CN107782298B - Triaxial MEMS gyroscope - Google Patents
Triaxial MEMS gyroscope Download PDFInfo
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- CN107782298B CN107782298B CN201610743202.4A CN201610743202A CN107782298B CN 107782298 B CN107782298 B CN 107782298B CN 201610743202 A CN201610743202 A CN 201610743202A CN 107782298 B CN107782298 B CN 107782298B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
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Abstract
The invention discloses a triaxial MEMS gyroscope which comprises XZ axis detection parts which are symmetrically arranged on two sides of a Y axis detection part and positioned in the X axis direction, wherein the two XZ axis detection parts are connected with the Y axis detection part through a plurality of connecting beams. According to the triaxial MEMS gyroscope, angular velocity detection on the X axis, the Y axis and the Z axis can be realized by using one set of driving component, so that the internal space of the gyroscope is saved, and the cost is reduced.
Description
Technical Field
The invention relates to the technical field of MEMS gyroscopes, in particular to a triaxial MEMS gyroscope.
Background
With the gradual development of portability and portability of various consumer electronics, the market demands for smaller gyroscope chips are becoming more stringent.
For MEMS technology that is already known in the market today, gyroscopes, for example made of semiconductor materials, have been obtained with this technology; at present, the MEMS gyroscope facing the market in China is mainly a capacitive resonance gyroscope, namely, a capacitive mechanical structure is driven to enable a mass block to vibrate in a driving mode, and capacitance change caused by movement of the mass block in a detection direction due to Coriolis force is detected through a detection capacitor.
In the prior art, the mechanical part of the tri-axial gyroscope is composed of three independent X, Y and Z-single-axis gyroscopes, each single-axis gyroscope structure needs to include an independent mass block, a driving structure and a detecting structure, and three independent driving circuits need to be adopted in a corresponding ASIC circuit to drive respectively, so that the size of the final gyroscope chip is large.
Disclosure of Invention
The invention aims to provide a triaxial MEMS gyroscope which can solve the problems of larger volume and higher cost.
In order to achieve the above purpose, the invention provides a triaxial MEMS gyroscope, which comprises XZ axis detection parts symmetrically arranged at two sides of a Y axis detection part and positioned in the X axis direction, wherein the two XZ axis detection parts are connected with the Y axis detection part through a plurality of connecting beams.
Compared with the background art, the triaxial MEMS gyroscope mainly comprises a Y-axis detection part and two XZ-axis detection parts; the left and right directions of the Y-axis detection part are defined as X-axis directions, the upper and lower directions of the Y-axis detection part are defined as Y-axis directions, and the two XZ-axis detection parts are symmetrically arranged at the left and right sides of the Y-axis detection part; the core of the invention is that a Y-axis detection part is connected with two XZ-axis detection parts by a plurality of connecting beams; that is, the XZ-axis detecting portion on the left side of the Y-axis detecting portion is connected to the Y-axis detecting portion by the connecting beam, and the XZ-axis detecting portion on the right side of the Y-axis detecting portion is connected to the Y-axis detecting portion, so that when the gyroscope has a rotational angular velocity in the X-axis, in the Y-axis, or in the Z-axis direction, the Y-axis detecting portion and the two XZ-axis detecting portions can generate corresponding motions so as to detect the magnitude of the X-axis, the Y-axis, or the Z-axis angular velocity; by adopting the arrangement mode, the angular velocity detection of the X axis, the Y axis and the Z axis can be realized by using one set of driving component, so that the internal space of the gyroscope is saved, and the cost is reduced.
Preferably, the connecting beam comprises two connecting spring beams and a connecting rigid beam positioned between the two connecting spring beams; the two connecting spring beams are respectively connected with the Y-axis detection part and the XZ-axis detection part.
Preferably, the connection Liang Juti is L-shaped.
