CN108627972A - Cantilever type transverse piezoelectric driven deformable mirror and its assembly method - Google Patents

Abstract

The invention discloses a cantilever type transverse piezoelectric driven deformable mirror. The deformable mirror includes a transverse shell, a piezoelectric driver, a reflector and an electrical connection assembly. The piezoelectric driver includes a middle disk and uniformly arranged along the outer peripheral wall of the middle disk. A plurality of arc-shaped cantilevers, the reflector is glued on the middle disc, the middle disc of the piezoelectric driver is concentric with the inner hole of the transverse shell and fixed to one end of the transverse shell through the free ends of each arc-shaped cantilever, and connected to the electrical components It is installed on the other end of the transverse shell and connected with the middle disc and each arc-shaped cantilever through a wire. The assembly method of the deformable mirror: S1, align the middle disc of the driver with the center of the reflector and bond them with epoxy resin glue; S2, concentrically fix the middle disc with the inner hole of the transverse shell; S3, connect the The electrical components are installed at the other end of the transverse casing. The deformable mirror has a simple structure, is convenient to manufacture and install, can effectively increase the deformation stroke and generate pitch and tilt aberrations, and has a simple and convenient assembly method.

Description

Cantilever type transverse piezoelectric driven deformable mirror and its assembly method

technical field

The invention belongs to the field of wavefront correction of optical adaptive optics systems, and in particular relates to a cantilever type transverse piezoelectric driven deformable mirror and an assembly method thereof, which are used for correcting wavefront aberrations of optical systems such as lasers.

Background technique

The widely used transverse piezoelectric deformable mirror is the core device of the adaptive optics system. Its structure includes piezoelectric ceramic drive, reflector, support fixture, related circuits and so on. These structures have a certain influence on the performance of the deformable mirror, and then affect the practicability of the adaptive system. Among them, the spatial distribution of piezoelectric actuator electrodes has a great influence on the ability to correct aberrations. The thickness of the lens and the thickness of the actuator have an impact on the deformation stroke. Sex etc. are affected.

The clamping method of the common transverse piezoelectric deformable mirror is to fix the lens by bonding, which limits the improvement of the deformation stroke. A more important problem is that most of the current deformable mirrors can only produce aberrations above the third term in the Zernike polynomial due to the spatial distribution of the regional electrodes and the structural form of the driver. The tilt and pitch aberrations of the first and second items are corrected by adding a tilt mirror in the optical path, which increases the cost and makes the optical path more complicated. Although some deformable mirrors can produce oblique aberration, there are too many structural parts, which reduces the stability of the deformable mirror.

Contents of the invention

The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art and provide a cantilever type transverse piezoelectric driven deformable mirror with simple structure, convenient manufacturing and installation, which can effectively improve the deformation stroke and generate pitch and tilt aberrations.

In order to solve the problems of the technologies described above, the present invention adopts the following technical solutions:

A cantilever type transverse piezoelectric driven deformable mirror, comprising a transverse shell, a piezoelectric driver, a reflector and an electrical connection assembly, the piezoelectric driver includes a middle disk and a plurality of arcs uniformly arranged along the outer peripheral wall of the middle disk cantilever, the reflector is glued on the middle disc, the middle disc of the piezoelectric driver is concentric with the inner hole of the transverse shell and is fixed to one end of the transverse shell through the free ends of each arc-shaped cantilever, so The electrical connection assembly is installed at the other end of the transverse shell and is connected with the middle disk and each arc-shaped cantilever through a wire.

As a further improvement of the above technical solution:

The free ends of each arc-shaped cantilever are connected with the transverse casing through an adjustment assembly.

The adjustment assembly includes an adjustment bolt and an adjustment nut. A through hole is provided at the free end of each arc-shaped cantilever, and the adjustment bolt is screwed to the adjustment nut after passing through the through hole and the end of the transverse shell.

The power connection assembly includes a circuit board and a wiring board, the circuit board is detachably installed at the end of the transverse shell and connected to the middle disc and each of the arc-shaped cantilevers through wires, the wiring board It is fitted in the inner hole of the transverse casing and is provided with a lead hole for the wire to pass through.

The outer end surface of the circuit board is provided with a plug for connecting to a power supply.

