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CN100454117C - Pixel structure suitable for wide-viewing angle liquid crystal display and manufacturing method thereof - Google Patents

Pixel structure suitable for wide-viewing angle liquid crystal display and manufacturing method thereof Download PDF

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CN100454117C
CN100454117C CNB2005100761681A CN200510076168A CN100454117C CN 100454117 C CN100454117 C CN 100454117C CN B2005100761681 A CNB2005100761681 A CN B2005100761681A CN 200510076168 A CN200510076168 A CN 200510076168A CN 100454117 C CN100454117 C CN 100454117C
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storage capacitor
electrode
liquid crystal
pixel
crystal display
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CN1693980A (en
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吴明洲
林永伦
苏振嘉
田名峰
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AUO Corp
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Abstract

The invention provides a pixel structure suitable for a wide-viewing angle liquid crystal display, which comprises: a pair of gate lines, a pair of data lines, a pixel electrode and a storage capacitor. The two gate lines are arranged on a substrate in parallel, and the two data lines are arranged on the substrate in parallel and are approximately vertically intersected with the two gate lines, so that a pixel area is defined on the substrate. The pixel electrode is arranged above the pixel area, and the storage capacitor is arranged above the pixel area, is approximately parallel to one of the gate lines and is adjacent to or partially overlapped with the gate line. The invention also provides a manufacturing method of the pixel structure suitable for the wide-viewing-angle liquid crystal display.

Description

适用于广视角液晶显示器的像素结构及其制造方法 Pixel structure suitable for wide viewing angle liquid crystal display and manufacturing method thereof

技术领域 technical field

本发明涉及一种广视角显示器,特别涉及一种适用于广视角显示器的像素结构,用以有效提升图像质量。The invention relates to a display with a wide viewing angle, in particular to a pixel structure suitable for the display with a wide viewing angle, which is used to effectively improve the image quality.

背景技术 Background technique

液晶显示器(LCD)利用外加电场的作用,使得液晶分子产生转动而改变液晶配向状态。液晶显示器藉由液晶分子配向变化所产生的各种光学性质的变化,例如双折射、旋光、二色性等,将其转换成视觉上的变化以达到显示图像信息的目的。由于液晶显示器具有厚度薄、重量轻、低耗电、及低操作电压等特点,目前已广泛应用于便携式个人计算机、数码相机、投影仪等电子产品上,而在平面显示器市场中占有重要的地位。A liquid crystal display (LCD) utilizes the action of an external electric field to cause liquid crystal molecules to rotate and change the alignment state of the liquid crystal. Liquid crystal display converts various optical property changes, such as birefringence, optical rotation, dichroism, etc., produced by changes in the alignment of liquid crystal molecules into visual changes to achieve the purpose of displaying image information. Due to the characteristics of thin thickness, light weight, low power consumption, and low operating voltage, liquid crystal displays have been widely used in electronic products such as portable personal computers, digital cameras, and projectors, and occupy an important position in the flat-panel display market. .

目前的液晶显示器正朝着高亮度、高对比度、广视角、大面积、及全彩色的趋势发展。其中,为了解决视角的问题,发展出一种多域垂直配向(multi-domain vertical alignment,MVA)液晶显示器,其将显示用的液晶区域分隔成多域,藉以使液晶分子朝多个方向倾斜,进而增加液晶显示器的视角。在这种液晶显示器中,为了精确控制液晶分子的倾斜方向,通常需要以预倾角(pre-tilt angle)来控制液晶的排列方向。一般常见的作法是利用狭缝(slit)或与突出部(protrusion)的组合来产生预倾角。The current liquid crystal display is developing toward the trend of high brightness, high contrast, wide viewing angle, large area, and full color. Among them, in order to solve the problem of viewing angle, a multi-domain vertical alignment (MVA) liquid crystal display has been developed, which divides the liquid crystal region for display into multiple domains, so that the liquid crystal molecules can be tilted in multiple directions, Further, the viewing angle of the liquid crystal display is increased. In such a liquid crystal display, in order to precisely control the tilt direction of the liquid crystal molecules, it is usually necessary to control the alignment direction of the liquid crystal with a pre-tilt angle. A common practice is to use a slit or a combination of a protrusion (protrusion) to generate the pretilt angle.

图4示出了传统多域垂直配向液晶显示器的像素结构平面示意图。像素结构包括:一基板10、栅极线12a及12b、数据线18a及18b、一储存电容24、绝缘层25及一像素电极26。栅极线12a及12b与数据线18a及18b垂直相交并设置于基板10上,例如是一阵列基板,以构成一像素区20。像素区20上方依次设置有储存电容24、像素电极26及夹设于其间的绝缘层(保护层)25。典型的储存电容24位于像素区20中间的部分,其包括:一下电极12c、一上电极18c及介于上下电极18c及12c的间的一电容绝缘层(未示出)。像素电极26具有用以产生预倾角的狭缝26a,且其通常会跨过储存电容24上方。FIG. 4 shows a schematic plan view of a pixel structure of a conventional multi-domain vertical alignment liquid crystal display. The pixel structure includes: a substrate 10 , gate lines 12 a and 12 b , data lines 18 a and 18 b , a storage capacitor 24 , an insulating layer 25 and a pixel electrode 26 . The gate lines 12 a and 12 b perpendicularly cross the data lines 18 a and 18 b and are disposed on a substrate 10 , such as an array substrate, to form a pixel area 20 . A storage capacitor 24 , a pixel electrode 26 and an insulating layer (protective layer) 25 interposed therebetween are sequentially disposed above the pixel region 20 . A typical storage capacitor 24 is located in the middle of the pixel region 20, which includes: a lower electrode 12c, an upper electrode 18c, and a capacitive insulating layer (not shown) between the upper and lower electrodes 18c and 12c. The pixel electrode 26 has a slit 26 a for generating a pre-tilt angle, and it usually crosses over the storage capacitor 24 .

