CN100392513C - All-solid-state continuous broadband mid-infrared coherent light source - Google Patents
All-solid-state continuous broadband mid-infrared coherent light source Download PDFInfo
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Abstract
本发明涉及一种激光光源,尤其涉及一种全固态连续宽带激光光源,属于非线性光学频率变换技术领域。本发明利用半导体激光器端面连续泵浦Nd:YVO4晶体产生的连续1064nm激光泵浦周期极化LiNbO3晶体(PPLN)光学参量振荡器,采用将PPLN晶体置于激光谐振腔的内腔OPO方案,通过调整温度等相关参数,得到高效率、可调谐波长范围大、寿命长、结构紧凑而体积小的中红外可调谐光源,满足光通讯、红外对抗、环境监测及光谱学研究等诸多领域的应用需求。
The invention relates to a laser light source, in particular to an all-solid-state continuous broadband laser light source, and belongs to the technical field of nonlinear optical frequency conversion. The present invention utilizes the continuous 1064nm laser pumping periodically polarized LiNbO3 crystal (PPLN) optical parametric oscillator produced by continuous pumping of the Nd: YVO4 crystal on the end face of the semiconductor laser, and adopts the inner cavity OPO scheme of placing the PPLN crystal in the laser resonator, By adjusting temperature and other related parameters, a mid-infrared tunable light source with high efficiency, large tunable wavelength range, long life, compact structure and small volume can be obtained, which can meet the applications in many fields such as optical communication, infrared countermeasures, environmental monitoring and spectroscopy research. need.
Description
技术领域 technical field
本发明涉及一种激光光源,尤其涉及一种全固态连续宽带激光光源,属于非线性光学频率变换技术领域。The invention relates to a laser light source, in particular to an all-solid-state continuous broadband laser light source, and belongs to the technical field of nonlinear optical frequency conversion.
背景技术 Background technique
红外光在大气中有三个主要传输窗口:1~3μm,3~5μm,8~12μm,其中3~5μm波段是衰减最小的红外窗口。该波段激光对大雾、烟尘等具有较强的穿透力,在海平面上传输受到气体分子吸收和悬浮物散射小。红外制导导弹探测器的响应范围在3~5μm波段,因而针对红外导引头的光电对抗迫切需要该波段的激光光源。在3~5μm区域,多数重要的碳氢气体及其它有毒气体分子具有强的吸收特性,因而中红外相干光源在微量气体探测领域有广泛的民用价值:如油田开采,天然气管道泄露探测,大气中温室气体探测,毒品稽查,煤矿中甲烷气体探测等。由于3~5μm波段激光在光谱学、遥感、医疗、环保及军事等诸多领域都有重要的应用价值和前景,因此对3~5μm波段激光的研究成为目前世界上十分热门的课题。Infrared light has three main transmission windows in the atmosphere: 1-3 μm, 3-5 μm, and 8-12 μm, among which the 3-5 μm band is the infrared window with the least attenuation. Lasers in this band have strong penetrating power to fog, smoke, etc., and are less absorbed by gas molecules and scattered by suspended matter when transmitted at sea level. The response range of the infrared guided missile detector is in the 3-5 μm band, so the photoelectric countermeasures against the infrared seeker urgently need a laser light source in this band. In the 3-5μm region, most important hydrocarbon gases and other toxic gas molecules have strong absorption characteristics, so mid-infrared coherent light sources have a wide range of civil value in the field of trace gas detection: such as oil field exploitation, natural gas pipeline leakage detection, atmospheric Greenhouse gas detection, drug inspection, methane gas detection in coal mines, etc. Since the 3-5μm band laser has important application value and prospects in many fields such as spectroscopy, remote sensing, medical treatment, environmental protection and military affairs, the research on the 3-5μm band laser has become a very popular topic in the world.
近40年来,光学参量振荡器(OPO)被认为是获得传统激光器所达不到的光谱范围内的相干光的理想光源。一台OPO就可以在非常宽的光谱范围中获得连续可调谐的输出,同时OPO还具有全固态设计、高效率和具有可观的输出功率等优点,而且从时间域上OPO可以连续输出或者输出诸如飞秒等超短脉冲。For nearly 40 years, optical parametric oscillators (OPOs) have been considered as ideal sources for obtaining coherent light in spectral ranges beyond the reach of conventional lasers. One OPO can obtain continuously tunable output in a very wide spectral range, and OPO also has the advantages of all-solid-state design, high efficiency and considerable output power, and from the time domain, OPO can output continuously or output such as Ultrashort pulses such as femtoseconds.
