CN108387556A - A kind of surface plasma waveguide optical sensing devices of grapheme material - Google Patents
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Abstract
本发明公开了一种石墨烯材料的表面等离子体波导光学传感装置，其特征是，包括阵列柱形谐振腔和锯齿形长条波导结构，所述阵列柱形谐振腔和锯齿形长条波导结构的两侧边呈对称设置的一组锯齿状边，所述阵列柱形谐振腔和锯齿形长条波导结构的两侧边分别对称设有与阵列柱形谐振腔和锯齿形长条波导结构紧密连接的半导体材料石墨烯和金属材料，分别与金属材料和半导体材料石墨烯紧密连接的阵列柱形谐振腔和锯齿形长条波导结构的锯齿齿尖位置旁边分别对称刻蚀有第一组圆柱形谐振腔和第二组圆柱形谐振腔。这种光学传感装置具有可调性好、抗干扰能力强的特点。
The invention discloses a surface plasmon waveguide optical sensing device of graphene material, which is characterized in that it comprises an array cylindrical resonant cavity and a zigzag long strip waveguide structure, and the array cylindrical resonant cavity and the zigzag long strip waveguide The two sides of the structure are a set of serrated sides arranged symmetrically. Closely connected semiconductor material graphene and metal material, the array cylindrical resonator closely connected with metal material and semiconductor material graphene respectively, and the first group of cylinders are symmetrically etched next to the sawtooth tip positions of the zigzag strip waveguide structure shaped resonator and a second set of cylindrical resonators. The optical sensing device has the characteristics of good adjustability and strong anti-interference ability.
Description
技术领域technical field
本发明涉及光学测量领域，具体是一种石墨烯材料的表面等离子体波导光学传感装置。The invention relates to the field of optical measurement, in particular to a surface plasmon waveguide optical sensing device of a graphene material.
背景技术Background technique
表面等离子共振(Surface Plasmon Resonance，简称SPR)传感技术是一个非常活跃的工程技术研究领域，是对信息科学、生命科学和纳米技术交叉领域的研究。SPR是金属薄膜与介质交界面处的自由电子因受到倏逝波的激发而产生的自由电子集体振荡的现象。随着目前微纳加工技术的飞速提高，以石墨烯为代表的半导体器件成为了当前集成光子学热门方向。Surface Plasmon Resonance (SPR) sensing technology is a very active field of engineering technology research, and it is a research on the intersection of information science, life science and nanotechnology. SPR is a phenomenon of collective oscillation of free electrons at the interface between the metal thin film and the medium due to the excitation of evanescent waves. With the rapid improvement of micro-nano processing technology, semiconductor devices represented by graphene have become a popular direction of integrated photonics.
典型的，2016年《Advance Materials》报道了“Structurally Well-Defined Au@Cu2−xS Core–Shell Nanocrystals for Improved Cancer Treatment Based onEnhanced Photothermal Efficiency”一文，北京理工大学张加涛合作团队首次实现了两种不同SPR机理的协同、耦合效应，他们研制的材料在808nm激光和1064nm激光的辐照下的光热转换效率高达59.01% 和 43.25%，此外，2017年12月，《ACS Nano》报道了“PlasmonicNanochemistry Based on Nanohole Array”一文，德国马克斯·普朗克研究所与吉林大学合作团队成功研制了新型的银纳米粒子SPR结构，其基于银纳米颗粒的生长遵循电场分布的特性，通过控制不同入射光和表面等离子共振峰的电场分布，不仅获得了有序的化学产物结构阵列，还能制造出更多的化学图案。尽管以上研究设计产生的SPR传感器性能较好，但化学传感器的抗干扰性、稳定性等问题对其造成了一定困扰。Typically, "Advance Materials" reported "Structurally Well-Defined Au@Cu2−xS Core–Shell Nanocrystals for Improved Cancer Treatment Based on Enhanced Photothermal Efficiency" in 2016, and Zhang Jiatao of Beijing Institute of Technology realized two different SPR mechanisms for the first time The synergistic and coupling effects of the materials they developed have photothermal conversion efficiencies as high as 59.01% and 43.25% under the irradiation of 808nm laser and 1064nm laser. In addition, in December 2017, "ACS Nano" reported "Plasmonic Nanochemistry Based on Nanohole In the article "Array", the German Max Planck Institute and the Jilin University team successfully developed a new type of silver nanoparticle SPR structure, which is based on the growth of silver nanoparticles following the characteristics of the electric field distribution. By controlling different incident light and surface plasmon resonance The electric field distribution of the peak not only obtains an ordered array of chemical product structures, but also creates more chemical patterns. Although the performance of the SPR sensor produced by the above research design is good, the problems of anti-interference and stability of the chemical sensor have caused some problems to it.
