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CN100430757C - Bandpass filter capable of reducing coating layer number - Google Patents

Bandpass filter capable of reducing coating layer number Download PDF

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Publication number
CN100430757C
CN100430757C CNB200510134540XA CN200510134540A CN100430757C CN 100430757 C CN100430757 C CN 100430757C CN B200510134540X A CNB200510134540X A CN B200510134540XA CN 200510134540 A CN200510134540 A CN 200510134540A CN 100430757 C CN100430757 C CN 100430757C
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wave band
film
band
wavelength
bandpass filter
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CN1979228A (en
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叶律谷
高伯菘
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Xintai Optics (shenzhen) Co Ltd
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Asia Optical Co Inc
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Abstract

The invention discloses a band-pass filter capable of reducing the number of coating layers, which comprises: a substrate, a stack of substrates and a display (LH multiplied by LH)mThe film structure of the invention comprises a main film, a first matching film and a second matching film, wherein the main film is sandwiched between the main film and a substrate, the average transmittance in a first correction waveband of the first matching film is more than 85%, and the second matching film is stacked on the main film, and the average transmittance in a second correction waveband of the second matching film is more than 95%. The average penetration rate of the main film in the first waveband is more than 80 percent; the average penetration rate in the second and third wave bands is between 40% and 60%; the average penetration rate in the fourth and fifth wave bands is less than 1%, x is 2n, n is a positive integer, and m is less than or equal to 6. The second band is between the first and fourth bands, the third band is between the first and fifth bands, and the second and third bandsThe wavelengths are smaller than the first band and larger than the first band, respectively. The first band is within the first modified band and the second modified band is within the first band.

Description

可减少镀膜层数的带通滤光片 Bandpass Filters to Reduce the Number of Coating Layers

技术领域 technical field

本发明涉及一种带通滤光片(band pass filter),特别是指一种可减少镀膜层数的带通滤光片。The invention relates to a band pass filter, in particular to a band pass filter which can reduce the number of coating layers.

背景技术 Background technique

目前构成带通滤光片的膜层结构的方式常见者可分成两种方式:一种为双面光学镀膜,以可见光带通滤光片为例,是于一玻璃基材的两平面上分别镀上一紫外光截止(UV cut)镀膜及一远红外光截止(IR cut)镀膜;另一种为单面光学镀膜,以绿光带通滤光片为例,则是于一玻璃基材的其中一平面上镀上数十层等厚的高低值折射(refractive)层。At present, the film layer structure of the band-pass filter can be divided into two common ways: one is double-sided optical coating, taking the visible light band-pass filter as an example, which is divided into two planes on a glass substrate. Coated with an ultraviolet cut (UV cut) coating and a far infrared cut (IR cut) coating; the other is a single-sided optical coating, taking the green bandpass filter as an example, it is on a glass substrate Dozens of high and low value refractive layers of equal thickness are plated on one of the planes.

一般由双面光学镀膜所构成的带通滤光片,不但因两面所累积的总膜厚过厚而影响最终的穿透率,此外,也须考虑单面光学分光特性及双面合成效应,因此,在设计膜层结构时较为繁复。Generally, the band-pass filter composed of double-sided optical coating not only affects the final transmittance due to the total film thickness accumulated on both sides is too thick, but also must consider the single-sided optical spectroscopic characteristics and double-sided synthesis effect. Therefore, it is more complicated when designing the film structure.

而单面光学镀膜的带通滤光片可参阅图1,传统一种带通滤光片1,包含:一基材11、沿一方向X叠置有一第一膜堆12、一第二膜堆13及一第三膜堆14。The band-pass filter with single-sided optical coating can be referred to FIG. 1. A traditional band-pass filter 1 includes: a substrate 11, a first film stack 12 stacked along a direction X, and a second film stack 13 and a third membrane stack 14 .

该第一膜堆12沿该方向X叠置有一呈(0.7332H/0.7332L)10的膜层结构;该第二膜堆13沿该方向X叠置有一呈(1.308H/1.308L)10的膜层结构;该第三膜堆14沿该方向X叠置有一呈(1.4H/1.4L)10的膜层结构;其中,该带通滤光片1的一中心波长(λ0)为465nm,H及L是等于λ0/4的一高折射层及一低折射层。The first film stack 12 is stacked with a film structure of (0.7332H/0.7332L) 10 along the direction X; the second film stack 13 is stacked with a film structure of (1.308H/1.308L) 10 along the direction X. Film layer structure; the third film stack 14 is stacked with a film layer structure of (1.4H/1.4L) 10 along the direction X; wherein, a central wavelength (λ 0 ) of the bandpass filter 1 is 465nm , H and L are a high refraction layer and a low refraction layer equal to λ 0 /4.

由前述说明,该传统带通滤光片1的膜层结构[也就是,(0.7332H/0.7332L)10/(1.308H/1.308L)10/(1.4H/1.4L)10]的总膜厚说明于下:From the foregoing description, the total film structure of the traditional bandpass filter 1 [that is, (0.7332H/0.7332L) 10 /(1.308H/1.308L) 10 /(1.4H/1.4L) 10 ] The thickness is described below:

λ0=465, H = L = λ 0 4 = 465 4 , H + L = λ 0 2 = 465 2 λ 0 =465, h = L = λ 0 4 = 465 4 , h + L = λ 0 2 = 465 2

Figure C20051013454000043
Figure C20051013454000043

== [[ 7.3327.332 ++ 13.0813.08 ++ 1414 ]] 465465 22 == 8002.658002.65 (( nmnm ))

另,参阅图2,由该带通滤光片1的所述膜堆12、13、14的穿透率光谱图显示,该第一膜堆12的功效在于截止波长大于500nm的波段,该第二膜堆13的功效在于增加波长小于500nm波段的穿透率,而该第三膜堆14的功效在于截止波长小于400nm的波段,借所述膜堆12、13、14的穿透及截止特性以形成可过滤波长介于400nm至500nm之间的带通滤光片1。In addition, referring to FIG. 2 , the transmittance spectrograms of the membrane stacks 12, 13, and 14 of the bandpass filter 1 show that the efficacy of the first membrane stack 12 lies in the band with a cutoff wavelength greater than 500nm. The effect of the second film stack 13 is to increase the transmittance of the wavelength band less than 500nm, and the effect of the third film stack 14 is to cut off the wave band with a wavelength less than 400nm. To form a bandpass filter 1 capable of filtering wavelengths between 400nm and 500nm.

