CN100485443C - Open hole-based diffractive light modulator - Google Patents

Abstract

The present invention relates to diffractive light modulators. In particular, the present invention relates to aperture based diffractive light modulators. In this modulator, a lower reflection part is provided on a base member, and an opening is formed through an upper micromirror protruding from the base member, so that one pixel is formed using one unit having a strip-shaped upper micromirror shape.

Description

Aperture-based diffractive light modulator

technical field

The present invention relates generally to a diffractive light modulator, and more particularly to an aperture-based diffractive light modulator in which a lower reflective component is provided on a base member through an upper portion protruding from the base member. The micromirror forms an aperture so that one pixel is formed using one unit having the upper micromirror shape.

Background technique

In general, optical signal processing techniques are advantageous in quickly processing large amounts of data in parallel, unlike conventional digital information processing techniques in which it is impossible to process large amounts of data in real time. Research on the design and production process of binary phase filters, optical logic gates, optical intensifiers, image processing techniques, optical devices, and optical modulators using spatial light modulation techniques.

Spatial light modulators are used in the fields of optical memory, optical display devices, printers, optical interconnections, and holography, and research is being conducted to develop display devices using it.

The reflective deformation diffractive light modulator 10 shown in FIG. 1 implements a spatial light modulator. The modulator 10 is disclosed in US Patent No. 5,311,360 by Bloom et al. The modulator 10 comprises a plurality of reflective deformable strips 18 based on reflective surface portions, floating above the upper part of the silicon substrate 16 and separated from each other by regular intervals. An insulating layer 11 is deposited on a silicon substrate 16 . Then, a silicon dioxide protective film 12 and a low-stress silicon nitride film 14 are deposited.

The nitride film 14 is patterned with the deformed bands 18 and then a portion of the silicon dioxide film 12 is etched such that the deformed bands 18 remain on the oxide isolation layer 12 with the nitride structure 20 .

In order to modulate light of a single wavelength λ ₀ , the modulator is designed such that the thicknesses of the deformed band 18 and the oxide interlayer 12 are λ ₀ /4 respectively.

Restricted by the vertical distance (d) between the reflective surface 22 of each deformed band 18 and the substrate 16, by connecting the deformed band 18 (the reflective face of the deformed band 18 used as the first electrode) with the substrate 16 (in The amplitude of the grating of the modulator 10 is controlled by applying a voltage between a conductive layer 24) formed on the underside of the substrate 16 and used as a second electrode.

In the non-deformed state of the light modulator with no voltage applied, the grating amplitude is λ ₀ /2 and the total round-trip optical path difference between the deformed strip and the beam reflected by the substrate is λ ₀ . Therefore, the phase of reflected light is enhanced.

Thus, in the undeformed state, the modulator 10 acts as a flat mirror when the modulator 10 reflects incident light. In Fig. 2, reference numeral 20 denotes incident light reflected by the modulator 10 in the undeformed state.

When the correct voltage is applied between the deformable strip 18 and the substrate 16 , the electrostatic force moves the deformable strip 18 downward toward the surface of the substrate 16 . At this time, the grating amplitude is changed to λ ₀ /4. The total round-trip optical path difference is half the wavelength, and the light reflected by the deformed strip 18 and the light reflected by the substrate 16 interfere destructively.

Using this interference, the modulator diffracts the incident light 26 . In FIG. 3, reference numerals 28 and 30 respectively denote light beams interfering in +/- diffraction patterns (D+1, D-1) in the deformed state.

However, the light modulator invented by Bloom uses an electrostatic method to control the position of the micromirror. Reliability of controlling light is terrible.

The light modulators described in Bloom's patent can be used as devices for displaying images. In this case, a minimum of two adjacent cells can form a pixel. Of course, 3 cells can form a pixel, or 4 or 6 cells can form a pixel.

However, the light modulators described in Bloom's patent are limited in their ability to be miniaturized. That is, the optical modulator is limited in that its cells are formed with a width of not less than 3 μm and that the intervals between formed cells are not lower than 0.5 μm.

In addition, a minimum of two units is required to constitute a diffractive pixel, so there is a limit in miniaturization of the device.

Contents of the invention

Therefore, the present invention is proposed in order to solve the above-mentioned problems in the prior art, and an object of the present invention is to provide a diffractive light modulator in which one pixel is formed using as few as one deformed band unit, thereby miniaturizing the product.

In order to achieve the above object, the present invention provides an aperture-based diffractive light modulator, comprising: a base member; a first reflective part supported by the base member, and including a middle portion separated from the base member, so that the defined a space therebetween, a first surface facing and separated from the base member and used as a reflective surface to reflect incident light, and at least one opening through which the incident light passes through the first reflective member formed; the second a reflective part located between the first reflective part and the base member, the second reflective part is separated from the first reflective part and includes a reflective surface facing the first reflective part to reflect incident light passing through the at least one opening light; and an actuating unit for moving the middle portion of the first reflective part relative to the second reflective part to change the intensity of diffracted light formed using light reflected from the first reflective part and the second reflective part.

In yet another aspect of the present invention, the first reflective member spans a recess formed in the base member, the sidewalls of the recess of the base member supporting the second reflective member in parallel spaced relation to the first reflective member, The second reflective part is movable toward or away from the first reflective part to reflect incident light passing through the aperture; and the actuating unit moves the second reflective part relative to the first reflective part to change the intensity of diffracted light using Light reflected from the first reflective member and the second reflective member forms.

In addition, the present invention provides an aperture-based diffractive light modulator comprising a base member; a plurality of first reflective members arranged to form an array, each first reflective member being separated from the base member at its middle portion so that Forming a space, each first reflective part is supported by the base member, each first reflective part has a reflective surface facing away from the base member to reflect incident light, and each first reflective part is formed with at least one opening a hole such that incident light passes therethrough; a second reflective part positioned between the first reflective part and the base member such that a space is defined relative to the first reflective part, and the second reflective part has a reflective surface to reflect light passing through the opening; incident light of the holes; and a plurality of actuating units for moving intermediate portions of the corresponding first reflective parts to change the intensity of diffracted light formed using light reflected from the first reflective part and the second reflective part.

