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CN100460951C - Color filter substrate for liquid crystal display device and manufacturing method thereof - Google Patents

Color filter substrate for liquid crystal display device and manufacturing method thereof Download PDF

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CN100460951C
CN100460951C CNB2005101094666A CN200510109466A CN100460951C CN 100460951 C CN100460951 C CN 100460951C CN B2005101094666 A CNB2005101094666 A CN B2005101094666A CN 200510109466 A CN200510109466 A CN 200510109466A CN 100460951 C CN100460951 C CN 100460951C
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color filter
filter pattern
pattern
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green
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CN1782809A (en
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金廷炫
金三悦
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LG Display Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133514Colour filters
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133512Light shielding layers, e.g. black matrix
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133514Colour filters
    • G02F1/133516Methods for their manufacture, e.g. printing, electro-deposition or photolithography
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133357Planarisation layers
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133514Colour filters
    • G02F1/133519Overcoatings

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optical Filters (AREA)

Abstract

一种用于液晶显示装置的滤色器基板包括:基板,该基板包括第一子像素区域、第二子像素区域和第三子像素区域以及相邻子像素区域之间的第一边界区域、第二边界区域和第三边界区域;分别在所述第一子像素区域、第二子像素区域和第三子像素区域处的第一红色滤色器图案、第一绿色滤色器图案和第一蓝色滤色器图案;以及在所述第一边界区域、第二边界区域和第三边界区域中的每一个处的第二红色滤色器图案、第二绿色滤色器图案和第二蓝色滤色器图案。

A color filter substrate for a liquid crystal display device includes: a substrate including a first sub-pixel area, a second sub-pixel area, a third sub-pixel area and a first boundary area between adjacent sub-pixel areas, The second boundary area and the third boundary area; the first red color filter pattern, the first green color filter pattern and the second color filter pattern at the first sub-pixel area, the second sub-pixel area and the third sub-pixel area respectively a blue color filter pattern; and a second red color filter pattern, a second green color filter pattern and a second color filter pattern at each of the first border region, the second border region and the third border region Blue color filter pattern.

Description

用于液晶显示装置的滤色器基板及其制造方法 Color filter substrate for liquid crystal display device and manufacturing method thereof

技术领域 technical field

本发明涉及液晶显示装置,更具体地,涉及用于液晶显示装置的滤色器基板及其制造方法。The present invention relates to a liquid crystal display device, and more particularly, to a color filter substrate for a liquid crystal display device and a manufacturing method thereof.

背景技术 Background technique

由于信息技术的迅速发展,显示装置也在不断发展以处理和显示日益增长的大量信息。最近,已经构思和开发了用于厚度薄、重量轻和功耗低的显示装置的平板显示技术。在这些技术中,液晶显示(LCD)装置由于其优良的分辨率、彩色图像显示及图像质量而已经广泛应用于笔记本计算机、台式监视器及其它应用。Due to the rapid development of information technology, display devices are also continuously developed to process and display an increasing amount of information. Recently, a flat panel display technology for a thin-thickness, light-weight, and low-power consumption display device has been conceived and developed. Among these technologies, liquid crystal display (LCD) devices have been widely used in notebook computers, desktop monitors, and other applications due to their excellent resolution, color image display, and image quality.

通常,LCD装置包括上基板、下基板以及插入在上基板和下基板之间的液晶层。LCD装置利用液晶材料的光学各向异性,通过电场来改变与液晶分子的排列相对应的透光率来产生图像。In general, an LCD device includes an upper substrate, a lower substrate, and a liquid crystal layer interposed between the upper and lower substrates. The LCD device utilizes the optical anisotropy of liquid crystal material to change light transmittance corresponding to the alignment of liquid crystal molecules through an electric field to generate images.

通常称为阵列基板的下基板包括薄膜晶体管和像素电极。通过反复进行光刻工艺对预先形成的薄膜进行构图,来制造下基板。通常称为滤色器基板的上基板包括用于显示彩色图像的滤色器层。滤色器层通常包括红色(R)、绿色(G)和蓝色(B)的滤色器图案。滤色器层通过各种方法(包括:例如,染色法、电镀法、颜料(pigment)分散法和印刷法)形成。通常,由于颜料分散法可形成具有良好的可再现性的精良图案,所以它被更为普遍地使用。A lower substrate, generally called an array substrate, includes thin film transistors and pixel electrodes. The lower substrate is manufactured by repeating the photolithography process to pattern the pre-formed thin film. The upper substrate, generally called a color filter substrate, includes color filter layers for displaying color images. The color filter layer generally includes color filter patterns of red (R), green (G), and blue (B). The color filter layer is formed by various methods including, for example, a dyeing method, a plating method, a pigment dispersion method, and a printing method. Generally, since the pigment dispersion method can form fine patterns with good reproducibility, it is more commonly used.

然而,在使用颜料分散法的滤色器基板制造方法中,由于滤色器基板是通过反复进行涂布、曝光、显影和彩色光阻(color reist)固化这些处理来制造的,制造方法复杂,因此需要很多时间和设备。However, in the color filter substrate manufacturing method using the pigment dispersion method, since the color filter substrate is manufactured by repeating the processes of coating, exposure, development, and color resist (color resist) curing, the manufacturing method is complicated, Therefore, a lot of time and equipment are required.

为了解决以上问题,已经提出了使用热成像方法的滤色器基板制造方法。在热成像方法中,通过将滤色器转印(transcription)膜粘附到基板上、将滤色器转印膜曝露于诸如激光束的光源中并将滤色器转印膜的滤色器层转印到基板上,来形成滤色器层。In order to solve the above problems, a color filter substrate manufacturing method using a thermal imaging method has been proposed. In the thermal imaging method, by adhering a color filter transfer film to a substrate, exposing the color filter transfer film to a light source such as a laser beam, and The layer is transferred onto a substrate to form a color filter layer.

滤色器转印膜包括:支撑膜、光热转换(LTHC)层和滤色器层。支撑膜支撑LTHC层和滤色器层,并向LTHC层传送激光束。支撑膜可以由诸如聚酯或聚乙烯的透明聚合材料形成。LTHC层将从激光束吸收的光转换成热能,由此LTHC可以由高效率地将光转换成热的材料形成。滤色器层可以由包括红色、绿色和蓝色颜料之一的材料形成。The color filter transfer film includes: a support film, a light-to-heat conversion (LTHC) layer, and a color filter layer. The supporting film supports the LTHC layer and the color filter layer, and transmits the laser beam to the LTHC layer. The support membrane can be formed from a transparent polymeric material such as polyester or polyethylene. The LTHC layer converts light absorbed from a laser beam into thermal energy, and thus the LTHC may be formed of a material that efficiently converts light into heat. The color filter layer may be formed of a material including one of red, green and blue pigments.