参阅图3,由该带通滤光片1的穿透率光谱图显示,经所述膜堆12、13、14叠加后的穿透率曲线是呈严重的抖动态(ripper),且由于该带通滤光片1的总膜厚高达约8000nm,极易造成白雾现象(scattering phenomenon)并致使其平均穿透率无法维持在80%以上,因此,不但增加镀膜的生产成本也严重地影响该带通滤光片1的光学分光性。Referring to Fig. 3, it is shown by the transmittance spectrogram of this band-pass filter 1 that the transmittance curve after the stack 12, 13, 14 is superimposed is serious jitter (ripper), and due to the The total film thickness of the bandpass filter 1 is as high as about 8000nm, which can easily cause the scattering phenomenon and cause the average transmittance to be unable to be maintained above 80%. Therefore, not only the production cost of the coating is increased, but also the The optical separation of the bandpass filter 1.

因此,设计出可抑制白雾现象以达到良好的光学分光特性的膜层结构并有效地降低镀膜的生产成本,是当前开发带通滤光片相关领域者所待解决努力的方向。Therefore, designing a film layer structure that can suppress the white fog phenomenon to achieve good optical spectroscopic characteristics and effectively reduce the production cost of the coating is the current direction of efforts for those in the field of developing bandpass filters.

发明内容 Contents of the invention

本发明的目的在于提供一种可减少镀膜层数的带通滤光片,并且是一种可抑制白雾现象以达到良好的光学分光特性的膜层结构,并有效地降低镀膜生产成本的可减少镀膜层数的带通滤光片。The purpose of the present invention is to provide a band-pass filter that can reduce the number of coating layers, and it is a film layer structure that can suppress the white fog phenomenon to achieve good optical spectral characteristics, and effectively reduce the coating production cost. Bandpass filter with reduced number of coating layers.

本发明一种可减少镀膜层数的带通滤光片,包含:一基材、一叠置于该基材的主膜、一夹置于该主膜及该基材之间的第一匹配膜,及一叠置于该主膜的第二匹配膜。The present invention is a band-pass filter capable of reducing the number of coating layers, comprising: a base material, a main film stacked on the base material, a first matching film sandwiched between the main film and the base material film, and a second matching film stacked on the main film.

该主膜由该基材向远离该基材的一叠置方向依序叠置有一呈(LHxLH)m的膜层结构。该主膜于一第一波段的平均穿透率大于80%,于一第二波段及一第三波段的平均穿透率分别是介于40%~60%之间,于一第四波段及一第五波段的平均穿透率分别是小于1%;其中,H及L分别为一高折射材料及一低折射材料,x等于2n,n为正整数,m≤6。该第二波段是介于该第一及第四波段之间,该第三波段是介于该第一及第五波段之间,且该第二波段的波长是小于该第一波段的波长,该第三波段的波长是大于该第一波段的波长。The main film is sequentially stacked from the base material to a stacking direction away from the base material and has a film layer structure of (LHxLH) m . The average transmittance of the main film in a first wave band is greater than 80%, the average transmittance in a second wave band and a third wave band is respectively between 40% and 60%, and in a fourth wave band and a The average transmittance of the fifth band is less than 1% respectively; wherein, H and L are a high refraction material and a low refraction material respectively, x is equal to 2n, n is a positive integer, m≤6. the second waveband is between the first and fourth wavebands, the third waveband is between the first and fifth wavebands, and the wavelength of the second waveband is smaller than the wavelength of the first waveband, The wavelength of the third waveband is greater than the wavelength of the first waveband.

该第一匹配膜沿该叠置方向依序叠置有一呈2HLH2LH的膜层结构,于一第一修正波段内的平均穿透率是大于85%,且该第一波段是介于该第一修正波段范围内。The first matching film is sequentially stacked with a film layer structure of 2HLH2LH along the stacking direction, the average transmittance in a first correction waveband is greater than 85%, and the first waveband is between the first within the correction band.

该第二匹配膜沿该叠置方向依序叠置有一呈L2HL2HL的膜层结构,于该第一波段内的一第二修正波段的平均穿透率是大于95%。The second matching film is sequentially stacked with a layer structure of L2HL2HL along the stacking direction, and the average transmittance of a second correction waveband in the first waveband is greater than 95%.

其中,H及L分别为厚度等于λ0/4的该高折射材料及该低折射材料,λ0为介于380nm~1100nm的波长。Wherein, H and L are respectively the high refraction material and the low refraction material with a thickness equal to λ 0 /4, and λ 0 is a wavelength between 380nm˜1100nm.

本发明的功效在于,具有可抑制白雾现象以达到良好的光学分光特性的膜层结构,并有效地降低镀膜生产成本。The efficacy of the present invention lies in that it has a film layer structure that can suppress the white fog phenomenon to achieve good optical spectroscopic characteristics, and effectively reduces the production cost of the coating film.

