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CN108447811B - Silicon wafer flower basket and controller thereof - Google Patents

Silicon wafer flower basket and controller thereof Download PDF

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CN108447811B
CN108447811B CN201810164662.0A CN201810164662A CN108447811B CN 108447811 B CN108447811 B CN 108447811B CN 201810164662 A CN201810164662 A CN 201810164662A CN 108447811 B CN108447811 B CN 108447811B
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silicon wafer
teeth
latch
tooth
column
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Jiaxing Shangneng Photovoltaic Material Technology Co ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H01L21/67309Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by the substrate support
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67092Apparatus for mechanical treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • H10F71/137Batch treatment of the devices
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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Abstract

本发明公开了一种硅片花篮及其控制器,包括相对设置的第一支撑板和第二支撑板、以及安装于第一支撑板和第二支撑板之间的若干立柱,所述立柱上设有若干卡齿,所述卡齿包括安装于立柱上且固定设置的第一卡齿、以及安装于立柱上可切换位置的第二卡齿,第一卡齿和第二卡齿分别用于承载硅片,其中,第一卡齿上承载的硅片竖直方向上的位置保持不变,第二卡齿上承载的硅片竖直方向上的位置跟随第二卡齿位置的变化而变化。本发明的硅片花篮结构简单,能够通过卡齿的位置变化实现硅片的位置变化,从而实现硅片的合片及分片功能。

Figure 201810164662

The invention discloses a silicon wafer flower basket and a controller thereof, comprising a first support plate and a second support plate oppositely arranged, and a plurality of uprights installed between the first support plate and the second support plate, the uprights are on the There are several latching teeth, the latching teeth include a first latching tooth installed on the column and fixedly arranged, and a second latching tooth installed on the column to switch positions, the first latching teeth and the second latching teeth are respectively used for Carrying silicon wafers, wherein the vertical position of the silicon wafer carried on the first locking tooth remains unchanged, and the vertical position of the silicon wafer carried on the second locking tooth changes with the change of the position of the second locking tooth . The silicon wafer flower basket of the present invention has a simple structure, and can realize the position change of the silicon wafer through the position change of the clamping teeth, thereby realizing the functions of assembling and dividing the silicon wafer.

Figure 201810164662

Description

硅片花篮及其控制器Silicon wafer flower basket and its controller

技术领域technical field

本发明涉及太阳能电池制造技术领域,特别是涉及一种可实现硅片分片和合片的硅片花篮及其控制器。The invention relates to the technical field of solar cell manufacturing, in particular to a silicon wafer flower basket capable of realizing silicon wafer slicing and splicing and a controller thereof.

背景技术Background technique

光伏发电是新能源的重要组成,近年来获得了飞速发展。目前商业化的太阳电池产品中,晶体硅(单晶和多晶)太阳电池的市场份额最大,一直保持接近九成的市场占有率。目前,在晶体硅太阳电池的生产工艺中,绒面工艺的目的是降低太阳电池的表面反射率,从而提高太阳电池的光电转换效率。Photovoltaic power generation is an important component of new energy and has developed rapidly in recent years. Among the current commercialized solar cell products, crystalline silicon (monocrystalline and polycrystalline) solar cells have the largest market share, maintaining a market share of nearly 90%. At present, in the production process of crystalline silicon solar cells, the purpose of the textured process is to reduce the surface reflectivity of the solar cell, thereby improving the photoelectric conversion efficiency of the solar cell.

硅片花篮在太阳能电池制造领域中是用于收容硅片,以对硅片进行制绒、刻蚀、清洗、转换、印刷等工艺。参图1所示,现有技术中的硅片花篮包括上下设置的第一支撑板11′和第二支撑板12′,第一支撑板11′和第二支撑板12′通过四根立柱20′进行固定,立柱20′上设置有两两相对的卡齿31′,相邻的卡齿31′之间形成有若干卡槽32′,将硅片插入同一水平位置的四个卡槽后即可实现硅片40′的插入安装,硅片插入完成后将硅片花篮放入溶液中进行制绒、刻蚀、清洗、转换、印刷等工艺。In the field of solar cell manufacturing, silicon wafer flower baskets are used to accommodate silicon wafers for texturing, etching, cleaning, conversion, printing and other processes on silicon wafers. As shown in FIG. 1 , the silicon wafer flower basket in the prior art includes a first support plate 11 ′ and a second support plate 12 ′ arranged up and down, and the first support plate 11 ′ and the second support plate 12 ′ pass through four uprights 20 'For fixing, the upright column 20' is provided with two opposite clamping teeth 31', and several clamping grooves 32' are formed between the adjacent clamping teeth 31'. The insertion and installation of the silicon wafer 40' can be realized. After the insertion of the silicon wafer is completed, the silicon wafer flower basket is put into the solution for texturing, etching, cleaning, conversion, printing and other processes.

然而,现有技术的硅片花篮中的卡齿均为固定结构,该硅片花篮适用于硅片的双面制绒工艺,但现有技术中已公开了硅片的单面制绒工艺,在进行单面制绒时无法实现硅片的分离。However, the teeth in the silicon wafer flower basket in the prior art are all fixed structures, and the silicon wafer flower basket is suitable for the double-sided texturing process of the silicon wafer, but the single-sided texturing process of the silicon wafer has been disclosed in the prior art, Wafer separation cannot be achieved during single-sided texturing.

因此,针对上述技术问题,有必要提供一种硅片花篮及其控制器。Therefore, in view of the above technical problems, it is necessary to provide a silicon wafer flower basket and a controller thereof.

发明内容SUMMARY OF THE INVENTION

有鉴于此,本发明的目的在于提供一种硅片花篮及其控制器,其可实现硅片分片和合片。In view of this, the purpose of the present invention is to provide a silicon wafer flower basket and a controller thereof, which can realize silicon wafer slicing and splicing.

为了实现上述目的,本发明一实施例提供的技术方案如下:In order to achieve the above purpose, the technical solution provided by an embodiment of the present invention is as follows:

一种硅片花篮,包括相对设置的第一支撑板和第二支撑板、以及安装于第一支撑板和第二支撑板之间的若干立柱,所述立柱上设有若干卡齿,所述卡齿包括安装于立柱上且固定设置的第一卡齿、以及安装于立柱上可切换位置的第二卡齿,第一卡齿和第二卡齿分别用于承载硅片,其中,第一卡齿上承载的硅片竖直方向上的位置保持不变,第二卡齿上承载的硅片竖直方向上的位置跟随第二卡齿位置的变化而变化。A silicon wafer flower basket includes a first support plate and a second support plate arranged oppositely, and a plurality of uprights installed between the first support plate and the second support plate, the uprights are provided with a plurality of locking teeth, and the The clamping teeth include a first clamping tooth installed on the column and fixedly arranged, and a second clamping tooth installed on the column with a switchable position. The first clamping tooth and the second clamping tooth are respectively used for carrying silicon wafers, wherein the first The vertical position of the silicon wafer carried on the clamping teeth remains unchanged, and the vertical position of the silicon wafer carried on the second clamping teeth changes with the change of the position of the second clamping teeth.

作为本发明的进一步改进,所述第二卡齿位置的变化包括第二卡齿的水平伸缩运动、平面旋转运动、竖直升降运动中的至少一种。As a further improvement of the present invention, the change of the position of the second locking teeth includes at least one of horizontal telescopic motion, plane rotating motion, and vertical lifting motion of the second locking teeth.

作为本发明的进一步改进,所述硅片花篮还包括:As a further improvement of the present invention, the silicon wafer flower basket further includes:

驱动机构,用于实现第二卡齿水平伸缩运动、平面旋转运动、竖直升降运动中的至少一种;a driving mechanism for realizing at least one of the horizontal telescopic movement, the plane rotation movement and the vertical lifting movement of the second clamping teeth;

控制机构,用于控制第二卡齿水平伸缩运动的距离、平面旋转的角度、竖直升降运动的距离中的至少一种。The control mechanism is used to control at least one of the distance of the horizontal telescopic movement of the second clamping teeth, the angle of plane rotation, and the distance of the vertical lifting movement.

作为本发明的进一步改进,所述第一卡齿和第二卡齿间隔设置于立柱上。As a further improvement of the present invention, the first locking teeth and the second locking teeth are arranged on the upright column at intervals.

