CN108292621B - Load port - Google Patents

Abstract

The mapping sensor (30) provided in the load port (1) is a sensor for mapping an FFC (an example of an object to be processed) stored in a cassette (51 (52)). The mapping sensor (30) has a sensor unit (31) and a lifting unit (32) for lifting and lowering the sensor unit (31). The mapping sensor (30) is disposed on the opposite side of the susceptor (10) of the load port (1) from the side of the transport space.

Description

load port

technical field

The present invention relates to a loadport on which a container for accommodating a processed object such as a wafer is placed in and out of a transfer space.

Background technique

The above-mentioned container includes a closed type container called FOUP (Front-Opening Unified Pod), which has an openable and closable lid, and an open type container called an open cassette. Multiple layers of shelves are provided inside these containers, and a plurality of processed objects such as wafers are accommodated in the containers in a horizontal posture with a constant interval in the vertical direction. Here, in general, a load port has a function such as a mapping function. The mapping function is a function to detect the storage state such as the presence or absence, inclination, etc. of a plurality of processed objects such as wafers stored in the container in each layer.

As a technology related to the above-mentioned mapping function, there is the technology described in Patent Document 1, for example. This prior art is structured as follows. An elevating and movable mapping device with a mapping sensor is installed on the back side of the load port (transportation chamber), and the mapping device is moved up and down together with a door (a door of the load port) that separates the transfer space from the outside. The mapping device has a swing frame, and the mapping sensor is inserted into the container by swinging the swing frame toward the container such as an open cassette or FOUP.

prior art literature

patent documents

Patent Document 1: Japanese Patent Laid-Open No. 2015-50410

Contents of the invention

The problem to be solved by the invention

The above-mentioned conventional technology has the following problems. Since the elevating mechanism and the swing mechanism constituting the mapping device described in Patent Document 1 are located on the rear side of the load port (transportation chamber), particles (fine dust) are generated from these mechanism parts. In addition, particles adhering to the door and the transport chamber are blown up in the transport chamber by the airflow generated by the up-down and swing of the mapping device. Since it is necessary to maintain a clean environment (clean environment) in the conveying chamber, generation and flying of fine particles in the conveying chamber are not ideal. Furthermore, based on the results of the mapping, once an error is found, the opened door must be closed again. The container containing the processed object found to be wrong in the mapping is replaced, but the replacement of the container is delayed by an amount corresponding to the operation of closing the opened door again, compared to the case where there is no door closing operation.

The present invention has been accomplished in view of the above-mentioned actual situation, and its purpose is to provide a load port that can avoid the generation of particles in the transport space (transport chamber) caused by the mapping action, and does not require the mapping action. A mapping function that causes the opening and closing of the load port door.

solutions to problems

The loading port according to the present invention includes: a base disposed upright, the base constituting a part of a partition wall for dividing a conveying space, and having a base opening for loading and unloading objects to be processed into and out of the conveying space; a mounting table, which is provided on the side of the base opposite to the side of the conveying space, and the mounting table is used for loading a plurality of containers for storing the objects to be processed; and a door for carrying out the Open and close the opening of the base. The load port includes a mapping sensor that has a sensor unit and an elevating unit for raising and lowering the sensor unit, and is used to map the object to be processed stored in the container, and the mapping sensor is arranged on the base. The side of the seat opposite the side of the delivery space.

With this structure, since the mapping sensor having the sensor part and the lifting part for raising and lowering the sensor part is not arranged in the conveying space, but is arranged outside the conveying space, it will not be caused by the mapping operation in the conveying space. produce particles. In addition, since the opening and closing of the door of the load port is separated from the mapping operation, the opening and closing of the door by the mapping operation can be unnecessary.

In addition, the following effects can also be obtained with the above configuration. The conveyance area where the processed object is conveyed by the processed object conveyance robot installed in the conveyance space is not narrowed by the mapping sensor.

In the present invention, it is also preferable that the container has an opening on a side close to the conveyance space and an opposite side thereof when the container is placed on the mounting table, and that the sensor part has a light emitting element. part and a light-receiving element part, the light-emitting element part and the light-receiving element part are disposed outside the container in the state placed on the stage, and sandwich the object to be processed stored in the container in plan view. At an intermediate position, light is irradiated from the light emitting element portion to the light receiving element portion through the opening of the container.

According to this configuration, since the light from the mapping sensor passes through the opening of the container, the light is prevented from being scattered and reflected, and the mapping accuracy is improved. In addition, since the light-emitting element unit and the light-receiving element unit of the sensor unit that moves up and down can be mapped while being placed outside the container that accommodates the object to be processed, mapping can be performed regardless of the type and size of the container. In other words, even containers of various types and sizes can be mapped without changing the mapping sensor.

In the present invention, it is also preferable that the door is operated to open the base opening after the object to be processed stored in the container is mapped by the mapping sensor.

According to this structure, since the mapping can be performed before opening the base opening (opening door), it is possible to replace an erroneous container at an early stage.