附图说明 Description of drawings

图1是一剖视示意图,说明一种传统带通滤光片;Fig. 1 is a schematic sectional view illustrating a conventional bandpass filter;

图2是该传统带通滤光片的一第一、一第二及一第三膜堆栈加前的穿透率光谱图;Fig. 2 is a first, a second and a third film stack of this traditional bandpass filter before the transmittance spectrogram;

图3是该传统带通滤光片的第一、第二及第三膜堆栈加后的穿透率光谱图;Fig. 3 is the transmittance spectrogram after the first, second and third film stacks of this traditional bandpass filter are added;

图4是一剖视示意图,说明本发明可减少镀膜层数的带通滤光片的一第一较佳实施例;Fig. 4 is a schematic sectional view illustrating a first preferred embodiment of the band-pass filter of the present invention that can reduce the number of coating layers;

图5是该第一较佳实施例的一主膜的穿透率光谱图;Fig. 5 is the transmittance spectrogram of a main film of this first preferred embodiment;

图6是该第一较佳实施例的一第一匹配膜的穿透率光谱图;Fig. 6 is the transmittance spectrogram of a first matching film of the first preferred embodiment;

图7是该第一较佳实施例的主膜及第一匹配膜叠加后的穿透率光谱图;Fig. 7 is the transmittance spectrogram after the main film and the first matching film of the first preferred embodiment are superimposed;

图8是该第一较佳实施例的一第二匹配膜的穿透率光谱图;Fig. 8 is a transmittance spectrogram of a second matching film of the first preferred embodiment;

图9是该第一较佳实施例的主膜及第二匹配膜叠加后的穿透率光谱图;Fig. 9 is a spectrogram of transmittance after superimposing the main film and the second matching film of the first preferred embodiment;

图10是该第一较佳实施例的主膜、第一、二匹配膜叠加后的穿透率光谱图;Fig. 10 is the transmittance spectrogram after the main film, the first and the second matching film are stacked in the first preferred embodiment;

图11是一第二较佳实施例的一主膜的穿透率光谱图;Fig. 11 is a transmittance spectrogram of a main film of a second preferred embodiment;

图12是该第二较佳实施例的主膜、一第一、二匹配膜叠加后的穿透率光谱图;Fig. 12 is the transmittance spectrogram of the main film, a first and a second matching film stacked in the second preferred embodiment;

图13是一第三较佳实施例的一主膜的穿透率光谱图;Fig. 13 is a transmittance spectrogram of a main film of a third preferred embodiment;

图14是该第三较佳实施例的主膜、一第一、二匹配膜叠加后的穿透率光谱图;Fig. 14 is the transmittance spectrogram of the main film, a first and a second matching film stacked in the third preferred embodiment;

图15是一第四较佳实施例的一主膜的穿透率光谱图;Fig. 15 is a transmittance spectrogram of a main film of a fourth preferred embodiment;

图16是该第四较佳实施例的一第一匹配膜的穿透率光谱图;Fig. 16 is a transmittance spectrogram of a first matching film of the fourth preferred embodiment;

图17是该第四较佳实施例的一第二匹配膜的穿透率光谱图;Fig. 17 is a transmittance spectrogram of a second matching film of the fourth preferred embodiment;

图18是该第四较佳实施例的主膜、第一、二匹配膜叠加后的穿透率光谱图;Fig. 18 is the transmittance spectrogram of the main film, the first and the second matching film stacked in the fourth preferred embodiment;

图19是一第五较佳实施例的一主膜的穿透率光谱图;Fig. 19 is a transmittance spectrogram of a main film of a fifth preferred embodiment;

图20是该第五较佳实施例的一第一匹配膜的穿透率光谱图;Fig. 20 is a transmittance spectrogram of a first matching film of the fifth preferred embodiment;

图21是该第五较佳实施例的一第二匹配膜的穿透率光谱图:Fig. 21 is the transmittance spectrogram of a second matching film of the fifth preferred embodiment:

图22是该第五较佳实施例的主膜、第一、二匹配膜叠加后的穿透率光谱图。Fig. 22 is a spectrogram of the transmittance after the main film, the first and the second matching films are superimposed in the fifth preferred embodiment.

具体实施方式 Detailed ways

下面通过具体实施例及附图对本发明可减少镀膜层数的带通滤光片进行详细说明。The bandpass filter that can reduce the number of coating layers of the present invention will be described in detail below through specific embodiments and accompanying drawings.

参阅图4,本发明可减少镀膜层数的带通滤光片的一第一较佳实施例,包含:一基材2、一叠置于该基材2的主膜3、一夹置于该主膜3及该基材2之间的第一匹配膜4,及一叠置于该主膜3的第二匹配膜5。Referring to Fig. 4, a first preferred embodiment of the bandpass filter which can reduce the number of coating layers of the present invention comprises: a substrate 2, a main film 3 stacked on the substrate 2, a sandwiched A first matching film 4 between the main film 3 and the substrate 2 , and a second matching film 5 stacked on the main film 3 .

该主膜3由该基材2向远离该基材2的一叠置方向Y依序叠置有一呈(LHxLH)m的膜层结构。该主膜3于一第一波段的平均穿透率大于80%,于一第二波段及一第三波段的平均穿透率分别是介于40%~60%之间,于一第四波段及一第五波段的平均穿透率分别是小于1%;其中,x等于2n,n为正整数,m≤6。该第二波段是介于该第一及第四波段之间,该第三波段是介于该第一及第五波段之间,且该第二波段的波长是小于该第一波段的波长,该第三波段的波长是大于该第一波段的波长。The main film 3 is sequentially stacked from the base material 2 in a stacking direction Y away from the base material 2 and has a film layer structure of (LH×LH) m . The average transmittance of the main film 3 in a first wave band is greater than 80%, the average transmittance in a second wave band and a third wave band are respectively between 40% and 60%, and in a fourth wave band and - the average penetration rate of the fifth band is less than 1% respectively; wherein, x is equal to 2n, n is a positive integer, and m≤6. the second waveband is between the first and fourth wavebands, the third waveband is between the first and fifth wavebands, and the wavelength of the second waveband is smaller than the wavelength of the first waveband, The wavelength of the third waveband is greater than the wavelength of the first waveband.

该第一匹配膜4沿该叠置方向Y依序叠置有一呈2HLH2LH的膜层结构,于一第一修正波段内的平均穿透率是大于85%,且该第一波段是介于该第一修正波段范围内。The first matching film 4 is sequentially stacked with a film structure of 2HLH2LH along the stacking direction Y, the average transmittance in a first correction waveband is greater than 85%, and the first waveband is between the within the first correction band.

