CN100517080C - Handling device - Google Patents

Abstract

The invention provides a conveying device, which conveys belt-shaped workpieces in a stable state without exerting load. The supplying winding drum rotation part(1) of the conveying device(A) is arranged at the positon which is higher than that of the supplying side's first guiding roller(2); the supplying side's second guiding roller(3) is arranged at the same or a lower position than that of the first guiding roller(2), and at a higher positon than the first conveying roller(4); the winding drum rotation part(9) is arranged at the positon which is higher than that of the winding side's second guiding roller(8); the winding side's second guiding roller(8) is arranged at the same or a higher position than that of the winding side's first guiding roller(7), and at a lower position than the winding drum rotation part(9). There is adsorbing unit(42) using to adsorb the workpiece on the roller's surface(41a) on the first conveying roller(4) and the second conveying roller(6).

Description

Handling device

technical field

The present invention relates to a conveying device that conveys a film-shaped tape workpiece to a processing unit from a supply side, and conveys the workpiece processed by the processing unit to a winding side.

Background technique

In general, electrical circuit base materials used for circuit boards (printed circuit boards) of various small electrical equipment such as mobile phones and mobile devices are difficult to use thick plate-shaped materials in the manufacturing process because the body is light, thin and short. Therefore, it has to be processed with a thin, high-precision film-like tape (hereinafter referred to as a workpiece).

In such a work, the thickness of the blank actually used is about 0.1 mm in the prior art, and it tends to become thinner to 0.06 mm in recent years. And recently, it is desired to use thin and wide strip-shaped workpieces with a thickness of 0.05 mm or less and a width of 100 to 250 mm.

When a circuit board is manufactured from such a strip-shaped workpiece, problems such as warping of the left and right edges of the workpiece due to slack during conveyance arise. As a conveyance mechanism that solves this problem, a horizontal conveyance type conveyance mechanism that conveys a workpiece in a horizontal state so that the workpiece can be reliably processed is known (for example, refer to Patent Document 1).

This conveying mechanism is a device for conveying a strip-shaped workpiece for the purpose of manufacturing a circuit board. It is used in a state assembled in an exposure device. circuit pattern.

The workpiece sent out toward the exposure table is in a slack state due to its own weight at the part of the horizontal conveyance. In order to prevent this slack, a holding mechanism is provided in the conveying mechanism. The holding mechanism clamps the workpiece by pressing rollers to adjust the slack (for example, see Patent Document 1).

In addition, in the transfer mechanism, there must be no load acting on the workpiece at the part where the transfer direction is changed. In the conveying mechanism, in order to transport the workpiece to the exposure table and make it stationary on the exposure table without applying excess tension, a so-called air-filled container (boxes 41, 51 in Patent Document 1) for adjusting the tension of the workpiece is provided. ).

Most of such exposure apparatuses are of a horizontal conveyance vertical exposure type apparatus that irradiates exposure light while conveying a workpiece horizontally as disclosed in Patent Document 1. In addition, such a transfer mechanism is also known: in order to prevent dust in the air from adhering to the workpiece or mask to improve resolution, the exposure table is set in the vertical direction, and the workpiece is conveyed in the vertical direction (for example, refer to Patent Document 2 to Patent Document 4).

In the conveyance mechanism disclosed in patent document 2 - patent document 4, the roller which supplies the conveyed workpiece to an exposure table is used.

Furthermore, there is also known a direction switching device that switches the conveying direction in order to convey the workpiece to the processing unit in an appropriate conveying direction. This direction changing device is a device that blows air from a gas ejection hole of a thin plate pierced on the surface of the fixed shaft, and floats the workpiece by air pressure to change the conveying direction of the workpiece (for example, refer to Patent Document 5).

[Patent Document 1] Japanese Patent No. 2836787 (Claims, Figures 1 and 2)

[Patent Document 2] Japanese Unexamined Patent Application Publication No. 2005-326550 (claims, FIG. 1 )

[Patent Document 3] Japanese Patent Laid-Open No. 2005-91903 (Claim 1, FIG. 1 )

[Patent Document 4] Japanese Patent No. 2798158 (Claims, FIG. 1 )

[Patent Document 5] Japanese Patent No. 2788207 (paragraphs 0011 to 0012, FIGS. 1 to 3)

However, the following problems exist in the conventional transport mechanism.

In the conveying mechanism described in Patent Document 1, the air container reduces the possibility that the workpiece sent out from the supply reel is loosened by its own weight, so that excess tension acts.

However, in such a transfer mechanism, since the workpiece is horizontal on the exposure stage and the mask is in contact with the workpiece, as the workpiece becomes thinner and wider, its own weight increases and tends to slack, so there is a problem that the slack cannot be eliminated.

Moreover, in such a conveying mechanism, since the mask and the workpiece are in close contact or in close contact, dust and the like may adhere to the mask and the workpiece due to static electricity and be transferred. The problem of reduced resolution.

In addition, in the transfer mechanism of Patent Document 2 to Patent Document 4, the front and rear positions of the exposure table are held by the pressing rollers that clamp both sides of the workpiece, and the mask, the optical system, and the workpiece can be aligned smoothly. , but since both sides of the workpiece are clamped, there is a problem of excessive load acting on the workpiece.

In addition, in an exposure apparatus that intermittently transports and simultaneously processes workpieces step by step, it is necessary to eliminate slack in the workpiece that occurs in the conveyance path. In addition, in order not to transfer dust and the like to the workpiece and to enable exposure of a high-resolution mask pattern, it is desirable to convey the workpiece in a stable state without applying a load to the workpiece.

Contents of the invention

Therefore, the present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a transport mechanism capable of transporting a strip-shaped workpiece in a stable state without applying a load.

As a means to solve the problem, the conveying device of the first viewpoint is a conveying device for conveying a strip-shaped workpiece to a processing section arranged in a vertical direction for processing, and includes: a supply reel rotating section for conveying the workpiece The supply reel rotates; the supply side first guide roller and the supply side second guide roller guide the workpiece sent out from the supply reel by the rotation of the above supply reel rotating part; the supply side slack absorbing unit, It applies tension to the workpiece between the first guide roller on the supply side and the second guide roller on the supply side; the first conveying roller and the second conveying roller, which are arranged above and below the processing section, are used to For conveying the workpiece from the second guide roller on the supply side along the processing section; the first guide roller on the winding side and the second guide roller on the winding side, which guide the workpiece from the second conveying roller; a winding-side slack absorbing unit that applies tension to the workpiece between the winding-side first guide roller and the winding-side second guide roller; and a winding drum rotating portion that causes the winding from The winding reel of the workpiece of the second guide roller on the winding side rotates. Wherein the supply reel rotation part is arranged at a position higher than the first guide roller on the supply side, and the second guide roller on the supply side is arranged at the same or lower position than the first guide roller on the supply side, and the supply The second guide roller on the winding side is arranged at a position higher than the first conveying roller, the winding drum rotating part is arranged at a position higher than the second guiding roller on the winding side, and the second guiding roller on the winding side The first guide roller on the winding side is arranged at the same position or higher than the first guide roller on the winding side, and the second guide roller on the winding side is arranged at a position lower than the winding drum rotation part.

According to the above structure, in the conveying device, the strip-shaped workpiece wound on the supply reel is conveyed to the supply side slack absorbing unit side by the winding reel rotation part and the supply side first guide roller, and then passed by the supply side first guide roller. The two guide rollers, the first conveyance roller, the second conveyance roller, and the first guide roller on the winding side are delivered to the processing unit. In addition, the conveying device winds the workpiece located in the slack absorbing unit on the winding side on the winding drum through the second guide roller on the winding side and the winding drum rotating part. When the first conveying roller and the second conveying roller intermittently convey the workpiece corresponding to the predetermined pitch for processing the workpiece in the processing section, the workpiece is conveyed in the vertical direction while adsorbing the workpiece to the surface of the roller through the adsorption hole. .

Furthermore, in the conveyance path, the conveyance of workpieces performed continuously can be conveyed without interlocking each other with the supply-side slack absorbing unit and the winding-side slack absorbing unit as the boundary.

