CN109659401B - A clean bench for high temperature equipment - Google Patents

Abstract

The invention discloses a purification table of high-temperature equipment, which comprises a main frame, a silicon carbide paddle motion module and a wafer inserting machine butt joint mechanism, wherein the silicon carbide paddle motion module comprises a Z-axis moving module, a Y-axis moving module and an X-axis telescopic module, the Z-axis moving module is installed on the main frame, the Y-axis moving module is movably installed on the Z-axis moving module, the X-axis telescopic module is movably installed on the Y-axis moving module, the silicon carbide paddle is installed at the extending end of the X-axis telescopic module, the wafer inserting machine butt joint mechanism comprises a butt joint guide rail and a support frame capable of being in butt joint with the silicon carbide paddle, the support frame is movably arranged on the butt joint guide rail, the butt joint guide rail is arranged at the bottom of the main frame, and a butt joint avoiding area for. The invention has the advantages of compact space, high interchangeability, high productivity and low cost.

Description

A clean bench for high temperature equipment

technical field

The invention relates to processing equipment of solar cell sheets, in particular to a purification table of high temperature equipment.

Background technique

At this stage, the main feature of the purification bench for tubular high-temperature equipment such as tubular PECVD, tubular diffusion furnace, and tubular annealing furnace is that N high-temperature furnace body reaction chambers need N horizontal motion modules to cooperate with them, supplemented by one The exhaust gas of the gantry manipulator system provides vertical movement, which leads to the disadvantages of complex structure, high cost, poor interchangeability, and high failure rate, and is greatly affected by the height and space of the production workshop. The production capacity of a single device is limited, and Installation and debugging are very cumbersome. In addition, most of the existing clean benches are manipulator integrated buffer racks, and the horizontal motion mechanism is separated from the vertical motion mechanism. This solution increases the space required for the clean table, and the cooling speed of the quartz/graphite boats on the buffer rack is slow, which requires Adding an air-cooling or water-cooling system, and the high processing cost of the manipulator, the difficulty of installation and debugging, etc., will bring a lot of inconvenience to the operator during work and maintenance, and is greatly affected by the height and space of the production workshop. capacity is limited.

SUMMARY OF THE INVENTION

The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art and provide a clean bench for high temperature equipment with simple structure, compact space, high interchangeability and high productivity.

In order to solve the above-mentioned technical problems, the present invention adopts the following technical solutions:

A purification bench for high temperature equipment, comprising a main frame, a silicon carbide paddle, a silicon carbide paddle motion module and a chip inserter docking mechanism, wherein the silicon carbide paddle motion module includes a Z-axis moving module, a Y-axis moving module and an X-axis Telescopic module, the Z-axis moving module is installed on the main frame, the Y-axis moving module is movably installed on the Z-axis moving module, the X-axis telescopic module is movably installed on the Y-axis moving module, the silicon carbide paddle Installed on the extension end of the X-axis telescopic module, the docking mechanism of the chip inserter includes a docking guide rail and a support frame that can be docked with the silicon carbide paddle. At the bottom of the main frame, between the support frame and the docking guide rail, a docking avoidance area for avoiding the silicon carbide paddle is provided.

As a further improvement of the above technical solution, preferably, the silicon carbide propeller is installed on the X-axis telescopic module through a leveling mechanism, and the leveling mechanism includes a bottom plate, a movable plate and a clamping seat for clamping the silicon carbide propeller , the bottom plate is fixed on the extension end of the X-axis telescopic module, the movable plate is mounted on the bottom plate, the clamping seat is mounted on the movable plate, the upper end surface of the bottom plate is provided with a semi-cylinder, and the movable plate is provided with There are semi-circular grooves that can be mated with semi-cylinders.