由于在观看此类型液晶显示器时,邻近栅极线12a及12b两侧的液晶排列较差,容易造成色偏的现象。为了消除此现象,通常栅极线12a及12b上方会利用黑底(black matrix)(未示出)来遮住该处。然而,如此会影响开口率(aperture ratio),不利于开口率的提高。When viewing this type of liquid crystal display, the alignment of the liquid crystals adjacent to the gate lines 12 a and 12 b is poor, which easily causes color shift. In order to eliminate this phenomenon, usually a black matrix (not shown) is used to cover the gate lines 12 a and 12 b. However, this will affect the aperture ratio, which is not conducive to the improvement of the aperture ratio.

发明内容 Contents of the invention

有鉴于此,本发明的目的在于提供一种适用于广视角液晶显示器的像素结构及其制造方法,其藉由改变储存电容的配置,以有效改善色偏(wash out)现象,且同时维持或甚至增加开口率。In view of this, the object of the present invention is to provide a pixel structure suitable for a wide viewing angle liquid crystal display and its manufacturing method, which can effectively improve the color shift (wash out) phenomenon by changing the configuration of the storage capacitor, and at the same time maintain or Even increase the aperture ratio.

根据上述的目的,本发明提供一种适用于广视角液晶显示器的像素结构,其包括:一对栅极线、一对数据线、一像素电极以及一储存电容。该对栅极线平行设置于一基板上,而该对数据线平行设置于基板上且大体垂直相交于该对栅极线,以在基板上界定出一像素区。像素电极设置于像素区上方,且储存电容设置于像素区上方,其大体平行于其中一栅极线且与该栅极线相邻或部分交迭。第二储存电容,设置于所述像素区的中间部上方,其大体平行所述第一和第二栅极线,且该第一储存电容位于该第二储存电容与第一栅极线之间。According to the above purpose, the present invention provides a pixel structure suitable for a wide viewing angle liquid crystal display, which includes: a pair of gate lines, a pair of data lines, a pixel electrode and a storage capacitor. The pair of gate lines are arranged in parallel on a substrate, and the pair of data lines are arranged in parallel on the substrate and generally perpendicularly intersect with the pair of gate lines to define a pixel area on the substrate. The pixel electrode is disposed above the pixel region, and the storage capacitor is disposed above the pixel region, which is substantially parallel to one of the gate lines and adjacent to or partially overlapped with the gate line. The second storage capacitor is arranged above the middle part of the pixel area, which is substantially parallel to the first and second gate lines, and the first storage capacitor is located between the second storage capacitor and the first gate line .

又根据上述的目的,本发明提供一种适用于广视角液晶显示器的像素结构的制造方法。在一基板上形成一第一导电层,并界定第一导电层,以在基板上形成大体相互平行的一对栅极线。在基板上形成一第一绝缘层,并覆盖该对栅极线。在第一绝缘层上形成一第二导电层,并界定第二导电层,以在第一绝缘层上形成一对数据线及一储存电容的下电极,其中该对数据线大体相互平行并大体垂直相交于该对栅极线而形成一像素区,且储存电容的下电极大体平行于其中一栅极线且与该栅极线相邻或部分交迭。在第一绝缘层上形成一第二绝缘层,并覆盖第一及第二数据线及储存电容的下电极。在像素区上方的第二绝缘层上形成一像素电极,其部分延伸于储存电容的下电极上方,用以作为一储存电容的上电极。Also according to the above purpose, the present invention provides a method for manufacturing a pixel structure suitable for a wide viewing angle liquid crystal display. A first conductive layer is formed on a substrate, and the first conductive layer is defined to form a pair of gate lines substantially parallel to each other on the substrate. A first insulating layer is formed on the substrate and covers the pair of gate lines. Form a second conductive layer on the first insulating layer and define the second conductive layer to form a pair of data lines and a lower electrode of a storage capacitor on the first insulating layer, wherein the pair of data lines are substantially parallel to each other and substantially A pixel area is formed by vertically intersecting the pair of gate lines, and the lower electrode of the storage capacitor is substantially parallel to one of the gate lines and adjacent to or partially overlapped with the gate line. A second insulating layer is formed on the first insulating layer and covers the first and second data lines and the lower electrode of the storage capacitor. A pixel electrode is formed on the second insulating layer above the pixel area, and part of it extends above the lower electrode of the storage capacitor, and is used as an upper electrode of the storage capacitor.

为让本发明的上述目的、特征和优点能更明显易懂,下文特举优选实施例,并配合附图,作详细说明如下:In order to make the above-mentioned purposes, features and advantages of the present invention more obvious and understandable, the preferred embodiments are specifically cited below, together with the accompanying drawings, and are described in detail as follows:

附图说明 Description of drawings

图1A至1G示出了根据本发明实施例的适用于广视角液晶显示器的像素结构的制造方法的平面示意图。FIGS. 1A to 1G show schematic plan views of a method for manufacturing a pixel structure suitable for a wide viewing angle liquid crystal display according to an embodiment of the present invention.

