through the reflection of the target mirror and the reference mirror in the distance-measuring device respectively, so as to generate the target pulse sequence and the reference pulse sequence;

光学干涉装置,用于使第二光脉冲序列分别与目标脉冲序列和参考脉冲序列进行干涉,以生成目标干涉信号和参考干涉信号;An optical interference device, used to make the second optical pulse sequence interfere with the target pulse sequence and the reference pulse sequence respectively, so as to generate the target interference signal and the reference interference signal;

信息处理装置,用于采集目标干涉信号和参考干涉信号,并利用目标干涉信号和参考干涉信号的相位谱线之差,得到目标镜对应的目标臂和参考镜对应的参考臂之间的距离差。The information processing device is used to collect the target interference signal and the reference interference signal, and use the difference between the phase lines of the target interference signal and the reference interference signal to obtain the distance difference between the target arm corresponding to the target mirror and the reference arm corresponding to the reference mirror .

在一个实施例中,上述系统还包括:In one embodiment, the above system also includes:

第二光学处理器件,用于将第二光脉冲序列分为第一本地脉冲序列和第二本地脉冲序列,以便光学干涉装置使用第一本地脉冲序列分别与目标脉冲序列和参考脉冲序列进行干涉。The second optical processing device is used to divide the second optical pulse sequence into a first local pulse sequence and a second local pulse sequence, so that the optical interference device uses the first local pulse sequence to interfere with the target pulse sequence and the reference pulse sequence respectively.

在一个实施例中,第一本地脉冲序列的光功率小于第二本地脉冲序列的光功率。In one embodiment, the optical power of the first local pulse sequence is less than the optical power of the second local pulse sequence.

在一个实施例中,上述系统还包括光电探测器,用于探测第二本地脉冲序列的重复频率,以作为信息处理装置的信号采集时钟信号。In one embodiment, the above system further includes a photodetector for detecting the repetition frequency of the second local pulse sequence to be used as a signal acquisition clock signal of the information processing device.

在一个实施例中,信息处理装置用于在时域上采集目标干涉信号和参考干涉信号,分别对采集的目标干涉信号和参考干涉信号进行时频域变换,以分别得到目标干涉信号对应的第一相位谱线和参考干涉信号对应的第二相位谱线,通过利用第一相位谱线和第二相位谱线之差,得到目标臂和参考臂之间的距离差。In one embodiment, the information processing device is used to collect the target interference signal and the reference interference signal in the time domain, respectively perform time-frequency domain transformation on the collected target interference signal and the reference interference signal, so as to obtain the first A phase spectrum line and a second phase spectrum line corresponding to the reference interference signal, by using the difference between the first phase spectrum line and the second phase spectrum line, the distance difference between the target arm and the reference arm is obtained.

在一个实施例中,第一相位谱线和第二相位谱线之差与目标臂和参考臂之间的距离差成正比。In one embodiment, the difference between the first phase spectrum line and the second phase spectrum line is proportional to the distance difference between the target arm and the reference arm.

根据本发明的另一方面,提供一种无导轨的绝对距离测量方法,包括:According to another aspect of the present invention, there is provided a method for measuring absolute distance without a guide rail, comprising:

激光器输出光脉冲序列,其中光脉冲序列中包括具有不同的中心波长和重复频率的第一光脉冲序列和第二光脉冲序列;The laser outputs an optical pulse sequence, wherein the optical pulse sequence includes a first optical pulse sequence and a second optical pulse sequence having different central wavelengths and repetition frequencies;

第一光学处理器件从激光器输出的光脉冲序列中分离出第一光脉冲序列和第二光脉冲序列,将第一光脉冲序列进行光谱扩展,以便使第一光脉冲序列和第二光脉冲序列的光谱重叠;The first optical processing device separates the first optical pulse sequence and the second optical pulse sequence from the optical pulse sequence output by the laser, and performs spectrum expansion on the first optical pulse sequence, so that the first optical pulse sequence and the second optical pulse sequence spectral overlap;

待测距装置使光谱扩展后的第一光脉冲序列分别通过待测距装置中的目标镜和参考镜的反射,以生成目标脉冲序列和参考脉冲序列;The distance-measuring device makes the first light pulse sequence after spectrum expansion pass through the reflection of the target mirror and the reference mirror in the distance-measuring device respectively, so as to generate the target pulse sequence and the reference pulse sequence;

光学干涉装置使第二光脉冲序列分别与目标脉冲序列和参考脉冲序列进行干涉,以生成目标干涉信号和参考干涉信号;The optical interference device makes the second optical pulse sequence interfere with the target pulse sequence and the reference pulse sequence respectively, so as to generate the target interference signal and the reference interference signal;

信息处理装置采集目标干涉信号和参考干涉信号,并利用目标干涉信号和参考干涉信号的相位谱线之差,得到目标镜对应的目标臂和参考镜对应的参考臂之间的距离差。The information processing device collects the target interference signal and the reference interference signal, and uses the difference between the phase spectrum lines of the target interference signal and the reference interference signal to obtain the distance difference between the target arm corresponding to the target mirror and the reference arm corresponding to the reference mirror.

在一个实施例中,第二光学处理器件将第二光脉冲序列分为第一本地脉冲序列和第二本地脉冲序列,以便光学干涉装置使用第一本地脉冲序列分别与目标脉冲序列和参考脉冲序列进行干涉。In one embodiment, the second optical processing device divides the second optical pulse sequence into a first local pulse sequence and a second local pulse sequence, so that the optical interference device uses the first local pulse sequence to compare with the target pulse sequence and the reference pulse sequence respectively Intervene.

在一个实施例中,第一本地脉冲序列的光功率小于第二本地脉冲序列的光功率。In one embodiment, the optical power of the first local pulse sequence is less than the optical power of the second local pulse sequence.

在一个实施例中,光电探测器探测第二本地脉冲序列的重复频率,以作为信息处理装置的信号采集时钟信号。In one embodiment, the photodetector detects the repetition frequency of the second local pulse sequence to serve as a signal acquisition clock signal of the information processing device.

