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CN107957541B - A method and system for screening parallel chips inside a power semiconductor module - Google Patents

A method and system for screening parallel chips inside a power semiconductor module Download PDF

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CN107957541B
CN107957541B CN201711166334.6A CN201711166334A CN107957541B CN 107957541 B CN107957541 B CN 107957541B CN 201711166334 A CN201711166334 A CN 201711166334A CN 107957541 B CN107957541 B CN 107957541B
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phase difference
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transfer characteristic
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CN107957541A (en
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柯俊吉
黄华震
孙鹏
邹琦
赵志斌
崔翔
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North China Electric Power University
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    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
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Abstract

本发明公开了一种功率半导体模块内部并联芯片筛选方法及系统。所述方法包括:获取多个芯片的转移特性曲线;将每一转移特性曲线离散化,获取转移特性曲线的多个离散点,构成芯片离散点集;获取多个芯片中任意两个芯片的芯片离散点集;计算两芯片的若干个相对相差值,相对相差值为漏极电流相对相差值或栅源极电压相对相差值;计算两芯片的平均相对相差值,平均相对相差值为两芯片的若干个相对相差值的平均值;比较多个芯片中所有平均相对相差值,确定最小平均相对相差值;确定最小平均相对相差值对应的两个芯片作为目标筛选芯片。本发明能够得到阈值电压的分散性和跨导系数的分散性都很小的两并联芯片,进而使得并联芯片的瞬态均流效果更佳。

The invention discloses a method and system for screening parallel chips inside a power semiconductor module. The method includes: obtaining transfer characteristic curves of a plurality of chips; discretizing each transfer characteristic curve, obtaining a plurality of discrete points of the transfer characteristic curve to form a chip discrete point set; obtaining chips of any two chips among the plurality of chips Discrete point set; calculate several relative phase difference values of the two chips, the relative phase difference value is the relative phase difference value of the drain current or the relative phase difference value of the gate-source voltage; calculate the average relative phase difference value of the two chips, and the average relative phase difference value is the relative phase difference value of the two chips The average value of several relative phase difference values; comparing all the average relative phase difference values in multiple chips to determine the minimum average relative phase difference value; determining the two chips corresponding to the minimum average relative phase difference value as the target screening chip. The present invention can obtain two parallel-connected chips with small dispersion of threshold voltage and transconductance coefficient, so that the transient current sharing effect of the parallel-connected chips is better.

Description

一种功率半导体模块内部并联芯片筛选方法及系统A method and system for screening parallel chips inside a power semiconductor module

技术领域technical field

本发明涉及功率半导体并联技术领域,特别是涉及一种功率半导体模块内部并联芯片筛选方法及系统。The invention relates to the technical field of parallel connection of power semiconductors, in particular to a method and system for screening parallel chips inside a power semiconductor module.

背景技术Background technique

近年来,随着碳化硅功率半导体器件商业化进程的加快,良好的市场前景推动着技术的不断发展。相比于已经具有几十年技术沉淀的硅制备工艺,碳化硅功率器件在电流等级、可靠性以及成本等方面仍有很多不足之处。日益渐长的大功率应用需求和现有碳化硅器件电流密度的物理限制使得装备研发人员不得不采用器件并联方式作为一种替代的解决方案。然而,即使在电路布局完全对称的情况下,由于制备过程中无法避免的芯片参数差异性,并联单元之间也会存在电流分布不均衡,这给碳化硅芯片的并联应用带来了极大的挑战。In recent years, with the acceleration of the commercialization of silicon carbide power semiconductor devices, the good market prospects have promoted the continuous development of technology. Compared with the silicon preparation process that has been accumulated for decades, silicon carbide power devices still have many shortcomings in terms of current level, reliability and cost. The ever-increasing demand for high-power applications and the physical limitations of the current density of existing silicon carbide devices have forced equipment developers to use parallel connection of devices as an alternative solution. However, even in the case of completely symmetrical circuit layout, due to the unavoidable differences in chip parameters during the fabrication process, there will be unbalanced current distribution among parallel units, which brings great challenges to the parallel application of SiC chips. challenge.

在芯片制备过程中,由于制作工艺、环境和人员或设备操作的差异,会导致不同芯片参数不一致。类似于电子元件容差的概念,芯片参数分散性是指不同器件的特性参数并不一致,而是在一定范围内分布的特性。对于成熟的硅基器件,经过了多年的发展,现有工艺技术还是很难保证器件参数完全一致,而对于发展仍不够成熟的碳化硅器件技术来说,器件参数的分散性将会更大。因此,在并联封装之前,芯片参数的筛选尤为重要。During the chip preparation process, due to differences in the manufacturing process, environment, and personnel or equipment operations, the parameters of different chips will be inconsistent. Similar to the concept of electronic component tolerance, chip parameter dispersion refers to the characteristic that the characteristic parameters of different devices are not consistent, but distributed within a certain range. For mature silicon-based devices, after years of development, the existing process technology is still difficult to ensure that the device parameters are completely consistent, and for the silicon carbide device technology that is still immature, the dispersion of device parameters will be greater. Therefore, before parallel packaging, the screening of chip parameters is particularly important.

