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CN108511537B - Solar cell - Google Patents

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CN108511537B
CN108511537B CN201810673308.0A CN201810673308A CN108511537B CN 108511537 B CN108511537 B CN 108511537B CN 201810673308 A CN201810673308 A CN 201810673308A CN 108511537 B CN108511537 B CN 108511537B
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back electrode
electrode layer
solar cell
substrate
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CN108511537A (en
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李新连
陈涛
德臣
杨立红
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Shanghai Zuqiang Energy Co ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/20Electrodes
    • H10F77/206Electrodes for devices having potential barriers
    • H10F77/211Electrodes for devices having potential barriers for photovoltaic cells
    • H10F77/219Arrangements for electrodes of back-contact photovoltaic cells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/30Coatings
    • H10F77/306Coatings for devices having potential barriers
    • H10F77/311Coatings for devices having potential barriers for photovoltaic cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/541CuInSe2 material PV cells

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Abstract

本发明涉及一种太阳能电池,包括:基底;背电极层,其设置于所述基底上方,所述背电极层包括第一层和第二层,所述第一层紧邻基底一侧,所述第二层体积密度小于所述第一层体积密度;光吸收层,其设置在所述第二层上方;以及前电极层,其设置在所述第二层上方;以及其中,所述第一层与所述第二层间无明显分界。相比于现有技术中含有光滑背电极表面的太阳能电池,此种具有适度体积密度的粗糙表面层的背电极的太阳能电池有利于自发形成限光效应,降低太阳能电池的光反射率,提高光吸收率。

Figure 201810673308

The present invention relates to a solar cell, comprising: a substrate; a back electrode layer disposed above the substrate, the back electrode layer comprising a first layer and a second layer, the first layer is adjacent to one side of the substrate, the The second layer has a volume density less than that of the first layer; a light absorbing layer disposed over the second layer; and a front electrode layer disposed over the second layer; and wherein the first There is no sharp demarcation between the layer and the second layer. Compared with solar cells with a smooth back electrode surface in the prior art, this kind of solar cell with a rough surface layer with a moderate volume density is conducive to spontaneously forming a light-limiting effect, reducing the light reflectance of the solar cell, and improving the light efficiency. Absorption rate.

Figure 201810673308

Description

一种太阳能电池a solar cell

技术领域technical field

本发明涉及太阳能光伏领域,特别地涉及一种太阳能电池。The invention relates to the field of solar photovoltaics, in particular to a solar cell.

背景技术Background technique

经济的快速发展带来全球能源危机和环境污染等问题,开发可再生能源和清洁能源迫在眉睫。近年来,太阳能作为新能源以其廉价、含量丰富、易获得和无污染等优势已逐渐取代化石能源。太阳能作为能源的利用主要体现在利用其进行发电。Rapid economic development has brought about problems such as global energy crisis and environmental pollution, and the development of renewable and clean energy is imminent. In recent years, as a new energy source, solar energy has gradually replaced fossil energy due to its advantages of cheapness, abundant content, easy availability and no pollution. The use of solar energy as energy is mainly reflected in the use of it for power generation.

薄膜太阳能电池又称为“太阳能芯片”或“光电池”,是一种利用光能转换成电能的装置。薄膜太阳能电池主要是由铜铟镓硒(简称为:CIGS)材料和其他材料在基底上形成P-N节的薄膜来发电,其具有光吸收能力强、转化效率高、制造成本低、可柔性化、发电稳定以及环境友好等优点。薄膜太阳能电池的转化效率是指转化成的有效电能所占入射的太阳光能量的百分比,目前实验室最高太阳能电池转化效率已经超过22%,但是实际工业生产中还很难达到如此高的转化效率。提高太阳能电池的光能转化效率可以有效节约生产成本,进一步解决能源危机问题。Thin film solar cell, also known as "solar chip" or "photovoltaic cell", is a device that converts light energy into electrical energy. Thin-film solar cells are mainly composed of copper indium gallium selenide (abbreviated as: CIGS) materials and other materials to form a P-N junction film on the substrate to generate electricity. It has strong light absorption capacity, high conversion efficiency, low manufacturing cost, and flexibility. The advantages of stable power generation and environmental friendliness. The conversion efficiency of thin-film solar cells refers to the percentage of the converted effective electric energy to the incident sunlight energy. At present, the highest conversion efficiency of solar cells in the laboratory has exceeded 22%, but it is still difficult to achieve such a high conversion efficiency in actual industrial production. . Improving the light energy conversion efficiency of solar cells can effectively save production costs and further solve the problem of energy crisis.

