CN100505207C - Versatile Platform in Substrate Inspection Units - Google Patents

Abstract

Multi-purpose stage in a substrate inspection apparatus for holding, and inspecting a substrate for an external defect, including a rectangular frame, a plurality of position shifting devices on the frame, each for shifting a position thereof in correspondence to a size of the substrate to be inspected, and a holding device on each of the position shifting devices for holding or releasing a corner part of the substrate, thereby permitting to shift a position of a substrate holding device on the stage by means of simple system and operation, for stable holding of different sizes of substrates on one stage.

Description

Versatile Platform in Substrate Inspection Units

technical field

The present invention relates to a substrate inspection device, and more particularly to a multipurpose platform used in a substrate inspection device for a liquid crystal display (LCD), plasma display panel (PDP) or the like, wherein substrates of different sizes can be inspected on one platform .

Background technique

Known among devices for inspecting defects of glass substrates of flat panel displays such as liquid crystal displays (LCDs), plasma display panels (PDPs) and the like, there is a device in which macroscopic observation can be shifted to microscopic observation. In macroscopic observation, a beam of illuminating light is irradiated onto the surface of the glass substrate, and defective parts such as cracks and stains are inspected; in microscopic observation, defective parts found in macroscopic observation are enlarged and more Exactly check.

Among prior art devices for inspecting substrates, Japanese Patent Laid-Open No. H5-322783 discloses a device in which a substrate is placed on an X-Y stage movable in the X-Y direction, and the X-Y stage is two-dimensional Moving to a macroscopic observation system with a macroscopic observation function and a microscopic observation system with a microscopic observation function, this device is not suitable for inspecting flat-panel displays that are currently increasing in size.

In order to solve the above-mentioned problems of the substrate inspection device, Korean Utility Model Publication No. 20-0238929 (October 8, 2001) discloses a device in which a substrate is placed on a rotatable platform and viewed macroscopically. When the observation platform is rotated to an inclined state, macroscopic observation and detection are carried out by using a beam of illumination light from a light source arranged above the device. When the rotatable platform is in a horizontal state, when it can be rotated When a microscopic observation system with self-contained lighting device is moved on the platform, the microscopic observation detection is carried out.

However, there is a problem with the above-mentioned device for inspecting substrates in the prior art. Since the platform used to fix the substrates to be inspected is designed to be used only for substrates of one size, if it is desired to inspect substrates of other sizes, It is necessary to replace a platform conforming to the size to be inspected, or to replace the inspection device itself, which is a burden of increased cost for the user, resulting in an increase in the manufacturing cost of the substrate.

Contents of the invention

Accordingly, the present invention is directed to a multipurpose platform in a substrate inspection apparatus that substantially obviates one or more of the problems due to limitations and disadvantages of the related art.

An object of the present invention is to provide a multi-purpose platform in a substrate inspection apparatus, in which the position of a substrate holding device can be changed by a simple system and operation in order to stably hold substrates of different sizes on a single substrate. on the platform.

Other features and advantages of the present invention will be described in the following descriptions, and those skilled in the art can partially understand these features and advantages by reading the following descriptions or by implementing the present invention. These objects and other advantages of the present invention can be realized and obtained by the description of the present application, the protection scope of the present application and the structures illustrated in the accompanying drawings.

In order to achieve these objects and other advantages, and according to the object of the present invention, as introduced in the detailed description and summarized here, the multipurpose platform in the substrate inspection device includes: a rectangular frame; The shifting device on the frame, each shifting device is used to move its position corresponding to the size of the substrate to be inspected; and the fixing device on each shifting device, the fixing device is used to fix or release the substrate The corner portion, wherein the fixing device includes: a plurality of fixing members, rotatably mounted on the shifting device, for contacting a corner of the substrate on the frame, and a fixing member manipulator, with one side of the fixing member Connected for turning the fixture to a desired angle, bringing the fixture into corner contact with the substrate, and releasing the contact.

According to the present invention, since the positions of the fixing means for fixing or releasing the substrates on the frame can be moved corresponding to the size of the substrates through the shifting means, substrates of different sizes can be fixed on one platform or from released on this platform.

The displacement device includes: a first guide on the frame, a first moving plate connected to the first guide for moving along the first guide, and a first moving plate for moving the first guide along the first guide. The first driving device of the first moving plate, a second guide member installed on the first moving plate in a direction different from the direction of the first guide member, and a second guide member connected with the second guide member for moving along the second guide member. a second moving plate moved by the guide, and a second driving device for moving the second moving plate along the second guide.

It can be understood that the above description and the following detailed description of the present invention are illustrative and explanatory, and the purpose is to provide further explanation for the scope of protection claimed by the present invention.