In another aspect of the invention, the first reflective members span the recess defined by the base member, and the second reflective members are arranged in an array and supported by the recess sidewalls of the base member to correspond to the corresponding The first reflective parts are in a parallel spaced relationship, and the second reflective parts are movable toward or away from the first reflective parts to reflect incident light passing through the opening; the actuating unit moves the corresponding second reflective parts relative to the first reflective parts , to change the intensity of the diffracted light formed using the light reflected from the first reflective part and the second reflective part.

In addition, the present invention provides a display device using an aperture-based diffractive light modulator, including a light source emitting light; an aperture-based diffractive light modulator that modulates incident light to generate diffracted light; The incident light of the aperture is applied to the diffractive light modulator based on the aperture; the filtering optical component is used to select the diffracted light of the desired order from the diffracted light modulated by the diffractive light modulator based on the aperture, so that the diffracted light passing through it passes through the selected and projection and scanning optics for scanning the diffracted light through the filter optics on the screen. The aperture-based diffractive light modulator includes a base member; a plurality of first reflective members arranged to form an array, each first reflective member being supported by the base member such that between a central portion of the first reflective member and the base member A space is formed therebetween, and each first reflective part has an opening formed therein so that light passes therethrough, and a reflective surface to reflect incident light; a second reflective part is supported by a base member, and the second reflective part is supported by a base member. The reflective part is separated from the first reflective part, the second reflective part includes a reflective surface to reflect incident light passing through the opening of the first reflective part; and a plurality of actuating units are used to move corresponding The middle portion of the first reflective part is changed to change the intensity of the diffracted light formed using the light reflected from the first reflective part and the second reflective part.

In addition, the present invention provides an aperture-based diffractive light modulator comprising a substrate; an insulating layer deposited on the substrate; at least one sacrificial layer deposited on the insulating layer; A component to reflect incident light; a support on at least one sacrificial layer through which a first opening is formed; a micromirror placed on said support, the micromirror has a reflective surface to reflect incident light, and the microreflector a second opening formed in the mirror to correspond to the first opening through which incident light passes; and at least one actuation unit to move the middle portion of the support when a voltage is applied thereto, thereby changing the diffracted light The intensity of the diffracted light is formed using light reflected from micromirrors and reflective parts.

Description of drawings

According to the following detailed description in conjunction with the accompanying drawings, the above-mentioned and other objects, features and other advantages of the present invention can be more clearly understood, and the accompanying drawings include:

Figure 1 shows a grating light modulator using an electrostatic approach according to conventional techniques;

Figure 2 shows incident light reflected by a grating light modulator using electrostatic methods according to conventional techniques in an undeformed state;

Figure 3 shows incident light diffracted by a grating light modulator according to conventional techniques in a deformed state induced by electrostatic forces;

Figure 4a is a perspective view of a partially detached aperture-based diffractive light modulator according to a first embodiment of the present invention;

Figure 4b is a perspective view of a partially detached aperture-based diffractive light modulator according to a second embodiment of the present invention;

Figure 4c is a perspective view of a partially detached aperture-based diffractive light modulator according to a third embodiment of the present invention;

Figure 4d is a perspective view of a partially detached aperture-based diffractive light modulator according to a fourth embodiment of the present invention;

Figure 4e is a perspective view of a partially detached aperture-based diffractive light modulator according to a fifth embodiment of the present invention;

Figure 4f is a perspective view of a partially detached aperture-based diffractive light modulator according to a sixth embodiment of the present invention;

Figure 4g is a perspective view of a partially detached aperture-based diffractive light modulator according to a seventh embodiment of the present invention;

Figure 4h is a perspective view of an aperture-based diffractive light modulator, partially separated, according to an eighth embodiment of the present invention;

Figure 4i is a perspective view of a partially detached aperture-based diffractive light modulator according to a ninth embodiment of the present invention;

Figure 4j is a perspective view of a partially detached aperture-based diffractive light modulator according to a tenth embodiment of the present invention;

Fig. 5 shows the 1-D array structure of the diffractive light modulator based on the aperture according to the first embodiment of the present invention;

6 shows a 2-D array structure of an aperture-based diffractive light modulator according to a seventh embodiment of the present invention;

Figure 7 illustrates a display system using an aperture-based diffractive light modulator according to an embodiment of the invention;

Figure 8a is a perspective view of an aperture-based diffractive light modulator according to an embodiment of the present invention, wherein incident light obliquely strikes the upper micro-mirror of the cell 1-D array; and

Figure 8b is a perspective view of an aperture-based diffractive light modulator according to an embodiment of the present invention, where light is incident normally on the upper micromirror of the cell 1-D array.

Detailed ways

A preferred embodiment of the present invention will be described in detail below with reference to FIGS. 4a to 8b.

Fig. 4a is a perspective view showing an aperture-based diffractive light modulator according to a first embodiment of the present invention.

Referring to the drawings, the aperture-based diffractive light modulator according to the first embodiment of the present invention includes: a silicon substrate 501a, an insulating layer 502a, a micromirror 503a, and a unit 510a. Although the insulating layer and the micromirror are constructed as separate layers in this embodiment, the insulating layer may be realized to function as a micromirror when it has light reflection properties. In addition, here, the insulating layer 502a is shown to be formed on the surface of the base member 501a, but the insulating layer is not essential, so the reflective part 503a may be formed without forming the insulating layer 502a.