目前对芯片的筛选通常采用等级划分法。例如,1993年德国AEG公司的Ch.Keller指出芯片厂商通常会提供不同等级的绝缘栅双极型晶体管(Insulated Gate BipolarTransistor,IGBT)芯片,这些芯片的导通压降分散程度一般都不超过0.5V,从而使通态电流的不均衡度可以控制在10%-20%之间;1995年日本三菱公司的D.Medaule提出将所有准备用于并联的IGBT芯片的导通压降按等级划分筛选,每一个等级的导通压降区间范围为0.25V或0.3V,并指出采用同一等级下的芯片进行并联时,可以保证芯片并联电流不均衡度在15%以内;1998年富士电机公司的Takeharu Koga在对2.5kV/1.8kA的压接式IGBT模块的鲁棒性和可靠性的研究中指出,除了要对IGBT芯片的导通压降进行筛选之外,还需对芯片的动态参数如关断存储时间和下降时间等进行筛选,并给出了导通压降差异不超过±0.1V、存储时间差异不超过±5%等筛选指标;2014年富士电机技术手册中以其公司的Super FAP系列的MOSFET为例,制定了阈值电压的筛选标准,对所有批次产品的阈值电压按照不同等级进行分类,其中对于逻辑系列器件,以0.35V为间隔进行等级划分,功率器件系列以0.4V为一个划分等级。At present, the screening of chips usually adopts the classification method. For example, in 1993, Ch. Keller of Germany's AEG Company pointed out that chip manufacturers usually provide different levels of insulated gate bipolar transistor (Insulated Gate Bipolar Transistor, IGBT) chips, and the conduction voltage drop dispersion of these chips generally does not exceed 0.5V , so that the unbalance of the on-state current can be controlled between 10%-20%; in 1995, D. Medaule of Mitsubishi Corporation of Japan proposed to divide and screen the conduction voltage drop of all IGBT chips prepared for parallel connection, The conduction voltage drop range of each level is 0.25V or 0.3V, and it is pointed out that when the chips of the same level are used for parallel connection, the parallel current imbalance of the chips can be guaranteed within 15%; Takeharu Koga of Fuji Electric Company in 1998 In the research on the robustness and reliability of the 2.5kV/1.8kA press-connect IGBT module, it is pointed out that in addition to screening the conduction voltage drop of the IGBT chip, it is also necessary to check the dynamic parameters of the chip such as turn-off The storage time and fall time are screened, and the screening indicators such as the difference of the conduction voltage drop not exceeding ±0.1V and the difference of the storage time not exceeding ±5% are given; in the 2014 Fuji Electric Technical Manual, the company's Super FAP series Taking MOSFET as an example, the threshold voltage screening standard has been formulated, and the threshold voltage of all batches of products is classified according to different grades. For logic series devices, the grades are divided by 0.35V, and for power device series, 0.4V is used as a class. Division level.

现有的芯片筛选的方法,均是采集芯片的某一个参数,例如导通压降或阈值电压,然后按照采集的参数进行等级划分,这种方法通常只能进行粗略的筛选,筛选出的并联芯片的瞬态均流效果不佳,并且虽然从理论上来说,可以适当增加筛选参数的数量来提高筛选出的并联芯片的瞬态均流效果,但是实际上随着筛选的参数数量增多,按照不同参数所划分区间筛选出的器件标号可能均不一样,这些区间的交集将会很小,很难同时兼顾多个参数。因此,现有的芯片筛选方法只能实现并联芯片的粗略筛选,筛选出的并联芯片的瞬态均流效果不佳。The existing method of chip screening is to collect a certain parameter of the chip, such as conduction voltage drop or threshold voltage, and then classify according to the collected parameters. This method can only be roughly screened, and the screened parallel The chip's transient current sharing effect is not good, and although theoretically, the number of screening parameters can be appropriately increased to improve the transient current sharing effect of the screened parallel chips, but in fact, as the number of screening parameters increases, according to The device labels screened out by the intervals divided by different parameters may be different. The intersection of these intervals will be very small, and it is difficult to take into account multiple parameters at the same time. Therefore, the existing chip screening method can only realize rough screening of parallel chips, and the transient current sharing effect of the screened parallel chips is not good.

发明内容Contents of the invention

基于此,有必要提供一种功率半导体模块内部并联芯片筛选方法及系统,来实现并联芯片的精确筛选,提高筛选出的并联芯片的瞬态均流效果。Based on this, it is necessary to provide a method and system for screening parallel chips inside a power semiconductor module, so as to realize accurate screening of parallel chips and improve the transient current sharing effect of the screened parallel chips.

为实现上述目的,本发明提供了如下方案:To achieve the above object, the present invention provides the following scheme:

一种功率半导体模块内部并联芯片筛选方法,包括:A method for screening parallel-connected chips inside a power semiconductor module, comprising:

获取多个芯片的转移特性曲线,所述转移特性曲线为每个所述芯片在开通过程中的栅源极电压与漏极电流的变化关系的曲线;Acquiring transfer characteristic curves of a plurality of chips, the transfer characteristic curve is a curve of the relationship between the gate-source voltage and the drain current of each chip during the turn-on process;

将每一所述转移特性曲线离散化,获取所述转移特性曲线的多个离散点,构成芯片离散点集;discretize each of the transfer characteristic curves, and obtain a plurality of discrete points of the transfer characteristic curve to form a chip discrete point set;

获取多个所述芯片中任意两个芯片的所述芯片离散点集;Obtaining the chip discrete point sets of any two chips among the plurality of chips;

