CN109639197B - Coil current switching algorithm based on motion system of photoetching machine magnetic suspension planar motor - Google Patents
Coil current switching algorithm based on motion system of photoetching machine magnetic suspension planar motor Download PDFInfo
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- CN109639197B CN109639197B CN201811574277.XA CN201811574277A CN109639197B CN 109639197 B CN109639197 B CN 109639197B CN 201811574277 A CN201811574277 A CN 201811574277A CN 109639197 B CN109639197 B CN 109639197B
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P21/00—Arrangements or methods for the control of electric machines by vector control, e.g. by control of field orientation
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P21/00—Arrangements or methods for the control of electric machines by vector control, e.g. by control of field orientation
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Abstract
本发明提供了一种基于光刻机磁悬浮平面电机运动系统的线圈电流切换算法，首先建立平面电机动子的六自由度受力与线圈电流之间的耦合方程，然后根据平面电机动子在运动过程中，动子线圈是否会离开磁钢阵列正上方，将动子线圈分为切换组和非切换组，再根据线圈离开磁钢阵列的方式，将切换组又分为突变切换组和渐变切换组；对突变切换组采用S函数作为电流切换权重函数，对渐变切换组采用余弦函数作为电流切换权重函数，以所有线圈电流矢量的二范数最小为目标，对力与电流的耦合方程进行求解得到各线圈电流值。本发明能够尽可能地减小平面电机线圈的发热损耗，同时实现动圈式磁悬浮平面电机动子全运动范围内线圈电流的光滑切换。
The invention provides a coil current switching algorithm based on a motion system of a magnetic levitation plane motor of a lithography machine. First, a coupling equation between the force of six degrees of freedom of the plane motor mover and the coil current is established, and then according to the movement of the plane motor mover During the process, whether the mover coil will leave directly above the magnetic steel array, divide the mover coil into a switching group and a non-switching group, and then divide the switching group into a sudden switching group and a gradual switching group according to the way the coil leaves the magnetic steel array. For the sudden switching group, the S function is used as the current switching weight function, and for the gradual switching group, the cosine function is used as the current switching weight function, and the two-norm minimum of all coil current vectors is used as the goal to solve the coupling equation of force and current. Obtain the current value of each coil. The invention can reduce the heating loss of the plane motor coil as much as possible, and simultaneously realize the smooth switching of the coil current within the full movement range of the mover of the moving coil type magnetic levitation plane motor.
Description
Technical Field
The invention relates to the technical field of semiconductor equipment, in particular to a coil current switching algorithm based on a motion system of a magnetic suspension planar motor of a photoetching machine.
Background
The planar motor directly utilizes electromagnetic energy to generate two-dimensional planar motion, and has the characteristics of high precision, high output density, quick response and the like, thereby having important application prospect in the two-dimensional processing fields of semiconductors, liquid crystal screens and the like. Compared with other planar motors, magnetic suspension planar motors are easier to control, and the requirements for machining the surface of a stator are lower, so that the magnetic suspension planar motors are gradually attracted by people.
In the double-magnetic-suspension workpiece stage system of the photoetching machine, in order to improve the yield of chips, the chip manufacturing processes of alignment measurement, leveling and focusing, exposure and the like are decomposed on the two workpiece stages, so that the two magnetic-suspension planar motors form a parallel working mechanism through continuous position exchange. The length and the size of the magnetic steel array are limited in consideration of reducing energy loss of a system and improving efficiency of the system, so that the sum of the lengths of the two magnetic suspension planar motors is larger than the length of the magnetic steel array, a situation that partial coils of rotors of the magnetic suspension planar motors move out of the magnetic steel array in the position exchange process of the two magnetic suspension planar motors can occur, current of the partial coils can be suddenly changed into zero, and the two ends of the coils generate larger end voltage to influence control precision.
Disclosure of Invention
In view of the above problems, an object of the present invention is to provide a coil current switching algorithm based on a motion system of a magnetic levitation planar motor of a lithography machine, which can reduce the heating loss of a planar motor coil as much as possible, and simultaneously realize smooth switching of coil current in the full motion range of a moving coil type magnetic levitation planar motor mover, thereby ensuring that no excessive terminal voltage is generated at two ends of the coil.