发明内容Contents of the invention

针对现有技术中存在的技术问题,本发明提出了一种太阳能电池,包括:基底;背电极层,其设置于所述基底上方,所述背电极层包括第一层和第二层,所述第一层紧邻基底一侧,所述第二层体积密度小于所述第一层体积密度;光吸收层,其设置在所述第二层上方;以及前电极层,其设置在所述第二层上方。Aiming at the technical problems existing in the prior art, the present invention proposes a solar cell, comprising: a substrate; a back electrode layer disposed above the substrate, the back electrode layer comprising a first layer and a second layer, the The first layer is adjacent to the substrate side, the volume density of the second layer is smaller than the volume density of the first layer; the light absorbing layer is arranged above the second layer; and the front electrode layer is arranged on the first layer Above the second floor.

如上所述的太阳能电池,所述第一背电极层和第二背电极层包括金属钼。In the above solar cell, the first back electrode layer and the second back electrode layer include metal molybdenum.

如上所述的太阳能电池,所述第二背电极层的厚度为5-30nm。In the above solar cell, the thickness of the second back electrode layer is 5-30 nm.

如上所述的太阳能电池,所述第一背电极层的厚度为300-1000nm。According to the above solar cell, the thickness of the first back electrode layer is 300-1000nm.

如上所述的太阳能电池,所述第二背电极层单位体积内钼含量约为6g/cm3As for the above solar cell, the molybdenum content per unit volume of the second back electrode layer is about 6 g/cm 3 .

如上所述的太阳能电池,所述第一背电极层单位体积内钼含量约为10g/cm3As for the above solar cell, the molybdenum content per unit volume of the first back electrode layer is about 10 g/cm 3 .

如上所述的太阳能电池,所述第二背电极层具有粗糙面层,粗糙度Ra为Ra<30nm。In the above solar cell, the second back electrode layer has a rough surface layer, and the roughness Ra is Ra<30nm.

如上所述的太阳能电池,所述第一背电极层还可以进一步包括第一沉积层和第二沉积层,所述第一沉积层体积密度小于所述第二沉积层的体积密度,其中所述第一沉积层紧邻所述基底。In the above solar cell, the first back electrode layer may further include a first deposition layer and a second deposition layer, the volume density of the first deposition layer is smaller than the volume density of the second deposition layer, wherein the The first deposited layer is proximate to the substrate.

一种薄膜太阳能电池的制备方法,包括:在基底上制备第一背电极层;在所述第一背电极层上制备第二背电极层,其中第二背电极层的体积密度小于所述第一背电极层的体积密度;在所述第二背电极层上制备光吸收层;在所述光吸收层上制备前电极层。A method for preparing a thin film solar cell, comprising: preparing a first back electrode layer on a substrate; preparing a second back electrode layer on the first back electrode layer, wherein the volume density of the second back electrode layer is smaller than that of the first back electrode layer A volume density of the back electrode layer; a light absorbing layer is prepared on the second back electrode layer; a front electrode layer is prepared on the light absorbing layer.

相比于现有技术中含有光滑背电极表面的太阳能电池,包含具有适度体积密度粗糙表面层的背电极表的太阳能电池有利于自发形成限光效应,降低太阳能电池的光反射率,提高光吸收率。Compared with solar cells with a smooth back electrode surface in the prior art, a solar cell with a back electrode surface with a moderate volume density rough surface layer is conducive to the spontaneous formation of a light confinement effect, reducing the light reflectance of the solar cell, and improving light absorption Rate.

附图说明Description of drawings

下面,将结合附图对本发明的优选实施方式进行进一步详细的说明,其中:Below, preferred embodiment of the present invention will be described in further detail in conjunction with accompanying drawing, wherein:

图1A和图1B是根据本发明的一个实施例的薄膜太阳能电池示意图;以及1A and 1B are schematic diagrams of a thin film solar cell according to an embodiment of the present invention; and

图2是根据本发明的一个实施例的薄膜太阳能电池的制备流程图。Fig. 2 is a flow chart of the preparation of a thin film solar cell according to an embodiment of the present invention.

具体实施方式Detailed ways

为使本发明实施例的目的、技术方案和优点更加清楚,下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

在以下的详细描述中,可以参看作为本申请一部分用来说明本申请的特定实施例的各个说明书附图。在附图中,相似的附图标记在不同图式中描述大体上类似的组件。本申请的各个特定实施例在以下进行了足够详细的描述,使得具备本领域相关知识和技术的普通技术人员能够实施本申请的技术方案。应当理解,还可以利用其它实施例或者对本申请的实施例进行结构、逻辑或者电性的改变。In the following detailed description, reference is made to the accompanying drawings which are included in the specification and which illustrate specific embodiments of the application and which are included in this application. In the drawings, like reference numerals describe substantially similar components in different views. Various specific embodiments of the present application are described in sufficient detail below, so that those of ordinary skill in the art can implement the technical solutions of the present application. It should be understood that other embodiments may also be utilized or structural, logical or electrical changes may be made to the embodiments of the present application.

