CN108508539B - Silicon-based wavelength division multiplexer based on tapered asymmetric directional coupler - Google Patents
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Abstract
本发明公开一种基于锥形非对称定向耦合器的硅基波分复用器，包括：(n+1)个输入波导、多个弯曲波导、n个不同宽度的锥形波导以及n个锥形连接器；第一个输入波导通过第一个锥形连接器与第一个锥形波导的一端相连接，第k个锥形波导的另一端通过第k+1个锥形连接器与第k+1个锥形波导的一端相连接；第i个输入波导通过至少一个弯曲波导耦合至第i‑1个锥形波导组成第i‑1个锥形非对称定向耦合器，第i‑1个锥形非对称定向耦合器用于将第i个输入波导输入的光信号转换成对应的高阶模式并耦合到总线波导进行传输，其中，每个锥形非对称定向耦合器对应的高阶模式不同；本发明可以实现(n+1)个不同波长的复用。
The invention discloses a silicon-based wavelength division multiplexer based on a tapered asymmetric directional coupler, comprising: (n+1) input waveguides, a plurality of curved waveguides, n tapered waveguides with different widths, and n tapered waveguides shaped connector; the first input waveguide is connected to one end of the first tapered waveguide through the first tapered connector, and the other end of the kth tapered waveguide is connected to the kth tapered waveguide through the k+1th tapered connector. One end of k+1 tapered waveguides is connected; the i-th input waveguide is coupled to the i-1th tapered waveguide through at least one curved waveguide to form the i-1th tapered asymmetric directional coupler, the i-1th A tapered asymmetric directional coupler is used to convert the optical signal input by the i-th input waveguide into a corresponding high-order mode and couple it to the bus waveguide for transmission, wherein each tapered asymmetric directional coupler corresponds to a high-order mode Different; the present invention can realize multiplexing of (n+1) different wavelengths.
Description
技术领域technical field
本发明涉及集成光学技术领域，更具体地，涉及一种基于锥形非对称定向耦合器的硅基波分复用器。The invention relates to the technical field of integrated optics, in particular to a silicon-based wavelength division multiplexer based on a tapered asymmetric directional coupler.
背景技术Background technique
片上光互连复用技术具有很多独特的地方，相关方面的研究也已经成为领域的热点。对于多通道复用光互连系统而言，片上集成(解)复用器是其中关键的器件之一。波分复用(WDM)是光纤通信系统中常用的技术，用以增加总传输带宽。The on-chip optical interconnect multiplexing technology has many unique features, and related research has become a hot spot in the field. For multi-channel multiplexing optical interconnection system, on-chip integrated (de)multiplexer is one of the key devices. Wavelength Division Multiplexing (WDM) is a technique commonly used in optical fiber communication systems to increase the overall transmission bandwidth.
现有技术中实现波分复用的器件主要有阵列波导光栅(AWG)、刻蚀衍射光栅(EDG)、微环谐振器(MRR)、马赫—曾德尔干涉仪(MZI)、多模干涉耦合器(MMI)等。传统的波分复用器，如阵列波导光栅和刻蚀衍射光栅，器件尺寸和插入损耗都比较大，不易于和其他器件进行片上集成；而基于微环谐振器、马赫-曾德尔干涉仪和多模干涉耦合器的波分复用器，虽然尺寸较阵列波导光栅和刻蚀衍射光栅来说尺寸较小，但依然不能满足片上集成对器件小尺寸的要求，而且在波长通道扩展和设计灵活性方面还有待提高。The devices that realize wavelength division multiplexing in the prior art mainly include arrayed waveguide grating (AWG), etched diffraction grating (EDG), microring resonator (MRR), Mach-Zehnder interferometer (MZI), multimode interference coupling device (MMI), etc. Traditional wavelength division multiplexers, such as arrayed waveguide gratings and etched diffraction gratings, have relatively large device size and insertion loss, and are not easy to integrate with other devices on-chip; while microring resonators, Mach-Zehnder interferometers and Although the wavelength division multiplexer of the multimode interference coupler is smaller than the arrayed waveguide grating and the etched diffraction grating, it still cannot meet the requirements of on-chip integration for the small size of the device, and it is flexible in wavelength channel expansion and design There is still room for improvement.
发明内容Contents of the invention
针对现有技术的缺陷，本发明提供了一种基于锥形非对称定向耦合器的硅基波分复用器，其目的是在小尺寸的波导结构上实现不同波长的复用，解决片上波导尺寸大，制作容差小，不易于扩展的技术问题。Aiming at the defects of the prior art, the present invention provides a silicon-based wavelength division multiplexer based on a tapered asymmetric directional coupler. Large size, small manufacturing tolerances, technical problems that are not easy to expand.