图1G-1示出了根据本发明另一实施例的适用于广视角液晶显示器的像素结构平面示意图。FIG. 1G-1 shows a schematic plan view of a pixel structure suitable for a wide viewing angle liquid crystal display according to another embodiment of the present invention.

图2A至2G分别示出了图1A至1G中沿2A-2A’、2B-2B’、2C-2C’、2D-2D’、2E-2E’、2F-2F’、2G-2G’线的剖面示意图。Figures 2A to 2G show respectively along lines 2A-2A', 2B-2B', 2C-2C', 2D-2D', 2E-2E', 2F-2F', 2G-2G' in Figures 1A to 1G Sectional schematic.

图3A至3C分别示出了图1E至1G中沿3A-3A’、3B-3B’、3C-3C’线的剖面示意图。Figures 3A to 3C show schematic cross-sectional views along lines 3A-3A', 3B-3B', and 3C-3C' in Figures 1E to 1G, respectively.

图4示出了传统广视角液晶显示器的像素结构的平面示意图。FIG. 4 shows a schematic plan view of a pixel structure of a conventional wide viewing angle liquid crystal display.

符号说明:Symbol Description:

公知known

10~基板;12a、12b~栅极线;12c~下电极;18a、18b~数据线;18c~上电极;20~像素区;24~储存电容;25~绝缘层;26~像素电极;26a~狭缝。10~substrate; 12a, 12b~gate line; 12c~bottom electrode; 18a, 18b~data line; 18c~upper electrode; 20~pixel area; 24~storage capacitor; 25~insulating layer; 26~pixel electrode; 26a ~Slit.

本发明this invention

100~基板;102~第一导电层;102a、102b~栅极线;102c~共用线;102d~侧向延伸部;103~栅极电极;104~第一绝缘层;106~非晶硅层;108~第二导电层;108a、108b~数据线;108c、108d、108e~导电图案层;110~像素区;111a~源极电极;111b~漏极电极;112~第二绝缘层;112a、112b、112c、112d、112e、112f~接触孔;114、118、120、122~储存电容;116~像素电极;116a~狭缝;117a、117b~透明导电部。100~substrate; 102~first conductive layer; 102a, 102b~gate line; 102c~common line; 102d~lateral extension; 103~gate electrode; 104~first insulating layer; 106~amorphous silicon layer ; 108~second conductive layer; 108a, 108b~data line; 108c, 108d, 108e~conductive pattern layer; 110~pixel area; 111a~source electrode; 111b~drain electrode; 112~second insulating layer; 112a , 112b, 112c, 112d, 112e, 112f~contact holes; 114, 118, 120, 122~storage capacitors; 116~pixel electrodes; 116a~slits; 117a, 117b~transparent conductive parts.

具体实施方式 Detailed ways

图1G示出了本发明实施例的适用于广视角液晶显示器的像素结构的平面示意图。此处,广视角液晶显示器可为多域垂直配向(multi-domain verticalalignment,MVA)液晶显示器。像素结构包括:一基板100、一像素电极116以及多个储存电容114、118、120及122。基板100上设置有至少一对平行的栅极线102a及102b及至少一对平行的数据线108a及108b。数据线108a及108b大体垂直相交于栅极线102a及102b,以在基板100上界定出一像素区110。FIG. 1G shows a schematic plan view of a pixel structure suitable for a wide viewing angle liquid crystal display according to an embodiment of the present invention. Here, the wide viewing angle liquid crystal display may be a multi-domain vertical alignment (MVA) liquid crystal display. The pixel structure includes: a substrate 100 , a pixel electrode 116 and a plurality of storage capacitors 114 , 118 , 120 and 122 . At least one pair of parallel gate lines 102a and 102b and at least one pair of parallel data lines 108a and 108b are disposed on the substrate 100 . The data lines 108 a and 108 b substantially perpendicularly cross the gate lines 102 a and 102 b to define a pixel region 110 on the substrate 100 .

在像素区110上方设置有一薄膜晶体管及一像素电极116。此处,薄膜晶体管至少包括:一栅极电极103(未示出)、作为有源(沟道)层的多晶硅层106、源极电极111a及漏极电极111b。栅极电极103电连接至栅极线102a、源极电极111a电连接至像素电极116而漏极电极111b电连接至数据线108a。像素电极116可由一透明导电层所构成,例如铟锡氧化物(ITO),且其具有至少一狭缝116a,用以产生预倾角。A thin film transistor and a pixel electrode 116 are disposed above the pixel area 110 . Here, the TFT at least includes: a gate electrode 103 (not shown), a polysilicon layer 106 as an active (channel) layer, a source electrode 111a and a drain electrode 111b. The gate electrode 103 is electrically connected to the gate line 102a, the source electrode 111a is electrically connected to the pixel electrode 116, and the drain electrode 111b is electrically connected to the data line 108a. The pixel electrode 116 can be made of a transparent conductive layer, such as indium tin oxide (ITO), and has at least one slit 116a for generating a pretilt angle.

多个储存电容114、118、120及122设置于像素区110上方。储存电容114位于像素区110中间的部分,且大体平行于栅极线102a及102b。在本实施例中,储存电容114的下电极102c与栅极线102a及102b由相同的导电层界定而成。再者,上电极108e与数据线108a及108b由相同的导电层界定而成。A plurality of storage capacitors 114 , 118 , 120 and 122 are disposed above the pixel region 110 . The storage capacitor 114 is located in the middle of the pixel region 110 and is substantially parallel to the gate lines 102a and 102b. In this embodiment, the lower electrode 102c of the storage capacitor 114 is defined by the same conductive layer as the gate lines 102a and 102b. Furthermore, the upper electrode 108e is defined by the same conductive layer as the data lines 108a and 108b.