在一个实施例中,信息处理装置在时域上采集目标干涉信号和参考干涉信号;In one embodiment, the information processing device collects the target interference signal and the reference interference signal in the time domain;

分别对采集的目标干涉信号和参考干涉信号进行时频域变换,以分别得到目标干涉信号对应的第一相位谱线和参考干涉信号对应的第二相位谱线;respectively performing time-frequency domain transformation on the collected target interference signal and the reference interference signal to respectively obtain the first phase spectrum line corresponding to the target interference signal and the second phase spectrum line corresponding to the reference interference signal;

通过利用第一相位谱线和第二相位谱线之差,得到目标臂和参考臂之间的距离差。By using the difference between the first phase spectrum line and the second phase spectrum line, the distance difference between the target arm and the reference arm is obtained.

在一个实施例中,第一相位谱线和第二相位谱线之差与目标臂和参考臂之间的距离差成正比。In one embodiment, the difference between the first phase spectrum line and the second phase spectrum line is proportional to the distance difference between the target arm and the reference arm.

通过以下参照附图对本发明的示例性实施例的详细描述,本发明的其它特征及其优点将会变得清楚。Other features of the present invention and advantages thereof will become apparent from the following detailed description of exemplary embodiments of the present invention with reference to the accompanying drawings.

附图说明Description of drawings

为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动性的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only These are some embodiments of the present invention. For those skilled in the art, other drawings can also be obtained according to these drawings without any creative effort.

图1为本发明无导轨的绝对距离测量系统一个实施例的示意图。Fig. 1 is a schematic diagram of an embodiment of the absolute distance measuring system without a guide rail of the present invention.

图2为本发明无导轨的绝对距离测量系统另一实施例的示意图。FIG. 2 is a schematic diagram of another embodiment of the absolute distance measuring system without guide rails of the present invention.

图3为本发明无导轨绝对距离测量系统配置一个实施例的示意图。Fig. 3 is a schematic diagram of an embodiment of the configuration of the absolute distance measuring system without guide rails of the present invention.

图4为本发明无导轨的绝对距离测量方法一个实施例的示意图。Fig. 4 is a schematic diagram of an embodiment of the method for measuring absolute distance without a guide rail according to the present invention.

具体实施方式detailed description

下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。以下对至少一个示例性实施例的描述实际上仅仅是说明性的,决不作为对本发明及其应用或使用的任何限制。基于本发明中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. The following description of at least one exemplary embodiment is merely illustrative in nature and in no way taken as limiting the invention, its application or uses. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

除非另外具体说明,否则在这些实施例中阐述的部件和步骤的相对布置、数字表达式和数值不限制本发明的范围。The relative arrangements of components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise.

同时,应当明白,为了便于描述,附图中所示出的各个部分的尺寸并不是按照实际的比例关系绘制的。At the same time, it should be understood that, for the convenience of description, the sizes of the various parts shown in the drawings are not drawn according to the actual proportional relationship.

对于相关领域普通技术人员已知的技术、方法和设备可能不作详细讨论,但在适当情况下,所述技术、方法和设备应当被视为授权说明书的一部分。Techniques, methods and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, such techniques, methods and devices should be considered part of the Authorized Specification.

在这里示出和讨论的所有示例中,任何具体值应被解释为仅仅是示例性的,而不是作为限制。因此,示例性实施例的其它示例可以具有不同的值。In all examples shown and discussed herein, any specific values should be construed as exemplary only, and not as limitations. Therefore, other examples of the exemplary embodiment may have different values.

应注意到:相似的标号和字母在下面的附图中表示类似项,因此,一旦某一项在一个附图中被定义,则在随后的附图中不需要对其进行进一步讨论。It should be noted that like numerals and letters denote like items in the following figures, therefore, once an item is defined in one figure, it does not require further discussion in subsequent figures.

图1为本发明无导轨的绝对距离测量系统一个实施例的示意图。如图1所示,该测量系统包括:Fig. 1 is a schematic diagram of an embodiment of the absolute distance measuring system without a guide rail of the present invention. As shown in Figure 1, the measurement system includes:

激光器1用于输出光脉冲序列,其中光脉冲序列中包括具有不同的中心波长和重复频率的第一光脉冲序列和第二光脉冲序列,第一光脉冲序列和第二光脉冲序列的重复频率有微小差别。The laser 1 is used to output an optical pulse sequence, wherein the optical pulse sequence includes a first optical pulse sequence and a second optical pulse sequence with different center wavelengths and repetition frequencies, and the repetition frequency of the first optical pulse sequence and the second optical pulse sequence is There are minor differences.

第一光学处理器件2用于从激光器1输出的光脉冲序列中分离出第一光脉冲序列和第二光脉冲序列,将第一光脉冲序列进行光谱扩展,以便使第一光脉冲序列和第二光脉冲序列的光谱重叠。The first optical processing device 2 is used to separate the first optical pulse sequence and the second optical pulse sequence from the optical pulse sequence output by the laser 1, and perform spectrum expansion on the first optical pulse sequence, so that the first optical pulse sequence and the second optical pulse sequence Spectral overlap of two light pulse trains.

待测距装置3用于使光谱扩展后的第一光脉冲序列分别通过待测距装置中的目标镜和参考镜的反射,以生成目标脉冲序列和参考脉冲序列。The distance-measuring device 3 is configured to make the spectrum-expanded first optical pulse sequence be reflected by the target mirror and the reference mirror in the distance-measuring device respectively, so as to generate a target pulse sequence and a reference pulse sequence.

可选地,待测距装置3可为迈克尔逊干涉仪。其中在待测距装置3中,第一光脉冲序列分别通过待测距装置中的目标镜和参考镜的反射,以生成通过目标臂的目标脉冲序列和通过参考臂的参考脉冲序列。Optionally, the distance-measuring device 3 may be a Michelson interferometer. In the distance-measuring device 3, the first light pulse sequence is reflected by the target mirror and the reference mirror in the distance-measuring device respectively, so as to generate a target pulse sequence passing through the target arm and a reference pulse sequence passing through the reference arm.