In order to achieve the above object, the present invention is achieved by the following technical means:
a coil current switching algorithm based on a motion system of a magnetic suspension planar motor of a lithography machine is characterized in that the motion system comprises a stator and a planar motor rotor, the stator is a magnetic steel array, radiating holes which are distributed at equal intervals are formed in the surface of the stator, the planar motor rotor comprises a first group of three-phase electrified coils, a second group of three-phase electrified coils, a third group of three-phase electrified coils, a fourth group of three-phase electrified coils, a fifth group of three-phase electrified coils and a sixth group of three-phase electrified coils, the planar motor rotor does not leave the position right above the magnetic steel array in the motion process from the first group of three-phase electrified coils to the fourth group of three-phase electrified coils and is called a non-switching group, and the fifth group of three-phase electrified coils and the sixth group of three-phase electrified coils can leave the position right above the; according to different modes of the coil leaving the magnetic steel array, the fifth group of three-phase electrified coils sequentially comprises a first abrupt change switching group coil, a second abrupt change switching group coil and a third abrupt change switching group coil along with gradually approaching the third group of three-phase electrified coils, and the sixth group of three-phase electrified coils are gradual change switching group coils; the motion system also comprises twelve Z-direction eddy current sensors, a first Y-direction eddy current sensor, a second Y-direction eddy current sensor, an X-direction grid-holding ruler and a Y-direction grid ruler;
establishing a fixed coordinate system O-XYZ on a stator of the planar motor, wherein an X axis and a Y axis in the fixed coordinate system O-XYZ are respectively along two vertical sides of the stator, the Z axis is vertical to the upper surface of the stator and faces upwards, and an origin O is positioned in the center of a heat dissipation hole with the smallest coordinate in the X direction and the Y direction on the upper surface of the stator; establishing a follow-up coordinate system O on the rotor of the planar motors-XsYsZsIn a following coordinate system Os-XsYsZsThe middle X axis, the Y axis and the Z axis are respectively parallel to the X axis, the Y axis and the Z axis in a fixed coordinate system O-XYZ, and the origin point OsThe center of mass of the rotor of the planar motor is located;
the twelve Z-direction eddy current sensors are all arranged on the lower surface of a magnetic suspension planar motor rotor, target surfaces are the upper surfaces of magnetic suspension planar motor stators and are used for measuring the suspension height of the planar motor rotor in the Z direction, the positions of the two Z-direction eddy current sensors relative to the planar motor rotor are fixed and are divided into three groups, and each group is respectively positioned on the same X coordinate line;
the first Y-direction eddy current sensor and the second Y-direction eddy current sensor are both arranged on the side surface of the magnetic levitation planar motor rotor and positioned on the same Y coordinate line, target surfaces are both the side surfaces of the cable table, and the average value of the first Y-direction eddy current sensor and the second Y-direction eddy current sensor is the coordinate of the planar motor rotor relative to the cable table in the Y direction;
the reading head of the X-direction grid-containing ruler is mounted on the side surface of the planar motor rotor, and the ruler is attached to the side surface, close to the planar motor rotor, of the cable table and used for measuring movement of the planar motor rotor in the X direction;
a reading head of the Y-direction grating ruler is arranged on the cable table, and the ruler is attached to the side surface of the stator and used for measuring the motion of the planar motor rotor in the Y direction;
the coil current switching algorithm based on the motion system comprises the following steps:
1) according to a magnetic field harmonic model and a Lorentz force law of a Halbach type two-dimensional permanent magnet array, establishing a stress model of a single coil in a magnetic field, then taking the center of mass of a rotor of the planar motor as the acting point of resultant force applied to each coil, and superposing the force and the moment applied to all the coils by adopting a force and moment superposition principle to obtain a coupling equation between six-degree-of-freedom force applied to the rotor of the planar motor and coil current, wherein the coupling equation is expressed as follows: w (q) ═ k (q) i, where w (q) ═ Fx,Fy,Fz,Tx,Ty,Tz]TThe method indicates the force with 6 degrees of freedom applied to the whole planar motor rotor, q is a vector representing the position of the planar motor rotor (3), K (q) is a coupling matrix of the planar motor rotor (3), and i ═ i [ i ]1,i2,…i18]TThe current passing through the eighteen coils is shown;