As a further improvement of the above technical solution, preferably, the movable plate is fixed by a plurality of pairs of fastening bolts, and the two fastening bolts of each pair of fastening bolts are located on both sides of the semi-cylindrical respectively, and the pair in the middle is fastened The bolts are left and right leveling bolts; two clamping seats are provided, and each clamping seat is fixed by a pair of clamping bolts and a pair of front and rear leveling bolts.

As a further improvement of the above technical solution, preferably, the main frame is provided with a buffer frame, the buffer frame includes a vertical frame and a multi-layer support platform arranged on the vertical frame, and the silicon carbide paddle can be supported with each layer. platform connection.

As a further improvement of the above technical solution, preferably, the support platform includes a pair of fixed base assemblies, the fixed base assemblies include a base and a support base, the base is fixed on the vertical frame, and the support base is connected to the support base through a pin shaft. The base is connected, a return spring is arranged between the base and the support base, the base is also provided with a stroke trigger switch that can be contacted with the support base, the support base is provided with a support groove, and the support grooves of the two support bases are arranged opposite to each other .

As a further improvement of the above technical solution, preferably, the top of the main frame is provided with a high-efficiency filtration and purification system.

As a further improvement of the above technical solution, preferably, the X-axis telescopic module includes a primary motion subassembly and a secondary motion subassembly, and the primary motion subassembly includes a primary base, a primary linear guide, a primary wire A rod pair, a primary drive motor, the secondary motion pair assembly includes a secondary base, a secondary linear guide rail, a secondary screw pair, and a secondary drive motor, and the primary base is fixed on the Y-axis moving module, so The first-level linear guide rail and the first-level screw pair are arranged on the first-level base, the second-level base is slidably arranged on the first-level linear guide rail and connected with the first-level screw pair, and the first-level drive motor is driven by a belt and a belt. The wheel is connected with the primary screw pair, the secondary linear guide rail and the secondary screw pair are arranged on the secondary base, the secondary linear guide rail is slidably provided with a mounting plate, and the mounting plate is connected to the secondary screw Secondary connection, the secondary drive motor is connected to the secondary screw pair through a belt and a pulley, and the silicon carbide paddle is mounted on the mounting plate.

Compared with the prior art, the advantages of the present invention are:

The purification table of the high-temperature equipment of the present invention uses a horizontal movement module (the docking mechanism of the chip inserter) to complete the docking with the external chip inserter, so as to realize the automatic transmission of the process cell; module) is composed of a vertical movement module (ie Z axis), a horizontal movement module (ie Y axis), and a front and rear movement module (ie X axis), and the X axis adopts a telescopic mode, which is effective The internal space of the main frame is reduced. Based on this structure, a silicon carbide paddle can be used to transport quartz/graphite boats for N high-temperature furnace reaction chambers, which effectively reduces equipment manufacturing costs and has high interchangeability; on the other hand, Using the equipment of the present invention, a plurality of high temperature furnace body reaction chambers can also be placed side by side, thereby realizing higher production capacity in a limited equipment installation space.

Description of drawings

FIG. 1 is a schematic view of the three-dimensional structure of the present invention.

FIG. 2 is a schematic view of the front structure of the present invention.

Figure 3 is a schematic side view of the structure of the present invention.

FIG. 4 is a schematic front view of the structure of the silicon carbide paddle motion module of the present invention.

5 is a schematic top view of the structure of the silicon carbide paddle motion module of the present invention.

FIG. 6 is a schematic side view of the structure of the silicon carbide paddle motion module of the present invention.

FIG. 7 is a schematic view of the front structure of the leveling mechanism in the present invention.

8 is a schematic top view of the structure of the leveling mechanism in the present invention.

FIG. 9 is a schematic side view of the structure of the leveling mechanism in the present invention.

FIG. 10 is a schematic front view of the structure of the cache rack in the present invention.

FIG. 11 is a schematic top view of the structure of the cache rack in the present invention.

FIG. 12 is a schematic side view of the structure of the cache rack in the present invention.

FIG. 13 is a schematic three-dimensional structure diagram of the fixing base assembly of the present invention.