Description of drawings

The present invention is further described by means of the accompanying drawings, which are incorporated in this application and constitute a part of the present application, together with the description, illustrate the embodiments of the present invention and clarify the inventive concept of the present invention. In the attached picture:

1 is a side view illustrating an example of a substrate inspection apparatus employing the multipurpose platform of the present invention;

Figure 2 is a front view of a multipurpose platform according to a preferred embodiment of the present invention;

Fig. 3 is a partial front view of key components of the multipurpose platform in Fig. 2;

Fig. 4 is a partial front view showing the shifting device in the multipurpose platform of Fig. 2 in a state;

Fig. 5 is a partial front view showing the shifting device in the multipurpose platform of Fig. 2 in another state;

Fig. 6 is a cross-sectional view of key components of the displacement device in the multipurpose platform in Fig. 2 .

Detailed ways

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will now be described in detail with reference to preferred embodiments of the present invention and with reference to the accompanying drawings. In order to better understand the multipurpose platform of the present invention, an example of a substrate inspection apparatus will be described with reference to FIG. 1 .

As shown in Figure 1, this substrate inspection device comprises: a platform 2, this platform is rotatably installed on a shaft 2a above a base part 1, and this platform is used for fixing the substrate to be inspected (to be inspected) substrate); a backlight device 3, which is movably installed in the up/down direction between the platform 2 and the upper surface of the base member 1, for illuminating a beam of light to the back of the platform 2.

In order to move the backlight unit 3 up/down, there is a lifting device, which includes: a base part 8 on the base part 1, for placing the backlight unit on top; Connected to the base member 8 via the base member 1; and a lift cylinder 10 under the base member 1 for moving an operation panel 9 in the up/down direction.

In order to make the hoisting device rotate the platform 2 to a target angle, the connecting rods 13 are hinged to the opposite sides of the platform 2 so that they can rotate freely, and one end of a joystick 12 is hinged to the lower end of the connecting rod 13 so that The ground is rotated by the motor 11 installed under the base part 1. In this way, when the joystick 12 rotates with the motor 11, the connecting rod 13 connected to the end of the joystick 12 is folded or unfolded to make the platform 2 rotate.

Although not shown, a microscopic observation system may be mounted on the aforementioned substrate inspection apparatus to perform microscopic observation of a substrate placed on a stage in a horizontal state while performing linear reciprocating motion.

Meanwhile, FIG. 2 schematically illustrates the platform 2 .

Referring to Fig. 2, platform 2 comprises: a rectangular frame 21 with central opening, a plurality of fixing devices, each fixing device is installed on the angle of frame 21 so that can move along diagonal line or longitudinal direction, and this fixing device is used for fixing corner of the substrate.

Referring to Fig. 3, the fixing device includes: a cylinder 231; a joystick 234, the joystick is connected with the joystick 232 on the cylinder 231, and the joystick is used to linearly reciprocate along the LM guide along with the movement of the joystick 232 a certain distance; and a plurality of fixing parts 235 and 236, each fixing part is connected with the joystick 234 for rotating a certain angle so as to fix or release a corner of the substrate placed on the frame 21 for inspection.

Of the fixtures 235 and 236, the "L" shaped fixture 235 secures the upper and lower sides of one corner of the substrate, while the "I" shaped fixture 236 secures the sides of the corner.

At the same time, the fixing device is mounted on a displacement device for selective positional movement on the frame 21 along the diagonal or lengthwise direction. In order to move to a position corresponding to the size of the substrate to be inspected.

The displacement means for changing the position of the fixing means will be described in more detail with reference to FIGS. 5 and 6 . The displacement device includes: an "L" shaped recess 22 at each corner of the frame 21 for mounting the displacement device; a plurality of LM guides 241 (three in this embodiment) along the frame The diagonal direction of is installed in the "L"-shaped recess 22; and an "L"-shaped first moving plate 243 on the LM block 242 of the LM guide 241.

Moreover, there is a first air cylinder 245 for moving the first moving plate 243 along the LM guide 241, and a fixed block 247 is at one end of the operating rod 246 of the first air cylinder 245, and the fixed block is fixed on the first moving plate 243. the bottom of the plate 243.

There are a plurality of LM guides 251 (two in this embodiment) along the length (or width) direction of the frame on the upper surface of the first moving plate 243, and a first LM block 252 on the LM guide 251. Two moving plates 253 .

In order to move this second moving plate 253, there is a second air cylinder 255 on the upper surface of the first moving plate 243, and a fixed block 257 is at one end of the operating rod 256 of the second air cylinder 255, and the fixed block is fixed on the second Move the bottom of the plate 253 .

Under the control of a control unit (not shown) of the substrate inspection apparatus, when compressed air is supplied inside, the first and second air cylinders 245 and 255 are driven.

The operation of the multipurpose platform of the present invention will be described as follows.

The multipurpose platform of the above embodiments of the present invention can fix substrates of three sizes: (length mm×width mm) 680×880, 610×720, 600×720.

