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CN108207083A - Manufacturing method and structure of circuit board - Google Patents

Manufacturing method and structure of circuit board Download PDF

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Publication number
CN108207083A
CN108207083A CN201611176648.XA CN201611176648A CN108207083A CN 108207083 A CN108207083 A CN 108207083A CN 201611176648 A CN201611176648 A CN 201611176648A CN 108207083 A CN108207083 A CN 108207083A
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China
Prior art keywords
patterned
layer
circuit
circuit layer
patterned circuit
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CN201611176648.XA
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Chinese (zh)
Inventor
廖伯轩
张启民
余丞博
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Unimicron Technology Corp
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Unimicron Technology Corp
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Priority to CN201611176648.XA priority Critical patent/CN108207083A/en
Publication of CN108207083A publication Critical patent/CN108207083A/en
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05Patterning and lithography; Masks; Details of resist
    • H05K2203/0502Patterning and lithography
    • H05K2203/0531Decalcomania, i.e. transfer of a pattern detached from its carrier before affixing the pattern to the substrate

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

本发明提供一种线路板的制作方法及其结构。本发明线路板的制作方法包括形成第一图案化线路层于线路基板的表面上,并且第一图案化线路层暴露出部分线路基板的表面。形成图案化线路层于第一图案化线路层所暴露出的部分线路基板的表面上。转印第二图案化线路层于对应的图案化黏着层上。本发明能以线路转印的方式制作出具有厚金属细线路层的线路板结构,以及具有不同线宽的图案化厚金属细线路层配置于线路基板上。

The present invention provides a method for manufacturing a circuit board and its structure. The method for manufacturing a circuit board of the present invention includes forming a first patterned circuit layer on the surface of a circuit substrate, and the first patterned circuit layer exposes a portion of the surface of the circuit substrate. Forming a patterned circuit layer on the surface of the portion of the circuit substrate exposed by the first patterned circuit layer. Transferring a second patterned circuit layer onto a corresponding patterned adhesive layer. The present invention can manufacture a circuit board structure having a thick metal fine circuit layer by circuit transfer, and patterned thick metal fine circuit layers with different line widths are configured on the circuit substrate.

Description

线路板的制作方法及其结构Manufacturing method and structure of circuit board

技术领域technical field

本发明涉及一种线路板的制作方法及其结构,且特别是涉及一种厚金属细线路结构的线路板的制作方法及其结构。The invention relates to a method for manufacturing a circuit board and its structure, and in particular to a method for manufacturing a circuit board with a thick metal thin circuit structure and its structure.

背景技术Background technique

在印刷线路板的制程中,为了制作线路板的细线图案,改良式半加成制程(modified semi-additive process,MSAP)常被用来在线路基板上制作线宽为40微米(μm)以下的线路层。然而,前述的制程需要高额的设备及材料的投资使得印刷线路板的制作过程所需的材料及制作成本大幅地增加。除此之外,厚金属线路层,例如厚铜层,难以藉由上述的改良式半加成制程的方式来制作完成,使得厚金属线路层的应用在细线路结构的制作上受到限制。In the manufacturing process of printed circuit boards, in order to make thin line patterns of circuit boards, the modified semi-additive process (MSAP) is often used to make line widths below 40 microns (μm) on circuit boards. line layer. However, the aforesaid manufacturing process requires high investment in equipment and materials, which greatly increases the materials and manufacturing costs required for the manufacturing process of printed circuit boards. In addition, thick metal circuit layers, such as thick copper layers, are difficult to manufacture through the above-mentioned improved semi-additive process, so that the application of thick metal circuit layers in the manufacture of thin circuit structures is limited.

发明内容Contents of the invention

本发明提供一种线路板的制造方法,其以线路转印的方式制作出具有厚金属细线路层的线路板结构。The invention provides a method for manufacturing a circuit board, which uses circuit transfer to produce a circuit board structure with a thick metal thin circuit layer.

本发明提供一种线路板结构,其具有不同线宽的图案化厚金属细线路层配置于线路基板上。The invention provides a circuit board structure, in which patterned thick metal thin circuit layers with different line widths are arranged on the circuit substrate.

本发明的线路板的制作方法包括形成第一图案化线路层于线路基板的表面上,并且第一图案化线路层暴露出部分线路基板的表面。形成图案化线路层于第一图案化线路层所暴露出的部分线路基板的表面。转印第二图案化线路层于对应的图案化黏着层上。The manufacturing method of the circuit board of the present invention includes forming a first patterned circuit layer on the surface of the circuit substrate, and the first patterned circuit layer exposes part of the surface of the circuit substrate. A patterned circuit layer is formed on the part of the surface of the circuit substrate exposed by the first patterned circuit layer. Transfer printing the second patterned circuit layer on the corresponding patterned adhesive layer.