The silicon substrate 501a includes a groove for providing spacing to the cell 510a, an insulating layer 502a is formed on the silicon substrate 501a, a lower micromirror 503a is deposited on the silicon substrate 501a, and the bottom of the cell 510a is located outside the groove. The two sides of the silicon substrate 501a are connected to or supported by it. Materials such as Si, Al ₂ O ₃ , ZrO ₂ , quartz, and SiO ₂ are used to construct the silicon substrate 501a, and different materials may be used to form the lower and upper layers of the silicon substrate 501a (demarcated by dotted lines). In addition, a glass substrate may be used as the base member 510a.

The lower micro mirror 503a is placed on the upper side of the base member 501a, and reflects incident light. A micromirror can be used as the lower reflective part 503a, and a metal such as Al, Pt, Cr, or Ag can be used to construct the lower micromirror 503a.

The unit 510a is formed in the shape of an elongated thin strip, however, the unit may be formed in other shapes, such as rectangular, circular, oval, etc. FIG. The unit 510a includes a lower support 511a, the bottoms of which are connected to or supported by the two sides of the silicon substrate 501a located outside the groove of the silicon substrate 501a, so that the central part of the unit 510a is separated from the groove. The term "lower support" is named because it is located below the piezoelectric layers 520a and 520a'.

Piezoelectric layers 520a and 520a' are disposed on both sides of the lower support 511a, respectively, and the actuation force of the unit 510a is provided by contraction and expansion of the disposed piezoelectric layers 520a and 520a'.

Silicon oxides (e.g., SiO2 _, etc.), silicon nitrides (e.g., _{Si3N4 ,} etc.), ceramic substrates (Si, _ZrO2 , and _{Al2O3 ,} etc.), or silicon carbides can be used to construct Lower support 511a. The lower support 511a can be omitted as needed.

The left and right piezoelectric layers 520a or 520a' include: a lower electrode layer 521a or 521a' adapted to supply a piezoelectric voltage; a piezoelectric material layer 522a or 522a' formed on the lower electrode layer 521a or 521a', and when When a voltage is applied to both sides thereof, it is suitable to generate a vertical actuation force through contraction and expansion; and the upper electrode layer 523a or 423a' is formed on the piezoelectric material layer 521a or 521a', and is suitable for the piezoelectric material layer 521a or 521a' provides piezoelectric voltage. When a voltage is applied to the upper electrode layers 523a and 523a' and the lower electrode layers 521a and 521a', the piezoelectric material layers 521a and 521a' contract and expand, thus causing the lower support 511a to move vertically toward or away from the micromirror 503a.

Pt, Ta/Pt, Ni, Au, Al, Ti/Pt, IrO ₂ , and RuO ₂ can be used as materials for the electrodes 521a, 521a', 523a, and 523a', and these materials are deposited using a sputtering or vaporization method to Has a depth in the range of 0.01 to 3 μm.

Simultaneously, at the central portion of the lower support 511a, an upper micromirror 530a is deposited. The upper micro mirror 530a includes a plurality of openings 531a ₁ to 531a ₃ . In this case, the openings 531a ₁ to 531a ₃ are preferably formed in a rectangle, but may be formed in any closed shape such as a circle or an ellipse. Also, the lower support 511a and the upper micro mirror 530a may be referred to as an upper reflection part 540a. If the lower support is made of reflective material, no separate upper micromirror needs to be deposited, and the lower support alone serves as reflective member 540a.

Such openings 531a ₁ to 531a ₃ allow light to be incident on the unit 510a to pass through it, so that the light is incident on the part of the lower micro-mirror 503a corresponding to the openings 531a ₁ to 531a ₃ , so that the lower micro-mirror 503a can be made to reflect Mirror 503a and upper micromirror 530a form a pixel.

That is, for example, a portion (A) of the upper micromirror 530a and a portion (B) of the lower micromirror 503a in which the openings 531a ₁ -531a ₃ are formed may form one pixel.

In other words, since the upper micro-mirror 530a has a reflective surface, it reflects incident light to form reflected light while allowing the incident light to reach the lower reflective part 503a through the opening. The lower reflection part 503a then reflects the incident light to form reflected light, so that the light reflected from the upper micro mirror 530a interferes with the light reflected from the lower micro mirror 530a, thereby forming diffracted light. The intensity of the diffracted light depends on the distance between the upper micro mirror 530a and the lower reflecting part 503a.

In this case, the incident light passing through the openings _531a1 to _531a3 of the upper micromirror 530a can be incident on the corresponding parts of the lower micromirror 503a, and between the upper micromirror 530a and the lower micromirror 503a When the height difference between them is one of the odd multiples of λ/4, the strongest diffracted light is produced. Also, here, only one unit 510a is shown, but the aperture-based diffractive light modulator of the present invention may comprise a plurality of units parallel to each other. In other words, the aperture-based diffractive light modulator of the present invention may comprise a cell array, which is shown in FIGS. 5 and 6 .

When using a cell array according to the present invention, a display device with desired pixels can be realized using fewer cells than in the prior art.