通过检索和查新发现，目前对于石墨烯材料的表面等离子体波导大都集中在特性研究中，对于光学传感等方面的工程技术结合的设计较少。Through search and novelty search, it is found that most of the current surface plasmon waveguides of graphene materials are concentrated in the characteristic research, and there are few designs for the combination of engineering technology in optical sensing and other aspects.
发明内容Contents of the invention
本发明的目的是针对现有技术的不足，而提供一种石墨烯材料的表面等离子体波导光学传感装置。这种光学传感装置具有可调性好、抗干扰能力强的特点。The object of the present invention is to provide a surface plasmon waveguide optical sensing device of graphene material for the deficiencies of the prior art. The optical sensing device has the characteristics of good adjustability and strong anti-interference ability.
实现本发明目的的技术方案是：The technical scheme that realizes the object of the present invention is:
一种石墨烯材料的表面等离子体波导光学传感装置，与现有技术不同的是，包括阵列柱形谐振腔和锯齿形长条波导结构，所述阵列柱形谐振腔和锯齿形长条波导结构的两侧边呈对称设置的一组锯齿状边，所述阵列柱形谐振腔和锯齿形长条波导结构的两侧边分别对称设有与阵列柱形谐振腔和锯齿形长条波导结构紧密连接的半导体材料石墨烯和金属材料，分别与金属材料和半导体材料石墨烯紧密连接的阵列柱形谐振腔和锯齿形长条波导结构的锯齿齿尖位置旁边分别对称刻蚀有第一组圆柱形谐振腔和第二组圆柱形谐振腔。A surface plasmon waveguide optical sensing device of graphene material, which is different from the prior art, includes an array cylindrical resonator and a zigzag strip waveguide structure, and the array column resonator and zigzag strip waveguide The two sides of the structure are a set of serrated sides arranged symmetrically. Closely connected semiconductor material graphene and metal material, the array cylindrical resonator closely connected with the metal material and semiconductor material graphene respectively and the sawtooth tooth tip position of the zigzag strip waveguide structure are symmetrically etched with the first group of cylinders shaped resonator and a second set of cylindrical resonators.
所述阵列柱形谐振腔和锯齿形长条波导结构为二氧化硅波导结构。The array cylindrical resonant cavity and the zigzag strip waveguide structure are silicon dioxide waveguide structures.
所述金属材料为金属金。The metal material is metallic gold.
所述第一组圆柱形谐振腔和第二组圆柱形谐振腔均为高透射率玻璃介质材料。Both the first group of cylindrical resonant cavities and the second group of cylindrical resonant cavities are high transmittance glass dielectric materials.
所述第一组圆柱形谐振腔和第二组圆柱形谐振腔的数量与他们所紧密连接的阵列柱形谐振腔和锯齿形长条波导结构中对应边的锯齿齿数相同。The number of the first group of cylindrical resonant cavities and the second group of cylindrical resonant cavities is the same as the number of teeth of the corresponding sides of the array cylindrical resonant cavities and the zigzag long waveguide structure to which they are closely connected.
所述阵列柱形谐振腔和锯齿形长条波导结构采用火焰水解法制备与刻蚀，该波导结构的锯齿齿形不仅能为表面等离子共振提供耦合空间，还能增强谐振腔的光子局域的效果。The array cylindrical resonator and the zigzag strip waveguide structure are prepared and etched by the flame hydrolysis method. The zigzag shape of the waveguide structure can not only provide a coupling space for surface plasmon resonance, but also enhance the photon localization of the resonator. Effect.
这种光学传感装置，首先通过生长大小相同的石墨烯和金矩形波导对称连接，然后在中间刻蚀锯齿形长条波导结构，接着在相应的锯齿齿尖边旁刻蚀第一组圆柱形谐振腔和第二组圆柱形谐振腔，最后分别将二氧化硅、玻璃沉积到阵列柱形谐振腔和锯齿形长条波导结构中。This optical sensing device is firstly connected symmetrically by growing graphene and gold rectangular waveguides of the same size, then etching the zigzag long waveguide structure in the middle, and then etching the first set of cylindrical shapes next to the corresponding sawtooth teeth. The resonant cavity and the second group of cylindrical resonant cavities are finally deposited into the array cylindrical resonant cavity and the zigzag strip waveguide structure respectively with silicon dioxide and glass.