In addition, the workpiece is conveyed obliquely downward based on the positional relationship from the supply reel rotation unit to the first conveying roller, so that the slack caused by the workpiece's own weight is eliminated. Furthermore, since the workpiece is conveyed obliquely upward due to the positional relationship from the second conveying roller to the winding drum rotating portion, slack due to the deadweight of the workpiece is eliminated.

The transfer device according to the second viewpoint has a structure in which a workpiece position adjustment unit is provided on the second guide roller on the supply side and the first guide roller on the take-up side. The amount of positional deviation makes the workpiece move along the axial direction of the second guide roller on the supply side and the first guide roller on the winding side.

According to the above configuration, the transfer device adjusts the axial position and inclination of the workpiece on the processing section by moving the second guide roller on the supply side and the first guide roller on the take-up side in the axial direction by the workpiece position adjustment unit. , so that higher precision workpiece positioning can be performed.

The invention of the conveying device according to the third viewpoint has a structure in which the roller bodies of the first conveying roller and the second conveying roller are molded from synthetic resin.

According to the above configuration, since the roller bodies of the first and second conveyance rollers in the conveyance device are formed of synthetic resin, fine vibrations of the workpiece being conveyed are absorbed by the resin roller bodies.

The invention of the conveying device of the fourth viewpoint has such a structure: between the supply reel and the first guide roller on the supply side, a workpiece connecting unit that can be freely installed and removed is provided in the conveying device, and the workpiece connecting unit It is used to connect the last end of the workpiece being processed by the processing unit to the leading end of the next new workpiece.

According to the above configuration, the conveyance device can connect the last end of the strip-shaped workpiece being processed by the processing unit to the leading end of a new strip-shaped workpiece to be used next in the conveyance path by including the workpiece connecting means.

The invention of the conveying device according to the fifth aspect has a structure in which the processing unit is an exposure table for exposing the pattern of the mask on the workpiece conveyed step by step by the conveying device.

According to the above configuration, in the conveying device, when the processing unit is an exposure table, the belt-shaped workpiece can be conveyed in a stable state step by step according to the processing of the exposure device, and the pattern of the mask can be exposed on the workpiece. superior.

The invention of the conveying device according to the sixth viewpoint has such a structure that, on the basis of the fifth viewpoint, when the positional deviation of the workpiece on the processing part is below a threshold value, by moving the mask, a section that is stationary on the exposure stage The positional deviation between the workpiece and the mask is approximately zero, and when the positional deviation of the workpiece on the processing part is greater than a threshold value, the second guide roller on the supply side and the first guide roller on the winding side are moved in the axial direction, Thus, the next section of a section of the workpiece that is still on the exposure table is moved to a predetermined position on the exposure table.

According to the above configuration, by moving the second guide roller on the supply side and the first guide roller on the take-up side in the axial direction, the posture (inclination) of the next piece of work being conveyed coincides with a predetermined position on the exposure table. Therefore, the positional deviation between the next section of the workpiece and the mask transported to the exposure stage becomes smaller, thereby shortening the alignment time between the mask and the workpiece.

The invention of the conveying device according to the seventh aspect has a structure in which, on the basis of the fifth aspect, when the amount of positional deviation of the workpiece on the processing part is below a threshold value, the mask is moved to make the workpiece stationary on the exposure table. The positional deviation between the workpiece and the workpiece is approximately zero. When the positional deviation of the workpiece on the processing part is greater than the threshold value, the feed rate of the first conveying roller and the second conveying roller to the workpiece is set to make it stationary The next section of a section of workpiece on the exposure table is moved to a predetermined position on the above-mentioned exposure table.

According to the above structure, the feed rate of the workpiece by the first conveying roller and the second conveying roller is set by using a section that is stationary on the exposure table, so that the next conveyed section of the workpiece coincides with the predetermined position on the exposure table. Therefore, the positional deviation between the next section of the workpiece and the mask transported to the exposure stage becomes smaller, thereby shortening the alignment time between the mask and the workpiece.

The invention of the conveying device according to the eighth viewpoint has such a structure that the first conveying roller and the second conveying roller have adsorption holes for adsorbing the workpiece on the surface of the rollers, and the first conveying roller and the second conveying roller are connected with the Connect to the adsorption unit that absorbs the workpiece through the adsorption hole.

According to the above configuration, in the conveying device, the workpiece is conveyed while being sucked when being conveyed to the processing unit, so that the workpiece does not slip on the roller surface, and the feeding amount corresponding to one stage can be accurately conveyed.

The invention of the conveyance device according to the ninth viewpoint has a structure in which the first guide roller on the supply side, the second guide roller on the supply side, the first guide roller on the winding side, and the second guide roller on the winding side There are adsorption holes for the workpiece to be adsorbed on the roller surface, and the first guide roller on the supply side, the second guide roller on the supply side, the first guide roller on the winding side, and the second guide roller on the winding side Connected to a suction unit for suctioning workpieces through suction holes.

According to the above configuration, in the conveying device, the workpiece is sucked by the first guide roller on the supply side, the second guide roller on the supply side, the first guide roller on the winding side, and the second guide roller on the winding side. Therefore, the workpiece will not slip on the roller surface, the workpiece can be smoothly sent out from the supply reel, and the workpiece can be smoothly wound on the take-up reel.

The conveying device of the present invention can convey the workpiece from the supply reel to the processing section and from the processing section to the take-up reel without clamping the workpiece and without loosening the workpiece, so it can be used without applying an excessive load to the workpiece. The workpiece can be transported in a stable state and can be transported to the correct position in the processing section.

Description of drawings

FIG. 1 is a block diagram showing a transport mechanism according to an embodiment of the present invention.

Fig. 2 is a schematic perspective view showing a transport mechanism according to an embodiment of the present invention.

3 is an enlarged cross-sectional view showing a supply-side first guide roller in the conveyance mechanism according to the embodiment of the present invention.

4 is an enlarged cross-sectional view showing a supply-side second guide roller in the conveyance mechanism according to the embodiment of the present invention.

5 is an enlarged cross-sectional view showing a first conveyance roller in the conveyance mechanism according to the embodiment of the present invention.

Fig. 6 is a schematic configuration diagram showing a transport mechanism according to an embodiment of the present invention.

FIG. 7 is a flowchart showing the operation of the transport mechanism according to the embodiment of the present invention.

8 is a diagram showing a modified example of the conveyance mechanism according to the embodiment of the present invention, and is a schematic enlarged view of a main part showing an installed state of a workpiece connecting unit.

Label description

1: Supply reel rotating part; 2: The first guide roller on the supply side; 3: The second guide roller on the supply side; 4: The first conveying roller; 5: Exposure device; 6: The second conveying roller ;7: The first guide roller on the winding side; 8: The second guide roller on the winding side; 9: The rotating part of the winding reel; 11: The workpiece connection unit; 32: The workpiece position adjustment unit; 41, 61 : roller body; 41a, 61a: roller surface; 41b: adsorption hole; 42, 62: adsorption unit; 51: processing part; Winding reel; D1: supply side slack absorbing unit; D2: winding side slack absorbing unit; M: mask; T: tape (work); T1: new tape (new work); T1a: leading end ; T2: Tape being processed (workpiece being processed): T2a: Last tail.

Detailed ways

Next, an example of the transport mechanism according to the embodiment of the present invention will be described with reference to FIGS. 1 to 7 .

First, a conveyance mechanism A according to an embodiment of the present invention will be described, and then a belt-shaped workpiece (hereinafter referred to as "belt") T conveyed by the conveyance mechanism A will be described.

FIG. 1 is a block diagram showing a transport mechanism according to an embodiment of the present invention. Fig. 2 is a schematic perspective view showing a transport mechanism according to an embodiment of the present invention.

<<Structure of belt (workpiece)>>

As shown in FIGS. 1 and 2 , the tape T is composed of a film-shaped tape material such as a flexible substrate used as a circuit board or a coil used for hooping a resin molded product. The tape T is made of, for example, a thin and wide member with a width of 160 mm and a total tape length of 200 m, and is wound around the supply reel rotating unit 1 . On both the left and right edge portions of the tape T, some perforations (not shown) are formed, and some have no perforations.

In addition, the conveyance mechanism A of the present invention is a mechanism for conveying the tape T. Hereinafter, as an example of an embodiment of the present invention, a case of conveying a tape (film-shaped tape) T used as a material for a flexible substrate will be described as an example. .

