CN107727697B - Four-probe in-situ resistance measurement equipment for high-flux material chip - Google Patents

Abstract

The invention provides high-flux material chip four-probe in-situ resistance measurement equipment, and belongs to the technical field of material testing. The device comprises a high-flux four-probe, a high-temperature and high-pressure resistant airtight tank body, a sample stand, a multi-channel four-probe resistance tester, a transmission cable and data recording software; the sample stand is positioned in the high-temperature and high-pressure resistant airtight tank body, the high-flux four-probe is arranged on the sample stand and connected with the multi-channel four-probe resistance tester through a transmission cable, and the data recording software is arranged on the upper computer and receives data measured by the multi-channel four-probe resistance tester. The invention can simultaneously measure and record the change of four probe resistances of up to 64 samples along with time, air pressure, temperature and other parameters under the high-temperature and high-pressure air environment, has enough precision and reliability, extremely high data acquisition frequency, low hardware cost and simple operation method, and can also meet the requirement of accurately measuring the resistance of a small number of samples.

Description

A high-throughput material chip four-probe in-situ resistance measurement equipment

Technical field

The invention relates to the technical field of material testing, and in particular to a high-throughput material chip four-probe in-situ resistance measurement equipment.

Background technique

The high-throughput materials experimental method in the Materials Genome Project is an efficient method for the development of new materials. The core idea is to complete the preparation and characterization of a large number of material samples in a short time, and select the corresponding processes for samples that meet performance requirements. Compared with the traditional "trial and error method", the high-throughput test method has the advantages of short research and development cycle, low development cost, and low personnel labor intensity. It is the cutting-edge technology in the current development of materials research and application fields.

Material combination chip technology is a high-throughput method for preparing a large number of material samples. The general idea is to use PVD equipment and separate mask methods or co-sputtering methods to combine a large number of binary, ternary or multi-distance materials with different compositions. Prepared on a small substrate, this method can greatly increase the throughput of sample preparation. The high-throughput characterization and testing of these samples puts forward the need for high-throughput material measurement technology.

As a basic physical property of materials, resistance plays an important role in the research and development of new semiconductor materials, dielectric materials, battery materials, magnetic materials, etc. In addition, in the research of some gas-sensitive sensor materials, it is also necessary to measure the relationship between resistance and gas concentration and temperature, which puts forward requirements for in-situ measurement and recording technology of resistance. Combining high-throughput resistance measurement technology with material combination chip preparation technology can achieve the purpose of high-throughput material preparation and detection. In order to achieve this purpose, traditional resistance measurement devices usually use probes controlled by stepper motors to measure the resistance values of various areas in sequence. However, this is difficult to meet the requirements of in-situ measurement and recording, especially in harsh environments with high temperature and high pressure. In addition, when it is necessary to continuously record the resistance changes of samples, the measurement interval for each sample is too long, making it difficult to cope with rapid changes in resistance. In addition, most of the four-probe test instruments currently commercially available in China are single-channel, and the price of a single instrument is usually more than 5,000 yuan. If it is used for high-throughput resistance measurement, it is not only expensive, but also has complicated wiring problems. This invention uses an integrated design to address the application problem of in-situ measurement of high-flux resistance of materials. It provides a set of devices specifically designed for in-situ measurement and recording of resistance in high-temperature and high-pressure environments during high-throughput research and development of materials. It is simple and convenient to operate. The advantages of relatively low cost, stable and reliable operation, high measurement accuracy and large data recording volume have filled the gaps in domestic application technology in this field.

Contents of the invention

Aiming at the research and development of high-throughput materials, the present invention provides a high-throughput material chip four-probe in-situ resistance measurement equipment, which is not only suitable for in-situ measurement of high-throughput material samples prepared by the material combination chip method in high-temperature and high-pressure harsh environments. Resistance measurement recording can also meet the needs of accurate measurement of a small amount of resistance at the same time.