OPO的性能参数几乎完全依赖于泵浦激光器的光谱特性和光束质量,以及非线性晶体的特性。从目前激光器发展情况看,中红外谱段的相干光源还是要依赖于OPO(采用PPLN晶体),从工作谱段和时间域来看,脉冲(ns)和锁模(ps/fs)的OPO市场已经有很多成型的产品,但中红外波段(3~5μm)的连续OPO的匮乏一直困扰着广大科研人员。The performance parameters of OPO depend almost entirely on the spectral properties and beam quality of the pump laser, as well as the properties of the nonlinear crystal. Judging from the current development of lasers, the coherent light source in the mid-infrared spectrum still depends on OPO (using PPLN crystals). From the perspective of the working spectrum and time domain, the OPO market for pulse (ns) and mode-locked (ps/fs) There are already many formed products, but the lack of continuous OPO in the mid-infrared band (3-5 μm) has been plagued by researchers.
以激光二极管泵浦的固体激光器为泵浦源的全固态激光器以其高功率、高光束质量、高效率、体积小、重量轻低等特点成为迄今为止最优异的激光器。近些年来,随着准相位匹配技术(QPM的成熟,利用周期极化晶体的非线性光学频率变换技术引起了人们的广泛关注。准相位匹配技术最大优点是非线性转换效率高,并且可以使那些在通常条件下无法实现相位匹配的晶体和通光波段得以实现频率变换,拓宽了应用范围,增加了调谐方式,使困扰人们已久的高效、宽波段激光的输出成为可能。目前,常见的用于准相位匹配的周期极化晶体有PPLN、PPKTP和PPLT,其中PPLN的有效非线性系数较大(16pm/V),且极化技术成熟,成为应用最为广泛的周期极化晶体,PPLN-OPO是实现非线性光学频率变换的重要手段和有效途径,也是可调谐光源方面的另一个研究热点。因此,利用全固态可调谐激光器泵浦准相位匹配光学参量振荡器,通过调整相关参数,如泵浦波长、极化晶体的温度和周期等,可以得到高输出功率、高效率、调谐范围大、寿命长、结构紧凑的连续运转红外可调谐光源。The all-solid-state laser with laser diode-pumped solid-state laser as the pump source has become the most excellent laser so far due to its high power, high beam quality, high efficiency, small size, and light weight. In recent years, with the maturity of quasi-phase matching technology (QPM), the nonlinear optical frequency conversion technology using periodically poled crystals has attracted widespread attention. The biggest advantage of quasi-phase matching technology is that the nonlinear conversion efficiency is high, and it can make those Under normal conditions, crystals and light-passing bands that cannot achieve phase matching can achieve frequency conversion, broaden the application range, increase tuning methods, and make it possible to output high-efficiency and wide-band lasers that have troubled people for a long time. At present, the common use Periodically polarized crystals for quasi-phase matching include PPLN, PPKTP, and PPLT, among which PPLN has a large effective nonlinear coefficient (16pm/V), and the polarization technology is mature, making it the most widely used periodically polarized crystal, PPLN-OPO It is an important means and effective way to realize nonlinear optical frequency conversion, and it is also another research hotspot in tunable light sources. Therefore, using all-solid-state tunable lasers to pump quasi-phase-matched optical parametric oscillators, by adjusting related parameters, such as pump The wavelength, temperature and cycle of the polarized crystal can be used to obtain a continuously operating infrared tunable light source with high output power, high efficiency, large tuning range, long life, and compact structure.
发明内容 Contents of the invention
本专利的发明目的是利用全固态端面泵浦连续Nd:YVO4激光器作为泵浦源,泵浦内腔PPLN-OPO,产生3~5μm的宽带红外光源,满足在光谱学、遥感、医疗、环保及军事等诸多领域的需要。The purpose of the invention of this patent is to use the all-solid-state end-pumped continuous Nd:YVO 4 laser as the pump source to pump the inner cavity PPLN-OPO to generate a 3-5μm broadband infrared light source, which can meet the needs of spectroscopy, remote sensing, medical treatment, and environmental protection. and military and many other fields.