<<The structure of the transport mechanism>>

The conveyance mechanism A is a device that intermittently conveys the tape T piece by piece toward the exposure table 51 a (processing unit 51 ) provided in the vertical direction in accordance with the processing of each tape T, which is a processing unit of the exposure device 5 . This conveyance mechanism A includes: a supply reel rotating part 1, which is installed in the reel hole in the center of the supply reel B1 wound with the tape T, and is used to rotate the supply reel B1; supply-side first guide roller 2; and supply-side second guide roller 3. In addition, the conveying mechanism A includes: the first conveying roller 4 and the second conveying roller 6 for conveying the tape T arranged at the upper and lower positions of the processing part 51; side second guide roller 8; and a winding reel rotation part 9 for rotating the winding reel B2 for winding the tape T. The conveying mechanism A further includes a supply-side slack absorbing unit D1 and a winding-side slack absorbing unit D2 for absorbing slack of the tape T during conveyance.

<Structure of supply roll rotating part>

The supply reel rotating part 1 is a member for supporting the tubular supply reel B1 of the tape T wound with the circuit board blank and feeding out the tape T. The supply reel rotating part 1 is arranged on the device. It is mounted on a casing (not shown), and can freely rotate around the shaft part on which the shaft part of the supply roll B1 is attached, and is driven to rotate by a driving motor not shown.

Further, the supply roll B1 is constituted by, for example, a roll with a diameter of 750 mm in the winding portion, and has flange portions (not shown) on the left and right edges. The tape T wound on the supply reel B1 is drawn by the first conveyance roller 4 , rotates together with the supply reel rotating unit 1 , and is sent out to the first guide roller 2 on the supply side.

<Structure of the first guide roller on the supply side>

As shown in FIGS. 1 and 2 , the first guide roller 2 on the supply side is an auxiliary roller, and the tape T wound on the supply reel B1 is wound on the supply side so as to be sent out toward the supply-side slack absorbing unit D1. On the first guide roller 2, the first guide roller 2 on the supply side is arranged so as to be rotatable around the shaft portion. The first guide roller 2 on the supply side is disposed below the supply reel rotating unit 1, and the belt T conveyed obliquely downward from the supply roller rotating unit 1 is arranged so as to be guided from the first guide roller on the supply side by its own weight. The roller 2 hangs down substantially vertically.

FIG. 3 is an enlarged cross-sectional view showing the supply-side first guide roller 2 in the conveyance mechanism according to the embodiment of the present invention.

As shown in Figure 3, the first guide roller 2 on the supply side includes: a roller body 21 that is wound with a belt T and is in contact with the surface of the belt T; A bearing 23 rotatably provided on the support shaft 22 ; and a device case 24 holding the bearing 23 .

Moreover, the winding-side 2nd guide roller 8 (refer FIG. 2) mentioned later has the same structure as this supply-side 1st guide roller 2, for example.

<Structure of supply side slack absorption unit>

Returning to Fig. 1 and Fig. 2 again, the supply-side slack absorbing unit D1 is arranged at a position for accommodating the belt T between the supply-side reel rotating part 1 and the supply-side second guide roller 3, and is for the rotation of the supply-side reel. The belt T supplied by section 1 applies tension to the device to absorb the slack. More specifically, the supply-side slack absorbing unit D1 is a device that applies tension to the tape T sent out from the supply reel rotating unit 1, and makes the tape T slack in a U-shape due to its own weight in the box, so that When the belt T is conveyed between the supply reel rotating part 1 and the supply side first guide roller 2, and between the supply side second guide roller 3 and the first conveyance roller 4, excessive tension is not generated. load or slack. The supply-side slack absorbing unit D1 includes a cylindrical box D1a having a conveyance space, and the belt T passing through the opening formed on the upper side can hang down in a U-shape in the conveyance space by its own weight. In this box D1, the tape T passing through the opening formed on the upper side is conveyed from the upstream to the downstream side in the conveying direction of the tape T, sags due to its own weight, and is pulled by the first conveying roller 4 toward the tape T. The downstream of the conveying direction of T is sent to the upper side. The box D1a is constituted by, for example, a quadrangular bottomed cylindrical body having openings up and down.

<Structure of the second guide roller on the supply side>

4 is an enlarged cross-sectional view showing a supply-side second guide roller in the conveyance mechanism according to the embodiment of the present invention.

The second guide roller 3 on the supply side shown in FIG. The workpiece position adjustment unit 32 moves the belt T in the width direction indicated by the arrow b (the axial direction indicated by the arrow a). The supply-side second guide roller 3 includes: a motor M1; a device case 33 holding the motor M1; and a ball screw 34 fixed to the motor shaft M1a. In addition, the second guide roller 3 on the supply side includes: a freely rotatable roller body 31 for conveying the belt T; a nut 35 that moves in the axial direction by the rotation of the ball screw 34; A key shaft 36; a support shaft 37 integrally operating with the key shaft 36; and a bearing 38 interposed between the support shaft 37 and the roller body 31.

The workpiece position adjusting unit 32 is a device for moving the position of the roller body 31 in the axial direction (the width direction of the belt T) in order to adjust the position of the belt T on the processing section 51 . The workpiece position adjustment unit 32 includes, for example, a motor M1 , a ball screw 34 , a nut 35 , a key shaft 36 , a support shaft 37 and a roller body 31 .

The motor M1 shown in FIG. 4 moves the roller body 31 along the axial direction (the width direction of the belt T) shown by the arrow a while rotating, and the motor M1 rotates forward and reverse according to the signal of the control device 10, so that The tape T wound around the roller body 31 moves in the width direction indicated by the arrow b. The supply side second guide roller 3 is held at a predetermined position of the device housing 33 .

The ball screw 34 is connected to the motor shaft M1a of the motor M1 and rotates integrally therewith. Furthermore, a reduction gear mechanism may be interposed between the ball screw 34 and the motor shaft M1a. The nut 35 is screwed to the ball screw 34 and mounted on a key shaft 36 formed with a key groove. By the rotation of the ball screw 34, the nut 35 moves in the axial direction indicated by the arrow a.

The key shaft 36 rotates integrally with the nut 35 and moves in the axial direction indicated by the arrow a. The support shaft 37 is fastened to the bottom surface of the key shaft 36 , and the support shaft 37 rotates while moving in the axial direction together with the key shaft 36 , and both ends thereof are pivotally supported by bearings 38 .

The bearing 38 is rotatably attached to the support shaft 37 and is assembled so as to move in the axial direction (the direction indicated by the arrow a) integrally with the support shaft 37 . The roller body 31 moves in the axial direction indicated by the arrow a together with the bearing 38 , and the roller with a T is wound around it. The roller body 31 has a tubular shape having flanges at both ends, for example. In this roller body 31, at least the roller surface 31a thereof is formed of synthetic resin so as to absorb microvibrations. In this case, the synthetic resin forming the roller surface 31a is preferably a soft resin having cushioning properties, and may only cover the roller surface 31a.

The second guide roller 3 on the supply side of the above structure rotates and performs rectilinear motion of the intermediate member composed of the ball screw 34, the key shaft 36, the support shaft 37 and the bearing 38 by the rotation of the motor M1, so that the roller The sub-body 31 moves in the axial direction so that the position of the belt T can be adjusted. The second guide roller 3 on the supply side having the roller body 31 capable of moving in the axial direction can be correctly aligned by moving the position of the roller body 31 in the axial direction to adjust it to an appropriate position. The desired position in the positioning of the band T in the processing unit 51 .

In addition, the second guide roller 3 on the supply side shown in FIG. 4 is only a roller that directly rotates the support shaft 37 by the motor M1, and may also be rotated by other motors or linear slide mechanisms (not shown). A structure in which the second guide roller 3 on the supply side moves in the axial direction as a whole.

In addition, the winding-side 1st guide roller 7 (refer FIG. 2) mentioned later has the same structure as this supply-side 2nd guide roller 3, for example.

<Structure of the first conveying roller>

5 is an enlarged cross-sectional view showing a first conveyance roller in the conveyance mechanism according to the embodiment of the present invention.

