CN108983252B - Double-beam super-resolution positioning system and method - Google Patents
Double-beam super-resolution positioning system and method Download PDFInfo
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- CN108983252B CN108983252B CN201810852155.6A CN201810852155A CN108983252B CN 108983252 B CN108983252 B CN 108983252B CN 201810852155 A CN201810852155 A CN 201810852155A CN 108983252 B CN108983252 B CN 108983252B
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Abstract
The invention relates to a double-beam super-resolution positioning system, which realizes that a space region which emits fluorescence after being superposed on a fluorescent material has smaller characteristic dimension than that of the fluorescent material when only excitation light exists through the superposition effect of the excitation light and loss light on the fluorescent layer, thereby realizing the position observation of the fluorescent material with higher spatial resolution, leading the response intensity of a photoelectric detector to reach a peak value when the focus center of the double beams just falls on the fluorescent layer, leading the response intensity of the photoelectric detector to the fluorescence to be sharply reduced when the focus center of the double beams deviates from the fluorescent layer, leading the reduction amplitude to be larger than the response condition when only single beam excitation light exists, leading a controller to control a moving device to rapidly adjust the position of a sample, and further realizing more accurate positioning than the single beam excitation light. The invention also provides a double-beam super-resolution positioning method.
Description
Technical Field
The invention relates to the technical field of precision positioning, in particular to a double-beam super-resolution positioning system and method.
Background
At present, a lens group is generally adopted for short-distance positioning to modulate a light beam, a focus after the light beam is focused is carried on an object, and the relative position of the lens group and the object is obtained by detecting the change of the light intensity of a focusing light spot reflected by the object through a detector. When the relative distance between the lens group and the object deviates, the focusing position of the focusing light spot on the object changes, and the electric signals after the light intensity reflected to the detector is converted can have obvious difference. In the optoelectronic device, when the positioning is below millimeter level, especially the non-contact positioning is required, the laser positioning is one of the necessary means. For example, in an optical disc drive, when an optical head axially positions a disc surface, laser is focused through a cylindrical mirror, and when the disc surface is at a focus, a standard circular spot is reflected back to a four-quadrant detector; if the light source is close to the objective lens, a transverse elliptical light spot is reflected back; if the light beam is far from the objective lens, a longitudinal elliptical light spot is reflected. The three conditions are mainly because the cylindrical mirror can cause the distortion of a focusing light spot emitted by the disk, so that the energy distribution fed back on the detector is different at different distances, the relative distance between the current optical head and the disk can be known by measuring the electric signal of the detector, and then the relative position is adjusted by feedback so that the focus of the focusing light just hits on the disk surface.
In an optical system, laser is focused on a focal plane to be converged into a point, the size of the focal point is generally in micron and submicron order, the focal point is reflected by a reflecting system, the light spot can only be diffused to be larger, when the positioning is carried out based on the distance to cause the light spot distortion or other forms of light intensity changes, because the light intensity distribution of the focal plane of the focused light spot is a wave packet with wider half-height width, a detector has detection resolution, namely, the light spot light intensity changes caused by the small distance changes are not large enough, and the detector cannot identify the small distance changes under the high-precision requirement.
An ideal point light source is focused and projected on a screen through an optical system, the light intensity distribution of the ideal point light source is in a Gaussian line shape, the full width at half maximum of the light intensity distribution line shape is calculated according to a point spread function, and the full width at half maximum of the light intensity distribution line shape is approximately equal to half of the used light broadcast under the ideal condition. The focused reflected light is reflected back to the detector through the lens, and the light intensity is dispersed into a Gaussian line shape again. When the relative distance between the detector and the lens needs to be kept constant during the movement, once the relative distance between the lens and the object changes, the change can cause the change of the feedback signal measured by the detector, namely the change of the intensity distribution of the reflected light fed back to the detector. Finally, the amplitude of the signal variation on the detector is closely related to the light intensity distribution waveform on the detector. Generally, the smaller the full width at half maximum of the light intensity distribution waveform, the larger the signal variation amplitude thereof.
In addition, when two identical points on the same plane are detected, if the distance between the two points is greater than the half-height width of the light intensity distribution of the reflected light on the detector, the detector can distinguish the two different points twice, but when the distance between the two points is less than the half-height width of the light intensity distribution of the reflected light on the detector, two signals are superposed to form an indistinguishable waveform, and the detector cannot distinguish the two signals. Since the light intensity distribution of the light beam on the detector has a large intensity distribution width, the conventional laser form is not suitable for position detection and positioning with nanometer accuracy.
