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CN108380569A - High concentration OH free radical generating means - Google Patents

High concentration OH free radical generating means Download PDF

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Publication number
CN108380569A
CN108380569A CN201810175587.8A CN201810175587A CN108380569A CN 108380569 A CN108380569 A CN 108380569A CN 201810175587 A CN201810175587 A CN 201810175587A CN 108380569 A CN108380569 A CN 108380569A
Authority
CN
China
Prior art keywords
generating means
ultraviolet light
free radical
high concentration
radical generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810175587.8A
Other languages
Chinese (zh)
Inventor
徐飞
邬治国
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHANGZHOU RUIZE MICROELECTRONICS TECHNOLOGY Co Ltd
Original Assignee
CHANGZHOU RUIZE MICROELECTRONICS TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHANGZHOU RUIZE MICROELECTRONICS TECHNOLOGY Co Ltd filed Critical CHANGZHOU RUIZE MICROELECTRONICS TECHNOLOGY Co Ltd
Priority to CN201810175587.8A priority Critical patent/CN108380569A/en
Publication of CN108380569A publication Critical patent/CN108380569A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02Cleaning by the force of jets or sprays
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00Accessories or details of general applicability for machines or apparatus for cleaning
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/08Cleaning involving contact with liquid the liquid having chemical or dissolving effect
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0057Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by ultraviolet radiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B2203/00Details of cleaning machines or methods involving the use or presence of liquid or steam
    • B08B2203/005Details of cleaning machines or methods involving the use or presence of liquid or steam the liquid being ozonated

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Physical Water Treatments (AREA)

Abstract

The present invention relates to a kind of high concentration OH free radical generating means, including water inlet pipe, tetrafluoro set, ultraviolet light emitting module and guide fluid grating, tetrafluoro set bottom has opening, the ultraviolet light emitting module is two sets, it is fixed in tetrafluoro set, it is separated by guide fluid grating between two ultraviolet light emitting modules, several cavitys are formed between two ultraviolet light emitting modules and guide fluid grating, guide fluid grating bottom end offers several through-holes, described through-hole one end is connected to the cavity respectively, the open communication of the through-hole other end and tetrafluoro set bottom, the water inlet pipe are connected to cavity.The generating means of special designing can not only be by hydrogen peroxide " flattening ", to improve the contact area of ultraviolet light and hydrogen peroxide, it is sprayed onto on object to be cleaned after irradiation reaction and is irradiated cleaning, also constantly irradiate object to be cleaned simultaneously, the generation for considerably increasing OH free radicals, it is simple and reliable for structure to which the efficiency and quality of cleaning greatly improved, it is easy to use, there are preferable market prospects.