The first conveying roller 4 shown in FIG. 5 is a roller (refer to FIGS. 1 and 2 ) that conveys the belt T from the second guide roller 3 on the supply side to the exposure table 51 a (processing section 51 ), and is intermittently passed by the motor M2. The first conveying roller 4 is driven to rotate, thereby conveying the belt T step by step. The first conveying roller 4 has an adsorption hole 41b for adsorbing the tape T on the roller surface 41a of the roller body 41, and is connected to the first conveying roller 4 through which the tape T is adsorbed through the adsorption hole 41b. Adsorption unit 42. Therefore, the first conveyance roller 4 can prevent the belt T conveyed by the rotation of the first conveyance roller 4 from idling.

Moreover, the first conveying roller 4 includes: a motor M2 that rotates the roller body 41; a device housing 43 that supports the motor M2 and the motor shaft M2a; and an air suction passage 44a that is connected to the motor shaft M2a and has the suction unit 42. The rotating shaft 44; the exhaust part 45 communicated with the suction passage 44a and connected with the suction pump (not shown).

And, as shown in FIG. 1 , the first conveyance roller 4 is arranged on the downstream side of the conveyance direction of the supply-side slack absorbing unit D1, and is arranged directly above the exposure stage 51a so that the belt T is positioned at the center of the exposure stage 51a. The manner of the position is parallel to the surface of the exposure table 51a.

The roller body 41 shown in FIG. 5 is a hollow rotating body fixed to the rotating shaft 44 rotated by the motor M2 for conveying the belt T, and its both ends in the axial direction are formed as tubes having flanges. shape. The roller body 41, at least the roller surface 41a on which the belt T is wound, is formed of a synthetic resin such as soft resin having cushioning properties so as to easily absorb micro-vibrations of the belt T.

A plurality of adsorption holes 41b are perforated on the roller surface 41a. Therefore, the tape T can cool the roller surface 41a by means of the flow of air in the adsorption holes 41b of the roller surface 41a on which it is wound.

Furthermore, the roller surface 41a may be made of stainless steel or a product obtained by tightly winding a stainless steel wire.

The suction unit 42 is a device that sucks the tape T wound on the roller surface 41a of the roller body 41 by means of the suction force of a suction pump (not shown), so that the tape T and the roller surface 41a Close contact. This adsorption unit 42 has: an adsorption hole 41b for sucking air that sucks the belt T so as to be in close contact with the roller surface 41a; a roller inner space 41c into which the air sucked from the adsorption hole 41b is sent; An air intake passage 44a communicated with the inner space 41c; an exhaust portion 45; and a suction pump.

The first conveying roller 4 has the above-mentioned resin roller body 41 and the suction unit 42, and is configured to smoothly convey the tape T while being adsorbed to the roller surface 41a by the negative pressure of air.

The motor M2 shown in FIG. 5 rotates the roller body 41 to intermittently convey the tape T wound around the roller body 41 . The motor M2 is electrically connected to the control device 10, and its rotation is controlled (see FIG. 1 ).

The device case 43 is a unit for supporting the motor M2 and the motor shaft M2a at predetermined positions, and the first conveying roller 4 is arranged at a predetermined height through the device case 43 (see FIG. 1 ).

The rotating shaft 44 is a member that functions as a shaft for transmitting the rotation of the motor M2 to the roller body 41 to rotate the roller body 41, and for sending the air inside the roller body 41 to the suction pump ( not shown) piping. One end of the rotating shaft 44 is connected to the motor shaft M2a, and the other end is provided with an exhaust unit 45 of the adsorption unit 42 . The rotating shaft 44 is provided with a suction port 44b for sucking the air in the roller body 41 in the central part, and is provided with a discharge port 44c for discharging air to the exhaust part 45 at the end of the suction channel 44a. The suction port 44b to the discharge port 44c are hollow.

Also, a suction pump (vacuum pump) not shown is a negative pressure generating device that is connected to the exhaust unit 45 through a pipe and a leak valve, and sucks the roller surface 41a through the suction passage 44a and the suction hole 41b. air, and the tape T wound on the roller surface 41a is sucked by negative pressure.

Moreover, the 2nd conveyance roller 6 mentioned later has the same structure as this 1st conveyance roller 4, for example.

<Structure of processing department>

Here, the processing unit 51 shown in FIG. 2 will be described. The processing part 51 is arrange|positioned directly under the 1st conveyance roller 4, and is a device which performs predetermined processing to the tape T supplied from this 1st conveyance roller 4. As shown in FIG. This processing part 51 is arrange|positioned along the processing surface at the site|part where the belt T between the 1st conveyance roller 4 and the 2nd conveyance roller 6 is conveyed vertically downward. Moreover, in this embodiment, the processing part 51 is the exposure stage 51a which performs exposure processing in the exposure apparatus 5 mentioned later. Moreover, the exposure stage 51a has formed in the suction hole which sucks the tape T which is not shown in figure, and the tape T is sucked and hold|maintained step by step.

<Structure of the second transport roller>

The second conveying roller 6 is arranged on the downstream side of the conveying direction of the exposure table 51a, and is a roller that conveys the tape T processed by the exposure table 51a to the winding side. The second conveying roller 6 is arranged on the first conveying roller. Sub-4 and exposure table 51a (processing section 51) directly below. The second conveying roller 6 has the same structure as the first conveying roller 4 shown in FIG. 5, and as shown in FIG. 62; and the motor M3 that makes the roller body 61 rotate.

<Structure of the first guide roller on the winding side>

The winding-side first guide roller 7 is arranged downstream of the second conveying roller 6 in the conveying direction, and is a roller for conveying the tape T to the winding-side slack absorbing unit D2. The first guide roller 7 on the winding side has the same structure as the second guide roller 3 shown in FIG. 4, as shown in FIG. The workpiece position adjustment unit 72 for position adjustment of the belt T; and the motor M4 of the power source of the workpiece position adjustment unit 72 , and the like.

<Structure of Slack Absorbing Unit on the Winding Side>

The winding-side slack absorbing unit D2 is disposed at a position where the belt T can be accommodated between the winding-side first guide roller 7 and the winding-side second guide roller 8 . The winding-side slack absorbing unit D2 is a device that absorbs the slack of the belt T between the second conveying roller 6 and the winding-side first guide roller 7, and the winding-side second guide roller 8 and the slack of the tape T between the winding reel B2. On the upstream side of the winding side slack absorbing unit D2 in the conveying direction, the winding side first guide roller 7 is arranged, and on the downstream side of the winding side slack absorbing unit D2 in the conveying direction, the winding side second guide roller 7 is arranged. Roller 8. The winding-side slack absorbing unit D2 has, for example, the same structure as the supply-side slack absorbing unit D1, that is, has a case D2a.

The tape T passing through the slack absorbing unit D2 on the winding side is fed from the first guide roller 7 on the winding side, and hangs down in a U-shape in the box D2a due to its own weight, and is then directed toward the The second guide roller 8 on the winding side is conveyed.

<Structure of the second guide roller on the winding side>

As shown in FIG. 2, the second guide roller 8 on the winding side is an auxiliary roller for guiding the tape T to be wound on the winding reel B2 so as to be conveyed toward the winding reel B2. It has the same structure as the supply-side first guide roller 2 shown in FIG. 3 . The winding-side second guide roller 8 is disposed at a predetermined position through a device case (not shown), and is rotatable around the shaft. The winding-side second guide roller 8 is arranged so that the tape T conveyed from the winding-side slack absorbing unit D2 is conveyed obliquely upward from the winding-side second guide roller 8 .

<Structure of the winding reel rotating part>

As shown in FIG. 2 , the winding reel rotation unit 9 pivotally supports the winding reel B2 on which the tape T processed by the processing unit 51 (exposure device 5 ) is wound, and is arranged so that The shaft portion of the shaft barrel portion of B2 is rotatable as a center, and the winding drum rotating portion 9 is driven by a drive motor (not shown).

<<Structure of Exposure Device>>

Returning to FIG. 1 , the exposure device 5 is a device that exposes the pattern of the mask M on the tape T conveyed by the conveyance mechanism A step by step. The exposure device 5 includes: a light source 52; a reflector 53; a fly-eye lens L; a supporting unit 54 supporting the mask M; a projection optical system (such as a Dyson optical system or a reduced projection optical system) 55; an imaging device 56; 51a. In addition, the exposure device 5 includes a camera data input device 57 , an image processing device 58 , a storage device 59 , a control device 10 , and a switch device 12 .