由于迈克尔逊干涉仪是本领域技术人员所了解的,因此这里不展开描述。Since Michelson interferometers are known to those skilled in the art, they will not be described here.

光学干涉装置4用于使第二光脉冲序列分别与目标脉冲序列和参考脉冲序列进行干涉,以生成目标干涉信号和参考干涉信号。The optical interference device 4 is used to make the second optical pulse sequence interfere with the target pulse sequence and the reference pulse sequence respectively, so as to generate a target interference signal and a reference interference signal.

信息处理装置5用于采集目标干涉信号和参考干涉信号,并利用目标干涉信号和参考干涉信号的相位谱线之差,得到目标镜对应的目标臂和参考镜对应的参考臂之间的距离差。The information processing device 5 is used to collect the target interference signal and the reference interference signal, and use the difference between the phase lines of the target interference signal and the reference interference signal to obtain the distance difference between the target arm corresponding to the target mirror and the reference arm corresponding to the reference mirror .

基于本发明上述实施例提供的无导轨的绝对距离测量系统,通过利用能够输出两套重复频率有微小差别的脉冲序列作为测距光源搭建的双波长脉冲绝对测距系统,既克服了传统测距方法的弊端,实现大量程、高精度、快速实时测量。Based on the guide rail-less absolute distance measurement system provided by the above-mentioned embodiments of the present invention, the dual-wavelength pulse absolute distance measurement system built by using two sets of pulse sequences that can output two sets of pulse sequences with slight differences in repetition frequency as the distance measurement light source overcomes the traditional distance measurement The shortcomings of the method are realized to achieve large-range, high-precision, fast and real-time measurement.

可选地,信息处理装置5在时域上采集目标干涉信号和参考干涉信号,分别对采集的目标干涉信号和参考干涉信号进行时频域变换,以分别得到目标干涉信号对应的第一相位谱线和参考干涉信号对应的第二相位谱线,通过利用第一相位谱线和第二相位谱线之差,得到目标臂和参考臂之间的距离差。Optionally, the information processing device 5 collects the target interference signal and the reference interference signal in the time domain, and performs time-frequency domain transformation on the collected target interference signal and the reference interference signal respectively to obtain the first phase spectrum corresponding to the target interference signal line and the second phase spectrum line corresponding to the reference interference signal, by using the difference between the first phase spectrum line and the second phase spectrum line, the distance difference between the target arm and the reference arm is obtained.

其中,第一相位谱线和第二相位谱线之差与目标臂和参考臂之间的距离差成正比。Wherein, the difference between the first phase spectrum line and the second phase spectrum line is proportional to the distance difference between the target arm and the reference arm.

图2为本发明无导轨的绝对距离测量系统一个实施例的示意图。与图1所示实施例相比,在图2中,该测量系统还进一步包括:Fig. 2 is a schematic diagram of an embodiment of the absolute distance measuring system without guide rails of the present invention. Compared with the embodiment shown in Figure 1, in Figure 2, the measurement system further includes:

第二光学处理器件6用于将第二光脉冲序列分为第一本地脉冲序列和第二本地脉冲序列,以便光学干涉装置4使用第一本地脉冲序列分别与目标脉冲序列和参考脉冲序列进行干涉。The second optical processing device 6 is used to divide the second optical pulse sequence into a first local pulse sequence and a second local pulse sequence, so that the optical interference device 4 uses the first local pulse sequence to interfere with the target pulse sequence and the reference pulse sequence respectively .

可选地,第一本地脉冲序列的光功率小于第二本地脉冲序列的光功率。例如,第一本地脉冲序列与第二本地脉冲序列的光功率之比为3:7。Optionally, the optical power of the first local pulse sequence is smaller than the optical power of the second local pulse sequence. For example, the optical power ratio of the first local pulse sequence to the second local pulse sequence is 3:7.

此外,在图2所示实施例中,还包括光电探测器7,用于探测第二本地脉冲序列的重复频率,以作为信息处理装置5的信号采集时钟信号。In addition, in the embodiment shown in FIG. 2 , a photodetector 7 is also included for detecting the repetition frequency of the second local pulse sequence, so as to serve as a signal acquisition clock signal of the information processing device 5 .

下面通过一个具体示例对本发明进行说明。The present invention will be described below through a specific example.

如图3所示,激光器301为双波长锁模激光器,它能产生两路有微小重频差的锁模光脉冲序列。在光谱仪上看这两路脉冲序列,分别隶属于两个相邻的光谱峰值,其中心波长分别为1533nm和1542nm(实际的波长值可随着锁模状态不同会有所区别),正是由于不同光波长对腔内折射率的差异,最终导致了这两个中心波长不同的脉冲序列其各自对应重频的差异。在利用这个光源进行测量之前,通过CWDM波分复用器302将这两个脉冲序列分离开来。这里选取其中一路脉冲序列(这里定为1542nm)作为第一光脉冲序列,另一路脉冲序列(1533nm)作为实施异步采样的第二光脉冲序列。通过掺铒光纤放大器EDFA 303将第一光脉冲序列放大和光谱展宽后,使其光谱能够覆盖到1533nm波段,再通过一3dB宽度约0.8nm的窄带滤波器304,只保留第一光脉冲序列在1533nm附近的光谱。As shown in FIG. 3 , the laser 301 is a dual-wavelength mode-locked laser, which can generate two mode-locked optical pulse sequences with a slight repetition frequency difference. Looking at the two pulse sequences on the spectrometer, they belong to two adjacent spectral peaks, and their central wavelengths are 1533nm and 1542nm respectively (the actual wavelength value may vary with the mode-locking state), precisely because The difference of different light wavelengths to the refractive index in the cavity finally leads to the difference of the respective repetition frequencies of the two pulse sequences with different center wavelengths. The two pulse trains are separated by a CWDM wavelength division multiplexer 302 before taking measurements with this light source. Here, one of the pulse sequences (1542nm here) is selected as the first optical pulse sequence, and the other pulse sequence (1533nm) is selected as the second optical pulse sequence for asynchronous sampling. After the first optical pulse sequence is amplified and the spectrum is broadened by the erbium-doped fiber amplifier EDFA 303, its spectrum can cover the 1533nm wave band, and then pass through a narrow-band filter 304 with a 3dB width of about 0.8nm, and only the first optical pulse sequence is kept in the Spectrum near 1533nm.