在另一实施例中,像素电极116与储存电容114的上电极由相同的导电层界定而成,而无需额外设置上述上电极108e。In another embodiment, the pixel electrode 116 and the upper electrode of the storage capacitor 114 are defined by the same conductive layer, without additionally disposing the upper electrode 108e.

储存电容118大体平行于且邻近栅极线102a,而储存电容120大体平行于且邻近栅极线102b。不同于储存电容114,储存电容118及120的下电极108c及108d与数据线108a及108b是由相同的导电层界定而成的,而像素电极116与储存电容118及120的上电极是由相同的导电层界定而成的。亦即,以像素电极116作为储存电容118及120的上电极。The storage capacitor 118 is substantially parallel to and adjacent to the gate line 102a, and the storage capacitor 120 is substantially parallel to and adjacent to the gate line 102b. Unlike the storage capacitor 114, the lower electrodes 108c and 108d of the storage capacitors 118 and 120 are defined by the same conductive layer as the data lines 108a and 108b, while the pixel electrode 116 and the upper electrodes of the storage capacitors 118 and 120 are made of the same conductive layer. defined by the conductive layer. That is, the pixel electrode 116 is used as the upper electrode of the storage capacitors 118 and 120 .

储存电容122大体平行且邻近数据线108a。相同于储存电容114,储存电容122的下电极102d与栅极线102a及102b是由相同的导电层界定而成的。此外,相同于储存电容118及120,像素电极116与储存电容122的上电极由相同的导电层界定而成。The storage capacitor 122 is substantially parallel to and adjacent to the data line 108a. Similar to the storage capacitor 114, the bottom electrode 102d of the storage capacitor 122 and the gate lines 102a and 102b are defined by the same conductive layer. In addition, similar to the storage capacitors 118 and 120 , the pixel electrode 116 and the upper electrode of the storage capacitor 122 are defined by the same conductive layer.

图1G-1示出根据本发明另一实施例的适用于广视角液晶显示器的像素结构的平面示意图,其中相同于图1G的部件使用相同的标号,且此处省略相同或类似的说明。在本实施例中,不同于图1G之处在于大体平行于数据线108a的储存电容122可与数据线108a部分交迭。同样地,分别大体平行于栅极线102a及102b的储存电容118及120可分别与栅极线102a及102b部分交迭。FIG. 1G-1 shows a schematic plan view of a pixel structure suitable for a wide viewing angle liquid crystal display according to another embodiment of the present invention, wherein the same components as in FIG. 1G use the same reference numerals, and the same or similar descriptions are omitted here. In this embodiment, the difference from FIG. 1G is that the storage capacitor 122 substantially parallel to the data line 108a may partially overlap the data line 108a. Likewise, the storage capacitors 118 and 120 substantially parallel to the gate lines 102a and 102b, respectively, may partially overlap the gate lines 102a and 102b, respectively.

以下配合图1A至1G、图2A至2G及图3A至3C说明本发明实施例的适用于广视角液晶显示器的像素结构的制造方法。其中,图1A至1G示出广视角液晶显示器的像素结构的制造方法平面示意图;图2A至2G分别示出图1A至1G中沿2A-2A’、2B-2B’、2C-2C’、2D-2D’、2E-2E’、2F-2F’、2G-2G’线的剖面示意图;图3A至3C分别示出图1E至1G中沿3A-3A’、3B-3B’、3C-3C’线的剖面示意图。首先,请参照图1A及2A,提供一基板100,例如是由透明玻璃或石英所构成的阵列基板。在基板100上形成一第一导电层102,例如铝、铬、钼、钨、铜或其合金。接着,请参照图1B及2B,界定第一导电层102,以在基板100上形成大体相互平行的栅极线102a及102b,其中栅极线102a具有一突出部103,用以作为薄膜晶体管的栅极电极。同时,藉由界定第一导电层102,而在栅极线102a及102b之间形成一大体平行于栅极线102a及102b的共用线102c。在本实施例中,共用线102c具有大体平行且邻近于随后形成的一数据线的一侧向延伸部102d。侧向延伸部102d的一端可具有一突出部,其大体平行且邻近于一栅极线102b。共用线102c及其侧向延伸部102d用以分别作为后续储存电容的下电极。1A to 1G , FIGS. 2A to 2G and FIGS. 3A to 3C will be used to describe a method for manufacturing a pixel structure suitable for a wide viewing angle liquid crystal display according to an embodiment of the present invention. Among them, FIGS. 1A to 1G show a schematic plan view of a method for manufacturing a pixel structure of a wide viewing angle liquid crystal display; FIGS. - 2D', 2E-2E', 2F-2F', 2G-2G' line schematic cross-section; Figures 3A to 3C respectively show 3A-3A', 3B-3B', 3C-3C' in Figures 1E to 1G Line schematic diagram. First, referring to FIGS. 1A and 2A , a substrate 100 is provided, such as an array substrate made of transparent glass or quartz. A first conductive layer 102 such as aluminum, chromium, molybdenum, tungsten, copper or alloys thereof is formed on the substrate 100 . 1B and 2B, the first conductive layer 102 is defined to form gate lines 102a and 102b substantially parallel to each other on the substrate 100, wherein the gate line 102a has a protruding portion 103 for use as a thin film transistor. grid electrode. Meanwhile, by defining the first conductive layer 102, a common line 102c substantially parallel to the gate lines 102a and 102b is formed between the gate lines 102a and 102b. In this embodiment, the common line 102c has a lateral extension 102d that is substantially parallel to and adjacent to a data line formed later. One end of the lateral extension 102d may have a protruding portion substantially parallel to and adjacent to a gate line 102b. The common line 102c and its lateral extension 102d are respectively used as lower electrodes of subsequent storage capacitors.