作为本发明的进一步改进,所述立柱包括第一立柱和第二立柱,第一卡齿安装于第一立柱上,第二卡齿安装于第二立柱上。As a further improvement of the present invention, the column includes a first column and a second column, the first locking teeth are mounted on the first column, and the second locking teeth are mounted on the second column.

作为本发明的进一步改进,所述第二立柱安装于第一立柱的内侧和/或外侧。As a further improvement of the present invention, the second column is installed on the inner side and/or the outer side of the first column.

作为本发明的进一步改进,所述第二卡齿包括设于立柱上的第一端及远离立柱的第二端,所述第二卡齿的厚度沿第一端向第二端逐渐减小。As a further improvement of the present invention, the second locking teeth include a first end disposed on the upright column and a second end away from the upright column, and the thickness of the second locking teeth gradually decreases from the first end to the second end.

作为本发明的进一步改进,所述第二卡齿的上表面的高度沿第一端向第二端逐渐降低。As a further improvement of the present invention, the height of the upper surface of the second locking teeth gradually decreases from the first end to the second end.

作为本发明的进一步改进,所述第二卡齿的下表面的高度沿第一端向第二端逐渐升高。As a further improvement of the present invention, the height of the lower surface of the second latching teeth gradually increases from the first end to the second end.

作为本发明的进一步改进,所述第二卡齿的下表面为平面。As a further improvement of the present invention, the lower surface of the second locking tooth is flat.

本发明另一实施例提供的技术方案如下:The technical solution provided by another embodiment of the present invention is as follows:

一种硅片花篮的控制器,所述控制器用于控制第二卡齿位置的变化,以实现第二卡齿上承载的硅片竖直方向上的位置跟随第二卡齿位置的变化而变化。A controller for a silicon wafer flower basket, the controller is used to control the change of the position of the second clamping tooth, so as to realize that the vertical position of the silicon wafer carried on the second clamping tooth changes with the change of the position of the second clamping tooth .

作为本发明的进一步改进,所述控制器通过有线或无线的控制方式对第二卡齿的位置变化进行控制。As a further improvement of the present invention, the controller controls the position change of the second latching teeth through a wired or wireless control manner.

本发明的有益效果是:The beneficial effects of the present invention are:

硅片花篮结构简单,能够通过卡齿的位置变化实现硅片的位置变化,从而实现硅片的合片及分片功能;The silicon wafer flower basket has a simple structure, and can realize the position change of the silicon wafer through the change of the position of the clamping teeth, thereby realizing the functions of combining and dividing the silicon wafer;

能够用于晶硅电池片的单面制绒,大幅提高了产能,降低了生产成本。It can be used for single-sided texturing of crystalline silicon cells, which greatly increases production capacity and reduces production costs.

附图说明Description of drawings

为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明中记载的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to explain the embodiments of the present invention or the technical solutions in the prior art more clearly, the following briefly introduces the accompanying drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only These are some embodiments described in the present invention. For those of ordinary skill in the art, other drawings can also be obtained based on these drawings without any creative effort.

图1为现有技术中硅片花篮的结构示意图;1 is a schematic structural diagram of a silicon wafer flower basket in the prior art;

图2a为本发明实施例1中硅片花篮分片状态的结构示意图;FIG. 2a is a schematic structural diagram of the fragmented state of the silicon wafer flower basket in Embodiment 1 of the present invention;

图2b为图2a的俯视结构示意图;Fig. 2b is a top-view structural schematic diagram of Fig. 2a;

图2c为本发明实施例1中硅片花篮合片状态的结构示意图;FIG. 2c is a schematic structural diagram of the state of the silicon wafer flower basket in Embodiment 1 of the present invention;

图3a为本发明实施例2中硅片花篮分片状态的结构示意图;3a is a schematic structural diagram of a silicon wafer flower basket in a fragmented state in Embodiment 2 of the present invention;

图3b为本发明实施例2中硅片花篮合片状态的结构示意图;3b is a schematic structural diagram of the state of the silicon wafer flower basket in Embodiment 2 of the present invention;

图3c为图3a的俯视结构示意图;Fig. 3c is the top-view structure schematic diagram of Fig. 3a;

图3d为图3b的俯视结构示意图;FIG. 3d is a schematic top view of FIG. 3b;

图3e为本发明实施例2中硅片花篮中硅片完全脱离第二卡齿的结构示意图;FIG. 3e is a schematic structural diagram of the silicon wafer in the silicon wafer flower basket according to Embodiment 2 of the present invention being completely separated from the second latching teeth;

图4a为本发明实施例3中硅片花篮分片状态的结构示意图;FIG. 4a is a schematic structural diagram of the fragmented state of the silicon wafer flower basket in Embodiment 3 of the present invention;

图4b为本发明实施例3中硅片花篮合片状态的结构示意图;FIG. 4b is a schematic structural diagram of the state of the silicon wafer flower basket in Embodiment 3 of the present invention;

图4c为图4a的俯视结构示意图;FIG. 4c is a schematic top view of FIG. 4a;

图4d为图4b的俯视结构示意图;FIG. 4d is a schematic top view of FIG. 4b;

图4e为本发明实施例3中硅片花篮中硅片完全脱离第二卡齿的结构示意图;FIG. 4e is a schematic structural diagram of the silicon wafer in the silicon wafer flower basket according to Embodiment 3 of the present invention being completely separated from the second latching teeth;

图5a为本发明实施例4中硅片花篮分片状态的结构示意图;FIG. 5a is a schematic structural diagram of the fragmented state of the silicon wafer flower basket in Embodiment 4 of the present invention;

图5b为本发明实施例4中硅片花篮合片状态的结构示意图;5b is a schematic structural diagram of the state of the silicon wafer flower basket in Embodiment 4 of the present invention;

图6a为本发明实施例6中硅片花篮分片状态的结构示意图;6a is a schematic structural diagram of a silicon wafer flower basket in a fragmented state according to Embodiment 6 of the present invention;

图6b为本发明实施例6中硅片花篮合片状态的结构示意图;FIG. 6b is a schematic structural diagram of a silicon wafer flower basket combined state in Embodiment 6 of the present invention;

图7a为本发明实施例7中硅片花篮分片状态的结构示意图;7a is a schematic structural diagram of a silicon wafer flower basket in a fragmented state in Embodiment 7 of the present invention;

图7b为图7a的俯视结构示意图。FIG. 7b is a schematic top view of the structure of FIG. 7a.

具体实施方式Detailed ways

为了使本技术领域的人员更好地理解本发明中的技术方案,下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都应当属于本发明保护的范围。In order to make those skilled in the art better understand the technical solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described The embodiments are only some of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

本发明公开了一种硅片花篮,包括相对设置的第一支撑板和第二支撑板、以及安装于第一支撑板和第二支撑板之间的若干立柱,立柱上设有若干卡齿,卡齿包括固定安装于立柱上且固定设置的第一卡齿、以及安装于立柱上可切换位置的第二卡齿,第一卡齿和第二卡齿分别用于承载硅片,其中,第一卡齿上承载的硅片竖直方向上的位置保持不变,第二卡齿上承载的硅片竖直方向上的位置跟随第二卡齿位置的变化而变化。The invention discloses a silicon wafer flower basket, comprising a first support plate and a second support plate arranged oppositely, and a plurality of uprights installed between the first support plate and the second support plate, and the uprights are provided with a plurality of locking teeth, The clamping teeth include a first clamping tooth that is fixedly installed on the column and fixedly arranged, and a second clamping tooth that is installed on the column to switch positions. The first clamping teeth and the second clamping teeth are respectively used for carrying silicon chips, wherein the first The vertical position of the silicon wafer carried on one tooth remains unchanged, and the vertical position of the silicon wafer carried on the second tooth changes with the change of the position of the second tooth.

其中,第二卡齿位置的变化包括第二卡齿的水平伸缩运动、平面旋转运动、竖直升降运动中的至少一种,通过第二卡齿位置的变化能够控制其上承载的硅片的竖直位置,达到与下方第一卡齿上承载的硅片进行合并或分片的目的。Wherein, the change of the position of the second tooth includes at least one of horizontal telescopic movement, plane rotation, and vertical lifting motion of the second tooth, and the change of the position of the second tooth can control the movement of the silicon wafer carried thereon. The vertical position achieves the purpose of merging or slicing with the silicon wafers carried on the first clamping teeth below.