2) averaging the readings of the first Y-direction eddy current sensor and the second Y-direction eddy current sensor in the current servo period, and adding the reading of the Y-direction grating ruler in the current servo period to obtain a coordinate of the centroid of the planar motor rotor in the Y direction in a fixed coordinate system O-XYZ, and recording the coordinate as Y; taking the reading of the X-direction grid ruler in the current servo period as the coordinate of the center of mass of the planar motor rotor in the X direction in a fixed coordinate system O-XYZ, and recording as X; determining the centers of the two coils in a follow-up coordinate system O according to the installation positions of the first abrupt change switching group coil and the gradual change switching group coil on the planar motor rotors-XsYsZsX in (1)sDirection and YsCoordinates of direction, wherein the first abrupt switching group coil (340) has a center coordinate of (X)1,Y1) The central coordinate of the gradient switching group coil is (X)2,Y2) (ii) a Then calculating the coordinate (x) of the center of the first mutation switching group coil in a fixed coordinate system O-XYZ1,y1) The calculation formula is as follows: x is the number of1＝x+X1、y1＝y+Y1And the coordinate (x) of the center of the gradient switching group coil in a fixed coordinate system O-XYZ2,y2) The calculation formula is as follows: x is the number of2＝x+X2、y2＝y+Y2；
3) Judgment of
Whether or not, where d is the width of a single coil, LxIs the X-direction coordinate of the lower edge of the magnetic steel array, if the X-direction coordinate is established, the three groups of mutation switching group coils are judged to leave the position right above the magnetic steel array, and then the three groups of mutation switching group coils are selected
Selecting as a switching weight function of the first abrupt switching group coil
As a switching weight function for the second abrupt switching group coilCounting, selecting
As a function of the switching weights of the third abrupt switching group coil; otherwise, the switching weight functions of the first abrupt switching group coil (340), the second abrupt switching group coil and the third abrupt switching group coil are set to S in sequence1(x)＝S2(x)＝S3(x)＝1；
4) Judgment of
Whether or not this is true, where L is the length of a single coil, LxIs the X-direction coordinate of the lower edge of the magnetic steel array, if the X-direction coordinate is established, the gradual change switching group coil is judged to be away from the position right above the magnetic steel array, and then the selection is carried out
As a function of the switching weights of the gradient switching group coils; otherwise, setting the switching weight function of the gradual switching group coil (35) to C (x) 1;
5) taking the minimum two-norm of all coil current vectors as a target, carrying out weighted pseudo-inverse solution on a coupling equation of force and current to obtain the current value of each coil, wherein the calculation formula is as follows: k ═ i-(q)WdIn which K is-(q)＝PxKT(q)[K(q)PxKT(q)]-1，Px＝diag(1,1…1,S3(x),S2(x),S1(x) C (x), C (x)) is a diagonal matrix of switching weights for eighteen coils, WdThe planar motor rotor is expected to be stressed with 6 degrees of freedom, i ═ i1,i2,…i18]TThe calculated current value passed through the eighteen coils is obtained.
Compared with the prior art, the invention has at least the following beneficial effects: the invention judges whether the rotor coil leaves the position right above the magnetic steel array or not according to the moving process of the rotor of the planar motor, divides the rotor coil into a switching group and a non-switching group, selects different switching weight functions for the coils of the switching group according to the different positions of the rotor of the planar motor relative to the magnetic steel, and finally obtains the current value of each coil by solving the weighted pseudo-inverse solution of the coupling equation of force and current.
To the accomplishment of the foregoing and related ends, one or more aspects of the invention comprise the features hereinafter fully described. The following description and the annexed drawings set forth in detail certain illustrative aspects of the invention. These aspects are indicative, however, of but a few of the various ways in which the principles of the invention may be employed. Further, the present invention is intended to include all such aspects and their equivalents.
Drawings
Other objects and results of the present invention will become more apparent and more readily appreciated by reference to the following description taken in conjunction with the accompanying drawings, and as the invention is more fully understood. In the drawings:
FIG. 1 is a schematic diagram of a motion system used in the present invention;
FIG. 2 is a schematic structural diagram of a dual-magnetic-levitation workpiece stage of a lithography machine used in the present invention;
FIG. 3 is a block diagram of a coil current switching algorithm of the present invention;
fig. 4 is a simulation result of the coil current switching algorithm designed by the present invention.
