CN100411794C - Group hole electrolytic machining device - Google Patents

Abstract

The invention relates to a group hole electrolytic machining device, which belongs to the field of electrolytic machining. The setup involves an electrolytic machining fixture with two cathode channels and one anode channel. The cathode main shaft (7) and the anode main shaft (2) are arranged respectively in the cathode passage and the anode passage. One end of the cathode spindle (7) is connected to the cathode feeding device (6), and the other end is connected to the tool cathode (23) through the cathode clamp (8). The key points of the present invention are: the cathode main shaft (7) has a hollow channel (21), the cathode clamp (8) has a T-shaped cavity inside, and the tool cathode (23) has a through hole structure; The through hole group structure, the T-shaped cavity, and the hollow channel (21) communicate with each other to form an electrolyte flow channel. The device of the invention has the characteristics of high production efficiency and low manufacturing cost.

Description

Group hole electrolytic machining device

technical field

The electrolytic machining device for group holes of the invention belongs to the technical field of electrolytic machining.

Background technique

Electrolytic machining is a special processing technology, which is a processing method that uses the principle of electrochemical anodic dissolution to remove materials. It has the outstanding advantages of fast processing speed, good surface quality, no loss of tools, no restrictions on material strength, toughness, hardness, etc., and no macro cutting force. It has been widely used in aerospace, weapons, automobiles, molds and other industries. .

Porous structures such as filter screens and cold air ducts are widely used in the fields of automobiles, aerospace and other fields, and their manufacturing methods usually use electric discharge machining or photoelectrolytic machining. Since the group hole structure usually has hundreds of tiny holes, if a single electrode is used for EDM, the processing time is too long and the manufacturing cost is too high. Therefore, the method of processing the group electrodes at the same time is generally adopted, but the manufacture of the group electrodes is very difficult. Moreover, there is electrode loss in EDM, so multiple groups of electrodes are required, which adds a lot of trouble to manufacturing. Photoelectrolysis first coats a layer of photoresist on the surface of the workpiece to be processed, forms a group hole structure on the surface of the photoresist by photopainting, forms a hollow group hole pattern on the surface of the workpiece after development, and processes the exposed part of the workpiece by electrolysis Complete removal, and finally removal of the photoresist can obtain a workpiece with a group hole structure. Processing each piece of the same batch of workpieces requires repeating the above steps. It can be seen that both of these two group hole manufacturing methods have problems such as cumbersome processing technology and high manufacturing cost. Therefore, it is necessary to research a new high-efficiency and low-cost group hole manufacturing solution.

Contents of the invention

The object of the present invention is to solve the common defects of low efficiency and high manufacturing cost in group-hole machining at present, and provide a group-hole electrolytic machining device with high production efficiency and low manufacturing cost.

A group hole electrolytic machining method is characterized in that it comprises the following steps:

(1) Make a pair of tool cathodes with a penetrating group hole structure and a shielding film on the surface; (2) During electrolytic processing, place the prepared pair of tool cathodes facing each other so that the workpiece anode is vertically between them , clamp the anode of the workpiece by feeding the cathode of the tool towards each other; (3), during electrolytic machining, spray the electrolyte evenly to both sides of the anode of the workpiece through the through holes of the cathode of the tool; (4), energize between the anode of the workpiece and the cathode of the tool , ECM on both sides of the workpiece at the same time.

A group hole electrolytic machining device, which consists of a three-head electrolytic machining machine body, an electrolyte circulation system, and an electrolyte temperature control system; wherein the three-head electrolytic machining machine body includes: a power supply, and two oppositely arranged cathode spindle channels An electrolytic machining fixture with an anode spindle channel located in the middle of the two cathode spindle channels and perpendicular to the two cathode spindle channels, and a pair of cathode feeding devices respectively extending into the two cathode spindle channels a cathode spindle, a pair of tool cathodes respectively mounted on the end of the cathode spindle through a cathode clamp, an anode spindle extending into the passage of the anode spindle through an anode feed device, and a workpiece anode mounted on the end of the anode spindle through an anode fixture; It is characterized in that: (1), the tool cathode has a through hole structure, and a photoresist is attached to the surface opposite to the anode of the workpiece; (2), the cathode spindle has a hollow channel, and one end of the hollow channel is provided There is an electrolyte inlet, and the other end communicates with the through hole of the tool cathode through the T-shaped cavity of the cathode fixture, and the electrolyte inlet is outside the electrolytic machining fixture; (3), the cathode holder has an electrolyte The outflow port communicates with the electrolyte outflow channel of the electrolytic machining fixture.