本发明中提及的竖直方向为垂直于第一支撑板和第二支撑板的方向(即立柱的延伸方向),水平方向为平行于第一支撑板和第二支撑板的方向(即垂直于立柱的方向)。The vertical direction mentioned in the present invention is the direction perpendicular to the first support plate and the second support plate (ie the extending direction of the column), and the horizontal direction is the direction parallel to the first support plate and the second support plate (ie the vertical direction). in the direction of the column).

以下结合具体实施例对本发明的硅片花篮作进一步说明。The silicon wafer flower basket of the present invention will be further described below with reference to specific embodiments.

实施例1:Example 1:

参图2a、图2b所示,本实施例中的硅片花篮,包括相对设置的第一支撑板11和第二支撑板12、以及安装于第一支撑板11和第二支撑板12之间的四根立柱20,立柱20上设有若干卡齿,卡齿包括安装于立柱上且固定设置的第一卡齿31、以及安装于立柱上可切换位置的第二卡齿32,第一卡齿31和第二卡齿32在同一根立柱上间隔分布。第一卡齿31和第二卡齿32之间形成有卡槽33,卡槽33用于承载硅片,硅片插入后承载与对应的第一卡齿31或第二卡齿32上。2a and 2b, the silicon wafer flower basket in this embodiment includes a first support plate 11 and a second support plate 12 arranged oppositely, and is installed between the first support plate 11 and the second support plate 12. There are four uprights 20, the uprights 20 are provided with a number of latching teeth, the latching teeth include a first latching tooth 31 mounted on the upright and fixedly arranged, and a second latching tooth 32 mounted on the upright column in a switchable position. The teeth 31 and the second locking teeth 32 are distributed at intervals on the same column. A slot 33 is formed between the first tooth 31 and the second tooth 32 . The slot 33 is used to carry the silicon wafer, and the silicon wafer is inserted and carried on the corresponding first tooth 31 or the second tooth 32 .

其中,本实施例中的第一卡齿31包括设于立柱上的第一端及远离立柱的第二端,第一卡齿的厚度沿第一端向第二端逐渐减小。第一卡齿31的上表面和下表面均呈斜面设置,上表面的高度沿第一端向第二端逐渐降低,下表面的高度沿第一端向第二端逐渐升高。Wherein, the first locking tooth 31 in this embodiment includes a first end disposed on the upright column and a second end away from the upright column, and the thickness of the first locking tooth gradually decreases from the first end to the second end. The upper surface and the lower surface of the first locking teeth 31 are both inclined. The height of the upper surface gradually decreases along the first end to the second end, and the height of the lower surface gradually increases along the first end to the second end.

同样地,第二卡齿32的形状与第一卡齿31形状相同,第二卡齿32包括设于立柱上的第一端及远离立柱的第二端,第二卡齿的厚度沿第一端向第二端逐渐减小。第二卡齿32的上表面和下表面均呈斜面设置,上表面的高度沿第一端向第二端逐渐降低,下表面的高度沿第一端向第二端逐渐升高。Similarly, the shape of the second teeth 32 is the same as the shape of the first teeth 31 , the second teeth 32 include a first end disposed on the upright column and a second end away from the column, and the thickness of the second locking teeth is along the first The end gradually decreases towards the second end. The upper and lower surfaces of the second latching teeth 32 are both inclined, the height of the upper surface gradually decreases from the first end to the second end, and the height of the lower surface gradually increases along the first end to the second end.

本实施例中立柱20与第一卡齿31固定安装,第二卡齿32可以进行水平伸缩运动,可通过控制机构和驱动机构实现第二卡齿32的水平伸缩运动,驱动机构可包括驱动电机、联动杆等,联动杆设于立柱20内部,控制机构控制驱动电机转动,带动联动机构在水平方向上运动,从而带动第二卡齿32实现水平伸缩运动。In this embodiment, the upright column 20 is fixedly installed with the first clamping teeth 31, the second clamping teeth 32 can perform horizontal telescopic movement, and the horizontal telescopic movement of the second clamping teeth 32 can be realized by a control mechanism and a driving mechanism, and the driving mechanism can include a drive motor , linkage rod, etc. The linkage rod is set inside the column 20, and the control mechanism controls the rotation of the drive motor to drive the linkage mechanism to move in the horizontal direction, thereby driving the second tooth 32 to achieve horizontal telescopic movement.

参图2a、图2c所示,本实施例中的硅片花篮使用方法具体如下:Referring to Figures 2a and 2c, the usage method of the silicon wafer flower basket in this embodiment is as follows:

将硅片40依次插入硅片花篮的卡槽33中,硅片40分别承载于第一卡齿31及第二卡齿32上方,具体参图2a所示;Insert the silicon wafers 40 into the card slots 33 of the silicon wafer flower basket in sequence, and the silicon wafers 40 are respectively supported on the first locking teeth 31 and the second locking teeth 32, as shown in FIG. 2a;

然后通过控制机构和驱动机构控制第二卡齿32同时进行水平伸缩运动,使第二卡齿32沿远离硅片40方向伸缩运动,由于第二卡齿32的上表面为斜面,在第二卡齿32沿远离硅片40方向运动时,第二卡齿32上承载的硅片40竖直方向上的位置会逐渐降低,因此第二卡齿32上承载的硅片和其下方第一卡齿31上承载的硅片之间距离逐渐减小,实现两片硅片的合片,具体参图2c所示。Then, the control mechanism and the driving mechanism are used to control the second clamping teeth 32 to perform horizontal telescopic movement at the same time, so that the second clamping teeth 32 can be telescopically moved in the direction away from the silicon wafer 40. Since the upper surface of the second clamping teeth 32 is inclined, the When the teeth 32 move in the direction away from the silicon wafer 40, the vertical position of the silicon wafer 40 carried on the second locking teeth 32 will gradually decrease, so the silicon wafer carried on the second locking teeth 32 and the first locking teeth below it will gradually decrease. The distance between the silicon wafers carried on the 31 gradually decreases to realize the joining of the two silicon wafers, as shown in FIG. 2c for details.

应当注意的是,在合片的过程中,第二卡齿32始终不脱离其上承载的硅片,第二卡齿32的齿尖始终位于两个硅片之间。It should be noted that, in the process of joining the pieces, the second locking teeth 32 are never separated from the silicon wafers carried thereon, and the tooth tips of the second locking teeth 32 are always located between the two silicon wafers.

当第二卡齿32和硅片40达到图2c中的位置时,即可将硅片花篮放入制绒液中进行硅片的单面制绒,此时,由于两个硅片之间的距离减小,两个硅片之间可认为基本贴合,制绒时仅对上方硅片的上表面和下方硅片的下表面进行,中间贴合的两个硅片表面不会发生化学反应。When the second tooth 32 and the silicon wafer 40 reach the position shown in FIG. 2c, the silicon wafer flower basket can be put into the texturing solution for single-sided texturing of the silicon wafer. When the distance is reduced, the two silicon wafers can be considered to be basically attached. During texturing, only the upper surface of the upper silicon wafer and the lower surface of the lower silicon wafer are processed, and chemical reactions will not occur on the surfaces of the two silicon wafers attached in the middle. .

制绒完成后,通过控制机构和驱动机构控制第二卡齿32同时进行水平伸缩运动,使第二卡齿32沿靠近硅片40方向伸缩运动,由于第二卡齿32的上表面为斜面,在第二卡齿32沿靠近硅片40方向运动时,第二卡齿32上承载的硅片40竖直方向上的位置会逐渐升高,因此第二卡齿32上承载的硅片和其下方第一卡齿31上承载的硅片之间距离逐渐增大,实现两片硅片的分片,参图2a所示。After the texturing is completed, the second clamping teeth 32 are controlled to perform horizontal telescopic movement at the same time by the control mechanism and the driving mechanism, so that the second clamping teeth 32 are telescopically moved in the direction close to the silicon wafer 40. Since the upper surface of the second clamping teeth 32 is inclined, When the second tooth 32 moves in a direction close to the silicon wafer 40, the vertical position of the silicon wafer 40 carried on the second tooth 32 will gradually increase, so the silicon wafer carried on the second tooth 32 and its The distance between the silicon wafers carried on the lower first clamping teeth 31 gradually increases to realize the splitting of the two silicon wafers, as shown in FIG. 2a.