For example, in the prior art, at least two strip units may be used to form one pixel. In the prior art, when two strip-shaped units constitute one pixel, the diffraction efficiency is 50% or less, so four or six units constitute one pixel so as to increase the diffraction efficiency. When four or more units constitute one pixel, the diffraction efficiency is 70% or higher, whereby the desired highest efficiency can be obtained by increasing the number of units. In the first embodiment of the present invention, three openings 531a1-531a3 are formed by the upper micromirror 530a constituting the upper part of one unit 510a to pass incident light therethrough to reach the lower reflecting part 503a, thereby The same diffraction efficiency as that of the related art in which six cells are used to form one pixel is obtained. That is, according to the first embodiment of the present invention, the mirror part adjacent to the first opening 531a1 of the upper micro mirror 530a reflects incident light to serve as a deformable band unit of the prior art. In addition, part of the lower reflection part 503a is located under the first opening 531a1 so as to correspond in position to reflect incident light passing through the first opening 531a1, thereby serving as another deformation band unit at the first hole. In addition, the mirror part adjacent to the second opening 531a2 of the upper micromirror 530a reflects incident light to serve as another deformation band unit of the prior art, and part of the lower reflection part 503a reflects the incident light passing through the second opening 531a2. Light, thus serving as another deformable band unit, the part of the lower reflective part 503a is located below the second opening 531a2 so as to correspond in position to the second opening. Likewise, the mirror part adjacent to the third opening 531a3 of the upper micromirror 530a reflects incident light to serve as another deformation band unit of the prior art, and part of the lower reflection part 503a reflects incident light passing through the third opening 531a3. Light, thereby serving as another deformable band unit, the part of the lower reflective member 503a is located below the third opening 531a3 so as to correspond in position to the third opening. As described above, if the upper micromirror 530 and the lower reflective member 503a through which three openings 531a1-531a3 are formed are used, one deformable band unit 510a can be used to obtain a The same diffraction efficiencies obtained for pixels.

If a digital TVHD format corresponding to 1080×1920 is realized using the above-described diffractive light modulator, 1080 pixels are vertically arranged and each pixel is subjected to 1920 optical modulations, thereby forming one frame. If four or six driving ribbons are used to form one pixel in the prior art, 1080×4 (or 6) driving ribbons are required to form 1080 pixels. On the other hand, if the strip unit with two or three openings according to the present invention is used, only 1080×1 strip unit can be used to form 1080 pixels. Therefore, manufacturing is easily achieved, yield is improved, and a device having a small size can be manufactured.

Figure 4b is a perspective view of a partially isolated aperture-based diffractive light modulator according to a second embodiment of the present invention.

Referring to the drawings, an aperture-based diffractive light modulator according to a second embodiment of the present invention includes a base member 501b, a lower reflective part 503b, and a unit 510b.

Different from the first embodiment, the lower reflective part 503b includes a plurality of lower reflective patterns 503b1-503b3, and the plurality of lower reflective patterns 503b1-503b3 are arranged at intervals on the surface of the insulating layer 502a so that they correspond in position to the upper micro The openings 531b1-531b3 of the mirror 530b. Other configurations are the same as those of Fig. 4a.

Figure 4c is a perspective view of a partially isolated aperture-based diffractive light modulator according to a third embodiment of the present invention.

Referring to the accompanying drawings, an aperture-based diffractive light modulator according to a third embodiment of the present invention includes a base member 501c comprising a SIMOX SOI (silicon-on-insulator separated by oxygen-implanted) substrate (hereinafter, referred to as " silicon-on-insulator substrate"), the lower reflective member 503c, and the unit 510c.

The third embodiment of the present invention differs from the first embodiment of Fig. 4a in that a silicon-on-insulator substrate, instead of a silicon substrate, is used as the base member 501c. Its manufacture is well known, so its detailed description is omitted here.

The silicon-on-insulator base member 501c used in the present invention includes a silicon substrate 501c1, a silicon dioxide insulating layer 501c2 formed by implanting oxygen ions in the silicon substrate, and a sacrificial silicon layer 501c3 formed by implanting oxygen ions in the silicon substrate. It is formed by injecting high-concentration oxygen in the medium. The portion of the sacrificial silicon layer 501c3 under the upper micromirror 530a is etched such that a moving space (air gap) is ensured in which the unit 510c can move vertically. In addition, the portion of the sacrificial silicon layer 501c3 underlying the piezoelectric layers 520a, 520a' is partially etched such that the contraction and expansion of the piezoelectric materials 522c and 522c' of the piezoelectric layers 520c and 520c' actuate the upper micromirror 530a. . Also, the silicon dioxide insulating layer 501c2 can be considered as an etch stop layer for preventing the silicon substrate 501c1 from being etched when the silicon sacrificial layer 501c3 is etched.

In addition, the third embodiment of the present invention is also different from the first embodiment in that the lower reflective part 503c includes a plurality of lower reflective patterns 503c1-503c3 separated from each other. From this point of view, it is the same as the second embodiment.

In addition, the third embodiment of the present invention is different from the first embodiment in that the sacrificial silicon layer 501c3 provides a moving space (air gap) for the cell 510c. That is, in the third embodiment of the present invention, it is not necessary to provide a separate groove on the silicon substrate 501c1. In this regard, the sacrificial silicon layer 501c3 can be considered as a supporting member for supporting the unit 510c to provide a moving space for the unit 510c. Furthermore, the aperture-based diffractive light modulator according to the third embodiment of the present invention is the same as those of the first embodiment.

4d is a perspective view of a partially isolated aperture-based diffractive light modulator comprising a base member 501d comprising a silicon substrate, a lower reflective member 503d, and a unit according to a fourth embodiment of the present invention. 510d.

The fourth embodiment of FIG. 4d is different from the embodiment of FIG. 4a in that the openings 531d1-531d3 are not arranged vertically, but arranged horizontally. Other configurations are the same as in Fig. 4a.

Figure 4e is a perspective view of a partially isolated aperture-based diffractive light modulator according to a fifth embodiment of the present invention.

Referring to the drawings, the aperture-based diffractive light modulator according to the fifth embodiment is different from the aperture-based diffractive light modulator according to the fourth embodiment in that the lower support 511e of the unit 510e is obtained from the base member of the silicon substrate 501e to provide spacing. As a result, unit 510e can move vertically.

That is, the unit 510e has an upper micro mirror 530e for reflecting incident light, and is capable of moving vertically while protruding from the base member 501e. In this case, if the lower support has light reflection properties, the lower support can be realized to function as a micromirror without forming a separate micromirror.

The lower support 511e of the unit 510e protrudes to provide an air gap to the unit 510e, and its sides are attached to the base unit 510e.