计算两所述芯片的若干个相对相差值,所述相对相差值为漏极电流相对相差值或栅源极电压相对相差值;所述漏极电流相对相差值为两所述芯片离散点集中在同一个栅源极电压下的离散点的漏极电流的相对相差值;所述栅源极电压相对相差值为两所述芯片离散点集中在同一个漏极电流下的离散点的栅源极电压的相对相差值;Calculate several relative phase difference values of the two chips, the relative phase difference value is the relative phase difference value of the drain current or the relative phase difference value of the gate-source voltage; the relative phase difference value of the drain current is that the discrete points of the two chips are concentrated at The relative phase difference value of the drain current at the discrete point under the same gate-source voltage; the relative phase difference value of the gate-source voltage is the gate-source value of the discrete point at which the discrete points of the two chips are concentrated under the same drain current The relative phase difference of the voltage;

计算两所述芯片的平均相对相差值,所述平均相对相差值为两所述芯片的若干个相对相差值的平均值;Calculate the average relative phase difference value of the two chips, the average relative phase difference value is the average value of several relative phase difference values of the two chips;

比较多个所述芯片中所有所述平均相对相差值,确定最小平均相对相差值;Comparing all the average relative phase difference values in a plurality of said chips to determine the minimum average relative phase difference value;

确定所述最小平均相对相差值对应的两个芯片作为目标筛选芯片。The two chips corresponding to the minimum average relative phase difference value are determined as target screening chips.

可选的,所述获取多个芯片的转移特性曲线,具体包括:Optionally, the acquiring transfer characteristic curves of multiple chips specifically includes:

通过功率分析仪获取每个芯片的转移特性测量值;Obtain transfer characteristic measurements for each chip with a power analyzer;

依据所述每个芯片的转移特性测量值,绘制多个芯片的转移特性曲线。Drawing transfer characteristic curves of a plurality of chips according to the transfer characteristic measurement value of each chip.

可选的,所述将每一所述转移特性曲线离散化,获取所述转移特性曲线的多个离散点,构成芯片离散点集,具体包括:Optionally, discretizing each of the transfer characteristic curves to obtain a plurality of discrete points of the transfer characteristic curve to form a chip discrete point set specifically includes:

采用插值的方式对所述转移特性曲线进行处理,获取所述转移特性曲线的多个离散点。The transfer characteristic curve is processed by means of interpolation to obtain a plurality of discrete points of the transfer characteristic curve.

可选的,所述通过功率分析仪获取每个芯片的转移特性测量值,具体包括:Optionally, the acquisition of the transfer characteristic measurement value of each chip through a power analyzer specifically includes:

获取固定步长,所述固定步长在预设范围内;Obtaining a fixed step size, the fixed step size is within a preset range;

依据所述固定步长获取每个芯片的转移特性测量值。The transfer characteristic measurement value of each chip is obtained according to the fixed step size.

本发明还提供了一种功率半导体模块内部并联芯片筛选系统,包括:The present invention also provides a screening system for parallel chips inside a power semiconductor module, including:

第一获取模块,用于获取多个芯片的转移特性曲线,所述转移特性曲线为每个所述芯片在开通过程中的栅源极电压与漏极电流的变化关系的曲线;The first acquisition module is configured to acquire transfer characteristic curves of a plurality of chips, where the transfer characteristic curve is a curve of the relationship between the gate-source voltage and the drain current of each chip during the turn-on process;

离散模块,用于将每一所述转移特性曲线离散化,获取所述转移特性曲线的多个离散点,构成芯片离散点集;a discrete module, configured to discretize each of the transfer characteristic curves, obtain a plurality of discrete points of the transfer characteristic curve, and form a chip discrete point set;

第二获取模块,用于获取多个所述芯片中任意两个芯片的所述芯片离散点集;A second acquisition module, configured to acquire the chip discrete point sets of any two chips among the plurality of chips;

第一计算模块,用于计算两所述芯片的若干个相对相差值,所述相对相差值为漏极电流相对相差值或栅源极电压相对相差值;所述漏极电流相对相差值为两所述芯片离散点集中在同一个栅源极电压下的离散点的漏极电流的相对相差值;所述栅源极电压相对相差值为两所述芯片离散点集中在同一个漏极电流下的离散点的栅源极电压的相对相差值;The first calculation module is used to calculate several relative phase difference values of the two chips, the relative phase difference value is the relative phase difference value of the drain current or the relative phase difference value of the gate-source voltage; the relative phase difference value of the drain current is two The relative phase difference value of the drain current of the discrete point of the discrete point of the chip concentrated under the same gate-source voltage; the relative phase difference value of the gate-source voltage of the two discrete points of the chip concentrated under the same drain current The relative phase difference value of the gate-source voltage at the discrete point of ;

第二计算模块,用于计算两所述芯片的平均相对相差值,所述平均相对相差值为两所述芯片的若干个相对相差值的平均值;The second calculation module is used to calculate the average relative phase difference value of the two chips, and the average relative phase difference value is the average value of several relative phase difference values of the two chips;

比较模块,用于比较多个所述芯片中所有所述平均相对相差值,确定最小平均相对相差值;A comparison module, configured to compare all the average relative phase difference values in multiple chips, and determine the minimum average relative phase difference value;

目标芯片确定模块,用于确定所述最小平均相对相差值对应的两个芯片作为目标筛选芯片。The target chip determination module is configured to determine the two chips corresponding to the minimum average relative phase difference as target screening chips.

可选的,所述第一获取模块,具体包括:Optionally, the first acquisition module specifically includes:

转移特性测量值获取单元,用于通过功率分析仪获取每个芯片的转移特性测量值;a transfer characteristic measurement value acquisition unit, configured to obtain the transfer characteristic measurement value of each chip through a power analyzer;

转移特性曲线获取单元,用于依据所述每个芯片的转移特性测量值,绘制多个芯片的转移特性曲线。The transfer characteristic curve acquisition unit is configured to draw transfer characteristic curves of a plurality of chips according to the transfer characteristic measurement value of each chip.