接下来,请参照图1C及2C,在基板100上形成一第一绝缘层104,例如氧化硅或氮化硅层,并覆盖栅极线102a及102b、栅极电极103以及共用线102c及其侧向延伸部102d。此处,第一绝缘层104用作薄膜晶体管的栅极绝缘层以及储存电容绝缘层。之后,可藉由传统沉积技术,例如化学气相沉积(CVD),在栅极电极103上方的第一绝缘层104上形成一多晶硅或非晶硅层106,用以作为薄膜晶体管的有源(沟道)层。Next, referring to FIGS. 1C and 2C, a first insulating layer 104, such as a silicon oxide or silicon nitride layer, is formed on the substrate 100, and covers the gate lines 102a and 102b, the gate electrodes 103, and the common line 102c and its Lateral extension 102d. Here, the first insulating layer 104 is used as a gate insulating layer of a thin film transistor and an insulating layer of a storage capacitor. After that, a polysilicon or amorphous silicon layer 106 can be formed on the first insulating layer 104 above the gate electrode 103 by conventional deposition techniques, such as chemical vapor deposition (CVD), to serve as the active (channel) of the thin film transistor. Road) layer.

接下来,请参照图1D及2D,在第一绝缘层104上形成一第二导电层108,例如铝、铬、钼、钨、铜或其合金,并覆盖多晶硅或非晶硅层106。接着,界定第二导电层108,以在第一绝缘层104上形成大体相互平行的数据线108a及108b,且其大体垂直相交于栅极线102a及102b而形成一像素区110。同时,藉由界定该第二导电层108,以在多晶硅层(有源层)106上分别形成源极电极111a与漏极电极111b。此外,藉由界定该第二导电层108,以在第一绝缘层104上形成大体相互平行于栅极线102a及102b的导电图案层108c、108d及108e。导电图案层108c及108d分别邻近栅极线102a及102b,用以作为后续储存电容的下电极。导电图案层108e形成于共用线102c上方的第一绝缘层104上,用以作为储存电容的上电极。在本实施例中,共用线102c、导电图案层108e以及介于其间的第一绝缘层104在像素区110中间部构成一储存电容114,如图1E、2E及3A所示。Next, referring to FIGS. 1D and 2D , a second conductive layer 108 is formed on the first insulating layer 104 , such as aluminum, chromium, molybdenum, tungsten, copper or alloys thereof, and covers the polysilicon or amorphous silicon layer 106 . Next, define the second conductive layer 108 to form substantially parallel data lines 108 a and 108 b on the first insulating layer 104 , and substantially perpendicularly cross the gate lines 102 a and 102 b to form a pixel region 110 . At the same time, by defining the second conductive layer 108 , the source electrode 111 a and the drain electrode 111 b are respectively formed on the polysilicon layer (active layer) 106 . In addition, by defining the second conductive layer 108 , conductive pattern layers 108 c , 108 d and 108 e are formed on the first insulating layer 104 substantially parallel to the gate lines 102 a and 102 b. The conductive pattern layers 108c and 108d are respectively adjacent to the gate lines 102a and 102b, and are used as lower electrodes of subsequent storage capacitors. The conductive pattern layer 108e is formed on the first insulating layer 104 above the common line 102c, and is used as an upper electrode of the storage capacitor. In this embodiment, the common line 102c, the conductive pattern layer 108e and the intervening first insulating layer 104 form a storage capacitor 114 in the middle of the pixel region 110, as shown in FIGS. 1E, 2E and 3A.

接下来,请参照图1F、2F及3B,在第一绝缘层104上形成一第二绝缘层(保护层)112,并覆盖数据线108a及108b、源极及漏极电极111a及111b、以及导电图案层108c、108d及108e。第二绝缘层112可独自或与第一绝缘层104一起用作储存电容绝缘层,其可为单层或多层结构,例如为氧化硅层、氮化硅层、或其组合。之后,蚀刻第二绝缘层112和/或第一绝缘层104,以在其中形成多个介层洞(接触孔)112a、112b、112c、112d、112e及112f其中,接触孔112a用于电连接薄膜晶体管与后续形成的像素电极,而接触孔112b、112c、112d、112e及112f则用以电连接多个储存电容。Next, referring to FIGS. 1F, 2F and 3B, a second insulating layer (protective layer) 112 is formed on the first insulating layer 104, and covers the data lines 108a and 108b, the source and drain electrodes 111a and 111b, and The conductive pattern layers 108c, 108d and 108e. The second insulating layer 112 can be used alone or together with the first insulating layer 104 as a storage capacitor insulating layer, which can be a single-layer or multi-layer structure, such as a silicon oxide layer, a silicon nitride layer, or a combination thereof. Afterwards, the second insulating layer 112 and/or the first insulating layer 104 are etched to form a plurality of via holes (contact holes) 112a, 112b, 112c, 112d, 112e and 112f therein, wherein the contact holes 112a are used for electrical connection The thin film transistor and the subsequently formed pixel electrode, and the contact holes 112b, 112c, 112d, 112e and 112f are used to electrically connect a plurality of storage capacitors.