为实现上述目的，本发明提供一种基于锥形非对称定向耦合器的硅基波分复用器，包括：(n+1)个输入波导、多个弯曲波导、n个不同宽度的锥形波导以及n个锥形连接器；To achieve the above object, the present invention provides a silicon-based wavelength division multiplexer based on a tapered asymmetric directional coupler, including: (n+1) input waveguides, a plurality of curved waveguides, n tapered waveguides of different widths a waveguide and n tapered connectors;
第一个输入波导通过第一个锥形连接器与第一个锥形波导的一端相连接，第k个锥形波导的另一端通过第k+1个锥形连接器与第k+1个锥形波导的一端相连接，1≤k≤n-1；n个锥形波导的宽度依次递增，所述第一个输入波导、n个锥形波导以及n个锥形连接器连接的结构组成总线波导；第i个输入波导通过至少一个弯曲波导耦合至第i-1个锥形波导组成第i-1个锥形非对称定向耦合器，所述第i-1个锥形非对称定向耦合器用于将第i个输入波导输入的光信号转换成对应的高阶模式并耦合到所述总线波导进行传输，其中，每个锥形非对称定向耦合器对应的高阶模式不同，2≤i≤n+1；The first input waveguide is connected to one end of the first tapered waveguide through the first tapered connector, and the other end of the kth tapered waveguide is connected to the k+1th tapered waveguide through the k+1th tapered connector. One end of the tapered waveguide is connected, 1≤k≤n-1; the width of n tapered waveguides increases sequentially, and the first input waveguide, n tapered waveguides and n tapered connectors are connected to each other Bus waveguide; the i-th input waveguide is coupled to the i-1th tapered waveguide through at least one curved waveguide to form the i-1th tapered asymmetric directional coupler, and the i-1th tapered asymmetric directional coupling The device is used to convert the optical signal input by the i-th input waveguide into the corresponding high-order mode and couple it to the bus waveguide for transmission, wherein the high-order mode corresponding to each tapered asymmetric directional coupler is different, 2≤i ≤n+1;
所述(n+1)个输入波导分别传输(n+1)个不同波长的光信号，(n+1)个输入波导、多个弯曲波导、n个不同宽度的锥形波导以及n个锥形连接器均置于硅基底，所述基于锥形非对称定向耦合器的硅基波分复用器可以实现(n+1)个不同波长的复用。The (n+1) input waveguides respectively transmit (n+1) optical signals of different wavelengths, the (n+1) input waveguides, multiple curved waveguides, n tapered waveguides of different widths, and n tapered waveguides The shaped connectors are all placed on the silicon base, and the silicon-based wavelength division multiplexer based on the tapered asymmetric directional coupler can realize multiplexing of (n+1) different wavelengths.
可选地，设n个锥形波导的首尾宽度依次为w1a和w1b，w2a和w2b，w3a和w3b，…，wna和wnb，n个锥形波导耦合区域的中点宽度依次为w1，w2，w3…wn；Optionally, it is assumed that the head-to-tail widths of n tapered waveguides are w 1a and w 1b , w 2a and w 2b , w 3a and w 3b , ..., w na and w nb , and the middle of the n tapered waveguide coupling regions The point widths are w 1 , w 2 , w 3 ...w n in turn;
第n个锥形波导的宽度通过第n个波长λn的相位匹配条件和制作容差Δwn确定，输入波导对应的基模TE0和第n个锥形波导耦合区域中点wn的相应高阶模TEn满足相位匹配条件；The width of the n-th tapered waveguide is determined by the phase matching condition of the n-th wavelength λ n and the manufacturing tolerance Δw n , the corresponding fundamental mode TE 0 of the input waveguide and the corresponding of the midpoint w n of the coupling region of the n-th tapered waveguide The higher-order mode TE n satisfies the phase matching condition;
第n个锥形波导首端宽度wna和输入波导宽度w-Δwn、尾端宽度wnb和输入波导宽度w+Δwn分别满足相位匹配条件，Δwn通过平衡耦合效率和耦合长度二者之间的关系确定，其中，w为输入波导支持基模的宽度。The nth tapered waveguide head end width w na , input waveguide width w-Δw n , tail end width w nb , and input waveguide width w+Δw n meet the phase matching conditions respectively, and Δw n balances the coupling efficiency and coupling length The relationship between is determined, where w is the width of the input waveguide supporting the fundamental mode.
可选地，所述n个锥形非对称定向耦合器的耦合部分的长度依次为L1，L2，L3…Ln，该长度通过模式干涉理论确定，是使耦合效率达到最大的最佳耦合长度。Optionally, the lengths of the coupling parts of the n tapered asymmetric directional couplers are L 1 , L 2 , L 3 . Optimal coupling length.
可选地，第i个输入波导与第i-1个锥形波导的间距为150nm～300nm；在满足工艺制作条件的前提下，该间距有利于光从输入波导到总线波导的耦合，并尽量保证相对较短的耦合长度。Optionally, the distance between the i-th input waveguide and the i-1-th tapered waveguide is 150nm-300nm; under the premise of meeting the manufacturing conditions, this distance is conducive to the coupling of light from the input waveguide to the bus waveguide, and as far as possible A relatively short coupling length is guaranteed.
可选地，所述(n+1)个输入波导横截面的宽度取值范围为0.4μm～0.5μm，以满足单模条件，使得波导中的光场只存在基模，有利于光从输入波导到总线波导耦合时模式的转换，有利于基于锥形非对称定向耦合器的硅基波分复用器与其之外的波导器件进行片上集成。Optionally, the width of the (n+1) input waveguide cross-sections ranges from 0.4 μm to 0.5 μm, so as to satisfy the single-mode condition, so that only the fundamental mode exists in the optical field in the waveguide, which is beneficial for light from the input The mode conversion during waveguide-to-bus waveguide coupling facilitates the on-chip integration of a tapered asymmetric directional coupler-based silicon-based wavelength division multiplexer with other waveguide devices.