本发明的技术方案如下:一种全固态连续宽带中红外相干光源,包括泵浦源,PPLN参量振荡晶体,光学参量谐振腔,激光谐振腔,其中,所述泵浦源为全固态激光器,利用半导体激光二极管端面连续泵浦Nd:YVO4晶体,采用紧贴或自聚焦耦合方式,产生连续1064nm激光,所述Nd:YVO4晶体靠近半导体激光二极管端面的一端镀808nm高透膜、1064nm高反膜,靠近输出端的一端镀808nm和1064nm高透膜;所述光学参量谐振腔为由OPO全反镜和OPO输出镜构成的腔体,所述OPO全反镜为平镜,其一面镀1064nm高透膜,另一面镀1064nm高透膜和1400~1500nm高反膜,所述OPO输出镜为平凹镜,其凹面镀1064nm高反膜、1400~1500nm高透膜和3000~5000nm高透膜,其平面镀3000~5000nm高透膜,光学参量谐振腔的腔长为110mm,所述OPO输出镜的曲率半径为150mm;所述PPLN参量振荡晶体的极化周期为28.5μm,双端镀1064nm高透膜、1400~1500nm高透膜、3700~4000nm高透膜,位于上述的谐振腔内,并固定在炉温度在300K到473K可以连续变化的温控炉中;所述激光谐振腔为由Nd:YVO4晶体靠近半导体激光二极管端面的一端和OPO输出镜凹面构成,其腔长为140nm。The technical scheme of the present invention is as follows: an all-solid-state continuous broadband mid-infrared coherent light source, including a pump source, a PPLN parametric oscillator crystal, an optical parametric resonator, and a laser resonator, wherein the pump source is an all-solid-state laser, using The Nd:YVO4 crystal is continuously pumped on the end face of the semiconductor laser diode, and the continuous 1064nm laser is generated by means of close-fitting or self-focusing coupling. The end close to the output end is coated with 808nm and 1064nm high-transparency films; the optical parametric resonant cavity is a cavity composed of an OPO total reflection mirror and an OPO output mirror. , the other side is coated with a 1064nm high-transparency film and a 1400-1500nm high-reflection film. Coated with 3000-5000nm high-transparency film, the cavity length of the optical parametric resonant cavity is 110mm, the radius of curvature of the OPO output mirror is 150mm; the polarization period of the PPLN parametric oscillator crystal is 28.5μm, and both ends are coated with 1064nm high-transparency film , 1400-1500nm high-permeability film, 3700-4000nm high-permeability film, located in the above-mentioned resonant cavity, and fixed in a temperature-controlled furnace whose furnace temperature can be continuously changed from 300K to 473K; the laser resonant cavity is made of Nd:YVO4 One end of the crystal close to the end face of the semiconductor laser diode and the concave surface of the OPO output mirror are formed, and the cavity length is 140nm.
上述的全固态连续宽带中红外相干光源,所述晶体Nd:YVO4尺寸可以为3×3×5mm,掺杂浓度可以是1.0at%。For the above-mentioned all-solid-state continuous broadband mid-infrared coherent light source, the size of the crystal Nd:YVO4 may be 3×3×5 mm, and the doping concentration may be 1.0 at%.
本发明具有如下的有益效果:The present invention has following beneficial effect:
①全固态激光器的结构紧凑、牢固耐用、价格便宜,在激光应用中占有非常重要的地位。①All solid-state lasers are compact, durable, and cheap, and occupy a very important position in laser applications.
②端泵激光的光束质量好,在空间上与固体激光器的腔模能得到更好的匹配。而且端泵浦方式耦合效率极高,在中低功率激光器的应用中,尤其是连续激光应用上显示出明显的优势。② The beam quality of the end-pumped laser is good, and it can be better matched with the cavity mode of the solid-state laser in space. Moreover, the coupling efficiency of the end-pump method is extremely high, which shows obvious advantages in the application of low-to-medium power lasers, especially in continuous laser applications.
③采用周期极化晶体实现准相位匹配光学参量振荡器,是实现可调谐红外光源的一种新型的重要手段和有效途径,利用高功率全固态激光器输出的特定波长,泵浦周期极化晶体,通过调整温度、周期等相关参数,可以得到高输出功率、高效率、可调谐波长范围大、寿命长、结构紧凑而体积小的红外可调谐光源,是一种理想的调谐方式。③The use of periodically polarized crystals to realize quasi-phase-matched optical parametric oscillators is a new type of important means and effective way to realize tunable infrared light sources. Using the specific wavelength output by high-power all-solid-state lasers to pump periodically polarized crystals, By adjusting relevant parameters such as temperature and cycle, an infrared tunable light source with high output power, high efficiency, wide tunable wavelength range, long life, compact structure and small volume can be obtained, which is an ideal tuning method.