Description

High concentration OH free radical generating means
Technical field:
The present invention relates to ultraviolet rays cleaning technical field more particularly to a kind of high concentrations for capableing of large-area ultraviolet irradiation OH free radical generating means.
Background technology:
Ultraviolet rays cleaning technology is to reach removal using the photosensitized oxidation effect of organic compound to be attached on material surface Organic substance, the material surface after light cleans can reach " atomic cleanliness degree ".UV light source launch wavelengths be 185nm and The light wave of 254nm has very high energy, when these photons are applied to cleaned body surface, due to most of hydrocarbonization Close object has stronger absorbability to the ultraviolet light of 185nm wavelength, and divides after absorbing the energy of ultraviolet light of 185nm wavelength Solution is at ion, free state atom, excited molecule and neutron, and here it is so-called " photosensitizations ".Oxygen molecule in air is being inhaled Ozone and elemental oxygen are also will produce after having received the ultraviolet light of 185nm wavelength.Ozone equally has the ultraviolet light of 254nm wavelength strong Strong absorption, ozone are decomposed into elemental oxygen and oxygen again.Wherein elemental oxygen is as lively as a cricket, in the case where it is acted on, object table The decomposition product of carbon and hydrocarbon on face can be combined to volatilizable gas:Carbon dioxide and vapor etc. escape surface, To thoroughly remove the carbon and organic pollution that stick on a surface of an.
In addition, if with ultraviolet light oxydol H2O2Equal medicaments, hydrogen peroxide generate OH free radicals etc. under ultraviolet irradiation Reactive intermediate can greatly improve the efficiency of light cleaning.Being cleaned in the prior art with ultraviolet light hydrogen peroxide medicament mainly has 2 Kind method:First, medicament (hydrogen peroxide) spray is had a ultraviolet lamp above the surface of cleaned material, cleaned material, to clear Washing carries out ultraviolet irradiation;Second is that by medicament (hydrogen peroxide) spray on ultraviolet lampshade, drop is spread across clear after ultraviolet irradiation The surface of washing.
Problem of the existing technology:Since medicament (hydrogen peroxide) is to continue spray, so medicament (hydrogen peroxide) is flowing , under the prior art, the medicament (hydrogen peroxide) of unit volume is smaller by the area of ultraviolet irradiation, and irradiation time is also short, irradiation Intensity is had a greatly reduced quality, and the efficiency and efficiency of ultraviolet rays cleaning are also had a greatly reduced quality.
Invention content:
The purpose of the present invention is in view of the drawbacks of the prior art, provide a kind of area that can increase ultraviolet irradiation, improve The intensity of irradiation, the high concentration OH free radical generating means for improving cleaning performance.
The present invention is achieved through the following technical solutions:A kind of high concentration OH free radical generating means, including water inlet pipe, Tetrafluoro set, ultraviolet light emitting module and guide fluid grating, it is two that tetrafluoro set bottom, which has opening, the ultraviolet light emitting module, Set is fixed in tetrafluoro set, is separated by guide fluid grating between two ultraviolet light emitting modules, two ultraviolet light emitting modules and water conservancy diversion Several cavitys are formed between screen, guide fluid grating bottom end offers several through-holes, and described through-hole one end connects with the cavity respectively Logical, the open communication of the through-hole other end and tetrafluoro set bottom, the water inlet pipe is connected to cavity.
For the ease of ultraviolet light emitting module to be effectively secured in tetrafluoro set, tetrafluoro set bottom end is provided with crotch Portion.
Since if UV lamp pipe can cause to aoxidize and corrode often in contact with hydrogen peroxide, radiation response and service life are influenced, Therefore closed quartz ampoule is arranged outside UV lamp pipe, hydrogen peroxide is not contacted with UV lamp pipe, to increase the use longevity of UV lamp pipe Life.
In a preferred embodiment of the present invention, two quartz ampoule is rectangular, one of two rectangular quartz tubes level The corresponding setting in face.In order to improve radiation response, inner wall of the quartz ampoule far from guide fluid grating is provided with reflector, quartz ampoule Inner wall far from tetrafluoro set bottom is provided with reflector.
In another preferred embodiment of the present invention, the two quartz ampoules semicircular in shape, the horizontal plane of two halves circle quartz ampoule Corresponding setting.In order to improve radiation response, inner wall of the quartz ampoule far from guide fluid grating is provided with reflector.
In another preferred embodiment of the present invention, two quartz ampoule is triangular in shape, and wherein the one of two triangle quartz ampoule A corresponding setting of horizontal plane.In order to improve radiation response, inner wall of the quartz ampoule far from guide fluid grating is provided with reflector.
Certainly the quartz ampoule of the present invention is not limited only to these above-mentioned shapes.
Preferably, the guide fluid grating of the present invention is made using etch-proof material, the thickness of guide fluid grating is preferred For 2-4mm.
The advantageous effect of high concentration OH free radical generating means of the present invention is:The generating means of special designing can not only will be double Oxygen water " flattening " is sprayed onto on object to be cleaned after irradiation reaction and is irradiated clearly to improve the contact area of ultraviolet light and hydrogen peroxide Wash, while also constantly irradiating object to be cleaned, considerably increase the generation of OH free radicals, to greatly improved cleaning efficiency and Quality, it is simple and reliable for structure, it is easy to use, there are preferable market prospects.