总体而言，通过本发明所构思的以上技术方案与现有技术相比，具有以下有益效果：Generally speaking, compared with the prior art, the above technical solution conceived by the present invention has the following beneficial effects:
(1)本发明提供的一种基于锥形非对称定向耦合器的硅基波分复用器，其各个波长信号以基模的形式注入输入波导，通过锥形非对称定向耦合器分别转换成相对应的高阶模式并耦合到总线波导，以此实现(n+1)个波长的复用；由于满足相位匹配条件，理论上可实现最大耦合效率为1的完全耦合，即可以满足波分复用器低插入损耗、小的串扰的要求，保证器件的性能；各个锥形非对称定向耦合器之间通过锥形连接器相连，实现光在总线波导几乎无损耗的传输；输入波导和锥形波导平行耦合，易于和其他的有源或无源波导器件进行片上集成。(1) A silicon-based wavelength division multiplexer based on a tapered asymmetric directional coupler provided by the present invention, each wavelength signal is injected into the input waveguide in the form of a fundamental mode, and is respectively converted into The corresponding high-order mode is coupled to the bus waveguide to realize the multiplexing of (n+1) wavelengths; due to the phase matching condition, it can theoretically achieve complete coupling with a maximum coupling efficiency of 1, which can meet the wavelength division The multiplexer requires low insertion loss and small crosstalk to ensure the performance of the device; each tapered asymmetric directional coupler is connected by a tapered connector to realize almost lossless transmission of light in the bus waveguide; the input waveguide and the tapered The waveguide parallel coupling is easy to integrate on-chip with other active or passive waveguide devices.
(2)本发明提供的一种基于锥形非对称定向耦合器的硅基波分复用器，较基于常规非对称定向耦合器的硅基波分复用器件具有更大的制作容差；通过相位匹配条件和模式干涉理论可以设计(n+1)个通道，即实现(n+1)个波长的复用，保证了设计的灵活性和可扩展性。(2) A silicon-based wavelength division multiplexer based on a tapered asymmetric directional coupler provided by the present invention has a larger manufacturing tolerance than a silicon-based wavelength division multiplexer based on a conventional asymmetric directional coupler; (n+1) channels can be designed through phase matching conditions and mode interference theory, that is, the multiplexing of (n+1) wavelengths can be realized, which ensures the flexibility and scalability of the design.
附图说明Description of drawings
图1为本发明提供的基于锥形非对称定向耦合器的硅基波分复用器的结构示意图；Fig. 1 is the structural representation of the silicon-based wavelength division multiplexer based on tapered asymmetric directional coupler provided by the present invention;
图2为本发明提供的基于锥形非对称定向耦合器的硅基波分复用器的横截面示意图；Fig. 2 is a schematic cross-sectional view of a silicon-based wavelength division multiplexer based on a tapered asymmetric directional coupler provided by the present invention;
图3为本发明实施例提供的基于锥形非对称定向耦合器的四波长硅基波分复用器的结构示意图；3 is a schematic structural diagram of a four-wavelength silicon-based wavelength division multiplexer based on a tapered asymmetric directional coupler provided by an embodiment of the present invention;
图4为本发明实施例提供的基于锥形非对称定向耦合器的四波长硅基波分复用器在波长λ1下TE1和TE0的有效折射率随波导宽度变化的关系图；Fig. 4 is the relationship diagram of the effective refractive index of TE 1 and TE 0 changing with the waveguide width under the wavelength λ 1 of the four-wavelength silicon-based wavelength division multiplexer based on the tapered asymmetric directional coupler provided by the embodiment of the present invention;
图5为本发明实施例提供的基于锥形非对称定向耦合器的四波长硅基波分复用器在波长λ0下仿真得到的光场传输图；Fig. 5 is the optical field transmission diagram that the four-wavelength silicon-based wavelength division multiplexer based on the tapered asymmetric directional coupler is simulated under the wavelength λ 0 provided by the embodiment of the present invention;
图6为本发明实施例提供的基于锥形非对称定向耦合器的四波长硅基波分复用器在波长λ1下仿真得到的光场传输图；Fig. 6 is the optical field transmission diagram that the four-wavelength silicon-based wavelength division multiplexer based on the tapered asymmetric directional coupler is simulated under the wavelength λ 1 provided by the embodiment of the present invention;
图7为本发明实施例提供的基于锥形非对称定向耦合器的四波长硅基波分复用器在波长λ2下仿真得到的光场传输图；Fig. 7 is the optical field transmission diagram that the four-wavelength silicon-based wavelength division multiplexer based on the tapered asymmetric directional coupler is simulated under the wavelength λ 2 provided by the embodiment of the present invention;
图8为本发明实施例提供的基于锥形非对称定向耦合器的四波长硅基波分复用器在波长λ3下仿真得到的光场传输图；Fig. 8 is the optical field transmission diagram obtained by simulation at wavelength λ 3 of the four-wavelength silicon-based wavelength division multiplexer based on the tapered asymmetric directional coupler provided by the embodiment of the present invention;
图9为本发明实施例提供的基于锥形非对称定向耦合器的四波长硅基波分复用器件在四波长复用下仿真得到的光场传输图；FIG. 9 is an optical field transmission diagram obtained by simulation under four-wavelength multiplexing of a four-wavelength silicon-based wavelength division multiplexing device based on a tapered asymmetric directional coupler provided by an embodiment of the present invention;