图1A到1I示出了根据现有技术的使用热成像制造滤色器基板的方法。1A to 1I illustrate a method of manufacturing a color filter substrate using thermal imaging according to the prior art.

如图1A所示,通过在透明基板30上淀积诸如铬或铬氧化物(CrOx)的金属材料来形成黑底层31。通过在黑底层31的几乎整个表面上涂布光刻胶树脂来形成光刻胶层32。在光刻胶层32上方设置包括阻光部分和透光部分的掩模90,并且通过掩模90曝光光刻胶层32。As shown in FIG. 1A , the black matrix 31 is formed by depositing a metal material such as chromium or chromium oxide (CrOx) on a transparent substrate 30 . The photoresist layer 32 is formed by coating a photoresist resin on almost the entire surface of the black matrix 31 . A mask 90 including a light-blocking portion and a light-transmitting portion is disposed over the photoresist layer 32 , and the photoresist layer 32 is exposed through the mask 90 .

然后,如图1B所示,图1A的被曝光的光刻胶层32被显影,由此形成光刻胶图案33。此处,光刻胶层32是负型的,其中被曝光的部分在显影之后保留下来。然而,光刻胶层32也可以使用正型的,其中在显影之后去除被曝光的部分。Then, as shown in FIG. 1B , the exposed photoresist layer 32 of FIG. 1A is developed, thereby forming a photoresist pattern 33 . Here, the photoresist layer 32 is negative-tone, where exposed portions remain after development. However, the photoresist layer 32 may also use a positive type in which exposed portions are removed after development.

接下来,如图1C所示,依据光刻胶图案33有选择地去除图1B的黑底层31,由此形成具有开口的黑底35。Next, as shown in FIG. 1C , the black matrix 31 of FIG. 1B is selectively removed according to the photoresist pattern 33 , thereby forming a black matrix 35 with openings.

如图1D所示,通过剥离(stripping)或灰化工艺去除黑底35上的图1C的光刻胶图案33。As shown in FIG. 1D , the photoresist pattern 33 of FIG. 1C on the black matrix 35 is removed by a stripping or ashing process.

如图1E所示,在包括黑底35的基板30上设置包括支撑膜10a、光热转换(LTHC)层10b和滤色器层10c的第一滤色器层转印膜10,使滤色器层10c面对基板30的其上形成有黑底35的表面。然后,将第一滤色器转印膜10的滤色器层10c粘附到基板30上。As shown in FIG. 1E, a first color filter layer transfer film 10 including a support film 10a, a light-to-heat conversion (LTHC) layer 10b, and a color filter layer 10c is provided on a substrate 30 including a black matrix 35, so that the color filter The device layer 10c faces the surface of the substrate 30 on which the black matrix 35 is formed. Then, the color filter layer 10 c of the first color filter transfer film 10 is adhered to the substrate 30 .

接下来,如图1F所示,将包括所粘附的第一滤色器转印膜10的基板30装入激光装置中,并且将产生激光束的激光头50布置在第一滤色器转印膜10上方。基板30可以位于操作台(未示出)上。对滤色器转印膜10的随后将形成第一滤色器图案的部分A施加激光束,同时使激光头50或工作台沿直线往复运动。在曝露于激光束的第一滤色器转印膜10中,LTHC层10b将从激光束吸收的光转化成热能,从而向滤色器层10c发出热能。然后,由于所发出的热能,滤色器层10c被转印到基板30上。Next, as shown in FIG. 1F , the substrate 30 including the adhered first color filter transfer film 10 is loaded into a laser device, and the laser head 50 for generating a laser beam is arranged on the first color filter transfer film 10 . Printed film 10 top. The substrate 30 may be located on a table (not shown). The laser beam is applied to the portion A of the color filter transfer film 10 where the first color filter pattern will be subsequently formed, while the laser head 50 or stage is reciprocated in a straight line. In the first color filter transfer film 10 exposed to the laser beam, the LTHC layer 10b converts light absorbed from the laser beam into heat energy, thereby emitting heat energy to the color filter layer 10c. Then, the color filter layer 10c is transferred onto the substrate 30 due to the emitted thermal energy.

如图1G所示,在去除了图1F的滤色器转印膜10之后,在黑底35的与部分A对应的一个开口中形成了第一滤色器图案40。第一滤色器图案40部分覆盖了黑底35的相邻部分。As shown in FIG. 1G, after the color filter transfer film 10 of FIG. 1F is removed, a first color filter pattern 40 is formed in one opening of the black matrix 35 corresponding to the portion A. Referring to FIG. The first color filter pattern 40 partially covers the adjacent portion of the black matrix 35 .

如图1H所示,使用第二滤色器转印膜和第三滤色器转印膜,通过与图1E到1G所示相同的工艺在基板30上形成第二滤色器图案42和第三滤色器图案44。As shown in FIG. 1H, using the second color filter transfer film and the third color filter transfer film, the second color filter pattern 42 and the second color filter pattern 42 are formed on the substrate 30 by the same process as shown in FIGS. 1E to 1G. Three color filter patterns 44 .

接下来,在大约摄氏200度到大约摄氏300度下将具有滤色器图案40、42和44的基板30放置在诸如烘炉的硬化炉中,从而滤色器图案40、42和44被硬化。Next, the substrate 30 having the color filter patterns 40, 42, and 44 is placed in a hardening furnace such as an oven at about 200 degrees Celsius to about 300 degrees Celsius, so that the color filter patterns 40, 42, and 44 are hardened. .

如图1I所示,在经过硬化的滤色器图案40、42和44上形成涂覆层46。涂覆层46保护滤色器图案40、42和44,并使基板30的表面平坦、没有台阶。通过淀积诸如氧化铟锡和/或氧化铟锌的透明导电材料,在涂覆层46上形成公共电极48。As shown in FIG. 1I , an overcoat layer 46 is formed on the hardened color filter patterns 40 , 42 and 44 . The overcoat layer 46 protects the color filter patterns 40, 42, and 44, and makes the surface of the substrate 30 flat without steps. The common electrode 48 is formed on the coating layer 46 by depositing a transparent conductive material such as indium tin oxide and/or indium zinc oxide.