本发明的线路板结构包括线路基板、第一图案化线路层、图案化黏着层以及第二图案化线路层。第一图案化线路层配置于线路基板的表面上,并且暴露出部分线路基板的表面。图案化黏着层配置于第一图案化线路层所暴露出的部分线路基板的表面上。第二图案化线路层对应配置于图案化黏着层上。此外,第二图案化线路层的线宽小于第一图案化线路层的线宽。The circuit board structure of the present invention includes a circuit substrate, a first patterned circuit layer, a patterned adhesive layer and a second patterned circuit layer. The first patterned circuit layer is configured on the surface of the circuit substrate and exposes part of the surface of the circuit substrate. The patterned adhesive layer is configured on the part of the surface of the circuit substrate exposed by the first patterned circuit layer. The second patterned circuit layer is correspondingly disposed on the patterned adhesive layer. In addition, the line width of the second patterned circuit layer is smaller than the line width of the first patterned circuit layer.

在本发明的一实施例中,上述的线路板的制作方法还包括在转印第二图案化线路层于对应的图案化黏着层之前,形成第二图案化线路层于一离型层上。In an embodiment of the present invention, the above-mentioned manufacturing method of the circuit board further includes forming the second patterned circuit layer on a release layer before transferring the second patterned circuit layer to the corresponding patterned adhesive layer.

在本发明的一实施例中,上述的线路基板具有第一对位点,而离型层具第二对位图案,并且在转印第二图案化线路层于对应的黏着层上之前,先将第一对位图案与第二对位图案进行对位。In an embodiment of the present invention, the above-mentioned circuit substrate has a first alignment point, and the release layer has a second alignment pattern, and before transferring the second patterned circuit layer on the corresponding adhesive layer, first The first alignment pattern and the second alignment pattern are aligned.

在本发明的一实施例中,上述的线路板的制作方法还包括形成介电层于线路基板上。介电层覆盖于第一图案化线路层及第二图案化线路层上,并填充于第一图案化线路层及第二图案化线路层之间。In an embodiment of the present invention, the above-mentioned manufacturing method of the circuit board further includes forming a dielectric layer on the circuit substrate. The dielectric layer covers the first patterned circuit layer and the second patterned circuit layer, and fills between the first patterned circuit layer and the second patterned circuit layer.

在本发明的一实施例中,上述的形成图案化黏着层的方法包括网板印刷或喷印。In an embodiment of the present invention, the method for forming the patterned adhesive layer includes screen printing or jet printing.

在本发明的一实施例中,上述的第一图案化线路层的表面与第二图案化线路层的表面相互齐平。In an embodiment of the present invention, the surface of the above-mentioned first patterned circuit layer and the surface of the second patterned circuit layer are flush with each other.

在本发明的一实施例中,上述的第二图案化线路层的线宽小于第一图案化线路层的线宽。In an embodiment of the present invention, the line width of the second patterned circuit layer is smaller than the line width of the first patterned circuit layer.

在本发明的一实施例中,上述的第一图案化线路层的线宽大于或等于第一图案化线路层的线路之间的线距。In an embodiment of the present invention, the line width of the above-mentioned first patterned circuit layer is greater than or equal to the space between the lines of the first patterned circuit layer.

基于上述,在本发明的多个实施例的线路板的制作方法中,第一图案化线路层可形成于线路基板上。接着,图案化黏着层可形成于第一图案化线路层所暴露出的部分线路基板的表面上。然后,第二图案化线路层可藉由转印的方式对应地形成于图案化黏着层上。因此,在本发明的多个实施例中,第一图案化线路层及第二图案化线路层可分别以不同的制程方式形成于线路基板上。特别是,第二图案化线路层是以转印的方式形成于线路基板上,使得第二图案化线路层可具有较第一图案化线路层微小的线宽,并缩小第一图案化线路层与第二图案化线路层之间的线距。Based on the above, in the manufacturing method of the circuit board in various embodiments of the present invention, the first patterned circuit layer can be formed on the circuit substrate. Next, a patterned adhesive layer can be formed on the part of the surface of the circuit substrate exposed by the first patterned circuit layer. Then, the second patterned wiring layer can be correspondingly formed on the patterned adhesive layer by means of transfer printing. Therefore, in various embodiments of the present invention, the first patterned circuit layer and the second patterned circuit layer can be respectively formed on the circuit substrate by different process methods. In particular, the second patterned circuit layer is formed on the circuit substrate by transfer printing, so that the second patterned circuit layer can have a smaller line width than the first patterned circuit layer, and reduce the size of the first patterned circuit layer. and the line distance between the second patterned circuit layer.