Based on the analysis, the change of the parameters of the cylindrical mirror and the detection precision of the detector are not considered, and the current factors limiting the laser to perform nanometer precision detection in a short distance from the laser perspective are that any optical system has diffraction phenomena, so that the laser spot size cannot be focused on a nanometer scale, and the light intensity distribution in the spots is not concentrated enough.
Disclosure of Invention
The present invention is directed to provide a dual-beam super-resolution positioning system.
The technical scheme adopted by the invention is as follows:
a dual beam super-resolution positioning system, comprising:
the sample is provided with a fluorescent layer and is placed on the moving device;
the light beam forming device comprises a first light beam emitter and a second light beam emitter, wherein light beams emitted by the first light beam emitter form exciting light, the exciting light is used for irradiating the fluorescent layer to enable the performance or the state of fluorescent materials in the fluorescent layer to be changed, light beams emitted by the second light beam emitter are modulated through a phase plate to form lost light, the lost light is used for irradiating the fluorescent layer to enable the performance or the state change of the fluorescent materials generated by the fluorescent materials under the irradiation of the exciting light to be partially or completely inhibited or weakened, and at least one of the exciting light and the lost light is a light beam which enables the fluorescent materials in the fluorescent layer to emit fluorescence;
the beam shaping assembly is used for guiding the light focus focused by the exciting light and the loss light shaping to the fluorescent layer and exciting a fluorescent material in the fluorescent layer to emit fluorescent light;
a photodetector for detecting the intensity of the fluorescent light emitted from the fluorescent material in the fluorescent layer;
the controller is respectively connected with the photoelectric detector, the light beam forming device and the moving device;
the controller controls the light beam forming device to emit exciting light and loss light to the sample, the exciting light and the loss light act on the fluorescent layer on the sample, fluorescent light emitted by fluorescent materials in the fluorescent layer is fed back to the controller after the light intensity of the fluorescent light is detected by the photoelectric detector, and the controller determines whether to adjust the moving device to enable the sample to move and determines the moving position amplitude of the sample according to the light intensity information detected by the photoelectric detector.
The invention has the beneficial effects that: according to the invention, through the superposition effect of the exciting light and the loss light on the fluorescent material in the fluorescent layer, the space area of the fluorescent material emitting fluorescence after the superposition effect is carried out on the fluorescent material has smaller characteristic size than that of the fluorescent material emitting only exciting light, so that the position observation of the fluorescent material with higher spatial resolution is realized, the response intensity of the photoelectric detector reaches the peak value when the focus of the light beam just falls on the fluorescent layer, and the response intensity of the photoelectric detector on the fluorescence is sharply reduced when the focus of the light beam deviates from the fluorescent layer, so that the controller controls the mobile device to rapidly adjust the position of the sample.
The invention also provides a double-beam super-resolution positioning method, which comprises the following steps:
s1, placing the sample containing the fluorescent layer on a mobile device, and sending the position information of the mobile device to a controller;
s2, the controller respectively controls the first light beam emitter and the second light beam emitter to emit light beams, the light beam emitted by the first light beam emitter forms exciting light to irradiate the fluorescent layer so as to change the performance or state of the fluorescent material in the fluorescent layer, the light beam emitted by the second light beam emitter forms lost light through phase modulation, the lost light is used for irradiating the fluorescent layer so that the performance or state change of the fluorescent material, which is generated by the fluorescent material under the irradiation of the exciting light, is partially or completely inhibited or weakened, and at least one of the exciting light and the lost light can enable the fluorescent material in the fluorescent layer to emit fluorescence;
s3, guiding the light focus after shaping and focusing the exciting light and the loss light to the fluorescent layer, guiding the fluorescence emitted by the fluorescent material in the fluorescent layer after being excited to a photoelectric detector, detecting the light intensity of the fluorescence by the photoelectric detector, and feeding the light intensity signal back to the controller;
s4, the controller determines whether to adjust the moving device to move the sample and the moving position amplitude of the sample according to the light intensity information detected by the photoelectric detector.
Drawings
The drawings referred to in the description of the embodiments of the present invention are briefly introduced to facilitate a clearer and more complete description of the technical solutions in the embodiments of the present invention, and the following drawings are only directed to some embodiments of the present invention, and are not intended to limit the present invention, and it is obvious that other drawings may be derived from the drawings without performing other inventive works.