最后,请参照图1G、2G及3C,在第二绝缘层112上形成一透明导电层(未示出),例如ITO并填入接触孔112b、112c、112d、112e及112f。之后,界定透明导电层,以在像素区110上方的第二绝缘层112上形成一像素电极116。像素电极116具有一狭缝116a,用以产生预倾角。此外,像素电极116部分延伸于作为储存电容下电极的导电图案层108c及108d与共用线102c的侧向延伸部102d上方,而分别构成储存电容118、120及122。Finally, referring to FIGS. 1G, 2G and 3C, a transparent conductive layer (not shown), such as ITO, is formed on the second insulating layer 112 and filled into the contact holes 112b, 112c, 112d, 112e and 112f. Afterwards, a transparent conductive layer is defined to form a pixel electrode 116 on the second insulating layer 112 above the pixel region 110 . The pixel electrode 116 has a slit 116a for generating a pre-tilt angle. In addition, the pixel electrode 116 partially extends above the conductive pattern layers 108c and 108d serving as the lower electrodes of the storage capacitors and the lateral extension portion 102d of the common line 102c to form the storage capacitors 118 , 120 and 122 respectively.

在另一实施例中,像素电极116可作为储存电容114的上电极,而无需在界定第二导电层108时形成导电图案层108e,以及在蚀刻第二绝缘层112时形成接触孔112b。亦即,储存电容114可由共用线(下电极)102c、像素电极(上电极)、及第一及第二绝缘层(电容绝缘层)104及112所构成。In another embodiment, the pixel electrode 116 can be used as the upper electrode of the storage capacitor 114 without forming the conductive pattern layer 108 e when defining the second conductive layer 108 and forming the contact hole 112 b when etching the second insulating layer 112 . That is, the storage capacitor 114 may be composed of a common line (lower electrode) 102c, a pixel electrode (upper electrode), and first and second insulating layers (capacitive insulating layers) 104 and 112 .

同时,藉由界定透明导电层,以在接触孔112c及接触孔112d上方形成与像素电极116分开的透明导电部117a且在接触孔112e与112f上方形成与像素电极116分开的透明导电部117b。储存电容114、118、120及122藉由透明导电部117a及117b以及接触孔112b、112c、112d、112e及112f彼此电连接。Meanwhile, by defining the transparent conductive layer, a transparent conductive portion 117a separated from the pixel electrode 116 is formed above the contact holes 112c and 112d, and a transparent conductive portion 117b separated from the pixel electrode 116 is formed above the contact holes 112e and 112f. The storage capacitors 114, 118, 120 and 122 are electrically connected to each other through the transparent conductive parts 117a and 117b and the contact holes 112b, 112c, 112d, 112e and 112f.

另外,本领域技术人员可通过类似图1A至1G所示的工艺步骤,制作出如图1G-1所示的像素结构。为简化说明,此处不再加以赘述。In addition, those skilled in the art can manufacture the pixel structure shown in FIG. 1G-1 through similar process steps as shown in FIGS. 1A to 1G . To simplify the description, details are not repeated here.

根据本发明的像素结构,由于非透明的导电图案层108c及108d分别与栅极线102a及102b相邻或部分交迭,因此无需额外在栅极线上方形成黑底即可排除邻近栅极线处所产生的色偏现象,同时有助于开口率的提高。此外,由于储存电容118、120及122的存在,储存电容114的面积得以缩小,以进一步改善开口率,并有效提升图像质量。According to the pixel structure of the present invention, since the non-transparent conductive pattern layers 108c and 108d are adjacent to or partly overlapped with the gate lines 102a and 102b, it is not necessary to form a black matrix above the gate lines to exclude adjacent gate lines. At the same time, it helps to improve the aperture ratio. In addition, due to the existence of the storage capacitors 118 , 120 and 122 , the area of the storage capacitor 114 is reduced to further improve the aperture ratio and effectively improve the image quality.

虽然本发明已以优选实施例公开如上,然其并非用以限定本发明,本领域的普通技术人员,在不脱离本发明的精神和范围内,当可作更动与润饰,因此本发明的保护范围当视权利要求所界定者为准。Although the present invention has been disclosed above with preferred embodiments, it is not intended to limit the present invention. Those skilled in the art may make changes and modifications without departing from the spirit and scope of the present invention. Therefore, the present invention The scope of protection should be determined by what is defined in the claims.

Claims (17)