The light source 52 irradiates light containing ultraviolet rays of a predetermined wavelength, and includes a lamp 52 a and an elliptical mirror 52 b arranged to cover the rear of the lamp 52 a. The reflection mirror 53 is constituted by a plane mirror that reflects the light irradiated from the light source 52 toward the mask M. As shown in FIG. The fly-eye lens L is a lens for adjusting the illuminance distribution of light from the reflection mirror 53 .

The mask M shown in FIG. 1 is supported by a support unit 54 , and the mask M is arranged to face the projection optical system 55 . The supporting unit 54 has a drive mechanism (not shown) so as to be movable in a plane perpendicular to the optical axis of the projection optical system 55 .

Here, the projection optical system 55 is arranged such that the incident light axis and the outgoing light axis are parallel and horizontal to the installation surface of the apparatus, and the front surface side faces the exposure stage 51a. The projection optical system 55 is composed of a combination of a plurality of lenses, mirrors, etc. not shown.

The imaging device 56 shown in FIG. 1 is provided with a drive system movable in three-dimensional directions between the projection optical system 55 and the exposure stage 51a, and a plurality of CCD cameras are arranged therein. The CCD camera images the alignment mark formed on the one-way tape T stationary on the exposure table 51a and the alignment mark formed on the mask M. As shown in FIG. Moreover, as mentioned above, the exposure table 51a is equipped with the exhaust system which vacuum-exhausts in order to adsorb|suck the tape T through the adsorption hole which is not shown in figure, and the compressed air system which supplies compressed air.

The camera data input device 57 takes in a segment of alignment marks with T and alignment marks of the mask M captured by the camera device 56 . The image processing device 58 performs calculations on the alignment marks for the control of the exposure device 5 . In this image processing device 58 , the alignment mark received from the camera data input device 57 is converted into position data for controlling the exposure device 5 , and the result is sent to the control device 10 and the storage device 59 . The storage device 59 stores position data captured by the imaging device 56 .

The control device 10 is a device that controls the transport mechanism A and the entire exposure device 5, and is composed of a CPU. The control device 10 matches the position of the alignment mark of a strip T with the position of the alignment mark of the mask M according to the position data of the image processing mechanism 58 . The tape T is matched to the mask M by moving the mask M by a drive mechanism (not shown) of the support unit 54 in order to match with the tape T adsorbed by the exposure table 51 a. However, when the deviation between the registration mark with T and the registration mark of the mask M is large, the distance that the mask moves becomes larger in each stage of position matching. Therefore, when the deviation between the alignment mark of the tape T and the alignment mark of the mask M is more than the threshold value δ, the second guide roller 3 on the supply side, the first conveyance roller 4, the second conveyance roller 6, and the second conveyance roller 6 are controlled. The first guide roller 7 on the winding side is wound so that the position of the alignment mark of the tape T on the exposure stage 51a falls within the threshold value δ.

In addition, the control device 10 controls: monitoring of the positions of the tape T in the supply-side slack absorbing unit D1 and the winding-side slack absorbing unit D2; loading and unloading of the tape T on the exposure stage 51a; Control of lighting and shading; and monitoring of all the above actions, etc. Furthermore, the switch device 12 is a controller for controlling ON and OFF of the motors M1 , M2 , M3 , and M4 of the conveyance mechanism A, a suction pump (not shown), the exposure device 5 , and the like.

<Explanation of the positional relationship of each component>

Next, the positional relationship of the components of the transport mechanism A will be described with reference to FIG. 6 .

Fig. 6 is a schematic configuration diagram showing a transport mechanism in the embodiment of the present invention.

As shown in Figure 6, the supply reel rotating part 1, the first guide roller 2 on the supply side, the second guide roller 3 on the supply side, the first conveying roller 4, the second conveying roller 6, the winding side The first guide roller 7 , the second winding-side guide roller 8 , and the winding drum rotating unit 9 are respectively arranged on the same plane, and are arranged on substantially the same straight line in the vertical direction when viewed from the front.

Between the supply reel rotating part 1 and the 1st conveyance roller 4, the tape T is conveyed substantially obliquely downward from a side view as a whole. Between the 1st conveyance roller 4 and the 2nd conveyance roller 6, the tape T is conveyed vertically downward. Between the second conveyance roller 6 and the winding reel B2, the tape T is conveyed substantially obliquely upward as a whole when viewed from the side.

The supply spool rotating unit 1 is disposed at a position higher by a height H1 than the supply-side first guide roller 2 on the downstream side in the conveyance direction. The supply side first guide roller 2 is arranged obliquely below the supply reel rotating part 1, and the supply side first guide roller 2 and the supply side second guide roller 3 are arranged at the same height, or arranged at It is arranged at a position higher than the second guide roller 3 on the supply side and above the opening of the case D1a of the supply-side slack absorbing unit D1.

The supply-side slack absorbing unit D1 is provided at a position where it can accommodate the supply-side first guide roller 2 and the supply-side second guide roller arranged at the same height as the supply-side first guide roller 2 . The position of the tape T that hangs down between the guide rollers 3.

The supply-side second guide roller 3 is disposed at a position equal to or lower than the supply-side first guide roller 2 , and is disposed at a position higher than the first conveyance roller 4 by a height H2.

The 1st conveyance roller 4, the exposure stage 51a (processing part 51), and the 2nd conveyance roller 6 are arrange|positioned on substantially the same straight line in a vertical direction. The tape T passed by the first conveyance roller 4 is conveyed obliquely downward from the second guide roller 3 on the supply side, is wound on the first conveyance roller 4, and changes direction toward the exposure table 51a in the vertical direction.

The exposure stage 51a (processing part 51) is arrange|positioned in the intermediate position between the 1st conveyance roller 4 and the winding side 1st guide roller 7. As shown in FIG. The 2nd conveyance roller 6 is arrange|positioned directly below this exposure table 51a. The tape T passing the second conveyance roller 6 is conveyed vertically downward, and then wound on the second conveyance roller 6 to change direction obliquely upward.

The winding-side first guide roller 7 is arranged on the downstream side of the second conveyance roller 6 in the conveyance direction, and is arranged at a position higher than the second conveyance roller 6 by a height H3. The winding-side first guide roller 7 is arranged at a position higher than the opening of the winding-side slack absorbing unit D2 and at a position lower than the winding drum rotating portion 9 by a height H4.

The second guide roller 8 on the winding side is arranged at a position equal to or higher than the first guide roller 7 on the winding side, and is arranged at a position lower than the winding drum rotating part 9 by a height H4, and It is arrange|positioned above the box D2a of the winding side slack absorption unit D2. The winding reel rotating unit 9 is disposed obliquely above the second guide roller 8 on the winding side.

<<The role of the transport mechanism>>

Next, mainly referring to FIG. 7 , the action of the conveyance mechanism A will be described with reference to each figure.

FIG. 7 is a flowchart showing the operation of the transport mechanism according to the embodiment of the present invention.

First, as shown in FIG. 1 and FIG. 2 , a belt T of a new material before processing is set on the conveyance mechanism A so as to be in a conveyable state. That is, the supply reel B1 on which the new tape T is wound is set on the supply reel rotating unit 1, and the front end portion of the tape T is pulled out while being wound on the supply side first guide roller 2, respectively. On the supply side, the second guide roller 3 and the first conveying roller 4 are passed through between the exposure table 51 a and the imaging device 56 . Then, the tape T is wound on the second conveyance roller 6, the first guide roller 7 on the winding side, and the second guide roller 8 on the winding side, and the front end of the tape T is fixed on the On the winding reel B2 of the winding reel rotating part 9. Next, the tape T on the supply-side slack-absorbing unit D1 and the take-up-side slack-absorbing unit D2 is loosened in a U-shape in the boxes D1a and D2a.

Next, a power switch (not shown) of the switch device 12 shown in FIG. 1 is turned on (ON) to activate the exposure device 5 and the transport mechanism A (step S1 ). Thus, the lamp 52a of the exposure device 5 is turned on (step S2). At this time, the light from the lamp 52a is blocked by an unillustrated shutter mechanism.