其次,将这个放大滤波后的光脉冲序列,通过光纤准直器(FC)305转化为空间光,进入到一个迈克尔逊干涉仪结构的空间光路。这样,经过偏振分光棱镜PBS 306和干涉仪参考镜307之间的光路(参考臂),以及偏振分光棱镜PBS 306和目标镜308之间的光路(目标臂),参考镜307和目标镜308分别反射回参考脉冲和目标脉冲。这两个脉冲序列在干涉仪的尾端合束在一起,通过准直器(FC)耦合进光纤,进入一根2×2的光纤耦合器309其中一个输入端,同时通过光纤耦合器311将第二光脉冲序列分出一部分功率(30%)接入该耦合器309的另一个输入端,而耦合器309的输出端则接入平衡探测器(BPD)310。将第二光脉冲序列剩下的功率(70%),用光电探测器(PD)312探测,可以得到其重频fr1,经过滤波器(LPF)313和电学放大器(AMP)314后,作为高速AD采集卡315的外时钟信号。Secondly, the amplified and filtered optical pulse sequence is converted into spatial light through a fiber collimator (FC) 305, and enters into a spatial optical path of a Michelson interferometer structure. In this way, through the optical path (reference arm) between the polarization beam splitting prism PBS 306 and the interferometer reference mirror 307, and the optical path (target arm) between the polarization beam splitting prism PBS 306 and the objective mirror 308, the reference mirror 307 and the objective mirror 308 are respectively Reflected back to the reference pulse and the target pulse. These two pulse sequences are bundled together at the tail end of the interferometer, coupled into an optical fiber through a collimator (FC), and enter one of the input ends of a 2×2 fiber coupler 309, and simultaneously pass through a fiber coupler 311 Part of the power (30%) of the second optical pulse sequence is connected to the other input terminal of the coupler 309 , and the output terminal of the coupler 309 is connected to a balanced detector (BPD) 310 . The remaining power (70%) of the second optical pulse sequence is detected by a photodetector (PD) 312, and its repetition frequency f r1 can be obtained. After passing through a filter (LPF) 313 and an electrical amplifier (AMP) 314, it is obtained as The external clock signal of the high-speed AD acquisition card 315.

随后,干涉图分析模块316将采集得到的两路干涉信号,在时域上截取并分离开,分别计算对其做傅里叶变换,求出各自对应的相位谱。将两个相位谱上各自对应傅里叶频率上的相位值相减,得到反映两路信号相位差的相位谱图,并通过该相位谱图计算待测距离。Subsequently, the interferogram analysis module 316 intercepts and separates the collected two-way interference signals in the time domain, calculates and performs Fourier transform on them respectively, and obtains their corresponding phase spectra. The phase values corresponding to the Fourier frequencies on the two phase spectra are subtracted to obtain a phase spectrogram reflecting the phase difference of the two signals, and the distance to be measured is calculated through the phase spectrogram.

相关理论分析和算法如下:The relevant theoretical analysis and algorithm are as follows:

如图3所示,CWDM波分复用器302分离出来的1542nm脉冲序列(信号脉冲)和1533nm脉冲序列(本地脉冲),其电场表达式可分别表示为:As shown in Figure 3, the electric field expressions of the 1542nm pulse sequence (signal pulse) and the 1533nm pulse sequence (local pulse) separated by the CWDM wavelength division multiplexer 302 can be expressed as:

这其中,Eref(t)和Etar(t)分别代表1542nm脉冲序列(信号脉冲)经过迈克尔逊干涉仪参考臂和测量臂返回的脉冲序列,fr和f01分别为其重复频率和系统频移,τ代表测量臂和参考臂之间的延时。而ELO(t)代表1533nm脉冲序列(本地脉冲),fr+Δfr和f02分别为其重复频率和系统频移。因此,当公式(1)和(2)所涉及的信号分别与公式(3)所涉及的电场相干涉时,在光电探测器上得到参考臂干涉信号和测量臂干涉信号可以分别表示为:Among them, E ref (t) and E tar (t) respectively represent the pulse sequence returned by the 1542nm pulse sequence (signal pulse) through the Michelson interferometer reference arm and measurement arm, f r and f 01 are the repetition frequency and system Frequency shift, τ represents the delay between the measurement arm and the reference arm. And E LO (t) represents 1533nm pulse sequence (local pulse), f r + Δfr and f 02 are its repetition frequency and system frequency shift respectively. Therefore, when the signals involved in formulas (1) and (2) interfere with the electric field involved in formula (3), the interference signal of the reference arm and the interference signal of the measuring arm obtained on the photodetector can be expressed as:

Iref=(Eref+ELO)(Eref+ELO)* (4)I ref = (E ref +E LO )(E ref +E LO ) * (4)

Itar=(Etar+ELO)(Etar+ELO)* (5)I tar =(E tar +E LO )(E tar +E LO ) * (5)

将公式(1)、(2)和(3)代入公式(4)、(5),由于采取了平衡探测的方法,公式(4)、(5)中展开的直流平方分项将被消除,只剩下相关分项ErefELO或者EtarELO。并且通过低通滤波滤除高频成分,只保留零到0.5fr的频率成分。因此,最后通过数据采集卡(AD)采样得到的参考臂干涉信号和测量臂干涉信号的电场可表示为:Substituting formulas (1), (2) and (3) into formulas (4) and (5), due to the balanced detection method, the DC square sub-item expanded in formulas (4) and (5) will be eliminated, Only the relevant sub-items E ref E LO or E tar E LO remain. And the high-frequency components are filtered out by low-pass filtering, and only the frequency components from zero to 0.5fr are retained. Therefore, the electric field of the reference arm interference signal and the measurement arm interference signal obtained by sampling the data acquisition card (AD) can be expressed as:

其中,i的取值范围为0到N/2,N通常被称为转换因子,其值等于(fr+Δfr)/ΔfrWherein, the value of i ranges from 0 to N/2, and N is usually called a conversion factor, and its value is equal to (f r +Δf r )/Δf r .

