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CN100373185C - Channel passband filters with independently adjustable relative positions - Google Patents

Channel passband filters with independently adjustable relative positions Download PDF

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CN100373185C
CN100373185C CNB2004100670527A CN200410067052A CN100373185C CN 100373185 C CN100373185 C CN 100373185C CN B2004100670527 A CNB2004100670527 A CN B2004100670527A CN 200410067052 A CN200410067052 A CN 200410067052A CN 100373185 C CN100373185 C CN 100373185C
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CN1629658A (en
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吴永刚
田国勋
王占山
林小燕
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Tongji University
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Abstract

本发明提供了一种能够独立调整滤光片中通道位置与通带位置的设计方法,采用了基于Fabry-Perot标准具的对称结构。与传统的窄带滤光片和带通滤光片不同,它通过分别改变几个中间层的厚度来对通道的位置和通带的位置进行独立的调整,在实现通道与通带共存的基础上克服了两者位置调整时的位置相干现象。本发明介绍了滤光片的设计思路和具体的结构设计,以及在此设计下所计算出的通道通带滤光片的光谱特性等。所设计的滤光片可应用于光学探测仪器、空间技术等领域。

The invention provides a design method capable of independently adjusting the position of the channel and the position of the pass band in the optical filter, and adopts a symmetrical structure based on the Fabry-Perot etalon. Different from the traditional narrow-band filter and band-pass filter, it independently adjusts the position of the channel and the position of the pass-band by changing the thickness of several intermediate layers, on the basis of realizing the coexistence of the channel and the pass-band The position coherence phenomenon during the position adjustment of the two is overcome. The invention introduces the design idea and specific structural design of the optical filter, and the spectral characteristics of the channel passband optical filter calculated under the design. The designed optical filter can be used in optical detection instruments, space technology and other fields.

Description

相对位置可独立调整的通道通带滤光片 Channel passband filters with independently adjustable relative positions

技术领域 technical field

本发明涉及一种光学滤光片器件设计方法,具体涉及一种既有通道又有通带的滤光片的设计。在光学仪器、天文、遥感等方面有应用前景。The invention relates to a design method of an optical filter device, in particular to a design of an optical filter with both channels and passbands. It has application prospects in optical instruments, astronomy, remote sensing, etc.

背景技术 Background technique

传统的多通道带通滤光片一般有以下两种:Traditional multi-channel bandpass filters generally have the following two types:

1、基于Fabry-Perot标准具的多通道带通滤光片1. Multi-channel bandpass filter based on Fabry-Perot etalon

最典型的多通道带通滤光片为Fabry-Perot标准具结构。该滤光片为一对称结构,两端为反射层,中间为间隔层,经过反射层的多次反射,通过恰当选取间隔层的物理厚度,该结构可以得到具有多通道透过特性的带通滤光片,但由于所有通道的位置都与这一个间隔层的厚度有关系,这些通道的位置变化是相干的。因此,无法用此结构设计出通道相对位置可调整的滤光片。The most typical multi-channel bandpass filter is the Fabry-Perot etalon structure. The filter is a symmetrical structure, with reflective layers at both ends and a spacer layer in the middle. After multiple reflections of the reflective layer, by properly selecting the physical thickness of the spacer layer, this structure can obtain a bandpass with multi-channel transmission characteristics. filter, but since the positions of all channels are related to the thickness of this spacer layer, the position changes of these channels are coherent. Therefore, it is impossible to use this structure to design an optical filter whose relative positions of the channels can be adjusted.