图10为本发明实施例提供的基于锥形非对称定向耦合器的四波长硅基波分复用器仿真得到的插入损耗随输入波导宽度变化的关系图；FIG. 10 is a graph showing the relationship between the insertion loss and the variation of the input waveguide width obtained by simulation of the four-wavelength silicon-based wavelength division multiplexer based on the tapered asymmetric directional coupler provided by the embodiment of the present invention;
图11为本发明实施例提供的基于锥形非对称定向耦合器的四波长硅基波分复用器的实验结果图；Fig. 11 is an experimental result diagram of a four-wavelength silicon-based wavelength division multiplexer based on a tapered asymmetric directional coupler provided by an embodiment of the present invention;
在所有附图中，相同的附图标记用来表示相同的元件或结构，其中：1为弯曲波导、2为锥形连接器、w为输入波导支持基模的宽度、wn为锥形波导中点宽度、wna为第n个锥形波导首端宽度、wnb为第n个锥形波导尾端宽度、第n+1个输入波导与第n个锥形波导的耦合长度为Ln、输入波导和锥形波导的间距为gap，λn为第n个锥形波导传输的光信号波长。In all the drawings, the same reference numerals are used to denote the same elements or structures, where: 1 is a curved waveguide, 2 is a tapered connector, w is the width of the input waveguide supporting the fundamental mode, w n is a tapered waveguide Midpoint width, w na is the width of the nth tapered waveguide head end, w nb is the tail end width of the nth tapered waveguide, the coupling length between the n+1th input waveguide and the nth tapered waveguide is L n , the distance between the input waveguide and the tapered waveguide is gap, and λ n is the wavelength of the optical signal transmitted by the nth tapered waveguide.
具体实施方式Detailed ways
为了使本发明的目的、技术方案及优点更加清楚明白，以下结合附图及实施例，对本发明进行进一步详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。此外，下面所描述的本发明各个实施方式中所涉及到的技术特征只要彼此之间未构成冲突就可以相互组合。In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.
按照本发明的一个方面，提供了一种基于锥形非对称定向耦合器的硅基波分复用器，包括(n+1)个输入波导，n个不同宽度的锥形波导和输入波导共同组成的锥形非对称定向耦合器，n个锥形连接器；According to one aspect of the present invention, a silicon-based wavelength division multiplexer based on a tapered asymmetric directional coupler is provided, including (n+1) input waveguides, n tapered waveguides with different widths and the input waveguide common A tapered asymmetric directional coupler consisting of n tapered connectors;
其中，所有的波导结构都置于硅基衬底上；(n+1)个输入波导用于光信号的输入，锥形非对称定向耦合器用于将不同波长的光信号分别转换成对应的高阶模式并且耦合到总线波导进行传输，以实现(n+1)个波长的复用；锥形连接器用于连接不同宽度的锥形波导组成总线波导，以保证光信号几乎无损耗的在总线波导传输；输入波导和总线波导相距一定的距离；输入波导的宽度和与之对应的锥形波导的宽度通过相位匹配条件来确定，以实现不同波长的光在总线波导达到最佳耦合。本发明提供的基于锥形非对称定向耦合器的硅基波分复用器具有尺寸小、插入损耗低、串扰小、可扩展性、设计灵活性和工艺简单、制作成本相对低廉的优点。Among them, all waveguide structures are placed on the silicon substrate; (n+1) input waveguides are used for the input of optical signals, and tapered asymmetric directional couplers are used to convert optical signals of different wavelengths into corresponding high order mode and coupled to the bus waveguide for transmission to realize the multiplexing of (n+1) wavelengths; the tapered connector is used to connect tapered waveguides of different widths to form a bus waveguide to ensure that the optical signal is almost lossless in the bus waveguide Transmission; there is a certain distance between the input waveguide and the bus waveguide; the width of the input waveguide and the width of the corresponding tapered waveguide are determined by phase matching conditions to achieve optimal coupling of light of different wavelengths in the bus waveguide. The silicon-based wavelength division multiplexer based on the tapered asymmetric directional coupler provided by the invention has the advantages of small size, low insertion loss, small crosstalk, scalability, design flexibility, simple process and relatively low manufacturing cost.
优选的，基于锥形非对称定向耦合器的硅基波分复用器，上述(n+1)个输入波导横截面的宽度取值范围在0.4μm～0.5μm，以满足单模条件，使得波导中的光场只存在基模，有利于光从输入波导到总线波导耦合时模式的转换，有利于基于锥形非对称定向耦合器的硅基波分复用器与其它波导器件进行片上集成。Preferably, based on a silicon-based wavelength division multiplexer based on a tapered asymmetric directional coupler, the width of the above-mentioned (n+1) input waveguide cross-sections ranges from 0.4 μm to 0.5 μm to meet the single-mode condition, so that The optical field in the waveguide only has the fundamental mode, which is conducive to the mode conversion when the light is coupled from the input waveguide to the bus waveguide, and is conducive to the on-chip integration of silicon-based wavelength division multiplexers based on tapered asymmetric directional couplers and other waveguide devices .
优选的，基于锥形非对称定向耦合器的硅基波分复用器，上述输入波导和锥形波导之间的间距在150nm～300nm；在满足工艺制作条件的前提下，该间距有利于光从输入波导到总线波导的耦合，并尽量保证相对较短的耦合长度。Preferably, the silicon-based wavelength division multiplexer based on the tapered asymmetric directional coupler, the distance between the above-mentioned input waveguide and the tapered waveguide is 150nm-300nm; under the premise of satisfying the manufacturing conditions of the process, this distance is conducive to the optical Coupling from the input waveguide to the bus waveguide, and try to keep the coupling length relatively short.