为让本发明的上述特征和优点能更明显易懂,下文特举实施例,并配合所示附图作详细说明如下。In order to make the above-mentioned features and advantages of the present invention more comprehensible, the following specific embodiments are described in detail in conjunction with the accompanying drawings.

附图说明Description of drawings

图1是依照本发明的一实施例的线路板的结构示意图;1 is a schematic structural view of a circuit board according to an embodiment of the present invention;

图2是依照本发明的另一实施例的线路板的结构示意图;2 is a schematic structural view of a circuit board according to another embodiment of the present invention;

图3A至图3I是图1及图2的线路板的制作方法的流程示意图。3A to 3I are schematic flowcharts of the manufacturing method of the circuit board shown in FIG. 1 and FIG. 2 .

附图标记说明:Explanation of reference signs:

10:黏着剂10: Adhesive

50:网板50: Stencil

60:离型层60: release layer

62:第二对位图案62: Second alignment pattern

50a:网格开口50a: grid opening

100:线路板100: circuit board

110:线路基板110: circuit substrate

110a:上表面110a: upper surface

110b:下表面110b: lower surface

112:第一对位标记112: The first alignment mark

120:第一图案化线路层120: the first patterned circuit layer

130:图案化黏着层130: patterned adhesive layer

140:第二图案化线路层140: the second patterned circuit layer

150:介电层150: dielectric layer

160:第三图案化线路层160: the third patterned circuit layer

170:导电通孔170: Conductive Via

d1、d3:线宽d1, d3: line width

d2、d4:线距d2, d4: line spacing

具体实施方式Detailed ways

图1是依照本发明的一实施例的线路板结构的示意图。在本实施例中,线路板100包括线路基板110、第一图案化线路层120、图案化黏着层130以及第二图案化线路层140。如图1所示,在本实施例中,第一图案化线路层120可同时形成于线路基板110的上表面110a以及下表面110b上。此外,图案化黏着层130配置于第一图案化线路层120所暴露出的部分线路基板110上。例如,图案化黏着层130可配置于第一图案化线路层120的线路之间的间隙。再者,第二图案化线路层140对应地配置于图案化黏着层130上。FIG. 1 is a schematic diagram of a circuit board structure according to an embodiment of the present invention. In this embodiment, the circuit board 100 includes a circuit substrate 110 , a first patterned circuit layer 120 , a patterned adhesive layer 130 and a second patterned circuit layer 140 . As shown in FIG. 1 , in this embodiment, the first patterned circuit layer 120 can be formed on the upper surface 110 a and the lower surface 110 b of the circuit substrate 110 at the same time. In addition, the patterned adhesive layer 130 is disposed on the part of the circuit substrate 110 exposed by the first patterned circuit layer 120 . For example, the patterned adhesive layer 130 can be disposed in the gap between the lines of the first patterned line layer 120 . Furthermore, the second patterned wiring layer 140 is correspondingly disposed on the patterned adhesive layer 130 .

如图1所示,第一图案化线路层120的线路之间的线距d2大于或等于第一图案化线路层120的线宽d1。举例而言,第一图案化线路层120的线路之间的线距d2相对于第一图案化线路层120的线宽d1的比值是落在1至5的范围内。在本实施例中,第二图案化线路层140的线路两侧分别与第一图案化线路层120之间的线距d4与第二图案化线路层140的线宽d3的和等于第一图案化线路层120本身的线路之间的线距d2。在本实施例中,第二图案化线路层140的线宽d3相对于第一图案化线路层120的线宽d1的比值例如是落在0.8至1.2的范围内。此外,第一图案化线路层120与第二图案化线路层140之间的线距d4小于第二图案化线路层140的线宽d3。As shown in FIG. 1 , the distance d2 between the lines of the first patterned wiring layer 120 is greater than or equal to the line width d1 of the first patterned wiring layer 120 . For example, the ratio of the distance d2 between the lines of the first patterned circuit layer 120 to the line width d1 of the first patterned circuit layer 120 falls within the range of 1-5. In this embodiment, the sum of the distance d4 between the two sides of the second patterned wiring layer 140 and the first patterned wiring layer 120 and the line width d3 of the second patterned wiring layer 140 is equal to the first pattern The distance d2 between the lines of the circuit layer 120 itself. In this embodiment, the ratio of the line width d3 of the second patterned circuit layer 140 to the line width d1 of the first patterned circuit layer 120 falls within a range of 0.8 to 1.2, for example. In addition, the distance d4 between the first patterned circuit layer 120 and the second patterned circuit layer 140 is smaller than the line width d3 of the second patterned circuit layer 140 .