The circuit board is fixed to the end of the transverse shell through a plurality of locking bolts on the outer periphery.

A fan-shaped area electrode is provided on the side of the middle disc facing the transverse shell, the reflector is bonded to the other side of the middle disc, and a cantilever electrode is provided on the side of each arc-shaped cantilever facing the transverse shell. The other side is provided with a ground electrode, and the fan-shaped area electrode, each of the cantilever electrodes and the ground electrode are respectively connected to the electrical connection assembly through wires.

One end of the transverse casing connected to the piezoelectric driver is detachably provided with a mirror cover for covering the reflector.

An assembly method of the above-mentioned cantilever type transverse piezoelectric driven deformable mirror, comprising the following steps:

S1: Align the middle disc of the piezoelectric driver with the center of the reflector and bond them with epoxy resin glue to form a layer structure component, and weld the middle disc and the arc-shaped cantilever to the wires respectively;

S2: Fix the middle disc of the piezoelectric driver of the layer structure component concentrically with the inner hole of the transverse casing and fix it to one end of the transverse casing through the arc-shaped cantilever of the piezoelectric driver;

S3: Welding the other ends of the wires welded to the layer structure components to the power connection components respectively, and then installing the power connection components on the other end of the transverse shell;

S4: Connect the electrical connection components to the power supply.

Compared with the prior art, the present invention has the advantages of:

The cantilever type transverse piezoelectric driven deformable mirror of the present invention includes a transverse shell, a piezoelectric driver, a mirror and an electrical connection assembly, the piezoelectric driver includes a middle disk and a plurality of arc-shaped cantilever uniformly arranged along the outer peripheral wall of the middle disk, The reflector is bonded to the middle disc, the middle disc of the piezoelectric driver is concentric with the inner hole of the transverse shell and is fixed to one end of the transverse shell through the free ends of each arc-shaped cantilever, and the electrical connection component is installed on the transverse shell. The other end is also connected with the middle disc and each arc cantilever through a wire. First of all, when in use, the power connection component is connected to an external power supply to provide driving power for the piezoelectric driver, and the arc-shaped cantilever of the piezoelectric driver moves accordingly, driving the middle disc to tilt, so that the reflector on the middle disc can be tilted. The pitch tilt is generated, so that the deformable mirror can produce pitch and tilt aberration; secondly, the structural characteristics of the arc-shaped cantilever can effectively improve the deformation stroke of the deformable mirror; and the fan-shaped electrode on the middle disc can effectively correct multi-order Zernike aberration; finally , the deformable mirror has a simple structure and is convenient to manufacture and install. The assembly method of the cantilever type transverse piezoelectric drive deformation mirror of the present invention is simple and convenient to install.

Description of drawings

Fig. 1 is a schematic cross-sectional structure diagram of a cantilever type transverse piezoelectric driven deformable mirror of the present invention.

Fig. 2 is a schematic diagram of the three-dimensional structure of the cantilevered transverse piezoelectrically driven deformable mirror at the first viewing angle of the present invention.

FIG. 3 is a schematic perspective view of the second viewing angle of the cantilevered transverse piezoelectrically driven deformable mirror of the present invention.

Fig. 4 is a structural schematic view of the first viewing angle of the piezoelectric driver in the cantilevered transverse piezoelectric driven deformable mirror of the present invention.

Fig. 5 is a structural schematic diagram of the second viewing angle of the piezoelectric driver in the cantilevered transverse piezoelectric driven deformable mirror of the present invention.

Each label in the figure means:

1. Transverse housing; 2. Piezoelectric driver; 21. Middle disc; 211. Sector-shaped area electrode; 22. Arc-shaped cantilever; 221. Through hole; 222. Cantilever electrode; 223. Ground electrode; 3. Mirror; 4. Connecting component; 41. Circuit board; 411. Plug; 42. Wiring board; 421. Lead hole; 5. Adjusting component; 51. Adjusting bolt; 52. Adjusting nut; 6. Locking bolt; 7. Mirror cover .