优选的，基于锥形非对称定向耦合器的硅基波分复用器，上述n个非对称定向耦合器耦合区域为锥形波导，n个锥形波导的首尾宽度依次为w1a和w1b，w2a和w2b，w3a和w3b，…，wna和wnb，n个锥形波导耦合区域的中点宽度依次为w1，w2，w3…wn。锥形波导的宽度通过某一波长下(λn)相位匹配条件和制作容差Δwn确定；使得输入波导对应的基模TE0和锥形波导耦合区域中点wn的相应高阶模TEn满足相位匹配条件；锥形波导首端宽度wna和输入波导宽度w-Δwn、尾端宽度wnb和输入波导宽度w+Δwn分别满足相位匹配条件，Δwn通过平衡耦合效率和耦合长度二者之间的关系确定。Preferably, a silicon-based wavelength division multiplexer based on a tapered asymmetric directional coupler, the above-mentioned n asymmetric directional coupler coupling regions are tapered waveguides, and the head and tail widths of the n tapered waveguides are sequentially w 1a and w 1b , w 2a and w 2b , w 3a and w 3b , ..., w na and w nb , the midpoint widths of n tapered waveguide coupling regions are w 1 , w 2 , w 3 ... wn in turn. The width of the tapered waveguide is determined by the phase matching condition (λ n ) at a certain wavelength and the manufacturing tolerance Δw n ; so that the fundamental mode TE 0 corresponding to the input waveguide and the corresponding higher-order mode TE n of the midpoint w n of the coupling region of the tapered waveguide satisfy Phase matching condition; tapered waveguide head end width w na and input waveguide width w-Δw n , tail end width w nb and input waveguide width w+Δw n satisfy the phase matching condition respectively, and Δw n balances coupling efficiency and coupling length two The relationship between them is determined.
优选的，基于锥形非对称定向耦合器的硅基波分复用器，上述n个锥形非对称定向耦合器的耦合部分的长度依次为L1，L2，L3…Ln,该长度通过模式干涉理论确定，是使耦合效率达到最大的最佳耦合长度。Preferably, for a silicon-based wavelength division multiplexer based on tapered asymmetric directional couplers, the lengths of the coupling parts of the n tapered asymmetric directional couplers are L 1 , L 2 , L 3 ... L n in sequence, the The length is determined by mode interference theory and is the optimal coupling length to maximize the coupling efficiency.
优选的，上述基于锥形非对称定向耦合器的硅基波分复用器，衬底采用SOI基片。Preferably, the substrate of the silicon-based wavelength division multiplexer based on the tapered asymmetric directional coupler is an SOI substrate.
具体地，本发明所提供的基于锥形非对称定向耦合器的硅基波分复用器，其结构如图1所示意的，包括(n+1)个输入波导、弯曲波导1、锥形连接器2、n个锥形波导。Specifically, the silicon-based wavelength division multiplexer based on the tapered asymmetric directional coupler provided by the present invention has a structure as shown in Figure 1, including (n+1) input waveguides, curved waveguides 1, tapered Connector 2, n tapered waveguides.
第一个输入波导通过第一个锥形连接器与第一个锥形波导的一端相连接，第k个锥形波导的另一端通过第k+1个锥形连接器与第k+1个锥形波导的一端相连接，1≤k≤n-1；n个锥形波导的宽度依次递增，第一输入波导、n个锥形波导以及n个锥形连接器连接的结构组成总线波导；第i个输入波导通过至少一个弯曲波导耦合至第i-1个锥形波导组成第i-1个锥形非对称定向耦合器，所述第i-1个锥形非对称定向耦合器用于将第i个输入波导输入的光信号转换成对应的高阶模式并耦合到所述总线波导进行传输，其中，每个锥形非对称定向耦合器对应的高阶模式不同，2≤i≤n+1；The first input waveguide is connected to one end of the first tapered waveguide through the first tapered connector, and the other end of the kth tapered waveguide is connected to the k+1th tapered waveguide through the k+1th tapered connector. One end of the tapered waveguides is connected, 1≤k≤n-1; the width of the n tapered waveguides increases sequentially, and the first input waveguide, n tapered waveguides and n tapered connectors are connected to form a bus waveguide; The i-th input waveguide is coupled to the i-1th tapered waveguide through at least one curved waveguide to form the i-1th tapered asymmetric directional coupler, and the i-1th tapered asymmetric directional coupler is used to combine The optical signal input by the i-th input waveguide is converted into the corresponding high-order mode and coupled to the bus waveguide for transmission, wherein the high-order mode corresponding to each tapered asymmetric directional coupler is different, 2≤i≤n+ 1;
(n+1)个输入波导分别传输(n+1)个不同波长的光信号，(n+1)个输入波导、多个弯曲波导、n个不同宽度的锥形波导以及n个锥形连接器均置于硅基底，所述基于锥形非对称定向耦合器的硅基波分复用器可以实现(n+1)个不同波长的复用。(n+1) input waveguides respectively transmit (n+1) optical signals of different wavelengths, (n+1) input waveguides, multiple curved waveguides, n tapered waveguides of different widths and n tapered connections The devices are all placed on the silicon substrate, and the silicon-based wavelength division multiplexer based on the tapered asymmetric directional coupler can realize multiplexing of (n+1) different wavelengths.