Description of the drawings
Fig. 1 is the front view of a preferred embodiment of high concentration OH free radical generating means of the present invention;
Fig. 2 is the side view of a preferred embodiment of high concentration OH free radical generating means of the present invention;
Fig. 3 is the vertical view of a preferred embodiment of high concentration OH free radical generating means of the present invention;
Fig. 4 is the side view of another preferred embodiment of high concentration OH free radical generating means of the present invention;
Fig. 5 is the side view of another preferred embodiment of high concentration OH free radical generating means of the present invention;
In figure:1. water inlet pipe, 2. connectors, 3. tetrafluoro sets, 4.UV fluorescent tubes, 5. quartz ampoules, 6. guide fluid gratings, 7. reflectors, 8. through-hole.
Specific implementation mode:
In conjunction with the accompanying drawings, the present invention is further explained in detail.
Embodiment 1:
As shown in Figs. 1-3, a kind of high concentration OH free radical generating means, including water inlet pipe 1, tetrafluoro set 3, ultraviolet light transmitting Component and guide fluid grating 6, it is two sets that the tetrafluoro, which covers 3 bottoms to have opening, the ultraviolet light emitting module, is fixed on tetrafluoro set It in 3, is separated by guide fluid grating 6 between two ultraviolet light emitting modules, is formed between two ultraviolet light emitting modules and guide fluid grating 6 Several cavitys, 6 bottom end of guide fluid grating offer several through-holes 8, and 8 one end of the through-hole is connected to the cavity respectively, and through-hole 8 is another One end covers the open communication of 3 bottoms with tetrafluoro, and the water inlet pipe 1 is connected to cavity, and water inlet pipe 1 is fixed on tetrafluoro by connector 2 Cover 3 tops.
Tetrafluoro set is 3 generally rectangular, and top is closed, and bottom, which has, can allow the opening that ultraviolet light emission is gone out, Bottom end is provided with hook part, and hook part can prevent ultraviolet light emitting module from being dropped out out of tetrafluoro set 3.
It is arranged closed rectangular quartz tube 5 outside UV lamp pipe 4 and forms ultraviolet light emitting module, rectangular quartz tube 5 is connected to In tetrafluoro set 3.In order to improve radiation response, inner wall of the rectangular quartz tube 5 far from guide fluid grating 6 is provided with reflector 7, stone The inner wall that English pipe 5 covers 3 bottoms far from tetrafluoro is provided with reflector 7.Certainly, ultraviolet light emitting module is also not limited to setting two Set, by three sets, four sets or more some special shapes for being composed of ultraviolet light emitting module are equally applicable to the present invention.
The guide fluid grating 6 of the present invention is made using etch-proof material, and the thickness of guide fluid grating 6 is preferably 2-4mm, Five cavitys are formed between guide fluid grating 6 and quartz ampoule 5, each cavity bottom offers through-hole 8.
In use, hydrogen peroxide is entered by water inlet pipe 1 in the cavity between guide fluid grating 6 and quartz ampoule 5, UV lamp pipe 4 is logical The booster action pair five for crossing reflector 7 is irradiated in the hydrogen peroxide of " sheet ", and the hydrogen peroxide after irradiation forms a large amount of OH Free radical via through holes 8 spray on object to be cleaned, and at the same time, UV lamp pipe 4 constantly irradiates object to be cleaned by the opening of bottom, To complete to treat the cleaning of cleaning materials.
Embodiment 2:
Difference from Example 1 is, as shown in figure 4, two quartz ampoules, 5 semicircular in shape, two halves circle quartz ampoule 5 The corresponding setting of horizontal plane, formed a generally rounded structure, quartz ampoule 5 far from guide fluid grating 6 inner wall setting There are reflector 7, reflector 7 to be arranged on the arcwall face of quartz ampoule 5, and covers 3 openings close to tetrafluoro and be not provided with reflector 7.
Embodiment 3:
Difference from Example 1 is, as shown in figure 5, two quartz ampoule 5 is triangular in shape, two triangle quartz ampoule 5 One of the corresponding setting of horizontal plane, formed a generally rectangular structure, quartz ampoule 5 is far from guide fluid grating 6 Inner wall is provided with reflector 7, and covers 3 openings close to tetrafluoro and be not provided with reflector 7.
Certainly, it is more beautiful to may be designed as the moulding such as trapezoidal, triangle for the shape of high concentration OH free radical generating means The shape of sight, to meet the market demand.
Compared with prior art, the generating means of special designing can not only by hydrogen peroxide " flattening ", with improve ultraviolet light with The contact area of hydrogen peroxide is sprayed onto on object to be cleaned after irradiation reaction and is irradiated cleaning, while also constantly irradiating object to be cleaned, The generation for considerably increasing OH free radicals, to which the efficiency and quality of cleaning, simple and reliable for structure, user greatly improved Just, there are preferable market prospects.
Several embodiments of the invention above described embodiment only expresses, the description thereof is more specific and detailed, but simultaneously It cannot therefore be construed as limiting the scope of the patent.It should be pointed out that coming for those of ordinary skill in the art It says, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection of the present invention Range.