Because this processing method is that the tool cathode and the anode are closely attached (the shielding film in the middle that acts as a shield and insulation is part of the tool cathode), which is very different from the traditional electrolytic processing method. In traditional electrolytic machining, an electrolyte flow channel is left between the tool cathode and the workpiece anode. However, the present invention uses the penetrating hole structure on the cathode of the tool as the electrolyte flow channel, which is used as both the liquid inlet channel and the liquid outlet channel. The electrolyte enters the hollow channel of the cathode spindle under the action of the pump, and reaches the area of the tool cathode and the workpiece anode through the inner cavity of the cathode fixture. At this time, the group hole structure is not only the inflow channel of the solution, but also the outflow channel of the solution. Then enter the outflow channel through the flow channel of the cathode fixture, and return to the electrolyte tank through the flange. At this time, the electric field between the inner wall of the hole through which the tool cathode penetrates and the anode of the workpiece plays the most important role in the removal of the anode material of the workpiece.

The group hole electrolytic processing method is adopted, and only the steps of coating photoresist, photolithography, development, and etching are carried out on the surface of the tool to form the tool cathode, or a through-hole structure with a shielding film on the surface is formed by other techniques Tool cathode. The anode does not need any such steps, it can be electrolytically processed after the cathode of the tool clamps it, and the process step of removing glue is also omitted after the processing is completed. Most importantly, as long as the same part is processed, there is no need to change the tool cathode, which means that mass production can be conveniently carried out. The one-time electrolytic machining forming of group holes can be realized, which improves the machining efficiency and reduces the machining cost.

Description of drawings

Figure 1 is a schematic diagram of the overall structure of a group hole electrolytic machining machine tool.

Fig. 2 is a schematic diagram of the group-hole electrolytic machining area.

Fig. 3 is a schematic diagram of the electrolytic machining process of group holes.

Fig. 4 is a schematic diagram of the fabrication process of the tool cathode. Among them, Figure 4(a) is a schematic diagram of a metal substrate coated with a shielding film and photolithography; Figure 4(b) is a schematic diagram of a metal substrate with a shielding film after development; Figure 4(c) is a schematic diagram of the tool cathode obtained after etching .

Label names in Figure 1: 1. Machine tool platform, 2. Anode spindle, 3. Anode feed device, 4. Anode fixture, 5. Electrolytic machining fixture, 6. Cathode feed device, 7. Cathode spindle, 8. Cathode fixture , 9, ball valve, 10, electrolyte tank, 11, heater, 12, thermocouple, 13, temperature controller, 14, filter, 15, check valve, 16, pump, 17, check valve, 18, Stop valve, 20, fine filter.

Designation of labels in Fig. 2: 21, hollow channel, 22, support seat, 23, tool cathode, 24, electrolyte outflow channel, 25, electrolyte outlet flange, 26, workpiece anode,

Label name in Fig. 3: 27, shielding film,

Names of symbols in Fig. 4: 28, substrate, 29, exposure light source.

Detailed ways

As shown in Figure 1, the group hole electrolytic machining machine tool includes a machine tool platform 1, an anode spindle 2, an anode feed device 3, an anode fixture 4, an electrolytic machining fixture 5, a cathode feed device 6, a cathode spindle 7, and a cathode fixture 8, etc. , which form the body of the machine tool. In addition, it consists of two ball valves 9, an electrolyte tank 10 filled with electrolyte, a two-stage filter consisting of a filter 14 and a fine filter 20, two check valves 15, 17, a pump 16, a shut-off valve 18 and The pipeline constitutes the electrolyte circulation system of the machine tool, which supplies the electrolyte for processing and discharges the electrolytic product. The heater 11 is controlled by a thermocouple 12 and a temperature controller 13 to heat the electrolyte in the electrolyte tank 10 . The machine tool is a three-head flexible-feed electrolytic machining machine tool.

As shown in FIG. 2 and FIG. 3 , the main body of the group-hole electrolytic machining fixture 5 is made of insulating material, such as epoxy resin, glass fiber reinforced plastic, and the like. The main body of the fixture has three main shaft channels in one plane, two of which are coaxially placed cathode channels facing each other and one anode channel perpendicular to them. The cathode main shaft 7 and the anode main shaft 2 are arranged in the cathode channel and the anode channel respectively. One end of the cathode spindle 7 is connected to the cathode feeding device 6 , and the other end is connected to the tool cathode 23 through the cathode clamp 8 . The cathode spindle 7 has a hollow channel 21 , that is, the electrolyte inflow channel, and one end of the electrolyte inflow channel is provided with an electrolyte inflow inlet, and the other end communicates with the cathode group holes through the cathode fixture 8 . The inner cavity of the cathode holder 8 is T-shaped. An electrolyte outflow channel 24 is located in the middle of the electrolytic machining fixture 5 and communicates with the electrolyte outlet flange 25 .