Preferably, the Y-axis detecting part includes a third mass block and a fourth mass block which are located in the X-axis direction and are connected to each other, and the third mass block is located at the left side of the fourth mass block; the first XZ axis detection part positioned at the left side of the Y axis detection part comprises a first mass block and a second mass block which are positioned in the Y axis direction perpendicular to the X axis direction and are mutually connected, and the first mass block is positioned above the second mass block; the second XZ axis detection part positioned on the right side of the Y axis detection part comprises a fifth mass block and a sixth mass block which are positioned in the Y axis direction and are mutually connected, and the fifth mass block is positioned above the sixth mass block; the first mass block is connected with the third mass block, the second mass block is connected with the third mass block, the fifth mass block is connected with the fourth mass block, and the sixth mass block is connected with the fourth mass block through the connecting beam.
Preferably, the two XZ axis detecting portions and the Y axis detecting portion are symmetrical left and right and vertically with respect to a horizontal center line and a vertical center line of the Y axis detecting portion.
Preferably, the method further comprises:
a driving capacitor for providing alternating voltage to realize the movement of the six masses;
an X-axis detection capacitor for detecting the X-axis angular velocity,
y-axis detection capacitor and Y-axis detection capacitor for detecting the Y-axis angular velocity
And the Z-axis detection capacitor is used for detecting the Z-axis angular speed.
Preferably, the method further comprises:
and the driving detection capacitor is used for driving the driving amplitude of the driving capacitor.
Preferably, the driving capacitor is symmetrically arranged on the Y-axis detection part; the X-axis detection capacitor is arranged on the two XZ-axis detection parts; the Y-axis detection capacitor is arranged on the Y-axis detection part; the Z-axis detection capacitor is arranged on the two XZ-axis detection parts.
Preferably, the driving detection capacitor is symmetrically disposed on the Y-axis detection unit.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only embodiments of the present invention, and that other drawings can be obtained according to the provided drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a triaxial MEMS gyroscope according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of the tri-axis MEMS gyroscope of FIG. 1 under the action of a drive capacitance;
FIG. 3 is a schematic diagram of the three-axis MEMS gyroscope of FIG. 1 for detecting the X-axis;
FIG. 4 is a schematic diagram of the three-axis MEMS gyroscope of FIG. 1 for detecting the Y-axis;
fig. 5 is a schematic diagram of the three-axis MEMS gyroscope of fig. 1 when detecting the Z-axis.
Wherein:
1-Y axis detection part, 21-first XZ axis detection part, 22-second XZ axis detection part, 3-connecting spring beam, 31-380-first spring Liangdi eighty spring beam, 4-connecting rigid beam, 41-420-first rigid Liangdi twenty-rigid beam, 10-first mass block, 20-second mass block, 30-third mass block, 40-fourth mass block, 50-fifth mass block, 60-sixth mass block, 91-first anchor point, 92-second anchor point, 93-third anchor point, 94-fourth anchor point, 95-fifth anchor point, 96-sixth anchor point, 51-532-first electrode and thirty-second electrode.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The present invention will be further described in detail below with reference to the drawings and detailed description for the purpose of enabling those skilled in the art to better understand the aspects of the present invention.
Referring to fig. 1 to 5, fig. 1 is a schematic structural diagram of a tri-axial MEMS gyroscope according to an embodiment of the present invention; FIG. 2 is a schematic diagram of the tri-axis MEMS gyroscope of FIG. 1 under the action of a drive capacitance; FIG. 3 is a schematic diagram of the three-axis MEMS gyroscope of FIG. 1 for detecting the X-axis; FIG. 4 is a schematic diagram of the three-axis MEMS gyroscope of FIG. 1 for detecting the Y-axis; fig. 5 is a schematic diagram of the three-axis MEMS gyroscope of fig. 1 when detecting the Z-axis.
The triaxial MEMS gyroscope provided by the invention comprises a Y-axis detection part 1 and two XZ-axis detection parts; the present invention defines directions along the left and right sides of the Y-axis detecting portion 1 as X-axis directions, and two XZ-axis detecting portions are located in the X-axis directions, and the two XZ-axis detecting portions are located on the left and right sides of the Y-axis detecting portion 1, respectively.
As shown in fig. 1 of the specification, an XZ axis detection portion on the left side of the Y axis detection portion 1 may be defined as a first XZ axis detection portion 21, and a second XZ axis detection portion 22 is located on the right side of the Y axis detection portion 1; and the first XZ axis detecting portion 21 and the second XZ axis detecting portion 22 are symmetrically disposed on both sides of the Y axis detecting portion 1.