FIG. 14 is a schematic front view of the structure of the fixing base assembly of the present invention.

FIG. 15 is a schematic side view of the structure of the fixing base assembly of the present invention.

FIG. 16 is a schematic front view of the structure of the X-axis telescopic module in the present invention.

FIG. 17 is a view A-A in FIG. 16 .

FIG. 18 is a schematic three-dimensional structure diagram of the docking mechanism of the chip inserter in the present invention.

The symbols in the figure represent:

100, main frame; 200, silicon carbide propeller; 201, semi-cylindrical; 202, semi-circular groove; 210, leveling mechanism; 211, bottom plate; 212, movable plate; 213, clamping seat; 214, fastening bolt; 215, Left and right leveling bolts; 216, clamping bolts; 217, front and rear leveling bolts; 300, docking mechanism of chip inserter; 310, docking guide rails; 320, support frame; 321, tray; 322, welding bracket;; 400, Z Axis movement module; 500, Y-axis movement module; 600, X-axis telescopic module; 601, belt; 602, pulley; 610, first-level motion subassembly; 611, first-level base; 612, first-level linear guide rail; 613, Primary screw pair; 614, primary drive motor; 620, secondary motion assembly; 621, secondary base; 622, secondary linear guide rail; 623, secondary screw pair; 624, secondary drive motor; 625 700, buffer frame; 710, stand; 720, fixed seat assembly; 721, base; 722, support seat; 723, pin; 724, return spring; 725, travel trigger switch; 726, support groove; 800. High-efficiency filtration and purification system.

Detailed ways

The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

As shown in FIGS. 1 to 6 , the clean bench of the high-temperature equipment in this embodiment includes a main frame 100 , a silicon carbide paddle 200 , a silicon carbide paddle motion module and a chip inserter docking mechanism 300 , and the silicon carbide paddle motion module includes The Z-axis moving module 400, the Y-axis moving module 500 and the X-axis telescopic module 600, the Z-axis moving module 400 is installed on the main frame 100, the Y-axis moving module 500 is movably installed on the Z-axis moving module 400, and the X-axis is telescopic The module 600 is movably mounted on the Y-axis moving module 500 , the silicon carbide paddle 200 is mounted on the extension end of the X-axis telescopic module 600 , and the interposer docking mechanism 300 includes a docking guide rail 310 and a support that can be docked with the silicon carbide paddle 200 . The frame 320 , the support frame 320 is movably disposed on the docking guide rail 310 , and the butt guide rail 310 is disposed at the bottom of the main frame 100 , and a docking avoidance area for avoiding the silicon carbide paddle 200 is provided between the support frame 320 and the docking guide rail 310 .

The support frame 320 is used to hold the quartz/graphite boat 900 . The docking guide rails 310 and the silicon carbide paddles 200 are respectively disposed on both sides of the main frame 100 . During operation, the support frame 320 moves outward on the docking guide rail 310 and is docked with the chip inserter (not shown in the figure), and the chip inserter inserts the battery chips into the quartz/graphite boat 900. Move into the main frame 100, the X-axis telescopic module 600 is in a telescopic state, and moves the module 500 along the Y-axis into the main frame 100 with the silicon carbide paddle 200 (moving to the right in FIG. 4), and then, the Y-axis The moving module 500 carries the silicon carbide paddle 200 and moves the module 400 along the Z-axis to the lowest position, so that the silicon carbide paddle 200 can enter the docking avoidance area, and then the Y-axis moving module 500 rises, and the silicon carbide paddle 200 rises to lift the quartz/graphite The boat 900, and then adjust the position of the silicon carbide paddle 200, the extension end of the X-axis telescopic module 600 is extended, and the moving module 500 along the Y-axis with the silicon carbide paddle 200 extends out of the main frame 100, and the quartz/graphite boat 900 is extended. It is sent into the high temperature furnace body reaction chamber (not shown in the figure) on the left, and the above steps are repeated until the number of quartz/graphite boats 900 in the high temperature furnace body reaction chamber reaches the requirement.