太阳能电池工作的基础是半导体PN结的光生伏特效应,即太阳光照射在太阳能电池中的PN结上时,其内电荷分布状态发生变化,在PN结的两边产生电动势和电流。The basis of solar cell work is the photovoltaic effect of the semiconductor PN junction, that is, when sunlight shines on the PN junction in the solar cell, the internal charge distribution state changes, and electromotive force and current are generated on both sides of the PN junction.

图1A和图1B是根据本发明的一个实施例的薄膜太阳能电池示意图。根据本发明的一个实施例,采用普通的钠钙玻璃作为基底101,其中的钠元素以扩散形式进入CIGS晶粒(光吸收层103)中,促进CIGS晶粒(光吸收层103)的生长,优化光吸收层103的电学性能,尤其能提高其P型特性。作为可选的实施例,基底101也可以使用其他刚性材料如玻璃、陶瓷等,或者柔性材料如金属、塑料等。需要注意的是,有的玻璃在使用时可能需要采用特殊工艺处理,如硼硅玻璃、聚酰亚胺玻璃;如选择金属作为基底101,需在金属上表面与太阳能电池其他组分接触的一侧镀绝缘的阻挡层,如氧化硅、氮化硅等;如选择塑料作为基底,需注意所选塑料所耐受的温度限度。1A and 1B are schematic diagrams of a thin film solar cell according to an embodiment of the present invention. According to an embodiment of the present invention, common soda-lime glass is used as the substrate 101, and the sodium element therein enters the CIGS grains (light-absorbing layer 103) in a diffused form to promote the growth of the CIGS grains (light-absorbing layer 103), Optimizing the electrical properties of the light absorbing layer 103 can especially improve its P-type characteristics. As an optional embodiment, the base 101 may also use other rigid materials such as glass, ceramics, etc., or flexible materials such as metals, plastics, etc. It should be noted that some glasses may need to be treated with special processes when used, such as borosilicate glass and polyimide glass; if metal is selected as the substrate 101, the upper surface of the metal needs to be in contact with other components of the solar cell. Plating an insulating barrier layer on the side, such as silicon oxide, silicon nitride, etc.; if you choose plastic as the substrate, you need to pay attention to the temperature limit that the selected plastic can withstand.

背电极102镀制于基底101表面,根据本发明的一个实施例,采用金属钼(Mo)作为背电极102,其具有稳定性好、反射率高、电阻低的优点。作为可选的实施例,也可以使用金属钨(W)或者透明导电层(TCO)作为背电极。根据本发明的一个实施例,背电极102具有两层结构,其中第一层1021紧邻基底101,第二层1022包括粗糙面层。根据本发明的一个实施例,第一层与第二层间无明显分界。根据本发明的一个实施例,粗糙面层1022体积密度小于第一层1021,体积密度约4-8g/cm3,表面粗糙度不超过30nm。具有适当粗糙度的粗糙面层可以改进背电极与其上附着层的附着。现有技术中,背电极体积密度约9-10g/cm3,表面粗糙度约为4nm,为光滑表面,继续在其上镀制其余膜层时,形成光滑的表面。该情况下,光吸收层103表面的粗糙度过低,体积密度高,反射率较高,不利于光能的充分吸收。相比于现有技术中含有光滑背电极表面的太阳能电池,包含适度的粗糙背电极表面的太阳能电池具有较低体积密度的表面,有利于自发形成限光效应,降低太阳能电池的光反射率,提高光吸收率。根据本发明的一个实施例,通过实验得出,背电极表面体积密度约4-8g/cm3,表面粗糙度在30nm以下为佳。采集分析本发明的实施例结果得出,表面体积密度约5-7g/cm3、粗糙度约在10-20nm之间时,太阳能电池的转化效率有较明显提高。根据本发明的一个实施例,所述的体积密度也可以定义为单位体积内某种材料的体积,第一背电极层的体积密度大于第二背电极层的体积密度可以为在单位体积内,第一背电极层的中Mo的含量大于第二背电极层Mo的含量,也可以为在单位体积内,第一被电极层所占的体积大于第二背电极层所占的体积。The back electrode 102 is plated on the surface of the substrate 101. According to an embodiment of the present invention, metal molybdenum (Mo) is used as the back electrode 102, which has the advantages of good stability, high reflectivity and low resistance. As an optional embodiment, metal tungsten (W) or transparent conductive layer (TCO) may also be used as the back electrode. According to an embodiment of the present invention, the back electrode 102 has a two-layer structure, wherein the first layer 1021 is adjacent to the substrate 101 , and the second layer 1022 includes a rough surface layer. According to an embodiment of the present invention, there is no obvious boundary between the first layer and the second layer. According to an embodiment of the present invention, the volume density of the rough surface layer 1022 is lower than that of the first layer 1021, the volume density is about 4-8 g/cm 3 , and the surface roughness is not more than 30 nm. A rough surface layer with an appropriate roughness can improve the adhesion of the back electrode to the above attachment layer. In the prior art, the volume density of the back electrode is about 9-10g/cm 3 , and the surface roughness is about 4nm, which is a smooth surface. When the rest of the film layers are continuously plated on it, a smooth surface will be formed. In this case, the surface roughness of the light absorbing layer 103 is too low, the bulk density is high, and the reflectivity is high, which is not conducive to sufficient absorption of light energy. Compared with solar cells with a smooth back electrode surface in the prior art, a solar cell with a moderately rough back electrode surface has a lower volume density surface, which is conducive to spontaneously forming a light-limiting effect and reducing the light reflectance of the solar cell. Improve light absorption. According to an embodiment of the present invention, it is found through experiments that the surface volume density of the back electrode is about 4-8 g/cm 3 , and the surface roughness is preferably below 30 nm. Collecting and analyzing the results of the embodiments of the present invention, it can be concluded that when the surface volume density is about 5-7 g/cm 3 and the roughness is about 10-20 nm, the conversion efficiency of the solar cell is significantly improved. According to an embodiment of the present invention, the volume density can also be defined as the volume of a certain material in a unit volume, the volume density of the first back electrode layer is greater than the volume density of the second back electrode layer can be in a unit volume, The content of Mo in the first back electrode layer is greater than that in the second back electrode layer, and it can also be that in a unit volume, the volume occupied by the first electrode layer is greater than the volume occupied by the second back electrode layer.