2、Rugate类型的多通道带通滤光片2. Rugate type multi-channel bandpass filter

从设计的角度来讲,也许有着连续折射率结构的Rugate类型的多通道带通滤光片是最吸引人的,因为Rugate滤光片具有完美的数学变换形式。但是由于该类型的多通道带通滤光片所采用的介质要求为折射率渐变材料,因此尽管在理论上能够进行设计,但在镀制技术上,要比多层介质多通道带通滤光片困难得多。From a design point of view, perhaps the Rugate type of multi-channel bandpass filter with a continuous refractive index structure is the most attractive, because Rugate filters have a perfect mathematical transformation form. However, since the medium used in this type of multi-channel band-pass filter is required to be a graded-index material, although it can be designed in theory, it is more expensive than multi-layer dielectric multi-channel band-pass filter in terms of plating technology. film is much more difficult.

1987年S.John和E.Yablonovitch等人分别提出了光子晶体的概念。由于一维光子晶体在结构上类似于光学多层介质膜,因此从光子晶体的角度出发,通过对一维光子晶体光谱的形成机理,一维光子晶体中的电磁模密度和光子态密度的分析与研究,形成了许多新的技术。在一维光子晶体中插入缺陷层后引起晶体中光子态密度的变化,改变了一维光子晶体的禁带特性,并可以在光子禁带中形成通道。在此基础上,王利等人对一维光子晶体的异质结结构进行了研究。将两种不同介电常数的材料组成具有不同晶格常数的一维光子晶体,通过缺陷层的偶合组成具有掺杂的异质结结构,并利用异质结结构的带隙特点得到宽的截止带。由于杂质对异质结结构能带的调制,所以通过掺杂可在宽的截止带中得到两个窄的通带。它克服了传统窄带滤光片不能在一个宽截止带得到窄带滤光的缺点。并且通过调整缺陷层的位置以及大小,在宽禁带的背景上得到更多的透过通道。In 1987, S.John and E.Yablonovitch et al proposed the concept of photonic crystal respectively. Since one-dimensional photonic crystals are similar in structure to optical multilayer dielectric films, from the perspective of photonic crystals, through the formation mechanism of one-dimensional photonic crystal spectra, the analysis of electromagnetic mode density and photon density of states in one-dimensional photonic crystals With research, many new technologies have been formed. Inserting a defect layer into a one-dimensional photonic crystal causes a change in the photon state density in the crystal, changes the forbidden band characteristics of the one-dimensional photonic crystal, and can form a channel in the photonic forbidden band. On this basis, Wang Li and others studied the heterojunction structure of one-dimensional photonic crystals. Two materials with different dielectric constants are used to form a one-dimensional photonic crystal with different lattice constants, and a doped heterojunction structure is formed through the coupling of defect layers, and a wide cut-off is obtained by using the band gap characteristics of the heterojunction structure. bring. Due to the modulation of the energy band of the heterojunction structure by impurities, two narrow passbands can be obtained in a wide cutoff band by doping. It overcomes the shortcoming that traditional narrow-band filters cannot obtain narrow-band filtering in a wide cut-off band. And by adjusting the position and size of the defect layer, more transmission channels can be obtained on the background of the wide band gap.

采用光子晶体概念设计窄带滤光片的一个优点是可以预先设计工作波段。原因是光子晶体具有“标度不变性”,如果只改变晶格常数,而维持其他各项参数不变,则光子晶体的能带结构的总体形状不发生改变,只是透过峰的峰位和截止带的位置发生相应移动。One advantage of using the photonic crystal concept to design narrow-band filters is that the working band can be pre-designed. The reason is that photonic crystals have "scale invariance". If only the lattice constant is changed and other parameters are kept constant, the overall shape of the energy band structure of the photonic crystal will not change, only the peak positions and The position of the cut-off band is shifted accordingly.

基于Fabry-Perot标准具的多通道带通滤光片以及上述的一维光子晶体的异质结结构难以独立调整各通道的相对位置,且无法实现通道与通带共存,从而限制了通道带通滤光片的应用范围。The multi-channel bandpass filter based on the Fabry-Perot etalon and the heterojunction structure of the above-mentioned one-dimensional photonic crystal are difficult to independently adjust the relative position of each channel, and the coexistence of channels and passbands cannot be achieved, thus limiting the channel bandpass The scope of application of the filter.