In the figure: 1-a stator; 2-heat dissipation holes; 3-a planar motor mover; 30-a first group of three-phase electrified coils, 31-a second group of three-phase electrified coils, 32-a third group of three-phase electrified coils, 33-a fourth group of three-phase electrified coils, 34-a fifth group of three-phase electrified coils, 35-a sixth group of three-phase electrified coils, 340-a first mutation switching group coil, 341-a second mutation switching group coil, 342-a third mutation switching group coil and a 4-Z direction eddy current sensor; 5-a first Y-direction eddy current sensor; 6-a second Y-direction eddy current sensor; a 7-X directional grid ruler; a grating ruler in the 8-Y direction; 9-cable station.
The same reference numbers in all figures indicate similar or corresponding features or functions.
Detailed Description
Specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
Fig. 1 shows a schematic view (top view) of the kinematic system employed in the present invention. Fig. 2 shows a schematic structural diagram (top view) of a dual-magnetic floating stage of a lithography machine adopted in the present invention. The invention provides a coil current switching algorithm based on a motion system of a magnetic suspension planar motor of a photoetching machine, wherein the motion system comprises a stator 1 and a planar motor rotor 3, the stator is a magnetic steel array, heat dissipation holes 2 which are distributed at equal intervals are processed on the surface of the stator, the planar motor rotor 3 comprises a first group of three-phase electrified coils 30, a second group of three-phase electrified coils 31, a third group of three-phase electrified coils 32, a fourth group of three-phase electrified coils 33, a fifth group of three-phase electrified coils 34 and a sixth group of three-phase electrified coils 35, the first group of three-phase electrified coils 30 to the fourth group of three-phase electrified coils 33 cannot leave the position right above the magnetic steel array in the motion process of the planar motor rotor 3 and are called non-switching groups, and the fifth group of three-phase electrified coils 34 and the sixth group of three-phase electrified coils 35 can leave the position; according to different modes of the coils leaving the magnetic steel array, the fifth group of three-phase electrified coils 34 sequentially comprise a first abrupt change switching group coil 340, a second abrupt change switching group coil 341 and a third abrupt change switching group coil 342 along with gradually approaching the third group of three-phase electrified coils 32, and the sixth group of three-phase electrified coils 35 are gradual change switching group coils; the motion system also comprises twelve Z-direction eddy current sensors 4, a first Y-direction eddy current sensor 5, a second Y-direction eddy current sensor 6, an X-direction capacitance grating ruler 7 and a Y-direction grating ruler 8;
establishing a fixed coordinate system O-XYZ on a planar motor stator 1, wherein an X axis and a Y axis in the fixed coordinate system O-XYZ are respectively along two vertical sides of the stator 1, a Z axis is vertical to the upper surface of the stator 1 and faces upwards, and an origin O is positioned in the center of a heat dissipation hole 2 with the smallest coordinates in the X direction and the Y direction on the upper surface of the stator 1; establishing a follow-up coordinate system O on the rotor 3 of the planar motors-XsYsZsIn a following coordinate system Os-XsYsZsMiddle X axisThe Y axis and the Z axis are respectively parallel to the X axis, the Y axis and the Z axis in a fixed coordinate system O-XYZ, and the origin OsThe center of mass of the planar motor rotor 3 is located;
twelve Z-direction eddy current sensors 4 are all arranged on the lower surface of a magnetic suspension planar motor rotor 3, target surfaces are the upper surface of a magnetic suspension planar motor stator 1 and are used for measuring the suspension height of the planar motor rotor 3 in the Z direction, the positions of the two Z-direction eddy current sensors are fixed relative to the planar motor rotor 3 and are divided into three groups, and each group is respectively positioned on the same X coordinate line;
the first Y-direction eddy current sensor 5 and the second Y-direction eddy current sensor 6 are both arranged on the side surface of the magnetic suspension planar motor rotor 3 and are positioned on the same Y coordinate line, the target surfaces are both the side surfaces of the cable table 9, and the average value of the first Y-direction eddy current sensor 5 and the second Y-direction eddy current sensor 6 is the coordinate of the planar motor rotor relative to the cable table 9 in the Y direction;