该第二匹配膜5沿该叠置方向Y依序叠置有一呈L2HL2HL的膜层结构,且于该第一波段内的一第二修正波段的平均穿透率是大于95%。The second matching film 5 is sequentially stacked with a layer structure of L2HL2HL along the stacking direction Y, and the average transmittance of a second correction waveband within the first waveband is greater than 95%.

在本发明可减少镀膜层数的带通滤光片中,H及L分别为厚度等于λ0/4的一高折射材料及一低折射材料,λ0为介于380nm~1100nm的波长。适用于本发明该第一较佳实施例的λ0为介于445nm~485nm的波长,且1≤n≤3;另,适合于本发明该高折射材料的折射率(refractive index)是介于2.1至2.5之间,而该低折射材料的折射率是介于1.3至1.5之间。In the bandpass filter capable of reducing the number of coating layers of the present invention, H and L are respectively a high-refraction material and a low-refraction material with a thickness equal to λ 0 /4, and λ 0 is a wavelength between 380nm and 1100nm. The λ 0 applicable to the first preferred embodiment of the present invention is a wavelength between 445nm and 485nm, and 1≤n≤3; in addition, the refractive index (refractive index) suitable for the high refractive material of the present invention is between 2.1-2.5, and the low-refractive material has a refractive index between 1.3-1.5.

在该第一较佳实施例中,n=1(也就是,x=2),m=6,λ0为465nm的波长;该高折射材料是二氧化钛(TiO2),该低折射材料是二氧化硅(SiO2)。In the first preferred embodiment, n=1 (that is, x=2), m=6, λ 0 is a wavelength of 465 nm; the high refractive material is titanium dioxide (TiO 2 ), and the low refractive material is di Silicon oxide (SiO 2 ).

归纳前述,在本发明该第一较佳实施例中,该基材2、第一匹配膜4、主膜3及第二匹配膜5的膜层结构沿该叠置方向Y依序为:基材/2HLH2LH/(LH2LH)6/L2HL2HL/空气。To sum up the foregoing, in the first preferred embodiment of the present invention, the film layer structure of the substrate 2, the first matching film 4, the main film 3 and the second matching film 5 along the stacking direction Y is as follows: Material/2HLH2LH/(LH2LH) 6 /L2HL2HL/air.

参阅图5,由该第一较佳实施例的主膜3的穿透率光谱图显示,在λ0为465nm的波长的条件下,介于440nm~500nm之间的第一波段平均穿透率是大于90%;428±5nm的第二波段及515±5nm的第三波段的平均穿透率是介于40%~60%之间;而介于400nm~420nm之间的第四波段及介于530nm~600nm之间的第五波段的平均穿透率是小于1%。Referring to Fig. 5, the transmittance spectrogram of the main film 3 of the first preferred embodiment shows that under the condition that λ 0 is a wavelength of 465nm, the first band average transmittance between 440nm~500nm is greater than 90%; the average transmittance of the second wave band of 428±5nm and the third wave band of 515±5nm is between 40% and 60%; The average transmittance of the fifth wave band between 530nm and 600nm is less than 1%.

参阅图6,由该第一较佳实施例的第一匹配膜4的穿透率光谱图显示,在λ0为465nm的波长的条件下,介于440nm~500nm之间的第一修正波段的平均穿透率是大于95%。另,配合参阅图7,由该第一较佳实施例的主膜3及第一匹配膜4叠加后的穿透率光谱图显示,该第一匹配膜3的主要作用在于修正介于440nm~500nm之间的第一波段的平均穿透率。Referring to Fig. 6, the transmittance spectrogram of the first matching film 4 of the first preferred embodiment shows that under the condition that λ 0 is a wavelength of 465nm, the first correction waveband between 440nm and 500nm The average penetration rate is greater than 95%. In addition, referring to FIG. 7 , the transmittance spectrogram after superimposing the main film 3 and the first matching film 4 of the first preferred embodiment shows that the main function of the first matching film 3 is to correct the The average transmittance of the first band between 500nm.

参阅图8,由该第一较佳实施例的第二匹配膜5的穿透率光谱图显示,在λ0为465nm的波长的条件下,介于460nm~480nm之间的第二修正波段的平均穿透率是大于95%。另,参阅图9,由该第一较佳实施例的主膜3及第二匹配膜5叠加后的穿透率光谱图显示,该第二匹配膜5的主要作用在于修正介于460nm~480nm之间的第二修正波段的平均穿透率。Referring to Fig. 8, the transmittance spectrogram of the second matching film 5 of the first preferred embodiment shows that under the condition that λ 0 is a wavelength of 465nm, the second correction waveband between 460nm and 480nm The average penetration rate is greater than 95%. In addition, referring to FIG. 9 , the transmittance spectrogram after superposition of the main film 3 and the second matching film 5 of the first preferred embodiment shows that the main function of the second matching film 5 is to correct the The average penetration between the second correction bands.

参阅图10,由该第一较佳实施例的主膜3、第一匹配膜4及第二匹配膜5叠加后的穿透率光谱图显示,本发明该第一较佳实施例可减少镀膜层数的带通滤光片于该第一波段(也就是,介于440nm~500nm之间的波长)的平均穿透率约大于95%,而于该第二及第三波段的穿透率曲线陡度高,因此可有效地过滤该第一波段的波长。Referring to Fig. 10, the transmittance spectrogram after superposition of the main film 3, the first matching film 4 and the second matching film 5 of the first preferred embodiment shows that the first preferred embodiment of the present invention can reduce the coating The average transmittance of the band-pass filter of the number of layers in the first waveband (that is, the wavelength between 440nm and 500nm) is greater than 95%, and the transmittance in the second and third wavebands The steepness of the curve effectively filters the wavelengths of this first band.