入射光从阵列柱形谐振腔和锯齿形长条波导结构的一侧入射，出射光从另一侧出射，光在二氧化硅波导结构传播中在金-介质和石墨烯-介质界面会发生表面等离子共振现象，且在玻璃介质的谐振腔中会发生较强的光子局域，且在满足表面等离子共振时的入射波长是谐振腔的局域峰值最大，通过调节阵列柱形谐振腔和锯齿形长条波导结构中锯齿的角度、大小能有效控制折射率，进而控制共振波长，达到光学传感的目的。The incident light is incident from one side of the array cylindrical resonator and the zigzag long strip waveguide structure, and the outgoing light is emitted from the other side. The light will appear on the gold-dielectric and graphene-dielectric interfaces during the propagation of the silica waveguide structure. Plasmon resonance phenomenon, and strong photon localization will occur in the resonator of the glass medium, and the incident wavelength when the surface plasmon resonance is satisfied is the maximum local peak of the resonator. By adjusting the array cylindrical resonator and the zigzag The angle and size of the sawtooth in the elongated waveguide structure can effectively control the refractive index, and then control the resonance wavelength to achieve the purpose of optical sensing.
通过调节阵列柱形谐振腔和锯齿形长条波导结构中锯齿的角度、大小能有效控制折射率，是基于等离子体学的表面等离子共振现象的理论。The refractive index can be effectively controlled by adjusting the angle and size of the sawtooth in the array cylindrical resonator and the sawtooth elongated waveguide structure, which is based on the theory of surface plasmon resonance in plasmonics.
这种光学传感装置通过阵列谐振腔光子强局域化现象实现出射光的控制，由于其中的锯齿结构在波导设计较易控制，故该光学传感器具备了可调性好、抗干扰能力强等特点。This optical sensing device realizes the control of the outgoing light through the strong localization phenomenon of photons in the array resonator. Since the sawtooth structure is easier to control in the waveguide design, the optical sensor has good adjustability and strong anti-interference ability. features.
附图说明Description of drawings
图1为实施例的结构示意图。Fig. 1 is the structural representation of embodiment.
图中，1.入射光 2.出射光3.第一组圆柱形谐振腔 3-1.第二组圆柱形谐振腔 4.阵列柱形谐振腔和锯齿形长条波导结构 5.石墨烯 6.金属金。In the figure, 1. Incident light 2. Outgoing light 3. The first group of cylindrical resonators 3-1. The second group of cylindrical resonators 4. Array cylindrical resonators and zigzag strip waveguide structures 5. Graphene 6 .Metallic gold.
具体实施方式Detailed ways
下面结合附图和实施例对本发明内容作进一步的阐述，但不是对本发明的限定。The content of the present invention will be further described below in conjunction with the accompanying drawings and embodiments, but it is not intended to limit the present invention.
实施例：Example:
参照图1，一种石墨烯材料的表面等离子体波导光学传感装置，与现有技术不同的是，包括阵列柱形谐振腔和锯齿形长条波导结构4，所述阵列柱形谐振腔和锯齿形长条波导结构4的两侧边呈对称设置的一组锯齿状边，所述阵列柱形谐振腔和锯齿形长条波导结构4的两侧边分别对称设有与阵列柱形谐振腔和锯齿形长条波导结构4紧密连接的半导体材料石墨烯5和金属材料6，分别与金属材料6和半导体材料石墨烯5紧密连接的阵列柱形谐振腔和锯齿形长条波导结构的锯齿齿尖位置旁边分别对称刻蚀有第一组圆柱形谐振腔3和第二组圆柱形谐振腔3-1。Referring to Fig. 1, a surface plasmon waveguide optical sensing device of a graphene material is different from the prior art in that it includes an arrayed cylindrical resonant cavity and a zigzag elongated waveguide structure 4, and the arrayed cylindrical resonant cavity and The two sides of the zigzag elongated waveguide structure 4 are a set of serrated sides symmetrically arranged, and the two sides of the array cylindrical resonator and the zigzag elongate waveguide structure 4 are respectively symmetrically arranged with the array cylindrical resonator The semiconductor material graphene 5 and the metal material 6 closely connected with the sawtooth strip waveguide structure 4, the array cylindrical resonator closely connected with the metal material 6 and the semiconductor material graphene 5 respectively and the sawtooth teeth of the zigzag strip waveguide structure A first group of cylindrical resonant cavities 3 and a second group of cylindrical resonant cavities 3-1 are respectively symmetrically etched beside the tip position.