FIG. 1 is a schematic structural diagram of a dual-beam super-resolution positioning system according to the present invention;
FIG. 2 is a schematic diagram of the principle of stimulated radiation loss microscopy, wherein (a) a schematic diagram of transition between electron energy levels, (b) a schematic diagram of light intensity of a double light beam, and (c) a schematic diagram of planar distribution of excitation light, loss light and a light spot formed by superposition of the excitation light and the loss light;
FIG. 3 is a schematic diagram of the ground state loss principle;
FIG. 4 is a schematic view of the positioning principle of the positioning system in the vertical direction, in which (a) is a schematic view of the laser spot falling on the fluorescent layer, and (b) is a comparison graph of the light intensity variation of the single beam and the double beam under the same displacement variation;
fig. 5 is a schematic diagram of a positioning principle of the positioning system in the horizontal direction, in which (a) is a schematic diagram of a dual-beam laser spot falling on a fluorescent layer, (b) is a schematic diagram of a dual-beam laser spot moving horizontally on a sample, and (C) is a schematic diagram of a light intensity change when the dual-beam laser spot moves in the horizontal direction.
Detailed Description
The principles and features of this invention are described below in conjunction with the following drawings, which are set forth by way of illustration only and are not intended to limit the scope of the invention.
As shown in fig. 1-4, the present invention provides a dual-beam super-resolution positioning system, comprising:
(1) a sample 1 provided with a fluorescent layer 7, the sample being placed on a moving device 2;
(2) the light beam forming device comprises a first light beam emitter 301 and a second light beam emitter 302, wherein a light beam emitted by the first light beam emitter forms exciting light, the exciting light is used for irradiating the fluorescent layer to enable the performance or the state of a fluorescent material in the fluorescent layer to be changed, a light beam emitted by the second light beam emitter is modulated by a phase plate 303 to form lost light, the lost light is used for irradiating the fluorescent layer to enable the performance or the state change of the fluorescent material, which is generated by the fluorescent material under the irradiation of the exciting light, to be partially or completely inhibited or weakened, at least one of the exciting light and the lost light is a light beam which enables the fluorescent material in the fluorescent layer to emit fluorescence, and the first light beam emitter and the second light beam emitter are both lasers;
(3) the beam shaping assembly 4 is used for guiding the light focus focused by the exciting light and the loss light shaping to the fluorescent layer and exciting a fluorescent substance in the fluorescent layer to emit fluorescent light;
(4) a photodetector 5 for detecting the light intensity of the fluorescence emitted by the fluorescent material in the fluorescent layer;
(5) the controller 6 is respectively connected with the photoelectric detector, the light beam forming device and the moving device;
the controller controls the light beam forming device to emit exciting light and loss light to the sample, the exciting light and the loss light act on the fluorescent layer on the sample, fluorescent light emitted by fluorescent materials in the fluorescent layer is fed back to the controller after the light intensity of the fluorescent light is detected by the photoelectric detector, and the controller determines whether to adjust the moving device to enable the sample to move and the moving position amplitude of the sample.
The double-beam super-resolution is different from the traditional laser positioning in the aspect of laser positioning, and two beams of laser are used as detection light. A phase plate is added in the modulation of the loss light, and the loss light can be converged at a focus to form a hollow light spot with zero central light intensity. The double light beams act on the fluorescent material of the fluorescent layer, the two light beams have different feedbacks to the effect of the fluorescent material, generally, the loss light loses the effect of the exciting light on the fluorescent material, and the loss light and the effect of the exciting light on the fluorescent material are in a competitive relationship.