可选的,所述离散模块,具体包括:Optionally, the discrete module specifically includes:

离散点获取单元,用于采用插值的方式对所述转移特性曲线进行处理,获取所述转移特性曲线的多个离散点。The discrete point acquisition unit is configured to process the transfer characteristic curve by means of interpolation to obtain multiple discrete points of the transfer characteristic curve.

可选的,所述转移特性测量值获取单元,具体包括:Optionally, the transfer characteristic measurement value acquisition unit specifically includes:

步长获取子单元,用于获取固定步长,所述固定步长在预设范围内;The step size obtaining subunit is used to obtain a fixed step size, and the fixed step size is within a preset range;

转移特性测量值获取子单元,用于依据所述固定步长获取每个芯片的转移特性测量值。The transfer characteristic measurement value acquisition subunit is configured to obtain the transfer characteristic measurement value of each chip according to the fixed step size.

与现有技术相比,本发明的有益效果是:Compared with prior art, the beneficial effect of the present invention is:

本发明提出了一种功率半导体模块内部并联芯片筛选方法及系统,所述方法包括:获取多个芯片的转移特性曲线;将每一转移特性曲线离散化,获取转移特性曲线的多个离散点,构成芯片离散点集;获取多个芯片中任意两个芯片的芯片离散点集;计算两芯片的若干个相对相差值;计算两芯片的平均相对相差值;比较多个芯片中所有平均相对相差值,确定最小平均相对相差值;确定最小平均相对相差值对应的两个芯片作为目标筛选芯片。本发明避开了按照一个参数进行等级划分的筛选方法,而是通过比较不同芯片的转移特性曲线的相似度进行筛选,通过转移特性曲线的相似度来反映芯片阈值电压和跨导系数两个关键参数的分散性,并利用相对相差值作为筛选指标,实现了芯片的精确筛选,提高了筛选出的并联芯片的瞬态均流效果,其中利用相对相差值作为筛选指标,相对相差值越小,则两个芯片的转移特性曲线相似度越高,进而表明两个芯片的阈值电压的分散性和跨导系数的分散性都很小,其中阈值电压的分散性小,说明两个芯片开通时刻的差异很小,跨导系数的分散性小,说明导通电流的上升速度基本一致;相对相差值越小,则两个芯片的转移特性曲线相似度越高,也能够表明芯片并联后的瞬态均流效果更佳。The present invention proposes a method and system for screening parallel-connected chips inside a power semiconductor module. The method includes: obtaining transfer characteristic curves of multiple chips; discretizing each transfer characteristic curve to obtain multiple discrete points of the transfer characteristic curve, Constitute a chip discrete point set; obtain chip discrete point sets of any two chips in multiple chips; calculate several relative phase difference values of two chips; calculate the average relative phase difference value of two chips; compare all average relative phase difference values of multiple chips , determine the minimum average relative phase difference value; determine the two chips corresponding to the minimum average relative phase difference value as target screening chips. The present invention avoids the screening method of classifying according to a parameter, but screens by comparing the similarity of transfer characteristic curves of different chips, and reflects the two key points of chip threshold voltage and transconductance coefficient through the similarity of transfer characteristic curves. The dispersion of parameters, and using the relative phase difference value as a screening index, realizes the precise screening of chips, and improves the transient current sharing effect of the screened parallel chips. Among them, using the relative phase difference value as a screening index, the smaller the relative phase difference value, The higher the similarity of the transfer characteristic curves of the two chips is, the higher the dispersion of the threshold voltage and the dispersion of the transconductance coefficient of the two chips are. The difference is very small, and the dispersion of the transconductance coefficient is small, indicating that the rising speed of the conduction current is basically the same; the smaller the relative phase difference, the higher the similarity of the transfer characteristic curves of the two chips, and it can also indicate the transient state of the chips after they are connected in parallel. The current equalization effect is better.

附图说明Description of drawings

为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动性的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the accompanying drawings required in the embodiments. Obviously, the accompanying drawings in the following description are only some of the present invention. Embodiments, for those of ordinary skill in the art, other drawings can also be obtained according to these drawings without paying creative labor.

图1为本发明实施例功率半导体模块内部并联芯片筛选方法的流程图;1 is a flowchart of a method for screening parallel chips inside a power semiconductor module according to an embodiment of the present invention;

图2为本发明实施例1号芯片和2号芯片的转移特性曲线;Fig. 2 is the transfer characteristic curve of No. 1 chip and No. 2 chip of the embodiment of the present invention;

图3为本发明实施例功率半导体模块内部并联芯片筛选系统的结构示意图。FIG. 3 is a schematic structural diagram of a screening system for parallel chips inside a power semiconductor module according to an embodiment of the present invention.

具体实施方式Detailed ways

下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

为使本发明的上述目的、特征和优点能够更加明显易懂,下面结合附图和具体实施方式对本发明作进一步详细的说明。In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

图1为本发明实施例功率半导体模块内部并联芯片筛选方法的流程图。FIG. 1 is a flow chart of a method for screening parallel-connected chips inside a power semiconductor module according to an embodiment of the present invention.

参见图1,实施例的功率半导体模块内部并联芯片筛选方法,包括:Referring to Fig. 1, the method for screening parallel chips inside the power semiconductor module of the embodiment includes:

S1:获取多个芯片的转移特性曲线,所述转移特性曲线为每个所述芯片在开通过程中的栅源极电压与漏极电流的变化关系的曲线。S1: Obtain transfer characteristic curves of a plurality of chips, where the transfer characteristic curve is a curve of a relationship between the gate-source voltage and the drain current of each chip during the turn-on process.