在使用热成像方法制造的上述滤色器基板中,黑底35形成在相邻滤色器图案40、42和44之间,并且该黑底35对滤色器图案40、42和44的颜色进行分离。此外,黑底35阻隔来自阵列基板的选通线和数据线上的被不规则驱动的液晶分子的光。黑底35通常可以由诸如铬的光学密度大于4的金属材料形成。顺便提及,为了形成黑底,仍旧需要复杂的光刻工艺。即,光刻工艺,包括涂布、曝光显影光刻胶,然后在淀积了黑底材料之后刻蚀黑底材料的步骤。此外,还需要用于以上步骤的装置,与使用颜料分散方法所制造的滤色器基板相比,不具有制造成本方面的优势。In the above-mentioned color filter substrate manufactured using the thermal imaging method, the black matrix 35 is formed between adjacent color filter patterns 40, 42, and 44, and the black matrix 35 is opposite to the color of the color filter patterns 40, 42, and 44. to separate. In addition, the black matrix 35 blocks light from irregularly driven liquid crystal molecules on gate lines and data lines of the array substrate. The black matrix 35 may generally be formed of a metal material having an optical density greater than 4, such as chromium. Incidentally, in order to form the black matrix, a complicated photolithography process is still required. That is, the photolithography process includes the steps of coating, exposing and developing photoresist, and then etching the black matrix material after depositing the black matrix material. In addition, an apparatus for the above steps is required, and there is no advantage in manufacturing cost compared with a color filter substrate manufactured using a pigment dispersion method.

发明内容 Contents of the invention

只以示例的方式,如具体实施和广泛描述的,一种用于液晶显示装置的滤色器基板包括:基板,该基板包括第一子像素区域、第二子像素区域和第三子像素区域以及相邻子像素区域之间的第一边界区域、第二边界区域和第三边界区域;分别在第一子像素区域、第二子像素区域和第三子像素区域处的第一红色滤色器图案、第一绿色滤色器图案和第一蓝色滤色器图案;以及第一边界区域、第二边界区域和第三边界区域中的每一个处的第二红色滤色器图案、第二绿色滤色器图案和第二蓝色滤色器图案。By way of example only, as embodied and broadly described, a color filter substrate for a liquid crystal display device includes: a substrate including a first sub-pixel region, a second sub-pixel region and a third sub-pixel region And the first boundary area, the second boundary area and the third boundary area between the adjacent sub-pixel areas; the first red filter color at the first sub-pixel area, the second sub-pixel area and the third sub-pixel area respectively filter pattern, a first green color filter pattern, and a first blue color filter pattern; and a second red color filter pattern, a second Two green color filter patterns and a second blue color filter pattern.

在本发明的另一方面中,提供了一种制造用于液晶显示装置的滤色器基板的方法,该方法包括:在基板上形成第一红色滤色器图案和第二红色滤色器图案,该基板包括第一子像素区域、第二子像素区域和第三子像素区域以及相邻子像素区域之间的第一边界区域、第二边界区域和第三边界区域,第一红色滤色器图案在第一子像素区域处,第二红色滤色器图案在第一边界区域、第二边界区域和第三边界区域中的每一个处;在第二子像素区域处形成第一绿色滤色器图案,并在第一边界区域、第二边界区域和第三边界区域中的每一个处形成第二绿色滤色器图案;以及在第三子像素区域处形成第一蓝色滤色器图案,并在第一边界区域、第二边界区域和第三边界区域中的每一个处形成第二蓝色滤色器图案。In another aspect of the present invention, there is provided a method of manufacturing a color filter substrate for a liquid crystal display device, the method including: forming a first red color filter pattern and a second red color filter pattern on the substrate , the substrate includes a first sub-pixel area, a second sub-pixel area, and a third sub-pixel area, and a first border area, a second border area, and a third border area between adjacent sub-pixel areas, and the first red filter color The filter pattern is at the first sub-pixel area, the second red color filter pattern is at each of the first border area, the second border area and the third border area; the first green filter is formed at the second sub-pixel area color filter pattern, and form a second green color filter pattern at each of the first border area, the second border area, and the third border area; and form a first blue color filter at the third sub-pixel area pattern, and form a second blue color filter pattern at each of the first border area, the second border area, and the third border area.

应当理解,以上总体描述和以下详细描述都是示例性和说明性的,并且旨在提供权利要求所要求的本发明的进一步说明。It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are intended to provide further explanation of the invention as claimed.

附图说明 Description of drawings

所包含的附图用来进一步理解本发明,附图被并入并构成本说明书的一部分,附图示出了本发明的实施例并与说明书一起用于解释本发明的原理。The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principle of the invention.

在附图中:In the attached picture:

图1A到1I是示出了根据现有技术的使用热成像方法来制造滤色器基板的方法的剖视图;1A to 1I are cross-sectional views illustrating a method of manufacturing a color filter substrate using a thermal imaging method according to the prior art;

图2A到2I是示出了根据本发明第一实施例的使用热成像方法来制造滤色器基板的方法的剖视图;2A to 2I are cross-sectional views illustrating a method of manufacturing a color filter substrate using a thermal imaging method according to a first embodiment of the present invention;

图3A到3C是示出了根据本发明第二实施例的滤色器基板的制造方法的剖视图。3A to 3C are cross-sectional views illustrating a method of manufacturing a color filter substrate according to a second embodiment of the present invention.

具体实施方式 Detailed ways

下面将详细说明本发明的实施例,这些实施例在附图中示出。Embodiments of the present invention will be described in detail below and illustrated in the accompanying drawings.

图2A到2I是示出了根据本发明第一实施例的使用热成像制造滤色器基板的方法的剖视图。2A to 2I are cross-sectional views illustrating a method of manufacturing a color filter substrate using thermal imaging according to a first embodiment of the present invention.