The equipment includes a high-throughput four-probe probe, a high-temperature and high-pressure resistant airtight tank, a sample holder, a multi-channel four-probe resistance tester, a transmission cable and data recording software; the sample holder is located in a high-temperature and high-pressure resistant airtight tank. The high-throughput four-probe probe is installed on the sample holder. The high-throughput four-probe probe is connected to the multi-channel four-probe resistance tester through a transmission cable. The data recording software is installed on the host computer. The data recording software receives data from the multi-channel four-probe resistance tester. The data measured by the probe resistance tester are displayed and recorded in real time.

Among them, the high temperature and high pressure resistant airtight tank is used to provide the pressure and atmosphere required for the reaction. The high temperature and high pressure resistant airtight tank is sealed by the upper sealing cover; the high temperature and high pressure resistant airtight tank is made of high-grade stainless steel and has no internal components. Used under conditions exceeding 500℃ and 6MPa pressure, non-corrosive gases such as hydrogen, oxygen, carbon monoxide, methane, etc. react with the sample under test in a high-temperature and high-pressure airtight tank.

The high-temperature and high-pressure-resistant airtight tank is equipped with electrical connecting devices, which are used to connect the cables of the high-throughput four-probe probe in the high-temperature and high-pressure-resistant airtight tank with the cables of the external multi-channel four-probe resistance tester. It can complete the electrical signal transmission task while ensuring that the tank does not leak; the upper sealing cover is equipped with air pressure and temperature detection instruments, and is equipped with overpressure and overtemperature alarm components and pressure relief valves, and is also equipped with an emergency exhaust channel. The emergency exhaust pipe can evacuate the gas in the high-temperature and high-pressure-resistant airtight tank within 1 to 3 seconds, ensuring maximum safety in use.

The high-throughput four-probe probe includes a housing, a fixed knob, a cable connection connector and a probe. The high-throughput four-probe probe is used to install probes that are in direct contact with the sample. The probe has a built-in buffer device and is in retractable mode. It can have non-hard contact with the sample surface, and the probe spacing is fixed. It is in contact with each sample based on the principle of the Van der Pauw method. It is mainly used to measure thin film samples with gradient component distribution (also called material chips); the cable connection joint is located inside the casing. , the fixing knob is used to fix the high-throughput four-probe probe and the sample holder.

The internal conductors of the transmission cable are made of high-temperature resistant material, and all are shielded using twisted pairs.

The sample holder uses an integral structure. After loading the sample, the sample position can be adjusted and fixed to facilitate the strict alignment of the probe on the probe with each sample. The probe and the sample holder are fixed with bolts, and the relative distance can be adjusted to change the probe. The amount of contact force with the sample surface. The sample holder is equipped with resistance heating equipment and temperature control equipment inside, and is powered by a switching power supply outside the high-temperature and high-pressure resistant airtight tank; the sample holder includes an interface, a knob, a base and a clamp. The interface, knob and clamp are located on the base, and the interface Used to connect to the high-throughput four-probe probe, the knob is used to adjust the sample position, and the clamp is used to adjust and fix the sample position.

The multi-channel four-probe resistance tester adopts an integrated structure, which integrates a 64-channel high-precision voltage-controlled constant current power supply module that can independently set the constant current size, a microprocessor control module, and a 64-channel voltage Sampling circuit and high-precision ADC module, temperature detection module, communication module, peripheral interface circuit and switching power supply module; multi-channel four-probe resistance tester external connector, four-pin data interface, LCD display, measurement mode selection switch, LCD brightness adjustment knob and main power switch. The connector is used to complete data input and output with the transmission cable. The four-pin data interface is a terminal block for 1 to 8 channels. The sampling frequency of each channel is set in the data recording software. The highest sampling rate is Frequency exceeds 50 times/second. In terms of peripheral interfaces, the instrument has reserved two special interfaces, which are used to provide constant current power output for resistance measurement for high-throughput four-probe probes and to collect voltage signal inputs of multiple channels. When using, you only need to connect the dedicated wires. The cable plugs can be connected to the two interfaces respectively, which effectively avoids the impact of wiring errors and poor line contact on the experiment, and greatly reduces labor intensity. In addition to the application of high-throughput resistance testing, the instrument also reserves terminal blocks for 1 to 8 channels, which can meet the needs of four-probe resistance testing of a small amount of samples. The instrument has reserved RS485 and TCP/IP interfaces for communication with the host computer. In addition, the device can automatically switch the range according to the resistance range being measured, independently select the output value of the constant current source, and the work of each channel is independent of each other.