此外,本发明该第一较佳实施例的膜层结构[也就是,2HLH2LH/(LH2LH)6/L2HL2HL]的总膜厚说明于下:In addition, the total film thickness of the film structure [that is, 2HLH2LH/(LH2LH) 6 /L2HL2HL] of the first preferred embodiment of the present invention is as follows:

λ0=465, H = L = λ 0 4 = 465 4 λ 0 =465, h = L = λ 0 4 = 465 4

Figure C20051013454000082
Figure C20051013454000082

== [[ 77 ++ (( 55 )) 66 ++ 77 ]] 465465 44 == 51155115 (( nmnm ))

本发明该第一较佳实施例的总膜厚与该传统带通滤光片1相比较显著减少约3000nm,因此,可有效地抑制白雾现象进而增加穿透率。此外,与传统的带通滤光片1相比较,本发明各膜层为等厚设计,因此有利于镀膜过程中的制程监控。Compared with the traditional bandpass filter 1, the total film thickness of the first preferred embodiment of the present invention is significantly reduced by about 3000 nm. Therefore, the white fog phenomenon can be effectively suppressed and the transmittance can be increased. In addition, compared with the traditional bandpass filter 1, each film layer of the present invention is designed to be of equal thickness, so it is beneficial to process monitoring during the coating process.

本发明可减少镀膜层数的带通滤光片的一第二较佳实施例,大致上是与该第一较佳实施例相同,其不同处只在于n=2(也就是,x=4)。A second preferred embodiment of the band-pass filter that can reduce the number of coating layers of the present invention is substantially the same as the first preferred embodiment, and its difference is only n=2 (that is, x=4 ).

因此,在本发明该第二较佳实施例中,该基材2、第一匹配膜4、主膜3及第二匹配膜5的膜层结构沿该叠置方向Y依序为:基材/2HLH2LH/(LH4LH)6/L2HL2HL/空气。Therefore, in the second preferred embodiment of the present invention, the film layer structure of the substrate 2, the first matching film 4, the main film 3 and the second matching film 5 along the stacking direction Y is as follows: the substrate /2HLH2LH/(LH4LH) 6 /L2HL2HL/air.

参阅图11,由该第二较佳实施例的主膜3的穿透率光谱图显示,该第二较佳实施例在λ0为465nm的波长及n=2的条件下,介于445nm~490nm之间的第一波段平均穿透率是大于80%;439±5nm的第二波段及496±5nm的第三波段的平均穿透率是介于40%~60%之间;而介于400nm~430nm之间的第四波段及介于510nm~580nm之间的第五波段的平均穿透率是小于1%。另,再参阅图6,该第一匹配膜4于介于440nm~500nm之间的第一修正波段的平均穿透率是大于95%;且由图8显示,该第二匹配膜5于介于460nm~480nm之间的第二修正波段的平均穿透率是大于95%。Referring to Fig. 11, the transmittance spectrogram of the main film 3 of this second preferred embodiment shows that this second preferred embodiment is between 445nm~ The average transmittance of the first band between 490nm and 490nm is greater than 80%; the average transmittance of the second band of 439±5nm and the third band of 496±5nm is between 40% and 60%; The average transmittance of the fourth waveband between 400nm-430nm and the fifth waveband between 510nm-580nm is less than 1%. In addition, referring to FIG. 6 again, the average transmittance of the first matching film 4 in the first correction wavelength band between 440nm and 500nm is greater than 95%; and as shown in FIG. 8, the second matching film 5 is between The average transmittance of the second correction wavelength band between 460nm-480nm is greater than 95%.

参阅图12,由该第二较佳实施例的主膜3、第一匹配膜4及第二匹配膜5叠加后的穿透率光谱图显示,本发明该第二较佳实施例可减少镀膜层数的带通滤光片于该第一波段(也就是,介于445nm~490nm之间的波长)的平均穿透率约大于90%,而于该第二及第三波段的穿透率曲线陡度高,因此可有效地可过滤该第一波段的波长。Referring to Fig. 12, the transmittance spectrogram of the superposition of the main film 3, the first matching film 4 and the second matching film 5 of the second preferred embodiment shows that the second preferred embodiment of the present invention can reduce the coating The average transmittance of the bandpass filter of the number of layers in the first waveband (that is, the wavelength between 445nm and 490nm) is greater than 90%, and the transmittance in the second and third wavebands The steepness of the curve is high, so the wavelengths of this first band can be effectively filtered.

另,本发明该第二较佳实施例的膜层结构[也就是,2HLH2LH/(LH4LH)6/L2HL2HL]的总膜厚说明于下:In addition, the total film thickness of the film structure [that is, 2HLH2LH/(LH4LH) 6 /L2HL2HL] of the second preferred embodiment of the present invention is as follows:

λ0=465, H = L = λ 0 4 = 465 4 λ 0 =465, h = L = λ 0 4 = 465 4

Figure C20051013454000092
Figure C20051013454000092

== [[ 77 ++ (( 77 )) 66 ++ 77 ]] 465465 44 == 65106510 (( nmnm ))

本发明该第二较佳实施例的总膜厚与该传统带通滤光片1相比较显著减少约1500nm,因此,也可有效地抑制白雾现象进而增加穿透率。Compared with the traditional bandpass filter 1, the total film thickness of the second preferred embodiment of the present invention is significantly reduced by about 1500nm. Therefore, the white fog phenomenon can also be effectively suppressed to increase the transmittance.

本发明可减少镀膜层数的带通滤光片的一第三较佳实施例,大致上是与该第一较佳实施例相同,其不同处只在于n=3(也就是,x=6)。A third preferred embodiment of the band-pass filter that can reduce the number of coating layers of the present invention is substantially the same as the first preferred embodiment, and its difference is only n=3 (that is, x=6 ).

因此,在本发明该第三较佳实施例中,该基材2、第一匹配膜4、主膜3及第二匹配膜5的膜层结构沿该叠置方向Y依序为:基材/2HLH2LH/(LH6LH)6/L2HL2HL/空气。Therefore, in the third preferred embodiment of the present invention, the film layer structure of the substrate 2, the first matching film 4, the main film 3 and the second matching film 5 along the stacking direction Y is as follows: the substrate /2HLH2LH/(LH6LH) 6 /L2HL2HL/air.

