CN109813234A - A Laser Displacement Detector Based on CCD - Google Patents
A Laser Displacement Detector Based on CCD Download PDFInfo
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- CN109813234A CN109813234A CN201910159418.XA CN201910159418A CN109813234A CN 109813234 A CN109813234 A CN 109813234A CN 201910159418 A CN201910159418 A CN 201910159418A CN 109813234 A CN109813234 A CN 109813234A
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Abstract
本发明公开了一种基于CCD的激光位移探测器，属于位置监测技术领域，可应用于不同相关工程监测领域。该探测器包括激光器、缩束器、CCD探测器、多轴定位调节台、激光器固定架及探测器固定架，激光器固定于激光器固定架并整体安装于定位基准的多轴定位台上，缩束器与CCD探测器固定在探测器固定架上并整体安装于被测基准的多轴定位台上，激光器与探测器通过调节多轴定位台实现中心对准，通过首次测定激光束的基准位置在CCD探测器中的光强分布，若定位基准与被测基准发生位置偏移，通过探测器再次获取激光束在CCD探测器中的光强分布，即可高精度测出被测基准与激光对准基准的相对偏差。
The invention discloses a CCD-based laser displacement detector, which belongs to the technical field of position monitoring and can be applied to different related engineering monitoring fields. The detector includes a laser, a beam reducer, a CCD detector, a multi-axis positioning adjustment table, a laser fixing frame and a detector fixing frame. The detector and the CCD detector are fixed on the detector holder and integrally installed on the multi-axis positioning table of the measured benchmark. The laser and the detector are aligned by adjusting the multi-axis positioning table. The light intensity distribution in the CCD detector, if the positioning datum and the measured datum are offset, the light intensity distribution of the laser beam in the CCD detector can be obtained again through the detector, and the measured datum and the laser can be measured with high precision. The relative deviation of the quasi-benchmark.
Description
Technical field
The present invention relates to position monitoring technical field, in particular to a kind of Laser Displacement Sensor based on CCD is applicable in
In the monitoring system of particle accelerator key components relative position variation.
Background technique
Existing laser displacement sensor is measured using laser technology, by laser, laser detector and survey
Circuit composition is measured, according to measuring principle, laser displacement sensor principle is divided into laser triangulation and return laser beam analytic approach,
Laser triangulation applies in general to high-precision, short-range measurement, and return laser beam analysis rule is used for telemeasurement.
Laser triangulation working principle is that laser emitter by camera lens will be seen that red laser directive testee surface, through object
The laser of body reflection is received, according to different distances, CCD linear camera by receiver camera lens by internal CCD linear camera
This luminous point " can be seen " under a different angle.According to this angle and the distance between known laser and camera, number
Word signal processor can calculate the distance between sensor and testee.Meanwhile light beam is logical in the position of receiving element
Analogy and digital circuit processing is crossed, and by microprocessor analysis, calculates corresponding output valve, and in simulation set by user
It measures in window, in proportion outputting standard data-signal.If be connected in the window of setting, window using output switch parameter
Except end.In addition, analog quantity and output switch parameter can be independently arranged detection window.Laser displacement sensor uses echo analysis
Principle is come the precision that measures distance to reache a certain level.Sensor internal is by processor unit, Echo Processing unit, laser
The part such as transmitter, laser pickoff forms.Laser displacement sensor passes through 1,000,000 laser of laser emitter transmitting per second
Pulse is to detectable substance and is back to receiver, when processor calculating laser pulse encounters detectable substance and is back to needed for receiver
Between, distance value is calculated with this, which is the average output for carrying out thousands of measurement results.I.e. so-called pulse when
Between method measure.Return laser beam analytic approach is suitable for detecting over long distances, but measurement accuracy wants low relative to laser triangulation,
Farthest detecting distance is up to 250m.Temporarily have not seen directly by being expanded to laser beam, shrink beam handle and it is sharp to combine CCD to acquire
The Laser Displacement Sensor of light image analysis micro-displacement.
Summary of the invention
The object of the present invention is to provide a kind of new Laser Displacement Sensors based on CCD.
The invention adopts the following technical scheme:
The invention discloses a kind of Laser Displacement Sensors based on CCD.Including laser 1, shrink beam device 3, ccd detector
4, the first multiaxis positioning regulating platform 51, the second multiaxis positioning regulating platform 52, laser holder and detector fixed frame.Laser
1 is fixed on laser holder 7 and is mounted as a whole on the first multiaxis positioning table 51 of positioning datum, shrink beam device 3 and CCD detection
Device 4 is fixed on detector fixed frame 6 and is mounted as a whole on the second multiaxis positioning table 52 of tested benchmark, laser 1 and contracting
Beam device 3, ccd detector 4 realize center alignment by adjusting multiaxis positioning table.