发明内容 Contents of the invention

本发明的目的在于提供一种既具有通道与通带,又能够独立调整通道与通带位置的多通道通带滤光片。The purpose of the present invention is to provide a multi-channel passband filter which has both channels and passbands and can independently adjust the positions of the channels and passbands.

本发明提出的通道和通带位置可独立调整的通道通带滤光片,是以对称多层介质膜系为基础的一种新的设计方法。The channel pass band filter whose channel and pass band positions can be adjusted independently proposed by the invention is a new design method based on a symmetrical multilayer dielectric film system.

在此结构中,如果中间层两侧媒质的导纳相同,则透射率T为:In this structure, if the admittance of the medium on both sides of the intermediate layer is the same, the transmittance T is:

TT == TT 11 TT 22 (( 11 -- RR 11 RR 22 )) 22 11 11 ++ 44 RR 11 RR 22 (( 11 -- RR 11 RR 22 )) sinsin 22 11 22 (( φφ 11 ++ φφ 22 ++ -- 22 δδ )) -- -- -- (( 11 ))

其中T1、T2、R1、R2分别为选定膜层两侧的透射率和反射率,φ1、φ2分别为两反射膜层的反射相移。Among them, T 1 , T 2 , R 1 , and R 2 are the transmittance and reflectance on both sides of the selected film layer, respectively, and φ 1 , φ 2 are the reflection phase shifts of the two reflective film layers, respectively.

由式(1)可知,若两反射膜层的T1、T2、R1、R2和反射相移φ1、φ2不变,这时能改变的量是选定膜层的有效位相厚度 ( δ = 2 π λ nd ) · It can be seen from formula (1) that if T 1 , T 2 , R 1 , R 2 and reflection phase shift φ 1 , φ 2 of the two reflective coating layers remain unchanged, the amount that can be changed at this time is the effective phase of the selected coating layer thickness ( δ = 2 π λ nd ) &Center Dot;

当φ12-2δ=2kπ    (k=±1,2,3)    (2)时,整个膜系的透射率T达最大值。When φ 12 -2δ=2kπ (k=±1, 2, 3) (2), the transmittance T of the entire film system reaches the maximum value.

在此对称结构中,中间层的插入引起了光子晶体中光子态密度和电磁波模的变化,其两侧的反射层的多次反射而在光谱特性曲线中形成通道。保持膜系的对称性在膜系的两侧引入新的膜层结构来形成一个新的通带。形成通道通带滤光片。基于这种设计思想,我们采用了将两种不同介电常数的材料组成具有对称结构的滤光片。如图1所示,其中:H、L,分别为高低折射率材料的1/4波长光学厚度,H=nHdH=L=nLdL=λ/4,  nL=1.44、nH=2.3分别为两种材料的折射率;dH、dL分别为与1/4波长光学厚度对应的两种材料的物理厚度。调整双对称结构中五个中间层的厚度,可以改变滤光片透射谱中通道和通带的相对位置。其中两个对称结构左右两侧四个中间层的厚度均为cH,称之为中间层c,对称结构中心中间层的厚度为dL,称之为中间层d,调整c和d就可以独立地调整通道和通带的位置。该膜系可通过加入匹配膜层来进行优化。In this symmetrical structure, the insertion of the middle layer causes changes in the photon state density and electromagnetic wave mode in the photonic crystal, and the multiple reflections of the reflective layers on both sides form a channel in the spectral characteristic curve. Maintaining the symmetry of the film system introduces a new film layer structure on both sides of the film system to form a new passband. Form a channel passband filter. Based on this design idea, we used two materials with different dielectric constants to form a filter with a symmetrical structure. As shown in Figure 1, where: H, L are the 1/4 wavelength optical thicknesses of high and low refractive index materials, respectively, H=n H d H =L=n L d L =λ/4, n L =1.44, n H =2.3 are the refractive indices of the two materials; d H and d L are the physical thicknesses of the two materials corresponding to the 1/4 wavelength optical thickness, respectively. Adjusting the thickness of the five intermediate layers in the double symmetric structure can change the relative position of the channel and passband in the transmission spectrum of the filter. Among them, the thickness of the four intermediate layers on the left and right sides of the two symmetrical structures is cH, which is called the intermediate layer c, and the thickness of the middle layer in the center of the symmetrical structure is dL, which is called the intermediate layer d. Adjusting c and d can independently Adjust the position of the channel and passband. The film system can be optimized by adding matching film layers.