In addition, an insulating layer 502e and a lower reflection part 503e reflecting incident light passing through the opening are deposited on a base member 501e including a silicon substrate. In this case, if the insulating layer has light reflection properties, the insulating layer can be used as the lower reflecting part without forming a separate lower reflecting part.

The unit 510e may be formed in a belt shape, its center portion is positioned to protrude from the base member 501e and separated, and both sides of its bottom are attached to the base member 501e.

The piezoelectric layers 520e and 520e' form the left and right sides of the upper portion of the unit 510e, respectively. The piezoelectric layer 520e or 520e' includes a lower electrode layer 521e or 521e' adapted to apply a piezoelectric voltage, a piezoelectric material layer 522e or 522e' formed on the lower electrode layer 521e or 521e', and adapted to On both sides thereof, a vertical actuation force is generated by contraction and expansion, and the upper electrode layer 523e or 523e' is formed on the piezoelectric material layer 522e or 522e' and is adapted to provide piezoelectric material layer 522e or 522e'. Voltage.

When a voltage is applied to the upper electrode layers 523e and 523e' and the lower electrode layers 521e and 521e', the unit 510e moves upward and reflects incident light to form reflected light.

An upper micromirror 530e is placed at the center portion of the unit 510e where the piezoelectric layers 520e and 520e' of the lower support 511e are removed, and openings 531e1 to 531e3 are provided on the upper micromirror 530e. In this case, the openings 531e1_531e3 are preferably formed in a rectangle, but may also be formed in any closed shape such as a circle or an ellipse.

Such openings 531e1-531e3 allow portions of the lower micromirror 503e corresponding to the openings 531e1 to 531e3, and portions of the upper micromirror 530e adjacent to the openings 531e1 to 531e3 of the upper micromirror 530e, to form pixels.

That is, for example, part of the upper micromirror 530e(A) in which the openings 531e1 to 531e3 are formed, and part of the lower micromirror 503e(B) form a single pixel.

In this case, the incident light passing through the openings 531e1 to 531e3 of the upper micro-mirror 530 can be incident on the corresponding part of the lower micro-mirror 503e. When the height difference is one of the odd multiples of λ/4, the strongest diffracted light is generated.

Figure 4f is a perspective view of a partially detached aperture-based diffractive light modulator according to a sixth embodiment of the present invention.

Referring to the drawings, the aperture-based diffractive light modulator according to the sixth embodiment is different from the aperture-based diffractive light modulator according to the fifth embodiment in that the apertures are arranged in the lateral direction. Other structures are the same as the aperture-based diffractive light modulator shown in Fig. 4e.

Figure 4g is a perspective view of a partially isolated aperture-based diffractive light modulator according to a seventh embodiment of the present invention. Referring to the drawings, an aperture-based diffractive light modulator according to a seventh embodiment of the present invention includes a silicon substrate 501g, a lower reflection member 503g stacked on the silicon substrate, and an upper micromirror 510g.

The lower reflection member 503g not only functions as a lower electrode, but also reflects light to form reflected light.

The upper micro mirror 510g has openings 511g1_511g3 provided therein. In this case, the openings 511g1-511g3 are preferably formed in a rectangle, but may also be formed in any closed shape such as a circle or an ellipse.

Such apertures 511g1_511g3 allow portions of the lower micromirror 503g corresponding to the apertures 511g1_511g3, and portions of the upper micromirror 530e adjacent to the apertures 511g1_511g3 of the upper micromirror 510g, to form pixels.

That is, for example, part of the upper micromirror 510g(A) in which an aperture is formed, and part of the lower micromirror 503g(B) forming a single pixel.

In this case, the incident light passing through the openings 511g1-511g3 of the upper micro-mirror 510g can be incident on the corresponding part of the lower micro-mirror 503g, it can be understood that when the height between the upper micro-mirror 510g and the lower micro-mirror 503g When the difference is one of odd multiples of λ/4, the strongest diffracted light is generated.

Figure 4h is a perspective view of an aperture-based diffractive light modulator, partially isolated, according to an eighth embodiment of the present invention.

Referring to the drawings, the aperture-based diffractive light modulator according to the eighth embodiment of the present invention is different from the aperture-based diffractive light modulator according to the seventh embodiment of the present invention in that the apertures are arranged horizontally. Other structures are the same as in Fig. 4g. Meanwhile, in the first to sixth embodiments of the present invention, the piezoelectric material layer is used to generate the vertical actuation force, and in the seventh and eighth embodiments, the electrostatic force is used to generate the vertical actuation force. Additionally, the vertical actuation force is generated using electromagnetic force.

Meanwhile, in the fourth to eighth embodiments, one mirror layer constitutes the lower reflection member, but, as shown in the second embodiment, the lower reflection member may include a plurality of lower reflection patterns at intervals. That is, the lower reflective part includes a plurality of lower reflective patterns, and the plurality of lower reflective patterns are arranged at intervals on the surface of the insulating layer such that they correspond in position to the openings of the lower micro mirrors.

Figure 4i is a perspective view of a partially detached aperture-based diffractive light modulator according to a ninth embodiment of the present invention.

Referring to the drawings, the aperture-based diffractive light modulator according to the ninth embodiment of the present invention includes a base member 501i including a silicon substrate, a lower reflective part 510i formed in the middle of the groove of the base member 501i, and an upper micro The mirror 520i is adapted to straddle the uppermost surface of the base member 501i. The lower reflection member 510i not only reflects incident light to form reflected light, but also functions as an upper electrode.

A lower electrode layer 503i is formed at the bottom of the groove of the base member 501i. The lower electrode layer 503i, and the lower reflective member 510i (upper electrode) located in the middle of the groove, provide the lower reflective member 510i with a vertical actuation force caused by electrostatic force.

That is, the lower electrode 503i and the lower reflection member 510i attract each other due to electrostatic force, and generate a downward actuation force if a voltage is applied thereto, or they generate a downward actuation force by restoring force if no voltage is applied thereto.