参阅图13,由该第三较佳实施例的主膜3的穿透率光谱图显示,该第三较佳实施例在λ0为465nm的波长及n=3的条件下,介于450nm~480nm之间的第一波段平均穿透率是大于80%;444±5nm的第二波段及488±5nm的第三波段的平均穿透率是介于40%~60%之间;而介于400nm~440nm之间的第四波段及介于500nm~550nm之间的第五波段的平均穿透率是小于1%。另,再参阅图6,该第一匹配膜4于介于440nm~500nm之间的第一修正波段的平均穿透率是大于95%;且由图8显示,该第二匹配膜5于介于460nm~480nm之间的第二修正波段的平均穿透率是大于95%。Referring to Fig. 13, it is shown by the transmittance spectrogram of the main film 3 of this third preferred embodiment, that this third preferred embodiment is between 450nm~ The average transmittance of the first band between 480nm and 480nm is greater than 80%; the average transmittance of the second band of 444±5nm and the third band of 488±5nm is between 40% and 60%; The average transmittance of the fourth waveband between 400nm-440nm and the fifth waveband between 500nm-550nm is less than 1%. In addition, referring to FIG. 6 again, the average transmittance of the first matching film 4 in the first correction wavelength band between 440nm and 500nm is greater than 95%; and as shown in FIG. 8, the second matching film 5 is between The average transmittance of the second correction wavelength band between 460nm-480nm is greater than 95%.

参阅图14,由该第三较佳实施例的主膜3、第一匹配膜4及第二匹配膜5叠加后的穿透率光谱图显示,本发明该第三较佳实施例可减少镀膜层数的带通滤光片于该第一波段(也就是,介于450nm~485nm之间的波长)的平均穿透率约大于88%,而于该第二及第三波段的穿透率曲线陡度高,因此可有效地过滤该第一波段的波长。Referring to FIG. 14 , the transmittance spectrogram after superposition of the main film 3, the first matching film 4 and the second matching film 5 of the third preferred embodiment shows that the third preferred embodiment of the present invention can reduce the coating The average transmittance of the bandpass filter of the number of layers in the first waveband (that is, the wavelength between 450nm and 485nm) is greater than 88%, and the transmittance in the second and third wavebands The steepness of the curve effectively filters the wavelengths of this first band.

又,本发明该第三较佳实施例的膜层结构[也就是,2HLH2LH/(LH6LH)6/L2HL2HL]的总膜厚说明于下:Also, the total film thickness of the film layer structure [that is, 2HLH2LH/(LH6LH) 6 /L2HL2HL] of the third preferred embodiment of the present invention is as follows:

λ0=465, H = L = λ 0 4 = 465 4 λ 0 =465, h = L = λ 0 4 = 465 4

Figure C20051013454000102
Figure C20051013454000102

== [[ 77 ++ (( 99 )) 66 ++ 77 ]] 465465 44 == 79057905 (( nmnm ))

本发明该第三较佳实施例的总膜厚与该传统带通滤光片1相比较减少约100nm,因此,若欲减少该第三较佳实施例的总膜厚也可降低该主膜3的m值,进而抑制白雾现象并达到增加穿透率作用。Compared with the traditional bandpass filter 1, the total film thickness of the third preferred embodiment of the present invention is reduced by about 100nm. Therefore, if the total film thickness of the third preferred embodiment is to be reduced, the main film can also be reduced. The m value of 3, thereby suppressing the white fog phenomenon and achieving the effect of increasing the penetration rate.

本发明可减少镀膜层数的带通滤光片的一第四较佳实施例,大致上是与该第一较佳实施例相同,其不同处只在于λ0的波长。适用于本发明该第四较佳实施例的λ0为介于385nm~420nm的波长。在该第四较佳实施例中,λ0为400nm的波长。A fourth preferred embodiment of the band-pass filter of the present invention that can reduce the number of coating layers is substantially the same as the first preferred embodiment, and the only difference lies in the wavelength of λ0 . The λ 0 suitable for the fourth preferred embodiment of the present invention is a wavelength between 385nm and 420nm. In this fourth preferred embodiment, λ 0 is a wavelength of 400 nm.

参阅图15,由该第四较佳实施例的主膜3的穿透率光谱图显示,该第四较佳实施例在λ0为400nm的波长的条件下,介于382nm~430nm之间的第一波段平均穿透率是大于80%;376±5nm的第二波段及437±5nm的第三波段的平均穿透率是介于40%~60%之间;而介于350nm~370nm之间的第四波段及介于450nm~500nm之间的第五波段的平均穿透率是小于1%。Referring to FIG. 15 , the transmittance spectrum of the main film 3 of the fourth preferred embodiment shows that the fourth preferred embodiment has a transmittance between 382nm and 430nm under the condition that λ 0 is a wavelength of 400nm. The average transmittance of the first band is greater than 80%; the average transmittance of the second band of 376±5nm and the third band of 437±5nm is between 40% and 60%; and between 350nm and 370nm The average transmittance of the fourth waveband and the fifth waveband between 450nm and 500nm is less than 1%.

另,参阅图16,本发明该第四较佳实施例的第一匹配膜4于介于380nm~430nm之间的第一修正波段的平均穿透率是大于85%;且,由图17显示,本发明该第四较佳实施例的第二匹配膜5于介于395nm~405nm之间的第二修正波段的平均穿透率是大于95%。In addition, referring to FIG. 16 , the average transmittance of the first matching film 4 in the fourth preferred embodiment of the present invention in the first correction wavelength band between 380nm and 430nm is greater than 85%; and, as shown in FIG. 17 According to the fourth preferred embodiment of the present invention, the average transmittance of the second matching film 5 in the second correction wavelength band between 395nm and 405nm is greater than 95%.