It is also preferred in the present invention that the mapping parameters corresponding to the container are automatically selected.

With this structure, even containers of various sizes and different sizes can be quickly mapped.

In the present invention, it is also preferable that the load port includes an openable and closable cover for covering the container and the mapping sensor placed on the mounting table, and when the container mounted on the mounting table is covered with the cover, After the container and the mapping sensor, the object to be processed stored in the container is mapped by the mapping sensor.

With this configuration, it is possible to prevent the hand from touching the container or the mapping sensor during the mapping operation.

In the present invention, it is also preferable that the cover includes a plurality of divided covers, and the plurality of divided covers are configured to be retractable into a space above the mounting table and a space below the mounting table.

Here, for example, the covers included in the load ports described in Japanese Patent No. 4474922 and Japanese Unexamined Patent Application Publication No. 2003-249535 have a structure in which all of them are retracted below the mounting table of the load port. According to the cover of this structure, it is difficult to ensure the accommodation space of the mechanical mechanism and electrical equipment under the mounting table. Even if the storage space can be secured, the storage space will become complicated.

On the other hand, according to the above-mentioned configuration of the present invention, the degree of freedom in the arrangement of the cover and the shape of the cover is increased by making the openable and closable cover covering the container and the mapping sensor a plurality of divided covers. Since the plurality of divided covers are evacuated to the space above the mounting table or the space below the mounting table instead of being below the mounting table, it is easier to place the load on the load port compared with the case where all the covers are retracted to the space below the mounting table. The storage space for the mechanical mechanism and electrical equipment required for the load port is secured under the table.

In the present invention, it is preferable that the plurality of divided covers include a first cover that covers the front side of the mounting table, is movable up and down, and retracts below the mounting table when it is in an open state. space; and a second cover that is placed on the first cover to cover the upper side of the mounting table, and is capable of pivoting so as to retract above the mounting table when it is in the open state. .

With this structure, in particular, by making the partition cover retracted to the space below the mounting table move up and down, it is easier to ensure the storage space for the mechanical mechanism and electrical equipment required for the load port under the mounting table of the load port. .

In the present invention, it is also preferable that a driving device for operating the plurality of divided covers is provided on each of the plurality of divided covers.

According to this configuration, the divided cover can be automatically opened and closed. Thereby, it is possible to perform control such as automatically opening only necessary split covers or automatically opening the split covers within a required minimum range according to the transport method of the container or the type of the container.

The effect of the invention

According to the present invention, it is possible to provide a loadport having a mapping function capable of avoiding the generation of particles in the transfer space (transfer chamber) due to the mapping operation and without opening and closing the door of the load port due to the mapping operation. .

Description of drawings

FIG. 1 is a schematic plan view of an entire device used in semiconductor manufacturing including a load port according to an embodiment of the present invention.

2A is a perspective view of the load port shown in FIG. 1 , and is a perspective view showing the load port in a state where the cover is closed.

2B is a perspective view of the load port shown in FIG. 1 , and is a perspective view showing the load port in a state where the cover is opened.

FIG. 3 is a plan view of the loadport shown in FIG. 2B viewed from above.

FIG. 4 is a perspective view showing an adapter and a cassette placed on a mount of a load port.

Fig. 5 is a perspective view showing an adapter and a cassette placed on a mount of a load port.

6 is a perspective view showing the internal structure of the loadport shown in FIGS. 2A and 2B with the outer cover, the base, and the second cover removed (the first cover is lowered).

7 is a perspective view showing the internal structure of the loadport shown in FIGS. 2A and 2B with the outer cover, the base, and the second cover removed (the first cover is raised).

Fig. 8 is a perspective view showing an upper portion of the load port shown in Fig. 7 (in a state where a second cover is attached).

Fig. 9 is a right side view of Fig. 8 .

Fig. 10 is a left side view of Fig. 8 .

Fig. 11 is a perspective view of a mapping sensor.

12 is a perspective view showing a modified example of an openable and closable cover covering the container and the mapping sensor.

13 is a perspective view showing a modified example of an openable and closable cover covering the container and the mapping sensor.

Detailed ways

Hereinafter, modes for implementing the present invention will be described with reference to the drawings.

(The overall structure of the device including the load port)

The apparatus shown in FIG. 1 can be used in the manufacture of semiconductors, and the apparatus includes a plurality of load ports 1 (three in this embodiment), a transfer chamber 2 and a processing device 3 . The load port 1 is a container (for example, cassettes 51 and 52 (for example, cassettes 51 and 52 (see Fig. 4. The device of Fig. 5)). In addition, there are cases where wafers are stored in containers only (wafers are directly) or by adhesive tape that is pasted on the upper surface (or lower surface) of FFC (Film Flame Carrier) or hoop ring (Hoop Ring). The state is stored in the case of the container. Hereinafter, abbreviated as "FFC" means an FFC in a state where a wafer is attached to a tape attached to the upper surface (or lower surface) of the FFC (Film Flame Carrier).