The first XZ axis detection part 21 and the second XZ axis detection part 22 have the same shape and structure, and the first XZ axis detection part 21 and the Y axis detection part 1 and the second XZ axis detection part 22 and the Y axis detection part 1 are connected by a plurality of connecting beams,
under the action of the connecting beam, the first XZ axis detecting portion 21, the second XZ axis detecting portion 22 and the Y axis detecting portion 1 are connected with each other, and as long as any one of the three gyroscopes is disturbed, the other two gyroscopes can move along with the disturbance, so that the function of detecting the angular velocities of the X axis, the Y axis and the Z axis is realized.
The invention gives a preferred way to the specific shape of the connecting beam; the connecting beam mainly comprises two connecting spring beams 3 and one connecting rigid beam 4, wherein the connecting rigid beam 4 is positioned between the two connecting spring beams 3, and the two connecting spring beams 3 are respectively connected with a Y-axis detection part and an XZ-axis detection part, as shown in the attached figure 1 of the specification.
In the connection mode of the first XZ-axis detecting portion 21 and the Y-axis detecting portion 1, the first XZ-axis detecting portion 21 and the Y-axis detecting portion 1 are connected by a connecting beam, and two connecting spring beams 3 of the connecting beam are respectively fixed to the first XZ-axis detecting portion 21 and the Y-axis detecting portion 1, and the connecting rigid beam 4 is in a suspended state. Similarly, the connection between the second XZ axis detecting portion 22 and the Y axis detecting portion 1 by the connection beam is similar, and will not be described here. The connecting beam is preferably arranged in an L shape as shown in figure 1 of the specification so as to realize the connection of the Y-axis detection part 1 and the two XZ-axis detection parts; the use of L-shaped connection beams ensures reliable connection and enables better transmission of motion between two different gyroscopes.
Gaps are provided between the first XZ axis detection portion 21 and the Y axis detection portion 1 and between the second XZ axis detection portion 22 and the Y axis detection portion 1, the gaps are provided with first anchor points 91, and spring beams are provided at both ends of the first anchor points 91 to fix the first XZ axis detection portion 21 and the Y axis detection portion 1.
For example, between the first XZ-axis detecting portion 21 and the Y-axis detecting portion 1, the left and right sides of one of the first anchor points 91 are a twenty-fourth spring beam 324 and a thirty-fourth spring beam 330, respectively, the twenty-fourth spring beam 324 being connected to the first XZ-axis detecting portion 21, and the thirty-fourth spring beam 330 being connected to the Y-axis detecting portion 1; similarly, a twenty-third spring beam 323 and a twenty-ninth spring beam 329 are provided on the left and right sides of the other first anchor point 91 between the first XZ-axis detecting portion 21 and the Y-axis detecting portion 1, respectively, for connection with the first XZ-axis detecting portion 21 and the Y-axis detecting portion 1, respectively; the fifty-second spring beam 352 and the fifty-eighth spring beam 358 and the fifty-first spring beam 351 and the fifty-seventh spring beam 357 are provided on both left and right sides of the two first anchor points 91 provided between the Y-axis detecting portion 1 and the second XZ-axis detecting portion 22, respectively.
The invention gives the following examples for the mass blocks of the two XZ axis detection parts and the Y axis detection part 1; the Y-axis detecting section 1 includes a third mass 30 and a fourth mass 40 which are connected to each other in the X-axis direction, and the third mass 30 is located on the left side of the fourth mass 40; the first XZ axis detecting portion 21 includes a first mass 10 and a second mass 20 which are connected to each other in the Y axis direction, and the first mass 10 is located above the second mass 20; the second XZ axis detecting portion 22 includes a fifth mass 50 and a sixth mass 60 that are connected to each other in the Y axis direction, and the fifth mass 50 is located above the sixth mass 60; the first mass 10 and the third mass 30, the second mass 20 and the third mass 30, the fifth mass 50 and the fourth mass 40, and the sixth mass 60 and the fourth mass 40 are respectively connected through connecting beams.
