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CN109683307A - A kind of tuning filtering apparatus and tuning filtering method based on DMD - Google Patents

A kind of tuning filtering apparatus and tuning filtering method based on DMD Download PDF

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Publication number
CN109683307A
CN109683307A CN201811627296.4A CN201811627296A CN109683307A CN 109683307 A CN109683307 A CN 109683307A CN 201811627296 A CN201811627296 A CN 201811627296A CN 109683307 A CN109683307 A CN 109683307A
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China
Prior art keywords
optical
dmd
light
micro
incident
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Inventor
余佳
陈廷爱
姚靖
郑炜
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Shenzhen Institute of Advanced Technology of CAS
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Shenzhen Institute of Advanced Technology of CAS
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Priority to CN201811627296.4A priority Critical patent/CN109683307A/en
Publication of CN109683307A publication Critical patent/CN109683307A/en
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10Beam splitting or combining systems
    • G02B27/1006Beam splitting or combining systems for splitting or combining different wavelengths

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

The present invention is suitable for microoptic technical field of imaging, discloses a kind of tuning filtering apparatus based on DMD and tuning filtering method.Tuning filtering apparatus includes entering and leaving optical assembly, Digital Micromirror Device and for carrying out dispersion collimation to light beam so that the light beam of different wave length is parallel to each other the dispersion collimator apparatus of transmission in different spatial, Digital Micromirror Device has multiple micro-reflectors, and the focusing block for the light beam of different wave length to be focused on to the micro-reflector is provided between the dispersion collimator apparatus and the Digital Micromirror Device.It tunes filtering method and uses above-mentioned tuning filtering apparatus.Tuning filtering apparatus provided in an embodiment of the present invention based on DMD provided by the present invention, structure is relatively succinct, and each position of components is fixed, and filter wavelength can be adjusted quickly, it is good to tune filter effect, has the advantage of high transmittance, the tuber function that any wavelength filters may be implemented.

Description

A kind of tuning filtering apparatus and tuning filtering method based on DMD
Technical field
The invention belongs to microoptic technical field of imaging more particularly to a kind of tuning filtering apparatus and tune based on DMD Humorous filtering method.
Background technique
The operation wavelength of existing optical filter is single and fixed, and some tunable optical light filter tuning capabilities have Limit, can only realize substantially in same time, single wavelength, the adjusting of single bandwidth.
Fluorescence microscope is the light irradiating sample with specific wavelength, and sample emits fluorescence after being excited, via detector Some institutional framework image information of sample can be obtained in (such as PMT, CCD) acquisition after hardware-software processing.In general, The central wavelength of the fluorescence spectrum of electromagnetic radiation is different with the wavelength of exciting light, in order to obtain the relatively good fluorescent image of signal-to-noise ratio As a result, it is desirable to filter exciting light and other stray lights using optical filter, guarantee the collected signal of detector all from glimmering Light.Therefore, optical filter is vital element in fluorescence microscopy system, performance directly affect fluorescence microscope at As effect.
Many biological tissue samples, fluorescence that different constituents can inspire (including autofluorescence and fluorescence are visited Needle) spectrum difference.And widely used optical filter operation wavelength is single currently on the market and determines, uses this optical filtering Piece, the collected signal of detector are the fluorescence mixing intensity that all different structure ingredients issue, and area can not be effectively performed Point.It is combined using a variety of optical filters, and combines mechanical structure, such as filter wheel carries out manual switching, it is not only very not convenient, and And limited speed.Meet different fluorescence imaging demands therefore, it is necessary to the optical light filter of fast tunable.It leads currently on the market The tunable filter of stream includes following several: LCTF (liquid crystal tunable filter), AOTF (acousto-optic tunable filter), LLTF (tunable filter based on volume Bragg grating).