When the size of the substrate to be inspected is changed to 610×720 so as to be installed on the platform, the control unit of the substrate inspection device provides compressed air to the first air cylinder 245 to move the operating rod 246 forward, and correspondingly With the movement of the rod 246, the first moving plate 243 moves forward in a diagonal direction along the LM guide 241, corresponding to which the distance between (different) fixtures is shortened corresponding to the size of the substrate.

In this state, when the substrate is placed on the frame 21, compressed air is supplied to the air cylinder 231 to move the operating rod 232 and the operating rod 234 connected thereto forward, and the fixing members 235 and 236 rotate and fix the substrate. corner.

When a substrate with a size of 600×700 is to be mounted, the substrate is 10 mm shorter than the previous substrate to be inspected. As previously described, compressed air is supplied to the first cylinder 245 to move the first moving plate 243 inwardly in a diagonal direction, and compressed air is supplied to the second cylinder 255 to move the operating rod 256 forward. Then, the second moving plate 253 connected to the operating rod 256 is moved inwardly by 10 mm in the length direction along the LM guide 251 .

In this state, when the substrate is placed on the frame 21, when compressed air is supplied to the air cylinder 231 as described above, the fixing members 235 and 236 rotate, and fix the corners of the substrate.

In order to release the substrate from the fixed state, the operating rod 232 on the cylinder 231 is moved backwards, rotating the fixing member in the opposite direction.

Meanwhile, although it has been described in the previous embodiment that the stage can fix substrates of three sizes by moving the first and second moving plates 243 and 253 in the diagonal and lengthwise directions, the difference from this embodiment is that , it is also possible to make the platform hold three sizes of substrates by moving the first and second moving plates 243 and 253 by required distances in width and length, or diagonal and width/length directions.

Stepwise movement of the moving plate can easily be achieved by using other drive means instead of cylinders, examples of drive means for moving the moving plate are motors, ball screw systems, or belt and sprocket systems, and the like.

In addition, although it has been described in the previous embodiments that the multipurpose platform can fix three types of substrates to be inspected, it is also possible to use the multipurpose platform to fix more than three kinds of substrates by moving the fixing device in different directions. for inspection.

As has been explained above, the multipurpose platform in the substrate inspection device of the present invention can fix the substrate by moving the fixing device (the fixing device is corresponding to the size of the substrate) without changing the substrate inspection device or the platform. ) to fix substrates of different sizes on a platform for inspection. This avoids wasted expense, time, and labor due to replacement of substrate inspection devices or platforms.

The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and changes. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

Claims (9)

1. the versatile platform in the Substrate checking device, described platform is used for fixing substrate and checks the External Defect of substrate, and described platform comprises:

The framework of a rectangle;

The size that a plurality of shift units on described framework, each shift unit are used for corresponding substrate to be checked moves the position of oneself; And

Fixture on each shift unit, described fixture is used for fixing or discharges the bight of substrate,

Wherein said fixture comprises:

A plurality of fixtures are rotatably installed on the described shift unit, be used for described framework on substrate angular contact and

A fixture operating device links to each other with a side of described fixture, is used for described fixture is turned to the angle of needs, makes the angular contact of fixture and substrate, and discharges this and contacts.

2. versatile platform according to claim 1, wherein said shift unit comprises:

First guide on described framework,

One is connected with described first guide and is used for first movable plate that moves along first guide,

First drive unit that is used for moving described first movable plate along described first guide,

Edge direction different with the direction of described first guide is installed in second guide on described first movable plate,

One be connected with described second guide be used for second movable plate that moves along second guide and

Second drive unit that is used for moving described second movable plate along described second guide.

3. versatile platform according to claim 1, wherein said fixture operating device comprises:

A cylinder,

A joystick is connected with a side of described fixture, be used on described cylinder the action bars reciprocating motion and

A guide is used to guide described joystick to move.

4. versatile platform according to claim 2, wherein:

Described a plurality of fixture is rotatably installed on described second movable plate, be used for described framework on an angular contact of substrate.

5. versatile platform according to claim 4, wherein said fixture operating device comprises:

A cylinder,

A joystick is connected with a side of described fixture, be used on described cylinder the action bars reciprocating motion and

A guide is used to guide described joystick to move.

6. versatile platform according to claim 2, wherein said first guide is installed along the diagonal of described framework, is used to make described first movable plate to move along described framework diagonal.

7. versatile platform according to claim 6, wherein said second guide is installed along the width or the length direction of described framework, is used to make described second movable plate to move on described first movable plate along the width or the length direction of described framework.

8. versatile platform according to claim 6, wherein said first drive unit are cylinders with the parallel installation of described first guide.

9. versatile platform according to claim 7, wherein said second drive unit be mounted on described first movable plate with the parallel cylinder of described second guide.

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