A transfer robot 22 is disposed in the transfer chamber 2 , and the transfer target is transferred between the load port 1 and the processing device 3 by the transfer robot 22 . The transfer robot 22 takes out the object to be processed from the container placed on the load port 1 , and supplies the object to be processed to the processing device 3 through the transfer space S. Since it is necessary to maintain a clean environment (clean environment) in the transfer chamber 2 (transfer space S) as described above, generation and flying of particles in the transfer chamber 2 are not ideal. In addition, the conveyance space S is a space formed by dividing the side of the conveyance chamber 2 by the partition wall 21 which is the outer wall constituting the conveyance chamber 2 .

The operation of the loadport 1 is controlled by the control device 4 . In addition, the control device 4 may control not only the loading port 1 but also equipment in the transport chamber 2 such as the transport robot 22 . The diagram of the control device 4 in FIG. 1 is a diagram for illustrating a situation in which the loadport 1 is controlled by the control device 4 , and does not indicate the arrangement position of the control device 4 . The control device 4 may be incorporated in the load port 1 (the space below the mounting table 11 (see FIG. 2 , etc.)) or a control device including control of the transfer robot 22 and the like may be disposed in the transfer chamber 2 .

In addition, when viewed from the transfer chamber 2 (transfer space S), the direction of the side connected to the load port 1 is defined as the front, and the opposite direction is defined as the rear, and the direction perpendicular to the front-rear direction and the vertical direction is defined as the front. The orientations are defined as lateral, and these orientations are indicated in FIG. 1 . The front, rear, and sides shown in figures subsequent to FIG. 2 correspond to the front, rear, and sides shown in FIG. 1 .

(Structure of the loadport)

The configuration of the loadport 1 will be described with reference to FIGS. 2A to 11 . As shown in FIGS. 2A and 2B , the loadport 1 has a plate-shaped base 10 constituting a part of a partition wall 21 dividing the transfer space S. As shown in FIGS. The base 10 is arranged upright, and the base 10 is provided with a base opening 10 a (see FIG. 2B ) as an opening for loading and unloading a processed object into and out of the conveyance space S. As shown in FIG. In order to keep the conveyance space S in a clean state, the base opening 10 a is normally closed by a door 12 .

On the side opposite to the transfer space S of the base 10 , that is, in front of the base 10 , a mounting table 11 on which containers for accommodating a plurality of processed objects are mounted is provided.

Fig. 4 and Fig. 5 show an example of a container for accommodating a to-be-processed object. The cassette 51 shown in FIG. 4 and the cassette 52 shown in FIG. 5 are containers for accommodating a plurality of FFCs, and the cassette 51 shown in FIG. container. FIG. 4 and FIG. 5 each show only one FFC, but in the cassettes 51 and 52, a plurality of FFCs are stored in a horizontal posture at a constant interval in the vertical direction. The cassette 51 has an opening 51a at the rear (on the side of the transport space S) and an opening 51b at the front (on the opposite side) in the state placed on the mounting table 11. There is an opening 52a at the rear (on the side of the transport space S) in the state on the mounting table 11, and an opening 52b on the front (the opposite side).

Here, the cassettes 51 and 52 are placed on the mounting table 11 via the FFC adapter 20 common to the cassettes 51 and 52 . The adapter 20 for FFC has an optical cassette size detection sensor 42 (42a, 42b). The cassette size detection sensor 42 composed of two sets of sensors is a sensor for detecting which of the cassettes 51 , 52 is mounted on the FFC adapter 20 . When the inner cassette size detection sensor 42a is turned on (light-shielding state) but the outer cassette size detection sensor 42b is not turned on (light emitting state), the smaller cassette 51 is placed on the FFC adapter 20 (FIG. 4 ). On the other hand, when both the cassette size detection sensors 42a and 42b are turned on, the large cassette 52 is placed on the FFC adapter 20 ( FIG. 5 ). In addition, as a matter of course, when both the cartridge size detection sensors 42 a and 42 b are not turned on, no cartridge is placed on the adapter 20 for FFC.

Since the size of the cassette is in a one-to-one relationship with the size of the FFC, the size of the detection cassette is also the size of the detection FFC. That is, the size of the FFC is detected by the cassette size detection sensor 42 .

The connector 20a of the adapter 20 for FFC is connected with the cassette size detection sensor 42 (42a, 42b) by a cable or the like, and the signal from the cassette size detection sensor 42 (42a, 42b) is transmitted to the terminal via the connector 20a part. control device4. That is, the size information of the FFC is transmitted from the adapter 20 for FFC to the inside of the control device 4 .

＜Mapping sensor＞

The load port 1 includes a mapping sensor 30 for mapping the plurality of FFCs stored in the cassettes 51 and 52 . As shown in FIGS. 2B and 3 , the mapping sensor 30 is arranged on the side of the base 10 opposite to the transport space S, that is, in front of the base 10 . The mapping sensor 30 is an optical sensor. In addition, optical sensors include laser sensors.