Patent publication No. is a kind of design drawing of tunable filter disclosed in CN101023388A.It is mainly wrapped in the design Include beam collimation device, the first reflecting grating, cube corner, the second reflecting grating and beam-focuser part.Wherein, two Reflecting grating is all body Bragg diffraction gratings, can also be the different parts of same grating.The work of the tunable filter is former Manage as follows: by the beam collimation of incidence, which is reflexed to cube beam collimation element by the first reflecting grating dispersion Corner.Dispersed light beam is received by the reflecting system that cube corner forms, and is reflexed to the second reflecting grating.Light beam is by the After the recombination of two reflecting gratings, enter output end (detector end) by light beam concentrating element.First reflecting grating, the second reflected light Grid and cube corner are arranged in certain position and angle.Light beam is after the first reflecting grating, through dispersion according to different wave length It is spatially separated, change the angle of the first, second reflecting grating by adjusting, and make the angle around twice of grating axis change And change cube corner, guarantee to enter end of probe after only having the light of specific wavelength that can be collected again by the second reflecting grating, i.e., Realize filter wavelength tuber function.This optical filter using Bragg-grating structure is realizing filter by the adjustment to grating While function that optical wavelength is tunable, it is also equipped with high-efficient, the advantages that passband is big.Although above-mentioned design can be realized optical filtering wave Long tuning control, but regulatory function is all limited, i.e., substantially difficult to realize while any multicenter wavelength, the filter of adaptive-bandwidth Magic eye function.Tuning freedom degree is not high enough, and speed not enough limits the application scenarios of these tunable filters fastly.With above-mentioned For patent publication No. is the patent of CN101023388A, although can be by adjusting two gratings and the position of reflecting system Angle tunes filter wavelength, but inevitably introduce in systems it is corresponding adjust rotational structure, influence system Stability;And the position angle of several key elements needs arrangement meticulously, influences the ease for use of system.More it is essential that not Same position of components angle corresponds to different filter wavelengths, this tunable for the scene of some more wavelength of fluorescence applications The design of optical filter is not applicable with regard to some.
Summary of the invention
The present invention is directed at least solve one of above-mentioned technical problem, provide a kind of tuning filtering apparatus based on DMD and Filtering method is tuned, tuning filter effect is good.
The technical scheme is that a kind of tuning filtering apparatus based on DMD, including with incident light port and outgoing The discrepancy optical assembly of optical port, further include Digital Micromirror Device and for light beam carry out dispersion collimation so that different wave length light Beam is parallel to each other the dispersion collimator apparatus of transmission in different spatial, the Digital Micromirror Device have it is multiple can independent control And the micro-reflector for the road Guang Yuan for setting wavelength being reflected and being reflexed to the light outside setting wavelength deviation original optical path, it is described It is provided between dispersion collimator apparatus and the Digital Micromirror Device for the light beam of different wave length to be focused on micro- reflection The focusing block of mirror.
Optionally, the discrepancy optical assembly is optical fiber circulator, and the optical fiber circulator has incident light port, emergent light Port receives from incident light port incident light beam with being only capable of and is only capable of that the sending and receiving end of optical port will be emitted described in guides reflected light Mouthful.
Optionally, the optical fiber circulator includes incident optical, the output optical fiber and transmitting-receiving optical fiber, and one end of incident optical is Incident light port, one end of the output optical fiber are outgoing optical port, the other end of the incident optical and the output optical fiber it is another One end is connected to the same end of the transmitting-receiving optical fiber.
Optionally, it is additionally provided between the discrepancy optical assembly and the dispersion collimator apparatus for collimating incident beam And the collimating components for focusing emergent light.
Optionally, the collimating components are convex lens or concave mirror.
Optionally, the dispersion collimator apparatus includes first for irradiating and reflecting to form dispersed light for receiving collimated light beam Reflecting grating and for receive the dispersed light from first reflecting grating and reflect to form collimation dispersed light second reflection Grating.
Optionally, first reflecting grating and second reflecting grating are arranged in parallel.
Optionally, the focusing block is microlens array, and the microlens array includes the dimpling of multiple array settings Lens, the optical axis of the dimpling lens are parallel with the collimation optical axis of dispersed light being emitted from second reflecting grating.
Optionally, the Digital Micromirror Device has for loading on the micro-reflector corresponding voltage by programming Control And drive the programming Control module of the micro-reflector flip angle.
