CN109903708B - Measurement system and measurement parameter setting method thereof - Google Patents
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Abstract
The invention provides a measurement system and a measurement parameter setting method thereof. In the measuring system, the parameter setting module inputs initial measuring parameters corresponding to a product to be measured and uploads the initial measuring parameters to the storage module, one measuring machine in the plurality of measuring machines loads the product to be measured, the measuring machine which loads the product to be measured downloads the initial measuring parameters corresponding to the product to be measured from the storage module, the downloaded initial measuring parameters are adjusted to generate adjusted measuring parameters corresponding to the product to be measured and then uploads the adjusted measuring parameters to the storage module, and other measuring machines except the measuring machine which loads the product to be measured in the plurality of measuring machines download the adjusted measuring parameters corresponding to the product to be measured from the storage module, so that the plurality of measuring machines can share the measuring parameters, the measuring parameter setting time is saved, and the utilization rate of the measuring machines is increased.
Description
Technical Field
The invention relates to the technical field of display manufacturing, in particular to a measurement system and a measurement parameter setting method thereof.
Background
In the field of Display technology, flat panel Display devices such as Liquid Crystal Display (LCD) devices and Organic Light Emitting Diode (OLED) Display devices have gradually replaced CRT (Cathode Ray Tube) Display devices. The liquid crystal display device has many advantages of thin body, power saving, no radiation, etc., and is widely used.
Most of the existing liquid crystal display devices in the market are backlight liquid crystal display devices, which include a liquid crystal display panel and a backlight module (backlight module). Generally, a Liquid Crystal display panel includes a Color Filter (CF) substrate, a Thin Film Transistor (TFT) array substrate, a Liquid Crystal (LC) sandwiched between the Color Filter substrate and the TFT array substrate, and a Sealant frame (Sealant). The liquid crystal display panel has the working principle that liquid crystal molecules are placed in two parallel glass substrates, a plurality of vertical and horizontal fine wires are arranged between the two glass substrates, and the liquid crystal molecules are controlled to change directions by electrifying or not, so that light rays of the backlight module are refracted out to generate pictures.
The OLED device of the OLED display apparatus generally includes: the electron injection device comprises a substrate, an anode arranged on the substrate, a hole injection layer arranged on the anode, a hole transport layer arranged on the hole injection layer, a luminescent layer arranged on the hole transport layer, an electron transport layer arranged on the luminescent layer, an electron injection layer arranged on the electron transport layer and a cathode arranged on the electron injection layer. The light emitting principle of the OLED device is that a semiconductor material and an organic light emitting material emit light under the drive of an electric field through carrier injection and recombination. Specifically, an Indium Tin Oxide (ITO) electrode and a metal electrode are generally used as an anode and a cathode of the device, respectively, and under a certain voltage, electrons and holes are injected into an electron transport layer and a hole transport layer from the cathode and the anode, respectively, and the electrons and the holes migrate to a light emitting layer through the electron transport layer and the hole transport layer, respectively, and meet in the light emitting layer to form excitons and excite light emitting molecules, which emit visible light through radiative relaxation.
In the manufacturing process of the display device, a measuring machine is needed to measure products to be measured, including semi-finished products and finished products of the display device, so as to obtain key parameters for judging the quality of the display device. In the prior art, when a measuring machine is used to measure a product, a measuring parameter (Recipe) corresponding to the product to be measured needs to be set in the measuring machine. Referring to fig. 1, a method for setting measurement parameters of a plurality of measurement tools includes: step S1 ', generating initial measurement parameters corresponding to the product to be measured, step S2 ', selecting one of the plurality of measurement machines as a measurement machine to be adjusted, placing the product to be measured into the measurement machine to be adjusted, inputting the initial measurement parameters into the measurement machine to be adjusted, adjusting the initial measurement parameters to generate adjusted measurement parameters corresponding to the product to be measured, step S3 ', and repeating step S2 ' until each measurement machine performs step S2 '. The method for setting the measurement parameters needs to set the plurality of measurement machines one by one after the plurality of measurement machines are stopped, so that the Overall Equipment Efficiency (OEE) is low, and meanwhile, the situation that some measurement machines have measurement parameters adjusted and other measurement machines have no measurement parameters adjusted possibly occurs, and management confusion is caused.
Disclosure of Invention
The invention aims to provide a measuring system, which can share measuring parameters among a plurality of measuring machines, save the setting time of the measuring parameters and improve the utilization rate of the measuring machines.
Another objective of the present invention is to provide a method for setting measurement parameters of a measurement system, wherein a plurality of measurement machines can share the measurement parameters, thereby saving the time for setting the measurement parameters and increasing the utilization rate of the measurement machines.