A hollow portion is provided between the third mass 30 and the fourth mass 40, and an L-shaped tenth rigid beam 410, eleventh rigid beam 411, twelfth rigid beam 412, and thirteenth rigid beam 413 are provided in the hollow portion; a forty-second spring beam 342 and a forty-fifth spring beam 345 are respectively provided at both ends of the eleventh rigid beam 411; a forty-sixth spring beam 346 and a forty-fourth spring beam 344 are provided at both ends of the twelfth rigid beam 412, respectively; a forty-first spring beam 341 and a thirty-ninth spring beam 339 are respectively provided at both ends of the tenth rigid beam 410; a forty spring beam 340 and a forty-third spring beam 343 are respectively provided at both ends of the thirteenth rigid beam 413; and the tenth rigid beam 410, the eleventh rigid beam 411, the twelfth rigid beam 412, and the thirteenth rigid beam 413 are arranged in a cross shape that is symmetrical up and down and left and right, and are connected to the third mass 30 and the fourth mass 40 through the forty-two spring beam 342, the forty-one spring beam 341, the forty-four spring beam 344, and the forty-three spring beam 343. The upper sides of the forty-fifth spring beam 345 and the forty-sixth spring beam 346 are connected to the upper sixth anchor point 96 by forty-seventh spring beam 347 and forty-eighth spring beam 348, and the lower sides of the thirty-ninth spring beam 339 and the forty-spring beam 340 are connected to the lower sixth anchor point 96 by thirty-seventh spring beam 337 and thirty-eighth spring beam 338.
As shown in fig. 1 of the specification, the triaxial MEMS gyroscope of the present invention includes 6 masses in total, and two XZ axis detection portions are disposed in bilateral symmetry and up-down symmetry with the Y axis detection portion 1. The triaxial MEMS gyroscope is provided with 16 rigid beams including a first rigid beam 41, a second rigid beam 42, a third rigid beam 43, a fourth rigid beam 44, a fifth rigid beam 45, an eighth rigid beam 48, a ninth rigid beam 49, a tenth rigid beam 410, an eleventh rigid beam 411, a twelfth rigid beam 412, a thirteenth rigid beam 413, a fourteenth rigid beam 414, a fifteenth rigid beam 415, a sixteenth rigid beam 416, a nineteenth rigid beam 419, a twentieth rigid beam 420, and 4 connecting rigid beams 4.
72 spring beams are arranged, and the spring beams are arranged, respectively, a first spring beam 31, a second spring beam 32, a third spring beam 33, a fourth spring beam 34, a fifth spring beam 35, a sixth spring beam 36, a seventh spring beam 37, an eighth spring beam 38, a ninth spring beam 39, a tenth spring beam 310, an eleventh spring beam 311, a twelfth spring beam 312, a thirteenth spring beam 313, a fourteenth spring beam 314, a fifteenth spring beam 315, a sixteenth spring beam 316, a seventeenth spring beam 317, an eighteenth spring beam 318, a nineteenth spring beam 319, a twentieth spring beam 320, a twenty first spring beam 321, a twenty second spring beam 322, a twenty third spring beam 323, a twenty fourth spring beam 324, a twenty ninth spring beam 329, a thirty spring beam 330, a thirty first spring beam 331, a thirty second spring beam 332, a thirty third spring beam 333, a thirty fourth spring beam 334, a thirty fifth spring beam 335, a thirty sixth spring beam 336, a thirty third spring beam thirty-seventh spring beam 337, thirty-eighth spring beam 338, thirty-ninth spring beam 339, forty-eighth spring beam 340, forty-first spring beam 341, forty-second spring beam 342, forty-third spring beam 343, forty-fourth spring beam 344, forty-fifth spring beam 345, forty-sixth spring beam 346, forty-seventh spring beam 347, forty-eighth spring beam 348, forty-ninth spring beam 349, fifty-first spring beam 350, fifty-first spring beam 351, fifty-second spring beam 352, fifty-seventh spring beam 357, fifty-eighth spring beam 358, fifty-ninth spring beam 359, sixty-first spring beam 360, sixty-first spring beam 361, sixty-second spring beam 362, sixty-third spring beam 363, sixty-fourth spring beam 364, sixty-fifth spring beam 365, sixty-sixth spring beam 366, sixty-seventh spring beam 367, sixty-eighth spring beam 368, sixty-nine spring beam 369, seventy-nine spring beam 370, seventy-first spring beam 371, seventy-second spring beam 372, seventy-three spring beam 373, seventy-fourth spring beam 374, seventy-five spring beam 375, seventy-six spring beam 376, seventy-seventh spring beam 377, seventy-eight spring beam 378, seventy-nine spring beam 379, eighty spring beam 380, and 8 connecting spring beams 3.