通常情况下,m和n并不相等,所以i和m或者n并不相等。但如果fr、Δfr、f01和f02是确定的话,公式(7)中的i和m存在唯一对应关系。根据公式(6)和(7),得到测量臂和参考臂对应谱线的相位差表达式:Normally, m and n are not equal, so i is not equal to m or n. But if f r , Δfr , f 01 and f 02 are determined, there is a unique correspondence between i and m in formula (7). According to formulas (6) and (7), the phase difference expressions of the corresponding spectral lines of the measuring arm and the reference arm are obtained:

式中L代表测量臂和参考臂之间的距离差,也即待测距离。c为真空光速,ng为空气折射率修正值。公式(8)即为第三步最终得到的测量臂干涉信号和参考臂干涉信号的相位差谱图。根据该公式(8),很容易得知该相位差谱图为一线性曲线:其中φ(0)为曲线在纵轴的截距,根据公式(8),也即序数i为零时,光频mfr+f01经过待测距离所历经的光相位变化,如前所述如果fr、Δfr、f01和f02是确定的,则光频mfr+f01是唯一确定的,b为该曲线的斜率。具体求解待测距离的方法如下:In the formula, L represents the distance difference between the measuring arm and the reference arm, that is, the distance to be measured. c is the speed of light in vacuum, and n g is the correction value of the air refractive index. Formula (8) is the phase difference spectrum of the measurement arm interference signal and the reference arm interference signal finally obtained in the third step. According to the formula (8), it is easy to know that the phase difference spectrum is a linear curve: Among them, φ(0) is the intercept of the curve on the vertical axis. According to the formula (8), that is, when the ordinal number i is zero, the light frequency mf r + f 01 passes through the distance to be measured. The light phase change experienced, as mentioned above If f r , Δfr , f 01 and f 02 are determined, then the optical frequency mfr + f 01 is uniquely determined, and b is the slope of the curve. The specific method to solve the distance to be measured is as follows:

第一步采用飞行时间法求解待测距离粗测值。通过斜率b计算待测距离粗测值,根据公式(8),求解斜率The first step is to use the time-of-flight method to solve the rough value of the distance to be measured. Calculate the rough value of the distance to be measured through the slope b, and solve the slope according to the formula (8)

则被测距离粗测值为:Then the rough value of the measured distance is:

在长度测量领域,我们一般把测量系统的最大量程,称为模糊范围。由公式(9)可知飞行时间法测距的模糊范围为In the field of length measurement, we generally refer to the maximum range of the measurement system as the fuzzy range. From the formula (9), it can be known that the fuzzy range of the time-of-flight method is

以重频fr=58MHz为例,模糊范围约为2.6m,即该法所能测量的最大量程。Taking the repetition frequency f r =58MHz as an example, the fuzzy range is about 2.6m, which is the maximum range that can be measured by this method.

第二步利用干涉法来求解距离精测值。根据激光干涉法测距的原理,待测距离精测值可表示为:The second step uses the interferometry method to solve the distance precision value. According to the principle of laser interferometry ranging, the precise value of the distance to be measured can be expressed as:

λ0为光频mfr+f01对应的波长值,大数k由上一步粗测值Ltof决定,其必要条件是Ltof的不确定度至少优于λ0/2。公式(10)中值是小于2π整周期倍数的部分,即φ(0)除以2π所得余数。由公式(10)可知该干涉法模糊范围为λ02,达到光波长量级的分辨力。λ 0 is the wavelength value corresponding to the optical frequency mf r + f 01 , and the large number k is determined by the roughly measured value L tof in the previous step. The necessary condition is that the uncertainty of L tof is at least better than λ 0 /2. In formula (10) value is The part that is less than the multiple of the full period of 2π, that is, the remainder obtained by dividing φ(0) by 2π. From formula (10), it can be seen that the fuzzy range of the interferometry is λ 0 2, which reaches the resolution of light wavelength order.

第三步利用游标原理扩展最大量程。综上所述即使采用飞行时间法,其最大量程也仅到m量级,无法应对更长距离的测量。可通过游标原理来扩展量程,具体方法是,先通过原系统测量得到距离L1,然后交换两脉冲序列的角色(即1533nm脉冲序列作为信号脉冲,1542nm脉冲序列作为本地脉冲),重新测量得到距离L2。则两次测量结果可以表示为:The third step is to use the cursor principle to expand the maximum range. To sum up, even if the time-of-flight method is adopted, its maximum measurement range is only on the order of m, which cannot cope with longer-distance measurements. The measuring range can be extended by the vernier principle. The specific method is to measure the distance L 1 through the original system first, then exchange the roles of the two pulse sequences (that is, the 1533nm pulse sequence is used as the signal pulse, and the 1542nm pulse sequence is used as the local pulse), and re-measure to obtain the distance L2 . Then the two measurement results can be expressed as:

D=mR1+L1=mR2+L2 (11)D=mR 1 +L 1 =mR 2 +L 2 (11)

其中D为待测距离,R_1和R_2分别为两次测量中飞行时间法的模糊范围,即:Wherein D is the distance to be measured, and R_1 and R_2 are respectively the fuzzy ranges of the time-of-flight method in the two measurements, namely:

为确保式(11)中等式左右两边的m相同,需要满足条件:In order to ensure that m on the left and right sides of the equation (11) is the same, the condition needs to be met:

D<R1R2/(R1+R2)D<R 1 R 2 /(R 1 +R 2 )

R1、R2、L1、L2已知,根据式(11)解出m,即可以得到D。以fr≈58MHz、Δfr≈800Hz为例,最大量程可达187km!R 1 , R 2 , L 1 , and L 2 are known, and m can be obtained by solving m according to formula (11). Taking f r ≈58MHz and Δf r ≈800Hz as an example, the maximum range can reach 187km!