In order to achieve the above object, the present invention provides a measurement system, which includes a parameter setting module, a storage module connected to the parameter setting module, and a plurality of measurement machines connected to the storage module;
the parameter setting module is used for inputting initial measurement parameters corresponding to the products to be measured and uploading the initial measurement parameters to the storage module;
a product to be measured is placed into one of the measuring machines, the measuring machine into which the product to be measured is placed downloads an initial measuring parameter corresponding to the product to be measured from the storage module, and after the initial measuring parameter downloaded by the measuring machine into which the product to be measured is placed is adjusted to generate an adjusted measuring parameter corresponding to the product to be measured, the measuring machine into which the product to be measured is placed uploads the adjusted measuring parameter to the storage module; and downloading the adjusted measurement parameters corresponding to the product to be measured from the storage module by other measuring machines except the measuring machine in which the product to be measured is put in the plurality of measuring machines.
And when receiving a modification instruction corresponding to the adjustment measurement parameter, the parameter setting module downloads the adjustment measurement parameter from the storage module, modifies the adjustment measurement parameter according to the modification instruction, uploads the modified adjustment measurement parameter to the storage module and transmits the modified adjustment measurement parameter to the plurality of measurement machines through the storage module.
The initial measurement parameters comprise initial machine alignment parameters, initial measurement point location parameters and initial analysis detection parameters, and the adjustment measurement parameters comprise adjustment machine alignment parameters, adjustment measurement point location parameters and adjustment analysis detection parameters.
The storage module is a networking sharing folder or an FTP server.
The parameter setting module is a virtual computer or simulation software.
The invention also provides a measuring parameter setting method of the measuring system, which comprises the following steps:
step S1, providing a product to be measured and a measuring system;
the measuring system comprises a parameter setting module, a storage module connected with the parameter setting module and a plurality of measuring machines connected with the storage module;
step S2, generating initial measurement parameters corresponding to the product to be measured;
step S3, inputting the initial measurement parameters corresponding to the product to be measured into a parameter setting module;
step S4, the parameter setting module uploads the initial measurement parameters corresponding to the product to be measured to the storage module;
step S5, placing the product to be measured into one of the measuring machines, and downloading the initial measuring parameters corresponding to the product to be measured from the storage module by the measuring machine in which the product to be measured is placed; adjusting the initial measurement parameters downloaded by the measurement machine station for placing the product to be measured to generate adjusted measurement parameters corresponding to the product to be measured, and uploading the adjusted measurement parameters to a storage module by the measurement machine station for placing the product to be measured;
step S6, the other measuring machines except the measuring machine in which the product to be measured is placed download the adjusted measuring parameters corresponding to the product to be measured from the storage module.
The method for setting the measurement parameters of the measurement system further comprises the following steps:
step S7, inputting a modification instruction corresponding to the adjustment measurement parameter to the parameter setting module;
step S8, the parameter setting module downloads the adjustment measurement parameter from the storage module and modifies the adjustment measurement parameter according to the modification instruction;
step S9, the parameter setting module uploads the modified adjusted measurement parameters to the storage module and transmits the parameters to a plurality of measurement machines through the storage module.
The initial measurement parameters comprise initial machine alignment parameters, initial measurement point location parameters and initial analysis detection parameters, and the adjustment measurement parameters comprise adjustment machine alignment parameters, adjustment measurement point location parameters and adjustment analysis detection parameters.
The storage module is a networking sharing folder or an FTP server.
The parameter setting module is a virtual computer or simulation software.
The invention has the beneficial effects that: in the measuring system, the parameter setting module inputs initial measuring parameters corresponding to a product to be measured and uploads the initial measuring parameters to the storage module, one measuring machine in the plurality of measuring machines loads the product to be measured, the measuring machine which loads the product to be measured downloads the initial measuring parameters corresponding to the product to be measured from the storage module, the downloaded initial measuring parameters are adjusted to generate adjusted measuring parameters corresponding to the product to be measured and then uploads the adjusted measuring parameters to the storage module, and other measuring machines except the measuring machine which loads the product to be measured in the plurality of measuring machines download the adjusted measuring parameters corresponding to the product to be measured from the storage module, so that the plurality of measuring machines can share the measuring parameters, the measuring parameter setting time is saved, and the utilization rate of the measuring machines is increased. In the measuring parameter setting method of the measuring system, a plurality of measuring machines can share measuring parameters, so that the measuring parameter setting time is saved, and the utilization rate of the measuring machines is increased.