The triaxial MEMS gyroscope also comprises 16 anchor points in total, wherein the 16 anchor points comprise 4 first anchor points 91, 4 second anchor points 92, 2 third anchor points 93, 2 fourth anchor points 94, 2 fifth anchor points 95 and 2 sixth anchor points 96; the specific setting mode is shown in the attached figure 1 of the specification.
It should be noted that, through the arrangement shown in fig. 1 of the specification, those skilled in the art can know the shape and configuration of the triaxial MEMS gyroscope of the present invention, so the arrangement of the rigid beam, the connecting rigid beam 4, the spring beam, the connecting spring beam 3 and the anchor point will not be repeated herein. Of course, to ensure proper operation of the tri-axis MEMS gyroscope of the present invention, the components described above may be arranged in other ways than that shown in fig. 1.
The triaxial MEMS gyroscope also comprises a driving capacitor, an X-axis detection capacitor, a Y-axis detection capacitor and a Z-axis detection capacitor, which are shown in the attached figure 1 of the specification.
The three-axis MEMS gyroscope comprises 32 electrodes, which are respectively 51-532; all electrodes are stationary; the above mentioned masses, connecting spring beams, connecting stiff beams, stiff beams and anchor points form the movable part of the tri-axial MEMS gyroscope as a whole. 32 capacitors are formed between the 32 electrodes and the movable part of the gyroscope. The 32 capacitors can be divided into 10 groups, namely a first driving capacitor and a second driving capacitor, a first driving detection capacitor and a second driving detection capacitor, a first X-axis detection capacitor and a second X-axis detection capacitor, a first Y-axis detection capacitor, a second Y-axis detection capacitor, a first Z-axis detection capacitor and a second Z-axis detection capacitor.
Wherein a first driving capacitance is formed between the fourth electrode 54, the eleventh electrode 511, the twenty-second electrode 522, the twenty-ninth electrode 529, and the movable member; the second driving capacitance is formed between the fifth electrode 55, the tenth electrode 510, the twenty-third electrode 523, the twenty-eighth electrode 528, and the movable member.
The first drive detection capacitance is formed between the sixth electrode 56, the ninth electrode 59, the twenty-fourth electrode 524, the twenty-seventh electrode 527, and the movable member; the second drive detection capacitance is formed between the seventh electrode 57, the eighth electrode 58, the twenty-fifth electrode 525, the twenty-sixth electrode 526, and the movable member.
The first X-axis detection capacitance is formed between the second electrode 52, the thirteenth electrode 513, and the movable member; the second X-axis detection capacitance is formed between the twentieth electrode 520, the thirty-first electrode 531, and the movable member.
The first Y-axis detection capacitance is formed between the fifteenth electrode 515, the seventeenth electrode 517, and the movable member; the first Y-axis detection capacitance is formed between the sixteenth electrode 516, the eighteenth electrode 518, and the movable member.
The first Z-axis detection capacitance is formed between the first electrode 51, the twelfth electrode 512, the twenty-first electrode 521, the thirty-second electrode 532, and the movable member; the first Z-axis detection capacitance is formed between the third electrode 53, the fourteenth electrode 514, the nineteenth electrode 519, the thirty-th electrode 530, and the movable member.
As shown in fig. 1 of the specification, the driving capacitors are symmetrically arranged on the Y-axis detection part 1; the X-axis detection capacitor is arranged on the two XZ-axis detection parts; the Y-axis detection capacitor is arranged on the Y-axis detection part 1; the Z-axis detection capacitor is arranged on the two XZ-axis detection parts; the drive detection capacitors are symmetrically arranged on the Y-axis detection part 1.