Detailed ways

The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

Figures 1 to 5 show the cantilevered transverse piezoelectric-driven deformable mirror of this embodiment, including a transverse shell 1, a piezoelectric driver 2, a reflector 3 and an electrical connection assembly 4, and the piezoelectric driver 2 includes a middle disk 21 And three arc-shaped cantilevers 22 evenly arranged along the outer peripheral wall of the middle disc 21, the mirror 3 is bonded on the middle disc 21, the middle disc 21 of the piezoelectric driver 2 is concentric with the inner hole of the transverse shell 1 and passes through each The free end of the arc-shaped cantilever 22 is fixed on one end of the transverse shell 1, and the electrical connection assembly 4 is installed on the other end of the transverse shell 1 and is connected with the middle disk 21 and each arc-shaped cantilever 22 through wires. In this structure, the reflector 3 is glued on the middle disk 21 of the piezoelectric driver 2, and the middle disk 21 of the piezoelectric driver 2 is evenly arranged with three arc-shaped cantilevers 22 along its peripheral wall, and the middle circle of the piezoelectric driver 2 The disc 21 is concentric with the inner hole of the transverse casing 1 and fixed to one end of the transverse casing 1 through the free ends of the arc-shaped cantilevers 22 of the piezoelectric actuator 2 . When in use, the power connection assembly 4 is connected to an external power supply, and the power connection assembly 4 connected to the external power supply provides driving power for the piezoelectric actuator 2, and each arc-shaped cantilever 22 of the piezoelectric actuator 2 takes corresponding actions, such as an arc-shaped cantilever 22 holding When the other two arc-shaped cantilever arms 22 move, the middle disc 21 will be tilted or the tilt will increase or the tilt will decrease, so that the reflector 3 on the middle disc 21 will be pitched and tilted, so that the deformable mirror can Pitching and tilting aberrations are generated; the arc-shaped cantilever 22 has a large arc of variation, and the corresponding cooperation of each arc-shaped cantilever 22 can effectively improve the deformation stroke of the deformable mirror; the combination of the fan-shaped electrode 211 of the middle disc 21 can produce multi-order Zernike aberration form; due to the increase of the function of the pitch and tilt aberration, the structural complexity and process difficulty of the deformable mirror are reduced, and the deformation amount of each electrode influencing function on the deformable mirror and the deformation stroke of the reflector 3 are increased, so that the deformable mirror The structure is simple, and the manufacture and installation are convenient.

In this embodiment, the free ends of each arc-shaped cantilever 22 are connected to the transverse shell 1 through the adjustment assembly 5 . In this structure, the adjustment assembly 5 between the arc-shaped cantilever 22 and the transverse shell 1 can adjust the degree of tightness of the connection between the arc-shaped cantilever 22 and the transverse shell 1, so that the reflector 3 on the middle disc 21 can be adjusted relative to the transverse shell 1 inclination or distance.

In this embodiment, the adjusting assembly 5 includes adjusting bolts 51 and adjusting nuts 52, and the free ends of the three arc-shaped cantilevers 22 are provided with through holes 221. The total number of through holes 221 is the same, namely three sets, and each adjusting bolt 51 is threadedly connected with the corresponding adjusting nut 52 after passing through the corresponding through hole 221 and the end of the transverse shell 1 . In this structure, the three arc-shaped cantilevers 22 of the piezoelectric actuator 2 are fixed to the transverse shell 1 by three adjusting bolts 51 and three adjusting nuts 52, and the three adjusting bolts 51 pass through the three arc-shaped cantilevers 22 respectively. The through hole 221 of the through hole 221 and the end of the transverse casing 1 are threadedly connected with the corresponding adjusting nut 52 respectively, so as to connect the arc-shaped cantilever 22 and the transverse casing 1, and the tightening degree of the adjusting bolt 51 and the adjusting nut 52 can be adjusted. Adjust the degree of tightness between each arc-shaped cantilever 22 and the transverse casing 1 .

In this embodiment, the electrical connection assembly 4 includes a circuit board 41 and a wiring board 42. The circuit board 41 is detachably installed at the end of the transverse shell 1 and connected to the middle disc 21 and each arc-shaped cantilever 22 through wires. The wiring board 42 is set in the inner hole of the transverse shell 1 and is provided with a lead hole 421 for the wire to pass through. In this structure, the circuit board 4 is connected with the middle disk 21 and each arc-shaped cantilever 22 through wires, and the circuit board 4 is used to meet the circuit requirements of each driving part or other parts in the piezoelectric driver 2, and is the main component of the piezoelectric driver 2. Corresponding power is provided for the required parts; the circuit board 41 is detachably installed at the end of the transverse shell 1, which facilitates the disassembly of the circuit board 41 and the maintenance or replacement of each wire, and is more convenient for the coordinated installation of the overall components.