根据本发明的一个实施例,第一层1021可以进一步包括第一沉积层和第二沉积层。其中第一沉积层紧邻基底一侧,第二沉积层设置在第一沉积层和第二层之间。根据本发明的一个实施例,第一沉积层体积密度小于所述第二沉积层,也就是说第一沉积层较第二沉积层具有更大的粗糙度,可以增加背电极的附着力;第二沉积层较第一沉积层更为致密,体积密度大,表面光滑,粗糙度低,具有更好的导电性。结合本发明中第二层1022粗糙面层,使太阳能电池的转化效率明显提高。According to an embodiment of the present invention, the first layer 1021 may further include a first deposition layer and a second deposition layer. Wherein the first deposition layer is adjacent to one side of the substrate, and the second deposition layer is arranged between the first deposition layer and the second layer. According to an embodiment of the present invention, the volume density of the first deposition layer is smaller than that of the second deposition layer, that is to say, the first deposition layer has greater roughness than the second deposition layer, which can increase the adhesion of the back electrode; The second deposition layer is denser than the first deposition layer, has a higher bulk density, smoother surface, lower roughness, and better electrical conductivity. Combined with the rough surface layer of the second layer 1022 in the present invention, the conversion efficiency of the solar cell is obviously improved.

背电极粗糙面层1022表面为光吸收层103。背电极具有光滑面层,则其上光吸收层也具有光滑表面;背电极具有粗糙面层,则其上光吸收层也具有粗糙面层。根据本发明的一个实施例,光吸收层可以为厚度均匀的CIGS薄膜。CIGS薄膜是由铜(Cu)、铟(In)、镓(Ga)、硒(Se)四种元素按比例构成的黄铜矿结晶,在太阳能电池中具有P型特性。根据其中镓取代铟比率的不同,其带隙宽度在1.02eV至1.65eV范围内连续可调,使其可以应用于不同光照条件下。如带隙增加,也可以使用硫代替硒,使价带下降。根据本发明的一个实施例,光吸收层镀在粗糙度小于30nm的背电极表面,相应也具有粗糙面层。将具有粗糙面层的光吸收层的太阳能电池置于阳光下,其粗糙表面对光能的反射降低,吸收率升高。The surface of the back electrode rough surface layer 1022 is the light absorbing layer 103 . If the back electrode has a smooth surface layer, then the light absorbing layer on it also has a smooth surface; if the back electrode has a rough surface layer, then the light absorbing layer on it also has a rough surface layer. According to an embodiment of the present invention, the light absorbing layer may be a CIGS thin film with uniform thickness. CIGS film is a chalcopyrite crystal composed of copper (Cu), indium (In), gallium (Ga), and selenium (Se) in proportion, and has P-type characteristics in solar cells. According to the difference in the ratio of gallium to indium, its bandgap width is continuously adjustable in the range of 1.02eV to 1.65eV, making it applicable to different lighting conditions. If the band gap increases, sulfur can also be used instead of selenium to lower the valence band. According to an embodiment of the present invention, the light absorbing layer is plated on the surface of the back electrode whose roughness is less than 30 nm, and correspondingly has a rough surface layer. When a solar cell with a light-absorbing layer with a rough surface layer is placed in sunlight, the reflection of light energy on the rough surface is reduced and the absorptivity is increased.