The data recording software displays the measured current resistance value and the curve of resistance value changing with time, air pressure, and temperature in real time, and outputs the data in the form of Excel or txt text document file.

The beneficial effects of the above technical solutions of the present invention are as follows:

In the complete set of equipment designed by the present invention, the sample is placed on a sample stage with a temperature function and a probe fixing function, which can ensure precise alignment of the probe and precise sample temperature control. The high-temperature and high-pressure sealed tank provides a safe testing environment for the sample. , the special signal transmission cable makes the experimental assembly and connection process simple and convenient. The self-designed high-throughput resistance tester can cooperate with the probe to achieve the purpose of measuring and recording the four-probe resistance of up to 64 samples. The data recording software has a friendly interface. More powerful and easy to use. This equipment is designed for high-throughput experimental applications, and can also meet the daily resistance testing needs of a small number of samples. At the same time, the cost is relatively low, the reliability is good, and it has a broad range of applications in the field of high-throughput research on materials.

Description of drawings

Figure 1 is a schematic structural diagram of the high-throughput material chip four-probe in-situ resistance measurement equipment of the present invention;

Figure 2 is a schematic structural diagram of the independently developed multi-channel four-probe resistance tester of the present invention;

Figure 3 is a schematic structural diagram of the sample rack with temperature control function of the present invention;

Figure 4 is a schematic structural diagram of the high-throughput four-probe probe of the present invention.

Among them: 1-Including high-throughput four-probe probe; 2-High temperature and high pressure resistant airtight tank; 3-Sample stand; 4-Upper sealing cover; 5-Transmission cable; 6-Multi-channel four-probe resistance tester ; 7-data recording software; 11-casing; 12-fixing knob; 13-cable connection connector; 14-probe; 31-interface; 32-knob; 33-base; 34-clamp; 61-connector; 62 -Four-pin data interface; 63-LCD display; 64-Measurement mode selection switch; 65-LCD brightness adjustment knob; 66-Master power switch.

Detailed ways

In order to make the technical problems, technical solutions and advantages to be solved by the present invention clearer, a detailed description will be given below with reference to the accompanying drawings and specific embodiments.

The invention provides a high-throughput material chip four-probe in-situ resistance measurement equipment.

As shown in Figure 1, it is a schematic structural diagram of the equipment. In this equipment, the sample rack 3 is located in the high-temperature and high-pressure resistant airtight tank 2, and the high-flux four-probe probe 1 is installed on the sample rack 3. The high-flux four-probe probe The needle probe 1 is connected to the multi-channel four-probe resistance tester 6 through the transmission cable 5. The data recording software 7 is installed on the host computer. The data recording software 7 receives the measured data from the multi-channel four-probe resistance tester 6 and performs real-time Display and record.

As shown in Figure 2, the multi-channel four-probe resistance tester 6 adopts an integrated structure and integrates a 64-channel high-precision voltage-controlled constant current power supply module and a microprocessor that can independently set the constant current size within a shell structure. Control module, 64-channel voltage sampling circuit and high-precision ADC module, temperature detection module, communication module, peripheral interface circuit and switching power supply module; multi-channel four-probe resistance tester 6 external setting connector 61, four-pin data interface 62 , LCD display 63, measurement mode selection switch 64, LCD brightness adjustment knob 65 and main power switch 66. The connector 61 is used to complete data input and output with the transmission cable, and the four-pin data interface 62 is a terminal block for 1 to 8 channels. , the sampling frequency of each channel is set in the data recording software 7, and the maximum sampling frequency exceeds 50 times/second.

As shown in Figure 3, the sample rack 3 uses an integral structure. The sample rack 3 is equipped with resistance heating equipment and temperature control equipment, and is powered by a switching power supply outside the high temperature and high pressure resistant airtight tank 2; the sample rack 3 includes an interface 31, The knob 32, the base 33 and the clamp 34. The interface 31, the knob 32 and the clamp 34 are located on the base 33. The interface 31 is used to connect to the high-throughput four-probe probe 1, the knob 32 is used to adjust the sample position, and the clamp 34 is used to for adjusting and fixing the sample position.