The clean bench of the high-temperature equipment of the present invention uses a horizontal motion module (the docking mechanism 300 of the chip inserter) to complete the docking with the external chip inserter, so as to realize the automatic transmission of the process cell; Movement module) is composed of a vertical movement module (ie Z axis), a horizontal movement module (ie Y axis), and a front and rear movement module (ie X axis), and the X axis adopts a telescopic mode. The internal space of the main frame 100 is effectively reduced. Based on this structure, one silicon carbide paddle can be used to transport the quartz/graphite boats 900 for N high-temperature furnace body reaction chambers, which effectively reduces the equipment manufacturing cost and has high interchangeability; On the one hand, by using the equipment of the present invention, multiple high-temperature furnace body reaction chambers can also be placed side by side, thereby achieving higher production capacity in a limited equipment installation space.

As shown in FIGS. 7 to 9 , in this embodiment, the silicon carbide paddle 200 is mounted on the X-axis telescopic module 600 through a leveling mechanism 210 . The clamping seat 213 of the paddle 200, the bottom plate 211 is fixed on the extension end of the X-axis telescopic module 600, the movable plate 212 is mounted on the bottom plate 211, the clamping seat 213 is mounted on the movable plate 212, and the upper end surface of the bottom plate 211 is provided with a semi-cylinder 201 , the movable plate 212 is provided with a semi-circular groove 202 that can be matched with the semi-cylinder 201 . The movable plate 212 is fixed by a plurality of pairs of tightening bolts 214 , and the two tightening bolts 214 of each pair of tightening bolts 214 are located on both sides of the semi-cylinder 201 respectively, and the pair of tightening bolts 214 in the middle are left and right leveling bolts 215 Two clamping seats 213 are provided, and each clamping seat 213 is fixed by a pair of clamping bolts 216 and a pair of front and rear leveling bolts 217 . By adjusting the left and right leveling bolts 215, the movable plate 212 can swing around the semi-cylinder 201, thereby adjusting the level of the movable plate 212. Adjust the front and rear leveling bolts 217 to adjust the levelness of the front and rear clamping seats 213 .

As shown in FIG. 10 to FIG. 15 , in this embodiment, the main frame 100 is provided with a buffer frame 700 , and the buffer frame 700 includes a vertical frame 710 and a multi-layer support platform disposed on the vertical frame 710 . The silicon carbide paddle 200 can be connected with the The supporting platform of each layer is docked. The support platform includes a pair of fixed seat assemblies 720. The fixed seat assembly 720 includes a base 721 and a support base 722. The base 721 is fixed on the stand 710. The support base 722 is connected to the base 721 through a pin 723. There is a return spring 724 therebetween, and the base 721 is further provided with a stroke trigger switch 725 that can contact with the support base 722 , the support base 722 is provided with a support groove 726 , and the support grooves 726 of the two support bases 722 are arranged opposite to each other. When the silicon carbide paddle 200 places the quartz/graphite boat 900 in the two support grooves 726, the support seat 722 will rotate around the pin 723 due to the gravity of the quartz/graphite boat and the cell itself and trigger the stroke trigger switch 725, which is set by The travel trigger switch 725 provides the system with a boat signal in the buffer area; when the silicon carbide paddle 200 removes the quartz/graphite boat 900 from the support groove 726 , the return spring 724 makes the support seat 722 return, and at this time the travel trigger switch 725 Release the electric shock and provide the system with no boat signal in the buffer area.