In this embodiment, a plug 411 for connecting to a power source is installed on the outer surface of the circuit board 41 . In this structure, the plug 411 of the circuit board 41 is used to communicate with an external power source to provide power for the circuit board 41 and the piezoelectric driver 2 .

In this embodiment, the circuit board 41 is fixed on the end of the transverse casing 1 by six locking bolts 6 on the outer periphery. In this structure, the circuit board 41 is fixedly connected to the end of the transverse casing 1 by selecting ordinary locking bolts 6, which can not only achieve the fixing effect, but also reduce the required production cost.

In this embodiment, the side of the middle disc 21 facing the transverse casing 1 is provided with a fan-shaped area electrode 211, the reflector 3 is bonded to the other side of the middle disc 21, and each arc-shaped cantilever 22 is provided with a side facing the transverse casing 1. The other side of the cantilever electrode 222 is provided with a ground electrode 223 , and the fan-shaped area electrode 211 , each cantilever electrode 222 and the ground electrode 223 are respectively connected to the electrical connection assembly 4 through wires. In this structure, the fan-shaped area electrode 211 of the middle disk 21 of the piezoelectric driver 2 and the cantilever electrode 222 of each arc-shaped cantilever 22 pass through the lead hole 421 of the wiring board 42 and the circuit board 41 of the electrical connection assembly 4 respectively through the wire. The corresponding electrodes are connected to better realize the circuit layout of the piezoelectric driver 2, so that the cantilevered transverse piezoelectric-driven deformable mirror can achieve more stable performance.

In this embodiment, one end of the lateral housing 1 connected to the piezoelectric driver 2 is detachably provided with a mirror cover 7 for covering the reflector 3 . In this structure, one end of the transverse casing 1 connected to the piezoelectric driver 2 is provided with a mirror cover 7, and the mirror cover 7 is used to cover the reflector 3 to prevent the reflector 3 from being polluted by the external environment. The mirror cover 7 is detachable installed on the lateral housing 1, which facilitates the installation or replacement of the reflector 3 and the piezoelectric actuator 2.

An assembly method of the above-mentioned cantilever type transverse piezoelectric driven deformable mirror, comprising the following steps:

S1: Align the middle disc 21 of the piezoelectric actuator 2 with the center of the reflector 3 and bond them with epoxy resin glue to form a layer structure component, and weld the middle disc 21 and the arc-shaped cantilever 22 to the wires respectively;

S2: Fix the middle disk 21 of the piezoelectric driver 2 of the layer structure component concentrically with the inner hole of the transverse shell 1 and fix it to one end of the transverse shell 1 through the arc-shaped cantilever 22 of the piezoelectric driver 2;

S3: Weld the other ends of the wires welded to the layer structure components with the power connection component 4 respectively, and then install the power connection component 4 on the other end of the transverse shell 1;

S4: connect the power connection assembly 4 to the power supply.

The assembly method of the cantilever type transverse piezoelectric drive deformable mirror, firstly, the piezoelectric driver 2 and the reflector 3 are bonded to form a layer structure component, and the piezoelectric driver 2 bonded with the reflector 3 is installed and fixed on the lateral housing 1 At one end, the electrical connection assembly 4 is connected to the piezoelectric driver 2 through wires, and then installed on the other end of the transverse shell 1, and the installation method of each part can be detachable, so that the installation of each part is simple and convenient. At the same time, each part The replacement is also simple and convenient.

Although the present invention has been disclosed above with preferred embodiments, it is not intended to limit the present invention. Any person familiar with the art, without departing from the scope of the technical solution of the present invention, can use the technical content disclosed above to make many possible changes and modifications to the technical solution of the present invention, or modify it into an equivalent implementation of equivalent changes example. Therefore, any simple modifications, equivalent changes and modifications made to the above embodiments according to the technical essence of the present invention shall fall within the protection scope of the technical solution of the present invention.