其中，第n+1个输入波导与第n个锥形波导的耦合长度为Ln、第n个锥形波导中点宽度为wn、第n个锥形波导首尾宽度分别为wna和wnb、输入波导和锥形波导间距为gap。Among them, the coupling length between the n+1th input waveguide and the nth tapered waveguide is L n , the midpoint width of the nth tapered waveguide is w n , and the head and tail widths of the nth tapered waveguide are w na and w respectively nb , the distance between the input waveguide and the tapered waveguide is gap.
本发明中，对于基于锥形非对称定向耦合器的硅基波分复用器，(n+1)个输入波导选取宽度为0.4μm～0.5μm的单模波导，使得波导中只存在基模，有利于光从输入波导到总线波导耦合时进行模式的转换。输入波导和锥形波导之间的间距gap取值在150nm～300nm，在满足工艺制作条件的前提下，该间距有利于光从输入波导到总线波导的耦合，同时保证相对较短的耦合长度。弯曲波导1用于实现光的输入和输出。第一个输入波导的波长λ0以基模TE0的形式直接注入到总线波导，对于除波长λ0以外的输入波导传输的某一个特定波长λn，使得在该波长下输入波导支持的基模TE0和锥形波导耦合区域中点宽度wn对应的高阶模TEn满足相位匹配条件，即二者有效折射率相等；第n个锥形波导首端宽度为wna，尾端宽度为wnb，且首端宽度wna和输入波导宽度w-Δwn，尾端宽度wnb和输入波导宽度w-Δwn分别满足相位匹配条件。通过模式干涉理论确定耦合长度Ln，该长度是使耦合效率达到最大的最佳耦合长度。对于某一个特定的波长λn，输入波导与锥形波导相互耦合，光信号以基模的形式TE0从输入波导通过锥形波导转换为相对应的高阶模TEn，最后(n+1)个波长λ0，λ1，λ2，λ3…λn分别以TE0，TE1，TE2，TE3…TEn的模式在总线波导中共同传输，实现(n+1)个波长的复用。In the present invention, for a silicon-based wavelength division multiplexer based on a tapered asymmetric directional coupler, the (n+1) input waveguides select a single-mode waveguide with a width of 0.4 μm to 0.5 μm, so that only the fundamental mode exists in the waveguide , which facilitates mode conversion when light is coupled from the input waveguide to the bus waveguide. The gap between the input waveguide and the tapered waveguide ranges from 150nm to 300nm. Under the premise of meeting the manufacturing conditions, this gap is conducive to the coupling of light from the input waveguide to the bus waveguide, while ensuring a relatively short coupling length. The curved waveguide 1 is used to realize the input and output of light. The wavelength λ 0 of the first input waveguide is directly injected into the bus waveguide in the form of the fundamental mode TE 0 , for a specific wavelength λ n transmitted by the input waveguides other than the wavelength λ 0 , the fundamental mode supported by the input waveguide at this wavelength The mode TE 0 and the higher-order mode TE n corresponding to the midpoint width w n of the tapered waveguide coupling region meet the phase matching condition, that is, the two effective refractive indices are equal; the width of the nth tapered waveguide at the head end is w na , and the width at the end is w nb , and the head-end width w na and the input waveguide width w-Δwn , the tail - end width w nb and the input waveguide width w-Δw n satisfy the phase matching condition respectively. The coupling length L n is determined by mode interference theory, which is the optimal coupling length to maximize the coupling efficiency. For a specific wavelength λ n , the input waveguide and the tapered waveguide are coupled to each other, and the optical signal is converted from the input waveguide to the corresponding high-order mode TE n in the form of fundamental mode TE 0 through the tapered waveguide, and finally (n+1) The wavelengths λ 0 , λ 1 , λ 2 , λ 3 ... λ n are respectively transmitted in the bus waveguide in the mode of TE 0 , TE 1 , TE 2 , TE 3 ... TE n to realize the multiplexing of (n+1) wavelengths. use.
图2所示，是本发明所提供的基于锥形非对称定向耦合器的硅基波分复用器的横截面示意图，上下包层都为二氧化硅，芯层为硅。Figure 2 is a schematic cross-sectional view of a silicon-based wavelength division multiplexer based on a tapered asymmetric directional coupler provided by the present invention, the upper and lower cladding layers are made of silicon dioxide, and the core layer is made of silicon.