Claims (9)

1. a kind of high concentration OH free radical generating means, it is characterised in that:Including water inlet pipe, tetrafluoro set, ultraviolet light emitting module And guide fluid grating, it is two sets that tetrafluoro set bottom, which has opening, the ultraviolet light emitting module, is fixed in tetrafluoro set, two It is separated by guide fluid grating between ultraviolet light emitting module, several skies is formed between two ultraviolet light emitting modules and guide fluid grating Chamber, guide fluid grating bottom end offer several through-holes, and described through-hole one end is connected to the cavity respectively, the through-hole other end and tetrafluoro The open communication of bottom is covered, the water inlet pipe is connected to cavity.
2. high concentration OH free radical generating means according to claim 1, it is characterised in that:Tetrafluoro set bottom end setting There is the hook part that ultraviolet light emitting module can be fixed in tetrafluoro set.
3. high concentration OH free radical generating means according to claim 1 or 2, it is characterised in that:The luminescence-utraviolet Component includes UV lamp pipe and quartz ampoule, and the quartz pipe sleeve is located at outside UV lamp pipe.
4. high concentration OH free radical generating means according to claim 3, it is characterised in that:Two quartz ampoule is in square Shape, the corresponding setting of one of two rectangular quartz tubes horizontal plane.
5. high concentration OH free radical generating means according to claim 4, it is characterised in that:The quartz ampoule is far from water conservancy diversion The inner wall of screen is provided with reflector, and the inner wall that quartz ampoule covers bottom far from tetrafluoro is provided with reflector.
6. high concentration OH free radical generating means according to claim 3, it is characterised in that:Two quartz ampoule is in semicircle Shape, the corresponding setting of horizontal plane of two halves circle quartz ampoule.
7. high concentration OH free radical generating means according to claim 6, it is characterised in that:The quartz ampoule is far from water conservancy diversion The inner wall of screen is provided with reflector.
8. high concentration OH free radical generating means according to claim 3, it is characterised in that:Two quartz ampoule is in triangle Shape, the corresponding setting of one of two triangle quartz ampoule horizontal plane.
9. high concentration OH free radical generating means according to claim 8, it is characterised in that:The quartz ampoule is far from water conservancy diversion The inner wall of screen is provided with reflector.
CN201810175587.8A 2018-03-02 2018-03-02 High concentration OH free radical generating means Pending CN108380569A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810175587.8A CN108380569A (en) 2018-03-02 2018-03-02 High concentration OH free radical generating means

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810175587.8A CN108380569A (en) 2018-03-02 2018-03-02 High concentration OH free radical generating means

Publications (1)

Publication Number Publication Date
CN108380569A true CN108380569A (en) 2018-08-10

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Country Status (1)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111906093A (en) * 2020-07-15 2020-11-10 常州瑞择微电子科技有限公司 Large-area photon generation spray head

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5698039A (en) * 1995-02-04 1997-12-16 Leybold Ag Process for cleaning a substrate using a barrier discharge
JP2000070885A (en) * 1998-09-01 2000-03-07 Ultla Clean Technology Kaihatsu Kenkyusho:Kk Device and method for cleaning substrate
JP2007105621A (en) * 2005-10-13 2007-04-26 Koichi Ogikubo Ultraviolet irradiation device for gas and dry surface treatment device
CN102167464A (en) * 2011-03-24 2011-08-31 同济大学 Water treatment sterilization method by ultraviolet catalysis hydrogen peroxide matched with chlorine/chloramine
CN102791391A (en) * 2009-11-03 2012-11-21 哈马技术Ape两合公司 Method and apparatus for treating substrates
US8398816B1 (en) * 2006-03-28 2013-03-19 Novellus Systems, Inc. Method and apparatuses for reducing porogen accumulation from a UV-cure chamber
CN107180774A (en) * 2016-03-09 2017-09-19 东京毅力科创株式会社 The system and method that gas phase hydroxyl radical free radical for substrate is processed

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5698039A (en) * 1995-02-04 1997-12-16 Leybold Ag Process for cleaning a substrate using a barrier discharge
JP2000070885A (en) * 1998-09-01 2000-03-07 Ultla Clean Technology Kaihatsu Kenkyusho:Kk Device and method for cleaning substrate
JP2007105621A (en) * 2005-10-13 2007-04-26 Koichi Ogikubo Ultraviolet irradiation device for gas and dry surface treatment device
US8398816B1 (en) * 2006-03-28 2013-03-19 Novellus Systems, Inc. Method and apparatuses for reducing porogen accumulation from a UV-cure chamber
CN102791391A (en) * 2009-11-03 2012-11-21 哈马技术Ape两合公司 Method and apparatus for treating substrates
CN102167464A (en) * 2011-03-24 2011-08-31 同济大学 Water treatment sterilization method by ultraviolet catalysis hydrogen peroxide matched with chlorine/chloramine
CN107180774A (en) * 2016-03-09 2017-09-19 东京毅力科创株式会社 The system and method that gas phase hydroxyl radical free radical for substrate is processed

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111906093A (en) * 2020-07-15 2020-11-10 常州瑞择微电子科技有限公司 Large-area photon generation spray head

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Application publication date: 20180810

RJ01 Rejection of invention patent application after publication