Then, the motors M2 and M3 for driving the conveyance disposed on the first conveyance roller 4 and the second conveyance roller 6 shown in FIG. 2 are driven, and a suction pump (not shown) is also driven, so that The belt T is conveyed piece by piece while being attracted to the roller surfaces 41a and 61a.

As shown in FIG. 2, by driving the motors M2 and M3, the first conveying roller 4 and the second conveying roller 6 rotate, thereby pulling the belt T for conveyance, so the supply reel of the supply reel rotating part 1 B1 is rotated to feed out the tape T (step S3).

The tape T is conveyed obliquely downward from the supply reel rotating part 1, and is received by the first guide roller 2 on the supply side in a wound state under the action of its own weight, and then conveyed to the supply side by its own weight. The interior of the box D1a of the absorption unit D1 is loosened (step S4).

In the supply-side slack absorbing unit D1 located between the supply-side first guide roller 2 and the supply-side second guide roller 3, the belt T hangs down in a U-shape toward the floor due to its own weight. The tape T is conveyed to the supply-side second guide roller 3 ( Step S5).

That is, in the supply-side slack absorbing unit D1, the tape T sent into the box D1a from the supply-side first guide roller 2 is, as shown in FIG. d direction) is drawn in the same direction as the arrow e, so that the slack from the supply reel rotating part 1 to the supply side first guide roller 2 disappears. In addition, the belt T that is pulled by the first conveying roller 4 and conveyed from the inside of the box D1a to the second guide roller 3 on the supply side (in the direction of the arrow d) is pulled toward the belt T due to its own weight. While being pulled in the direction opposite to the conveyance direction (direction of arrow f) (a state where tension is applied), it is conveyed from the box D1a to the second guide roller 3 and the first conveyance roller 4 on the supply side, and the slack disappears.

In addition, the belt T is obliquely inclined between the supply reel rotating unit 1 and the supply-side first guide roller 2, and between the supply-side second guide roller 3 and the first conveying roller 4. It is conveyed from below, so it is arranged in a state that is not easy to loosen.

The first conveying roller 4 conveys the tape T by turning the direction of one section of the tape T vertically downward by the rotation of the motor M2 in a state where the tape T is adsorbed to the roller surface 41 a by the suction unit 42 . At this time, the first conveying roller 4 absorbs the vibration of the belt T because it is formed of synthetic resin.

One length of tape T conveyed by the conveyance mechanism A is sucked by the exposure stage 51 a, and one length of tape T is stationary on the exposure stage 51 a. Then, the imaging device 56 moved between the projection optical system 55 and the exposure table 51a photographs the alignment mark (not shown) displayed on the exposed portion of the tape T and the alignment mark (not shown) of the mask M. (step S6).

The amount of positional deviation and the amount of attitude deviation between the tape T and the mask M are calculated from the two marker images captured by the imaging device 56, and are transmitted to the control device 10 (step S7).

In step S8, the mask M is moved by the drive mechanism of the support unit 54 based on the amount of positional deviation from the control device 10, and the mask M and the tape T are matched.

Next, the tape T, which has been matched with the mask M on the exposure table 51a, is initially fixed on the surface of the exposure table 51a at a position opposite to the projection optical system 55 (see FIG. 1 ). The shutter mechanism is used to irradiate exposure light from the projection optical system 55 to transfer the pattern of the mask M (step S9).

Next, in step S10, the control apparatus 10 judges whether the positional deviation amount of the alignment mark of tape T and the alignment mark of mask M is below threshold value (delta). If the amount of positional deviation is less than or equal to the threshold value δ, the process proceeds to step S13, and if the amount of positional deviation is greater than or equal to the threshold value δ, the process proceeds to step S11. That is, in many cases where the amount of positional deviation is large, the tape T cannot be conveyed straightly to the exposure stage 51a for each segment. Therefore, if the feeding amount and posture of the tape T are controlled, the next stage of the tape T that is stationary on the exposure stage 51a can be correctly transported to the exposure stage 51a. If the tape T is conveyed correctly, the amount of movement of the mask M by the drive mechanism of the support unit 54 that supports the mask M is small or zero, and throughput can be improved. Therefore, in step S10, it is determined whether the positional deviation is below the threshold δ, and if the positional deviation is greater than the threshold δ, the process proceeds to steps S11 and S12, and the guide rollers are controlled so that the positional deviation of the belt T becomes smaller.

In step S11, the control device 10 sends the driving signal to the motor M1 and the motor M4, so that the second guide roller 3 on the supply side and the first guide roller 7 on the winding side move along the width direction of the belt T, so that The posture of the belt T is adjusted by tilting the belt T.

For example, as shown in Figure 2, the control device 10 makes the motors M1, M4 of the second guide roller 3 on the supply side and the first guide roller 7 on the winding side rotate. When the axial movement of the belt T moves along the width direction indicated by the arrow b. Since the second guide roller 3 on the supply side, the first conveying roller 4, the second conveying roller 6, and the first guide roller 7 on the winding side are respectively arranged in parallel, when the second guide roller on the supply side When the roller 3 and the first guide roller 7 on the winding side move along the axial direction indicated by the arrow a, the belt T conveyed between the first conveying roller 4 and the second conveying roller 6 (exposure stage 51a) moves along the The widthwise position and inclination (posture) of the tape T are adjusted by moving in the widthwise direction indicated by the arrow c.

In addition, in step S12, the control device 10 controls the number of revolutions of the motor M2 of the first conveying roller 4 and the motor M3 of the second conveying roller 6, so that the alignment mark of the mask M is adjusted when the feeding amount is adjusted. Adjust the position in the vertical direction by transporting it while matching the alignment mark with T. Since the first conveying roller 4 and the second conveying roller 6 have the suction unit 42, the tape T can be accurately conveyed without slipping on the roller surface.

Thus, the conveyance mechanism A can adjust the width direction and feed rate of the tape T, and can convey it to the exposure stage 51a accurately.

The belt T that has passed through the exposure table 51a, along with the driving of the first conveying roller 4 and the second conveying roller 6, is adsorbed on the roller surface 61a by the adsorption unit 62 of the second conveying roller 6, and is vertically lowered. The transfer direction is changed to a substantially horizontal direction while being pulled by the side, and then transported to the winding-side slack absorbing unit D2 via the winding-side first guide roller 7 (step S13).

In the winding-side slack-absorbing unit D2, the tape T whose tension is adjusted as in the supply-side slack-absorbing unit D1 is received from the winding-side slack-absorbing unit D2 by the winding-side second guide roller 8, and The winding drum B2 is wound up by the rotation of the winding drum B2 attached to the winding drum rotating unit 9 (step S14).

In this way, the conveying mechanism A adjusts the feeding amount of the tape T in the vertical direction on the exposure table 51a by the first conveying roller 4 and the second conveying roller 6, and the supply side second guide roller 3 and the winding The side first guide roller 7 is used to adjust the inclination direction of the belt T on the exposure table 51a. Therefore, when the amount of positional deviation is greater than the threshold value δ, the amount of movement of the mask M is reduced to improve throughput and to perform matching with the mask with high accuracy. In addition, in the portion where the tape T is conveyed in a substantially horizontal direction (obliquely below, obliquely above) on the exposure table conveyance path, traction (tension) is applied in a direction opposite to the conveyance direction by the tape T's own weight to absorb slack. As a result, the conveyance mechanism A conveys the tape T to the exposure device 5 in a stable state, so that the predetermined circuit pattern can be correctly transferred, and the tape T processed by the exposure device 5 can be wound smoothly on the winding reel. On the winding reel B2 of the rotating part 9.

In addition, the present invention is not limited to the present embodiment, and various modifications and changes can be made within the scope of the technical idea, and the present invention certainly includes the inventions formed by these modifications and changes.

<<Modification>>

Next, a modified example of the transport mechanism according to the embodiment of the present invention will be described with reference to FIG. 8 .

In addition, in the modified example, description of members having the same functions as those of the conveyance mechanism A of the embodiment shown in FIGS. 1 to 7 is omitted.

Fig. 8 is a diagram showing a modified example of the conveyance mechanism according to the embodiment of the present invention, and is a schematic enlarged view of a main part showing an installed state of a workpiece connecting unit.