Meanwhile, openings 531i1-531i3 are provided on the upper micro mirror 520i. The openings 531i1-531i3 are preferably formed in a rectangular shape, but may also be formed in any closed shape, such as circular or oval.

Such openings 531i1-531i3 allow portions of the lower reflective member 510i corresponding to the openings 531i1-531i3, and portions of the upper micromirrors 520i adjacent to the openings 531i1-531i3, to form pixels.

That is, for example, a part (A) of the upper micro mirror 520i and a part (B) of the lower micro mirror 520i on which the openings 531i1-531i3 are formed may form one pixel.

In this case, the incident light passing through the opening of the upper micromirror 520i can be incident on the corresponding part of the lower micromirror 510i, and it can be understood that the height between the upper micromirror 520i and the lower micromirror 510i When the difference is one of the odd multiples of λ/4, the strongest diffracted light is produced.

Fig. 4j shows an aperture-based light modulator according to a tenth embodiment of the present invention, which differs from the ninth embodiment in that the apertures are arranged laterally.

Meanwhile, in the fourth embodiment, and in the seventh to tenth embodiments, a silicon substrate is used as the base member, but, as shown in the third embodiment, a silicon-on-insulator substrate may be used.

5 is a perspective view showing a cell 1-D array of an aperture-based light modulator according to a first embodiment of the present invention.

Referring to the accompanying drawings, in the cell 1-D array of an aperture-based light modulator according to the first embodiment of the present invention, a plurality of cells 610a-610n with upper micro-mirrors are arranged parallel to each other in one direction, thus diffracting the incident light . Meanwhile, only the cell 1-D array of the aperture-based light modulator according to the first embodiment of the present invention is described here, but the aperture-based light modulators according to the second to tenth embodiments of the present invention can also be similarly implemented. Cell 1-D array of modulators.

6 is a perspective view showing a 2-D array of cells of an aperture-based light modulator according to a seventh embodiment of the present invention.

Referring to the drawings, in a cell 2-D array of an aperture-based light modulator according to a seventh embodiment of the present invention, a plurality of cells 710a1-710nn are arranged in X- and Y-directions. Only the cell 2-D array of the aperture-based light modulator according to the seventh embodiment of the present invention is described here, but the cell 2-D array of the aperture-based light modulator according to other embodiments of the present invention can also be implemented in the same way. D array.

Meanwhile, although the case of a single piezoelectric material layer is described in this specification, various piezoelectric material layers formed of a plurality of piezoelectric material layers may be realized.

Fig. 7 illustrates a display device using an aperture-based light modulator according to an embodiment of the present invention. As mentioned above, the optical system used, for example, in a display device can also be used in a printer, and, in this case, a drum can be used instead of the screen 818, as described below. In the case of a magnetic drum, it is not necessary to use scanning optics since the drum rotates and a separate scanning optic rotates, as in a display device.

Referring to FIG. 7 , a display device using an aperture-based light modulator according to an embodiment of the present invention includes a display optical system 802 and a display electronic system 804 . The display optical system 802 includes a light source 806, and an optical part (light optical part) 808 for converting the light emitted from the light source 806 into linear light so that the aperture-based light modulator 810 is illuminated in the form of linear light, which is based on the aperture Aperture-based light modulator 810 is used to modulate the linear light formed by optical part 808 to form diffracted light. Filtering optical part 812 is used to separate the diffracted beam modulated by aperture-based light modulator 810. stage, to pass through it through the diffracted beam desired in different stages of the diffracted beam, projection and scanning optics 816, used to condense the diffracted beam passing through the filter part 812, to scan the condensed point in a 2-D image Light (point light), and display screen 818.

Display electronics 804 are connected to light source 806 , aperture-based diffractive light modulator 810 , and projection and scanning optics 816 .

Furthermore, if linear light from the optics 808 is incident on the aperture-based light modulator 810, the modulator modulates the incident light through control of the display electronics 804 to generate diffracted light, thereby emitting it.

Figure 8a is a perspective view of an aperture-based light modulator in which linear light obliquely illuminates the plurality of upper micromirrors 812a-811n of the array of cells 811a-811n1-D. If the plurality of upper micromirrors 812a-812n is moved vertically, incident linear light is modulated due to a height difference between the upper micromirrors 812a-812n and the lower reflection part 813, thereby generating diffracted light. In this case, due to oblique incidence of light, diffracted light is emitted obliquely.

Figure 8b is a perspective view of an aperture-based diffractive light modulator where linear light illuminates vertically the plurality of upper micromirrors 812a-811n of the array of cells 811a-811n1-D. If the plurality of upper micromirrors 812a-812n is moved vertically, incident linear light is modulated due to a height difference between the upper micromirrors 812a-812n and the lower reflection part 813, thereby generating diffracted light. In this case, the 0th-order diffracted beams are emitted vertically, and the ±1st-order diffracted beams are emitted obliquely, left and right, because the light is vertically incident.

Meanwhile, the filter system 812 separates a desired order of the diffracted beam from the respective orders of the diffracted beam when the diffracted light is incident thereon. The filter system 812 includes a Fourier lens (not shown) and a filter (not shown), and selectively passes the 0 or ±1 order diffracted light beam.

Likewise, projection and scanning optics 816 include condenser lenses (not shown) and scanning mirrors (not shown), and scan the diffracted beam on screen 818 while controlling display electronics 804 .

Display electronics 804 drives scanning mirrors (not shown) of projection and scanning optics 816 . Projection and scanning optics 816 project an image on screen 818 and scan it on display screen 818 to form a 2-D image on display screen 818 .

Meanwhile, in FIGS. 7 to 8b, only the generation of a monochrome image is described, but a color image may be generated. Generation of color images can be achieved by additionally applying two light sources, two diffractive light modulators, and filters to the display optical system 802 .