The present invention also provides a kind of tuning filtering method based on DMD is filtered using a kind of above-mentioned tuning based on DMD Electro-optical device, comprising the following steps:
Incident beam is injected from the incident light port for entering and leaving optical assembly;
Incident beam is incident to dispersion collimator apparatus, and incident beam is formed different wave length ingredient by the dispersion collimator apparatus The different output beam in spatial position;
The output beam of different wave length ingredient is focused to Digital Micromirror Device by focusing block by the output beam Micro-reflector;
For setting the reservation light beam of wavelength, corresponding micro-reflector keeps vertical with the optical axis of light beam is retained, micro- reflection Mirror will retain light beam and reflect to form outgoing beam, and outgoing beam is back to from original optical path to be entered and left optical assembly and penetrate from outgoing optical port Out;
For the filtered beam outside setting wavelength, filtered beam is reflexed to the former light of deviation by corresponding micro-reflector overturning Road.
Tuning filtering apparatus provided in an embodiment of the present invention based on DMD provided by the present invention, as programmable tuning Incident beam collimation is placed in parallel by optical filter, incident optical port as beam inlet, fiber collimating lenses by one Grating to (dispersion collimator apparatus, including parallel the first reflecting grating and the second reflecting grating) after, different wave length ingredient Light be unfolded in parallel in space, then on vertical irradiation microlens array (focusing block), then focus on the target surface of DMD On.By the overturning of micro-reflector on control DMD target surface, the light that can choose specific wavelength backs into outgoing according to original optical path Fiber port, into detector, tuning filtering apparatus structure is relatively succinct, and each position of components is fixed, and filter wavelength can It quickly adjusts, tuning filter effect is good, moreover, the element in system has high transmission almost without the absorption loss to fluorescence The advantage of rate.Meanwhile the PLC technology feature of DMD is utilized, the tuber function that any wavelength filters may be implemented.
Detailed description of the invention
It to describe the technical solutions in the embodiments of the present invention more clearly, below will be to needed in the embodiment Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for ability For the those of ordinary skill of domain, without creative efforts, it can also be obtained according to these attached drawings other attached Figure.
Fig. 1 is a kind of optical planar circuit schematic diagram of tuning filtering apparatus based on DMD provided in an embodiment of the present invention;
Fig. 2 is dispersion collimator apparatus (grating in a kind of tuning filtering apparatus based on DMD provided in an embodiment of the present invention It is right) light path principle schematic diagram;
Fig. 3 is to carry out filter wavelength using DMD in a kind of tuning filtering apparatus based on DMD provided in an embodiment of the present invention The schematic illustration of selection;
Fig. 4 is that collimating components are concave reflection in a kind of tuning filtering apparatus based on DMD provided in an embodiment of the present invention Light path schematic diagram when mirror.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and It is not used in the restriction present invention.
It should be noted that term " setting ", " connection " shall be understood in a broad sense, for example, it may be directly setting, connection, It can also be arranged indirectly by component placed in the middle, center configuration, be connected.
If in addition, have in the embodiment of the present invention " longitudinal direction ", " transverse direction ", " length ", " width ", " thickness ", "upper", "lower", The orientation or positional relationships of instructions such as "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom" "inner", "outside" Term is merely for convenience of to be based on the orientation or positional relationship shown in the drawings or conventional placement status or use state The description present invention and simplified description, rather than structure, feature, device or the element of indication or suggestion meaning must have specifically Orientation or positional relationship nor is it necessary that and be constructed and operated in a specific orientation, therefore is not considered as limiting the invention. In the description of the present invention, unless otherwise indicated, the meaning of " plurality " is two or more.
Described each particular technique feature and each embodiment in a specific embodiment, in the case of no contradiction, It can be combined in any appropriate way, such as can be with shape by different particular technique feature/embodiment combinations At different embodiments, in order to avoid unnecessary repetition, each the various of particular technique feature/embodiment can in the present invention No further explanation will be given for the combination of energy.