所述阵列柱形谐振腔和锯齿形长条波导结构4为二氧化硅波导结构。The array cylindrical resonator and the zigzag strip waveguide structure 4 are silicon dioxide waveguide structures.
所述金属材料6为金属金。The metal material 6 is metal gold.
所述第一组圆柱形谐振腔3和第二组圆柱形谐振腔3-1均为高透射率玻璃介质材料。Both the first group of cylindrical resonant cavities 3 and the second group of cylindrical resonant cavities 3-1 are high transmittance glass dielectric materials.
所述第一组圆柱形谐振腔3和第二组圆柱形谐振腔3-1的数量与他们所紧密连接的阵列柱形谐振腔和锯齿形长条波导结构4中对应边的锯齿齿数相同。The number of the first group of cylindrical resonators 3 and the second group of cylindrical resonators 3 - 1 is the same as the number of sawtooth teeth on the corresponding sides of the array cylindrical resonators and the sawtooth elongated waveguide structure 4 to which they are closely connected.
所述阵列柱形谐振腔和锯齿形长条波导结构4采用火焰水解法制备与刻蚀，该波导结构的锯齿齿形不仅能为表面等离子共振提供耦合空间，还能增强谐振腔的光子局域的效果。The arrayed cylindrical resonator and the zigzag long waveguide structure 4 are prepared and etched by flame hydrolysis. The zigzag shape of the waveguide structure can not only provide a coupling space for surface plasmon resonance, but also enhance the photon localization of the resonator. Effect.
这种光学传感装置，首先通过生长大小相同的石墨烯和金矩形波导对称连接，然后在中间刻蚀锯齿形长条波导结构，接着在相应的锯齿齿尖边旁刻蚀第一组圆柱形谐振腔3和第二组圆柱形谐振腔3-1，最后分别将二氧化硅、玻璃沉积到阵列柱形谐振腔和锯齿形长条波导结构4中。This optical sensing device is firstly connected symmetrically by growing graphene and gold rectangular waveguides of the same size, then etching the zigzag long waveguide structure in the middle, and then etching the first set of cylindrical shapes next to the corresponding sawtooth teeth. The resonant cavity 3 and the second group of cylindrical resonant cavities 3-1 are finally deposited with silicon dioxide and glass into the array cylindrical resonant cavity and the zigzag elongated waveguide structure 4 respectively.
入射光1从阵列柱形谐振腔和锯齿形长条波导结构4的一侧入射，出射光2从另一侧出射，光在二氧化硅波导结构传播中在金-介质和石墨烯-介质界面会发生表面等离子共振现象，且在玻璃介质的谐振腔中会发生较强的光子局域，且在满足表面等离子共振时的入射波长是谐振腔的局域峰值最大，通过调节阵列柱形谐振腔和锯齿形长条波导结构4中锯齿的角度、大小能有效控制折射率，进而控制共振波长，达到光学传感的目的。The incident light 1 is incident from one side of the arrayed cylindrical resonator and the zigzag elongated waveguide structure 4, and the outgoing light 2 is incident from the other side. The light travels at the gold-dielectric and graphene-dielectric interfaces during the propagation of the silica waveguide structure. The phenomenon of surface plasmon resonance will occur, and strong photon localization will occur in the resonator of the glass medium, and the incident wavelength when the surface plasmon resonance is satisfied is the maximum local peak of the resonator. By adjusting the array cylindrical resonator And the angle and size of the sawtooth in the sawtooth-shaped strip waveguide structure 4 can effectively control the refractive index, and then control the resonance wavelength to achieve the purpose of optical sensing.
通过调节阵列柱形谐振腔和锯齿形长条波导结构4中锯齿的角度、大小能有效控制折射率，是基于等离子体学的表面等离子共振现象的理论。The refractive index can be effectively controlled by adjusting the angle and size of the sawtooth in the array cylindrical resonator and the sawtooth elongated waveguide structure 4, which is based on the theory of surface plasmon resonance in plasmonics.
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