举例而言,第一图案化线路层120的线宽d1可小于30微米。再者,第一图案化线路层120与第二图案化线路层140之间的线距d4可小于或等于10微米。For example, the line width d1 of the first patterned circuit layer 120 may be less than 30 microns. Furthermore, the distance d4 between the first patterned circuit layer 120 and the second patterned circuit layer 140 may be less than or equal to 10 micrometers.

除此之外,在本实施例中,第一图案化线路层120的厚度相对于第二图案化线路层140的厚度的比值例如是落在0.8至1.2的范围内。在一般的实施方式中,图1中的黏着层130的厚度相对于第二图案化线路层140的厚度而言极薄,因此,第二图案化线路层140的厚度可约略等于第一图案化线路层120的厚度。在本实施例中,第一图案化线路层120的厚度例如是大于50微米。Besides, in this embodiment, the ratio of the thickness of the first patterned circuit layer 120 to the thickness of the second patterned circuit layer 140 falls within a range of 0.8 to 1.2, for example. In a general implementation, the thickness of the adhesive layer 130 in FIG. 1 is extremely thin relative to the thickness of the second patterned wiring layer 140. The thickness of the circuit layer 120. In this embodiment, the thickness of the first patterned circuit layer 120 is, for example, greater than 50 microns.

因此,在本实施例中,线路基板110上一方面可形成具有较厚的线路厚度的第一图案化线路层120及第二图案化线路层140,且另一方面,第二图案化线路层140可相较第一图案化线路层具有更窄的线宽d3。此外,相较以单一图案化制程所形成的线路层而言,第一图案化线路层120与第二图案化线路层140之间可具有较窄的线距d4(例如是小于10微米)。Therefore, in this embodiment, on the one hand, the first patterned circuit layer 120 and the second patterned circuit layer 140 with a thicker circuit thickness can be formed on the circuit substrate 110, and on the other hand, the second patterned circuit layer 140 may have a narrower line width d3 than that of the first patterned circuit layer. In addition, compared with the circuit layer formed by a single patterning process, the line distance d4 between the first patterned circuit layer 120 and the second patterned circuit layer 140 may be narrower (for example, less than 10 micrometers).

请再参考图1,在本实施例中,线路基板110还具有第一对位标记112,以在经由例如是网板印刷的方式形成图案化黏着层130时,进行网板与线路基板110之间的对位,以增进网板印刷制成的对位精确度。此外,在本实施例中,图案化黏着层130也可以喷墨的方式形成。Please refer to FIG. 1 again. In this embodiment, the circuit substrate 110 also has a first alignment mark 112, so that when the patterned adhesive layer 130 is formed by, for example, screen printing, the connection between the screen plate and the circuit substrate 110 is carried out. To improve the alignment accuracy made by screen printing. In addition, in this embodiment, the patterned adhesive layer 130 can also be formed by inkjet.

图2是依照本发明的另一实施例的线路板结构的示意图。本实施例的与图1的时实施例的差异仅在于线路基板110上的第一图案化线路层120与第二图案化线路层140上方可进一步形成介电层150。介电层150覆盖第一图案化线路层120及第二图案化线路层140,并且充填于其之间。此外,第三图案化线路层160可对应第一图案介电层120形成于介电层150上。再者,导电通孔170可形成于介电层150中并且贯穿介电层150,以电性连接配置于介电层150表面上的第三图案化线路层160以及覆盖于介电层150下方的第一图案化线路层120。在本实施例中,介电层150、贯穿其中的导电通孔170以及第三图案化线路层160可重复地叠置形成于第一图案化线路层120与第二图案化线路层140上方,以形成具有多层叠层结构的线路板100。FIG. 2 is a schematic diagram of a circuit board structure according to another embodiment of the present invention. The difference between this embodiment and the embodiment shown in FIG. 1 is that a dielectric layer 150 can be further formed on the circuit substrate 110 above the first patterned circuit layer 120 and the second patterned circuit layer 140 . The dielectric layer 150 covers the first patterned circuit layer 120 and the second patterned circuit layer 140 and is filled therebetween. In addition, the third patterned circuit layer 160 can be formed on the dielectric layer 150 corresponding to the first patterned dielectric layer 120 . Moreover, the conductive via 170 can be formed in the dielectric layer 150 and penetrate the dielectric layer 150 to electrically connect the third patterned circuit layer 160 disposed on the surface of the dielectric layer 150 and cover the dielectric layer 150 below. The first patterned wiring layer 120. In this embodiment, the dielectric layer 150 , the conductive via 170 penetrating therethrough, and the third patterned circuit layer 160 can be repeatedly stacked and formed on the first patterned circuit layer 120 and the second patterned circuit layer 140 , To form a circuit board 100 with a multi-layer laminated structure.