The double-beam super-resolution positioning technology in the invention can adopt the stimulated radiation loss microscopic principle. This theory derives from einstein's stimulated emission theory and is creatively used in microscopy by stefin-heir. The principle mainly comprises the following contents: two beams of strictly coaxial laser, wherein one beam of the strictly coaxial laser is exciting light, the other beam of the strictly coaxial laser is loss light, the loss light is modulated by a vortex phase plate or a space light phase modulator with equivalent function, a hollow light spot is formed at a focus, and the central light intensity is zero; the exciting light forms a Gaussian-shaped light intensity distribution spot at the focus after being focused. As shown in fig. 2, (a) shows an electron energy level transition diagram, in which excitation light can excite electrons at a low energy level in a fluorescent substance from a ground state to an excited state, the electrons cannot exist stably at an upper energy level, and relax from the excited state to the ground state, fluorescence is emitted along with the emission of the fluorescence, and the light frequency of the fluorescence is set to ν 0; the frequency v 1 of the outer-layer annular loss light is slightly smaller than v 0, because the ground state is generally a multiple state, the energy level difference matched with the wavelength v 1 exists, the loss light can form resonance with excited-state electrons of fluorescent substances, so that the fluorescent substances are transited back to the ground state in the form of excited radiation, the wavelength of the light radiated under the excited radiation is consistent with the wavelength, the phase and the direction of the annular loss light, and when the loss light is strong enough, only the focus center of the exciting light can radiate signal light of v 0, so that the overlapped part of the loss light and the exciting light can effectively inhibit the action of the exciting light, and the spot size of the radiation signal light v 0 on the fluorescent material is reduced in a phase-changing manner. (b) The light intensity diagram shows the distribution of the double light beams, the light intensity of the loss light at the center of the exciting light is zero, and the light intensity is gradually enhanced along the two sides of the center of the focus; (c) a light intensity diagram showing the effect of the superposition of the two beams, which is equivalent to (b), from which it can be seen that the effective excitation light effect range is significantly reduced; (d) and the plane distribution of the exciting light, the loss light and the light spot after the superposition of the exciting light and the loss light is shown, wherein A represents the exciting light, B represents the loss light, and C represents the light spot of radiation signal light v 0 on the fluorescent material after the superposition of the exciting light and the loss light.
The two-beam super-resolution technology in the invention can also adopt the ground state loss principle, the principle is shown in figure 3, the outer ring annular loss light adopts strong laser to excite the peripheral fluorescent material to a very high energy state, the excited electrons slowly jump back to a non-luminous triplet state, and at the moment, the material which is only in the central area and can be excited by the excitation light to emit fluorescence can be excited, so that the effective excitation light action range can be reduced.
The invention provides a double-beam super-resolution positioning system which can perform precise positioning in the vertical direction and can also realize precise positioning in the horizontal direction. In the embodiment, a plurality of parallel fluorescent bands with equal intervals are stamped or attached on the sample, the width of each fluorescent band is different from 10 nm to 1000nm, and the center interval between adjacent fluorescent bands is different from 10 nm to 5000 nm.
When the light focus of the double-beam laser is converged on the fluorescent layer, the peak light intensity of the double-beam laser acts on the fluorescent layer, the intensity of the fluorescent light emitted by the fluorescent material collected by the photoelectric detector reaches the peak value, and when the light focus of the double-beam laser is not on the fluorescent layer, the fluorescent intensity of the fluorescent material is sharply reduced, and the signal on the photoelectric detector is correspondingly sharply reduced. As shown in the graph (b), if the conventional single-beam focusing detection is adopted, since the half-height width is large, when the light focus of the laser deviates from the fluorescent layer, the variation of the fluorescence intensity is not large as that of the double-beam system, and the variation of the signal intensity detected by the corresponding photodetector is also not large as that of the double-beam system. Therefore, in the photoelectric detector, under the same displacement change, the double-beam system is more sensitive than the single-beam system. According to the double-beam super-resolution positioning system, when positioning is carried out in the horizontal direction, the moving device drags the sample to move in the horizontal direction, the double-beam laser firstly carries out positioning in the vertical direction, as shown in fig. 5(a), the light focus of the laser is firstly ensured to fall on the fluorescent material, then as shown in fig. 5(b), the beam is moved in the horizontal direction, the principle is similar to that in the vertical positioning, and the fluorescent response of the fluorescent material is also utilized. As shown in FIG. 5(c), because of the dual-beam system, the annular loss light can suppress the influence of the excitation light, the effective full width at half maximum decreases with the increase of the suppressed light power of the outer ring, and when the optical scanning device is used for scanning the imprinted fluorescent strip with a narrow spacing, the interference of the fluorescence of the adjacent materials can be shielded. When the double-beam light focus is scanned on the fluorescent material, the response intensity of the photoelectric detector reaches a peak value, and when the double-beam light focus is slightly deviated from the surface of the fluorescent material, the fluorescence response intensity of the photoelectric detector on the fluorescent material is sharply reduced. The transverse displacement of the sample can be judged according to the distribution relation of the intensity and the transverse distance in a single period of the response signal of the photoelectric detector and the change of a plurality of periodic signals.