a reading head of the X-direction grid ruler 7 is arranged on the side surface of the planar motor rotor 3, and a ruler is attached to the side surface, close to the planar motor rotor 3, of the cable table 9 and used for measuring the movement of the planar motor rotor 3 in the X direction;
a reading head of a Y-direction grating ruler 8 is arranged on a cable table 9, and the ruler is attached to the side surface of the stator 1 and used for measuring the motion of the planar motor rotor 3 in the Y direction;
referring to fig. 3, the coil current switching algorithm based on the above-mentioned motion system includes the following steps:
1) according to a magnetic field harmonic model and a Lorentz force law of a Halbach type two-dimensional permanent magnet array, a stress model of a single coil in a magnetic field is established, then the center of mass of a rotor of the planar motor is taken as the acting point of resultant force applied to each coil, the force and torque applied to all coils are superposed by adopting the superposition principle of force and torque, a coupling equation between six-degree-of-freedom stress of the rotor of the planar motor and coil current is obtained, and the equation is expressed as follows: w (q) ═ k (q) i, where w (q) ═ Fx,Fy,Fz,Tx,Ty,Tz]TThe method represents the force of 6 degrees of freedom on the whole planar motor rotor, q is a vector representing the position of the planar motor rotor, and K (q) is the coupling of the planar motor rotor (3)Matrix, i ═ i1,i2,…i18]TThe current passing through the eighteen coils is shown;
2) averaging the readings of the first Y-direction eddy current sensor and the second Y-direction eddy current sensor in the current servo period, and adding the reading of the Y-direction grating ruler 8 in the current servo period to obtain the coordinate of the center of mass of the planar motor rotor 3 in the Y direction in a fixed coordinate system O-XYZ, and recording the coordinate as Y; taking the reading of the X-direction grid ruler 7 in the current servo period as the coordinate of the center of mass of the planar motor rotor 3 in the X direction in a fixed coordinate system O-XYZ, and recording as X; determining the centers of the two coils in a follow-up coordinate system O according to the installation positions of the first abrupt change switching group coil 340 and the gradual change switching group coil 35 on the planar motor rotor 3s-XsYsZsX in (1)sDirection and YsCoordinates of direction, wherein the center coordinates of the first abrupt switching group coil 340 is (X)1,Y1) The center coordinate of the gradation switching group coil 35 is (X)2,Y2) (ii) a Then, the coordinates (x) of the center of the first abrupt change switching group coil 340 in the fixed coordinate system O-XYZ are calculated1,y1) The calculation formula is as follows: x is the number of1＝x+X1、y1＝y+Y1And the coordinate (x) of the center of the gradation switching group coil 35 in the fixed coordinate system O-XYZ2,y2) The calculation formula is as follows: x is the number of2＝x+X2、y2＝y+Y2；
3) Judgment of
Whether or not, where d is the width of a single coil, LxIs the X-direction coordinate of the lower edge of the magnetic steel array, if the X-direction coordinate is established, the three groups of mutation switching group coils are judged to leave the position right above the magnetic steel array, and then the three groups of mutation switching group coils are selected
Selection as a function of the switching weights of the first abrupt switching group coil 340
As a function of the switching weight of the second abrupt switching group coil 341, choose
As a function of the switching weights of the third abrupt switching group coil 342; otherwise, the switching weight functions of the first abrupt switching group coil 340, the second abrupt switching group coil 341 and the third abrupt switching group coil 342 are set as S in sequence1(x)＝S2(x)＝S3(x)＝1；
4) Judgment of
Whether or not this is true, where L is the length of a single coil, LxIs the X-direction coordinate of the lower edge of the magnetic steel array, if the X-direction coordinate is established, the gradual change switching group coil 35 is judged to be separated from the right upper part of the magnetic steel array, and then the selection is carried out
As a function of the switching weights of the gradient switching group coil 35; otherwise, the switching weight function of the gradient switching group coil 35 is set to c (x) 1;
5) taking the minimum two-norm of all coil current vectors as a target, carrying out weighted pseudo-inverse solution on a coupling equation of force and current to obtain the current value of each coil, wherein the calculation formula is as follows: k ═ i-(q)WdIn which K is-(q)＝PxKT(q)[K(q)PxKT(q)]-1，Px＝diag(1,1…1,S3(x),S2(x),S1(x) C (x), C (x)) is a diagonal matrix of switching weights for eighteen coils, WdThe planar motor rotor is expected to be stressed with 6 degrees of freedom, i ═ i1,i2,…i18]TThe calculated current value passed through the eighteen coils is obtained.