具体的,通过功率分析仪或其他测量设备获取多个芯片的转移特性曲线,包括:获取固定步长,所述固定步长在预设范围内;依据所述固定步长获取每个芯片的转移特性测量值;依据所述每个芯片的转移特性测量值,绘制多个芯片的转移特性曲线。Specifically, the transfer characteristic curves of multiple chips are obtained through a power analyzer or other measurement equipment, including: obtaining a fixed step size, the fixed step size is within a preset range; obtaining the transfer characteristic curve of each chip according to the fixed step size Characteristic measurement values; drawing transfer characteristic curves of multiple chips according to the transfer characteristic measurement values of each chip.

S2:将每一所述转移特性曲线离散化,获取所述转移特性曲线的多个离散点,构成芯片离散点集。S2: Discretize each of the transfer characteristic curves, and acquire a plurality of discrete points of the transfer characteristic curve to form a chip discrete point set.

具体的,采用插值的方式对所述转移特性曲线进行处理,获取所述转移特性曲线的多个离散点。Specifically, the transfer characteristic curve is processed in an interpolation manner to obtain multiple discrete points of the transfer characteristic curve.

S3:获取多个所述芯片中任意两个芯片的所述芯片离散点集。S3: Obtain the chip discrete point sets of any two chips among the plurality of chips.

S4:计算两所述芯片的若干个相对相差值,所述相对相差值为漏极电流相对相差值或栅源极电压相对相差值。S4: Calculating several relative phase difference values of the two chips, the relative phase difference values being the relative phase difference values of the drain current or the relative phase difference values of the gate-source voltage.

具体的,所述漏极电流相对相差值为两所述芯片离散点集中在同一个栅源极电压下的离散点的漏极电流的相对相差值;所述栅源极电压相对相差值为两所述芯片离散点集中在同一个漏极电流下的离散点的栅源极电压的相对相差值。Specifically, the relative phase difference value of the drain current is the relative phase difference value of the drain current at two discrete points of the chip at which the discrete points are concentrated under the same gate-source voltage; the relative phase difference value of the gate-source voltage is two The discrete points of the chip are concentrated in the relative phase difference of the gate-source voltage of the discrete points under the same drain current.

S5:计算两所述芯片的平均相对相差值,所述平均相对相差值为两所述芯片的若干个相对相差值的平均值。S5: Calculate an average relative phase difference value of the two chips, where the average relative phase difference value is an average value of several relative phase difference values of the two chips.

S6:比较多个所述芯片中所有所述平均相对相差值,确定最小平均相对相差值。S6: Comparing all the average relative phase difference values in multiple chips, and determining the minimum average relative phase difference value.

S7:确定所述最小平均相对相差值对应的两个芯片作为目标筛选芯片。S7: Determine the two chips corresponding to the minimum average relative phase difference as target screening chips.

在实际应用中,上述实施例的功率半导体模块内部并联芯片筛选方法可用于对编号从1到30号的芯片进行筛选,得到所需的并联芯片,具体为:In practical applications, the method for screening internal parallel chips of power semiconductor modules in the above embodiment can be used to screen chips numbered from 1 to 30 to obtain the required parallel chips, specifically:

通过功率分析仪或其他测量设备测量得到30个芯片的转移特性曲线,每条转移特性曲线都是由若干个转移特性测量值绘制而成的,转移特性测量值通过以下步骤测得:获取固定步长,所述固定步长在预设范围内;依据所述固定步长获取每个芯片的转移特性测量值。The transfer characteristic curves of 30 chips are measured by a power analyzer or other measuring equipment. Each transfer characteristic curve is drawn from several transfer characteristic measurement values. The transfer characteristic measurement values are measured by the following steps: Obtain a fixed step long, the fixed step size is within a preset range; and the transfer characteristic measurement value of each chip is obtained according to the fixed step size.

采用插值的方式对所述转移特性曲线进行处理,获取所述转移特性曲线的多个离散点,其目的是为了得到充足的离散点。The transfer characteristic curve is processed in an interpolation manner to obtain multiple discrete points of the transfer characteristic curve, the purpose of which is to obtain sufficient discrete points.

本实施例中,选取固定步长为1V,获取1号芯片和2号芯片的转移特性曲线,采用插值的方式对1号芯片和2号芯片的转移特性曲线分别进行离散,使每条曲线的离散点的个数均为n。In this embodiment, a fixed step size of 1V is selected to obtain the transfer characteristic curves of No. 1 chip and No. 2 chip, and the transfer characteristic curves of No. 1 chip and No. 2 chip are respectively discretized by interpolation, so that each curve The number of discrete points is n.

图2为实施例1号芯片和2号芯片的转移特性曲线。Fig. 2 is the transfer characteristic curve of No. 1 chip and No. 2 chip of embodiment.