As shown in FIG. 11 , the mapping sensor 30 has a sensor unit 31 and a lift unit 32 for raising and lowering the sensor unit 31 .

The sensor unit 31 is provided with a light-emitting element unit 33 a and a light-receiving element unit 33 b at both ends of a sensor support member 34 that is U-shaped in plan view. The sensor 33 is constituted by a set of the light emitting element part 33a and the light receiving element part 33b. The cable 35 is connected to the light emitting element part 33a and the light receiving element part 33b, and the signal from the sensor 33 is transmitted to the control apparatus 4 via the cable 35. A cable chain (registered trademark) 39 shown in FIG. 11 is a cable chain for the sensor 33 .

The lifter 32 has a sensor support member 36 whose end is fixed to the center of the sensor support member 34 , a ball screw 37 for lifting the sensor support member 36 , and a motor 38 for rotating the ball screw 37 .

As shown in FIG. 3 , the light emitting element portion 33 a is arranged in front of the mounting table 11 , and the light receiving element portion 33 b is arranged in the rear of the mounting table 11 . That is, in a state where the cassette 51 or the cassette 52 is placed on the mounting table 11 via the adapter 20 for FFC, the light emitting element part 33 a and the light receiving element part 33 b are arranged outside the cassettes 51 and 52 and are accommodated in the cassette in plan view. Multiple FFCs of 51 and 52 are sandwiched in the middle.

The mapping sensor 30 retracts to a predetermined retraction position during non-mapping. The evacuated position is set in advance at a position where the map sensor 30 does not interfere with the cassettes 51·52 and the adapter 20 for FFC within the movable range of the map sensor 30 . In this embodiment, since the evacuation position is set below the mounting table 11, when the cassette 51·52 or the FFC adapter 20 is mounted on the mounting table 11, it is possible to prevent the mapping sensor 30 from interfering with the cassette 51·52 or the FFC adapter 20. Interference between adapters 20.

In addition, in this embodiment, the distance between the light emitting element portion 33a and the light receiving element portion 33b is set so that the distance between the mounting table 11 and the light emitting element is set regardless of whether the mounting table 11 is in a docking position or a non-docking position. The distance at which neither the element portion 33a nor the light receiving element portion 33b interferes. Therefore, when the mapping sensor 30 is at the retracted position (below the mounting table 11 ), the mounting table 11 can freely perform docking and non-docking operations without interfering with the mapping sensor 30 . In addition, even if the retreat position is set at a position higher than the cassette 51·52 mounted on the mounting table 11 and the adapter 20 for FFC, it is possible to prevent interference between the mounting table 11 and the mapping sensor 30 during docking and non-docking operations. put one's oar in.

The distance between the light-emitting element portion 33a and the light-receiving element portion 33b of the sensor portion 31 of the mapping sensor 30 is set in advance to be the maximum distance between the cassettes and cassette adapters that can be placed on the mounting table 11. better. As a result, multiple cassettes and cassette adapters can be mapped.

＜Cover＞

As shown in FIG. 2 , the mounting table 11 and the mapping sensor 30 are accommodated in the cover 13 (fixed cover) of the load port 1 . In this embodiment, the front side cover of the outer cover 13 is comprised by cover 13a, 13b, 13c, and the side side cover is comprised by right and left paired cover 13d, 13e. As far as the rear side of the load port 1 is concerned, the base 10 functions as a cover. In addition, casters 14 are attached to the bottom of the load port 1, whereby the load port 1 can be easily moved.

＜Openable and closable cover covering container and mapping sensor＞

The load port 1 of the present embodiment further includes covers 15 and 16 which can be opened and closed and are used to cover the magazine 51 and the magazine 52 placed on the stage 11 through the adapter 20 for FFC, and the magazine 52 which can move up and down. The mapping sensor 30 of the sensor unit 31 .

One openable and closable cover is constituted by the cover 15 and the cover 16 . That is, the covers 15 and 16 are examples of a plurality of divided covers in a divided form.

The 1st cover 15 is the cover that is the Japanese katakana U-shaped plan view that is made of front side cover 15a and left and right pair of side side covers 15b, and it utilizes the cylinder 61 as driving device shown in Fig. 6, Fig. 4 command to move up and down (up and down movement).

One air cylinder 61 is arranged under the pair of left and right side side covers 15b, and the upper end (cylinder rod 61a) of the air cylinder 61 is attached under the side side cover 15b, and the lower end (cylinder main body 61b) of the air cylinder 61 is attached to the side of the loading port 1. frame.

In addition, guide rails 62 linearly extending in the vertical direction are provided on the outer surfaces of the inner covers 19 ( 19 a , 19 b ), which will be described later, and the first cover 15 moves up and down along the guide rails 62 .