The device of the invention carries out diminution processing to laser beam using shrink beam device, and shrink beam device 3 and ccd detector 4 pass through spy
The mechanical structure for surveying device fixed frame 6 guarantees center alignment.
It should be noted that the light distribution by the base position of First Determination laser beam in ccd detector, when fixed
Positional shift occurs for position benchmark and tested benchmark, obtains light distribution of the laser beam in ccd detector again by detector,
The relative deviation of tested benchmark Yu laser alignment benchmark can be measured.
It should be noted that laser has been internally integrated beam-expanding system, the laser beam issued from laser has already passed through interior
Portion expands processing.The size of laser is not limited to graphic scale size.
It should be understood that ccd detector also can be used cmos detector instead of using.
It should be understood that ccd detector 4 is aligned with the center of shrink beam device 3 can be realized using other mechanical structures, no
It is confined to the mechanical structure that the application mentions.
It should be understood that shrink beam device can be substituted using the attenuator of different shrink beam ratios.
It should be understood that laser can be propagated in vacuum environment or atmospheric environment in the present invention.
It should be understood that the first multiaxis positioning table 51 and the second multiaxis positioning table 52 can be only under certain specific condition
Using one or all do not use.
The beneficial effects of the present invention are:
Laser Displacement Sensor of the invention effectively increases detection accuracy using relative displacement detection method.Using phase
It closes algorithm and calculates the available ccd detector a quarter Pixel size of light distribution highest of the laser beam in ccd detector
Measurement accuracy.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of middle and long distance of embodiment of the present invention laser displacement inspecting device.
In figure, 1 be laser, 2 be laser issue laser beam, 3 be shrink beam device, 4 be ccd detector, 51 be first
Multiaxis positioning regulating platform, 52 for the second multiaxis position regulating platform, 7 be laser holder, 6 be detector fixed frame, 8 be by
Laser beam after shrink beam device.
Specific embodiment
The present invention is described in more detail with reference to the accompanying drawings and examples.
In Fig. 1, a kind of Laser Displacement Sensor based on CCD of the present invention includes laser 1, shrink beam device 3, CCD detection
Device 4, the first multiaxis positioning regulating platform 51, the second multiaxis positioning regulating platform 52, laser holder and detector fixed frame.Laser
Device 1 is fixed on laser holder 7 and is mounted as a whole on the first multiaxis positioning table 51 of positioning datum, and shrink beam device 3 and CCD are visited
Survey device 4 be fixed on detector fixed frame 6 and be mounted as a whole on the second multiaxis positioning table 52 of tested benchmark, laser 1 with
Shrink beam device 3, ccd detector 4 realize center alignment by adjusting multiaxis positioning table.
Shrink beam device 3 guarantees that center is aligned by the mechanical structure of detector fixed frame 6 with ccd detector 4.In laser 1
Portion is integrated with beam-expanding system, and the laser beam 2 issued from laser has already passed through inside and expands processing.Pass through ccd detector for the first time
The base position of laser beam is measured, if positional shift occurs for positioning datum and tested benchmark, laser is obtained by detector again
The hot spot transversal displacement of beam, can measure the relative deviation of tested benchmark Yu laser alignment benchmark.
Claims (4)
1. a kind of Laser Displacement Sensor based on CCD, it is characterised in that: including laser (1), shrink beam device (3), CCD detection
Device (4), the first multiaxis positioning regulating platform (51), the second multiaxis positioning regulating platform (52), laser holder (7) and detector are solid
Determine frame (6)；Laser (1) is fixed on laser holder (7) and is mounted as a whole on the first multiaxis positioning table of positioning datum
(51) on, shrink beam device (3) and ccd detector (4) are fixed on detector fixed frame (6) and are mounted as a whole on the of tested benchmark
On two multiaxis positioning tables (52), laser (1) and shrink beam device (3), ccd detector (4) are by adjusting in the realization of multiaxis positioning table
Heart alignment.
2. the Laser Displacement Sensor according to claim 1 based on CCD, it is characterised in that: using shrink beam device to laser
Shu Jinhang diminution processing, shrink beam device (3) guarantee center pair by the mechanical structure of detector fixed frame (6) with ccd detector (4)
It is quasi-.