As shown in Figure 4, the high-throughput four-probe probe 1 includes a housing 11, a fixing knob 12, a cable connection joint 13 and a probe 14. The high-throughput four-probe probe 1 is used to install probes that are in direct contact with the sample. 14. The probe 14 has a built-in buffer device, which can make non-hard contact with the sample surface. The distance between the probes 14 is fixed; the cable connection joint 13 is located in the housing 11, and the fixing knob 12 is used for the high-throughput four-probe probe 1 and the sample holder 3 fixed.

In the actual use process, first put the thin film sample containing 64 different components prepared by material combination chip technology and deposited on the same non-conductive substrate into the sample chamber of the sample rack as shown in Figure 2, adjust the position and clamp it good.

Align the probe end of the high-throughput four-probe probe shown in Figure 3 to the side of the sample, and use bolts to connect the probe and the sample holder. Since the sample is prepared using a matching mask, the position of the sample has been adjusted and Clamping, so that each tip on the probe can just be in contact with the sample, and meet the requirement of the Vanderbilt method to measure resistance that the probe is in perfect contact with the edge of the sample.

The other side of the high-throughput four-probe probe is led out by a special transmission cable and is equipped with a plug, which is connected to the internal electrical connector of the airtight tank. Then cover the upper sealing cover of the airtight tank, tighten it with the matching bolts, and perform gas leak detection.

Connect the two plugs of the external dedicated transmission cable to the outside of the electrical connector of the airtight tank and the dedicated input and output interface of the multi-channel four-probe resistance measuring instrument as shown in Figure 2.

Use a standard RS485 communication line to connect the multi-channel four-probe resistance measuring instrument to the host computer, turn on the power switch of the multi-channel four-probe resistance measuring instrument, and preheat for 20 minutes. Then open the self-developed data recording software installed in the host computer and configure each channel of the sample to be measured. The configuration content includes: you can manually set the measurement interval of the instrument according to the approximate resistance range of each sample. At this time, the instrument will configure the current output of the constant current source and the amplification factor of the voltage acquisition circuit operational amplifier according to the range of the measured resistance value. You can also If you choose not to configure, the system will dynamically adjust relevant parameters during the test based on the resistance value measured for the first time. Select the time interval for data recording of each channel, that is, the sampling frequency. The test modes of the software are divided into three categories: "time-resistance", "temperature-resistance", and "air pressure-resistance". Unless otherwise set, the system will default to the "time-resistance" mode, with resistance as the ordinate and time. Continuous data logging is performed for the abscissa until the Stop Logging button is pressed. If configured in the other two modes, the temperature or air pressure will be used as the abscissa, and the resistance will be recorded without the ordinate. The software also provides an option: "Record time as the second abscissa". If you need to record time at the same time, then record the time on the ordinate. Just tick this check box. At this time, the software will record with time as the second abscissa during the measurement process. Otherwise, the software will not record the time during the measurement process. After the configuration is completed, the resistance measurement and data logging functions of the entire device can be started.

Select the test environment of the sample. If you need to measure the relationship between the sample resistance and temperature, you can configure the corresponding controller of the temperature control device of the sample holder in the sealed tank, set the initial temperature, heating step length and maximum temperature. In addition, you need to set the temperature in the data recording software. Select the "temperature-resistance" test mode. At this time, the system will continue to receive the temperature sensor data on the sample holder in the tank, and record the data with the temperature as the ordinate and the resistance value as the abscissa. If it is applied to the resistance research of gas-sensitive materials, you need to select the "air pressure-resistance" test function in the data recording software. At this time, the system will collect and record the data of the digital air pressure meter in the tank, and use the air pressure as the abscissa and the resistance as The vertical coordinate is recorded. An additional air source is required to apply pressure inside the tank to meet the environmental requirements for sample resistance measurement.

When using flammable and explosive dangerous gases, if leakage occurs or the pressure in the tank is detected to exceed the warning level, the automatic pressure control valve installed on the sealing cover will start the vacuuming operation, or the vacuuming operation can be started manually to avoid A security issue has occurred.

After the resistance measurement is completed, first select the data result output format in the data recording software of the host computer, which can be set to Excel table output or Txt text document format output.