图3A至图3I是图1及图2的线路板的制作方法的流程示意图。在本实施例中,形成线路板100的方法包括下述的步骤。如图3A所示,分别形成第一图案化线路层120于线路基板110的上表面110a及下表面110b,其中第一图案化线路层120的线路之间的线距d2相对于线路的线宽d1的比值是落在1至5的范围内。一般而言,线距d2与线宽d1的比值大小可为3。接着,请参考图3B,于第一图案化线路层120所暴露出的线路基板110的部分表面上,也就是如图所示的第一图案化线路层120的线路之间的间隙,以例如是网板印刷或是喷墨的方式形成图案化黏着层130。3A to 3I are schematic flowcharts of the manufacturing method of the circuit board shown in FIG. 1 and FIG. 2 . In this embodiment, the method for forming the circuit board 100 includes the following steps. As shown in FIG. 3A, the first patterned wiring layer 120 is formed on the upper surface 110a and the lower surface 110b of the wiring substrate 110 respectively, wherein the line spacing d2 between the lines of the first patterned wiring layer 120 is relative to the line width of the line The ratio of d1 falls within the range of 1 to 5. Generally speaking, the ratio of the line distance d2 to the line width d1 can be 3. Next, please refer to FIG. 3B, on the part of the surface of the circuit substrate 110 exposed by the first patterned circuit layer 120, that is, the gap between the lines of the first patterned circuit layer 120 as shown in the figure, for example The patterned adhesive layer 130 is formed by screen printing or inkjet.

详细而言,如图3B所示,在本实施例中,黏着剂10可透过网板50网印于第一图案化线路层120的线路之间。黏着剂10可沿图中箭头方向涂布,并且透过网板50的网格开口50a注入第一图案化线路层120的线路之间的部分上表面110a,以于线路基板110的上表面110a形成图案化黏着层130。因此,图案化黏着层130可暴露于第一图案化线路层120的线路之间的间隙中。此外,线路基板110的下表面110b上可重复与上述相同的网印制程步骤,以在线路基板110的下表面110b上也形成图案化黏着层130。In detail, as shown in FIG. 3B , in this embodiment, the adhesive 10 can be screen-printed between the circuits of the first patterned circuit layer 120 through the screen plate 50 . Adhesive 10 can be coated along the direction of the arrow in the figure, and injected into part of the upper surface 110a between the lines of the first patterned circuit layer 120 through the mesh opening 50a of the mesh plate 50, so as to be on the upper surface 110a of the circuit substrate 110 A patterned adhesive layer 130 is formed. Therefore, the patterned adhesive layer 130 may be exposed in gaps between the lines of the first patterned line layer 120 . In addition, the same screen printing process steps as above can be repeated on the lower surface 110 b of the circuit substrate 110 to form the patterned adhesive layer 130 on the lower surface 110 b of the circuit substrate 110 .

请参考图3C,当图案化黏着层130形成之后,网板50可被移除,以继续进行后续的制程步骤。接着,请参考图3D,第二图案化线路层140可先经由像是雷射图案化的制程方式形成于离型层60上。此外,如图3D所示,离型层60具有第二对位图案62,以供离型层60与线路基板110进行对位。Please refer to FIG. 3C , after the patterned adhesive layer 130 is formed, the mesh plate 50 can be removed to continue the subsequent process steps. Next, please refer to FIG. 3D , the second patterned circuit layer 140 can be firstly formed on the release layer 60 through a process such as laser patterning. In addition, as shown in FIG. 3D , the release layer 60 has a second alignment pattern 62 for alignment between the release layer 60 and the circuit substrate 110 .

然后,如图3E所示,将离型层60上的第二图案化线路层140沿箭头方向转印至线路基板110的上表面110a上,并于线路基板110的下表面110b上重复相同步骤。详细而言,在进行上述的转印制程之前,离型层60可先以例如是影像对位的方式,将第二对位图案62与线路基板110上的第一对位图案112以进行对位。接着,离型层60上的第二图案化线路层140可对应地配置于图案化黏着层130上,使得第二图案化线路层140经由图案化黏着层130贴附在暴露于第一图案化线路层120的线路之间的部分线路基板110的表面上。Then, as shown in FIG. 3E, the second patterned circuit layer 140 on the release layer 60 is transferred to the upper surface 110a of the circuit substrate 110 along the direction of the arrow, and the same steps are repeated on the lower surface 110b of the circuit substrate 110. . In detail, before performing the above-mentioned transfer process, the release layer 60 can first align the second alignment pattern 62 with the first alignment pattern 112 on the circuit substrate 110 by, for example, image alignment. counterpoint. Next, the second patterned circuit layer 140 on the release layer 60 can be correspondingly arranged on the patterned adhesive layer 130, so that the second patterned circuit layer 140 is attached to the surface exposed to the first patterned circuit through the patterned adhesive layer 130. Part of the surface of the circuit substrate 110 between the circuits of the circuit layer 120 .