如图2A所示,在透明基板130上限定第一子像素区域R、第二子像素区域G和第三子像素区域B,以及第一边界区域BA1、第二边界区域BA2和第三边界区域BA3,并且在基板130上设置红色滤色器转印膜110。第一边界区域BA1、第二边界区域BA2和第三边界区域BA3依次设置在相邻子像素区域R、G和B之间。红色滤色器转印膜110包括支撑膜110a、光热转换(LTHC)层110b和红色滤色器层110c。使用具有转印辊的转印装置将红色滤色器转印膜110的红色滤色器层110c无气泡地粘附到基板130。As shown in FIG. 2A, a first sub-pixel area R, a second sub-pixel area G, and a third sub-pixel area B are defined on a transparent substrate 130, as well as a first border area BA1, a second border area BA2, and a third border area. BA3 , and the red color filter transfer film 110 is disposed on the substrate 130 . The first border area BA1, the second border area BA2, and the third border area BA3 are disposed between adjacent sub-pixel areas R, G, and B in sequence. The red color filter transfer film 110 includes a support film 110a, a light-to-heat conversion (LTHC) layer 110b, and a red color filter layer 110c. The red color filter layer 110c of the red color filter transfer film 110 is adhered to the substrate 130 without air bubbles using a transfer device having a transfer roller.

如图2B所示,在红色滤色器转印膜110上方相隔一定距离设置激光器170。在激光器170扫描基板130时,对红色滤色器转印膜110的与第一子像素区域R以及第一边界区域BA1、第二边界区域BA2和第三边界区域BA3对应的部分施加激光器170的激光束。在曝露于激光束的红色滤色器转印膜110中,LTHC层110b将从激光束吸收的光转换成热能,从而向红色滤色器层110c发出热能。然后,由于所发出的热能,红色滤色器层110c从LTHC层110b分离,并被转印到基板130上从而固定在基板130上。As shown in FIG. 2B , a laser 170 is disposed at a distance above the red color filter transfer film 110 . When the laser 170 scans the substrate 130, the laser 170 is applied to the portion of the red color filter transfer film 110 corresponding to the first sub-pixel region R and the first boundary region BA1, the second boundary region BA2, and the third boundary region BA3. Laser beam. In the red color filter transfer film 110 exposed to the laser beam, the LTHC layer 110b converts light absorbed from the laser beam into heat energy, thereby emitting heat energy to the red color filter layer 110c. Then, the red color filter layer 110c is separated from the LTHC layer 110b due to the emitted thermal energy, and is transferred onto the substrate 130 to be fixed on the substrate 130 .

如图2C所示,从基板130上去除图2B的红色滤色器转印膜110。由此,在第一子像素区域R中形成第一红色滤色器图案140,在第一边界区域BA1、第二边界区域BA2和第三边界区域BA3的每一个中形成了第二红色滤色器图案141。在第二子像素区域G和第三子像素区域B中,由于没有对图2B的LTHC层110b施加激光束,所以红色滤色器层110c仍旧附着在LTHC层110b上,并且没有固定在基板130上。因此,第二和第三子像素区域G和B中的红色滤色器层110c与LTHC层110b一起被去除。As shown in FIG. 2C , the red color filter transfer film 110 of FIG. 2B is removed from the substrate 130 . Thus, the first red color filter pattern 140 is formed in the first sub-pixel region R, and the second red filter pattern is formed in each of the first boundary region BA1, the second boundary region BA2, and the third boundary region BA3. device pattern 141. In the second sub-pixel region G and the third sub-pixel region B, since the laser beam is not applied to the LTHC layer 110b of FIG. superior. Accordingly, the red color filter layer 110c in the second and third sub-pixel regions G and B is removed together with the LTHC layer 110b.

接下来,将具有第一红色滤色器图案140和第二红色滤色器图案141的基板130放置在诸如烤炉的硬化(或固化)炉中,从而第一红色滤色器图案140和第二红色滤色器图案141被硬化(或固化)。优选地,硬化后的第一红色滤色器图案140和第二红色滤色器图案141的厚度在大约1μm到大约2μm的范围内。Next, the substrate 130 having the first red color filter pattern 140 and the second red color filter pattern 141 is placed in a hardening (or curing) oven such as an oven so that the first red color filter pattern 140 and the second red color filter pattern The dichroic color filter pattern 141 is hardened (or cured). Preferably, the thickness of the hardened first and second red color filter patterns 140 and 141 ranges from about 1 μm to about 2 μm.

如图2D所示,在包括第一红色滤色器图案140和第二红色滤色器图案141的基板130上设置绿色滤色器转印膜111。绿色滤色器转印膜111包括支撑膜111a、LTHC层111b和绿色滤色器层111c。然后,使用包括转印辊的转印装置将绿色滤色器转印膜111的绿色滤色器层111c无气泡地粘附到具有第一红色滤色器图案140和第二红色滤色器图案141的基板130上。As shown in FIG. 2D , a green color filter transfer film 111 is disposed on the substrate 130 including the first red color filter pattern 140 and the second red color filter pattern 141 . The green color filter transfer film 111 includes a support film 111a, an LTHC layer 111b, and a green color filter layer 111c. Then, the green color filter layer 111c of the green color filter transfer film 111 is bubble-free adhered to the layer having the first red color filter pattern 140 and the second red color filter pattern using a transfer device including a transfer roller. 141 on the substrate 130 .

如图2E所示,在绿色滤色器转印膜111上方相隔一定距离设置可能与图2B中的激光器不同的激光器170。在激光器170扫描基板130时,对绿色滤色器转印膜111的与第二子像素区域G以及第一边界区域BA1、第二边界区域BA2和第三边界区域BA3对应的部分施加激光器170的激光束。As shown in FIG. 2E , a laser 170 which may be different from the laser in FIG. 2B is disposed at a distance above the green color filter transfer film 111 . When the laser 170 scans the substrate 130, the laser 170 is applied to the green color filter transfer film 111 corresponding to the second sub-pixel area G and the first boundary area BA1, the second boundary area BA2, and the third boundary area BA3. Laser beam.

如图2F所示,在激光扫描之后,从基板130上去除绿色滤色器转印膜111。在曝露于激光束的绿色滤色器转印膜111中,由于绿色滤色器层111c被转印在基板130上,所以在第二子像素区域G中形成第一绿色滤色器图案142,并在第一边界区域BA1、第二边界区域BA2和第三边界区域BA3的每一个中的第二红色滤色器图案141上形成了第二绿色滤色器图案143。As shown in FIG. 2F , after the laser scanning, the green color filter transfer film 111 is removed from the substrate 130 . In the green color filter transfer film 111 exposed to the laser beam, since the green color filter layer 111c is transferred on the substrate 130, the first green color filter pattern 142 is formed in the second sub-pixel region G, And a second green color filter pattern 143 is formed on the second red color filter pattern 141 in each of the first boundary area BA1 , the second boundary area BA2 and the third boundary area BA3 .