Drawings
For a better understanding of the nature and technical aspects of the present invention, reference should be made to the following detailed description of the invention, taken in conjunction with the accompanying drawings, which are provided for purposes of illustration and description and are not intended to limit the invention.
In the drawings, there is shown in the drawings,
FIG. 1 is a flow chart illustrating a conventional method for setting measurement parameters of a plurality of metrology tools;
FIG. 2 is a schematic view of a metrology system of the present invention;
FIG. 3 is a flowchart illustrating a method for setting measurement parameters of a measurement system according to the present invention.
Detailed Description
To further illustrate the technical means and effects of the present invention, the following detailed description is given with reference to the preferred embodiments of the present invention and the accompanying drawings.
Referring to fig. 2, the present invention provides a metrology system, which includes a parameter setting module 10, a storage module 20 connected to the parameter setting module 10, and a plurality of metrology tools 30 connected to the storage module 20.
The parameter setting module 10 is configured to input an initial measurement parameter corresponding to a product to be measured and upload the initial measurement parameter to the storage module 20. The initial measurement corresponding to the product to be measured is generated by adopting the prior art. The initial measurement parameters comprise an initial machine alignment parameter, an initial measurement point location parameter and an initial analysis detection parameter.
Specifically, the parameter setting module 10 is a virtual computer (PC) or simulation software.
Specifically, the storage module 20 is a networked shared folder or an FTP (file transfer protocol) server.
Specifically, the storage module 20 is provided with a folder corresponding to the plurality of metrology tools 30, and the parameter setting module 10 uploads the initial metrology parameters to the folder corresponding to the plurality of metrology tools 30 in the storage module 20. The plurality of metrology tools 30 are named according to the same naming rule, and the parameter setting module 10 uploads the initial metrology parameters to the storage module 20 to name the initial metrology parameters according to the same naming rule as the plurality of metrology tools 30.
Specifically, the plurality of measuring machines 30 are pre-corrected in advance to correct the machine point difference between different measuring machines 30.
A product to be measured is placed into one of the measuring machines 30, the measuring machine 30 in which the product to be measured is placed downloads an initial measuring parameter corresponding to the product to be measured from the storage module 20, and after the initial measuring parameter downloaded by the measuring machine 30 in which the product to be measured is placed is adjusted to generate an adjusted measuring parameter corresponding to the product to be measured, the measuring machine 30 in which the product to be measured is placed uploads the adjusted measuring parameter to the storage module 20. The other measuring machines 30 except the measuring machine 30 in which the product to be measured is placed in the plurality of measuring machines 30 download the adjusted measuring parameters corresponding to the product to be measured from the storage module 20.
Specifically, the adjusting of the measurement parameters includes adjusting the machine alignment parameters, adjusting the measurement point location parameters, and adjusting the analysis detection parameters.
Specifically, when receiving a modification instruction corresponding to the adjusted measurement parameter, the parameter setting module 10 downloads the adjusted measurement parameter from the storage module 20 and modifies the adjusted measurement parameter according to the modification instruction, and uploads the modified adjusted measurement parameter to the storage module 20 and transmits the modified adjusted measurement parameter to the plurality of measurement machines 30 through the storage module 20.
It should be noted that, in the measuring system of the present invention, the parameter setting module 10 inputs the initial measuring parameters corresponding to the product to be measured and uploads the initial measuring parameters to the storage module 20, one measuring machine 30 of the plurality of measuring machines 30 loads the product to be measured, the measuring machine 30 that loads the product to be measured downloads the initial measuring parameters corresponding to the product to be measured from the storage module 20 and uploads the measuring parameters to be adjusted to the storage module 20 after adjusting the downloaded initial measuring parameters to generate the adjusted measuring parameters corresponding to the product to be measured, the other measuring machines 30 of the plurality of measuring machines 30 except the measuring machine 30 that loads the product to be measured download the adjusted measuring parameters corresponding to the product to be measured from the storage module 20, so that the plurality of measuring machines 30 can share the measuring parameters, compared with the prior art that a machine needs to be shut down and each measuring machine needs to adjust and set the measuring parameters, the invention can save the setting time of measurement parameters and the utilization rate of the elevator platform.
Referring to fig. 3, based on the same inventive concept, the present invention further provides a method for setting measurement parameters of a measurement system, including the following steps:
step S1, providing a product to be measured and the measurement system shown in fig. 1.
The measuring system comprises a parameter setting module 10, a storage module 20 connected with the parameter setting module 10, and a plurality of measuring machines 30 connected with the storage module 20.
Specifically, the parameter setting module 10 is a virtual computer or simulation software.
Specifically, the storage module 20 is a networked shared folder or an FTP server.