本发明中,两种不同介电常数的材料可选用SiO2和TiO2等。In the present invention, SiO 2 and TiO 2 can be selected as two materials with different dielectric constants.

本发明是一种采用全介质结构的通道通带滤光器件。它采用对称结构,来实现通道和通带位置的独立连续变化;通过调整中间层c和d的厚度,可使两个通道系列的位置独立地变化,适当调整中间层的厚度,可以得到位置独立连续变化的通道通带一维光子晶体。以下均以通道通带一维光子晶体为例进行说明。The invention is a channel passband filter device adopting an all-dielectric structure. It adopts a symmetrical structure to achieve independent and continuous changes in the positions of the channels and passbands; by adjusting the thickness of the middle layer c and d, the positions of the two channel series can be changed independently, and the position independence can be obtained by properly adjusting the thickness of the middle layer. One-dimensional photonic crystal with continuously variable channel passband. In the following, the channel-passband one-dimensional photonic crystal is taken as an example for illustration.

附图说明 Description of drawings

图1为本发明的对称膜系结构示意图。Fig. 1 is a schematic diagram of the symmetrical film system structure of the present invention.

图2为本发明在通道位置不变的情况下,适当改变c和d,产生的通带位置的调整。Fig. 2 shows the adjustment of the passband position by appropriately changing c and d while the channel position remains unchanged in the present invention.

图3为本发明在通带位置不变的情况下,适当改变c和d,产生的通道位置的调整。Fig. 3 shows the adjustment of the channel position by appropriately changing c and d under the condition that the position of the passband is unchanged in the present invention.

图4为本发明适当的调整c和d的值,产生的通道和通带位置的交替变化,Fig. 4 is that the present invention suitably adjusts the value of c and d, the channel that produces and the alternate change of passband position,

具体实施方式 Detailed ways

图2所示几组图形的c和d的值分别为c=1.4H、d=0.8L,c=1.5H、d=0.743 5 L,c=1.6H、d=0.698L,c=1.7H、d=0.6 59L,c=1.8H、d=0.624L。随着c由1.4增加到1.8适当调整d,左边的通带位置逐步右移,而右边的通道始终在原先的位置保持不动。The values of c and d of several groups of figures shown in Fig. 2 are respectively c=1.4H, d=0.8L, c=1.5H, d=0.743 5 L, c=1.6H, d=0.698L, c=1.7H , d=0.659L, c=1.8H, d=0.624L. As c is increased from 1.4 to 1.8 and d is properly adjusted, the position of the left passband gradually moves to the right, while the right channel remains unchanged at the original position.

图3所示的几组图形中保持c=1.4H不变,随着d的值由0.2L增加到0.7L,左边的通带位置保持基本不动。而右边的通道逐步向右移动。In several groups of graphs shown in Figure 3, c=1.4H remains unchanged, and as the value of d increases from 0.2L to 0.7L, the position of the passband on the left remains basically unchanged. While the right channel moves gradually to the right.