The cylinder main body 61b has two pressure chambers (not shown) inside. And when air is supplied to one pressure chamber, the cylinder rod 61a expands, and the 1st cover 15 rises by this. Moreover, when air is supplied to the other pressure chamber, the cylinder rod 61b contracts, and the 1st cover 15 descends. In this way, the first cover 15 is moved up and down by adjusting the pressure in the cylinder main body 61b. A shock absorber 63 and an elastic stopper 64 (such as a rubber plate) are arranged below the first cover 15 to absorb the impact of the first cover 15 falling. In addition, the two pressure chambers have a structure in which, when air is supplied to one pressure chamber, the air in the other pressure chamber is exhausted.

The second cover 16 will be described mainly with reference to FIGS. 8 to 10 . The second cover 16 is a plate-shaped cover for covering the upper side of the cassette 51 ( 52 ) and the mapping sensor 30 , and is placed on the first cover 15 pushed upward. The second cover 16 is rotated around the hinge 18 by an air cylinder 17 serving as a driving device according to an instruction from the control device 4 . As shown in FIG. 2B and FIG. 3 , fixed inner covers 19 (19a, 19b) are provided on both sides of the mounting table 11, and the air cylinder 17 is arranged between the inner cover 19b and the outer cover 13d. The space between the inner cover 19 a and the inner cover 19 b ensures a space that does not interfere with containers such as cassettes 51 and 52 placed on the mounting table 11 .

The air cylinder 17 is arranged under one side end of the second cover 16, and the upper end (cylinder rod 17a) of the air cylinder 17 is attached to the back of the second cover 16, and the lower end (cylinder main body 17b) of the air cylinder 17 is attached to the frame of the load port 1.

In addition, a shock absorber 65 is arranged below the other side end portion of the second cover 16 as a safety device. The upper end of the shock absorber 65 is attached to the back surface of the second cover 16 , and the lower end is attached to the frame of the load port 1 . The damper 65 always urges the second cover 16 upward with a force weaker than the force (in the closing direction) for rotating the second cover 16 . And, the biasing force of the damper 65 is set higher than the self-weight when the second cover 16 becomes a predetermined rotation angle. The rotation angle is preferably 10° to 45°. In this embodiment, the rotation angle is set to 15 degrees.

The cylinder main body 17b has two pressure chambers (not shown) inside. And the cylinder main body 17b is arrange|positioned so that a rotation centering on a lower end part is possible. When air is supplied to one pressure chamber of the cylinder main body 17b, the cylinder rod 17a extends and rotates around the lower end, and the cylinder main body 17b rotates from the upright state in FIG. 7 to the inclined state in FIG. 8 . The force of extending the cylinder rod 17a by the cylinder main body 17b is converted into the force of turning the second cover 16 upward. When air is supplied to the other pressure chamber in the cylinder main body 17b, the cylinder rod 17a contracts and rotates in the reverse direction around the lower end. Thereby, the force which contracts the cylinder main body 17b by the cylinder main body 17b is converted into the force which turns the 2nd cover 16 downward. In this way, by adjusting the pressure in the cylinder main body 17b, the second cover 16 is rotated by the force of raising and lowering the cylinder rod 17a. In addition, the two pressure chambers are configured such that when air is supplied to one pressure chamber, the air in the other pressure chamber is discharged. Moreover, the damper 65 is also comprised so that it may rotate centering on the lower end part.

Here, when the air cylinder 17, which is the driving unit for rotating the second cover 16, fails during operation due to some reason (air leakage of the air cylinder 17, etc.), and the air cylinder 17 becomes inactive, When the turning angle is 15 degrees or more, the biasing force of the damper 65 is greater than the dead weight of the second cover 16, so the second cover 16 returns to the withdrawn position. On the other hand, when the turning angle is less than 15 degrees, the biasing force of the damper 65 is smaller than the dead weight of the second cover 16, so the second cover 16 falls down gradually.

As a result, even if the air cylinder 17 fails for some reason, the second cover 16 can be prevented from being forcedly closed by its own weight because the second cover 16 is moved to the retracted position by the shock absorber 65 or slowly falls down. .

Here, as can be seen from FIG. 2B , the upper end portion of cover 13 d constituting the upper side of the side cover 13 is set to a height dimension such that cylinder 17 and shock absorber 65 are not exposed to the outside. Since the air cylinder 17 and the shock absorber 65 are movable parts, the movable parts are not exposed to the outside, so the safety is excellent.

In addition, since the cylinder 17 and the shock absorber 65 which are movable parts are arranged between the outer cover 13d and the inner cover 19 (19a, 19b), respectively, it is possible to prevent particles (fine dust) from these movable parts from entering the loading port. 1, the upper side space of the mounting table 11 provided with the cassette is diffused.