Like the conveying mechanism A1 of the modified example shown in FIG. 8 , the conveying mechanism A (refer to FIGS. 1 and 2 ) of the embodiment can be positioned between the supply reel rotating unit 1 and the first guide roller 2 on the supply side. The workpiece connection unit 11 is inserted.

At this time, the workpiece connecting unit 11 is arranged on the upstream side of the supply-side slack absorbing unit D1 in the conveyance direction, and is arranged at a position higher than the supply-side slack absorbing unit D1 .

As shown in FIG. 8, the workpiece connecting unit 11 is a connecting device for connecting the last tail T2a of the tape T2 being processed by the exposure stage 51a (see FIG. 1) to the leading end T1a of the next new tape T1. The workpiece connecting unit 11 includes, for example: a table 11a coated with Teflon (registered trademark) on the surface; a holding portion 11c for holding the tape T1 disposed on the table 11a; The pressing part 11b.

Next, the connection with T1 and T2 will be described.

When the tape T2 approaches the final end through a series of processing steps, the operation of the conveying mechanism A is stopped, and the last tail T2a of the tape T2 wound on the supply reel rotating unit 1 is placed on the upper side of the supply side slack absorbing unit D1. on stage 11a. The stage 11a is arranged above the supply-side slack absorbing device D1 at a position near where the currently processed tape T2 is wound on the supply-side first guide roller 2, so that the connection of the tapes T1 and T2 is facilitated. Operation.

The last tail T2a of the tape T2 is placed on the center of the table 11a, and the tape T2 is pressed by the holding portion 11c. Then, the leading end portion T1a of the new tape T1 is overlapped with the last tail T2a of the tape T2 being processed, and then pressed against the tapes T1, T2 to join them together by thermocompression bonding.

In this way, since the conveyance mechanism A1 has the workpiece connection means 11 in the conveyance path, the belts T1 and T2 can be connected in a short time, so that the working efficiency can be improved.

<<Other modifications>>

The supply-side slack absorbing unit D1 and the take-up-side slack absorbing unit D2 shown in FIGS. 1 and 2 absorb slack of the tape T in the conveyance path, and any of them may apply tension to the tape T. For example, the supply-side slack-absorbing unit D1 and the winding-side slack-absorbing unit D2 have: a box D1a into which the tape T is fed; A fan that hangs down in a U-shape.

In addition, the supply-side slack absorbing unit D1 and the take-up-side slack absorbing unit D2 may be roller tensioners in which vertically movable and freely rotatable rollers are placed above the belt T, and the weight of the rollers is utilized. The belt T is pulled in the conveyance direction and the direction opposite to the conveyance direction, and the slack of the belt T is absorbed by making the belt T hang down in a U-shape.

In addition, in the embodiment, the case where the motors M2 and M3 for conveying the belt T are provided on the first conveying roller 4 and the second conveying roller 6 has been described as an example. The motor for conveying is installed on the sub and reel. That is, in the supply reel rotating part 1, the first guide roller 2 on the supply side, the second guide roller 3 on the supply side, the first guide roller 7 on the winding side, and the second guide roller on the winding side 8 and on the winding reel rotating part 9, the electric motor that conveys usefulness can be set.

In this way, the tape T can be fed out from the supply reel rotating unit 1 more smoothly, and the tape T can be wound more smoothly in the take-up reel rotating unit 9 .

In the embodiment, the case where the suction holes 41b, 61b and the suction units 42, 62 are provided on the first and second conveying rollers 4, 6 is described as an example, but the first and second guides on the supply side On the rollers 2, 3 and the first and second guide rollers 7, 8 on the winding side, suction holes and suction units can also be similarly provided. Thus, the tape T can be conveyed more smoothly.

In addition, the processing part 51 is not limited to the exposure apparatus 5, For example, the inspection apparatus with a T, a roll forming apparatus, and other machines may be sufficient.

In addition, when the processing unit 51 is used as the roll forming device, the winding reel rotating unit 9 may be a cutting device that cuts each part as a piece.

Claims (25)

1. a Handling device is that belt-shaped workpieces is being located at the carrying mechanism of carrying and handling on the handling part of vertical direction, it is characterized in that described Handling device comprises:

The supply roll rotating part, it makes the supply roll rotation of sending above-mentioned workpiece;

Supply side first guide rollers and supply side second guide rollers, the above-mentioned workpiece that their guiding are sent from above-mentioned supply roll by above-mentioned supply roll rotating part rotation;

Supply side relaxation absorption unit, it gives tension force to the above-mentioned workpiece between above-mentioned supply side first guide rollers and supply side second guide rollers;

The first carrying roller and the second carrying roller, they are disposed at the above and below of handling part, make from the above-mentioned workpiece of above-mentioned supply side second guide rollers to carry along above-mentioned handling part;

Winding side first guide rollers and winding side second guide rollers, their guiding are from the above-mentioned workpiece of the above-mentioned second carrying roller;

Winding side relaxation absorption unit, it gives tension force to the above-mentioned workpiece between above-mentioned winding side first guide rollers and winding side second guide rollers; And

The reel spool rotating part, it makes the reel spool rotation of coiling from the above-mentioned workpiece of above-mentioned winding side second guide rollers,

Above-mentioned supply roll rotating part is disposed at than the high position of above-mentioned supply side first guide rollers,

Above-mentioned supply side second guide rollers is disposed at and the identical or lower position of above-mentioned supply side first guide rollers, and above-mentioned supply side second guide rollers is disposed at than the above-mentioned first carrying roller high position,

Above-mentioned reel spool rotating part is disposed at than the high position of above-mentioned winding side second guide rollers,

Above-mentioned winding side second guide rollers is disposed at and the identical or higher position of above-mentioned winding side first guide rollers, and above-mentioned winding side second guide rollers is disposed at than the low position of above-mentioned reel spool rotating part.

2. Handling device as claimed in claim 1 is characterized in that,

Comprise location of workpiece adjustment unit, this location of workpiece adjustment unit, corresponding to the position deviation amount of the above-mentioned workpiece on the above-mentioned handling part, utilize above-mentioned supply side second guide rollers and above-mentioned winding side first guide rollers to make above-mentioned workpiece moving axially to above-mentioned supply side second guide rollers and above-mentioned winding side first guide rollers.

3. Handling device as claimed in claim 1 or 2 is characterized in that,

The roller body of above-mentioned first carrying roller and the above-mentioned second carrying roller is by forming synthetic resin.

4. Handling device as claimed in claim 1 or 2 is characterized in that,

Between above-mentioned supply roll and above-mentioned supply side first guide rollers, be provided with the workpiece linkage unit that can freely be provided with or remove, the last tail that this workpiece linkage unit is used for the workpiece that will handled by above-mentioned handling part couples together with the portion foremost of next new workpiece.

5. Handling device as claimed in claim 3 is characterized in that,

Between above-mentioned supply roll and above-mentioned supply side first guide rollers, be provided with the workpiece linkage unit that can freely be provided with or remove, the last tail that this workpiece linkage unit is used for the workpiece that will handled by above-mentioned handling part couples together with the portion foremost of next new workpiece.

6. as each described Handling device in the claim 1,2 and 5, it is characterized in that,

Above-mentioned handling part is an exposure desk, and it is used for pattern exposure with mask to the workpiece of being carried piecemeal by above-mentioned Handling device.

7. Handling device as claimed in claim 3 is characterized in that,

Above-mentioned handling part is an exposure desk, and it is used for pattern exposure with mask to the workpiece of being carried piecemeal by above-mentioned Handling device.

8. Handling device as claimed in claim 4 is characterized in that,

Above-mentioned handling part is an exposure desk, and it is used for pattern exposure with mask to the workpiece of being carried piecemeal by above-mentioned Handling device.

9. Handling device as claimed in claim 6 is characterized in that,

When the position deviation amount of the above-mentioned workpiece on the above-mentioned handling part when threshold value is following, by mobile aforementioned mask, make the one section above-mentioned workpiece being still on the above-mentioned exposure desk and the position deviation amount of aforementioned mask be roughly zero,

When the position deviation amount of the above-mentioned workpiece on the above-mentioned handling part during greater than threshold value, above-mentioned supply side second guide rollers and above-mentioned winding side first guide rollers are moved vertically, move to precalculated position on the above-mentioned exposure desk so that be still in next section of one section above-mentioned workpiece on the above-mentioned exposure desk.