④全固态连续波PPLN光学参量振荡器,不仅具有全固态激光器功率水平高、结构紧凑、价格便宜等优势,还具有准相位匹配光学参量振荡器的宽带可调谐,体积小的优点,在大气科学中的痕量气体分析,光声光谱,废气检测,机载大范围陆地和海洋污染探测,大气污染分析,军事应用等领域具有广大的科学研究价值和广阔的应用前景并且填补了该领域的技术空白。④ The all-solid-state continuous wave PPLN optical parametric oscillator not only has the advantages of high power level, compact structure, and low price of all-solid-state lasers, but also has the advantages of broadband tunability and small size of quasi-phase-matched optical parametric oscillators. Trace gas analysis, photoacoustic spectroscopy, exhaust gas detection, airborne large-scale land and ocean pollution detection, air pollution analysis, military applications and other fields have broad scientific research value and broad application prospects and fill the field of technology blank.
附图说明 Description of drawings
图1为本发明的全固态连续宽带中红外相干光源的结构示意图,图中,Fig. 1 is a schematic structural view of the all-solid-state continuous broadband mid-infrared coherent light source of the present invention, in the figure,
1.激光二极管;2.Nd:YVO4晶体;3.OPO全反镜;4.PPLN晶体;5.OPO输出1. Laser diode; 2. Nd:YVO 4 crystal; 3. OPO mirror; 4. PPLN crystal; 5. OPO output
具体实施方式 Detailed ways
本发明全部采用全固态器件,利用半导体激光器端面连续泵浦Nd:YVO4晶体产生的连续1064nm激光泵浦周期极化LiNbO3晶体(PPLN)光学参量振荡器,采用将PPLN晶体置于激光谐振腔的内腔OPO方案,通过调整温度等相关参数,得到高效率、可调谐波长范围大、寿命长、结构紧凑而体积小的中红外可调谐光源,满足光通讯、红外对抗、环境监测及光谱学研究等诸多领域的应用需求。The present invention all adopts all-solid-state devices, utilizes the continuous 1064nm laser pumping periodic poled LiNbO crystal (PPLN) optical parametric oscillator produced by semiconductor laser end face continuous pumping of Nd:YVO 4 crystal, adopts PPLN crystal placed in the laser resonant cavity The internal cavity OPO solution, by adjusting the temperature and other related parameters, obtains a mid-infrared tunable light source with high efficiency, large tunable wavelength range, long life, compact structure and small volume, which meets the needs of optical communication, infrared countermeasures, environmental monitoring and spectroscopy. Research and many other fields of application requirements.
激光二极管端面泵浦固体激光器具有较高的泵浦转换效率,通过调节泵浦光斑并对谐振腔进行优化设计,能够获得近衍射极限的高光束质量激光输出,是中小功率连续激光器的首选方式。激光器元件均为全固态,结构紧凑,目前国内激光二极管生产工艺成熟,单管功率已达5W,因此本方案选用激光二极管端面泵浦方式。Laser diode end-pumped solid-state lasers have high pump conversion efficiency. By adjusting the pump spot and optimizing the design of the resonant cavity, high beam quality laser output near the diffraction limit can be obtained. It is the first choice for small and medium power continuous lasers. The laser components are all solid-state and compact in structure. At present, the domestic laser diode production process is mature, and the single-tube power has reached 5W. Therefore, the laser diode end-pumping method is used in this scheme.
Nd:YVO4晶体具有较大的受激发射截面,输出光具有偏振特性,且生长技术成熟,由激光二极管泵浦Nd:YVO4晶体获得1064nm激光的光-光转换效率能够大于50%,M2<2,因此本方案选用激光二极管端面泵浦Nd:YVO4激光器作为OPO的泵浦源,充分利用其高光束质量和偏振特性,以实现高效率的非线性光学频率变换。Nd:YVO 4 crystal has a large stimulated emission cross-section, the output light has polarization characteristics, and the growth technology is mature. The light-to-light conversion efficiency of 1064nm laser obtained by pumping Nd:YVO 4 crystal with laser diode can be greater than 50%, M 2 < 2, so this scheme chooses laser diode end-pumped Nd:YVO4 laser as the pump source of OPO, and makes full use of its high beam quality and polarization characteristics to achieve high-efficiency nonlinear optical frequency conversion.