Claims (9)

1. a kind of cantilevered transverse direction Piezoelectric Driving distorting lens, it is characterised in that：Including lateral valve jacket（1）, piezoelectric actuator（2）、 Speculum（3）With connect electrical component（4）, the piezoelectric actuator（2）Including intermediate disc（21）And along intermediate disc（21）Outside The multiple arcs cantilever that peripheral wall is evenly arranged（22）, the speculum（3）It is bonded in the intermediate disc（21）On, the piezoelectricity Driver（2）Intermediate disc（21）With lateral valve jacket（1）Endoporus is concentric and passes through each arc cantilever（22）Free end fix In lateral valve jacket（1）One end, it is described to connect electrical component（4）Mounted on lateral valve jacket（1）The other end and pass through conducting wire with it is intermediate Disk（21）And each arc cantilever（22）Connection.

2. cantilevered transverse direction Piezoelectric Driving distorting lens according to claim 1, it is characterised in that：Each arc cantilever

（22）Free end pass through adjusting part（5）With lateral valve jacket（1）Connection.

3. cantilevered transverse direction Piezoelectric Driving distorting lens according to claim 2, it is characterised in that：The adjusting part（5） Including adjusting bolt（51）And adjusting nut（52）, each arc cantilever（22）Free end be equipped with through-hole（221）, the tune Save bolt（51）Across through-hole（221）With lateral valve jacket（1）End after with adjusting nut（52）It is threadedly coupled.

4. cantilevered transverse direction Piezoelectric Driving distorting lens according to any one of claim 1 to 3, it is characterised in that：It is described Connect electrical component（4）Including circuit board（41）And terminal plate（42）, the circuit board（41）It is removably mounted to the lateral shell Set（1）End simultaneously passes through conducting wire and the intermediate disc（21）And each arc cantilever（22）Connection, the terminal plate （42）It is set in the lateral valve jacket（1）Endoporus simultaneously offers the fairlead passed through for the conducting wire（421）.

5. cantilevered transverse direction Piezoelectric Driving distorting lens according to claim 4, it is characterised in that：The circuit board（41）Outside End face is installed with the plug for being connected to power supply（411）.

6. cantilevered transverse direction Piezoelectric Driving distorting lens according to claim 5, it is characterised in that：The circuit board（41）In Outer periphery passes through multiple clamping screws（6）It is fixed on the lateral valve jacket（1）End.

7. cantilevered transverse direction Piezoelectric Driving distorting lens according to any one of claim 1 to 3, it is characterised in that：It is described Intermediate disc（21）Towards the lateral valve jacket（1）One side be equipped with sector region electrode（211）, the speculum（3）Bonding In intermediate disc（21）Another side, each arc cantilever（22）Towards lateral valve jacket（1）One side be equipped with cantilever electrode （222）, another side is equipped with grounding electrode（223）, the sector region electrode（211）, each cantilever electrode（222）And Grounding electrode（223）Electrical component is connect with described by conducting wire respectively（4）Connection.

8. cantilevered transverse direction Piezoelectric Driving distorting lens according to any one of claim 1 to 3, it is characterised in that：It is described Lateral valve jacket（1）It is connected to piezoelectric actuator（2）One end detachable be installed with for covering the speculum（3）Mirror cover （7）.

9. a kind of assembly method of cantilevered transverse direction Piezoelectric Driving distorting lens described in any item of the claim 1 to 8, feature It is：Include the following steps：

S1：By piezoelectric actuator（2）Intermediate disc（21）With speculum（3）Center be aligned and carried out by epoxide-resin glue Bonding constitutes layer structure member, and by intermediate disc（21）And arc cantilever（22）It is welded respectively with conducting wire；

S2：By the piezoelectric actuator of the layer structure member（2）Intermediate disc（21）With the lateral valve jacket（1）Endoporus is concentric And pass through piezoelectric actuator（2）Arc cantilever（22）It is fixed on the lateral valve jacket（1）One end；

S3：By the other end of each conducting wire welded with the layer structure member respectively with connect electrical component（4）Welding, then electric group will be connect Part（4）Mounted on the lateral valve jacket（1）The other end；

S4：Electrical component will be connect（4）It is connected to power supply.