当实现硅片的分片后,即可将对硅片进行清洗、烘干等工艺。待所有硅片的工艺都完成后,即可从硅片花篮中取出所有的硅片。After the slicing of the silicon wafers is achieved, the silicon wafers can be cleaned, dried and other processes. After the process of all the silicon wafers is completed, all the silicon wafers can be taken out from the silicon wafer flower basket.

应当理解的是,在其他实施例中第一卡齿、第二卡齿的上表面和下表面也可以设置为弧面、或斜面与弧面的组合等,只要在第二卡齿水平伸缩运动时,第二卡齿上承载的硅片竖直方向上的位置对应发生变化的技术方案均属于本发明所保护的范围,此处不再一一进行说明。It should be understood that, in other embodiments, the upper and lower surfaces of the first and second clamping teeth can also be set as arc surfaces, or a combination of inclined surfaces and arc surfaces, etc., as long as the second clamping teeth are horizontally telescopically moved When the position of the silicon wafer carried on the second clamping teeth in the vertical direction changes correspondingly, all technical solutions belong to the scope of protection of the present invention, and will not be described one by one here.

实施例2:Example 2:

参图3a、图3c所示,本实施例中的硅片花篮,包括相对设置的第一支撑板11和第二支撑板12、以及安装于第一支撑板11和第二支撑板12之间的八根立柱20,立柱20包括第一立柱21和第二立柱22,第二立柱22位于第一立柱21内侧,立柱20上设有若干卡齿,卡齿包括安装于第一立柱21上且固定设置的第一卡齿31、以及安装于第二立柱22上可切换位置的第二卡齿32,第一卡齿31和第二卡齿32在相邻的立柱上间隔分布。第一卡齿31和第二卡齿32之间形成有卡槽33,卡槽33用于承载硅片,硅片插入后承载与对应的第一卡齿31或第二卡齿32上。Referring to FIGS. 3 a and 3 c , the silicon wafer flower basket in this embodiment includes a first support plate 11 and a second support plate 12 arranged oppositely, and is installed between the first support plate 11 and the second support plate 12 . There are eight columns 20, the column 20 includes a first column 21 and a second column 22, the second column 22 is located on the inner side of the first column 21, the column 20 is provided with a number of locking teeth, and the locking teeth are installed on the first column 21 and The fixed first locking teeth 31 and the second locking teeth 32 installed on the second column 22 in a switchable position, the first locking teeth 31 and the second locking teeth 32 are spaced apart on adjacent columns. A slot 33 is formed between the first tooth 31 and the second tooth 32 . The slot 33 is used to carry the silicon wafer, and the silicon wafer is inserted and carried on the corresponding first tooth 31 or the second tooth 32 .

其中,本实施例中的第一卡齿31包括设于立柱上的第一端及远离立柱的第二端,第一卡齿的厚度沿第一端向第二端逐渐减小。第一卡齿31的上表面和下表面均呈斜面设置,上表面的高度沿第一端向第二端逐渐降低,下表面的高度沿第一端向第二端逐渐升高。Wherein, the first locking tooth 31 in this embodiment includes a first end disposed on the upright column and a second end away from the upright column, and the thickness of the first locking tooth gradually decreases from the first end to the second end. The upper surface and the lower surface of the first locking teeth 31 are both inclined. The height of the upper surface gradually decreases along the first end to the second end, and the height of the lower surface gradually increases along the first end to the second end.

同样地,第二卡齿32的形状与第一卡齿31形状相同,第二卡齿32包括设于立柱上的第一端及远离立柱的第二端,第二卡齿的厚度沿第一端向第二端逐渐减小。第二卡齿32的上表面和下表面均呈斜面设置,上表面的高度沿第一端向第二端逐渐降低,下表面的高度沿第一端向第二端逐渐升高。Similarly, the shape of the second teeth 32 is the same as the shape of the first teeth 31 , the second teeth 32 include a first end disposed on the upright column and a second end away from the column, and the thickness of the second locking teeth is along the first The end gradually decreases towards the second end. The upper and lower surfaces of the second latching teeth 32 are both inclined, the height of the upper surface gradually decreases from the first end to the second end, and the height of the lower surface gradually increases along the first end to the second end.

本实施例中第一立柱21与第一卡齿31固定安装,第二立柱22带动第二卡齿32可以进行水平伸缩运动,第二立柱22可通过控制机构和驱动机构实现第二卡齿32的水平伸缩运动,驱动机构可包括驱动电机等,对应地在第一支撑板11和的第二支撑板12上设置相应的水平滑槽,控制机构控制驱动电机转动,带动第二立柱22在水平方向上沿水平滑槽运动,从而带动第二卡齿32实现水平伸缩运动。In this embodiment, the first column 21 is fixedly installed with the first locking teeth 31 , the second column 22 drives the second locking teeth 32 to perform horizontal telescopic movement, and the second column 22 can realize the second locking teeth 32 through the control mechanism and the driving mechanism The drive mechanism may include a drive motor, etc. Correspondingly, a corresponding horizontal chute is set on the first support plate 11 and the second support plate 12, and the control mechanism controls the drive motor to rotate to drive the second column 22 to horizontally It moves along the horizontal chute in the direction, thereby driving the second teeth 32 to realize horizontal telescopic movement.

参图3a~3d所示,本实施例中的硅片花篮使用方法具体如下:Referring to Figures 3a-3d, the usage method of the silicon wafer flower basket in this embodiment is as follows:

将硅片40依次插入硅片花篮的卡槽33中,硅片40分别承载于第一卡齿31及第二卡齿32上方,具体参图3a、图3c所示;Insert the silicon wafers 40 into the card slots 33 of the silicon wafer flower basket in sequence, and the silicon wafers 40 are respectively carried on the first locking teeth 31 and the second locking teeth 32, as shown in FIG. 3a and FIG. 3c ;

然后通过控制机构和驱动机构控制第二卡齿32同时进行水平伸缩运动,使第二卡齿32沿远离硅片40方向伸缩运动,由于第二卡齿32的上表面为斜面,在第二卡齿32沿远离硅片40方向运动时,第二卡齿32上承载的硅片40竖直方向上的位置会逐渐降低,因此第二卡齿32上承载的硅片和其下方第一卡齿31上承载的硅片之间距离逐渐减小,实现两片硅片的合片,具体参图3b、3d所示。Then, the control mechanism and the driving mechanism are used to control the second clamping teeth 32 to perform horizontal telescopic movement at the same time, so that the second clamping teeth 32 can be telescopically moved in the direction away from the silicon wafer 40. Since the upper surface of the second clamping teeth 32 is inclined, the When the teeth 32 move in the direction away from the silicon wafer 40, the vertical position of the silicon wafer 40 carried on the second locking teeth 32 will gradually decrease, so the silicon wafer carried on the second locking teeth 32 and the first locking teeth below it will gradually decrease. The distance between the silicon wafers carried on the 31 gradually decreases to realize the joining of the two silicon wafers, as shown in Figures 3b and 3d for details.

应当注意的是,在合片的过程中,第二卡齿32始终不脱离其上承载的硅片,第二卡齿32的齿尖始终位于两个硅片之间。It should be noted that, in the process of joining the pieces, the second locking teeth 32 are never separated from the silicon wafers carried thereon, and the tooth tips of the second locking teeth 32 are always located between the two silicon wafers.

当第二卡齿32和硅片40达到图3b中的位置时,即可将硅片花篮放入制绒液中进行硅片的单面制绒,此时,由于两个硅片之间的距离减小,两个硅片之间可认为基本贴合,制绒时仅对上方硅片的上表面和下方硅片的下表面进行,中间贴合的两个硅片表面不会发生化学反应。When the second tooth 32 and the silicon wafer 40 reach the position shown in FIG. 3b, the silicon wafer flower basket can be put into the texturing liquid to perform single-sided texturing of the silicon wafer. When the distance is reduced, the two silicon wafers can be considered to be basically attached. During texturing, only the upper surface of the upper silicon wafer and the lower surface of the lower silicon wafer are processed, and chemical reactions will not occur on the surfaces of the two silicon wafers attached in the middle. .