Turn off the power of the multi-channel resistance measuring instrument, vacuum or cool down the sealed tank. When the temperature reaches room temperature or the vacuum in the tank is completed, open the sealing cover, remove the fixed high-throughput four-probe probe, and remove the sample. The rack is fixed, and the sample is taken out to end the test.

Example 1

This embodiment uses a high-throughput method to select a component with the smallest resistance temperature effect from a certain ternary material as an example to illustrate the research and application of high-throughput in-situ resistance testing equipment. The specific steps of this embodiment are as follows:

A1, select a ternary material film prepared by the combined chip method, with a 3-inch quartz sheet as the substrate, and the surface is coated with 64 independent and different compositions of a certain ternary material film with a size of A×A (A=1~3mm) sample. Put it into the sample holder, adjust the position and fix it.

B1, use bolts to fix the high-throughput four-probe probe to the sample holder. Since the sample preparation and probe design adopt compatible sizes, at this time, the probe tip can make good contact with the appropriate position on the sample surface.

C1. Connect the cable plug of the four-probe probe to the electrical connector of the tank. Cover the air-tight cover and fix it with bolts. Complete the air tightness check of the tank and evacuate it to prevent sample oxidation during the heating process. , pass in 2MPa argon gas as a protective gas. Then use a special cable to connect the outside of the tank electrical connector to the input and output ends of the multi-channel four-probe resistance tester.

D1, open the data recording software of the host computer, set the constant current source and voltage acquisition circuit configuration to default, select the "temperature-resistance" measurement mode of the instrument, uncheck "recording time as the second abscissa", and set the temperature recording step The length is 1°C, that is, the resistance data of each sample is recorded every time the temperature rises by one degree.

E1, configure the equipment parameters that control the resistance heating temperature control element inside the sample holder, set the initial temperature to 25°C, and set the heating mode to step type, that is, every time the temperature rises by 1°C, it will be kept warm for 3 seconds, and then continue to heat up to the maximum temperature. is 200℃.

F1, click the recording start button of the host computer data recording software, turn on the control power of the heating equipment, and the system will automatically record the resistance data of 64 samples from 25 to 200°C in steps of 1°C.

G1, after the test is completed, turn off the heating controller, select the data output format in the data recording software as Excel output, select the data storage directory and save it.

H1, after the sample temperature has cooled to room temperature, manually turn on the vacuum pump, pump the air pressure in the tube to about 1 bar, open the air-sealing cover, disassemble the four-probe probe, take out the sample for storage, turn off the power supply connected to the equipment, and organize the cables. .

I1, using the data in Excel, with temperature as the abscissa and the resistance of each sample as the ordinate, draw a curve of the resistance change of each sample with temperature in the drawing software, and select the sample with the lowest resistance change slope with temperature. The component is the target component with the smallest temperature coefficient of resistance in this ternary material.

Example 2

This embodiment uses a high-throughput method to select a component with the fastest hydrogen-sensitive resistance response from a certain ternary hydrogen-sensitive material as an example to illustrate the research and application of high-throughput in-situ resistance testing equipment. The specific steps of this embodiment are as follows:

A2, select a ternary material film prepared by the combined chip method, using a 3-inch quartz sheet as the substrate, and the surface is coated with 64 independent and different compositions of a certain ternary material film with a size of B×B (A=1~3mm) sample. Put it into the sample holder, adjust the position and fix it.

B2, use bolts to fix the high-throughput four-probe probe to the sample holder. Since the sample preparation and probe design adopt compatible sizes, at this time, the probe tip can make good contact with the appropriate position on the sample surface.

C2, connect the cable plug of the four-probe probe to the electrical connector of the tank, cover the sealing cover and fix it with bolts, complete the air tightness check of the tank and vacuum. Then use a special cable to connect the outside of the tank electrical connector to the input and output ends of the multi-channel four-probe resistance tester.

D2, open the data recording software of the host computer, set the constant current source and voltage acquisition circuit configuration to default, select the "air pressure-resistance" measurement mode of the instrument, check "recording time as the second abscissa", and set the time record of the resistance The step size is 0.1s, that is, for each sample, a resistance value is recorded every 0.1 seconds.