It can be seen that the Y-axis detecting unit 1 and the two XZ-axis detecting units are vertically and laterally symmetrical with respect to the horizontal center line and the vertical center line of the Y-axis detecting unit 1; that is, when the horizontal center line of the Y-axis detecting portion 1 is taken as an axis, 342, 411, 412, and 344 are located above the horizontal center line, 341, 410, 413, and 343 are located below the horizontal center line, and the Y-axis detecting portion 1 and the two XZ-axis detecting portions are both vertically symmetrical about the horizontal center line. When the vertical center line of the Y-axis detecting section 1 is taken as an axis, 411 and 410 are positioned on the left of the vertical center line, 412 and 413 are positioned on the right of the vertical center line, and the Y-axis detecting section 1 and the two XZ-axis detecting sections are both symmetrical on the left and right of the vertical center line.
As shown in fig. 2 of the specification, when the triaxial MEMS gyroscope is driven by the driving capacitor, an alternating electrostatic force is generated when alternating voltages with opposite directions are applied to two ends of the first driving capacitor and the second driving capacitor, so that the third mass block 30 and the fourth mass block 40 reciprocate along the X axis; since the third mass 30 is connected to the first and second masses 10 and 20 by the connection beams, the fourth mass 40 is connected to the fifth and sixth masses 50 and 60 by the connection beams. The movement of the third mass 30 and the fourth mass 40 is transferred to the first mass 10, the second mass 20, the fifth mass 50 and the sixth mass 60, resulting in the first mass 10, the second mass 20, the fifth mass 50 and the sixth mass 60 reciprocating along the Y-axis. In order to accurately control the driving amplitude, the invention structurally also needs a first driving detection capacitor and a second driving detection capacitor to calibrate the driving amplitude.
When the triaxial MEMS gyroscope detects the X axis, the X axis is shown in the figure 3 of the specification; when the angular velocity of the X-axis is input, the first, second, fifth and sixth masses 10, 20, 50 and 60, which reciprocate along the Y-axis, receive the coriolis force in the Z-axis direction; thus, the first, second, fifth and sixth masses 10, 20, 50 and 60 reciprocate along the Z-axis while the stiff beams 41, 43, 414 and 416 are also reciprocated along the Z-axis by the spring beams 39, 310, 321, 322, 359, 360, 371 and 372. At this time, the first X-axis detection capacitance and the second X-axis detection capacitance corresponding to the rigid beams 41, 43, 414, and 416 also generate periodic changes, and the changes of the two capacitances can be detected by a subsequent circuit, so that the magnitude of the input X-axis angular velocity can be obtained.
When the three-axis MEMS gyroscope detects the Y axis, the Y axis is shown in figure 4 of the specification; when the angular velocity of the Y axis is input, the mass of the third mass 30 and the fourth mass 40, which reciprocate along the X axis, receives the coriolis force in the Z axis direction, so that the mass of the third mass 30 and the fourth mass 40 reciprocate along the Z axis, and simultaneously, the rigid beams 48 and 49 are also reciprocated along the Z axis by the spring beams 333, 334, 335 and 336. At this time, the first Y-axis detection capacitance and the second Y-axis detection capacitance corresponding to the rigid beams 48 and 49 also generate periodic changes, and the changes of the two capacitances can be detected by a subsequent circuit to obtain the magnitude of the input Y-axis angular velocity.
When the triaxial MEMS gyroscope detects the Z axis, the Z axis is detected as shown in the figure 5 of the specification; when the angular velocity of the Z axis is input, the first, second, fifth and sixth masses 10, 20, 50 and 60 of the masses reciprocating along the Y axis are subjected to the coriolis force in the X axis direction. This causes the masses of the first, second, fifth and sixth masses 10, 20, 50 and 60 to reciprocate along the X-axis while the stiff beams 41, 43, 414 and 416 are also reciprocated along the Z-axis by the spring beams 39, 310, 321, 322, 359, 360, 371 and 372. The first Z-axis detection capacitance and the second Z-axis detection capacitance corresponding to the rigid beams 41, 43, 414, and 416 also vary periodically. The change of the two capacitances is detected by a subsequent circuit, so that the magnitude of the input Z-axis angular velocity can be known.