光吸收层103上表面的缓冲层104位于光吸收层103和前电极层之间,可以降低两者带隙不连续性,解决其晶格不匹配问题,从而解决禁带宽度不匹配问题。根据本发明的一个实施例,使用硫化镉(CdS)作为缓冲层,其具有N型半导体材料特性。硫化镉,具有较高的光透过率可以减少薄膜太阳能电池的光损失,从而有效增加太阳能电池的光电转化效率,是一种理想的太阳能电池电池缓冲材料。The buffer layer 104 on the upper surface of the light-absorbing layer 103 is located between the light-absorbing layer 103 and the front electrode layer, which can reduce the discontinuity of the bandgap between the two, solve the problem of lattice mismatch, and thus solve the problem of mismatching the forbidden band width. According to one embodiment of the present invention, cadmium sulfide (CdS) is used as the buffer layer, which has the characteristics of an N-type semiconductor material. Cadmium sulfide, with high light transmittance, can reduce the light loss of thin-film solar cells, thereby effectively increasing the photoelectric conversion efficiency of solar cells, and is an ideal buffer material for solar cells.

前电极层包括高阻氧化锌和低阻氧化锌,分别构成高阻层105和透明电极层106。根据本发明的一个实施例,高阻层105为本征氧化锌层(i-ZnO)。透明电极层106可以做为太阳能电池的上电极。在实际的生产中,透明电极层106可以采用n掺杂透明导电物的组合材料(n-ZnO),如AZO、GZO、IZO、ITO等。根据本发明的一个实施例,透明电极层106使用的是铝掺杂氧化锌(AZO),其可见光透过率高,且表面电阻低,可以降低串联电阻损耗,提高太阳能电池的转化效率。前电极层最终与光吸收层103共同组成太阳能电池的PN结部分,实现太阳能发电功能。The front electrode layer includes high-resistance zinc oxide and low-resistance zinc oxide, which respectively constitute the high-resistance layer 105 and the transparent electrode layer 106 . According to an embodiment of the present invention, the high resistance layer 105 is an intrinsic zinc oxide layer (i-ZnO). The transparent electrode layer 106 can be used as the upper electrode of the solar cell. In actual production, the transparent electrode layer 106 can be made of n-doped transparent conductive materials (n-ZnO), such as AZO, GZO, IZO, ITO and the like. According to an embodiment of the present invention, the transparent electrode layer 106 is made of aluminum-doped zinc oxide (AZO), which has high visible light transmittance and low surface resistance, which can reduce series resistance loss and improve the conversion efficiency of solar cells. Finally, the front electrode layer together with the light absorbing layer 103 forms the PN junction part of the solar cell to realize the function of solar power generation.

栅极107镀制在前电极层之上,用于收集电流。基于以上101-107,最终形成可实现光伏发电的太阳能电池。A grid 107 is plated on the front electrode layer for collecting current. Based on the above 101-107, a solar cell that can realize photovoltaic power generation is finally formed.

图2是根据本发明的一个实施例的薄膜太阳能电池的制备流程图。如图所示,制备太阳能电池的方法200包括以下步骤:首先获取基底201,选取合适的材料作为太阳能电池的基底。根据本发明的一个实施例,所选用的基底为钠钙玻璃。根据本发明可选的实施例,实际运用及生产中,基底的选取也可以为其他刚性材料如玻璃、陶瓷等,或者柔性材料如金属、塑料等。Fig. 2 is a flow chart of the preparation of a thin film solar cell according to an embodiment of the present invention. As shown in the figure, the method 200 for preparing a solar cell includes the following steps: firstly, a substrate 201 is obtained, and a suitable material is selected as the substrate of the solar cell. According to an embodiment of the present invention, the selected substrate is soda lime glass. According to an optional embodiment of the present invention, in practical application and production, the substrate may also be selected from other rigid materials such as glass, ceramics, etc., or flexible materials such as metals, plastics, etc.