The function of the buffer rack 700 is to cool the quartz/graphite boat 900 . After the reaction of the quartz/graphite boat 900 in the high temperature furnace body reaction chamber is completed, the silicon carbide paddle 200 takes out the quartz/graphite boats 900 one by one to prevent them from being placed on each layer of the support platform of the buffer rack 700. The top of the main frame 100 is provided with a high-efficiency filtration and purification system 800, the fresh air surface entering the purification platform after passing through the high-efficiency filter purification system 800 covers the area where the buffer rack support platform is located, and is used to cool the quartz/graphite boat 900 on the support platform. The new purification scheme and cache station treatment scheme are adopted to make the internal structure of the equipment purification table more compact, which effectively reduces the installation space of the equipment while achieving a better purification effect.

As shown in FIGS. 16 and 17 , in this embodiment, the X-axis telescopic module 600 includes a primary motion subassembly 610 and a secondary motion subassembly 620 , and the primary motion subassembly 610 includes a primary base 611 and a primary linear guide rail 612, the primary screw pair 613, the primary drive motor 614, the secondary motion sub-assembly 620 includes the secondary base 621, the secondary linear guide 622, the secondary screw pair 623, the secondary drive motor 624, and the primary base 611 Fixed on the Y-axis moving module 500, the first-level linear guide 612 and the first-level screw pair 613 are arranged on the first-level base 611, and the second-level base 621 is slidably mounted on the first-level linear guide 612 and is connected with the first-level screw pair 613. Connection, the primary drive motor 614 is connected with the primary screw pair 613 through the belt 601 and the pulley 602, the secondary linear guide 622 and the secondary screw pair 623 are arranged on the secondary base 621, and the secondary linear guide 622 slides up A mounting plate 625 is provided, the mounting plate 625 is connected with the secondary screw pair 623 , the secondary driving motor 624 is connected with the secondary screw pair 623 through the belt 601 and the pulley 602 , and the silicon carbide paddle 200 is mounted on the mounting plate 625 . The primary screw pair 613 drives the secondary base 621 to extend, and the secondary screw pair 623 drives the mounting plate 625 to extend, thereby driving the silicon carbide paddle 200 on the mounting plate 625 to move to a suitable distance. Reduce footprint.

As shown in FIG. 18 , in this embodiment, the docking guide rail 310 and the support frame 320 that can be docked with the silicon carbide paddle 200 . The support frame 320 includes a tray 321 and a welding bracket 322 . The motor drives the tray 322 to move on the docking guide rail 310. The welding bracket 322 is fixed on the tray 321 to hold the quartz/graphite boat 900. The welding bracket 322 is unilateral, and the docking avoidance area is located between the quartz/graphite boat 900 and the quartz/graphite boat 900. between trays 321.

In addition to this embodiment, the X-axis telescopic module 600 may also be a telescopic tube structure, or may be a three-stage or more telescopic structure.

Although the present invention has been disclosed above with preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art, without departing from the scope of the technical solution of the present invention, can make many possible changes and modifications to the technical solution of the present invention by using the technical content disclosed above, or modify it into an equivalent implementation of equivalent changes. example. Therefore, any simple modifications, equivalent changes and modifications made to the above embodiments according to the technical essence of the present invention without departing from the content of the technical solutions of the present invention should fall within the protection scope of the technical solutions of the present invention.

Claims (7)

1. The utility model provides a clean bench of high temperature equipment which characterized in that: the silicon carbide blade butt joint mechanism comprises a main frame (100), a silicon carbide blade (200), a silicon carbide blade movement module and a blade inserting machine butt joint mechanism (300), wherein the silicon carbide blade movement module comprises a Z-axis movement module (400), a Y-axis movement module (500) and an X-axis telescopic module (600), the Z-axis movement module (400) is installed on the main frame (100), the Y-axis movement module (500) is movably installed on the Z-axis movement module (400), the X-axis telescopic module (600) is movably installed on the Y-axis movement module (500), the silicon carbide blade (200) is installed at the extending end of the X-axis telescopic module (600), the blade inserting machine butt joint mechanism (300) comprises a butt joint guide rail (310) and a support frame (320) capable of being in butt joint with the silicon carbide blade (200), the support frame (320) is movably arranged on the butt joint guide rail (310), the butt joint guide rail (310) is arranged at the bottom of, and a butt joint avoiding area for avoiding the silicon carbide paddle (200) is arranged between the support frame (320) and the butt joint guide rail (310).