接下来,将具有第一绿色滤色器图案142和第二绿色滤色器图案143的基板130放置在诸如烤炉的硬化炉中,从而第一绿色滤色器图案142和第二绿色滤色器图案143被硬化。优选地,经过硬化的第一绿色滤色器图案142和第二绿色滤色器图案143的厚度在大约1μm到大约2μm的范围内。Next, the substrate 130 having the first green color filter pattern 142 and the second green color filter pattern 143 is placed in a hardening furnace such as an oven so that the first green color filter pattern 142 and the second green color filter pattern The device pattern 143 is hardened. Preferably, the thickness of the hardened first green color filter pattern 142 and the second green color filter pattern 143 is in a range of about 1 μm to about 2 μm.

如图2G所示,使用蓝色滤色器转印膜(未示出),在包括第一绿色滤色器图案142和第二绿色滤色器图案143的基板130上进行与红色和绿色滤色器图案140、141、142和143相同的处理,在第三子像素区域B中形成第一蓝色滤色器图案144,并在各个第一边界区域BA1、第二边界区域BA2和第三边界区域BA3中的第二绿色滤色器图案143上形成第二蓝色滤色器图案145。As shown in FIG. 2G, using a blue color filter transfer film (not shown), on the substrate 130 including the first green color filter pattern 142 and the second green color filter pattern 143, the red and green filter patterns are combined. The color filter patterns 140, 141, 142, and 143 are processed in the same way, the first blue color filter pattern 144 is formed in the third sub-pixel area B, and the first blue color filter pattern 144 is formed in each of the first boundary area BA1, the second boundary area BA2, and the third sub-pixel area B. The second blue color filter pattern 145 is formed on the second green color filter pattern 143 in the boundary area BA3.

然后,将具有第一和第二蓝色滤色器图案144和145的基板130放置在诸如烤炉的硬化炉中,从而第一和第二蓝色滤色器图案144和145被硬化。优选地,硬化后的第一和第二蓝色滤色器图案144和145的厚度在大约1μm到大约2μm的范围内。Then, the substrate 130 having the first and second blue color filter patterns 144 and 145 is placed in a hardening oven such as an oven so that the first and second blue color filter patterns 144 and 145 are hardened. Preferably, the hardened first and second blue color filter patterns 144 and 145 have a thickness in a range of about 1 μm to about 2 μm.

如图2H所示,通过涂布诸如光丙烯(photo acryl)的透明有机材料,在基板130上形成涂覆层146,其中该基板130包括各个子像素区域R、G和B中的第一红色滤色器图案140、第一绿色滤色器图案142和第一蓝色滤色器图案144,以及依次形成在各个第一边界区域BA1、第二边界区域BA2和第三边界区域BA3中的第二红色滤色器图案141、第二绿色滤色器图案143和第二蓝色滤色器图案145。涂覆层146保护滤色器图案140、141、142、143、144和145,并使包括滤色器图案140、141、142、143、144和145的基板130的表面变平。涂覆层146的厚度使各个第一边界区域BA1、第二边界区域BA2和第三边界区域BA3中的第二红色滤色器图案141、第二绿色滤色器图案143和第二蓝色滤色器图案145完全被涂覆层146所覆盖。涂覆层146的厚度在大约3μm到大约6μm的范围内。As shown in FIG. 2H , by coating a transparent organic material such as photo acryl, a coating layer 146 is formed on a substrate 130 including the first red color in the respective sub-pixel regions R, G, and B. The color filter pattern 140, the first green color filter pattern 142, and the first blue color filter pattern 144, and the first border area BA1, the second border area BA2, and the third border area BA3 are sequentially formed. The second red color filter pattern 141 , the second green color filter pattern 143 and the second blue color filter pattern 145 . The coating layer 146 protects the color filter patterns 140 , 141 , 142 , 143 , 144 and 145 and flattens the surface of the substrate 130 including the color filter patterns 140 , 141 , 142 , 143 , 144 and 145 . The coating layer 146 has a thickness such that the second red color filter pattern 141, the second green color filter pattern 143, and the second blue filter pattern in each of the first boundary area BA1, the second boundary area BA2, and the third boundary area BA3 The shader pattern 145 is completely covered by the coating layer 146 . The coating layer 146 has a thickness in the range of about 3 μm to about 6 μm.

如图2I所示,通过淀积诸如氧化铟锡的透明导电材料在包括涂覆层146的基板130上形成公共电极148。As shown in FIG. 2I, the common electrode 148 is formed on the substrate 130 including the coating layer 146 by depositing a transparent conductive material such as indium tin oxide.

在第一实施例中,在形成各滤色器图案之后进行硬化(或固化)处理。然而,可以在形成了红色、绿色和蓝色滤色器图案之后,进行硬化处理,从而硬化红色、绿色和蓝色滤色器图案。In the first embodiment, hardening (or curing) treatment is performed after forming each color filter pattern. However, hardening treatment may be performed after the red, green, and blue color filter patterns are formed, thereby hardening the red, green, and blue color filter patterns.

同时,虽然依次形成了红色、绿色和蓝色滤色器图案,但是也可以形成其它滤色器图案,并且形成顺序可以改变。Meanwhile, although the red, green, and blue color filter patterns are sequentially formed, other color filter patterns may also be formed, and the formation order may be changed.

在以上滤色器基板中,由于在各边界区域中形成的第二红色滤色器图案、第二绿色滤色器图案和第二蓝色滤色器图案的比率相同,所以第二红色滤色器图案、第二绿色滤色器图案和第二蓝色滤色器图案显示为黑色。因此,各边界区域中的第二红色滤色器图案、第二绿色滤色器图案和第二蓝色滤色器图案用作阻隔光的黑底。In the above color filter substrate, since the ratios of the second red color filter pattern, the second green color filter pattern, and the second blue color filter pattern are formed in the respective boundary regions in the same ratio, the second red color filter pattern filter pattern, the second green color filter pattern, and the second blue color filter pattern are displayed in black. Accordingly, the second red color filter pattern, the second green color filter pattern, and the second blue color filter pattern in each boundary region serve as a black matrix that blocks light.