Specifically, the storage module 20 is provided with a folder corresponding to the plurality of metrology tools 30. The plurality of metrology tools 30 are named using the same naming convention.
Specifically, the plurality of measuring machines 30 are pre-corrected in advance to correct the machine point difference between different measuring machines 30.
And step S2, generating initial measurement parameters corresponding to the product to be measured.
Specifically, the initial measurement corresponding to the product to be measured is generated by using the prior art. The initial measurement parameters comprise an initial machine alignment parameter, an initial measurement point location parameter and an initial analysis detection parameter.
Step S3, inputting the initial measurement parameters corresponding to the product to be measured into the parameter setting module 10.
In step S4, the parameter setting module 10 uploads the initial measurement parameters corresponding to the product to be measured to the storage module 20.
Specifically, in the step S4, the parameter setting module 10 uploads the initial measurement parameters to the storage module 20 in a folder corresponding to the plurality of measurement machines 30, and the parameter setting module 10 uploads the initial measurement parameters to the storage module 20 and names the initial measurement parameters by using the same naming rule as the plurality of measurement machines 30.
Step S5, the product to be measured is placed into one of the measuring machines 30, and the measuring machine 30 in which the product to be measured is placed downloads the initial measurement parameters corresponding to the product to be measured from the storage module 20. The initial measurement parameters downloaded by the measurement machine 30 for placing the product to be measured are adjusted to generate adjusted measurement parameters corresponding to the product to be measured, and the measurement machine 30 for placing the product to be measured uploads the adjusted measurement parameters to the storage module 20.
Specifically, the adjusting of the measurement parameters includes adjusting the machine alignment parameters, adjusting the measurement point location parameters, and adjusting the analysis detection parameters.
In step S6, the other measuring machines 30 except the measuring machine 30 in which the product to be measured is placed in the plurality of measuring machines 30 download the adjusted measuring parameters corresponding to the product to be measured from the storage module 20 and perform the measurement setting by using the adjusted measuring parameters.
The method for setting the measurement parameters of the measurement system further comprises the following steps:
step S7, inputting a modification command corresponding to the adjustment of the measurement parameter to the parameter setting module 10.
In step S8, the parameter setting module 10 downloads the adjusted measurement parameters from the storage module 20 and modifies the adjusted measurement parameters according to the modification instruction.
In step S9, the parameter setting module 10 uploads the modified adjusted measurement parameters to the storage module 20 and transmits the modified adjusted measurement parameters to the plurality of metrology tools 30 through the storage module 20.
It should be noted that, in the method for setting measurement parameters of the measurement system of the present invention, the parameter setting module 10 inputs initial measurement parameters corresponding to a product to be measured and uploads the initial measurement parameters to the storage module 20, one measurement machine 30 of the plurality of measurement machines 30 loads the product to be measured, the measurement machine 30 that loads the product to be measured downloads the initial measurement parameters corresponding to the product to be measured from the storage module 20 and uploads the adjusted measurement parameters to the storage module 20 after adjusting the downloaded initial measurement parameters to generate adjusted measurement parameters corresponding to the product to be measured, and other measurement machines 30 of the plurality of measurement machines 30 except the measurement machine 30 that loads the product to be measured download the adjusted measurement parameters corresponding to the product to be measured from the storage module 20, so that the plurality of measurement machines 30 can share the measurement parameters, compared to the prior art, which needs to stop and separately adjust and set the measurement parameters for each measurement, the invention can save the setting time of measurement parameters and the utilization rate of the elevator platform.
In summary, in the measuring system of the present invention, the parameter setting module inputs the initial measuring parameters corresponding to the product to be measured and uploads the initial measuring parameters to the storage module, one of the measuring machines loads the product to be measured, the measuring machine that loads the product to be measured downloads the initial measuring parameters corresponding to the product to be measured from the storage module, and uploads the adjusted measuring parameters to the storage module after adjusting the downloaded initial measuring parameters to generate the adjusted measuring parameters corresponding to the product to be measured, and other measuring machines except the measuring machine that loads the product to be measured in the plurality of measuring machines download the adjusted measuring parameters corresponding to the product to be measured from the storage module, so that the plurality of measuring machines can share the measuring parameters, thereby saving the time for setting the measuring parameters and increasing the utilization rate of the measuring machines. In the measuring parameter setting method of the measuring system, a plurality of measuring machines can share measuring parameters, so that the measuring parameter setting time is saved, and the utilization rate of the measuring machines is increased.
As described above, it will be apparent to those skilled in the art that other various changes and modifications may be made based on the technical solution and concept of the present invention, and all such changes and modifications are intended to fall within the scope of the appended claims.