参见图2,曲线l1为1号芯片的转移特性曲线,曲线l2为2号芯片的转移特性曲线,移特性曲线的横坐标表示栅源极电压,纵坐标表示漏极电流,在相同的栅源极电压下,对于任意一对离散点k(A,B),A表示1号芯片的转移特性曲线上的离散点,B表示与1号芯片在同一个栅源极电压下的2号芯片的转移特性曲线上的离散点,点A的坐标为(x,pk),点B的坐标为(x,qk)。Referring to Fig. 2, curve l1 is the transfer characteristic curve of No. 1 chip, and curve l2 is the transfer characteristic curve of No. 2 chip. The abscissa of the transfer characteristic curve represents the gate-source voltage, and the ordinate represents the drain current. Under the gate-source voltage, for any pair of discrete points k(A, B), A represents the discrete point on the transfer characteristic curve of the No. 1 chip, and B represents the No. 2 chip under the same gate-source voltage as the No. 1 chip. The discrete points on the transfer characteristic curve of the chip, the coordinates of point A are (x,p k ), and the coordinates of point B are (x,q k ).

计算1号芯片和2号芯片在离散点k(A,B)的漏极电流相对相差值,计算公式为:Calculate the relative phase difference of the drain current of No. 1 chip and No. 2 chip at the discrete point k(A, B), and the calculation formula is:

计算1号芯片和2号芯片所有离散点的漏极电流相对相差值,并求平均,得到1号芯片和2号芯片的平均相对相差值,计算公式如下:Calculate the relative phase difference of the drain current of all discrete points of No. 1 chip and No. 2 chip, and calculate the average value to obtain the average relative phase difference between No. 1 chip and No. 2 chip. The calculation formula is as follows:

1号芯片和2号芯片的平均相对相差值作为1号芯片和2号芯片的筛选指标值。The average relative phase difference between No. 1 chip and No. 2 chip As the screening index value of No. 1 chip and No. 2 chip.

以1号芯片的转移曲线为基准,利用上述两个公式分别计算1号芯片与2号芯片、1号芯片与3号芯片……1号芯片与30号芯片的每组芯片的平均相对相差值,得到若干个平均相对相差值 Based on the transfer curve of No. 1 chip, use the above two formulas to calculate the average relative phase difference of each group of chips between No. 1 chip and No. 2 chip, No. 1 chip and No. 3 chip... No. 1 chip and No. 30 chip , to obtain several average relative phase difference values

上述已完成1号芯片与2-30号芯片的全部对比,下面只需重复上述步骤完成剩余芯片的对比,以2号芯片为基准,分别计算2号芯片与3号芯片、2号芯片与4号芯片……2号芯片与30号芯片的每组的平均相对相差值,类似的,可完成3号芯片、4号芯片直至所有芯片的全部对比。All the comparisons between No. 1 chip and No. 2-30 chips have been completed above, and you only need to repeat the above steps to complete the comparison of the remaining chips. Taking No. 2 chip as the benchmark, calculate No. 2 chip and No. 3 chip, No. 2 chip and 4 chip No. chip... the average relative phase difference of each group between No. 2 chip and No. 30 chip. Similarly, the comparison of No. 3 chip, No. 4 chip and all chips can be completed.

通过上述计算,可得任意两个芯片的筛选指标值,如下表所示:Through the above calculation, the screening index values of any two chips can be obtained, as shown in the following table:

比较上述表格中30个芯片中任意两个芯片的平均相对相差值,确定最小平均相对相差值对应的两个芯片作为并联芯片。Compare the average relative phase difference values of any two chips among the 30 chips in the above table, and determine the two chips corresponding to the minimum average relative phase difference value as parallel chips.

实施例中的功率半导体模块内部并联芯片筛选方法避开了按照一个参数进行等级划分的筛选方法,而是通过比较不同芯片的转移特性曲线的相似度进行筛选,通过转移特性曲线的相似度来反映芯片阈值电压和跨导系数两个关键参数的分散性,并利用相对相差值作为筛选指标,能够实现芯片的精确筛选,提高筛选出的并联芯片的瞬态均流效果。利用相对相差值作为筛选指标,相对相差值越小,则两个芯片的转移特性曲线相似度越高,进而表明两个芯片的阈值电压的分散性和跨导系数的分散性都很小,其中阈值电压的分散性小,说明两个芯片开通时刻的差异很小,跨导系数的分散性小,说明导通电流的上升速度基本一致;相对相差值越小,则两个芯片的转移特性曲线相似度越高,也能够表明芯片并联后的瞬态均流效果更佳。The screening method for internal parallel chips of power semiconductor modules in the embodiment avoids the screening method of classifying according to a parameter, but screens by comparing the similarity of the transfer characteristic curves of different chips, and reflects the similarity of the transfer characteristic curves. The dispersion of the two key parameters of chip threshold voltage and transconductance coefficient, and using the relative phase difference value as the screening index, can realize the precise screening of chips and improve the transient current sharing effect of the screened parallel chips. Using the relative phase difference value as a screening index, the smaller the relative phase difference value, the higher the similarity of the transfer characteristic curves of the two chips, which in turn indicates that the dispersion of the threshold voltage and the transconductance coefficient of the two chips are very small, among which The small dispersion of the threshold voltage indicates that the difference in the turn-on time of the two chips is small, and the small dispersion of the transconductance coefficient indicates that the rising speed of the conduction current is basically the same; the smaller the relative phase difference, the better the transfer characteristic curve of the two chips. The higher the similarity, the better the transient current sharing effect after the chips are connected in parallel.

本发明还提供了一种功率半导体模块内部并联芯片筛选系统,图3为本发明实施例功率半导体模块内部并联芯片筛选系统的结构示意图。The present invention also provides a screening system for parallel chips inside a power semiconductor module, and FIG. 3 is a schematic structural diagram of the screening system for parallel chips inside a power semiconductor module according to an embodiment of the present invention.