Fig. 4 shows simulation results of a coil current switching algorithm designed by the present invention. As can be seen from the graph 4, when the coordinate of the center of mass X of the rotor is-60-108 mm, the coils of the switching group leave the position right above the magnetic steel array, the current of the coils of the switching group gradually becomes zero in the process, and all the coil currents do not generate mutation phenomena, so that the algorithm designed by the invention can realize the smooth switching of the coil currents in the full motion range of the rotor of the moving coil type magnetic suspension planar motor.
The coil current switching algorithm based on the motion system of the magnetic levitation planar motor of the lithography machine according to the present invention is described above by way of example with reference to the accompanying drawings. However, it should be understood by those skilled in the art that various modifications can be made to the coil current switching algorithm based on the motion system of the magnetic levitation planar motor of the lithography machine, which is proposed by the present invention, without departing from the scope of the present invention. Therefore, the scope of the present invention should be determined by the contents of the appended claims.
Claims (1)
1. The coil current switching algorithm based on the photoetching machine magnetic suspension planar motor motion system is characterized in that the motion system comprises a stator (1) and a planar motor rotor (3), the stator is a magnetic steel array, heat dissipation holes (2) are formed in the surface of the stator at equal intervals, the planar motor rotor (3) comprises a first group of three-phase electrified coils (30), a second group of three-phase electrified coils (31), a third group of three-phase electrified coils (32), a fourth group of three-phase electrified coils (33), a fifth group of three-phase electrified coils (34) and a sixth group of three-phase electrified coils (35), the planar motor rotor (3) does not leave right above the magnetic steel array from the first group of three-phase electrified coils (30) to the fourth group of three-phase electrified coils (33) in the motion process and is called a non-switching group, and the fifth group of three-phase electrified coils (34) and the sixth group of three-phase coils (35) can leave right above the magnetic steel array in part of, referred to as a switch group; according to different modes of the coil leaving the magnetic steel array, the fifth group of three-phase electrified coils (34) sequentially comprise a first abrupt change switching group coil (340), a second abrupt change switching group coil (341) and a third abrupt change switching group coil (342) along with gradually approaching the third group of three-phase electrified coils (32), and the sixth group of three-phase electrified coils (35) are gradual change switching group coils; the motion system also comprises twelve Z-direction eddy current sensors (4), a first Y-direction eddy current sensor (5), a second Y-direction eddy current sensor (6), an X-direction grid accommodating ruler (7) and a Y-direction grid ruler (8);
establishing a fixed coordinate system O-XYZ on a planar motor stator (1), wherein X-axis and Y-axis in the fixed coordinate system O-XYZ are respectively along two vertical sides of the stator (1), the Z-axis is vertical to the upper surface of the stator (1) and faces upwards, and an origin O is positioned in the center of a heat dissipation hole (2) with the smallest coordinates in the X direction and the Y direction on the upper surface of the stator (1); establishing a follow-up coordinate system O on the rotor (3) of the planar motors-XsYsZsIn a following coordinate system Os-XsYsZsThe middle X axis, the Y axis and the Z axis are respectively parallel to the X axis, the Y axis and the Z axis in a fixed coordinate system O-XYZ, and the origin point OsThe center of mass of the planar motor rotor (3) is located;
the twelve Z-direction eddy current sensors (4) are all arranged on the lower surface of the magnetic suspension planar motor rotor (3), the target surface is the upper surface of the magnetic suspension planar motor stator (1) and is used for measuring the Z-direction suspension height of the planar motor rotor (3), the positions of the two Z-direction eddy current sensors relative to the planar motor rotor (3) are fixed and divided into three groups, and each group is respectively positioned on the same X coordinate line;
the first Y-direction eddy current sensor (5) and the second Y-direction eddy current sensor (6) are both installed on the side face of the magnetic suspension planar motor rotor (3) and located on the same Y coordinate line, target surfaces are both the side faces of the cable table (9), and the average value of readings of the first Y-direction eddy current sensor (5) and the second Y-direction eddy current sensor (6) in the current servo period is the coordinate of the planar motor rotor relative to the cable table (9) in the Y direction;