(Mount port action)

The operation of the loadport 1 (control of the loadport 1 by the control device 4) will be described. Here, as an example, it is assumed that the FFC adapter 20 shown in FIGS. 4 and 5 is mounted on the mounting table 11 of the load port 1 . First, the covers 15 and 16 are opened, and the sensor unit 31 of the mapping sensor 30 is lowered below the level of the mounting table 11 (standby state, see FIG. 2B ). In addition, the stage 11 is located in the position shown to FIG. 2B, FIG. 3 (=UNDOCK position). Although the description is omitted, the loadport 1 (control device 4 ) recognizes that the processing target is the FFC by mounting the FFC adapter 20 on the mounting table 11 of the loadport 1 . The movement of each part of the load port 1 described below is performed based on an instruction from the control device 4 . In addition, the UNDOCK position refers to a position where the adapter or the container is placed within the movable range of the mounting table 11 . The UNDOCK position may also be called a loading position.

As a representative example, the supply of the FFC stored in the small cassette 51 to the transport space S will be described. When the cassette 51 shown in FIG. 4 for accommodating a plurality of FFCs is placed on the FFC adapter 20, the first cover 15 is raised, and the second cover 16 is lowered to close the covers 15, 16 (with the cover 15). , 16 cover cassette 51 and mapping sensor 30). The size of the FFC to be processed is recognized by detecting the size of the cassette 51 by the cassette size detection sensor 42 provided in the FFC adapter 20 . The control device 4 automatically selects mapping parameters corresponding to the size of the cassette 51 , that is, mapping parameters corresponding to the size of the FFC.

Thereafter, the sensor unit 31 of the mapping sensor 30 is raised to perform mapping of the FFCs stored in the cassette 51 in layers (the mapping sensor moves in the space covered by the covers 15 and 16 ). In addition, the mapping refers to detection (inspection) of the storage state of the FFCs stored in the cassette 51 such as the presence or absence of each layer and the inclination. When light is irradiated from the light-emitting element portion 33 a to the light-receiving element portion 33 b so as to pass through the opening of the cartridge 51 , if there is an FFC, the light is blocked by the FFC, thereby detecting the presence of the FFC. On the other hand, when there is no FFC, the irradiated light reaches the light receiving element portion 33b, whereby the absence of FFC is detected. When the mapping is completed, the sensor unit 31 of the mapping sensor 30 is lowered below the height level of the mounting table 11 .

If it is determined to be normal based on the mapping result, the door 12 between the partition and the conveying space S of the conveying chamber 2 is opened (the door 12 moves downward), and the mounting table 11 is horizontally moved to the door 12 side by a predetermined distance (moved to DOCK). Location). The FFC in the cassette 51 is put into the transfer space S from the base opening 10 a by the transfer robot 22 (see FIG. 1 ). In addition, the DOCK position refers to the position where the transfer robot 22 puts in and takes out the object to be processed with respect to the container within the movable range of the mounting table 11 . The DOCK position can also be referred to as the delivery position.

When all the FFCs are loaded into the conveyance space S (or introduced after being loaded), the door 12 is closed (the door 12 moves upward), and the mounting table 11 is moved to the UNDOCK position. Afterwards, the covers 15, 16 are opened. An empty cassette 51 is taken out from the load port 1 by a transport member not shown.

On the other hand, if it is judged to be an error based on the mapping result, the covers 15 and 16 are opened without opening the door 12 . The cassette 51 containing the FFC is taken out from the load port 1 by a transport member not shown. The first cover 15 descends directly below it, and retreats to the inside of the cover 13 , which is a corner of the space below the mounting table 11 . The second cover 16 rotates upward, and retreats above the mounting table 11 .

On the other hand, if it is judged to be an error based on the mapping result, the covers 15 and 16 are opened without opening the door 12 . The cassette 51 containing the FFC is taken out from the load port 1 by a transport member not shown.

Here, since the light-emitting element unit 33a and the light-receiving element unit 33b constituting the mapping sensor 30 of this embodiment are arranged outside the cassettes 51 and 52 in the state placed on the mounting table 11, no matter whether it is a small FFC or a relatively small FFC, Large FFCs, that is, FFCs of different sizes can be mapped without changing the mapping sensor.

In addition, the mapping parameters refer to the pre-set mapping start position, mapping end position, mapping speed, sensor output identification method and identification criteria (according to FFC, HoopRing, wafer, thickness, groove pitch are different, Therefore, the sensor judges whether there is a change in the standard of the predetermined number of processed objects), etc., information about the operation of the map. These mapping parameters may be stored in the control device 4 in advance, or may be received from the outside in a wired or wireless manner. Furthermore, if mapping parameters for FFC, mapping parameters for HoopRing, and mapping parameters for wafers are separately prepared according to differences in wafer size, automatic selection of mapping parameters becomes easy.

The mapping start position is set at a position equal to or higher than the height of the highest FFC among the FFCs stored in the cassette. On the other hand, the mapping end position is set to be the same as or lower than the lowest FFC among the FFCs (objects to be processed). In addition, the above-mentioned mapping start position and mapping end position may be reversed. In addition, since the number of FFCs stored in a cassette may vary, the height of the mapping start position or the mapping end position may be changed for each cassette.