图3为本发明提供的基于锥形非对称定向耦合器的硅基波分复用器以四波长复用为实施例的结构示意图。本实施例中，选用基于SOI的硅纳米线波导，其下包层材料为SiO2,厚度为2μm；芯层材料为Si，厚度为220nm；上包层材料为SiO2，厚度为1μm；(n+1)个输入波导w取宽度为0.4μm以满足单模条件；输入波导和锥形波导之间的间距gap为200nm；四波长分别为λ0＝1550nm，λ1＝1549.2nm，λ2＝1548.4nm，λ3＝1547.6nm。由于波长λ0以基模TE0的形式直接注入到总线波导，所以这里以λ1为例来说明具体的设计过程。对于波长λ1，使得输入波导支持的基模TE0和锥形波导中点宽度w1相对应的高阶模TE1满足相位匹配条件，即二者有效折射率相等；锥形波导首端宽度w1a和输入波导宽度w-Δw1、尾端宽度w1b和输入波导宽度w+Δw1分别满足相位匹配条件。FIG. 3 is a schematic structural diagram of a silicon-based wavelength division multiplexer based on a tapered asymmetric directional coupler provided by the present invention, taking four wavelength multiplexing as an embodiment. In this embodiment, an SOI-based silicon nanowire waveguide is selected, the lower cladding material is SiO 2 with a thickness of 2 μm; the core material is Si with a thickness of 220 nm; the upper cladding material is SiO 2 with a thickness of 1 μm; ( The n+1) input waveguides w have a width of 0.4 μm to meet the single-mode condition; the gap between the input waveguide and the tapered waveguide is 200nm; the four wavelengths are respectively λ 0 =1550nm, λ 1 =1549.2nm, λ 2 =1548.4nm, λ 3 =1547.6nm. Since the wavelength λ 0 is directly injected into the bus waveguide in the form of the fundamental mode TE 0 , here we take λ 1 as an example to illustrate the specific design process. For the wavelength λ 1 , the fundamental mode TE 0 supported by the input waveguide and the high-order mode TE 1 corresponding to the midpoint width w 1 of the tapered waveguide meet the phase matching condition, that is, the effective refractive index of the two is equal; the width of the tapered waveguide head end w 1a and the input waveguide width w-Δw 1 , the tail end width w 1b and the input waveguide width w+Δw 1 respectively satisfy the phase matching condition.
图4是本发明实施例所提供的基于锥形非对称定向耦合器的四波长硅基波分复用器在波长为λ1时，一阶模式TE1和基模TE0的有效折射率随波导宽度变化的关系图；由此得出锥形波导的中点宽度w1为0.835μm，首尾宽度w1a和w1b分别为0.795μm和0.875μm。根据模式干涉理论计算得出耦合长度，利用仿真软件3D FDTD建模仿真得到优化的耦合长度L1为20μm；同理得出对应波长λ2，锥形波导宽度w2a、w2和w2b分别为1.21μm、1.27μm和1.33μm，优化的耦合长度L2为23.4μm；对应波长λ3，锥形波导宽度w3a、w3和w3b分别为1.62μm、1.71μm和1.8μm，优化的耦合长度L3为27μm。相比现有的波分复用器，本发明实施例所提供的基于锥形非对称定向耦合器的四波长硅基波分复用器具有较小的尺寸(约为8μm×125μm)，较高的设计灵活性和可扩展性。Fig. 4 is the four-wavelength silicon-based wavelength division multiplexer based on the tapered asymmetric directional coupler provided by the embodiment of the present invention, when the wavelength is λ 1 , the effective refractive index of the first-order mode TE 1 and the fundamental mode TE 0 varies with each other. The relationship diagram of waveguide width variation; from this, it can be concluded that the midpoint width w 1 of the tapered waveguide is 0.835 μm, and the head and tail widths w 1a and w 1b are 0.795 μm and 0.875 μm, respectively. The coupling length is calculated according to the mode interference theory, and the optimized coupling length L 1 is 20 μm obtained by using the simulation software 3D FDTD modeling simulation; similarly, the corresponding wavelength λ 2 is obtained, and the tapered waveguide widths w 2a , w 2 and w 2b are respectively are 1.21μm, 1.27μm and 1.33μm, and the optimized coupling length L 2 is 23.4μm; corresponding to the wavelength λ 3 , the tapered waveguide widths w 3a , w 3 and w 3b are 1.62μm, 1.71μm and 1.8μm respectively, and the optimized The coupling length L 3 is 27 μm. Compared with the existing wavelength division multiplexer, the four-wavelength silicon-based wavelength division multiplexer based on the tapered asymmetric directional coupler provided by the embodiment of the present invention has a smaller size (about 8 μm × 125 μm), compared with High design flexibility and scalability.
图5是由实施例提供的基于锥形非对称定向耦合器的四波长硅基波分复用器在波长λ0下仿真得到的光场传输图，由该图可知，波长λ0以TE0模式注入到总线波导并几乎无损耗的传输。Fig. 5 is the optical field transmission diagram obtained by simulation at wavelength λ 0 of the four-wavelength silicon-based wavelength division multiplexer based on the tapered asymmetric directional coupler provided by the embodiment. It can be seen from this figure that the wavelength λ 0 is equal to TE 0 Modes are injected into the bus waveguide and transmitted almost losslessly.
图6是由实施例提供的基于锥形非对称定向耦合器的四波长硅基波分复用器在波长λ1下仿真得到的光场传输图，由该图可知，波长λ1以转换得到的TE1模式在总线波导几乎无损耗的传输。Fig. 6 is the optical field transmission diagram that the four-wavelength silicon-based wavelength division multiplexer based on the tapered asymmetric directional coupler provided by the embodiment simulates at the wavelength λ 1 , and it can be seen from this figure that the wavelength λ 1 can be obtained by conversion The TE 1 mode has almost lossless transmission in the bus waveguide.
图7是由实施例提供的基于锥形非对称定向耦合器的四波长硅基波分复用器在波长λ2下仿真得到的光场传输图，由该图可知，波长λ2以转换得到的TE2模式在总线波导几乎无损耗的传输。Fig. 7 is the optical field transmission diagram that the four-wavelength silicon-based wavelength division multiplexer based on the tapered asymmetric directional coupler provided by the embodiment simulates at the wavelength λ 2 , and it can be known from this figure that the wavelength λ 2 can be obtained by conversion The TE 2 mode has almost lossless transmission in the bus waveguide.