制绒完成后,通过控制机构和驱动机构控制第二卡齿32同时进行水平伸缩运动,使第二卡齿32沿靠近硅片40方向伸缩运动,由于第二卡齿32的上表面为斜面,在第二卡齿32沿靠近硅片40方向运动时,第二卡齿32上承载的硅片40竖直方向上的位置会逐渐升高,因此第二卡齿32上承载的硅片和其下方第一卡齿31上承载的硅片之间距离逐渐增大,实现两片硅片的分片,参图3a、图3c所示。After the texturing is completed, the second clamping teeth 32 are controlled to perform horizontal telescopic movement at the same time by the control mechanism and the driving mechanism, so that the second clamping teeth 32 are telescopically moved in the direction close to the silicon wafer 40. Since the upper surface of the second clamping teeth 32 is inclined, When the second tooth 32 moves in a direction close to the silicon wafer 40, the vertical position of the silicon wafer 40 carried on the second tooth 32 will gradually increase, so the silicon wafer carried on the second tooth 32 and its The distance between the silicon wafers carried on the lower first clamping teeth 31 gradually increases to realize the splitting of the two silicon wafers, as shown in FIG. 3 a and FIG. 3 c .

当实现硅片的分片后,即可将对硅片进行清洗、烘干等工艺。待所有硅片的工艺都完成后,即可从硅片花篮中取出所有的硅片。After the slicing of the silicon wafers is achieved, the silicon wafers can be cleaned, dried and other processes. After the process of all the silicon wafers is completed, all the silicon wafers can be taken out from the silicon wafer flower basket.

应当理解的是,在其他实施例中第一卡齿、第二卡齿的上表面和下表面也可以设置为弧面、或斜面与弧面的组合等,只要在第二卡齿水平伸缩运动时,第二卡齿上承载的硅片竖直方向上的位置对应发生变化的技术方案均属于本发明所保护的范围,此处不再一一进行说明。It should be understood that, in other embodiments, the upper and lower surfaces of the first and second clamping teeth can also be set as arc surfaces, or a combination of inclined surfaces and arc surfaces, etc., as long as the second clamping teeth are horizontally telescopically moved When the position of the silicon wafer carried on the second clamping teeth in the vertical direction changes correspondingly, all technical solutions belong to the scope of protection of the present invention, and will not be described one by one here.

进一步地,当需要将两个硅片合片取出时,则通过控制结构和驱动机构控制第二立柱22和第二卡齿32沿远离硅片的水平方向运动,直至第二卡齿完全脱离硅片,此时第二卡齿上承载的硅片与下方第一卡齿承载的硅片基本贴合,具体参图3e所示。Further, when the two silicon wafers need to be taken out, the second column 22 and the second clamping tooth 32 are controlled to move in a horizontal direction away from the silicon wafer by the control structure and the driving mechanism until the second clamping tooth is completely separated from the silicon wafer. At this time, the silicon wafer carried on the second tooth is basically attached to the silicon wafer carried by the first tooth below, as shown in FIG. 3e for details.

实施例3:Example 3:

参图4a、图4c所示,本实施例中的硅片花篮,包括相对设置的第一支撑板11和第二支撑板12、以及安装于第一支撑板11和第二支撑板12之间的八根立柱20,立柱20包括第一立柱21和第二立柱22,立柱20上设有若干卡齿,卡齿包括安装于第一立柱21上且固定设置的第一卡齿31、以及安装于第二立柱22上可切换位置的第二卡齿32,第一卡齿31和第二卡齿32在相邻的立柱上间隔分布。第一卡齿31和第二卡齿32之间形成有卡槽33,卡槽33用于承载硅片,硅片插入后承载与对应的第一卡齿31或第二卡齿32上。Referring to FIGS. 4a and 4c , the silicon wafer flower basket in this embodiment includes a first support plate 11 and a second support plate 12 arranged opposite to each other, and is installed between the first support plate 11 and the second support plate 12 . There are eight columns 20, the column 20 includes a first column 21 and a second column 22, a number of clamping teeth are provided on the column 20, and the clamping teeth include a first clamping tooth 31 installed on the first column 21 and fixedly arranged, and the installation The second locking teeth 32 , the first locking teeth 31 and the second locking teeth 32 , which can switch positions on the second column 22 , are spaced apart on adjacent columns. A slot 33 is formed between the first tooth 31 and the second tooth 32 . The slot 33 is used to carry the silicon wafer, and the silicon wafer is inserted and carried on the corresponding first tooth 31 or the second tooth 32 .

其中,本实施例中的第一卡齿31包括设于立柱上的第一端及远离立柱的第二端,第一卡齿的厚度沿第一端向第二端逐渐减小。第一卡齿31的上表面和下表面均呈斜面设置,上表面的高度沿第一端向第二端逐渐降低,下表面的高度沿第一端向第二端逐渐升高。Wherein, the first locking tooth 31 in this embodiment includes a first end disposed on the upright column and a second end away from the upright column, and the thickness of the first locking tooth gradually decreases from the first end to the second end. The upper surface and the lower surface of the first locking teeth 31 are both inclined. The height of the upper surface gradually decreases along the first end to the second end, and the height of the lower surface gradually increases along the first end to the second end.

同样地,第二卡齿32的形状与第一卡齿31形状相同,第二卡齿32包括设于立柱上的第一端及远离立柱的第二端,第二卡齿的厚度沿第一端向第二端逐渐减小。第二卡齿32的上表面和下表面均呈斜面设置,上表面的高度沿第一端向第二端逐渐降低,下表面的高度沿第一端向第二端逐渐升高。Similarly, the shape of the second teeth 32 is the same as the shape of the first teeth 31 , the second teeth 32 include a first end disposed on the upright column and a second end away from the column, and the thickness of the second locking teeth is along the first The end gradually decreases towards the second end. The upper and lower surfaces of the second latching teeth 32 are both inclined, the height of the upper surface gradually decreases from the first end to the second end, and the height of the lower surface gradually increases along the first end to the second end.

本实施例中第一立柱21与第一卡齿31固定安装,第二立柱22带动第二卡齿32可以进行平面旋转运动,第二立柱22可通过控制机构和驱动机构实现第二卡齿32的平面旋转运动,驱动机构可包括驱动电机等,控制机构控制驱动电机转动,带动第二立柱22在平面内旋转,从而带动第二卡齿32实现平面旋转运动。In this embodiment, the first column 21 is fixedly installed with the first locking tooth 31 , the second column 22 drives the second locking tooth 32 to perform plane rotation movement, and the second column 22 can realize the second locking tooth 32 through the control mechanism and the driving mechanism The driving mechanism may include a driving motor, etc., and the control mechanism controls the rotation of the driving motor to drive the second column 22 to rotate in the plane, thereby driving the second tooth 32 to realize the plane rotation.

参图4a~4d所示,本实施例中的硅片花篮使用方法具体如下:Referring to Figures 4a-4d, the usage method of the silicon wafer flower basket in this embodiment is as follows:

将硅片40依次插入硅片花篮的卡槽33中,硅片40分别承载于第一卡齿31及第二卡齿32上方,具体参图4a、图4c所示;Insert the silicon wafers 40 into the card slots 33 of the silicon wafer flower basket in sequence, and the silicon wafers 40 are respectively carried above the first locking teeth 31 and the second locking teeth 32, as shown in FIG. 4a and FIG. 4c ;

然后通过控制机构和驱动机构控制第二立柱22进行平面旋转运动,优选地,旋转角度为45°~60°,使第二卡齿32沿朝向中心位置旋转,由于第二卡齿32的上表面为斜面,在第二卡齿32沿朝向中心位置旋转时,第二卡齿32上承载的硅片40竖直方向上的位置会逐渐降低,因此第二卡齿32上承载的硅片和其下方第一卡齿31上承载的硅片之间距离逐渐减小,实现两片硅片的合片,具体参图4b、4d所示。Then, the second column 22 is controlled by the control mechanism and the driving mechanism to perform plane rotation movement, preferably, the rotation angle is 45°˜60°, so that the second latch 32 rotates toward the center position, because the upper surface of the second latch 32 It is an inclined plane. When the second tooth 32 rotates toward the center position, the vertical position of the silicon wafer 40 carried on the second tooth 32 will gradually decrease. Therefore, the silicon wafer carried on the second tooth 32 and its The distance between the silicon wafers carried on the lower first clamping teeth 31 is gradually reduced to realize the joining of the two silicon wafers, as shown in FIGS. 4b and 4d for details.