As shown in Figure 1 to Figure 3, a kind of tuning filtering apparatus based on DMD provided in an embodiment of the present invention, including have into It penetrates optical port (incident optical 201) and is emitted the discrepancy optical assembly of optical port (the output optical fiber 203), further include Digital Micromirror Device 209 (DMD, Digital Micromirror Device) and for light beam carry out dispersion collimation so that different wave length light beam It is parallel to each other the dispersion collimator apparatus (can for grating to) of transmission in different spatial, Digital Micromirror Device 209 has multiple Can independent control flip angle micro-reflector (micro-reflector 2091 as shown in Figure 3 and micro-reflector 2092), micro-reflector The road Guang Yuan for that will set wavelength is reflected, and the light set outside wavelength can also be reflexed to deviation original optical path.Dispersion collimator apparatus The focus portion for the light beam of different wave length to be focused on to different micro-reflectors respectively is provided between Digital Micromirror Device 209 Part 208.Above-mentioned tuning filtering apparatus its optical path based on DMD can be with reference to as follows, incidence of the incident beam from discrepancy optical assembly Optical port is injected;Incident beam is incident to dispersion collimator apparatus, and incident beam is formed different wave length ingredient by dispersion collimator apparatus The different output beam in spatial position;Output beam is focused to the output beam of different wave length ingredient by focusing block 208 The micro-reflector of Digital Micromirror Device 209;For setting the reservation light beam of wavelength, corresponding micro-reflector keeps and retains light beam Optical axis it is vertical (micro-reflector 2092 as shown in Figure 3), micro-reflector reflects to form outgoing beam, emergent light for light beam is retained Beam is back to from original optical path to be entered and left optical assembly and projects from outgoing optical port;It is corresponding for the filtered beam outside setting wavelength Micro-reflector overturning, which reflexes to filtered beam, deviates original optical path (micro-reflector 2091 as shown in Figure 3), and can not be from outgoing Optical port projects, and realizes the optical filtering of different wave length well.
The target surface of DMD is made of many densely arranged micro-reflectors (micro mirror), and each micro mirror can be by giving DMD Load the overturning that certain voltage value control carries out certain angle.Such as the DMD of Texas Instrument's D4100 model, at 0.95 inch On the target surface of size, 1920*1080 micro mirror of having arranged, each micro mirror can carry out ± 12 degree of overturning.As shown in figure 3, right In the corresponding filtering wave beam of wavelength for wanting to filter, it can control its corresponding micro mirror overturning, make micro mirror and filter the light of wave beam Filtered beam can be reflected into other directions by axis out of plumb (micro-reflector 2091 as shown in Figure 3), and filtering wave beam can not edge Original optical path is back to discrepancy optical assembly;And reservation light beam corresponding to the wavelength for wanting to retain, then only it need to keep micro mirror not Overturning (vertical with beam optical axis is retained) can will retain light beam and be back to discrepancy optical assembly from original optical path.DMD can program control Make the rollover states of each micro mirror, it can arbitrarily selection different number, different wave length outgoing realize the optical filtering function of multi-wavelength Can, it is wide to be applicable in scene domain.
Specifically, entering and leaving optical assembly is optical fiber circulator, and optical fiber circulator has incident light port, outgoing optical port and only It can receive from incident light port incident light beam and be only capable of for guides reflected light being emitted the transmitting-receiving port of optical port.
In the present embodiment, optical fiber circulator includes incident optical 201,202, the output optical fiber 203 and transmitting-receiving optical fiber 204, is entered The one end for penetrating optical fiber 201 is incident light port, and one end of the output optical fiber 203 is outgoing optical port, the other end of incident optical 201 The same end (first end) of transmitting-receiving optical fiber 204 is connected to the other end of the output optical fiber 203, the other end of transmitting-receiving optical fiber 204 is fixed Justice is second end.Its light channel structure of optical fiber circulator are as follows: when light is incident from incident optical 201, by incident optical 201,202 It can only enter from the first end of transmitting-receiving optical fiber 204 and be emitted from second end;When second end incidence of the light from transmitting-receiving optical fiber 204, It can only be emitted from the output optical fiber 203.The entrance port that incident optical 201 and the output optical fiber 203 have respectively constituted entire optical filter (enters Penetrate optical port) and exit portal (outgoing optical port).
Specifically, enter and leave be additionally provided between optical assembly and dispersion collimator apparatus for incident beam is collimated and is used for by The collimating components 205 that emergent light focuses.After the light beam inputted from entrance port (incident light port) enters incident optical 201, from receipts 204 output of fibre shine to collimating components 205, the collimated light beam that collimating components 205 are formed after collimating incident beam reflects or folding It is incident upon dispersion collimator apparatus.
In concrete application, as shown in Figure 1, the first implementable solution as collimating components 205, collimating components 205 can For convex lens.