图4为本发明无导轨的绝对距离测量方法一个实施例的示意图。其中:Fig. 4 is a schematic diagram of an embodiment of the method for measuring absolute distance without a guide rail according to the present invention. in:

步骤401,激光器输出光脉冲序列,其中光脉冲序列中包括具有不同的中心波长和重复频率的第一光脉冲序列和第二光脉冲序列。In step 401, the laser outputs an optical pulse sequence, wherein the optical pulse sequence includes a first optical pulse sequence and a second optical pulse sequence with different center wavelengths and repetition frequencies.

步骤402,第一光学处理器件从激光器输出的光脉冲序列中分离出第一光脉冲序列和第二光脉冲序列,将第一光脉冲序列进行光谱扩展,以便使第一光脉冲序列和第二光脉冲序列的光谱重叠。Step 402, the first optical processing device separates the first optical pulse sequence and the second optical pulse sequence from the optical pulse sequence output by the laser, and performs spectrum expansion on the first optical pulse sequence, so that the first optical pulse sequence and the second optical pulse sequence Spectral overlap of light pulse trains.

步骤403,待测距装置使光谱扩展后的第一光脉冲序列分别通过待测距装置中的目标镜和参考镜的反射,以生成目标脉冲序列和参考脉冲序列。Step 403 , the device to be measured makes the first light pulse sequence after spectral expansion be reflected by the target mirror and the reference mirror in the device to be measured respectively, so as to generate a target pulse sequence and a reference pulse sequence.

步骤404,光学干涉装置使第二光脉冲序列分别与目标脉冲序列和参考脉冲序列进行干涉,以生成目标干涉信号和参考干涉信号。Step 404, the optical interference device makes the second optical pulse sequence interfere with the target pulse sequence and the reference pulse sequence respectively, so as to generate a target interference signal and a reference interference signal.

可选地,第二光学处理器件将第二光脉冲序列分为第一本地脉冲序列和第二本地脉冲序列。光学干涉装置使用第一本地脉冲序列分别与目标脉冲序列和参考脉冲序列进行干涉,以生成目标干涉信号和参考干涉信号Optionally, the second optical processing device divides the second optical pulse sequence into a first local pulse sequence and a second local pulse sequence. The optical interference device uses the first local pulse sequence to interfere with the target pulse sequence and the reference pulse sequence respectively to generate the target interference signal and the reference interference signal

其中,第一本地脉冲序列的光功率小于第二本地脉冲序列的光功率。Wherein, the optical power of the first local pulse sequence is smaller than the optical power of the second local pulse sequence.

步骤405,信息处理装置采集目标干涉信号和参考干涉信号,并利用目标干涉信号和参考干涉信号的相位谱线之差,得到目标镜对应的目标臂和参考镜对应的参考臂之间的距离差。Step 405, the information processing device collects the target interference signal and the reference interference signal, and uses the difference between the phase spectrum lines of the target interference signal and the reference interference signal to obtain the distance difference between the target arm corresponding to the target mirror and the reference arm corresponding to the reference mirror .

可选地,光电探测器探测第二本地脉冲序列的重复频率,以作为信息处理装置的信号采集时钟信号。Optionally, the photodetector detects the repetition frequency of the second local pulse sequence to serve as a signal acquisition clock signal of the information processing device.

可选地,信息处理装置在时域上采集目标干涉信号和参考干涉信号,分别对采集的目标干涉信号和参考干涉信号进行时频域变换,以分别得到目标干涉信号对应的第一相位谱线和参考干涉信号对应的第二相位谱线;通过利用第一相位谱线和第二相位谱线之差,得到目标臂和参考臂之间的距离差。Optionally, the information processing device collects the target interference signal and the reference interference signal in the time domain, and performs time-frequency domain transformation on the collected target interference signal and the reference interference signal respectively, so as to respectively obtain the first phase spectral lines corresponding to the target interference signal The second phase spectral line corresponding to the reference interference signal; by using the difference between the first phase spectral line and the second phase spectral line, the distance difference between the target arm and the reference arm is obtained.

其中,第一相位谱线和第二相位谱线之差与目标臂和参考臂之间的距离差成正比。Wherein, the difference between the first phase spectrum line and the second phase spectrum line is proportional to the distance difference between the target arm and the reference arm.

基于本发明上述实施例提供的无导轨的绝对距离测量方法,通过利用能够输出两套重复频率有微小差别的脉冲序列作为测距光源搭建的双波长脉冲绝对测距系统,既克服了传统测距方法的弊端,实现大量程、高精度、快速实时测量。Based on the guide rail-less absolute distance measurement method provided by the above-mentioned embodiments of the present invention, the dual-wavelength pulse absolute distance measurement system built by using two sets of pulse sequences that can output two sets of pulse sequences with slight differences in repetition frequency as the distance measurement light source overcomes the traditional distance measurement The shortcomings of the method are realized to achieve large-range, high-precision, fast and real-time measurement.

通过实施本发明,采用能同时输出两个重复频率有微小差别的脉冲序列的双波长锁模脉冲激光器替代传统双光梳方案作为无导轨的绝对测距光源,极大地简化了测距系统的复杂程度,使双光梳这种无导轨的绝对测距方法真正有可能应用在实际测量场合。By implementing the present invention, a dual-wavelength mode-locked pulse laser that can simultaneously output two pulse sequences with slight differences in repetition frequency is used instead of the traditional dual-comb scheme as an absolute ranging light source without guide rails, which greatly simplifies the complexity of the ranging system The degree makes it possible for the absolute ranging method without a guide rail to be applied to actual measurement occasions.