应当注意的是,在合片的过程中,第二卡齿32始终不脱离其上承载的硅片,第二卡齿32的齿尖始终位于两个硅片之间。It should be noted that, in the process of joining the pieces, the second locking teeth 32 are never separated from the silicon wafers carried thereon, and the tooth tips of the second locking teeth 32 are always located between the two silicon wafers.

当第二卡齿32和硅片40达到图4b中的位置时,即可将硅片花篮放入制绒液中进行硅片的单面制绒,此时,由于两个硅片之间的距离减小,两个硅片之间可认为基本贴合,制绒时仅对上方硅片的上表面和下方硅片的下表面进行,中间贴合的两个硅片表面不会发生化学反应。When the second tooth 32 and the silicon wafer 40 reach the position shown in Fig. 4b, the silicon wafer flower basket can be put into the texturing solution for single-sided texturing of the silicon wafer. When the distance is reduced, the two silicon wafers can be considered to be basically attached. During texturing, only the upper surface of the upper silicon wafer and the lower surface of the lower silicon wafer are processed, and chemical reactions will not occur on the surfaces of the two silicon wafers attached in the middle. .

制绒完成后,通过控制机构和驱动机构控制第二卡齿32同时沿远离中心位置旋转,由于第二卡齿32的上表面为斜面,在第二卡齿32沿靠近硅片40方向运动时,第二卡齿32上承载的硅片40竖直方向上的位置会逐渐升高,因此第二卡齿32上承载的硅片和其下方第一卡齿31上承载的硅片之间距离逐渐增大,实现两片硅片的分片,参图4a、图4c所示。After the texturing is completed, the control mechanism and the drive mechanism are used to control the second tooth 32 to rotate away from the center at the same time. Since the upper surface of the second tooth 32 is an inclined plane, when the second tooth 32 moves in the direction close to the silicon wafer 40 , the vertical position of the silicon wafer 40 carried on the second tooth 32 will gradually increase, so the distance between the silicon wafer carried on the second tooth 32 and the silicon wafer carried on the first tooth 31 below it Gradually increase to realize the slicing of two silicon wafers, as shown in Figure 4a and Figure 4c.

当实现硅片的分片后,即可将对硅片进行清洗、烘干等工艺。待所有硅片的工艺都完成后,即可从硅片花篮中取出所有的硅片。After the slicing of the silicon wafers is achieved, the silicon wafers can be cleaned, dried and other processes. After the process of all the silicon wafers is completed, all the silicon wafers can be taken out from the silicon wafer flower basket.

应当理解的是,在其他实施例中第一卡齿、第二卡齿的上表面和下表面也可以设置为弧面、或斜面与弧面的组合等,只要在第二卡齿水平伸缩运动时,第二卡齿上承载的硅片竖直方向上的位置对应发生变化的技术方案均属于本发明所保护的范围,此处不再一一进行说明。It should be understood that, in other embodiments, the upper and lower surfaces of the first and second clamping teeth can also be set as arc surfaces, or a combination of inclined surfaces and arc surfaces, etc., as long as the second clamping teeth are horizontally telescopically moved When the position of the silicon wafer carried on the second clamping teeth in the vertical direction changes correspondingly, all technical solutions belong to the scope of protection of the present invention, and will not be described one by one here.

进一步地,当需要将两个硅片合片取出时,则通过控制结构和驱动机构控制第二立柱22和第二卡齿32沿朝向中心位置旋转90°,第二卡齿完全脱离硅片,此时第二卡齿上承载的硅片与下方第一卡齿承载的硅片基本贴合,具体参图4e所示。Further, when the two silicon wafers need to be taken out, the second column 22 and the second locking tooth 32 are controlled to rotate 90° toward the center position through the control structure and the driving mechanism, and the second locking tooth is completely separated from the silicon wafer, At this time, the silicon wafer carried on the second tooth is basically attached to the silicon wafer carried by the first tooth below, as shown in FIG. 4e for details.

另外,本实施例中以第二立柱设于第一立柱内侧为例进行说明,在其他实施例中第二立柱也可以设于第一立柱外侧,或同时设于外侧和内侧,旋转的方向也可以对应改变,此处不再进行详细说明。In addition, in this embodiment, the second column is set on the inside of the first column as an example for description. In other embodiments, the second column can also be set on the outside of the first column, or on the outside and the inside at the same time. The direction of rotation is also Corresponding changes can be made, and detailed descriptions are omitted here.

实施例4:Example 4:

参图5a、图5b所示,与实施例2中类似地,本实施例中的硅片花篮,包括相对设置的第一支撑板11和第二支撑板12、以及安装于第一支撑板11和第二支撑板12之间的八根立柱20,立柱20包括第一立柱21和第二立柱22,立柱20上设有若干卡齿,卡齿包括安装于第一立柱21上且固定设置的第一卡齿31、以及安装于第二立柱22上可切换位置的第二卡齿32,第一卡齿31和第二卡齿32在相邻的立柱上间隔分布。第一卡齿31和第二卡齿32之间形成有卡槽33,卡槽33用于承载硅片,硅片插入后承载与对应的第一卡齿31或第二卡齿32上。Referring to FIGS. 5a and 5b , similar to Embodiment 2, the silicon wafer flower basket in this embodiment includes a first support plate 11 and a second support plate 12 that are oppositely arranged, and is mounted on the first support plate 11 . The eight uprights 20 between the second support plate 12 and the uprights 20 include a first upright 21 and a second upright 22. The uprights 20 are provided with a number of locking teeth, and the locking teeth include The first latching teeth 31 and the second latching teeth 32 installed on the second column 22 in a switchable position are spaced apart from the first latching teeth 31 and the second latching teeth 32 on adjacent columns. A slot 33 is formed between the first tooth 31 and the second tooth 32 . The slot 33 is used to carry the silicon wafer, and the silicon wafer is inserted and carried on the corresponding first tooth 31 or the second tooth 32 .

与实施例2不同的是,本实施例中第二卡齿32的形状有所改变,第二卡齿32包括设于立柱上的第一端及远离立柱的第二端,第二卡齿的厚度沿第一端向第二端逐渐减小。第二卡齿32的上表面呈斜面设置,下表面呈平面设置,上表面的高度沿第一端向第二端逐渐降低,下表面的高度沿第一端向第二端保持不变。Different from Embodiment 2, the shape of the second locking teeth 32 in this embodiment is changed. The second locking teeth 32 include a first end disposed on the upright column and a second end away from the upright column. The thickness gradually decreases along the first end toward the second end. The upper surface of the second locking teeth 32 is inclined and the lower surface is flat. The height of the upper surface gradually decreases from the first end to the second end, and the height of the lower surface remains unchanged from the first end to the second end.

本实施例中第二卡齿32的控制方式与实施例2完全相同,此处不再进行赘述。将第二卡齿32的下表面设置为平面后,能够进一步减小第二卡齿32承载硅片与下方第一卡齿31上承载硅片之间的距离,提高了两片硅片的合片效果。The control manner of the second locking teeth 32 in this embodiment is exactly the same as that in Embodiment 2, and will not be repeated here. After the lower surface of the second locking teeth 32 is set to be flat, the distance between the silicon wafers supported by the second locking teeth 32 and the silicon wafers supported on the first locking teeth 31 can be further reduced, and the bonding of the two silicon wafers can be improved. slice effect.