为了提高生产率,更具体地,为了纯化红色、绿色和蓝色,理想地,第一红色滤色器图案、第一绿色滤色器图案和第一蓝色滤色器图案的厚度在大约1μm到2μm的范围内。随着滤色器图案的厚度变厚,色彩纯度提高。因此,提高了色彩的浓度,并且产生了良好的色彩。这在NTSC((美)国家电视制式委员会)色度坐标(chromaticity coordinates)上表现为更大的区域,由此提高了色彩可再现性。In order to improve productivity, more specifically, to purify red, green and blue, it is desirable that the thickness of the first red color filter pattern, the first green color filter pattern and the first blue color filter pattern is about 1 μm to in the range of 2 μm. As the thickness of the color filter pattern becomes thicker, the color purity improves. Therefore, the density of color is increased, and good color is produced. This manifests itself as a larger area on NTSC (National Television System Committee) chromaticity coordinates, thereby improving color reproducibility.

顺便提及,滤色器转印膜的滤色器层的厚度越厚,将滤色器层转印在基板上所需热能越多。为此,需要如下激光器,其在单位面积上具有更高密度的激光束,由此增加了生产成品。此外,如果滤色器层具有较厚的厚度,则精度降低,而精度是形成良好图案所必需的。这降低了生产能力。Incidentally, the thicker the thickness of the color filter layer of the color filter transfer film, the more thermal energy is required to transfer the color filter layer on the substrate. For this purpose, lasers are required which have a higher density of laser beams per unit area, thereby increasing the number of finished products produced. In addition, if the color filter layer has a thicker thickness, precision, which is necessary to form a good pattern, decreases. This reduces productivity.

因此,在第一实施例中,考虑到以上问题,滤色器图案的厚度最佳地基本上为大约1μm到大约2μm。Therefore, in the first embodiment, the thickness of the color filter pattern is optimally substantially about 1 μm to about 2 μm in consideration of the above problems.

同时,本发明的第二实施例通过使用滤色器层比第一实施例的滤色器层薄的滤色器转印膜,同时防止色彩纯度和色彩生产性能下降而提供了一种包括精良的彩色图案的滤色器基板及其制造方法。Meanwhile, the second embodiment of the present invention provides a color filter transfer film having a color filter layer thinner than that of the first embodiment while preventing color purity and color production performance from degrading. A color filter substrate with a color pattern and a manufacturing method thereof.

图3A到3C是示出根据本发明第二实施例的制造滤色器基板的方法的剖视图。3A to 3C are cross-sectional views illustrating a method of manufacturing a color filter substrate according to a second embodiment of the present invention.

如图3A所示,在基板230上的第一子像素区域R、第二子像素区域G和第三子像素区域B中分别形成第一红色滤色器图案240、第一绿色滤色器图案242和第一蓝色滤色器图案244,并且在各个第一边界区域BA1、第二边界区域BA2和第三边界区域BA3中依次形成第二红色滤色器图案241、第二绿色滤色器图案243和第二蓝色滤色器图案245。可以通过与在第一实施例中描述的处理相同的处理形成第一红色滤色器图案240、第一绿色滤色器图案242和第一蓝色滤色器图案244,以及第二红色滤色器图案241、第二绿色滤色器图案243和第二蓝色滤色器图案245。第一红色滤色器图案240、第一绿色滤色器图案242和第一蓝色滤色器图案244可以具有与第一实施例中的相同的厚度,即,大约1μm到2μm的范围内的厚度。然而,优选地,第一红色滤色器图案240、第一绿色滤色器图案242和第一蓝色滤色器图案244的厚度可以小于1μm,从而第二红色滤色器图案241、第二绿色滤色器图案243和第二蓝色滤色器图案245的厚度可以小于3μm。As shown in FIG. 3A, a first red color filter pattern 240, a first green color filter pattern 240, and a first green color filter pattern are respectively formed in the first sub-pixel region R, the second sub-pixel region G, and the third sub-pixel region B on the substrate 230. 242 and the first blue color filter pattern 244, and the second red color filter pattern 241, the second green color filter pattern 241, the second green color filter pattern 243 and a second blue color filter pattern 245. The first red color filter pattern 240, the first green color filter pattern 242, and the first blue color filter pattern 244, and the second red color filter pattern can be formed by the same process as that described in the first embodiment. filter pattern 241, a second green color filter pattern 243 and a second blue color filter pattern 245. The first red color filter pattern 240, the first green color filter pattern 242, and the first blue color filter pattern 244 may have the same thickness as that in the first embodiment, that is, in the range of about 1 μm to 2 μm. thickness. However, preferably, the thickness of the first red color filter pattern 240, the first green color filter pattern 242 and the first blue color filter pattern 244 may be less than 1 μm, so that the second red color filter pattern 241, the second color filter pattern The thickness of the green color filter pattern 243 and the second blue color filter pattern 245 may be less than 3 μm.

接下来,在包括第一红色滤色器图案240、第一绿色滤色器图案242和第一蓝色滤色器图案244以及第二红色滤色器图案241、第二绿色滤色器图案243和第二蓝色滤色器图案245的基板230的几乎整个表面上形成无色、透明的染料吸收层259。染料吸收层259的厚度大于2μm,从而在边界区域BA1、BA2和BA3中,染料吸收层259的顶面等于或高于第二蓝色滤色器图案245的顶面。通过涂布可以吸收染料(dye)的无色、透明材料来形成染料吸收层259。染料吸收层259可以由与不带颜料(pigment)的第一红色滤色器图案240、第一绿色滤色器图案242和第一蓝色滤色器图案244的材料相同的材料形成,诸如丙烯酸或环氧树脂材料。Next, after including the first red color filter pattern 240, the first green color filter pattern 242, the first blue color filter pattern 244 and the second red color filter pattern 241, the second green color filter pattern 243 A colorless, transparent dye absorbing layer 259 is formed on almost the entire surface of the substrate 230 of the second blue color filter pattern 245 . The thickness of the dye absorbing layer 259 is greater than 2 μm such that the top surface of the dye absorbing layer 259 is equal to or higher than the top surface of the second blue color filter pattern 245 in the boundary areas BA1 , BA2 and BA3 . The dye absorbing layer 259 is formed by coating a colorless, transparent material that can absorb dye. The dye absorbing layer 259 may be formed of the same material as that of the first red color filter pattern 240, the first green color filter pattern 242, and the first blue color filter pattern 244 without pigment, such as acrylic. or epoxy resin material.