如图4所示,这几个通道通带光谱特性图对应的c和d的值分别是c=1.5H、d=0.4L,c=1.5H、d=0.5L,c=1.6H、d=0.472L,c=1.6H、d=0.6L,c=1.7H、d=0.567 7 L,c=1.7H、d=0.7L,c=1.8H、d=0.662L,c=1.8H、d=0.8L,c=1.9H、d=0.755L,随着c和d的不同的变化组合,可以使通道和通带的位置发生交替变化。As shown in Figure 4, the values of c and d corresponding to the passband spectral characteristics of these channels are c=1.5H, d=0.4L, c=1.5H, d=0.5L, c=1.6H, d =0.472L, c=1.6H, d=0.6L, c=1.7H, d=0.567 7 L, c=1.7H, d=0.7L, c=1.8H, d=0.662L, c=1.8H, d=0.8L, c=1.9H, d=0.755L, with different combinations of c and d, the position of the channel and the passband can be changed alternately.

滤光片的双通道位置设计及调整的具体方法如下:The specific method for the design and adjustment of the dual-channel position of the filter is as follows:

设计对称结构的通道带通滤光片,首先根据所需的截止带的位置,确定晶格常数的大小即对称结构中间层两侧的反射膜堆的单层光学厚度。以图2所示的设计为例,在此设计中,截止带宽度为260nm,波长为600nm,滤光片的膜系结构为以对称多层介质膜系为基础的双对称结构,  该双对称结构为(HL)2cH(LH)2L(HL)2cH(LH)2dL(HL)2cH(LH)2L(HL)2cH(LH)2,其中c和d表示中间层的厚度。截止带位置确定后,再根据所需要的通道和通带的位置,来确定c和d的大小;先确定通道,通过计算对称结构的中间层d两侧反射层在通道所在波长的反射相移,由式(2)求得d的大小。确定通带用同样的方法,不过此时所计算的反射相移是由膜系(HL)2cH(LH)2产生的,即以左右两侧的某个c层为对称中心的对称结构产生的。求得通带所在波长的反射相移,通过式(2)求出c的大小。由计算机模拟可以发现,通道的位置主要由d的大小来决定,通带的位置主要由c的大小来决定,且通道和通带的位置可连续变化。由于计算c时为简化计算,计算对象是((HL)2cH(LH)2对称结构而非整个对称膜系。因此可在计算机上对c进行调整,使通带的位置与设计要求相吻合。设计的所有膜层的厚度均已确定,所用材料可以根据实际条件进行选取。我们选取的是TiO2、SiO2,入射介质为空气ε=1。TiO2、SiO2组成的介质对为杂质,利用传输矩阵法,通过调整中间层的厚度,得到具有所需通道和通带参数的滤光片。To design a channel band-pass filter with a symmetrical structure, firstly, according to the position of the required cut-off band, determine the size of the lattice constant, that is, the single-layer optical thickness of the reflective film stack on both sides of the middle layer of the symmetrical structure. Take the design shown in Figure 2 as an example, in this design, the cut-off band width is 260nm, the wavelength is 600nm, and the film structure of the optical filter is a double symmetrical structure based on a symmetrical multilayer dielectric film system. The structure is (HL) 2 cH(LH) 2 L(HL) 2 cH(LH) 2 dL(HL) 2 cH(LH) 2 L(HL) 2 cH(LH) 2 , where c and d represent the middle layer thickness. After the position of the cut-off band is determined, then determine the size of c and d according to the position of the required channel and passband; first determine the channel, and calculate the reflection phase shift of the reflective layers on both sides of the middle layer d of the symmetrical structure at the wavelength of the channel , by formula (2) to obtain the size of d. The same method is used to determine the passband, but the reflection phase shift calculated at this time is produced by the film system (HL) 2 cH(LH) 2 , that is, a symmetrical structure with a c layer on the left and right sides as the center of symmetry. of. Obtain the reflective phase shift of the wavelength where the passband is located, and obtain the size of c through formula (2). It can be found from computer simulation that the position of the channel is mainly determined by the size of d, the position of the passband is mainly determined by the size of c, and the positions of the channel and the passband can be continuously changed. Since the calculation of c is to simplify the calculation, the calculation object is the ((HL) 2 cH(LH) 2 symmetrical structure rather than the entire symmetrical film system. Therefore, c can be adjusted on the computer to make the position of the passband match the design requirements The thicknesses of all the designed layers have been determined, and the materials used can be selected according to actual conditions. We choose TiO 2 and SiO 2 , and the incident medium is air ε=1. The medium pair composed of TiO 2 and SiO 2 is impurity , using the transfer matrix method, by adjusting the thickness of the intermediate layer, the optical filter with the required channel and passband parameters is obtained.