实施例5:Example 5:

本实施例中的立柱、第一卡齿、第二卡齿的设置与实施例2完全相同,不同之处在于本实施例中的第二卡齿在第二立柱上实现竖直升降运动,通过竖直升降运动直接控制第二卡齿上承载的硅片在竖直方向上的位置,从而实现第二卡齿承载硅片与下方第一卡齿上承载硅片之间的合片及分片。The settings of the column, the first clamping teeth and the second clamping teeth in this embodiment are exactly the same as those in the second embodiment, the difference is that the second clamping teeth in this embodiment realize vertical lifting movement on the second column. The vertical lifting motion directly controls the vertical position of the silicon wafer carried on the second tooth, so as to realize the joining and splitting between the silicon wafer carried by the second tooth and the silicon wafer carried on the first tooth below. .

实施例6:Example 6:

在本发明不仅限于通过第二卡齿的水平伸缩运动、平面旋转运动、竖直升降运动中的一种进行控制,也可以结合多种方式实现第二卡齿的运动,以提高硅片的合片及分片效果。In the present invention, the control is not limited to one of the horizontal telescopic movement, the plane rotation movement and the vertical lifting movement of the second clamping teeth, and the movement of the second clamping teeth can also be realized in a variety of ways to improve the bonding of the silicon wafers. Slice and slice effects.

如在本实施例中,硅片花篮的结构与实施例2基本相同,第一支撑板11、第二支撑板12、立柱20、第一卡齿31、第二卡齿23及卡槽33的结构均与实施例2相同,此处不再进行赘述。As in this embodiment, the structure of the silicon wafer flower basket is basically the same as that of the second embodiment. The structure is the same as that of Embodiment 2, and will not be repeated here.

与实施例2中不同的是,本实施例中第二立柱22带动第二卡齿32可以进行水平伸缩运动和竖直升降运动,第二立柱22可通过控制机构和驱动机构实现第二卡齿32的水平伸缩运动及竖直升降运动,驱动机构可包括驱动电机等。The difference from Embodiment 2 is that in this embodiment, the second column 22 drives the second locking teeth 32 to perform horizontal telescopic movement and vertical lifting movement, and the second column 22 can realize the second locking teeth through the control mechanism and the driving mechanism. For the horizontal telescopic movement and vertical lifting movement of 32, the driving mechanism may include a driving motor and the like.

本实施例中的硅片花篮使用方法具体如下:The usage method of the silicon wafer flower basket in this embodiment is as follows:

将硅片40依次插入硅片花篮的卡槽33中,硅片40分别承载于第一卡齿31及第二卡齿32上方,具体参图6a所示;Insert the silicon wafers 40 into the card slots 33 of the silicon wafer flower basket in sequence, and the silicon wafers 40 are respectively carried on the first locking teeth 31 and the second locking teeth 32, as shown in FIG. 6a;

然后通过控制机构和驱动机构控制第二卡齿32进行水平伸缩运动和竖直升降运动,使第二卡齿32沿远离硅片40方向伸缩运动,并且第二卡齿32的竖直高度逐渐降低,第二卡齿32上承载的硅片40竖直方向上的位置会逐渐降低,第二卡齿32上承载的硅片和其下方第一卡齿31上承载的硅片之间距离逐渐减小,实现两片硅片的合片,具体参图6b所示。Then, the second clamping teeth 32 are controlled by the control mechanism and the driving mechanism to perform horizontal telescopic movement and vertical lifting movement, so that the second clamping teeth 32 are telescopically moved in the direction away from the silicon wafer 40, and the vertical height of the second clamping teeth 32 is gradually reduced. , the vertical position of the silicon wafer 40 carried on the second tooth 32 will gradually decrease, and the distance between the silicon wafer carried on the second tooth 32 and the silicon wafer carried on the first tooth 31 below it will gradually decrease Small, realizes the combination of two silicon wafers, as shown in Figure 6b.

应当注意的是,在合片的过程中,第二卡齿32始终不脱离其上承载的硅片,第二卡齿32的齿尖始终位于两个硅片之间。It should be noted that, in the process of joining the pieces, the second locking teeth 32 are never separated from the silicon wafers carried thereon, and the tooth tips of the second locking teeth 32 are always located between the two silicon wafers.

当第二卡齿32和硅片40达到图6b中的位置时,即可将硅片花篮放入制绒液中进行硅片的单面制绒,此时,由于两个硅片之间的距离减小,两个硅片之间可认为完全贴合,制绒时仅对上方硅片的上表面和下方硅片的下表面进行,中间贴合的两个硅片表面不会发生化学反应。When the second tooth 32 and the silicon wafer 40 reach the position shown in FIG. 6b, the silicon wafer flower basket can be put into the texturing solution for single-sided texturing of the silicon wafer. The distance is reduced, and the two silicon wafers can be considered to be completely attached. During texturing, only the upper surface of the upper silicon wafer and the lower surface of the lower silicon wafer are processed, and chemical reactions will not occur on the surfaces of the two silicon wafers attached in the middle. .

制绒完成后,通过控制机构和驱动机构控制第二卡齿32进行水平伸缩运动和竖直升降运动,实现两片硅片的分片,参图6a所示。After the texturing is completed, the second clamping teeth 32 are controlled by the control mechanism and the driving mechanism to perform horizontal telescopic motion and vertical lifting motion to realize the slicing of two silicon wafers, as shown in FIG. 6a.

当实现硅片的分片后,即可将对硅片进行清洗、烘干等工艺。待所有硅片的工艺都完成后,即可从硅片花篮中取出所有的硅片。After the slicing of the silicon wafers is achieved, the silicon wafers can be cleaned, dried and other processes. After the process of all the silicon wafers is completed, all the silicon wafers can be taken out from the silicon wafer flower basket.

其中,本实施例中的水平伸缩运动和竖直升降运动可同时进行,也可以先后分别进行,也可以间隔依次进行,此处不再一一说明。Wherein, the horizontal telescopic movement and the vertical lifting movement in this embodiment may be performed simultaneously, or may be performed sequentially, or may be performed sequentially at intervals, which will not be described one by one here.

当然,在其他实施方式中,也可以通过第二卡齿的平面旋转运动和竖直升降运动相结合进行控制,或通过第二卡齿的水平伸缩运动、平面旋转运动和竖直升降运动相结合进行控制等,本发明中不再一一举例进行说明。Of course, in other embodiments, the control can also be performed by the combination of the plane rotation movement and the vertical lifting movement of the second clamping teeth, or the combination of the horizontal telescopic movement, the plane rotation movement and the vertical lifting movement of the second clamping teeth. Control, etc., will not be described one by one in the present invention.

实施例7:Example 7:

参图7a、7b所示,本实施例中的硅片花篮,包括相对设置的第一支撑板11和第二支撑板12、以及安装于第一支撑板11和第二支撑板12之间的八根立柱20,立柱20包括第一立柱21和第二立柱22,第二立柱22与第一立柱21相错设置,两个第二立柱22位于第一立柱21的外侧,两个第二立柱22位于第一立柱21的内侧。立柱20上设有若干卡齿,卡齿包括安装于第一立柱21上且固定设置的第一卡齿31、以及安装于第二立柱22上可切换位置的第二卡齿32,第一卡齿31和第二卡齿32在相邻的立柱上间隔分布。第一卡齿31和第二卡齿32之间形成有卡槽33,卡槽33用于承载硅片,硅片插入后承载与对应的第一卡齿31或第二卡齿32上。7a and 7b, the silicon wafer flower basket in this embodiment includes a first support plate 11 and a second support plate 12 arranged oppositely, and a Eight columns 20, the column 20 includes a first column 21 and a second column 22, the second column 22 is staggered with the first column 21, the two second columns 22 are located outside the first column 21, and the two second columns 22 is located inside the first column 21 . The upright column 20 is provided with a plurality of latching teeth. The latching teeth include a first latching tooth 31 mounted on the first upright post 21 and fixedly arranged, and a second latching tooth 32 mounted on the second upright post 22 and switchable. The teeth 31 and the second locking teeth 32 are distributed at intervals on the adjacent columns. A slot 33 is formed between the first tooth 31 and the second tooth 32 . The slot 33 is used to carry the silicon wafer, and the silicon wafer is inserted and carried on the corresponding first tooth 31 or the second tooth 32 .

