CN100585880C - Functional element installation module and manufacturing method thereof - Google Patents
Functional element installation module and manufacturing method thereof Download PDFInfo
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- CN100585880C CN100585880C CN200580030689A CN200580030689A CN100585880C CN 100585880 C CN100585880 C CN 100585880C CN 200580030689 A CN200580030689 A CN 200580030689A CN 200580030689 A CN200580030689 A CN 200580030689A CN 100585880 C CN100585880 C CN 100585880C
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 238000009434 installation Methods 0.000 title claims description 7
- 238000007789 sealing Methods 0.000 claims abstract description 65
- 230000003287 optical effect Effects 0.000 claims abstract description 61
- 229920005989 resin Polymers 0.000 claims abstract description 61
- 239000011347 resin Substances 0.000 claims abstract description 61
- 239000000758 substrate Substances 0.000 claims abstract description 37
- 239000007788 liquid Substances 0.000 claims abstract description 19
- 230000001681 protective effect Effects 0.000 claims description 42
- 230000000903 blocking effect Effects 0.000 claims description 29
- 238000004806 packaging method and process Methods 0.000 claims description 8
- 238000005538 encapsulation Methods 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 abstract description 10
- 239000000470 constituent Substances 0.000 abstract 3
- 238000000034 method Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 239000011521 glass Substances 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 230000004888 barrier function Effects 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 235000005811 Viola adunca Nutrition 0.000 description 4
- 240000009038 Viola odorata Species 0.000 description 4
- 235000013487 Viola odorata Nutrition 0.000 description 4
- 235000002254 Viola papilionacea Nutrition 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 125000006850 spacer group Chemical group 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 230000017525 heat dissipation Effects 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 150000002466 imines Chemical class 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/85909—Post-treatment of the connector or wire bonding area
- H01L2224/8592—Applying permanent coating, e.g. protective coating
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/1615—Shape
- H01L2924/16195—Flat cap [not enclosing an internal cavity]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
- H01L2924/1815—Shape
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- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Light Receiving Elements (AREA)
Abstract
Description
技术领域 technical field
本发明涉及例如光接收元件或发光元件等的功能元件安装模块,特别是涉及使用密封树脂将光功能元件安装在基板上的光功能元件安装模块的技术。The present invention relates to a functional element mounting module such as a light receiving element or a light emitting element, and particularly relates to a technology of a light functional element mounting module in which a light functional element is mounted on a substrate using a sealing resin.
背景技术 Background technique
以往,作为这种光功能元件安装模块,已知有例如中空结构的封装。Conventionally, as such an optical functional element mounting module, for example, a package having a hollow structure is known.
如图10所示,现有的光功能元件安装模块100的封装101是经框状的衬垫103将透光性部件104安装在基板102上而构成的。而且,使光功能部106与透光性部件104相对置地将光功能元件105配置于该封装101内,以进行光信号107的收发。As shown in FIG. 10 , a
然而,在这样的现有技术的情况下,有如下的课题:例如如果要使波长为405nm的短波长的蓝紫色激光透过,则作为透光性部件104必须使用施加了特殊涂敷的玻璃,因而价格变得非常昂贵。However, in the case of such a prior art, there is a problem that, for example, in order to transmit blue-violet laser light having a short wavelength of 405 nm, it is necessary to use glass with a special coating as the
另外,为了同时还能应对其它波长(例如,CD用:780nm,DVD用:650nm),就必须施加价格更加昂贵的涂敷。In addition, in order to cope with other wavelengths at the same time (for example, for CD: 780nm, for DVD: 650nm), it is necessary to apply more expensive coating.
此外,在现有技术的情况下,还有如下的课题:为了使透光性部件104得以保持,就必须有框状的衬垫103,因而小型化受到限制。In addition, in the case of the prior art, there is a problem that the frame-
发明内容 Contents of the invention
本发明是为了解决这样的现有技术的课题而进行的,其目的在于,提供一种无需昂贵的特殊部件并且可实现小型化的功能元件安装模块及其制造方法。The present invention has been made to solve such conventional problems, and an object of the present invention is to provide a functional element mounting module capable of miniaturization without requiring expensive special components, and a method of manufacturing the same.