The fluorescent material used in the invention can be stamped or attached to the surface of an object to be detected, the fluorescent material needs to be in a solid phase or a liquid phase, and can be in a film shape or a granular shape when the fluorescent material is in the solid phase, and the particles can be uniformly or non-uniformly dispersed; when the liquid phase is used, it may be in the form of a gel. The fluorescent material can radiate fluorescence under the excitation of external laser. The fluorescent materials have the properties of excited loss or ground state emptying and the like under the action of laser, mainly utilize the property that the materials have multiple states in the ground state and the excited state, and utilize the interaction between the laser and the energy states. These fluorescent materials generally include, but are not limited to, organic or inorganic fluorescent materials such as quantum dot materials, aggregation-induced emission materials, rare earth materials, metal-organic complexes, and the like.
The excitation light and the loss light mentioned in the invention have opposite effects on the fluorescent material, and laser can be used but not limited to the laser; the excitation light and the loss light mentioned in the present invention may be different or the same wavelength light. The excitation light and the loss light mentioned in the present invention may be pulsed light or continuous light.
The present invention includes, but is not limited to, the following application examples. The excitation light and the loss light in the present invention are not limited to being focused in the form of a single spot. The exciting light and the loss light can be modulated into a multi-focus light spot array in linear distribution or planar distribution by utilizing a grating or a spatial light modulator, the multi-focus light spot array is used for realizing high-precision horizontal positioning of a horizontal plane and detecting the surface evenness of a sample, the sample to be detected needs to be printed or attached with a layer of fluorescent material in advance, and a row of horizontal optical detectors are needed for fluorescent detection; a plurality of photodetectors are formed into a rectangular shape or other shapes, and it is important that the photodetectors correspond to the light focuses one to one. Such a detector may be a CCD or CMOS device, or may be a detector array formed by splicing single-point detectors.
The invention can also be used for positioning the relative position of the optical head and the optical disc in an optical disc drive. Because the common optical disc has jitter during operation, the focusing light spot of the optical head does not necessarily fall on the recording layer of the optical disc, so that the relative distance between the optical head and the disc surface needs to be kept consistent, and the positioning is called axial positioning, namely vertical positioning; during the rotation of the optical disc, it is necessary to find the precise data bits for reading/writing, and this positioning is called radial positioning, i.e. horizontal positioning. In the conventional positioning method, due to the size limitation of the light spot, if a plurality of tracks exist in the scanning range and the track spacing is too close, the detector cannot distinguish clearly, so that the data tracks of the optical disc cannot be made denser, and the improvement of the storage density of the optical disc is limited. By adopting the positioning system and the method provided by the invention, the limit of diffraction limit can be broken through, and a novel PB-level optical memory with ultrahigh storage density is realized.
The present invention is not limited to the above preferred embodiments, and any modifications, equivalent replacements, improvements, etc. within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A dual-beam super-resolution positioning system, comprising:
the sample is provided with a fluorescent layer and is placed on the moving device;
the light beam forming device comprises a first light beam emitter and a second light beam emitter, wherein a light beam emitted by the first light beam emitter forms exciting light, the exciting light is used for irradiating the fluorescent layer to enable the performance or the state of the fluorescent material in the fluorescent layer to be changed, light beams emitted by the second light beam emitter are modulated through a phase plate to form lost light, the lost light is used for irradiating the fluorescent layer to enable the performance or the state change of the fluorescent material, which is generated by the fluorescent material under the irradiation of the exciting light, to be partially or completely inhibited or weakened, and at least one of the exciting light and the lost light is a light beam which enables the fluorescent material in the fluorescent layer to emit fluorescence;
the beam shaping assembly is used for guiding the light focus focused by the exciting light and the loss light shaping to the fluorescent layer and exciting a fluorescent substance in the fluorescent layer to emit fluorescent light;
a photodetector for detecting the intensity of the fluorescent light emitted from the fluorescent material in the fluorescent layer;
the controller is respectively connected with the photoelectric detector, the light beam forming device and the moving device;
the controller controls the light beam forming device to emit exciting light and loss light to the sample, the exciting light and the loss light act on a fluorescent layer on the sample, fluorescent light emitted by fluorescent materials in the fluorescent layer is fed back to the controller after the light intensity of the fluorescent light is detected by the photoelectric detector, and the controller determines whether to adjust the moving device to enable the sample to move and the moving position amplitude of the sample.