本实施例中的第一立柱21和第二立柱22相错设置,可保证承载硅片的四个卡齿围设的面积相当,进一步提高了硅片承载的稳定性。In this embodiment, the first column 21 and the second column 22 are arranged in a staggered manner, which can ensure that the area surrounded by the four clamping teeth for carrying the silicon wafer is equal, and further improves the stability of the silicon wafer bearing.

本实施例中第二立柱22带动第二卡齿32可以进行水平伸缩运动和竖直升降运动,第二立柱22可通过控制机构和驱动机构实现第二卡齿32的水平伸缩运动及竖直升降运动,驱动机构可包括驱动电机等。具体的控制方式与实施例5完全相同,此处不再进行赘述。In this embodiment, the second column 22 drives the second teeth 32 to perform horizontal telescopic movement and vertical lifting movement, and the second column 22 can realize the horizontal telescopic movement and vertical lifting of the second teeth 32 through the control mechanism and the driving mechanism Movement, the drive mechanism may include a drive motor and the like. The specific control mode is exactly the same as that of Embodiment 5, and will not be repeated here.

实施例8:Example 8:

本实施例中公开了一种硅片花篮的控制器,控制器用于控制第二卡齿位置的变化,以实现第二卡齿上承载的硅片竖直方向上的位置跟随第二卡齿位置的变化而变化。This embodiment discloses a controller for a silicon wafer flower basket. The controller is used to control the change of the position of the second clamping teeth, so that the vertical position of the silicon wafer carried on the second clamping teeth follows the position of the second clamping teeth. changes with the change.

优选地,本实施例中的控制器可以为一个遥控装置,遥控装置通过无线控制的方式对第二卡齿的位置变化进行控制,第二卡齿的位置变化可以为上述提及的任何方式,此处不再一一举例进行说明。Preferably, the controller in this embodiment can be a remote control device, and the remote control device controls the position change of the second tooth by means of wireless control, and the position change of the second tooth can be any of the methods mentioned above, Here, the examples are not described one by one.

当然,在其他实施例中,遥控装置也可以通过有线控制的方式对硅片花篮中第二卡齿的位置变化进行控制。Certainly, in other embodiments, the remote control device can also control the position change of the second tooth in the silicon wafer flower basket by means of wired control.

本实施例中的控制器可以实现硅片花篮的自动化控制,控制方法简单,可实现工业自动化生产。The controller in this embodiment can realize the automatic control of the silicon wafer flower basket, the control method is simple, and the industrial automatic production can be realized.

应当理解的是,本发明的图2c、3b、4b、5b、6b仅为各具体实施例中硅片花篮中硅片合片的原理示意图,在实际硅片制绒等工艺中,通过卡齿的位置变化能够将上下两片硅片相互贴合,硅片之间形成水膜,从而实现硅片的单面制绒,凡是通过卡齿位置变化控制硅片上下移动的技术方案均属于本发明所保护的范围。It should be understood that Figures 2c, 3b, 4b, 5b, and 6b of the present invention are only schematic diagrams of the principle of the silicon wafers in the silicon wafer flower basket in each specific embodiment. The position change can make the upper and lower silicon wafers stick to each other, and a water film is formed between the silicon wafers, so as to realize the single-sided texturing of the silicon wafers. the scope of protection.

由以上技术方案可以看出,与现有技术相比,本发明具有如下有益效果:As can be seen from the above technical solutions, compared with the prior art, the present invention has the following beneficial effects:

硅片花篮结构简单,能够通过卡齿的位置变化实现硅片的位置变化,从而实现硅片的合片及分片功能;The silicon wafer flower basket has a simple structure, and can realize the position change of the silicon wafer through the change of the position of the clamping teeth, thereby realizing the functions of combining and dividing the silicon wafer;

能够用于晶硅电池片的单面制绒,大幅提高了产能,降低了生产成本。It can be used for single-sided texturing of crystalline silicon cells, which greatly increases production capacity and reduces production costs.

对于本领域技术人员而言,显然本发明不限于上述示范性实施例的细节,而且在不背离本发明的精神或基本特征的情况下,能够以其他的具体形式实现本发明。因此,无论从哪一点来看,均应将实施例看作是示范性的,而且是非限制性的,本发明的范围由所附权利要求而不是上述说明限定,因此旨在将落在权利要求的等同要件的含义和范围内的所有变化囊括在本发明内。不应将权利要求中的任何附图标记视为限制所涉及的权利要求。It will be apparent to those skilled in the art that the present invention is not limited to the details of the above-described exemplary embodiments, but that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments are to be regarded in all respects as illustrative and not restrictive, and the scope of the invention is to be defined by the appended claims rather than the foregoing description, which are therefore intended to fall within the scope of the claims. All changes within the meaning and scope of the equivalents of , are included in the present invention. Any reference signs in the claims shall not be construed as limiting the involved claim.

此外,应当理解,虽然本说明书按照实施方式加以描述,但并非每个实施方式仅包含一个独立的技术方案,说明书的这种叙述方式仅仅是为清楚起见,本领域技术人员应当将说明书作为一个整体,各实施例中的技术方案也可以经适当组合,形成本领域技术人员可以理解的其他实施方式。In addition, it should be understood that although this specification is described in terms of embodiments, not each embodiment only includes an independent technical solution, and this description in the specification is only for the sake of clarity, and those skilled in the art should take the specification as a whole , the technical solutions in each embodiment can also be appropriately combined to form other implementations that can be understood by those skilled in the art.

Claims (10)

1. A silicon wafer basket of flowers comprises a first supporting plate and a second supporting plate which are arranged oppositely, and a plurality of stand columns which are arranged between the first supporting plate and the second supporting plate, wherein a plurality of clamping teeth are arranged on the stand columns;
the change of the position of the second latch comprises at least one of horizontal telescopic motion, plane rotation motion and vertical lifting motion of the second latch;
the silicon wafer basket of flowers still includes:
the driving mechanism is used for realizing at least one of horizontal telescopic motion, plane rotation motion and vertical lifting motion of the second latch;
and the control mechanism is used for controlling at least one of the distance of the horizontal telescopic motion, the angle of plane rotation and the distance of vertical lifting motion of the second latch.
2. The silicon wafer basket according to claim 1, wherein the first latch and the second latch are spaced apart from each other on the post.
3. The silicon wafer basket according to claim 1, wherein the posts comprise a first post and a second post, the first latch being mounted on the first post and the second latch being mounted on the second post.
4. The silicon wafer basket according to claim 3, wherein the second vertical post is mounted inside and/or outside the first vertical post.
5. The silicon wafer basket according to claim 1, wherein the second latch comprises a first end disposed on the post and a second end distal from the post, and wherein the second latch has a thickness that decreases from the first end to the second end.
6. The silicon wafer basket according to claim 5, wherein the height of the upper surface of the second latch decreases from the first end to the second end.
7. The silicon wafer basket according to claim 6, wherein the height of the lower surface of the second latch gradually increases from the first end to the second end.
8. The silicon wafer basket according to claim 6, wherein the lower surface of the second latch is planar.
9. The controller for the silicon wafer basket according to any one of claims 1 to 8, wherein the controller is configured to control the change of the position of the second latch, so that the position of the silicon wafer carried on the second latch in the vertical direction changes along with the change of the position of the second latch.
10. The controller of claim 9, wherein the controller controls the change in the position of the second latch through wired or wireless control.
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CN111243998A (en) * 2020-03-13 2020-06-05 北京市塑料研究所 Wafer carrier to prevent wafer sticking

Citations (2)

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Publication number Priority date Publication date Assignee Title
CN1564730A (en) * 2001-08-07 2005-01-12 硅绝缘技术公司 Apparatus and method for splitting substrates
CN201017865Y (en) * 2006-12-30 2008-02-06 浙江昱辉阳光能源有限公司 Adjustable transfer fixture for carrying silicon wafers

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Publication number Priority date Publication date Assignee Title
JP3134922B2 (en) * 1996-12-25 2001-02-13 株式会社東京精密 Wafer fall prevention tool

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1564730A (en) * 2001-08-07 2005-01-12 硅绝缘技术公司 Apparatus and method for splitting substrates
CN201017865Y (en) * 2006-12-30 2008-02-06 浙江昱辉阳光能源有限公司 Adjustable transfer fixture for carrying silicon wafers

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