According to the triaxial MEMS gyroscope provided by the invention, the mass blocks of the two shafts are connected, so that the driving of the two shafts can be realized only by one set of driving capacitor (the first driving capacitor and the second driving capacitor) and one set of driving detection capacitor (the first driving detection capacitor and the second driving detection capacitor). This saves two sets of drive capacitors and two sets of drive sense capacitors compared to a conventional discrete mass tri-axis gyroscope. The triaxial MEMS gyroscope shares the detection mass blocks of the X axis and the Z axis, improves the utilization efficiency of the mass and improves the sensitivity, thereby saving the area of the gyroscope and reducing the cost.
It should be noted that in this specification relational terms such as first and second are used solely to distinguish one entity from another entity without necessarily requiring or implying any actual such relationship or order between such entities.
The triaxial MEMS gyroscope provided by the invention is described in detail above. The principles and embodiments of the present invention have been described herein with reference to specific examples, the description of which is intended only to facilitate an understanding of the method of the present invention and its core ideas. It should be noted that it will be apparent to those skilled in the art that various modifications and adaptations of the invention can be made without departing from the principles of the invention and these modifications and adaptations are intended to be within the scope of the invention as defined in the following claims.
Claims (4)
1. The triaxial MEMS gyroscope is characterized by comprising XZ axis detection parts which are symmetrically arranged on two sides of a Y axis detection part and positioned in the X axis direction, wherein the two XZ axis detection parts are connected with the Y axis detection part through a plurality of connecting beams;
the connecting beam comprises two connecting spring beams and a connecting rigid beam positioned between the two connecting spring beams; the two connecting spring beams are respectively connected with the Y-axis detection part and the XZ-axis detection part;
the Y-axis detection part comprises a third mass block and a fourth mass block which are positioned in the X-axis direction and are mutually connected, and the third mass block is positioned at the left side of the fourth mass block; the first XZ axis detection part positioned at the left side of the Y axis detection part comprises a first mass block and a second mass block which are positioned in the Y axis direction perpendicular to the X axis direction and are mutually connected, and the first mass block is positioned above the second mass block; the second XZ axis detection part positioned on the right side of the Y axis detection part comprises a fifth mass block and a sixth mass block which are positioned in the Y axis direction and are mutually connected, and the fifth mass block is positioned above the sixth mass block; the first mass block is connected with the third mass block, the second mass block is connected with the third mass block, the fifth mass block is connected with the fourth mass block, and the sixth mass block is connected with the fourth mass block through the connecting beam;
further comprises:
a driving capacitor for providing alternating voltage to realize the movement of the six masses;
an X-axis detection capacitor for detecting an angular velocity of an X-axis,
y-axis detection capacitor and Y-axis detection capacitor for detecting Y-axis angular velocity
A Z-axis detection capacitor for detecting the Z-axis angular velocity;
a drive detection capacitor for calibrating the drive amplitude of the drive capacitor;
the driving capacitors are symmetrically arranged on the Y-axis detection part in a left-right mode; the X-axis detection capacitor is arranged on the two XZ-axis detection parts; the Y-axis detection capacitor is arranged on the Y-axis detection part; the Z-axis detection capacitor is arranged on the two XZ-axis detection parts.
2. The tri-axis MEMS gyroscope of claim 1, wherein the connection Liang Juti is L-shaped.
3. The tri-axis MEMS gyroscope of claim 1, wherein the two XZ-axis detection portions and the Y-axis detection portion are vertically symmetric and laterally symmetric about a horizontal centerline and a vertical centerline of the Y-axis detection portion.
4. The three-axis MEMS gyroscope of claim 1, wherein the drive sense capacitance is symmetrically disposed about the Y-axis sense.
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| CN110926445B (en) * | 2019-12-06 | 2022-03-08 | 深迪半导体(绍兴)有限公司 | Three-axis MEMS gyroscope |
| CN111024057B (en) * | 2019-12-30 | 2021-12-14 | 无锡莱斯能特科技有限公司 | Three-axis MEMS gyroscope |
| CN113295155B (en) * | 2021-05-24 | 2025-04-04 | 美新半导体(天津)有限公司 | A three-axis gyroscope |
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