E2, configure the equipment parameters that control the resistance heating temperature control element inside the sample holder. Set the initial temperature to 25°C, the heating rate to 5°C/min, the target temperature to 60°C, and the holding time to 100h. Turn on the heating power and wait for the sample temperature to reach 60°C and stabilize.

F2, click the recording start button of the host computer data recording software, set the low-pressure side pressure of the hydrogen bottle pressure reducing valve to 0.1MPa, open the air inlet valve, and quickly introduce 0.1MPa H2 into the airtight tank. At this time, the software will record the tank The changes in internal air pressure and the changes in the resistance of each sample over time after H2 is introduced are the hydrogen-sensitive resistance response of the sample. Wait 30 minutes. Turn on the vacuum pump and vacuum valve, remove the H2 in the tank within 3 seconds, and then introduce 0.1MPa argon gas in a very short time. At this time, the software records the response characteristics of the resistance of each sample after the H2 atmosphere is removed. Wait for 30 minutes, remove the argon again, and then introduce 0.1MPa hydrogen. At this time, the sample records the resistance response characteristics of each sample to hydrogen during the second cycle. Repeat this 10 times.

G2, after the test is completed, first remove the atmosphere in the tank, and then introduce 0.1MPa argon gas. Turn off the heating controller, select the data output format in the data recording software as Excel output, select the data save directory and save it.

H2, wait for the sample temperature to cool to room temperature, manually turn on the vacuum pump, pump the air pressure in the tube to about 1 bar, open the air-sealing cover, disassemble the four-probe probe, take out the sample for storage, turn off the power supply connected to the equipment, and organize the cables. .

I2, using the data in Excel, with temperature as the abscissa and the resistance of each sample as the ordinate, draw a curve of the sample resistance changing with temperature in the drawing software, from which you can draw the curve of the resistance of each sample with temperature according to the introduction of hydrogen and the removal of hydrogen. The change rate of the resistance of each sample over time is used to screen out the components with the fastest hydrogen-sensitive resistance response characteristics in this ternary material. In addition, based on the hydrogen-sensitive resistance response rate of each sample after 10 cycles, it is judged to have the fastest response during the cycle. Material composition for good performance retention.

The above is the preferred embodiment of the present invention. It should be pointed out that for those of ordinary skill in the art, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications It should also be regarded as the protection scope of the present invention.

Claims (4)