Alternatively, second of implementable solution as collimating components, as shown in figure 4, collimating components can be concave mirror 502, wherein optical fiber circulator 501 includes incident optical and the output optical fiber, and reflecting grating 503 and reflecting grating 504 are and aforementioned First reflecting grating 206, identical a pair of of the reflecting grating of the second reflecting grating 207.Likewise, 505 He of microlens array DMD506 is identical microlens array and DMD.The difference is that, collimation lens 205 is replaced with into concave surface with aforementioned schemes Mirror 502, play the role of it is consistent, i.e., the light beam of collimated incident, focus outgoing light beam.
Specifically, dispersion collimator apparatus includes the first reflection that dispersed light is irradiated and reflected to form for receiving collimated light beam Grating 206 and for receive the dispersed light from the first reflecting grating 206 and reflect to form collimation dispersed light the second reflected light Grid 207.In the present embodiment, the first reflecting grating 206 and the second reflecting grating 207 are arranged in parallel.Standard from collimating components 205 Collimated optical beam is irradiated in the first reflecting grating 206, forms the dispersed light of direction of propagation diverging, then pass through the second reflecting grating 207 Collect collimation dispersed light.The microlens array that dispersed light after collimation is focused component 208 focuses on Digital Micromirror Device 209 (DMD) on.After the reflection of the micro-reflector of Digital Micromirror Device 209 (DMD), the reservation light beam for setting wavelength is returned according to original optical path It returns, i.e., after the microlens array of focusing block 208, the second reflecting grating 207, the first reflecting grating 206, is collimated again Lens focus (collimation lens plays focussing force at this time) is into transmitting-receiving optical fiber 204, by optical fiber circulator from the output optical fiber 203 outputs.
In the present embodiment, focusing block 208 is microlens array, and microlens array includes that the dimpling of multiple array settings is saturating Mirror, the optical axis of dimpling lens are parallel with the collimation optical axis of dispersed light being emitted from the second reflecting grating 207.
Specifically, Digital Micromirror Device 209 has and drives for loading on micro-reflector corresponding voltage by programming Control The programming Control module of dynamic micro-reflector flip angle.
Tuning filtering apparatus provided in an embodiment of the present invention based on DMD, as programmable tunable filter, composition portion Point including incident optical port, fiber collimating lenses, a grating to (the first reflecting grating 206 and the second reflecting grating 207), One microlens array, a DMD and the output optical fiber port.Wherein incident optical port is as beam inlet, fiber optic collimator Lens are by incident beam collimation, and the grating being placed in parallel by one to later, put down in space by the light of different wave length ingredient Row expansion, then on vertical irradiation microlens array, then focuses on the target surface of DMD.Pass through eyeglass on control DMD target surface Overturning, the light that can choose specific wavelength back into the output optical fiber port according to original optical path, and into detector, tuning, which filters, to be filled It is relatively succinct to set structure, each position of components is fixed, and filter wavelength can be adjusted quickly.
The embodiment of the invention also provides a kind of tuning filtering method based on DMD, using the above-mentioned tuning based on DMD Filtering apparatus, comprising the following steps:
Incident beam is injected from the incident light port for entering and leaving optical assembly;
Incident beam is incident to dispersion collimator apparatus, and incident beam is formed different wave length component space by dispersion collimator apparatus The different output beam in position;
The output beam of different wave length ingredient is focused to Digital Micromirror Device 209 by focusing block 208 by output beam Micro-reflector;
For setting the reservation light beam of wavelength, corresponding micro-reflector keeps vertical with the optical axis of light beam is retained, micro- reflection Mirror will retain light beam and reflect to form outgoing beam, and outgoing beam is back to from original optical path to be entered and left optical assembly and penetrate from outgoing optical port Out;
For the filtered beam outside setting wavelength, filtered beam is reflexed to the former light of deviation by corresponding micro-reflector overturning Road.