如图3B所示,通过喷墨装置290,在包括图3A的无色、透明的染料吸收层259的基板230上溅射(spray)或喷墨(ink-jetted)比颜料更细小并且更均匀的红色、绿色和蓝色染料,在各个子像素区域R、G和B处,所喷射的红色、绿色和蓝色染料被吸收到图3A的染料吸收层259中。因此,在第一子像素区域R、第二子像素区域G和第三子像素区域B中分别形成第三红色滤色器图案260a、第三绿色滤色器图案260b和第三蓝色滤色器图案260c。这里,在各个子像素区域中形成具有相同色彩的滤色器图案。即,在第一子像素区域R中形成第一红色滤色器图案240和第三红色滤色器图案260a;在第二子像素区域G中形成第一绿色滤色器图案242和第三绿色滤色器图案260b;在第三子像素区域B中形成第一蓝色滤色器图案244和第三蓝色滤色器图案260c。在边界区域BA1、BA2和BA3处的图3A的染料吸收层259可以吸收这些染料。然而,在边界区域BA1、BA2和BA3处的图3A的染料吸收层259也可以不吸收这些染料。As shown in FIG. 3B, by means of an inkjet device 290, on a substrate 230 comprising the colorless, transparent dye-absorbing layer 259 of FIG. At the respective sub-pixel regions R, G and B, the ejected red, green and blue dyes are absorbed into the dye absorbing layer 259 of FIG. 3A. Therefore, the third red color filter pattern 260a, the third green color filter pattern 260b and the third blue color filter pattern are formed in the first sub-pixel region R, the second sub-pixel region G and the third sub-pixel region B, respectively. device pattern 260c. Here, color filter patterns having the same color are formed in the respective sub-pixel regions. That is, the first red color filter pattern 240 and the third red color filter pattern 260a are formed in the first sub-pixel region R; the first green color filter pattern 242 and the third green color filter pattern are formed in the second sub-pixel region G. The color filter pattern 260b; the first blue color filter pattern 244 and the third blue color filter pattern 260c are formed in the third sub-pixel region B. The dye absorbing layer 259 of FIG. 3A at the border areas BA1, BA2, and BA3 can absorb these dyes. However, the dye absorbing layer 259 of FIG. 3A at the border areas BA1 , BA2 and BA3 may also not absorb these dyes.

第三红色滤色器图案、第三绿色滤色器图案和第三蓝色滤色器图案260a、260b和260c增加了具有第一红色滤色器图案240、第一绿色滤色器图案242和第一蓝色滤色器图案244的滤色器层的厚度。因此,增加了色彩纯度,并提高了色彩可再现性。此外,第三红色滤色器图案、第三绿色滤色器图案和第三蓝色滤色器图案260a、260b和260c用作平面化层。The third red color filter pattern, the third green color filter pattern and the third blue color filter pattern 260a, 260b and 260c are added with the first red color filter pattern 240, the first green color filter pattern 242 and the third color filter pattern. The thickness of the color filter layer of the first blue color filter pattern 244 . Therefore, color purity is increased and color reproducibility is improved. In addition, the third red, green, and blue color filter patterns 260a, 260b, and 260c serve as a planarization layer.

通常,由于染料比颜料更为细小并且均匀,所以当滤色器层具有相同厚度时,包括染料的滤色器层比包括颜料的滤色器层具有更好的色彩纯度。然而,与颜料相比,染料在抗热性方面较差。因此,颜料广泛用于经过高温处理制造的液晶显示装置的滤色器基板。Generally, since dyes are finer and more uniform than pigments, a color filter layer including dyes has better color purity than a color filter layer including pigments when the color filter layers have the same thickness. However, dyes are inferior in heat resistance compared to pigments. Therefore, pigments are widely used in color filter substrates of liquid crystal display devices manufactured through high-temperature processing.

在本发明的第二实施例中,滤色器层具有双层结构:包括染料的上滤色器图案和包括颜料的下滤色器图案。由此,包括颜料的下滤色器图案补偿抗热性,而具有染料的上滤色器图案补偿色彩可再现性,由此提供了具有改进了的色彩品质的滤色器基板。In the second embodiment of the present invention, the color filter layer has a double layer structure: an upper color filter pattern including dye and a lower color filter pattern including pigment. Thereby, the lower color filter pattern including the pigment compensates for heat resistance, and the upper color filter pattern having the dye compensates for color reproducibility, thereby providing a color filter substrate with improved color quality.

接下来,如图3C所示,通过淀积透明导电材料,在第三红色滤色器图案、第三绿色滤色器图案和第三蓝色滤色器图案260a、260b和260c的几乎整个表面上形成公共电极248。该透明导电材料可以是铟锡氧化物或铟锡氧化物。Next, as shown in FIG. 3C, by depositing a transparent conductive material, almost the entire surface of the third red color filter pattern, the third green color filter pattern and the third blue color filter pattern 260a, 260b and 260c A common electrode 248 is formed thereon. The transparent conductive material may be indium tin oxide or indium tin oxide.

在本发明中,红色、绿色和蓝色滤色器图案依次形成在边界区域中,并且用作黑底。因此,简化了制造工艺。此外,由于无需提供光刻装置,所以降低了生产成本。In the present invention, red, green, and blue color filter patterns are sequentially formed in the border area, and serve as the black matrix. Therefore, the manufacturing process is simplified. In addition, since there is no need to provide a photolithography apparatus, production costs are reduced.

此外,由于通过使用染料吸收层在包括颜料的滤色器图案上进一步形成了滤色器图案,所以提高了色彩可再现性。包括染料的滤色器图案用作平面化层。此时,可以通过使用厚度小于大约1μm的滤色器转印膜来形成包括颜料的滤色器图案,可以形成精良的图案,从而提高生产率。In addition, since the color filter pattern is further formed on the color filter pattern including the pigment by using the dye absorbing layer, color reproducibility is improved. A color filter pattern including dye is used as a planarization layer. At this time, by using a color filter transfer film having a thickness of less than about 1 μm to form a color filter pattern including a pigment, a fine pattern can be formed, thereby improving productivity.

对于本领域技术人员,很显然可以在不脱离本发明的精神或范围的情况下对本发明的制造和应用进行各种修改和变型。因此,本发明旨在覆盖落入所附权利要求及其等同物的范围内的本发明的修改和变型。It will be apparent to those skilled in the art that various modifications and variations can be made in the making and application of the present invention without departing from the spirit or scope of the inventions. Thus, it is intended that the present invention covers the modifications and variations of this invention that come within the scope of the appended claims and their equivalents.