获取基底201后,在选取好的基底上镀制背电极202。根据本发明的一个实施例,选取金属钼作为背电极,通过磁控溅射的方法在基板上镀制一层约500nm的钼背电极层。根据本发明的一个实施例,先使用第一溅射气压,在基底上沉积10-100nm的第一沉积层,作为附着层;再使用第二溅射气压在其上继续沉积200-1000nm的第二沉积层,作为导电层,其中第一溅射气压高于第二溅射气压。此种通过改变溅射气压多次溅射,可以改进背电极的附着力和导电性。根据太阳能电池安装的环境及所需的输出电量,也可以仅使用其中一种溅射方式镀制背电极层。此处提及的第一溅射气压及第二溅射气压并不指代特定气压,只是相对概念。实际生产制造过程中,需根据实际使用情况调节溅射气压。After the substrate 201 is obtained, the back electrode 202 is plated on the selected substrate. According to an embodiment of the present invention, metal molybdenum is selected as the back electrode, and a molybdenum back electrode layer of about 500 nm is plated on the substrate by magnetron sputtering. According to one embodiment of the present invention, first use the first sputtering gas pressure to deposit the first deposition layer of 10-100nm on the substrate as an adhesion layer; A second deposited layer, as a conductive layer, wherein the first sputtering pressure is higher than the second sputtering pressure. This kind of multiple sputtering by changing the sputtering pressure can improve the adhesion and conductivity of the back electrode. Depending on the environment in which the solar cell is installed and the required output power, only one of the sputtering methods can be used to plate the back electrode layer. The first sputtering gas pressure and the second sputtering gas pressure mentioned here do not refer to specific gas pressures, but are relative concepts. In the actual manufacturing process, the sputtering pressure needs to be adjusted according to the actual usage.

对背电极表面改性处理203。根据本发明的一个实施例,采用离子刻蚀方法实现对背电极的表面改性处理。即在镀制背电极202完成后,使其进入具有Ar+源的真空腔体,利用约1KV的电压加速Ar+,刻蚀背电极表面约2-10分钟,形成粗糙的膜表面。通过本发明相关实验得知,此条件下离子刻蚀2-10分钟所形成粗糙面层的粗糙度约为10-20nm。除离子刻蚀方法外,根据本发明的一个实施例,使用机械喷砂刻蚀的方式也可以使背电极表面形成同样粗糙程度的表面。Surface modification treatment 203 on the back electrode. According to an embodiment of the present invention, the surface modification treatment of the back electrode is realized by using an ion etching method. That is, after the plating of the back electrode 202 is completed, it enters a vacuum chamber with an Ar + source, accelerates the Ar + with a voltage of about 1KV, and etches the surface of the back electrode for about 2-10 minutes to form a rough film surface. According to the relevant experiments of the present invention, under this condition, the roughness of the rough surface layer formed by ion etching for 2-10 minutes is about 10-20 nm. In addition to the ion etching method, according to an embodiment of the present invention, the surface of the back electrode can also be formed with the same roughness by means of mechanical sandblasting and etching.

对背电极表面改性处理203不限于刻蚀的方式。根据本发明的一个实施例,还可以使用磁控溅射法,继续使用第三溅射气压在已镀制好的背电极表面继续镀制钼层。其中第三溅射气压高于第二溅射气压。本领域技术人员很容易理解,在高气压下磁控溅射法形成的膜疏松多孔、表面粗糙,若控制好气压及磁控溅射的时间,完全可以实现在背电极表面形成粗糙度小于30nm的粗糙面层。The method of modifying the surface of the back electrode 203 is not limited to etching. According to an embodiment of the present invention, the magnetron sputtering method can also be used to continuously plate the molybdenum layer on the surface of the plated back electrode by using the third sputtering pressure. Wherein the third sputtering pressure is higher than the second sputtering pressure. Those skilled in the art can easily understand that the film formed by the magnetron sputtering method under high pressure is loose and porous, and the surface is rough. rough surface layer.

在改性的背电极表面镀制光吸收层204。根据本发明的一个实施例,采用共蒸发法镀制厚度约2000-3000nm的光吸收层,本发明中所述光吸收层均为CIGS层。根据本发明的另一个实施例,还可以使用溅射后硒化法镀制CIGS层。本领域技术人员应当理解,镀制CIGS层的方法有很多,除上述所列两种方法,还有三步共蒸法、电化学沉积法、喷涂热解法、丝网印刷法等。本发明中所用共蒸发法和溅射后硒化法是现研究最为广泛、技术较为成熟、制备出电池效率较高的方法。根据本发明的一个实施例,还可以将蒸发法与溅射后硒化法结合,镀制CIGC层。由于光吸收层以背电极为基础镀制,而背电极表面为粗糙面层,所以镀制后所得CIGS层也具有粗糙表面。A light absorbing layer 204 is plated on the surface of the modified back electrode. According to an embodiment of the present invention, a light-absorbing layer with a thickness of about 2000-3000 nm is plated by a co-evaporation method, and the light-absorbing layers in the present invention are all CIGS layers. According to another embodiment of the present invention, the CIGS layer can also be plated by a selenization method after sputtering. Those skilled in the art should understand that there are many methods for plating a CIGS layer, in addition to the two methods listed above, there are also three-step co-evaporation method, electrochemical deposition method, spray pyrolysis method, screen printing method and so on. The co-evaporation method and the selenization method after sputtering used in the present invention are the methods with the most extensive research, relatively mature technology and high battery efficiency. According to an embodiment of the present invention, the CIGC layer can also be plated by combining the evaporation method with the selenization method after sputtering. Since the light absorbing layer is plated on the basis of the back electrode, and the surface of the back electrode is a rough surface layer, the CIGS layer obtained after plating also has a rough surface.