3. the Laser Displacement Sensor according to claim 1 based on CCD, it is characterised in that: pass through ccd detector for the first time
(4) base position of laser beam is measured, if positional shift occurs for positioning datum and tested benchmark, is obtained and is swashed again by detector
The imaging position of light beam can measure the relative deviation of tested benchmark Yu laser alignment benchmark.
4. the Laser Displacement Sensor according to claim 1 based on CCD, it is characterised in that: calculate light distribution in CCD
The deviation of detector (4) imaging, to obtain the position of positioning datum Yu tested benchmark.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910159418.XA CN109813234A (en) | 2019-03-04 | 2019-03-04 | A Laser Displacement Detector Based on CCD |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910159418.XA CN109813234A (en) | 2019-03-04 | 2019-03-04 | A Laser Displacement Detector Based on CCD |
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| CN109813234A true CN109813234A (en) | 2019-05-28 |
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| CN201910159418.XA Pending CN109813234A (en) | 2019-03-04 | 2019-03-04 | A Laser Displacement Detector Based on CCD |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114322959A (en) * | 2022-01-06 | 2022-04-12 | 中国电建集团福建工程有限公司 | Construction safety monitoring system and construction method of large underground high-voltage transformer substation |
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| CN101339003A (en) * | 2008-08-01 | 2009-01-07 | 重庆交通大学 | Device and method for automatic measurement of horizontal two-dimensional displacement of large structures |
| CN201181203Y (en) * | 2008-03-27 | 2009-01-14 | 中铁西南科学研究院有限公司 | Tunnel displacement monitoring system based on image sensor |
| CN102944177A (en) * | 2012-11-15 | 2013-02-27 | 西安交通大学 | Method for calibrating and replacing laser or displacement sensor in long-term measurement system |
| CN104880155A (en) * | 2015-06-05 | 2015-09-02 | 苏州市建设工程质量检测中心有限公司 | Long-distance reference laser displacement sensor and distance measurement method thereof |
| CN104897067A (en) * | 2015-06-19 | 2015-09-09 | 天津大学 | Laser image real time monitoring method measuring relative displacement |
| CN106441108A (en) * | 2016-09-14 | 2017-02-22 | 苏州市建筑科学研究院集团股份有限公司 | Vision displacement measurement system and method |
| CN208567794U (en) * | 2018-05-17 | 2019-03-01 | 西安邮电大学 | A Precise Measurement Device of PSD Displacement Based on Spiral Micrometer |
| CN210004954U (en) * | 2019-03-04 | 2020-01-31 | 中国科学技术大学 | A Laser Displacement Detector Based on CCD |
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2019
- 2019-03-04 CN CN201910159418.XA patent/CN109813234A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201181203Y (en) * | 2008-03-27 | 2009-01-14 | 中铁西南科学研究院有限公司 | Tunnel displacement monitoring system based on image sensor |
| CN101339003A (en) * | 2008-08-01 | 2009-01-07 | 重庆交通大学 | Device and method for automatic measurement of horizontal two-dimensional displacement of large structures |
| CN102944177A (en) * | 2012-11-15 | 2013-02-27 | 西安交通大学 | Method for calibrating and replacing laser or displacement sensor in long-term measurement system |
| CN104880155A (en) * | 2015-06-05 | 2015-09-02 | 苏州市建设工程质量检测中心有限公司 | Long-distance reference laser displacement sensor and distance measurement method thereof |
| CN104897067A (en) * | 2015-06-19 | 2015-09-09 | 天津大学 | Laser image real time monitoring method measuring relative displacement |
| CN106441108A (en) * | 2016-09-14 | 2017-02-22 | 苏州市建筑科学研究院集团股份有限公司 | Vision displacement measurement system and method |
| CN208567794U (en) * | 2018-05-17 | 2019-03-01 | 西安邮电大学 | A Precise Measurement Device of PSD Displacement Based on Spiral Micrometer |
| CN210004954U (en) * | 2019-03-04 | 2020-01-31 | 中国科学技术大学 | A Laser Displacement Detector Based on CCD |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114322959A (en) * | 2022-01-06 | 2022-04-12 | 中国电建集团福建工程有限公司 | Construction safety monitoring system and construction method of large underground high-voltage transformer substation |
| CN114322959B (en) * | 2022-01-06 | 2023-05-23 | 中国电建集团福建工程有限公司 | Construction safety monitoring system and construction method for large-scale underground high-voltage transformer substation |
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