接着,如图3F所示,离型层60可藉由加热或是紫外光照射的方式来移除。在本实施例中,由于图案化黏着层130的黏着剂10对于第二图案化线路层140的黏着力量大于离型层60与第二图案化线路层140之间的接着力,因此,离型层60经加热或紫外光照射后,可轻易地自第二图案化线路层140的表面移除,并且不会造成第二图案化线路层140于线路基板110的表面上产生剥离的现象。Next, as shown in FIG. 3F , the release layer 60 can be removed by heating or irradiating ultraviolet light. In this embodiment, since the adhesive force of the adhesive 10 of the patterned adhesive layer 130 to the second patterned circuit layer 140 is greater than the adhesive force between the release layer 60 and the second patterned circuit layer 140, therefore, the release The layer 60 can be easily removed from the surface of the second patterned circuit layer 140 after being heated or irradiated with ultraviolet light, and will not cause peeling of the second patterned circuit layer 140 on the surface of the circuit substrate 110 .

如图3G所示,当离型层60移除后,即完成线路基板110的上表面110a及下表面110b上的第一图案化线路层120及第二图案化线路层140的制作。As shown in FIG. 3G , after the release layer 60 is removed, the fabrication of the first patterned circuit layer 120 and the second patterned circuit layer 140 on the upper surface 110 a and the lower surface 110 b of the circuit substrate 110 is completed.

在本实施例中,经由上述的制程方式可于线路基板110上形成具有不同线宽的第一图案化线路层120及第二图案化线路层140,并且第一图案化线路层120及第二图案化线路层140例如是由铜等金属材料所组成。详细而言,如图1及图3G所示,第二图案化线路层140的线宽d3相对于第一图案化线路层120的线宽d1的比值例如是落在0.8至1.2的范围内,并且第一图案化线路层120的厚度相对于第二图案化线路层140的厚度的比值例如是落在0.8至1.2的范围内。此外,第一图案化线路层120的线宽例如是小于30微米,而第一图案化线路层120与第二图案化线路层140之间的间隙例如是小于20微米。换言之,相较于以单一图案化制程步骤形成的线路层,藉由本实施例的制程方式可制作具有较窄的线宽及线距但仍保有较厚的线厚(例如是大于50微米)的金属线路层,其克服一般改良式半加成制程不利于制作厚金属细线路层的缺点。In this embodiment, the first patterned wiring layer 120 and the second patterned wiring layer 140 with different line widths can be formed on the wiring substrate 110 through the above-mentioned manufacturing process, and the first patterned wiring layer 120 and the second patterned wiring layer The patterned circuit layer 140 is made of metal materials such as copper, for example. In detail, as shown in FIG. 1 and FIG. 3G , the ratio of the line width d3 of the second patterned circuit layer 140 to the line width d1 of the first patterned circuit layer 120 falls within the range of 0.8 to 1.2, for example, And the ratio of the thickness of the first patterned circuit layer 120 to the thickness of the second patterned circuit layer 140 falls within a range of 0.8 to 1.2, for example. In addition, the line width of the first patterned wiring layer 120 is, for example, less than 30 microns, and the gap between the first patterned wiring layer 120 and the second patterned wiring layer 140 is, for example, less than 20 microns. In other words, compared with the circuit layer formed by a single patterning process step, the process method of this embodiment can produce a circuit layer with a narrower line width and line space but still maintain a thicker line thickness (for example, greater than 50 microns). The metal circuit layer overcomes the disadvantage that the general improved semi-additive process is not conducive to the production of thick metal thin circuit layers.

请参考图3H,制作完成的第一图案化线路层120及第二图化线路层140上方可进一步形成介电层150。介电层150覆盖第一图案化线路层120与第二图案化线路层140并且充填于其之间的间隙。在本实施例中,介电层150的组成材料例如是但不限制于感光成像介电(photo imagable dielectric,PID)树脂。Referring to FIG. 3H , a dielectric layer 150 may be further formed on the completed first patterned circuit layer 120 and the second patterned circuit layer 140 . The dielectric layer 150 covers the first patterned circuit layer 120 and the second patterned circuit layer 140 and fills the gap therebetween. In this embodiment, the material of the dielectric layer 150 is, for example but not limited to, photo imagable dielectric (PID) resin.