镀制缓冲层205。根据本发明的一个实施例,缓冲层为硫化镉。根据本发明的一个实施例,采用化学水浴法在光吸收层表面镀制厚度约40nm的缓冲层。如本领域技术人员理解,缓冲层镀制也可以使用其他方法,如真空蒸发法、溅射原子层化学气相沉积法、电沉积法等。A buffer layer 205 is plated. According to one embodiment of the present invention, the buffer layer is cadmium sulfide. According to an embodiment of the present invention, a buffer layer with a thickness of about 40 nm is plated on the surface of the light absorbing layer by using a chemical water bath method. As understood by those skilled in the art, other methods can also be used for buffer layer plating, such as vacuum evaporation, sputtering atomic layer chemical vapor deposition, electrodeposition, and the like.

镀制前电极层-高阻层206。根据本发明的一个实施例,采用磁控溅射法在缓冲层上镀制厚度约50nm的本征氧化锌薄膜。根据本发明的一个实施例,还可以使用射频溅射法镀制高阻层。高阻层的镀制不限于此两种方法。The front electrode layer-high resistance layer 206 is plated. According to an embodiment of the present invention, an intrinsic zinc oxide film with a thickness of about 50 nm is plated on the buffer layer by magnetron sputtering. According to an embodiment of the present invention, the high resistance layer can also be plated by radio frequency sputtering. The plating of the high resistance layer is not limited to these two methods.

镀制前电极层-透明电极层207。根据本发明的一个实施例,透明电极层为铝掺杂氧化锌,采用磁控溅射法在高阻层上镀制厚度约300nm透明电极层。除此之外,镀制透明电极层还可以使用射频溅射法、反应溅射法等,如需大规模镀制,还可使用直流射频法。The front electrode layer-transparent electrode layer 207 is plated. According to an embodiment of the present invention, the transparent electrode layer is aluminum-doped zinc oxide, and a transparent electrode layer with a thickness of about 300 nm is plated on the high resistance layer by magnetron sputtering. In addition, the radio frequency sputtering method, reactive sputtering method, etc. can also be used to plate the transparent electrode layer. If large-scale plating is required, the DC radio frequency method can also be used.

最后镀制栅极208。在电池表面蒸镀栅极,使其最终与以上各层形成电池。Finally, the grid 208 is plated. Evaporate the grid on the surface of the battery to finally form a battery with the above layers.

使用如上方法制备的太阳能电池,电池性能如下表所示:Using the solar cell prepared by the above method, the cell performance is shown in the following table:

表1:Table 1:

Figure BDA0001709127550000081
Figure BDA0001709127550000081

如表1所示,表中表面粗糙度为背电极表面粗糙度,反映具有不同体积密度的背电极表面层。现有技术中,背电极体积密度约为10g/m3,粗糙度约为4nm。跟现有技术相比,当背电极表面粗糙度增加至15nm时,其开路电压VOC不变,短路电流密度JSC有明显升高,太阳能电池转化效率η明显升高;当背电极表面粗糙度增加至30nm时,短路电流密度JSC虽然有增加,但其开路电压VOC减小,填充因子FF减小,太阳能电池转化效率η反而下降。但是从表格中可以看出,当背电极表面粗糙度为15nm和30nm时,相比现有技术,其短路电流密度都增加,说明提高表面粗糙度有利于增大光吸收率。As shown in Table 1, the surface roughness in the table is the surface roughness of the back electrode, reflecting the surface layers of the back electrode with different volume densities. In the prior art, the volume density of the back electrode is about 10 g/m 3 , and the roughness is about 4 nm. Compared with the prior art, when the surface roughness of the back electrode increased to 15nm, its open circuit voltage V OC was constant, the short-circuit current density J SC was significantly increased, and the conversion efficiency η of the solar cell was significantly increased; when the surface of the back electrode was rough When the density increases to 30nm, although the short-circuit current density J SC increases, the open-circuit voltage V OC decreases, the fill factor FF decreases, and the conversion efficiency η of solar cells decreases instead. However, it can be seen from the table that when the surface roughness of the back electrode is 15nm and 30nm, compared with the prior art, the short-circuit current density increases, indicating that increasing the surface roughness is beneficial to increasing the light absorption rate.