参阅图18,由该第四较佳实施例的主膜3、第一匹配膜4及第二匹配膜5叠加后的穿透率光谱图显示,本发明该第四较佳实施例可减少镀膜层数的带通滤光片于该第一波段(也就是,介于382nm~430nm之间的波长)的平均穿透率约大于95%,而于该第二及第三波段的穿透率曲线陡度高,因此可有效地过滤该第一波段的波长。Referring to FIG. 18 , the transmittance spectrogram after superposition of the main film 3, the first matching film 4 and the second matching film 5 of the fourth preferred embodiment shows that the fourth preferred embodiment of the present invention can reduce the coating The average transmittance of the band-pass filter of the number of layers in the first waveband (that is, the wavelength between 382nm and 430nm) is greater than 95%, and the transmittance in the second and third wavebands The steepness of the curve effectively filters the wavelengths of this first band.

本发明可减少镀膜层数的带通滤光片的一第五较佳实施例,大致上是与该第一较佳实施例相同,其不同处只在于λ0的波长。适用于本发明该第五较佳实施例的λ0为介于860nm~940nm的波长。在该第五较佳实施例中,λ0为900nm的波长。A fifth preferred embodiment of the band-pass filter of the present invention that can reduce the number of coating layers is substantially the same as the first preferred embodiment, and the only difference lies in the wavelength of λ0 . The λ 0 suitable for the fifth preferred embodiment of the present invention is a wavelength between 860 nm˜940 nm. In this fifth preferred embodiment, λ 0 is a wavelength of 900 nm.

参阅图19,由该第五较佳实施例的主膜3的穿透率光谱图显示,该第五较佳实施例在λ0为900nm的波长的条件下,介于830nm~980nm之间的第一波段平均穿透率是大于80%;812±5nm的第二波段及1012±5nm的第三波段的平均穿透率是介于40%~60%之间;而介于700nm~790nm之间的第四波段及介于1040nm~1200nm之间的第五波段的平均穿透率是小于1%。Referring to Fig. 19, it is shown by the transmittance spectrogram of the main film 3 of the fifth preferred embodiment that under the condition that λ 0 of the fifth preferred embodiment is a wavelength of 900 nm, the transmittance between 830nm and 980nm The average transmittance of the first band is greater than 80%; the average transmittance of the second band of 812±5nm and the third band of 1012±5nm is between 40% and 60%; and between 700nm and 790nm The average transmittance of the fourth waveband and the fifth waveband between 1040nm and 1200nm is less than 1%.

另,参阅图20,本发明该第五较佳实施例的第一匹配膜4于介于830nm~980nm之间的第一修正波段的平均穿透率是大于85%;且由图21显示,本发明该第五较佳实施例的第二匹配膜5于介于885nm~915nm之间的第二修正波段的平均穿透率是大于95%。In addition, referring to FIG. 20, the average transmittance of the first matching film 4 in the fifth preferred embodiment of the present invention in the first correction wavelength band between 830nm and 980nm is greater than 85%; and as shown in FIG. 21, The average transmittance of the second matching film 5 of the fifth preferred embodiment of the present invention in the second correction wavelength band between 885nm and 915nm is greater than 95%.

参阅图22,由该第五较佳实施例的主膜3、第一匹配膜4及第二匹配膜5叠加后的穿透率光谱图显示,本发明该第五较佳实施例可减少镀膜层数的带通滤光片于该第一波段(也就是,介于830nm~980nm之间的波长)的平均穿透率约大于95%,而于该第二及第三波段的穿透率曲线陡度高,因此可有效地可过滤该第一波段的波长。Referring to Fig. 22, the transmittance spectrogram after superposition of the main film 3, the first matching film 4 and the second matching film 5 of the fifth preferred embodiment shows that the fifth preferred embodiment of the present invention can reduce the coating The average transmittance of the band-pass filter of the number of layers in the first waveband (that is, the wavelength between 830nm and 980nm) is greater than 95%, and the transmittance in the second and third wavebands The steepness of the curve is high, so the wavelengths of this first band can be effectively filtered.

本发明所述较佳实施例的细部膜层结构[也就是,2HLH2LH/(LHxLH)m/L2HL2HL]、λ0值、总膜厚及各波段的穿透率,整理于下列表1.中。The detailed film structure of the preferred embodiment of the present invention [that is, 2HLH2LH/(LHxLH) m /L2HL2HL], λ 0 value, total film thickness and the transmittance of each band are arranged in the following table 1.

表1.Table 1.

Figure C20051013454000121
Figure C20051013454000121

与传统该带通滤光片1相比较下,本发明所述较佳实施例所设计出的膜层结构不但穿透率曲线陡度佳,且各较佳实施例所对应的过滤波段皆可达85%以上的穿透率,此外,本发明该第一、二、三较佳实施例最终的总膜厚也低于该传统带通滤光片1,因此,可有效地降低镀膜的生产成本并抑制白雾现象的产生。Compared with the traditional band-pass filter 1, the film structure designed by the preferred embodiment of the present invention not only has a good transmittance curve steepness, but also the filter bands corresponding to each preferred embodiment can be Reach more than 85% transmittance, in addition, the final total film thickness of this first, second, third preferred embodiment of the present invention is also lower than this traditional band-pass filter 1, therefore, can effectively reduce the production of coating film cost and suppress the generation of white fog phenomenon.

归纳上述,本发明可减少镀膜层数的带通滤光片,具有可抑制白雾现象以达到良好光学分光特性的膜层结构并有效地降低镀膜的生产成本,确实能达到本发明的目的。To sum up the above, the present invention can reduce the number of coating layers of the bandpass filter, has a film layer structure that can suppress the white fog phenomenon to achieve good optical spectral characteristics, and effectively reduces the production cost of the coating, and can indeed achieve the purpose of the present invention.