参见图3,实施例的芯片筛选系统30,包括:Referring to Fig. 3, the chip screening system 30 of the embodiment includes:

第一获取模块301,用于获取多个芯片的转移特性曲线,所述转移特性曲线为每个所述芯片在开通过程中的栅源极电压与漏极电流的变化关系的曲线。The first acquiring module 301 is configured to acquire transfer characteristic curves of a plurality of chips, where the transfer characteristic curve is a curve of the relationship between the gate-source voltage and the drain current of each chip during the turn-on process.

具体的,所述第一获取模块301,包括:Specifically, the first obtaining module 301 includes:

转移特性测量值获取单元,用于通过功率分析仪获取每个芯片的转移特性测量值,具体包括:The transfer characteristic measurement value acquisition unit is used to obtain the transfer characteristic measurement value of each chip through the power analyzer, specifically including:

步长获取子单元,用于获取固定步长,所述固定步长在预设范围内;The step size obtaining subunit is used to obtain a fixed step size, and the fixed step size is within a preset range;

转移特性测量值获取子单元,用于依据所述固定步长获取每个芯片的转移特性测量值。The transfer characteristic measurement value acquisition subunit is configured to obtain the transfer characteristic measurement value of each chip according to the fixed step size.

转移特性曲线获取单元,用于依据所述每个芯片的转移特性测量值,绘制多个芯片的转移特性曲线。The transfer characteristic curve acquisition unit is configured to draw transfer characteristic curves of a plurality of chips according to the transfer characteristic measurement value of each chip.

离散模块302,用于将每一所述转移特性曲线离散化,获取所述转移特性曲线的多个离散点,构成芯片离散点集。The discretization module 302 is configured to discretize each of the transfer characteristic curves, obtain a plurality of discrete points of the transfer characteristic curves, and form a chip discrete point set.

具体的,所述离散模块302,包括:Specifically, the discrete module 302 includes:

离散点获取单元,用于采用插值的方式对所述转移特性曲线进行处理,获取所述转移特性曲线的多个离散点。The discrete point acquisition unit is configured to process the transfer characteristic curve by means of interpolation to obtain multiple discrete points of the transfer characteristic curve.

第二获取模块303,用于获取多个所述芯片中任意两个芯片的所述芯片离散点集。The second obtaining module 303 is configured to obtain the chip discrete point sets of any two chips among the plurality of chips.

第一计算模块304,用于计算两所述芯片的若干个相对相差值,所述相对相差值为漏极电流相对相差值或栅源极电压相对相差值;所述漏极电流相对相差值为两所述芯片离散点集中在同一个栅源极电压下的离散点的漏极电流的相对相差值;所述栅源极电压相对相差值为两所述芯片离散点集中在同一个漏极电流下的离散点的栅源极电压的相对相差值。The first calculation module 304 is used to calculate several relative phase difference values of the two chips, the relative phase difference value is the relative phase difference value of the drain current or the relative phase difference value of the gate-source voltage; the relative phase difference value of the drain current is The relative phase difference value of the drain current at the discrete point of the discrete points of the two chips concentrated under the same gate-source voltage; the relative phase difference value of the gate-source voltage is concentrated at the same drain current The relative phase difference value of the gate-source voltage at the discrete point below.

第二计算模块305,用于计算两所述芯片的平均相对相差值,所述平均相对相差值为两所述芯片的若干个相对相差值的平均值。The second calculation module 305 is configured to calculate an average relative phase difference value of the two chips, and the average relative phase difference value is an average value of several relative phase difference values of the two chips.

比较模块306,用于比较多个所述芯片中所有所述平均相对相差值,确定最小平均相对相差值。The comparison module 306 is configured to compare all the average relative phase difference values in multiple chips, and determine the minimum average relative phase difference value.

目标芯片确定模块307,用于确定所述最小平均相对相差值对应的两个芯片作为目标筛选芯片。The target chip determination module 307 is configured to determine the two chips corresponding to the minimum average relative phase difference as target screening chips.

本实施例中的功率半导体模块内部并联芯片筛选系统,避开了按照一个参数进行等级划分的筛选方法,而是通过比较不同芯片的转移特性曲线的相似度进行筛选,通过转移特性曲线的相似度来反映芯片阈值电压和跨导系数两个关键参数的分散性,并利用相对相差值作为筛选指标,实现了芯片的精确筛选,提高了筛选出的并联芯片的瞬态均流效果。The internal parallel chip screening system of the power semiconductor module in this embodiment avoids the screening method of classifying according to a parameter, but screens by comparing the similarity of the transfer characteristic curves of different chips. To reflect the dispersion of the two key parameters of chip threshold voltage and transconductance coefficient, and use the relative phase difference value as the screening index, the precise screening of chips is realized, and the transient current sharing effect of the screened parallel chips is improved.

本文中应用了具体个例对本发明的原理及实施方式进行了阐述,以上实施例的说明只是用于帮助理解本发明的方法及其核心思想;同时,对于本领域的一般技术人员,依据本发明的思想,在具体实施方式及应用范围上均会有改变之处。综上所述,本说明书内容不应理解为对本发明的限制。In this paper, specific examples have been used to illustrate the principle and implementation of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea; meanwhile, for those of ordinary skill in the art, according to the present invention Thoughts, there will be changes in specific implementation methods and application ranges. In summary, the contents of this specification should not be construed as limiting the present invention.