Here, in this embodiment, like the 1st cover 15 and the 2nd cover 16, the cover which covers a container is comprised with the some divided cover of the form divided. This increases the degree of freedom in the arrangement of the cover and the shape of the cover, and as a result, the capacity of the cover can be increased. Therefore, like the loadport 1 of this embodiment, it is possible to cover the container and the mapping sensor as a whole.

In addition, because the first cover 15 is a structure that moves up and down (lifting movement), and the second cover 16 does not protrude to the front of the outer cover 13 to rotate, so during the operation of the first cover 15 and the second cover 16, the The first cover 15 and the second cover 16 do not protrude to the front of the outer cover 13 . Therefore, these open and close covers do not interfere with workers moving in front of the load port 1 .

In addition, since the mapping is performed with the covers 15 and 16 closed, light from outside the device is less likely to enter the sensor unit 31 of the mapping sensor 30, thereby improving sensor accuracy (mapping accuracy).

(Modification)

In the above-described embodiment, as an example of the container, a total of two openings 51a, 51b are shown on the side of the conveyance space S in the state placed on the mounting table 11 and on the opposite side. (52a, 52b) of the cassette 51 (52), however, the opening of the container may be only one, or may be a container without an opening. The reason for this is that, when an optical sensor is used, the sensor function can be exhibited only by making the part of the container located in the light irradiation path (optical axis) transparent.

In addition, if a reflective sensor described below is used, only one opening (or transparent portion) of the container may be used.

Examples of objects to be processed include glass substrates (display substrates such as liquid crystal panels and organic/inorganic EL), plates capable of housing cells and the like, petri dishes, and the like in addition to semiconductor substrates such as wafers. As the container, in addition to the open container called the open box such as the boxes 51 and 52 shown in the above-mentioned embodiment, a closed box with an openable cover called a FOUP can also be mentioned. type of container etc.

As for the mapping sensor, instead of the light-emitting element unit 33a and the light-receiving element unit 33b arranged at a position sandwiching the object to be processed in a plan view, the light-emitting element unit 33a and the light-receiving element unit 33b may be placed close together and the light-receiving element unit may be used. The part 33b detects the light reflected by the object to be processed to detect the presence or absence of the object to be processed (reflective sensor). In the case of a reflective sensor, it is not necessary to arrange the light-emitting element portion 33a and the light-receiving element portion 33b to face each other across the container as in the above-mentioned embodiment, so the design freedom of the structure and installation space of the sensor increases.

In addition, the direction of the optical axis connecting the light-emitting element portion 33a and the light-receiving element portion 33b does not necessarily have to be the front-rear direction of the load port 1, and may be the side (left-right direction) of the load port 1, or the front-rear direction with respect to the load port 1. Direction The direction in which to tilt. In addition, since the sensor function of the mapping sensor must be ensured, it is necessary to determine the position of the opening of the container and the position of the transparent portion so that light from the sensor passes through.

In addition, as the driving means for raising and lowering the sensor part 31, a driving means composed of a ball screw 37 and a motor 38 for rotating the ball screw 37 is shown, but a linear motor, an air cylinder, etc. may be used instead. It serves as a driving member for raising and lowering the sensor unit 31 .

In addition, although the mapping sensor 30 is an optical sensor, a sensor using a detection wave such as an electromagnetic wave or an ultrasonic wave may be used instead.

In the above-described embodiment, the front and side sides of the container (cassette) and the mapping sensor 30 placed on the mounting table 11 are covered by the first cover 15 that moves up and down, and the front and side sides of the mapping sensor 30 are covered by the second cover 16 that rotates. Containers (cassettes) on the stage 11 and above the mapping sensor 30 are placed, but the second cover 16 may be omitted.

In addition, both the first cover 15 and the second cover 16 may be omitted.

In the above-described embodiment, the container (cassette) is placed on the mounting table of the load port through the adapter, but the loading port of the container may be directly mounted on the mounting table.

In the case where the FOUP is mounted on the loading port, it is preferable that the door 12 fixes and releases the cover to the container, and is configured so that the cover can be detached and attached to the container. Specifically, for fixing and releasing the lid to the container, a key is provided on the door 12, and the lid can be attached to and detached from the container by turning the key after inserting the key into the keyhole of the lid. With regard to the detachment and installation of the cover body, an adsorption part is provided on the door 12, and by moving one of the mounting table 11 or the door 12 in the horizontal direction in a state where the cover body is sucked and held by the door 12, the relative Container removal and installation of the lid.

12 and 13 show modifications of the openable and closable cover for covering the container (container and mapping sensor) placed on the mounting table 11 . The openable and closable cover shown in FIG. 12 is comprised from the cover 66 which rotates, and the set of cover 67 which moves up and down. The cover 66 is an L-shaped cover in a side view, and rotates around a rotation axis above the mounting table 11 . The cover 66 covers the front side and the upper side of the mounting table 11 . The cover 67 is a plate-shaped cover that covers the lateral sides of the mounting table 11 .