本申请要求2004年12月3日提交的第2004-0100817号韩国专利申请以及2004年12月9日提交的第2004-0103428号韩国专利申请的优先权,在此通过引用并入,如同在本文中完整阐述了一样。This application claims the benefit of Korean Patent Application No. 2004-0100817 filed on December 3, 2004 and Korean Patent Application No. 2004-0103428 filed on December 9, 2004, which are hereby incorporated by reference as if herein The same is fully explained in .

Claims (17)

1. filter substrate that is used for liquid crystal indicator comprises:
Substrate, this substrate comprise first borderline region, second borderline region and the 3rd borderline region between first subpixel area, second subpixel area and the 3rd subpixel area and the adjacent subpixels zone;
Respectively at the first red color filter pattern, the first green color filter pattern and the first blue color filter pattern at described first subpixel area, second subpixel area and the 3rd subpixel area place;
The second red color filter pattern at each place in described first borderline region, second borderline region and the 3rd borderline region, the second green color filter pattern and the second blue color filter pattern; And
The 3rd red color filter pattern on the described first red color filter pattern, the first green color filter pattern and the first blue color filter pattern, the 3rd green color filter pattern and the 3rd blue color filter pattern respectively, local its adjacent described second red color filter pattern, the second green color filter pattern and the second blue color filter pattern that cover of each described the 3rd red color filter pattern, the 3rd green color filter pattern and the 3rd blue color filter pattern, described the 3rd red color filter pattern, the 3rd green color filter pattern and the 3rd blue color filter pattern comprise dyestuff.
2. filter substrate according to claim 1, wherein said the 3rd red color filter pattern, the 3rd green color filter pattern and the 3rd blue color filter pattern are as complanation layer.
3. filter substrate according to claim 1, each in the wherein said first red color filter pattern, the first green color filter pattern and the first blue color filter pattern have the thickness in the scope of 2 μ m at 1 μ m.
4. filter substrate according to claim 3, wherein the combination thickness of the described second red color filter pattern, the second green color filter pattern and the second blue color filter pattern in borderline region at 3 μ m in the scope of 6 μ m.
5. filter substrate according to claim 1 also is included in the public electrode on described the 3rd red color filter pattern, the 3rd green color filter pattern and the 3rd blue color filter pattern.
6. filter substrate according to claim 1, each in the wherein said first red color filter pattern, the first green color filter pattern and the first blue color filter pattern has the thickness less than 1 μ m.
7. filter substrate according to claim 6, the wherein said second red color filter pattern, the second green color filter pattern and the second blue color filter pattern have the thickness less than 3 μ m.
8. filter substrate according to claim 6, each in wherein said the 3rd red color filter pattern, the 3rd green color filter pattern and the 3rd blue color filter pattern has the thickness less than 3 μ m.
9. filter substrate according to claim 1, the wherein said first red color filter pattern, the first green color filter pattern and the first blue color filter pattern comprise pigment.
10. a manufacturing is used for the method for the filter substrate of liquid crystal indicator, and described method comprises:
On substrate, form the first red color filter pattern and the second red color filter pattern, this substrate comprises first borderline region, second borderline region and the 3rd borderline region between first subpixel area, second subpixel area and the 3rd subpixel area and the adjacent subpixels zone, the described first red color filter pattern is at the described first subpixel area place, and the described second red color filter pattern is at each described first borderline region, second borderline region and the 3rd borderline region place;
Form the first green color filter pattern at the described second subpixel area place, and form the second green color filter pattern at each described first borderline region, second borderline region and the 3rd borderline region place;
Form the first blue color filter pattern at described the 3rd subpixel area place, and form the second blue color filter pattern at each described first borderline region, second borderline region and the 3rd borderline region place; And
On the described first red color filter pattern, the first green color filter pattern and the first blue color filter pattern, form the 3rd red color filter pattern, the 3rd green color filter pattern and the 3rd blue color filter pattern respectively, local its adjacent described second red color filter pattern, the second green color filter pattern and the second blue color filter pattern that cover of each described the 3rd red color filter pattern, the 3rd green color filter pattern and the 3rd blue color filter pattern, described the 3rd red color filter pattern, the 3rd green color filter pattern and the 3rd blue color filter pattern comprise dyestuff.
11. method according to claim 10, wherein form the described first and second red color filter patterns, form the described first and second green color filter patterns and form in the described first and second blue color filter patterns each all use thermal imaging method.
12. method according to claim 11, wherein said thermal imaging method comprises:
The color filter transfer film is adhered on the described substrate, make color-filter layer face described substrate;
By with laser beam irradiation on described color filter transfer film, selectively with described color-filter layer transfer printing on described substrate; And
Shining the described laser beam described color filter transfer film of removal later on.
13. method according to claim 10, wherein said the 3rd red color filter pattern, the 3rd green color filter pattern and the 3rd blue color filter pattern are as complanation layer.
14. method according to claim 10, also be included in to have formed and the described first and second red color filter patterns hardened after the described first and second red color filter patterns, after having formed the described first and second green color filter patterns, the described first and second green color filter patterns are hardened, and after having formed the described first and second blue color filter patterns, the described first and second blue color filter patterns are hardened.
15. method according to claim 10 also comprises the described first and second red color filter patterns, the described first and second green color filter patterns and the described first and second blue color filter patterns is hardened.
16. method according to claim 10 wherein forms described the 3rd red color filter pattern, the 3rd green color filter pattern and the 3rd blue color filter pattern and comprises:
On the described first red color filter pattern, the first green color filter pattern and the first blue color filter pattern and the described second red color filter pattern, the second green color filter pattern and the second blue color filter pattern, form the dyestuff absorption layer; And
With red, green and blue dyes respectively sputter or ink-jet in the described dyestuff absorption layer at described first subpixel area, second subpixel area and the 3rd subpixel area place, perhaps respectively sputter or ink-jet to described first subpixel area, second subpixel area and the 3rd subpixel area with and the described dyestuff absorption layer at adjacent borderline region place in.
17. method according to claim 10 also is included on described the 3rd red color filter pattern, the 3rd green color filter pattern and the 3rd blue color filter pattern and forms public electrode.
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