Claims (8)

1. A method for screening parallel chips in a power semiconductor module is characterized by comprising the following steps:
obtaining transfer characteristic curves of a plurality of chips, wherein the transfer characteristic curves are curves of the change relation between the grid-source voltage and the drain current of each chip in the turn-on process;
discretizing each transfer characteristic curve to obtain a plurality of discrete points of the transfer characteristic curve to form a chip discrete point set;
obtaining the chip discrete point sets of any two chips in the plurality of chips;
calculating a plurality of relative phase difference values of the two chips, wherein the relative phase difference values are drain current relative phase difference values or gate-source voltage relative phase difference values; the relative phase difference value of the drain current is the relative phase difference value of the drain current of the discrete point of two chips under the condition that the discrete points are concentrated on the same grid-source voltage; the relative phase difference value of the grid-source voltages is the relative phase difference value of the grid-source voltages of the discrete points of the two chips under the condition that the discrete points are concentrated on the same drain current; the calculation formula of the relative phase difference value of the drain current is as follows:
wherein,for the relative phase difference value of drain current of the No. 1 chip and the No. 2 chip at the k-th pair of discrete points k (A, B), under the same grid-source voltage, for any pair of discrete points k (A, B), A represents a discrete point on the transfer characteristic curve of the No. 1 chip, B represents a discrete point on the transfer characteristic curve of the No. 2 chip at the same grid-source voltage with the No. 1 chip, and the coordinates of the point A are (x, p)k) The coordinates of point B are (x, q)k);
Calculating an average relative phase difference value of the two chips, wherein the average relative phase difference value is an average value of a plurality of relative phase difference values of the two chips;
comparing all the average relative phase difference values in a plurality of the chips to determine a minimum average relative phase difference value;
and determining two chips corresponding to the minimum average relative phase difference value as target screening chips.
2. The method for screening chips connected in parallel inside a power semiconductor module according to claim 1, wherein the obtaining of transfer characteristic curves of a plurality of chips specifically comprises:
obtaining a transfer characteristic measured value of each chip through a power analyzer;
and drawing transfer characteristic curves of a plurality of chips according to the transfer characteristic measured value of each chip.
3. The method for screening chips connected in parallel inside a power semiconductor module according to claim 1, wherein the discretizing each transfer characteristic curve to obtain a plurality of discrete points of the transfer characteristic curve to form a chip discrete point set specifically comprises:
and processing the transfer characteristic curve in an interpolation mode to obtain a plurality of discrete points of the transfer characteristic curve.
4. The method for screening chips connected in parallel inside a power semiconductor module according to claim 2, wherein the obtaining of the transfer characteristic measurement value of each chip by the power analyzer specifically comprises:
obtaining a fixed step length, wherein the fixed step length is within a preset range;
and acquiring the transfer characteristic measurement value of each chip according to the fixed step length.
5. A power semiconductor module internal parallel chip screening system is characterized by comprising:
the first acquisition module is used for acquiring transfer characteristic curves of a plurality of chips, wherein the transfer characteristic curves are curves of the change relation between the grid-source voltage and the drain current of each chip in the turn-on process;
the discrete module is used for discretizing each transfer characteristic curve to obtain a plurality of discrete points of the transfer characteristic curve to form a chip discrete point set;
a second obtaining module, configured to obtain the chip discrete point sets of any two chips in the plurality of chips;
the first calculation module is used for calculating a plurality of relative phase difference values of the two chips, wherein the relative phase difference values are drain current relative phase difference values or gate-source voltage relative phase difference values; the relative phase difference value of the drain current is the relative phase difference value of the drain current of the discrete point of two chips under the condition that the discrete points are concentrated on the same grid-source voltage; the relative phase difference value of the grid-source voltages is the relative phase difference value of the grid-source voltages of the discrete points of the two chips under the condition that the discrete points are concentrated on the same drain current; the calculation formula of the relative phase difference value of the drain current is as follows:
wherein,for the relative phase difference value of drain current of the No. 1 chip and the No. 2 chip at the k-th pair of discrete points k (A, B), under the same grid-source voltage, for any pair of discrete points k (A, B), A represents a discrete point on the transfer characteristic curve of the No. 1 chip, B represents a discrete point on the transfer characteristic curve of the No. 2 chip at the same grid-source voltage with the No. 1 chip, and the coordinates of the point A are (x, p)k) The coordinates of point B are (x, q)k);
The second calculation module is used for calculating an average relative phase difference value of the two chips, wherein the average relative phase difference value is an average value of a plurality of relative phase difference values of the two chips;
a comparison module for comparing all the average relative phase difference values in the plurality of chips to determine a minimum average relative phase difference value;
and the target chip determining module is used for determining two chips corresponding to the minimum average relative phase difference value as target screening chips.
6. The system for screening chips connected in parallel inside a power semiconductor module according to claim 5, wherein the first obtaining module specifically comprises:
a transfer characteristic measurement value acquisition unit for acquiring a transfer characteristic measurement value of each chip by a power analyzer;
and the transfer characteristic curve acquisition unit is used for drawing transfer characteristic curves of a plurality of chips according to the transfer characteristic measured value of each chip.
7. The system for screening chips connected in parallel inside a power semiconductor module according to claim 5, wherein the discrete module specifically comprises:
and the discrete point acquisition unit is used for processing the transfer characteristic curve in an interpolation mode to acquire a plurality of discrete points of the transfer characteristic curve.
8. The system for screening chips connected in parallel inside a power semiconductor module according to claim 6, wherein the transfer characteristic measurement value obtaining unit specifically comprises:
the step length obtaining subunit is used for obtaining a fixed step length, and the fixed step length is within a preset range;
and the transfer characteristic measurement value acquisition subunit is used for acquiring the transfer characteristic measurement value of each chip according to the fixed step length.
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