The openable and closable covers shown in FIG. 13 are composed of a set of covers 68 that rotate and a cover 69 that moves up and down. The cover 68 is a plate-shaped cover that rotates about a rotation axis above the mounting table 11 . The cover 68 covers the upper side of the mounting table 11 . The cover 69 is a plate-shaped cover that covers the front side of the mounting table 11 . In addition, what is shown by reference numeral 70 is the fixed cover arrange|positioned upright.

In the above-mentioned embodiment, the first cover 15 and the second cover 16 are retracted simultaneously, but the present invention is not limited thereto. For example, when the container is transported to the loading platform of the loading port by a ceiling-mounted unmanned transport vehicle such as an OHT (Overhead Hoist Transfer), only the second cover 16 may be moved to the retracted position.

In addition, when the container is placed on the loading port by a ground-based unmanned transport vehicle such as an AGV (Automated Guided Vehicle), only the first cover 15 may be moved to the retracted position.

In addition, for the control of the drive unit of the first cover 15 and the drive unit of the second cover 16 , the control device 4 operates in response to a command from a host computer. For example, when a container conveyed by the OHT approaches the load port, only the second cover 16 is moved to the retracted position in advance, and the load port 1 may be put on standby so that the container can be placed on the mounting table 11 from above by the OHT.

Instead of the air cylinder 17, the second cover 16 may be connected to the rotation shaft, and the second cover 16 may be retracted to the retracted position by rotating the rotation shaft with a motor.

Instead of the air cylinder 61, a drive unit having a ball screw and a motor for rotating the ball screw may be used. In addition, a hydraulic cylinder may be used instead of the air cylinder 61 (the same applies to the air cylinder 17).

A gas spring may be used instead of the shock absorber 65 . In the above-described embodiment, the second cover 16 is rotated by one air cylinder 17 , but the air cylinders 17 may be arranged at both end portions of the second cover 16 and the second cover 16 may be rotated by two air cylinders 17 .

For example, the front side cover 15a of the first cover 15 may be formed of a transparent member. With such an arrangement, the inside of the first cover 15 can be visually observed even when the first cover 15 is closed, so that the operation of the mapping sensor 30 and the status of the transfer robot 22 taking out the wafer can be confirmed by peeking inside from the transparent front side cover 15a.

In addition, it goes without saying that various changes can be made within the range conceivable by those skilled in the art.

Explanation of reference signs

1. Loading port; 2. Transport chamber; 3. Processing device; 4. Control device; 10. Base; 10a, opening of base; 16. Second cover (cover); 17. Cylinder (drive device); 21. Partition wall; 30. Mapping sensor; 31. Sensor part; 32. Lifting part; 33a. Light emitting element part; 33b. Light receiving element part; 51 , 52, box (container); 51a, 51b, 52a, 52b, opening; 61, cylinder (drive device); S, delivery space.

Claims (6)

1. A loadport comprising: a base disposed upright, the base constitutes a part of a partition wall for dividing the conveying space, and has a base opening for loading and unloading objects to be processed from the conveying space; a mounting table, which is provided on the side of the base opposite to the side of the conveying space, and the mounting table is used for loading a plurality of containers containing the objects to be processed; and a door for opening and closing the base opening, The loadport is characterized by, The loading port includes: a mapping sensor having a sensor part and an elevating part for raising and lowering the sensor part, for mapping the object to be processed stored in the container; an openable and closable cover for the container and the mapping sensor placed on the mounting table, the mapping sensor is arranged on a side of the base opposite to the side of the delivery space, map without opening said door, After covering the container placed on the mounting table and the mapping sensor with the cover, the object to be processed stored in the container is mapped by the mapping sensor, The cover includes a plurality of divided covers in a divided form, The plurality of divided covers are configured to be retractable into spaces above and below the mounting table, The plurality of split covers have: a first cover that covers the front side of the mounting table, is movable up and down, and retracts into a space below the mounting table when it is in an open state; and The second cover is placed on the first cover, covers the upper side of the mounting table, is pivotable, and retracts above the mounting table when it is in the open state. 2. The loadport of claim 1, wherein: A driving device for operating the plurality of divided covers is provided on each of the plurality of divided covers. 3. A loadport according to claim 1 or 2, wherein, The container has openings on a side close to the conveyance space and an opposite side thereof in a state placed on the mounting table, The sensor unit has a light-emitting element unit and a light-receiving element unit that are arranged outside the container in a state placed on the mounting table and are housed in the container when viewed from above. The processed object is sandwiched in the middle position, Light is irradiated from the light emitting element unit to the light receiving element unit through the opening of the container. 4. The loadport of claim 1 or 2, wherein The direction of the optical axis of the mapping sensor is the front-back direction of the load port. 5. The loadport of claim 1 or 2, wherein, After the object to be processed stored in the container is mapped by the mapping sensor, the door is operated to open the base opening. 6. The loadport of claim 1 or 2, wherein The mountport automatically selects the mapping parameters corresponding to the container in question.