2. A clean bench for high-temperature equipment according to claim 1, characterized in that: silicon carbide oar (200) are installed on the flexible module (600) of X axle through leveling mechanism (210), leveling mechanism (210) include bottom plate (211), fly leaf (212) and grip slipper (213) that are used for centre gripping silicon carbide oar (200), bottom plate (211) are fixed in the end that stretches out of the flexible module (600) of X axle, fly leaf (212) are installed on bottom plate (211), grip slipper (213) are installed on fly leaf (212), bottom plate (211) up end is equipped with semicylinder (201), fly leaf (212) be equipped with can with semicylinder (201) complex semicircular groove (202).

3. A clean bench for high-temperature equipment according to claim 2, characterized in that: the movable plate (212) is fixed through a plurality of pairs of fastening bolts (214), two fastening bolts (214) of each pair of fastening bolts (214) are respectively positioned on two sides of the semi-cylinder (201), wherein the pair of fastening bolts (214) positioned in the middle are left and right leveling bolts (215); the number of the clamping seats (213) is two, and each clamping seat (213) is fixed through a pair of clamping bolts (216) and a pair of front and rear leveling bolts (217).

4. A clean bench for high-temperature equipment according to any one of claims 1 to 3, characterized in that: be equipped with buffer memory frame (700) in main frame (100), buffer memory frame (700) include grudging post (710) and locate the multilayer supporting platform on grudging post (710), carborundum oar (200) can dock with every layer of supporting platform.

5. The clean bench for high-temperature equipment according to claim 4, wherein: the supporting platform comprises a pair of fixed seat assemblies (720), each fixed seat assembly (720) comprises a base (721) and a supporting seat (722), the bases (721) are fixed on the stand (710), the supporting seats (722) are connected with the bases (721) through pin shafts (723), a return spring (724) is arranged between each base (721) and each supporting seat (722), the bases (721) are further provided with travel trigger switches (725) capable of being in contact with the supporting seats (722), the supporting seats (722) are provided with supporting grooves (726), and the supporting grooves (726) of the two supporting seats (722) are arranged oppositely.

6. The clean bench for high-temperature equipment according to claim 4, wherein: the top of the main frame (100) is provided with a high-efficiency filtering and purifying system (800).

7. A clean bench for high-temperature equipment according to any one of claims 1 to 3, characterized in that: the X-axis telescopic module (600) comprises a primary kinematic pair component (610) and a secondary kinematic pair component (620), the primary kinematic pair component (610) comprises a primary base (611), a primary linear guide rail (612), a primary screw rod pair (613) and a primary driving motor (614), the secondary kinematic pair component (620) comprises a secondary base (621), a secondary linear guide rail (622), a secondary screw rod pair (623) and a secondary driving motor (624), the primary base (611) is fixed on the Y-axis mobile module (500), the primary linear guide rail (612) and the primary screw rod pair (613) are arranged on the primary base (611), the secondary base (621) is arranged on the primary linear guide rail (612) in a sliding manner and is connected with the primary screw rod pair (613), the primary driving motor (614) is connected with the primary screw rod pair (613) through a belt (601) and a belt pulley (602), the secondary linear guide rail (622) and the secondary screw rod pair (623) are arranged on the secondary base (621), the mounting plate (625) is arranged on the secondary linear guide rail (622) in a sliding manner, the mounting plate (625) is connected with the secondary screw rod pair (623), the secondary driving motor (624) is connected with the secondary screw rod pair (623) through a belt (601) and a belt wheel (602), and the silicon carbide paddle (200) is arranged on the mounting plate (625).

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