Claims (8)
1. A measurement system is characterized by comprising a parameter setting module (10), a storage module (20) connected with the parameter setting module (10) and a plurality of measurement machines (30) connected with the storage module (20);
the parameter setting module (10) is used for inputting initial measurement parameters corresponding to products to be measured and uploading the initial measurement parameters to the storage module (20);
a product to be measured is placed into one measuring machine (30) of a plurality of measuring machines (30), the measuring machine (30) placed with the product to be measured downloads initial measuring parameters corresponding to the product to be measured from the storage module (20), and the measuring machine (30) placed with the product to be measured uploads the adjusted measuring parameters to the storage module (20) after the initial measuring parameters downloaded by the measuring machine (30) placed with the product to be measured are adjusted to generate adjusted measuring parameters corresponding to the product to be measured; the other measuring machines (30) except the measuring machine (30) which is put in the product to be measured in the plurality of measuring machines (30) download the adjustment measuring parameters corresponding to the product to be measured from the storage module (20);
when receiving a modification instruction corresponding to the adjusted measurement parameter, the parameter setting module (10) downloads the adjusted measurement parameter from the storage module (20) and modifies the adjusted measurement parameter according to the modification instruction, and uploads the modified adjusted measurement parameter to the storage module (20) and transmits the modified adjusted measurement parameter to the plurality of measurement machines (30) through the storage module (20).
2. The metrology system of claim 1, wherein the initial metrology parameters comprise initial tool alignment parameters, initial metrology site parameters, and initial analysis detection parameters, and the adjusted metrology parameters comprise adjusted tool alignment parameters, adjusted metrology site parameters, and adjusted analysis detection parameters.
3. The metrology system of claim 1, wherein the storage module (20) is a networked shared folder or FTP server.
4. The metrology system of claim 1, wherein the parameter setting module (10) is a virtual computer or simulation software.
5. A method for setting measurement parameters of a measurement system is characterized by comprising the following steps:
step S1, providing a product to be measured and a measuring system;
the measuring system comprises a parameter setting module (10), a storage module (20) connected with the parameter setting module (10) and a plurality of measuring machines (30) connected with the storage module (20);
step S2, generating initial measurement parameters corresponding to the product to be measured;
step S3, inputting the initial measurement parameters corresponding to the product to be measured into the parameter setting module (10);
step S4, the parameter setting module (10) uploads the initial measurement parameters corresponding to the product to be measured to the storage module (20);
step S5, placing the product to be measured into one measuring machine (30) of the plurality of measuring machines (30), wherein the measuring machine (30) placed with the product to be measured downloads the initial measuring parameters corresponding to the product to be measured from the storage module (20); adjusting the initial measurement parameters downloaded by the measurement machine (30) for placing the product to be measured to generate adjusted measurement parameters corresponding to the product to be measured, and uploading the adjusted measurement parameters to the storage module (20) by the measurement machine (30) for placing the product to be measured;
step S6, downloading the adjusted measurement parameters corresponding to the product to be measured from the storage module (20) by other measuring machines (30) except the measuring machine (30) in which the product to be measured is put in the plurality of measuring machines (30);
step S7, inputting a modification instruction corresponding to the adjustment measurement parameter to the parameter setting module (10);
step S8, the parameter setting module (10) downloads the adjustment measurement parameter from the storage module (20) and modifies the adjustment measurement parameter according to the modification instruction;
step S9, the parameter setting module (10) uploads the modified adjusted measurement parameter to the storage module (20) and transmits the modified adjusted measurement parameter to the plurality of measurement machines (30) through the storage module (20).
6. The method as claimed in claim 5, wherein the initial measurement parameters comprise initial tool alignment parameters, initial measurement location parameters and initial analysis detection parameters, and the adjusted measurement parameters comprise adjusted tool alignment parameters, adjusted measurement location parameters and adjusted analysis detection parameters.
7. The method for setting metrology parameters of a metrology system as claimed in claim 5, wherein the storage module (20) is a networked shared folder or FTP server.
8. The method for setting measurement parameters of a metrology system as claimed in claim 5, wherein the parameter setting module (10) is a virtual computer or simulation software.
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Address after: 9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Applicant after: TCL China Star Optoelectronics Technology Co.,Ltd. Address before: 9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Applicant before: Shenzhen China Star Optoelectronics Technology Co.,Ltd. |
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Denomination of invention: Measurement system and its measurement parameter setting method Effective date of registration: 20231113 Granted publication date: 20220426 Pledgee: Industrial and Commercial Bank of China Limited Shenzhen Guangming Sub branch Pledgor: TCL China Star Optoelectronics Technology Co.,Ltd. Registration number: Y2023980065368 |