2. The dual beam super resolution positioning system of claim 1, wherein the phosphor layer is in a solid or liquid phase.
3. The dual-beam super-resolution positioning system according to claim 2, wherein the light beam is focused by the lens to form a single-focus light spot, the light focus of the excitation light is a solid ellipsoidal light spot, the light focus of the loss light is a hollow light spot with zero central light intensity, and the centers of the excitation light and the light spot of the loss light coincide.
4. The dual-beam super-resolution positioning system according to claim 2, wherein the beam is modulated by a grating or a spatial light modulator and focused by a lens to form a multi-focus spot array, the detector is a linear or planar array so as to correspond to the linearly or planar distributed light focuses one by one, a single light focus in the multi-focus spot array of the excitation light is a solid ellipsoidal spot, a single light focus in the multi-focus spot array of the loss light is a hollow spot with zero central light intensity, the excitation light corresponds to the light focus of the loss light one by one, and the central positions of the two spots coincide one by one.
5. A two-beam super-resolution positioning system as claimed in any of claims 2 to 4, wherein the fluorescent material in the fluorescent layer has a triplet state.
6. A double-beam super-resolution positioning method is characterized by comprising the following steps:
s1, placing the sample containing the fluorescent layer on a mobile device, and sending the position information of the mobile device to a controller;
s2, the controller respectively controls the first light beam emitter and the second light beam emitter to emit light beams, the light beam emitted by the first light beam emitter forms exciting light to irradiate the fluorescent layer so as to change the performance or state of the fluorescent material in the fluorescent layer, the light beam emitted by the second light beam emitter forms lost light through phase modulation, the lost light is used for irradiating the fluorescent layer so that the performance or state change of the fluorescent material, which is generated by the fluorescent material under the irradiation of the exciting light, is partially or completely inhibited or weakened, and at least one of the exciting light and the lost light can enable the fluorescent material in the fluorescent layer to emit fluorescence;
s3, guiding the light focus formed by shaping and focusing the exciting light and the loss light to the fluorescent layer, guiding the fluorescence emitted by the fluorescent material in the fluorescent layer to a photoelectric detector, detecting the light intensity of the fluorescence by the photoelectric detector, and feeding the light intensity signal back to the controller;
s4, the controller determines whether to adjust the moving device to move the sample and the moving position amplitude of the sample according to the light intensity information.
7. The dual-beam super-resolution positioning method according to claim 6, wherein the change in the property or state of the fluorescent material in step S2 is specifically: the exciting light excites the fluorescent material in the fluorescent layer to emit fluorescence; the partial or total inhibition of the property or state change of the fluorescent material with changed property or state in step S2 is specifically: the lost light causes the fluorescent material emitting fluorescence to emit light having a wavelength different from the wavelength of fluorescence detected by the photodetector in step S3.
8. The dual-beam super-resolution positioning method according to claim 6, wherein the change in the property or state of the fluorescent material in step S2 is specifically: the exciting light excites the fluorescent material in the fluorescent layer to emit fluorescence; the partial or total inhibition of the property or state change of the fluorescent material with changed property or state in step S2 is specifically: the lost light causes a fluorescent material that emits fluorescent light to not emit the fluorescent light or to decrease the fluorescent light.
9. A dual-beam super-resolution positioning method according to any one of claims 6 to 8, wherein the light focus after shaping in step S3 is specifically: and focusing the exciting light and the loss light through an objective lens to form a single-focus light spot.
10. A dual-beam super-resolution positioning method according to any one of claims 6 to 8, wherein the light focus after shaping in step S3 is specifically: modulating the exciting light and the loss light by a grating or a spatial light modulator, and focusing by a lens to form a multi-focus light spot array distributed linearly or in a plane; the detecting of the light intensity in S3 specifically includes: and detecting the linearly or planarly distributed optical focuses by using linearly or planarly distributed detectors, wherein the detectors correspond to the optical focuses one by one.
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| CN110568650B (en) * | 2019-09-10 | 2020-10-30 | 浙江大学 | Common-path light beam modulation device for imaging and photoetching system |
| AU2020379227A1 (en) * | 2019-11-08 | 2022-04-21 | Nanotemper Technologies Gmbh | Characterization of particles in solution |
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| CN117831587B (en) * | 2023-12-07 | 2025-03-18 | 中国科学院上海光学精密机械研究所 | Optical storage medium and super-resolution information reading and writing method and device based on the medium |
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