接着,如图3I所示,在本实施例中,介电层150可以机械钻孔或雷射钻孔的方式对应第一图案化线路层120形成多个贯孔,并经由于贯孔中进行金属层电镀以及蚀刻等制程形成导电通孔170。此外,第三图案化线路层160可对应第一图案化线路层120及导电通孔170形成于介电层150上。第一图案化线路层120经由导电通孔170与第三图案化线路层160电性连接。在本实施例中,上述的介电层150、导电通孔170以及第三图案化导电层160的制程方式可重复地施加于第一图案化线路层120及第二图案化线路层140上方,以形成具有重复叠层结构的线路板100。Next, as shown in FIG. 3I , in this embodiment, the dielectric layer 150 can be mechanically drilled or laser drilled to form a plurality of through holes corresponding to the first patterned circuit layer 120, and through the through holes. Processes such as electroplating and etching of the metal layer form the conductive via hole 170 . In addition, the third patterned circuit layer 160 can be formed on the dielectric layer 150 corresponding to the first patterned circuit layer 120 and the conductive via 170 . The first patterned circuit layer 120 is electrically connected to the third patterned circuit layer 160 through the conductive via 170 . In this embodiment, the above-mentioned process of the dielectric layer 150, the conductive via 170 and the third patterned conductive layer 160 can be repeatedly applied on the first patterned circuit layer 120 and the second patterned circuit layer 140, To form a circuit board 100 with a repeated stacked structure.

综上所述,本发明的多个实施例的线路板的制作方法中,第一图案化线路层与第二图案化线路层分别以不同的制程方式形成于线路基板上。第二图案化线路层可以转印的方式形成在具有已制作完成的第一图案化线路层的线路基板上。由于第二图案化线路层是以转印的方式形成于线路基板上,因此,相较于以单一图案化制程步骤形成图案化线路层的方式,第一及第二图案化线路层之间可具有较小的线距。此外,本发明的多个实施例的线路板制程方法使得第一图案化线路层及第二图案化线路层线路厚度可不受限于其之间线距大小,而使得线路板的线路结构在线距缩小的同时,仍可保有较厚的线路厚度。因此,本发明的多个实施例的线路板制程方法可应用在具有厚金属细线路结构的线路板的制作上。To sum up, in the manufacturing methods of circuit boards in various embodiments of the present invention, the first patterned circuit layer and the second patterned circuit layer are respectively formed on the circuit substrate by different process methods. The second patterned circuit layer can be formed on the circuit substrate with the manufactured first patterned circuit layer in a transfer printing manner. Since the second patterned circuit layer is formed on the circuit substrate by transfer printing, compared with the method of forming the patterned circuit layer by a single patterning process step, the gap between the first and the second patterned circuit layer can be with smaller line spacing. In addition, the circuit board manufacturing method of various embodiments of the present invention makes the line thickness of the first patterned circuit layer and the second patterned circuit layer not limited to the size of the line distance between them, so that the circuit structure of the circuit board has a line distance While shrinking, a thicker line thickness can still be maintained. Therefore, the circuit board manufacturing methods of the various embodiments of the present invention can be applied to the manufacture of circuit boards with thick metal thin circuit structures.

虽然本发明已以实施例揭示如上,然其并非用以限定本发明,任何所属技术领域中具有通常知识者,在不脱离本发明的精神和范围内,当可作些许的更改与润饰,故本发明的保护范围当视权利要求所界定的为准。Although the present invention has been disclosed as above with the embodiments, it is not intended to limit the present invention. Anyone with ordinary knowledge in the technical field may make some changes and modifications without departing from the spirit and scope of the present invention. The scope of protection of the present invention should be defined by the claims.

Claims (10)