本领域普通技术人员可以理解实现上述实施例的全部或部分步骤可以通过硬件来完成,也可以通过程序来指令相关的硬件完成,所述的程序可以存储于一种计算机可读存储介质中,上述提到的存储介质可以是只读存储器,磁盘或光盘等。Those of ordinary skill in the art can understand that all or part of the steps for implementing the above embodiments can be completed by hardware, and can also be completed by instructing related hardware through a program. The program can be stored in a computer-readable storage medium. The above-mentioned The storage medium mentioned may be a read-only memory, a magnetic disk or an optical disk, and the like.

本发明的描述是为了示例和描述起见而给出的,而并不是无遗漏的或者将本发明限于所公开的形式。很多修改和变化对于本领域的普通技术人员而言是显然的。选择和描述实施例是为了更好说明本发明的原理和实际应用,并且使本领域的普通技术人员能够理解本发明从而设计适于特定用途的带有各种修改的各种实施例。The description of the present invention has been presented for purposes of illustration and description, but is not intended to be exhaustive or limited to the invention in the form disclosed. Many modifications and changes will be apparent to those of ordinary skill in the art. The embodiment was chosen and described in order to better explain the principles of the invention and the practical application, and to enable others of ordinary skill in the art to understand the invention and design various embodiments with various modifications as are suited to the particular use.

Claims (12)

1. a kind of absolute distance measurement system without guide rail, it is characterised in that including:
Laser, for output optical pulse sequence, wherein light pulse sequence includes having different centre wavelength and repeats frequency The first light pulse sequence and the second light pulse sequence of rate;
First optical processing device, for isolating the first light pulse sequence and second from the light pulse sequence that laser is exported Light pulse sequence, carries out spectrum extension, to make the first light pulse sequence and the second light pulse sequence by the first light pulse sequence Spectra overlapping;
Measured device, for extending spectrum after the first light pulse sequence respectively by the target mirror in measured device and The reflection of reference mirror, to generate target pulse sequence and reference pulse sequence;
Optical interferometric devices, for making the second light pulse sequence be done respectively with target pulse sequence and reference pulse sequence Relate to, to generate target interference signal and refer to interference signal;
Information processor, for gathering target interference signal and referring to interference signal, and utilizes target interference signal and reference The difference of the phase spectral line of interference signal, obtains the distance between the corresponding target-arm of target mirror and the corresponding reference arm of reference mirror Difference.
2. system according to claim 1, it is characterised in that also include:
Second optical processing device, for the second light pulse sequence to be divided into first earth pulse sequence and second earth pulse sequence Row, so that optical interferometric devices are done with target pulse sequence and reference pulse sequence respectively using first earth pulse sequence Relate to.
3. system according to claim 2, it is characterised in that
The luminous power of first earth pulse sequence is less than the luminous power of the second local pulse train.
4. system according to claim 2, it is characterised in that also include:
Photodetector, the repetition rate for detecting the second local pulse train, is adopted using the signal as information processor Collect clock signal.
5. the system according to any one of claim 1-4, it is characterised in that
Information processor is used to gather target interference signal in time domain and refers to interference signal, respectively to the target dry of collection Relate to signal and with reference to interference signal carry out time-frequency domain conversation, with respectively obtain the corresponding first phase spectral line of target interference signal and With reference to the corresponding second phase spectral line of interference signal, by using the difference of first phase spectral line and second phase spectral line, mesh is obtained Mark the distance between arm and reference arm difference.
6. system according to claim 5, it is characterised in that
The difference of first phase spectral line and second phase spectral line is directly proportional to the distance between target-arm and reference arm difference.
7. a kind of absolute distance measurement method without guide rail, it is characterised in that including:
Laser output optical pulse sequence, wherein light pulse sequence include the with different centre wavelength and repetition rate One light pulse sequence and the second light pulse sequence;
The first light pulse sequence and the second smooth arteries and veins are isolated in the light pulse sequence that first optical processing device is exported from laser Sequence is rushed, the first light pulse sequence spectrum extension is subjected to, to make the light of the first light pulse sequence and the second light pulse sequence Spectrum is overlapping;
Measured device makes the first light pulse sequence after spectrum extension respectively by the target mirror in measured device and reference The reflection of mirror, to generate target pulse sequence and reference pulse sequence;
Optical interferometric devices make the second light pulse sequence be interfered respectively with target pulse sequence and reference pulse sequence, with life Into target interference signal and refer to interference signal;
Information processor gathers target interference signal and refers to interference signal, and using target interference signal and with reference to interference letter Number phase spectral line difference, obtain the distance between the corresponding target-arm of target mirror and the corresponding reference arm of reference mirror difference.
8. method according to claim 7, it is characterised in that also include:
Second light pulse sequence is divided into first earth pulse sequence and the second local pulse train by the second optical processing device, with Just optical interferometric devices are interfered with target pulse sequence and reference pulse sequence respectively using first earth pulse sequence.
9. method according to claim 8, it is characterised in that
The luminous power of first earth pulse sequence is less than the luminous power of the second local pulse train.
10. method according to claim 8, it is characterised in that also include:
Photodetector detects the repetition rate of the second local pulse train, using the signal acquisition clock as information processor Signal.
11. the method according to any one of claim 7-10, it is characterised in that
Information processor gathers target interference signal in time domain and refers to interference signal;
Target interference signal and reference interference signal respectively to collection carries out time-frequency domain conversation, to respectively obtain target interference letter Number corresponding first phase spectral line with reference to the corresponding second phase spectral line of interference signal;
By using the difference of first phase spectral line and second phase spectral line, the distance between target-arm and reference arm difference are obtained.
12. method according to claim 11, it is characterised in that
The difference of first phase spectral line and second phase spectral line is directly proportional to the distance between target-arm and reference arm difference.
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108981584A (en) * 2018-09-06 2018-12-11 中国工程物理研究院流体物理研究所 A kind of all -fiber dynamic absolute distance measurement device and method
CN109839644A (en) * 2017-11-29 2019-06-04 中国人民解放军火箭军工程大学 Real-time Models of Absolute Distance Measurement Based method and system based on single-chamber round trip flight second light comb cross-correlation analysis
CN111780856A (en) * 2020-06-01 2020-10-16 哈尔滨工业大学 Optical Fiber Distributed Vibration Measurement Method Based on Rayleigh Scattering Spectrum Analysis of Phase Spectrum
CN119224748A (en) * 2024-09-24 2024-12-31 中国空间技术研究院 Intersatellite high-precision distance measurement method and system based on optical frequency comb
CN119224748B (en) * 2024-09-24 2025-10-10 中国空间技术研究院 Intersatellite high-precision distance measurement method and system based on optical frequency comb