1.一种适用于广视角液晶显示器的像素结构,包括:1. A pixel structure suitable for a wide viewing angle liquid crystal display, comprising: 第一及第二栅极线,平行设置于一基板上;The first and second gate lines are arranged in parallel on a substrate; 第一及第二数据线,平行设置于所述基板上且大体垂直相交于所述第一及第二栅极线,以在所述基板上定义出一像素区;The first and second data lines are arranged in parallel on the substrate and substantially perpendicularly cross the first and second gate lines, so as to define a pixel area on the substrate; 一像素电极,设置于所述像素区上方;a pixel electrode disposed above the pixel region; 一第一储存电容,设置于所述像素区上方,其大体平行所述第一栅极线且与所述第一栅极线相邻或部分交迭;以及a first storage capacitor disposed above the pixel region, which is substantially parallel to the first gate line and adjacent to or partially overlapped with the first gate line; and 一第二储存电容,设置于所述像素区的中间部上方,其大体平行所述第一和第二栅极线,且该第一储存电容位于该第二储存电容与所述第一栅极线之间。a second storage capacitor, arranged above the middle part of the pixel region, which is substantially parallel to the first and second gate lines, and the first storage capacitor is located between the second storage capacitor and the first gate between lines. 2.如权利要求1所述的适用于广视角液晶显示器的像素结构,其中所述第一及第二数据线与所述第一储存电容的下电极由相同的导电层界定而成。2. The pixel structure suitable for a wide viewing angle liquid crystal display as claimed in claim 1, wherein the first and second data lines and the lower electrode of the first storage capacitor are defined by the same conductive layer. 3.如权利要求1所述的适用于广视角液晶显示器的像素结构,其中所述像素电极与所述第一储存电容的上电极由相同的导电层界定而成。3. The pixel structure suitable for a wide viewing angle liquid crystal display as claimed in claim 1, wherein the pixel electrode and the upper electrode of the first storage capacitor are defined by the same conductive layer. 4.如权利要求1所述的适用于广视角液晶显示器的像素结构,还包括一第三储存电容,设置于像素区上方,其大体平行所述第二栅极线且与所述第二栅极线相邻或部分交迭。4. The pixel structure applicable to a wide viewing angle liquid crystal display as claimed in claim 1, further comprising a third storage capacitor disposed above the pixel area, which is substantially parallel to the second gate line and connected to the second gate line The epipolar lines are adjacent or partially overlapping. 5.如权利要求4所述的适用于广视角液晶显示器的像素结构,其中所述第一及第二数据线与所述第三储存电容的下电极由相同的导电层界定而成。5. The pixel structure suitable for a wide viewing angle liquid crystal display as claimed in claim 4, wherein the first and second data lines and the bottom electrode of the third storage capacitor are defined by the same conductive layer. 6.如权利要求4所述的适用于广视角液晶显示器的像素结构,其中所述像素电极与所述第三储存电容的上电极由相同的导电层界定而成。6 . The pixel structure suitable for wide viewing angle liquid crystal display as claimed in claim 4 , wherein the pixel electrode and the upper electrode of the third storage capacitor are defined by the same conductive layer. 7.如权利要求1所述的适用于广视角液晶显示器的像素结构,其中所述第一及第二栅极线与所述第二储存电容的下电极由相同的导电层界定而成。7. The pixel structure suitable for a wide viewing angle liquid crystal display as claimed in claim 1, wherein the first and second gate lines and the bottom electrode of the second storage capacitor are defined by the same conductive layer. 8.如权利要求1所述的适用于广视角液晶显示器的像素结构,其中所述第一及第二数据线与所述第二储存电容的上电极由相同的导电层界定而成。8. The pixel structure suitable for a wide viewing angle liquid crystal display as claimed in claim 1, wherein the first and second data lines and the upper electrode of the second storage capacitor are defined by the same conductive layer. 9.如权利要求1所述的适用于广视角液晶显示器的像素结构,其中所述像素电极与所述第二储存电容的上电极由相同的导电层界定而成。9. The pixel structure suitable for a wide viewing angle liquid crystal display as claimed in claim 1, wherein the pixel electrode and the upper electrode of the second storage capacitor are defined by the same conductive layer. 10.如权利要求1所述的适用于广视角液晶显示器的像素结构,还包括一第四储存电容,设置于所述像素区上方,其大体平行于所述第一数据线且与所述第一数据线相邻或部分交迭。10. The pixel structure suitable for a wide viewing angle liquid crystal display as claimed in claim 1, further comprising a fourth storage capacitor disposed above the pixel area, substantially parallel to the first data line and connected to the first data line A data line is adjacent or partially overlaps. 11.如权利要求10所述的适用于广视角液晶显示器的像素结构,其中所述第一及第二栅极线与所述第四储存电容的下电极由相同的导电层界定而成。11. The pixel structure suitable for a wide viewing angle liquid crystal display as claimed in claim 10, wherein the first and second gate lines and the bottom electrode of the fourth storage capacitor are defined by the same conductive layer. 12.如权利要求10所述的适用于广视角液晶显示器的像素结构,其中所述像素电极与所述第四储存电容的上电极由相同的导电层界定而成。12. The pixel structure suitable for a wide viewing angle liquid crystal display as claimed in claim 10, wherein the pixel electrode and the upper electrode of the fourth storage capacitor are defined by the same conductive layer. 13.