通过多组实验得知,背电极表面改性处理后,其粗糙度在10-20nm范围内时,有利于提高太阳能电池转化效率。过于粗糙的背电极表面会影响CIGS的晶粒生长,继而影响太阳能电池的开路电压VOC,进而影响太阳能电池转化效率,使转化效率下降。It is known through multiple sets of experiments that after the surface modification treatment of the back electrode, when the roughness thereof is in the range of 10-20 nm, it is beneficial to improve the conversion efficiency of the solar cell. An overly rough surface of the back electrode will affect the grain growth of CIGS, and then affect the open-circuit voltage V OC of the solar cell, thereby affecting the conversion efficiency of the solar cell and reducing the conversion efficiency.

上述实施例仅供说明本发明之用,而并非是对本发明的限制,有关技术领域的普通技术人员,在不脱离本发明范围的情况下,还可以做出各种变化和变型,因此,所有等同的技术方案也应属于本发明公开的范畴。The above-described embodiments are only for illustrating the present invention, rather than limiting the present invention. Those of ordinary skill in the relevant technical field can also make various changes and modifications without departing from the scope of the present invention. Therefore, all Equivalent technical solutions should also belong to the scope of the disclosure of the present invention.

Claims (1)

1. A solar cell, comprising:
a substrate;
the back electrode layer is arranged above the substrate and comprises a first back electrode layer and a second back electrode layer, the first back electrode layer is close to the substrate, and the volume density of the second back electrode layer is smaller than that of the first back electrode layer;
a light absorbing layer disposed over the second back electrode layer;
and
a front electrode layer disposed over the light absorbing layer;
the first back electrode layer and the second back electrode layer comprise metal molybdenum;
the thickness of the second back electrode layer is 5-30nm;
the molybdenum content in the unit volume of the second back electrode layer is 6g/cm 3
The molybdenum content in the unit volume of the first back electrode layer is 10g/cm 3
The second back electrode layer is provided with a rough surface layer, and the roughness Ra is 10-20nm;
wherein the first back electrode layer is adjacent to the substrate, the second back electrode layer comprises a rough surface layer, no obvious boundary exists between the first layer and the second layer, and the volume density of the rough surface layer is less than that of the first back electrode layer; the volume density of the first back electrode layer is larger than that of the second back electrode layer, namely in a unit volume, the content of Mo in the first back electrode layer is larger than that of the second back electrode layer, or in the unit volume, the volume occupied by the first back electrode layer is larger than that of the second back electrode layer;
the first back electrode layer comprises a first deposition layer and a second deposition layer, wherein the first deposition layer is close to one side of the substrate, the second deposition layer is arranged between the first deposition layer and the second deposition layer, and the volume density of the first deposition layer is smaller than that of the second deposition layer;
the surface of the rough surface layer of the back electrode is provided with a light absorption layer; the light absorption layer is a CIGS thin film with uniform thickness, and is plated on the surface of the back electrode with the roughness of 10-20nm;
a buffer layer on the upper surface of the light absorbing layer between the light absorbing layer and the front electrode layer, and cadmium sulfide (CdS) as the buffer layer;
the front electrode layer comprises high-resistance zinc oxide and low-resistance zinc oxide which respectively form a high-resistance layer and a transparent electrode layer, and the high-resistance layer is an intrinsic zinc oxide layer (i-ZnO); the transparent electrode layer is an upper electrode of the solar cell, and aluminum-doped zinc oxide (AZO) is used as the transparent electrode layer;
the grid is plated on the front electrode layer and used for collecting current; finally forming a solar cell capable of realizing photovoltaic power generation; the thickness of the first back electrode layer is 300-1000nm.
CN201810673308.0A 2018-06-26 2018-06-26 Solar cell Active CN108511537B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006165386A (en) * 2004-12-09 2006-06-22 Showa Shell Sekiyu Kk CIS thin film solar cell and method for producing the same
KR101306529B1 (en) * 2011-11-21 2013-09-09 엘지이노텍 주식회사 Solar cell and method of fabricating the same
US20140283913A1 (en) * 2012-11-09 2014-09-25 Nanoco Technologies Ltd. Molybdenum Substrates for CIGS Photovoltaic Devices
CN103354246A (en) * 2013-07-10 2013-10-16 尚越光电科技有限公司 CIGS (Copper Indium Gallium Selenium) solar cell back-electrode Mo film and preparation technology thereof
CN105355676B (en) * 2015-11-18 2017-11-03 北京四方创能光电科技有限公司 A kind of back electrode structure of flexible CIGS thin film solar cell
CN107887456A (en) * 2017-10-30 2018-04-06 周燕红 A kind of preparation method of back electrode molybdenum (Mo) film

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