光学参量振荡器被认为是将单一波长向长波长扩展的最重要的非线性光学频率变换技术,具有小型化、高效率和波长可调谐等优点。将光学参量振荡器与全固态激光器相结合,是获得高功率长波长可调谐光源的主要方式。本方案选用PPLN光学参量振荡器将1064nm激光向长波长扩展,以获得3~5μm激光输出。选用内腔OPO方案,将非线性晶体置于激光谐振腔内,通过镀膜使OPO谐振腔与激光器谐振腔相结合,充分利用激光谐振腔腔内功率密度高的特性。由于准相位匹配技术具有极高的非线性转换效率,因此本专利采用周期极化晶体实现准相位匹配光学参量振荡器的方案。PPLN具有较大的非线性系数d33(16pm/V),极化技术成熟,物化性能稳定且不易潮解,因此,选用PPLN作为OPO的非线性晶体。Optical parametric oscillators are considered to be the most important nonlinear optical frequency conversion technology that extends a single wavelength to a long wavelength, and has the advantages of miniaturization, high efficiency, and wavelength tunability. Combining optical parametric oscillators with all-solid-state lasers is the main way to obtain high-power long-wavelength tunable light sources. This program uses PPLN optical parametric oscillator to expand the 1064nm laser to long wavelength to obtain 3-5μm laser output. The intracavity OPO scheme is selected, the nonlinear crystal is placed in the laser resonator, the OPO resonator is combined with the laser resonator through coating, and the high power density in the laser resonator is fully utilized. Since the quasi-phase matching technology has extremely high nonlinear conversion efficiency, this patent uses a periodically polarized crystal to realize a quasi-phase matching optical parametric oscillator solution. PPLN has a large nonlinear coefficient d 33 (16pm/V), mature polarization technology, stable physical and chemical properties and is not easy to deliquescence. Therefore, PPLN is selected as the nonlinear crystal of OPO.
下面结合附图对本发明做进一步详述:Below in conjunction with accompanying drawing, the present invention is described in further detail:
参见图1,本发明的激光光源具有如下的结构:①系统全部采用全固态器件;②利用半导体激光二极管端面连续泵浦Nd:YVO4晶体,采用紧贴或自聚焦耦合方式,产生连续1064nm激光;③④OPO全反镜的材料K9或BK7玻璃。平镜,φ=20mm,一面镀1064nm高透膜(HT),另一面镀1064nmHT,1400~1500nm高反膜(HR);⑤参量振荡晶体PPLN尺寸为50×10×1mm,极化周期Λ=28.5μm。双端镀1064nmHT、1400~1500nmHT、3700~4000nmHT膜。⑥OPO输出镜为φ=20mm,曲率半径R=150mm的平凹镜,采用CaF2材料。凹面镀1064nmHR、1400~1500nmHR、3000~5000nmHT膜,平面镀:3000~5000nmHT膜;⑦1064nm谐振腔腔长为140mm,OPO谐振腔腔长为110mm,通过控制腔长和曲率半径的大小,能够实现1064nm和1500nm光的模式匹配,工作物质处基模光斑半径为120μm;⑧激光二极管、激光晶体的工作温度为18℃,半导体制冷;PPLN晶体固定在温控炉中,温控炉温度在300K到473K可以连续变化;⑨输出3~5um连续可调的连续运转中红外宽带光源。Referring to Fig. 1, the laser light source of the present invention has following structure: 1. system all adopts all-solid-state device; 2. utilizes semiconductor laser diode end face to continuously pump Nd: YVO Crystal, adopts close to or self-focusing coupling mode, produces continuous 1064nm laser; ③④The material of OPO mirror is K9 or BK7 glass. Flat mirror, φ=20mm, one side is coated with 1064nm high-transparency film (HT), the other side is coated with 1064nmHT, 1400-1500nm high-reflection film (HR); 28.5 μm. Both ends are coated with 1064nmHT, 1400~1500nmHT, 3700~4000nmHT films. ⑥The OPO output mirror is a plano-concave mirror with φ=20mm and radius of curvature R=150mm, using CaF 2 material. 1064nmHR, 1400~1500nmHR, 3000~5000nmHT films are plated on the concave surface, 3000~5000nmHT films are plated on the plane; ⑦1064nm resonant cavity length is 140mm, and OPO resonant cavity length is 110mm. By controlling the cavity length and the size of the radius of curvature, 1064nm can be achieved Matching with the mode of 1500nm light, the radius of the fundamental mode spot at the working substance is 120μm; ⑧The working temperature of the laser diode and laser crystal is 18℃, semiconductor refrigeration; the PPLN crystal is fixed in the temperature-controlled furnace, and the temperature of the temperature-controlled furnace is 300K to 473K Can be changed continuously;
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| CN104779516B (en) * | 2015-04-20 | 2017-09-12 | 中国科学院上海光学精密机械研究所 | In infrared single-frequency optical parametric oscillator |
| CN104836105A (en) * | 2015-05-25 | 2015-08-12 | 南京信息工程大学 | Intermediate infrared pulse optical parametric oscillator based on carbon nano tube saturable absorber mirror |
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