Claims (11)

1. the bandpass filter of a piece capable of reducing coating-plated layers is characterized in that, this bandpass filter comprises:
One base material;
One is stacked and placed on the main film of this base material, is stacked with one by this base material in regular turn to the stacked direction away from this base material and is (LHxLH) mFilm layer structure, this main film in the average penetration rate of one first wave band greater than 80%, average penetration rate in one second wave band and a triband is respectively between 40%~60%, average penetration rate in one the 4th wave band and one the 5th wave band is respectively less than 1%, wherein, H and L are respectively a high-refraction material and a low refractive material, x equals 2n, n is a positive integer, m≤6, this second wave band are between this first and the 4th wave band, and this triband is between this first and the 5th wave band, and the wavelength of this second wave band is the wavelength less than this first wave band, and the wavelength of this triband is the wavelength greater than this first wave band; One be folded between this main film and this base material and along this stacked direction be stacked with in regular turn one be 2HLH2LH film layer structure first mate film, in the one first average penetration rate of revising in the wave band is greater than 85%, and this first wave band is in this first correction wavelength band; And
One be stacked and placed on this main film and along this stacked direction be stacked with in regular turn one be L2HL2HL film layer structure second the coupling film, in this first wave band one second the correction wave band the average penetration rate be greater than 95%;
Wherein, the thickness of H and L equals λ respectively 0This high-refraction material of/4 reaches and should hang down refractive material, λ 0Be wavelength between 380nm~1100nm.
2. the bandpass filter of piece capable of reducing coating-plated layers as claimed in claim 1 is characterized in that: 1≤n≤3, and λ 0Be wavelength between 445nm~485nm.
3. the bandpass filter of piece capable of reducing coating-plated layers as claimed in claim 2 is characterized in that: n=1, m=6, λ 0Wavelength for 465nm, this first wave band is between 440nm~500nm, this second and third wave band is respectively 428 ± 5nm and 515 ± 5nm, the the 4th and the 5th wave band is respectively between between 400nm~420nm and between 530nm~600nm, and this first correction wave band and this second correction wave band are respectively between between 440nm~500nm and between 460nm~480nm.
4. the bandpass filter of piece capable of reducing coating-plated layers as claimed in claim 2 is characterized in that: n=2, m=6, λ 0Wavelength for 465nm, this first wave band is between 445nm~490nm, this second and third wave band is respectively 439 ± 5nm and 496 ± 5nm, the the 4th and the 5th wave band is respectively between between 400nm~430nm and between 510nm~580nm, and this first correction wave band and this second correction wave band are respectively between between 440nm~500nm and between 460nm~480nm.
5. the bandpass filter of piece capable of reducing coating-plated layers as claimed in claim 2 is characterized in that: n=3, m=6, λ 0Wavelength for 465nm, this first wave band is between 450nm~480nm, this second and third wave band is respectively 444 ± 5nm and 488 ± 5nm, the the 4th and the 5th wave band is respectively between between 400nm~440nm and between 500nm~550nm, and this first correction wave band and this second correction wave band are respectively between between 440nm~500nm and between 460nm~480nm.
6. the bandpass filter of piece capable of reducing coating-plated layers as claimed in claim 1 is characterized in that: λ 0Be wavelength between 385nm~420nm.
7. the bandpass filter of piece capable of reducing coating-plated layers as claimed in claim 6 is characterized in that: wherein, and n=1, m=6, λ 0Wavelength for 400nm, this first wave band is between 382nm~430nm, this second and third wave band is respectively 376 ± 5nm and 437 ± 5nm, the the 4th and the 5th wave band is respectively between between 350nm~370nm and between 450nm~500nm, and this first correction wave band and this second correction wave band are respectively between between 380nm~430nm and between 395nm~405nm.
8. the bandpass filter of piece capable of reducing coating-plated layers as claimed in claim 1 is characterized in that: λ 0Be wavelength between 860nm~940nm.
9. the bandpass filter of piece capable of reducing coating-plated layers as claimed in claim 8 is characterized in that: n=1, m=6, λ 0Wavelength for 900nm, this first wave band is between 830nm~980nm, this second and third wave band is respectively 812 ± 5nm and 1012 ± 5nm, the the 4th and the 5th wave band is respectively between between 700nm~790nm and between 1040nm~1200nm, and this first correction wave band and this second correction wave band are respectively between between 830nm~980nm and between 885nm~915nm.
10. the bandpass filter of piece capable of reducing coating-plated layers as claimed in claim 1, it is characterized in that: the refractive index of this high-refraction material is between 2.1 to 2.5, the refractive index of this low refractive material is between 1.3 to 1.5.
11. the bandpass filter of piece capable of reducing coating-plated layers as claimed in claim 10 is characterized in that: this high-refraction material is a titania, and this low refractive material is a silicon dioxide.
CNB200510134540XA 2005-12-08 2005-12-08 Bandpass filter capable of reducing coating layer number Expired - Fee Related CN100430757C (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5179468A (en) * 1991-11-05 1993-01-12 Gte Products Corporation Interleaving of similar thin-film stacks for producing optical interference coatings
CN2511984Y (en) * 2001-12-29 2002-09-18 中国科学院上海技术物理研究所 Long-wave length infrared wide-band filter
US6611378B1 (en) * 2001-12-20 2003-08-26 Semrock, Inc. Thin-film interference filter with quarter-wavelength unit sub-layers arranged in a generalized pattern
JP2005062291A (en) * 2003-08-08 2005-03-10 Hitachi Maxell Ltd Optical bandpass filter
CN1614451A (en) * 2004-11-05 2005-05-11 中国科学院上海技术物理研究所 Integrated narrow-band filter

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5179468A (en) * 1991-11-05 1993-01-12 Gte Products Corporation Interleaving of similar thin-film stacks for producing optical interference coatings
US6611378B1 (en) * 2001-12-20 2003-08-26 Semrock, Inc. Thin-film interference filter with quarter-wavelength unit sub-layers arranged in a generalized pattern
CN2511984Y (en) * 2001-12-29 2002-09-18 中国科学院上海技术物理研究所 Long-wave length infrared wide-band filter
JP2005062291A (en) * 2003-08-08 2005-03-10 Hitachi Maxell Ltd Optical bandpass filter
CN1614451A (en) * 2004-11-05 2005-05-11 中国科学院上海技术物理研究所 Integrated narrow-band filter

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