Fig. 2 shows the schematic illustration of the first reflecting grating 206 and the second reflecting grating 207 collimation dispersed light beam.Its In two gratings use be all reflective gratings and be placed in parallel.By collimating components 205 (convex lens or concave mirror) Collimated light beam afterwards, each wavelength components mix on spatial position.Collimated light beam after the first reflecting grating 206, Dispersion occurs, the light beam of different wave length ingredient is emitted along different directions.As shown in Fig. 2, the first reflecting grating 206 is by collimated light beam The light beam containing different wave length ingredient is resolved into, the shooting angle difference of every kind of wavelength, the i.e. light of different wave length are from different perspectives The different location being irradiated in the second reflecting grating 207.The dispersed light of diverging is after the collection of the second reflecting grating 207, again It is emitted as collimated light.The light beam spatial position for realizing different wave length ingredient is different, and the optical axis of each light beam is mutual In parallel.When focusing block 208 (microlens array) is placed, the optical axis of each lenticule, and be emitted from the second reflecting grating 207 Collimated light optical axis keeping parallelism.The light beam of different wave length can be impinged perpendicularly on different lenticules due to spatial position difference, To be focused onto each micro-reflector on the different location of DMD target surface.Using grating to (the first reflecting grating 206 and second Reflecting grating 207) dispersion collimation is carried out to light beam, it can be easy advantageously to realize that the light of different wave length is parallel to each other, and light Axis can impinge perpendicularly on reflecting surface the micro-reflector of (DMD target surface), can guarantee that light beam after reflection can be from former light with this Road returns.
Fig. 3 shows the schematic illustration that filter wavelength selection filtering is carried out using DMD, and the light beam of different wave length is by micro- Different location in lens array on different micro lens to DMD target surface.The target surface of DMD is by many densely arranged micro- anti- Mirror (micro mirror) composition is penetrated, each micro-reflector (micro mirror) can carry out centainly by loading certain voltage value control to DMD The overturning of angle.Such as the DMD of Texas Instrument's D4100 model, on the target surface of 0.95 inch of size, arranged 1920*1080 A micro mirror, each micro mirror can carry out ± 12 ° of overturning.As shown in figure 3, it is right to can control its for the wavelength 1 for wanting to filter The micro mirror overturning answered, can reflect the light onto other directions, the output optical fiber 203 can not be back to along original optical path;And for thinking The wavelength 2 to be retained, then need to only keep micro mirror not overturn can be back to light beam the output optical fiber 203.DMD can be with programming Control The rollover states of each micro mirror, it can arbitrarily selection different number, different wave length outgoing realize the optical filtering function of multi-wavelength Energy.Since each lenticule in microlens array, each micro mirror on DMD have the dimensions, in the two devices In the selection of part, it should which the size of micro mirror matches in the diffraction limited spot size of guarantee micro lens and DMD as far as possible.
A kind of tuning filtering apparatus and tuning filtering method based on DMD, utilizes reflection provided by the embodiment of the present invention The grating pair of first reflecting grating 206 and reflection the second reflecting grating 207 composition, carries out dispersion collimation to light beam, realizes not The light beam of co-wavelength is parallel to each other transmission in different spatial, while being focused with microlens array, ensure that difference The optical axis of wavelength components and the vertical incidence of reflecting surface (DMD target surface) realize light beam and return after reflection along original optical path.
The above-mentioned tuning filtering apparatus based on DMD is used DMD as reflecting surface, is turned over using micro mirror PLC technology on DMD The light beam of the corresponding different wave length of different micro mirrors is controllably selectively reflected back the output optical fiber 203 by the characteristics of turning, or reflection is partially From original optical path, the programmable tuber function of filter wavelength, and the above-mentioned tuning filtering apparatus based on DMD, structure phase are realized with this To simple, the position of each element is fixed, and without carrying out mechanical rotation etc., ensure that the stability of system.Moreover, in system Element has the advantage of high transmittance almost without the absorption loss to fluorescence.Meanwhile the PLC technology that DMD is utilized is special The tuber function that any wavelength filters may be implemented in point.Moreover, the working frequency of DMD can reach compared to other tuning manners To 10KHz, even tens KHz, tuning speed can be improved, easily realize the tuber function of fast and stable.
The above is merely preferred embodiments of the present invention, be not intended to limit the invention, it is all in spirit of the invention and Made any modification, equivalent replacement or improvement etc., should all be included in the protection scope of the present invention within principle.