1.一种线路板的制作方法,其特征在于,包括:1. A method for making a circuit board, characterized in that, comprising: 形成第一图案化线路层于线路基板的表面上,并且所述第一图案化线路层暴露出部分所述线路基板的表面;forming a first patterned circuit layer on the surface of the circuit substrate, and the first patterned circuit layer exposes part of the surface of the circuit substrate; 形成图案化黏着层于所述第一图案化线路层所暴露出的部分所述线路基板的表面;以及forming a patterned adhesive layer on a portion of the surface of the circuit substrate exposed by the first patterned circuit layer; and 转印第二图案化线路层于对应的所述图案化黏着层上。The second patterned circuit layer is transferred onto the corresponding patterned adhesive layer. 2.根据权利要求1所述的线路板的制作方法,其特征在于,还包括在转印所述第二图案化线路层于对应的所述图案化黏着层上之前,形成所述第二图案化线路层于离型层上。2. The method for manufacturing a circuit board according to claim 1, further comprising forming the second pattern before transferring the second patterned circuit layer on the corresponding patterned adhesive layer The circuit layer is on the release layer. 3.根据权利要求2所述的线路板的制作方法,其特征在于,所述线路基板具有多个第一对位图案,而所述离型层具有多个第二对位图案,并且在转印所述第二图案化线路层于对应的所述黏着层上之前,先将所述多个第一对位图案与所述多个第二对位图案进行对位。3. The manufacturing method of the circuit board according to claim 2, wherein the circuit substrate has a plurality of first alignment patterns, and the release layer has a plurality of second alignment patterns, and Before printing the second patterned circuit layer on the corresponding adhesive layer, the plurality of first alignment patterns and the plurality of second alignment patterns are aligned. 4.根据权利要求1所述的线路板的制作方法,其特征在于,还包括形成介电层于所述线路基板上,其中所述介电层覆盖于所述第一图案化线路层及所述第二图案化线路层上,并且填充于所述第一图案化线路层及所述第二化线路层之间。4. The method for manufacturing a circuit board according to claim 1, further comprising forming a dielectric layer on the circuit substrate, wherein the dielectric layer covers the first patterned circuit layer and the on the second patterned circuit layer and filled between the first patterned circuit layer and the second patterned circuit layer. 5.根据权利要求1所述的线路板的制作方法,其特征在于,形成所述图案化黏着层的方法包括网板印刷或喷墨。5 . The method for manufacturing a circuit board according to claim 1 , wherein the method for forming the patterned adhesive layer includes screen printing or inkjet. 6.根据权利要求1所述的线路板的制作方法,其特征在于,所述第一图案化线路层的厚度相对于所述第二图案化线路层的厚度的比值是落在0.8至1.2的范围内。6. The method for manufacturing a circuit board according to claim 1, wherein the ratio of the thickness of the first patterned circuit layer to the thickness of the second patterned circuit layer falls within the range of 0.8 to 1.2 within range. 7.根据权利要求1所述的线路板的制作方法,其特征在于,所述第二图案化线路层的线宽相对于所述第一图案化线路层的线宽的比值是落在0.8至1.2的范围内。7. The method for manufacturing a circuit board according to claim 1, wherein the ratio of the line width of the second patterned circuit layer to the line width of the first patterned circuit layer is between 0.8 and 0.8. 1.2 within the scope. 8.一种线路板结构,其特征在于,包括:8. A circuit board structure, characterized in that, comprising: 线路基板;Circuit substrate; 第一图案化线路层,配置于所述线路基板的表面上,并且暴露出部分所述线路基板的表面;The first patterned circuit layer is arranged on the surface of the circuit substrate and exposes part of the surface of the circuit substrate; 图案化黏着层,配置于所述第一图案化线路层所暴露出的部分所述线路基板的表面上;以及a patterned adhesive layer disposed on the surface of the circuit substrate exposed by the first patterned circuit layer; and 第二图案化线路层,对应配置于所述图案化黏着层上,其中所述第二图案化线路层的线宽相对于所述第一图案化线路层的线宽的比值是落在0.8至1.2的范围内。The second patterned circuit layer is correspondingly arranged on the patterned adhesive layer, wherein the ratio of the line width of the second patterned circuit layer to the line width of the first patterned circuit layer is 0.8 to 0.8. 1.2 within the scope. 9.根据权利要求8所述的线路板结构,其特征在于,所述第一图案化线路层的厚度相对于所述第二图案化线路层的厚度的比值是落在0.8至1.2的范围内。9. The circuit board structure according to claim 8, wherein the ratio of the thickness of the first patterned circuit layer to the thickness of the second patterned circuit layer falls within the range of 0.8 to 1.2 . 10.根据权利要求8所述的线路板结构,其特征在于,所述第一图案化线路层的线路之间的线距相对于所述第一图案化线路层的线宽的比值是落在1至5的范围内。10. The wiring board structure according to claim 8, wherein the ratio of the line spacing between the lines of the first patterned wiring layer to the line width of the first patterned wiring layer is within on a scale of 1 to 5.
CN201611176648.XA 2016-12-19 2016-12-19 Manufacturing method and structure of circuit board Withdrawn CN108207083A (en)

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CN101686599A (en) * 2008-09-24 2010-03-31 欣兴电子股份有限公司 Circuit structure of circuit board and manufacturing method thereof
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Application publication date: 20180626