As described above, the present invention intends to form one pixel using one drive deformation band unit.

In addition, the present invention intends to form a plurality of apertures by deforming the upper micro-mirror of the belt unit, thereby generating diffracted light with improved diffraction efficiency.

Also, the present invention intends to replace four or six conventional drive units with one drive unit, thereby improving manufacturing process yield and reducing manufacturing costs.

Claims (24)

1. diffractive light modulator based on perforate comprises:

(a) base component;

(b) first reflection part by the base component supporting, comprising:

The center section that separates with base component is so that limit betwixt at interval;

Back to described base component and separation with it, and be used as reflecting surface first with the reflection incident light;

Passing described first reflection part extends and forms and make and pass it with at least one perforate by incident light;

(c) second reflection part, between first reflection part and base component, described second reflection part: separate with first reflection part; And

Comprise towards the reflecting surface of first reflection part, with the incident light of reflection by described at least one perforate; And

(d) actuating unit is used for moving with respect to second reflection part center section of first reflection part, and to change the diffraction light intensity, this diffraction light uses from the light of first reflection part and the reflection of second reflection part and forms;

Wherein said actuating unit comprises:

Piezoelectric layer, be placed on the primary importance of the position of the center section that is different from first reflection part, the exercisable pucker ﹠ bloat of described piezoelectric layer, thus when the opposite side to piezoelectric layer applies voltage, towards or direction away from second reflection part on actuation force is provided.

2. the diffractive light modulator based on perforate as claimed in claim 1, wherein said base component comprises:

Substrate; And

Supporting member stretches out from substrate, and the mode that described supporting member separates with the center section of first reflection part and substrate supports the disconnected position of first reflection part, to form betwixt at interval;

Wherein, place second reflection part, with the incident light of reflection by the perforate of first reflection part with respect to substrate.

3. the diffractive light modulator based on perforate as claimed in claim 2 also is included in the insulation course that inserts between the substrate and second reflection part.

4. the diffractive light modulator based on perforate as claimed in claim 1, wherein said base component limits groove to provide at interval, in the groove of base component, place second reflection part, and first reflection part across groove, so that the intermediate portion separates with second reflection part, to form at interval betwixt.

5. the diffractive light modulator based on perforate as claimed in claim 4, wherein: first reflection part is across the groove of base component, second reflection part is by the side wall supports of the groove of base component, to separate abreast with first reflection part, second reflection part towards or removable away from first reflection part, with the incident light of reflection by perforate; And

Described actuating unit moves second reflection part with respect to first reflection part, and to change the diffraction light intensity, this diffraction light uses from the light of first reflection part and the reflection of second reflection part and forms.

6. the diffractive light modulator based on perforate as claimed in claim 4 also is included in the insulation course that inserts between the base component and second reflection part.

7. the diffractive light modulator based on perforate as claimed in claim 1, wherein first reflection part comprises:

First supporting course has the center section of placing with respect to base component, so that form betwixt at interval, described supporting course is by the base component supporting and limit formed at least one perforate, passes through incident light so that pass it; And

First minitype reflector, thereby be placed on base component and separation dorsad with it on first supporting course, with the corresponding position of at least one perforate of first supporting course on, described first minitype reflector defines at least one perforate, and form and pass it by incident light, and described first minitype reflector also has surface as reflecting surface with the reflection incident light.

8. the diffractive light modulator based on perforate as claimed in claim 1 is wherein constructed first reflection part so that the intermediate portion separates with second reflection part, to provide betwixt at interval.

9. the diffractive light modulator based on perforate as claimed in claim 1, wherein first reflection part has arrangement a plurality of perforates in one direction, and described direction is identical across the direction of base component with first reflection part.

10. the diffractive light modulator based on perforate as claimed in claim 1, wherein first reflection part has arrangement a plurality of perforates in one direction, and described direction is transverse to the direction of first reflection part across base component.

11. the diffractive light modulator based on perforate as claimed in claim 1 also comprises at least two piezoelectric layer parts that are separated from each other with respect to first reflection part on the position.

12. the diffractive light modulator based on perforate as claimed in claim 11 also comprises the electrode layer that is placed on the piezoelectric layer part, so that piezoelectric voltage to be provided.

13. the diffractive light modulator based on perforate as claimed in claim 1:

Also comprise the electrode layer that is placed on the piezoelectric material layer, so that piezoelectric voltage to be provided, and wherein, first reflection part is as the electrode of piezoelectric layer.

14. the diffractive light modulator based on perforate as claimed in claim 1:

Wherein piezoelectric layer comprises:

A plurality of piezoelectric material layers when when its both sides apply voltage, generate the pucker ﹠ bloat actuation force;

A plurality of first electrode layers insert between a plurality of piezoelectric material layers, so that piezoelectric voltage to be provided;

The second electrode lay is placed on the outermost layer of a plurality of piezoelectric material layers, so that piezoelectric voltage to be provided; And

Wherein first reflection part is as the electrode of piezoelectric layer.

15. the diffractive light modulator based on perforate comprises:

Base component;

A plurality of first reflection parts are arranged and are formed array, and each first reflection part is:

From base component therebetween partly separately, make that formation at interval betwixt;

Each first reflection part is supported by base component, and each first reflection part has the reflecting surface that leaves the base component sensing; And each first reflection part is formed with at least one perforate, makes that passing it passes through incident light;

Second reflection part between first reflection part and base component, makes to limit at interval with respect to first reflection part, and this second reflection part has reflecting surface with the incident light of reflection by perforate; And

A plurality of actuating units are used for the center section that mobile phase is answered first reflection part, and to change the diffraction light intensity, described diffraction light uses from the light of first reflection part and the reflection of second reflection part and forms;

Wherein said actuating unit comprises:

Piezoelectric layer, be placed on the primary importance of the position of the center section that is different from first reflection part, the exercisable pucker ﹠ bloat of described piezoelectric layer when the opposite side to piezoelectric layer applies voltage, provides actuation force thus on the direction perpendicular to first reflection part.