一种适用于广视角液晶显示器的像素结构的制造方法,包括:13. A method for manufacturing a pixel structure suitable for a wide viewing angle liquid crystal display, comprising: 在一基板上形成一第一导电层;forming a first conductive layer on a substrate; 界定所述第一导电层,以在所述基板上形成大体相互平行的第一及第二栅极线,且在所述第一及第二栅极线之间形成一大体平行的第二储存电容的下电极;defining the first conductive layer to form first and second gate lines substantially parallel to each other on the substrate, and to form a second storage memory substantially parallel between the first and second gate lines the lower electrode of the capacitor; 在所述基板上形成一第一绝缘层,并覆盖所述第一及该第二栅极线;forming a first insulating layer on the substrate and covering the first and the second gate lines; 在所述第一绝缘层上形成一第二导电层;forming a second conductive layer on the first insulating layer; 界定所述第二导电层,以在所述第一绝缘层上形成一第一数据线、一第二数据线、及一第一储存电容的下电极,其中所述第一及第二数据线大体相互平行并大体垂直相交于所述第一及第二栅极线而形成一像素区,所述第一储存电容的下电极大体平行于所述第一栅极线且与第一栅极线相邻或部分交迭,且该第一储存电极的下电极位于该第二储存电容的下电极与该第一栅极线之间;Defining the second conductive layer to form a first data line, a second data line, and a lower electrode of a first storage capacitor on the first insulating layer, wherein the first and second data lines substantially parallel to each other and substantially perpendicular to the first and second gate lines to form a pixel region, the lower electrode of the first storage capacitor is substantially parallel to the first gate line and connected to the first gate line Adjacent or partially overlapping, and the lower electrode of the first storage electrode is located between the lower electrode of the second storage capacitor and the first gate line; 在所述第一绝缘层上形成一第二绝缘层,并覆盖所述第一数据线、所述第二数据线、及所述第一储存电容的下电极;以及forming a second insulating layer on the first insulating layer, and covering the first data line, the second data line, and the lower electrode of the first storage capacitor; and 在所述像素区上方的第二绝缘层上形成一像素电极,其部分延伸于所述第一储存电容的下电极上方,用以作为所述第一储存电容的上电极。A pixel electrode is formed on the second insulating layer above the pixel area, and partly extends above the lower electrode of the first storage capacitor to serve as the upper electrode of the first storage capacitor. 14.如权利要求13所述的适用于广视角液晶显示器的像素结构的制造方法,还包括:14. The method for manufacturing a pixel structure suitable for a wide viewing angle liquid crystal display as claimed in claim 13, further comprising: 在所述第二储存电容的下电极上覆盖所述第一绝缘层;以及covering the first insulating layer on the lower electrode of the second storage capacitor; and 通过定义所述第二导电层,以在该第二储存电容的下电极上方的所述第一绝缘层上形成所述第二储存电容的上电极。By defining the second conductive layer, the upper electrode of the second storage capacitor is formed on the first insulating layer above the lower electrode of the second storage capacitor. 15.如权利要求13所述的适用于广视角液晶显示器的像素结构的制造方法,还包括:15. The method for manufacturing a pixel structure suitable for a wide viewing angle liquid crystal display as claimed in claim 13, further comprising: 在所述第二储存电容的下电极上覆盖所述第一及第二绝缘层;以及covering the first and second insulating layers on the lower electrode of the second storage capacitor; and 在所述第二储存电容的下电极上方的所述第二绝缘层上形成该像素电极,用以作为所述第二储存电容的上电极。The pixel electrode is formed on the second insulating layer above the lower electrode of the second storage capacitor to serve as the upper electrode of the second storage capacitor. 16.如权利要求13所述的适用于广视角液晶显示器的像素结构的制造方法,还包括:16. The method for manufacturing a pixel structure suitable for a wide viewing angle liquid crystal display as claimed in claim 13, further comprising: 通过界定第三导电层,以在所述第一绝缘层上形成一第三储存电容的下电极,其大体平行于所述第二栅极线且与所述第二栅极线相邻或部分交迭;By defining a third conductive layer, a lower electrode of a third storage capacitor is formed on the first insulating layer, which is substantially parallel to the second gate line and adjacent to or part of the second gate line. overlap 在所述第三储存电容的下电极上覆盖所述第二绝缘层;以及covering the second insulating layer on the lower electrode of the third storage capacitor; and 在所述第三储存电容的下电极上方的所述第二绝缘层上形成所述像素电极,用以作为第三储存电容的上电极。The pixel electrode is formed on the second insulating layer above the lower electrode of the third storage capacitor to serve as the upper electrode of the third storage capacitor. 17.如权利要求13所述的适用于广视角液晶显示器的像素结构的制造方法,还包括:17. The method for manufacturing a pixel structure suitable for a wide viewing angle liquid crystal display as claimed in claim 13, further comprising: 通过界定所述第一导电层,以在所述基板上形成一第四储存电容的下电极,其大体平行于所述第一数据线且与第一数据线相邻或部分交迭;By defining the first conductive layer, a lower electrode of a fourth storage capacitor is formed on the substrate, which is substantially parallel to the first data line and adjacent to or partially overlapped with the first data line; 在所述第四储存电容的下电极上依次覆盖所述第一及第二绝缘层;以及sequentially covering the first and second insulating layers on the lower electrode of the fourth storage capacitor; and 在所述第四储存电容的下电极上方的第二绝缘层上形成所述像素电极,用以作为第四储存电容的上电极。The pixel electrode is formed on the second insulating layer above the bottom electrode of the fourth storage capacitor to serve as the upper electrode of the fourth storage capacitor.
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JP2001331125A (en) * 2000-03-17 2001-11-30 Seiko Epson Corp Electro-optical device
CN1488083A (en) * 2001-09-26 2004-04-07 ���ǵ�����ʽ���� Thin film transistor array panel of liquid crystal display and manufacturing method thereof
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CN1317711A (en) * 2000-03-06 2001-10-17 株式会社日立制作所 Liquid crystal having controlled storage capacitor
JP2001331125A (en) * 2000-03-17 2001-11-30 Seiko Epson Corp Electro-optical device
CN1488083A (en) * 2001-09-26 2004-04-07 ���ǵ�����ʽ���� Thin film transistor array panel of liquid crystal display and manufacturing method thereof
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