Claims (10)

1. a kind of tuning filtering apparatus based on DMD, which is characterized in that including with incident light port and outgoing optical port go out Enter optical assembly, further include Digital Micromirror Device and for light beam carry out dispersion collimation so that the light beam of different wave length in different skies Between position be parallel to each other the dispersion collimator apparatus of transmission, the Digital Micromirror Device have it is multiple can independent control and for that will set The reflection of the road standing wave Chang Guangyuan and the micro-reflector that the light outside setting wavelength is reflexed to deviation original optical path, the dispersion collimation dress Set the focus portion being provided between the Digital Micromirror Device for the light beam of different wave length to be focused on to the micro-reflector Part.
2. a kind of tuning filtering apparatus based on DMD as described in claim 1, which is characterized in that the discrepancy optical assembly is Optical fiber circulator, the optical fiber circulator has incident light port, outgoing optical port and is only capable of receiving to be penetrated from incident light port Enter light beam and is only capable of that the transmitting-receiving port of optical port will be emitted described in guides reflected light.
3. a kind of tuning filtering apparatus based on DMD as claimed in claim 2, which is characterized in that the optical fiber circulator packet Incident optical, the output optical fiber and transmitting-receiving optical fiber are included, one end of incident optical is incident light port, and one end of the output optical fiber is outgoing The other end of optical port, the other end of the incident optical and the output optical fiber is connected to the same end of the transmitting-receiving optical fiber.
4. a kind of tuning filtering apparatus based on DMD as described in claim 1, which is characterized in that the discrepancys optical assembly and The collimating components for collimating and being used to focus emergent light incident beam are additionally provided between the dispersion collimator apparatus.
5. a kind of tuning filtering apparatus based on DMD as claimed in claim 4, which is characterized in that the collimating components are convex Lens or concave mirror.
6. a kind of tuning filtering apparatus based on DMD as described in any one of claims 1 to 5, which is characterized in that the color Scattered collimator apparatus includes irradiating and reflecting to form the first reflecting grating of dispersed light and for receiving for receiving collimated light beam From the dispersed light of first reflecting grating and reflect to form the second reflecting grating of collimation dispersed light.
7. a kind of tuning filtering apparatus based on DMD as claimed in claim 6, which is characterized in that first reflecting grating It is arranged in parallel with second reflecting grating.
8. a kind of tuning filtering apparatus based on DMD as claimed in claim 6, which is characterized in that the focusing block is micro- Lens array, the microlens array include the dimpling lens of multiple arrays setting, the optical axis of the dimpling lens with from described The optical axis of the collimation dispersed light of second reflecting grating outgoing is parallel.
9. a kind of tuning filtering apparatus based on DMD as described in any one of claims 1 to 5, which is characterized in that the number Word micro mirror element has drives the micro-reflector to turn over for loading on the micro-reflector corresponding voltage by programming Control The programming Control module of gyration.
10. a kind of tuning filtering method based on DMD, which is characterized in that using as claimed in any one of claims 1-9 wherein A kind of tuning filtering apparatus based on DMD, comprising the following steps:
Incident beam is injected from the incident light port for entering and leaving optical assembly;
Incident beam is incident to dispersion collimator apparatus, and incident beam is formed different wave length component space by the dispersion collimator apparatus The different output beam in position;
The output beam of different wave length ingredient is focused to the micro- anti-of Digital Micromirror Device by focusing block by the output beam Penetrate mirror;
For setting the reservation light beam of wavelength, corresponding micro-reflector keeps vertical with the optical axis of light beam is retained, and micro-reflector will Retain light beam and reflect to form outgoing beam, outgoing beam is back to from original optical path to be entered and left optical assembly and project from outgoing optical port;
For the filtered beam outside setting wavelength, filtered beam is reflexed to deviation original optical path by corresponding micro-reflector overturning.
CN201811627296.4A 2018-12-28 2018-12-28 A kind of tuning filtering apparatus and tuning filtering method based on DMD Pending CN109683307A (en)

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CN116896616A (en) * 2023-04-21 2023-10-17 上海交通大学 DMD projection method capable of compensating chromatic dispersion

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CN114690328A (en) * 2022-04-19 2022-07-01 无锡迅杰光远科技有限公司 Digital adjustable multi-channel light path control method
CN116896616A (en) * 2023-04-21 2023-10-17 上海交通大学 DMD projection method capable of compensating chromatic dispersion

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Application publication date: 20190426