10. as claim 7 or 8 described Handling devices, it is characterized in that,

When the position deviation amount of the above-mentioned workpiece on the above-mentioned handling part when threshold value is following, by mobile aforementioned mask, make the one section above-mentioned workpiece being still on the above-mentioned exposure desk and the position deviation amount of aforementioned mask be roughly zero,

When the position deviation amount of the above-mentioned workpiece on the above-mentioned handling part during greater than threshold value, above-mentioned supply side second guide rollers and above-mentioned winding side first guide rollers are moved vertically, move to precalculated position on the above-mentioned exposure desk so that be still in next section of one section above-mentioned workpiece on the above-mentioned exposure desk.

11. Handling device as claimed in claim 6 is characterized in that,

When the position deviation amount of the above-mentioned workpiece on the above-mentioned handling part when threshold value is following, by mobile aforementioned mask, make the one section above-mentioned workpiece being still on the above-mentioned exposure desk and the position deviation amount of aforementioned mask be roughly zero,

When the position deviation amount of the above-mentioned workpiece on the above-mentioned handling part during greater than threshold value, set the above-mentioned first carrying roller and the second carrying roller to the amount of feeding of workpiece, move to precalculated position on the above-mentioned exposure desk so that be still in next section of one section above-mentioned workpiece on the above-mentioned exposure desk.

12. as claim 7 or 8 described Handling devices, it is characterized in that,

When the position deviation amount of the above-mentioned workpiece on the above-mentioned handling part when threshold value is following, by mobile aforementioned mask, make the one section above-mentioned workpiece being still on the above-mentioned exposure desk and the position deviation amount of aforementioned mask be roughly zero,

When the position deviation amount of the above-mentioned workpiece on the above-mentioned handling part during greater than threshold value, set the above-mentioned first carrying roller and the second carrying roller to the amount of feeding of workpiece, move to precalculated position on the above-mentioned exposure desk so that be still in next section of one section above-mentioned workpiece on the above-mentioned exposure desk.

13. each the described Handling device as among claim 1,2,5, the 7-9 and 11 is characterized in that,

Above-mentioned first carrying roller and the above-mentioned second carrying roller have makes above-mentioned workpiece be adsorbed in the adsorption hole of roller surface, and the above-mentioned first carrying roller and the above-mentioned second carrying roller are connected with the absorbing unit that is used for adsorbing through above-mentioned adsorption hole above-mentioned workpiece.

14. Handling device as claimed in claim 3 is characterized in that,

Above-mentioned first carrying roller and the above-mentioned second carrying roller have makes above-mentioned workpiece be adsorbed in the adsorption hole of roller surface, and the above-mentioned first carrying roller and the above-mentioned second carrying roller are connected with the absorbing unit that is used for adsorbing through above-mentioned adsorption hole above-mentioned workpiece.

15. Handling device as claimed in claim 4 is characterized in that,

Above-mentioned first carrying roller and the above-mentioned second carrying roller have makes above-mentioned workpiece be adsorbed in the adsorption hole of roller surface, and the above-mentioned first carrying roller and the above-mentioned second carrying roller are connected with the absorbing unit that is used for adsorbing through above-mentioned adsorption hole above-mentioned workpiece.

16. Handling device as claimed in claim 6 is characterized in that,

Above-mentioned first carrying roller and the above-mentioned second carrying roller have makes above-mentioned workpiece be adsorbed in the adsorption hole of roller surface, and the above-mentioned first carrying roller and the above-mentioned second carrying roller are connected with the absorbing unit that is used for adsorbing through above-mentioned adsorption hole above-mentioned workpiece.

17. Handling device as claimed in claim 10 is characterized in that,

Above-mentioned first carrying roller and the above-mentioned second carrying roller have makes above-mentioned workpiece be adsorbed in the adsorption hole of roller surface, and the above-mentioned first carrying roller and the above-mentioned second carrying roller are connected with the absorbing unit that is used for adsorbing through above-mentioned adsorption hole above-mentioned workpiece.

18. the Handling device described in claim 12 is characterized in that,

Above-mentioned first carrying roller and the above-mentioned second carrying roller have makes above-mentioned workpiece be adsorbed in the adsorption hole of roller surface, and the above-mentioned first carrying roller and the above-mentioned second carrying roller are connected with the absorbing unit that is used for adsorbing through above-mentioned adsorption hole above-mentioned workpiece.

19. as claim 1,2,5,7-9,11 and 14-18 in each described Handling device, it is characterized in that,

Above-mentioned supply side first guide rollers, supply side second guide rollers, above-mentioned winding side first guide rollers and above-mentioned winding side second guide rollers have makes above-mentioned workpiece be adsorbed in the adsorption hole of roller surface, and above-mentioned supply side first guide rollers, supply side second guide rollers, above-mentioned winding side first guide rollers and above-mentioned winding side second guide rollers are connected with the absorbing unit that is used for adsorbing through above-mentioned adsorption hole above-mentioned workpiece.

20. Handling device as claimed in claim 3 is characterized in that,

Above-mentioned supply side first guide rollers, supply side second guide rollers, above-mentioned winding side first guide rollers and above-mentioned winding side second guide rollers have makes above-mentioned workpiece be adsorbed in the adsorption hole of roller surface, and above-mentioned supply side first guide rollers, supply side second guide rollers, above-mentioned winding side first guide rollers and above-mentioned winding side second guide rollers are connected with the absorbing unit that is used for adsorbing through above-mentioned adsorption hole above-mentioned workpiece.

21. Handling device as claimed in claim 4 is characterized in that,

Above-mentioned supply side first guide rollers, supply side second guide rollers, above-mentioned winding side first guide rollers and above-mentioned winding side second guide rollers have makes above-mentioned workpiece be adsorbed in the adsorption hole of roller surface, and above-mentioned supply side first guide rollers, supply side second guide rollers, above-mentioned winding side first guide rollers and above-mentioned winding side second guide rollers are connected with the absorbing unit that is used for adsorbing through above-mentioned adsorption hole above-mentioned workpiece.

22. Handling device as claimed in claim 6 is characterized in that,

Above-mentioned supply side first guide rollers, supply side second guide rollers, above-mentioned winding side first guide rollers and above-mentioned winding side second guide rollers have makes above-mentioned workpiece be adsorbed in the adsorption hole of roller surface, and above-mentioned supply side first guide rollers, supply side second guide rollers, above-mentioned winding side first guide rollers and above-mentioned winding side second guide rollers are connected with the absorbing unit that is used for adsorbing through above-mentioned adsorption hole above-mentioned workpiece.

23. Handling device as claimed in claim 10 is characterized in that,

Above-mentioned supply side first guide rollers, supply side second guide rollers, above-mentioned winding side first guide rollers and above-mentioned winding side second guide rollers have makes above-mentioned workpiece be adsorbed in the adsorption hole of roller surface, and above-mentioned supply side first guide rollers, supply side second guide rollers, above-mentioned winding side first guide rollers and above-mentioned winding side second guide rollers are connected with the absorbing unit that is used for adsorbing through above-mentioned adsorption hole above-mentioned workpiece.

24. Handling device as claimed in claim 12 is characterized in that,

Above-mentioned supply side first guide rollers, supply side second guide rollers, above-mentioned winding side first guide rollers and above-mentioned winding side second guide rollers have makes above-mentioned workpiece be adsorbed in the adsorption hole of roller surface, and above-mentioned supply side first guide rollers, supply side second guide rollers, above-mentioned winding side first guide rollers and above-mentioned winding side second guide rollers are connected with the absorbing unit that is used for adsorbing through above-mentioned adsorption hole above-mentioned workpiece.

25. Handling device as claimed in claim 13 is characterized in that,

Above-mentioned supply side first guide rollers, supply side second guide rollers, above-mentioned winding side first guide rollers and above-mentioned winding side second guide rollers have makes above-mentioned workpiece be adsorbed in the adsorption hole of roller surface, and above-mentioned supply side first guide rollers, supply side second guide rollers, above-mentioned winding side first guide rollers and above-mentioned winding side second guide rollers are connected with the absorbing unit that is used for adsorbing through above-mentioned adsorption hole above-mentioned workpiece.

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