本发明的特点就是两个通道的位置可由两个参数c和d两个参数来控制,可以独立变化,可以在截止带内任意地调整两个通道的位置。The feature of the present invention is that the positions of the two channels can be controlled by two parameters c and d, which can be changed independently, and the positions of the two channels can be adjusted arbitrarily within the cut-off band.

1、通道位置不变的情况下调整通带的位置:1. Adjust the position of the passband without changing the position of the channel:

以下均以结构为(HL)2cH(LH)2L(HL)2cH(LH)2dL(HL)2cH(LH)2L(HL)2cH(LH)2的一维光子晶体为例,设计波长λ=600nm,调整c和d的大小可以得到如The following one-dimensional photonic crystals with the structure (HL) 2 cH(LH) 2 L(HL) 2 cH(LH) 2 dL(HL) 2 cH(LH) 2 L(HL) 2 cH(LH) 2 are For example, the design wavelength λ=600nm, adjusting the size of c and d can be obtained as

图2所示的变化情况,可以在通道位置不变的情况下调整通带As shown in Figure 2, the passband can be adjusted without changing the position of the channel

的位置。s position.

2、通带位置不变的情况下调整通道的位置:2. Adjust the position of the channel without changing the position of the passband:

调整c和d的大小可以得到如图3所示的变化情况,可以在通带的位置不变的情况下调整通道的位置。By adjusting the size of c and d, the changes shown in Figure 3 can be obtained, and the position of the channel can be adjusted while the position of the passband remains unchanged.

3、通道和通带的位置交替变化:3. The position of channel and passband changes alternately:

适当的调整c和d的值可以使通道和通带的位置交替变化,如图4所示。Appropriately adjusting the values of c and d can make the position of the channel and the passband change alternately, as shown in Figure 4.

Claims (2)

1. channel passband filter that relative position can independently be adjusted is characterized in that:
The dura mater based material of optical filter film is TiO 2And SiO 2Combination, the structure of component film system is for being the disymmetry structure on basis with symmetrical multilayer dielectric film, this disymmetry structure is:
(HL) 2CH (LH) 2L (HL) 2CH (LH) 2DL (HL) 2CH (LH) 2L (HL) 2CH (LH) 2, wherein, passage and passband see through the position at peak and are adjusted by the thickness of middle layer c in the structure and middle layer d, and wherein, the thickness of middle layer c is cH, and the thickness of middle layer d is dL.
2. the channel passband filter that relative position according to claim 1 can independently be adjusted is characterized in that:
For the position that makes passage and passband coincide with design, the accurate thickness of middle layer c and middle layer d is finely tuned by computer Simulation calculation.
CNB2004100670527A 2004-10-11 2004-10-11 Channel passband filters with independently adjustable relative positions Expired - Fee Related CN100373185C (en)

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CN103217730B (en) * 2013-04-18 2015-07-08 同济大学 Narrow-band negative filter plate membrane system with gradually-changing optical thicknesses
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Citations (2)

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US6611378B1 (en) * 2001-12-20 2003-08-26 Semrock, Inc. Thin-film interference filter with quarter-wavelength unit sub-layers arranged in a generalized pattern
CN1525197A (en) * 2002-10-09 2004-09-01 Jds Multicavity Optical Filters

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US6611378B1 (en) * 2001-12-20 2003-08-26 Semrock, Inc. Thin-film interference filter with quarter-wavelength unit sub-layers arranged in a generalized pattern
CN1525197A (en) * 2002-10-09 2004-09-01 Jds Multicavity Optical Filters

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