1. A high-throughput material chip four-probe in-situ resistance measurement equipment, which is characterized by: including a high-throughput four-probe probe (1), a high-temperature and high-pressure resistant airtight tank (2), and a sample rack (3) , multi-channel four-probe resistance tester (6), transmission cable (5) and data recording software (7); the sample rack (3) is located in a high-temperature and high-pressure-resistant airtight tank (2), and the high-throughput four-probe The needle probe (1) is installed on the sample holder (3), and the high-throughput four-probe probe (1) is connected to the multi-channel four-probe resistance tester (6) and data recording software (7) through the transmission cable (5) Installed on the host computer, the data recording software (7) receives the data measured by the multi-channel four-probe resistance tester (6) and displays and records it in real time; The high temperature and high pressure resistant airtight tank (2) is used to provide the pressure and atmosphere required for the reaction, and the high temperature and high pressure resistant airtight tank (2) is sealed by the upper sealing cover (4); the high temperature and high pressure resistant airtight tank (2) The body (2) is made of high-grade stainless steel and is used under the conditions of internal temperature not exceeding 500°C and 6MPa pressure. Non-corrosive gas reacts with the sample under test in the high-temperature and high-pressure-resistant airtight tank (2); The high-temperature and high-pressure-resistant airtight tank (2) is provided with electrical connecting devices for the cables of the high-flux four-probe probe in the high-temperature and high-pressure-resistant airtight tank (2) and the external multi-channel four probes. The resistance tester's cable is connected; the upper sealing cover (4) is equipped with air pressure and temperature detection instruments, and is equipped with an overpressure and overtemperature alarm component and a pressure relief valve. It is also equipped with an emergency exhaust channel and an emergency exhaust pipe. Able to evacuate the gas in the high temperature and high pressure resistant airtight tank (2) within 1 to 3 seconds; The high-throughput four-probe probe (1) includes a housing (11), a fixing knob (12), a cable connection joint (13) and a probe (14). The high-throughput four-probe probe (1) is used for Install a probe (14) that is in direct contact with the sample. The probe (14) has a built-in buffer device that can make non-hard contact with the sample surface. The distance between the probes (14) is fixed; the cable connection joint (13) is located in the housing (11) , the fixing knob (12) is used to fix the high-throughput four-probe probe (1) and the sample holder (3); The multi-channel four-probe resistance tester (6) adopts an integrated structure, and integrates a 64-channel high-precision voltage-controlled constant current power supply module and a microprocessor control unit that can independently set the constant current size in a shell structure. module, 64-channel voltage sampling circuit and high-precision ADC module, temperature detection module, communication module, peripheral interface circuit and switching power supply module; multi-channel four-probe resistance tester (6) external setting connector (61), four-pin data Interface (62), LCD display screen (63), measurement mode selection switch (64), LCD brightness adjustment knob (65) and main power switch (66). The connector (61) is used to complete data input and output with the transmission cable. The four-pin data interface (62) is a terminal block for 1 to 8 channels. The sampling frequency of each channel is set in the data recording software (7). The maximum sampling frequency exceeds 50 times/second; in, Methods of using the high-throughput material chip four-probe in-situ resistance measurement equipment include: Connect the multi-channel four-probe resistance measuring instrument to the host computer through the RS485 communication line; Turn on the power switch of the multi-channel four-probe resistance measuring instrument and preheat for 20 minutes; Open the self-developed data recording software installed in the host computer and configure each channel of the sample to be measured. The configuration content includes: The measurement interval of the instrument is manually set according to the resistance range of each sample. At this time, the multi-channel four-probe resistance tester configures the current size output by the constant current source and the amplification factor of the voltage acquisition circuit operational amplifier according to the range of the measured resistance value. If Without configuration, the multi-channel four-probe resistance tester dynamically adjusts the current parameters and voltage parameters according to the resistance value measured for the first time during the test; Select the test environment of the sample. If you need to measure the relationship between the sample resistance and temperature, configure the corresponding controller of the temperature control device of the sample holder in the sealed tank, and set the initial temperature, heating step length and maximum temperature; Select the time interval for data recording of each channel in the multi-channel four-probe resistance measuring instrument, that is, the sampling frequency, and select the test mode of the software. The test mode of the software includes time-resistance mode, temperature-resistance mode, and air pressure-resistance mode; Among them, in the time-resistance mode: resistance is the ordinate and time is the abscissa for continuous data recording until the stop recording button is pressed; In the temperature-resistance mode, continuous data recording is performed with resistance as the ordinate and temperature as the abscissa until the stop recording button is pressed; In the air pressure-resistance mode, the resistance is used as the ordinate and the air pressure is used as the abscissa for continuous data recording until the stop recording button is pressed; After the resistance measurement is completed, first select the data result output format in the data recording software of the host computer and set it to Excel table output or Txt text document format output. 2. The high-throughput material chip four-probe in-situ resistance measurement device according to claim 1, characterized in that: the internal conductors of the transmission cable (5) are made of high-temperature resistant materials, and all are shielded using twisted pairs. . 3. The high-throughput material chip four-probe in-situ resistance measurement device according to claim 1, characterized in that: the sample rack (3) uses an integral structure, and a resistance heating device is provided inside the sample rack (3). and temperature control equipment, powered by a switching power supply outside the high temperature and high pressure resistant airtight tank (2); the sample rack (3) includes an interface (31), a knob (32), a base (33) and a clamp (34). The interface (31), knob (32) and clamp (34) are located on the base (33), the interface (31) is used to connect to the high-throughput four-probe probe (1), the knob (32) is used to adjust the sample position, The clamp (34) is used to adjust and fix the sample position. 4. The high-throughput material chip four-probe in-situ resistance measurement device according to claim 1, characterized in that: the data recording software (7) displays the measured current resistance value and the resistance value over time and air pressure in real time , temperature change curve, and output the data in the form of Excel or txt text document file.