What Fig. 4 shows is the schematic diagram of tool cathode manufacturing process, coat shielding film 27 on the substrate 28, form the pattern shown in Fig. 4 (b) after photolithography, development, etch the exposed part of the substrate, can adopt Physical etching can also use chemical etching or electrochemical etching to etch through the substrate to form the pattern shown in Figure 4(c). The integral structure of the shielding film 27 and the substrate 28 at this time is called a tool cathode 23 . It should be pointed out here that this is only a technique for obtaining the tool cathode 23, and other techniques (such as drilling) can also be used to obtain the tool cathode 23 with a through hole structure and a shielding film on the surface.

Below in conjunction with Fig. 1, Fig. 2, Fig. 3 and Fig. 4 illustrate the method of the present invention, implementation process passes through following several steps successively:

1. With reference to FIG. 4(a), the shielding film 27 is coated on the substrate 28, and photoetched, so that a group hole structure appears on the shielding film;

2. Referring to Figure 4(b), after developing, some substrates are exposed outside;

3. With reference to Fig. 4 (c), the bare part of the substrate 28 is etched, and the integrated structure of the substrate 28 and the shielding film 27 after the etching is called the tool cathode 23, which is used as the tool cathode for electrolytic machining of group holes;

4. Referring to Fig. 1 and Fig. 2, the electrolytic machining fixture 5 made of insulating material (such as epoxy resin, glass fiber reinforced plastic, etc.) is placed in the working box of the blade electrolytic machining machine tool. The electrolytic machining fixture 5 has three spindle passages, which are used for feeding the anode spindle 2 and two cathode spindles 7 respectively; the workpiece anode 26 will be clamped by the anode fixture 4, and the workpiece anode 26 will be sent to a suitable position through the feed mechanism. The tool cathode is loaded into the cathode clamp, and the two tool cathodes 23 are moved toward each other simultaneously or successively through the cathode feeding mechanism until the workpiece anode 26 is clamped. The electrolyte is first connected, and then the power is turned on to start the electrolytic machining. After the workpiece anode 26 is processed into a through hole, the electrolytic machining ends.

5. Referring to Figure 1 and Figure 2, release the anode through the cathode feeding mechanism, take out the workpiece, install another workpiece anode 26, clamp the cathode 23 with two tools, and then perform electrolytic machining. In this way, the mass-efficient and low-cost manufacturing of workpieces with group-hole structures can be realized.

6. Referring to Fig. 1, the electrolyte circulation filter device, and the temperature is kept constant by the temperature control heating device; during electrolytic machining, the pump 16 transports the electrolyte to the electrolytic machining fixture 5, along the hollow passages 21 on both sides of the electrolytic machining fixture 5 Flow to the cathode and anode, flow out from the electrolyte outflow channel 24, and flow back to the electrolyte tank 10 through the outlet flange 25.

Claims (1)

1. a population hole electrolytic machining device, by three electrolytic machine tool bodies, electrolyte circulation system, the electrolyte temperature control system is formed; Wherein said three electrolytic machine tool bodies comprise: power supply, have that two negative electrode shaft passage that are oppositely arranged and an anode shaft passage and described anode shaft passage are positioned in the middle of above-mentioned two negative electrode shaft passage and with two electrolytic machining clampers (5) that the negative electrode shaft passage is vertical, the a pair of negative electrode main shaft (7) that stretches into above-mentioned two negative electrode shaft passage inside by negative electrode feed arrangement (6) respectively, the a pair of tool cathode (23) that is installed on above-mentioned negative electrode main shaft (7) end by cathode fixture (8) respectively, an anode main shaft (2) that stretches into above-mentioned anode shaft passage inside by anode feed arrangement (3), a workpiece anode (26) that is installed on above-mentioned anode main shaft (2) end by anode clamp (4); It is characterized in that:

(1), described tool cathode (23) has and runs through group pore structure, has photoresist with workpiece anode (26) facing surfaces;

(2), described negative electrode main shaft (7) has hollow channel (21), and hollow channel (21) one ends are provided with the electrolyte stream inlet, the other end is communicated with group hole of running through of tool cathode (23) by the T shape chamber of cathode fixture (8), and described electrolyte stream inlet is in electrolytic machining clamper (5) outside;

(3), described cathode fixture (8) has an electrolyte stream outlet to communicate with the electrolyte outflow passage of described electrolytic machining clamper (5).

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