16. the diffractive light modulator based on perforate as claimed in claim 15, wherein said base component comprises:

Substrate; And

At least one supporting member stretches out from substrate, and the mode of separating with the center section and the substrate of each first reflection part supports first reflection part, to form betwixt at interval;

Wherein place second reflection part, with the incident light of reflection by the perforate of a plurality of first reflection parts with respect to substrate.

17. the diffractive light modulator based on perforate as claimed in claim 15, wherein said base component has the surface of relatively flat, the center section of a plurality of first reflection parts separates with second reflection part, make and limit betwixt at interval, and substantially parallel first reflection part of arranging, to form array.

18. the diffractive light modulator based on perforate as claimed in claim 15, wherein said base component has the part of qualification groove to provide at interval, second reflecting part is positioned at the groove of base component, and a plurality of first reflection parts are respectively across groove, make intermediate portion and corresponding second reflection part separate, forming betwixt at interval, and arrange a plurality of first reflection parts to form array.

19. the diffractive light modulator based on perforate as claimed in claim 18, wherein:

Described first reflection part is across the groove of base component;

Described second reflection part is arranged and is formed array and by the recess sidewall supporting of base component, separating abreast with corresponding first reflection part, described second reflection part towards or removable away from first reflection part, with the incident light of reflection by perforate; And

Described actuating unit moves corresponding second reflection part with respect to first reflection part, and to change the diffraction light intensity, this diffraction light uses from the light of first and second reflection parts reflection and forms.

20. a use comprises based on the display device of the diffractive light modulator of perforate:

Radiative light source;

Based on the diffractive light modulator of perforate, modulating the incident light comprises to generate diffraction light:

Base component;

A plurality of first reflection parts are arranged and are formed array, and each is supported by base component, make and between the center section of first reflection part and base component, form at interval, and each first reflection part is formed with perforate, so that pass it by light, and reflecting surface is with the reflection incident light;

By second reflection part of base component supporting, described second reflection part separates with first reflection part, and described second reflection part comprises that reflecting surface is with the incident light of reflection by the perforate of first reflection part; And

A plurality of actuating units are used for moving with respect to second reflection part center section of corresponding first reflection part, and to change the diffraction light intensity, this diffraction light uses from the light of first reflection part and the reflection of second reflection part and forms;

Optics is used for the incident light from light emitted is applied to diffractive light modulator based on perforate;

Filter optics, be used for from selecting the diffraction light of expectation level by the diffraction light of modulating based on the diffractive light modulator of perforate, make to pass it by selected diffraction light; And

Projection and scanning optical parts are used for scanning on screen by filtering the diffraction light of optics;

Wherein said actuating unit comprises:

Piezoelectric layer, be placed on the primary importance of the position of the center section that is different from first reflection part, the exercisable pucker ﹠ bloat of described piezoelectric layer, thus when the opposite side to piezoelectric layer applies voltage, towards or direction away from second reflection part on actuation force is provided.

21. a use comprises based on the printing equipment of the diffractive light modulator of perforate:

Radiative light source;

Based on the diffractive light modulator of perforate, modulating the incident light comprises to generate diffraction light:

Base component;

A plurality of first reflection parts are arranged and are formed array, and each is supported by base component, to form between part and the base component at interval therebetween, and each described first reflection part is formed with perforate, so that pass it by light, and reflecting surface is with the reflection incident light;

By second reflection part of base component supporting, described second reflection part separates with first reflection part, and described second reflection part comprises that reflecting surface is with the incident light of reflection by perforate; And

A plurality of actuating units are used for moving the center section of corresponding first reflection part, and to change the diffraction light intensity, this diffraction light uses from the light of first reflection part and the reflection of second reflection part and forms;

Optics is used for the incident light from light emitted is applied to diffractive light modulator based on perforate;

Filter optics, be used for from selecting the diffraction light of expectation level by the diffraction light of modulating based on the diffractive light modulator of perforate, make to pass it by selected diffraction light; And

The projection optics parts are used for throwing on magnetic drum by filtering the diffraction light of optics;

Wherein said actuating unit comprises:

Piezoelectric layer, be placed on the primary importance of the position of the center section that is different from first reflection part, the exercisable pucker ﹠ bloat of described piezoelectric layer, thus when the opposite side to piezoelectric layer applies voltage, towards or direction away from second reflection part on actuation force is provided.

22. the diffractive light modulator based on perforate comprises:

Substrate;

Insulation course is placed on the substrate;

At least one sacrifice layer is placed on the insulation course, and the part that is positioned under the minitype reflector that will be provided with on the described sacrifice layer is etched;

Reflection part is placed on the insulation course, lays described reflection part with the reflection incident light;

Supporting is arranged at least one sacrifice layer, and forms first perforate by it;

Minitype reflector is placed in the supporting, and described minitype reflector has reflecting surface with the reflection incident light, forms second perforate with corresponding first perforate on catoptron, passes through incident light to pass it; And

At least one actuating unit with when when it applies voltage, moves the center section of supporting, changes the diffraction light intensity thus, and this diffraction light uses from the light of minitype reflector and reflection part reflection and forms;

Wherein said substrate is a silicon substrate, and described actuating unit has piezoelectric, and piezoelectric is set on electrode, makes when to electrode application voltage the actuating unit pucker ﹠ bloat.

23. the diffractive light modulator based on perforate as claimed in claim 1, wherein first reflection part is crooked under the influence of actuating unit, thus towards or move away from second reflection part.

24. the diffractive light modulator based on perforate as claimed in claim 1, wherein first reflection part towards or away from the direction of second reflection part on elongate and flexible.

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