图8是由实施例提供的基于锥形非对称定向耦合器的四波长硅基波分复用器在波长λ3下仿真得到的光场传输图，由该图可知，波长λ3以转换得到的TE3模式在总线波导几乎无损耗的传输。Fig. 8 is the optical field transmission diagram obtained by simulation at wavelength λ 3 of the four-wavelength silicon-based wavelength division multiplexer based on the tapered asymmetric directional coupler provided by the embodiment, as can be seen from this figure, the wavelength λ 3 can be obtained by conversion The TE 3 mode has almost lossless transmission in the bus waveguide.
图9是由实施例提供的基于锥形非对称定向耦合器的四波长硅基波分复用器在四个波长(λ0、λ1、λ2、λ3)同时注入即四波长复用下仿真得到的光场传输图，由该图可知，四个波长的光以相对应转换得到的模式进行复用后，被很好的限制在总线波导中共同传输。Fig. 9 is a four-wavelength silicon-based wavelength division multiplexer based on a tapered asymmetric directional coupler provided by an embodiment. Simultaneous injection at four wavelengths (λ 0 , λ 1 , λ 2 , λ 3 ) is four-wavelength multiplexing. The optical field transmission diagram obtained by the simulation is shown below. It can be seen from the diagram that after the light of the four wavelengths is multiplexed in the corresponding converted mode, it is well restricted for common transmission in the bus waveguide.
综上可知，基于本发明实施例提供的锥形非对称定向耦合器的四波长硅基波分复用器，在比较小的尺寸下能实现四个波长的复用，并保证四波长复用的光场几乎无损耗的在总线波导进行传输，同时具有很好的设计灵活性和可扩展性。In summary, the four-wavelength silicon-based wavelength division multiplexer based on the tapered asymmetric directional coupler provided by the embodiment of the present invention can realize four-wavelength multiplexing in a relatively small size and guarantee four-wavelength multiplexing The optical field is transmitted in the bus waveguide almost without loss, and has good design flexibility and scalability.
可以理解的是，若将输入波长扩展为n+1个，则本发明提供的锥形非对称定向耦合器的硅基波分复用器，同样可以在比较小的尺寸下实现n+1个波长的复用，并保证n+1个波长复用的光场几乎无损耗的在总线波导进行传输，同时具有很好的设计灵活性和可扩展性。It can be understood that if the input wavelength is expanded to n+1, the silicon-based wavelength division multiplexer of the tapered asymmetric directional coupler provided by the present invention can also realize n+1 wavelength division multiplexers in a relatively small size. Multiplexing of wavelengths, and ensuring that n+1 wavelength multiplexed optical fields are transmitted in the bus waveguide almost without loss, and have good design flexibility and scalability.
图10所示，是由实施例提供的基于锥形非对称定向耦合器的四波长硅基波分复用器仿真得到的，插入损耗随输入波导宽度变化的关系图，从上述附图中可以分析，对某一波长通道，基于锥形非对称定向耦合器的四波长硅基波分复用器在Δw为±5～10nm范围内插入损耗小于2dB，这一容差范围有利于器件的制作，更好的保证理论和实验的一致性。As shown in Figure 10, it is obtained by simulation of the four-wavelength silicon-based wavelength division multiplexer based on the tapered asymmetric directional coupler provided by the embodiment, and the relationship diagram of the insertion loss changing with the width of the input waveguide can be obtained from the above-mentioned accompanying drawings Analysis, for a certain wavelength channel, the insertion loss of the four-wavelength silicon-based wavelength division multiplexer based on the tapered asymmetric directional coupler is less than 2dB within the range of Δw ±5-10nm. This tolerance range is conducive to the manufacture of the device , to better ensure the consistency of theory and experiment.
图11所示，是由实施例提供的基于锥形非对称定向耦合器的四波长硅基波分复用器在四波长输入情况下的实验结果图；从该图可以分析出，和直波导归一化后，四个波长通道对应的插入损耗分别约为0.1dB、0.3dB、0.8dB和1dB，对应的串扰分别为-24dB、-23dB、-24dB和-26dB，总体来说具有低的插入损耗和小的串扰，且基于锥形非对称定向耦合器的硅基波分复用器在四波长输入情况下的实验结果与理论设计基本一致，具有良好的制作容差。As shown in Fig. 11, it is the experimental result diagram of the four-wavelength silicon-based wavelength division multiplexer based on the tapered asymmetric directional coupler provided by the embodiment in the case of four-wavelength input; from this figure, it can be analyzed that, and the straight waveguide After normalization, the insertion losses corresponding to the four wavelength channels are about 0.1dB, 0.3dB, 0.8dB and 1dB respectively, and the corresponding crosstalks are -24dB, -23dB, -24dB and -26dB respectively. Insertion loss and small crosstalk, and the experimental results of the silicon-based wavelength division multiplexer based on the tapered asymmetric directional coupler in the case of four-wavelength input are basically consistent with the theoretical design, and have good manufacturing tolerances.
本领域的技术人员容易理解，以上所述仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等，均应包含在本发明的保护范围之内。It is easy for those skilled in the art to understand that the above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention, All should be included within the protection scope of the present invention.
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