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100002737A1 (en) * 2008-07-07 2010-01-07 Christian Rausch Electronically controlled optical scanning
CN102494615A (en) * 2011-11-15 2012-06-13 清华大学 Step distance measuring device based on femtosecond optical-frequency comb and measuring method thereof
CN102607720A (en) * 2012-03-02 2012-07-25 北京航空航天大学 Method and system for measuring optical distance
CN102998676A (en) * 2012-11-26 2013-03-27 清华大学 Double-femtosecond laser frequency comb ranging system
CN103197322A (en) * 2013-04-10 2013-07-10 清华大学 Ranging method and ranging system of femtosecond laser frequency comb synthesis wave interference
CN103292918A (en) * 2012-03-02 2013-09-11 中国计量科学研究院 Phase change measuring system
CN103885065A (en) * 2014-03-21 2014-06-25 中国科学院上海光学精密机械研究所 Dual-wavelength dipulse non-fuzzy laser ranging device
CN105180892A (en) * 2015-07-31 2015-12-23 天津大学 Femtosecond laser frequency comb pulse chirp interferometry ranging method and ranging system
CN105866788A (en) * 2016-06-15 2016-08-17 天津大学 Distance measuring device and distance measuring device method for realizing optical sampling by adjusting resonant cavity of femtosecond laser
CN105954735A (en) * 2016-07-15 2016-09-21 哈尔滨工业大学 An Improved High-Speed Dispersion Mismatch Correction Method Used in FMCW Absolute Distance Measurement Technology
CN106370111A (en) * 2016-09-23 2017-02-01 中国航空工业集团公司北京长城计量测试技术研究所 Variable frequency phase measurement principle-based femtosecond laser length measuring device and method

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100002737A1 (en) * 2008-07-07 2010-01-07 Christian Rausch Electronically controlled optical scanning
CN102494615A (en) * 2011-11-15 2012-06-13 清华大学 Step distance measuring device based on femtosecond optical-frequency comb and measuring method thereof
CN102607720A (en) * 2012-03-02 2012-07-25 北京航空航天大学 Method and system for measuring optical distance
CN103292918A (en) * 2012-03-02 2013-09-11 中国计量科学研究院 Phase change measuring system
CN102998676A (en) * 2012-11-26 2013-03-27 清华大学 Double-femtosecond laser frequency comb ranging system
CN103197322A (en) * 2013-04-10 2013-07-10 清华大学 Ranging method and ranging system of femtosecond laser frequency comb synthesis wave interference
CN103885065A (en) * 2014-03-21 2014-06-25 中国科学院上海光学精密机械研究所 Dual-wavelength dipulse non-fuzzy laser ranging device
CN105180892A (en) * 2015-07-31 2015-12-23 天津大学 Femtosecond laser frequency comb pulse chirp interferometry ranging method and ranging system
CN105866788A (en) * 2016-06-15 2016-08-17 天津大学 Distance measuring device and distance measuring device method for realizing optical sampling by adjusting resonant cavity of femtosecond laser
CN105954735A (en) * 2016-07-15 2016-09-21 哈尔滨工业大学 An Improved High-Speed Dispersion Mismatch Correction Method Used in FMCW Absolute Distance Measurement Technology
CN106370111A (en) * 2016-09-23 2017-02-01 中国航空工业集团公司北京长城计量测试技术研究所 Variable frequency phase measurement principle-based femtosecond laser length measuring device and method

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
(澳)路易斯: "《太赫兹物理》", 31 August 2015, 国防工业出版社 *
中国现代小卫星技术发展研究论文集编委会: "《中国现代小卫星技术发展研究论文集 2015版》", 31 January 2016, 中国宇航出版社 *
杨娜: "《传感器与测试技术》", 31 July 2012, 航空工业出版社 *

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109839644A (en) * 2017-11-29 2019-06-04 中国人民解放军火箭军工程大学 Real-time Models of Absolute Distance Measurement Based method and system based on single-chamber round trip flight second light comb cross-correlation analysis
CN109839644B (en) * 2017-11-29 2023-09-26 中国人民解放军火箭军工程大学 Real-time absolute ranging method and system based on single-cavity double-femtosecond optical comb cross-correlation analysis
CN108981584A (en) * 2018-09-06 2018-12-11 中国工程物理研究院流体物理研究所 A kind of all -fiber dynamic absolute distance measurement device and method
CN108981584B (en) * 2018-09-06 2023-07-18 中国工程物理研究院流体物理研究所 All-fiber dynamic absolute distance measuring device and method
CN111780856A (en) * 2020-06-01 2020-10-16 哈尔滨工业大学 Optical Fiber Distributed Vibration Measurement Method Based on Rayleigh Scattering Spectrum Analysis of Phase Spectrum
CN111780856B (en) * 2020-06-01 2022-03-29 哈尔滨工业大学 Optical fiber distributed vibration measurement method based on Rayleigh scattering spectrum phase spectrum analysis
CN119224748A (en) * 2024-09-24 2024-12-31 中国空间技术研究院 Intersatellite high-precision distance measurement method and system based on optical frequency comb
CN119224748B (en) * 2024-09-24 2025-10-10 中国空间技术研究院 Intersatellite high-precision distance measurement method and system based on optical frequency comb

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