a reading head of the X-direction grid-containing ruler (7) is arranged on the side surface of the planar motor rotor (3), and the ruler is attached to the side surface, close to the planar motor rotor (3), of the cable table (9) and used for measuring the movement of the planar motor rotor (3) in the X direction;
a reading head of the Y-direction grating ruler (8) is arranged on the cable table (9), and the ruler is attached to the side surface of the stator (1) and used for measuring the motion of the planar motor rotor (3) in the Y direction;
the coil current switching algorithm based on the motion system comprises the following steps:
1) magnetic field harmonic wave according to Halbach type two-dimensional permanent magnet arrayEstablishing a stress model of a single coil in a magnetic field by using a model and a Lorentz force law, then taking the mass center of the planar motor rotor (3) as the acting point of resultant force applied to each coil, and superposing the force and the moment applied to all the coils by using a force and moment superposition principle to obtain a coupling equation between six-degree-of-freedom stress of the planar motor rotor (3) and coil current, wherein the coupling equation is expressed as follows: w (q) ═ k (q) i, where w (q) ═ Fx,Fy,Fz,Tx,Ty,Tz]TThe method is characterized in that the force with 6 degrees of freedom applied to the whole planar motor mover (3) is shown, q is a vector for representing the position of the planar motor mover (3), K (q) is a coupling matrix of the planar motor mover (3), and i is [ i ═ i1,i2,…i18]TThe current passing through the eighteen coils is shown;
2) averaging the readings of the first Y-direction eddy current sensor (5) and the second Y-direction eddy current sensor (6) in the current servo period, and adding the reading of the Y-direction grating ruler (8) in the current servo period to obtain the coordinate of the centroid of the planar motor mover (3) in the Y direction in a fixed coordinate system O-XYZ, and recording the coordinate as Y; taking the reading of the X-direction grid-capacitance ruler (7) in the current servo period as the coordinate of the center of mass of the planar motor rotor (3) in the X direction in a fixed coordinate system O-XYZ, and recording as X; determining the centers of the two coils in a follow-up coordinate system O according to the installation positions of the first abrupt change switching group coil (340) and the gradual change switching group coil (35) on the planar motor rotor (3)s-XsYsZsX in (1)sDirection and YsCoordinates of direction, wherein the first abrupt switching group coil (340) has a center coordinate of (X)1,Y1) The central coordinate of the gradual change switching group coil (35) is (X)2,Y2) (ii) a And then calculating the coordinate (x) of the center of the first abrupt change switching group coil (340) in a fixed coordinate system O-XYZ1,y1) The calculation formula is as follows: x is the number of1＝x+X1、y1＝y+Y1And the coordinate (x) of the center of the gradation switching group coil (35) in a fixed coordinate system O-XYZ2,y2) The calculation formula is as follows: x is the number of2＝x+X2、y2＝y+Y2；
3) Judgment of
Whether or not, where d is the width of a single coil, LxIs the X-direction coordinate of the lower edge of the magnetic steel array, if the X-direction coordinate is established, the three groups of mutation switching group coils are judged to leave the position right above the magnetic steel array, and then the three groups of mutation switching group coils are selected
Selecting as a function of switching weights of the first abrupt switching group coil (340)
Selecting as a function of the switching weights of the second abrupt switching group coil (341)
As a function of switching weights of the third abrupt switching group coil (342); otherwise, the switching weight functions of the first abrupt switching group coil (340), the second abrupt switching group coil (341) and the third abrupt switching group coil (342) are set to S in sequence1(x)＝S2(x)＝S3(x)＝1；
4) Judgment of
Whether or not this is true, where L is the length of a single coil, LxIs the X-direction coordinate of the lower edge of the magnetic steel array, if the X-direction coordinate is established, the gradual change switching group coil (35) is judged to be away from the position right above the magnetic steel array, and then the selection is carried out
As a function of the switching weights of the fade switching group coils (35); otherwise setting the switching weight function of the fade switching group coil (35) to c (x) 1;
5) by two norm of all coil current vectorsThe minimum number is used as a target, a weighted pseudo-inverse solution is solved for a coupling equation of force and current to obtain the current value of each coil, and the calculation formula is as follows: k ═ i-(q)WdIn which K is-(q)＝PxKT(q)[K(q)PxKT(q)]-1，Px＝diag(1,1…1,S3(x),S2(x),S1(x) C (x), C (x)) is a diagonal matrix of switching weights for eighteen coils, WdThe planar motor rotor is expected to be stressed with 6 degrees of freedom, i ═ i1,i2,…i18]TThe calculated current value passed through the eighteen coils is obtained.
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