为了达到上述目的而进行的本发明是:一种功能元件安装模块,其具有:形成有规定的布线图形的基板;安装在上述基板上的规定的功能元件;以及具有与上述功能元件的功能部相对应的孔部的封装结构部件,在上述功能元件的功能部露出的状态下,该功能元件通过密封树脂来密封,并且上述封装结构部件通过该密封树脂固接在上述基板上。The present invention made in order to achieve the above object is: a functional element mounting module, which has: a substrate on which a predetermined wiring pattern is formed; a predetermined functional element mounted on the above substrate; and a functional part with the above functional element In the package component corresponding to the hole portion, the functional component is sealed with a sealing resin in a state where the functional part of the functional element is exposed, and the package component is fixed to the substrate through the sealing resin.
本发明也可以是在上述发明中,将上述功能元件通过引线键合(wire bonding)法与上述基板的布线图形电连接。In the present invention, in the above invention, the functional element is electrically connected to the wiring pattern on the substrate by wire bonding.
本发明也可以是在上述发明中,将覆盖上述封装结构部件的孔部的保护用覆盖部件设置在该封装结构部件上。In the present invention, in the above invention, a protective covering member covering the hole of the package component may be provided on the package component.
本发明也可以是在上述发明中,在上述封装结构部件与上述保护用覆盖部件之间设置与功能部露出用空间连通的排气口。In the present invention, in the above invention, an exhaust port communicating with the functional portion exposure space may be provided between the sealing member and the protective cover member.
本发明也可以是在上述发明中,将上述保护用覆盖部件做成能从上述封装结构部件剥离的保护膜。In the present invention, in the above invention, the protective cover member may be a protective film that can be peeled off from the package member.
本发明也可以是在上述发明中,将上述功能元件做成光功能元件。In the present invention, in the above-mentioned invention, the above-mentioned functional element may be made into an optical functional element.
本发明也可以是在上述发明中,在上述功能元件的功能部的附近设置用于阻挡上述密封树脂的阻挡部。In the present invention, in the above invention, a blocking portion for blocking the sealing resin may be provided in the vicinity of the functional portion of the functional element.
本发明也可以是在上述发明中,将上述阻挡部设置在该功能元件的功能部的周围区域。In the present invention, in the above invention, the blocking portion is provided in a peripheral area of the functional portion of the functional element.
本发明也可以是在上述发明中,将上述阻挡部形成为大致环状。In the present invention, in the above invention, the stopper portion may be formed in a substantially annular shape.
本发明也可以是在上述发明中,将上述阻挡部做成形成为突出于上述功能元件上的突堤部。In the present invention, in the above-mentioned invention, the blocking portion may be formed as a dike protruding from the functional element.
本发明也可以是在上述发明中,将上述阻挡部做成通过设置在上述功能元件上的保护膜而形成的沟槽部。In the present invention, in the above-mentioned invention, the barrier portion may be a groove portion formed through a protective film provided on the functional element.
本发明是一种功能元件安装模块的制造方法,其具有如下工序:在形成有规定的布线图形并安装有规定的功能元件的基板上,在上述功能元件附近设置用于阻挡液态密封树脂的突堤部;在上述功能元件与上述突堤部之间滴注液态密封树脂,以在上述功能元件与上述突堤部之间充填该密封树脂;将具有与上述功能元件的功能部相对应的孔部的封装结构部件,在使该孔部与上述功能元件的功能部相对置的状态下,与上述突堤部相抵接,由此使该封装结构部件与上述液态密封树脂接触;使上述液态密封树脂固化,以将上述封装结构部件固接在上述基板上;以及除去上述突堤部。The present invention is a method of manufacturing a functional component mounting module, which has the following steps: on a substrate on which a predetermined wiring pattern is formed and a predetermined functional component is mounted, a dike for blocking liquid sealing resin is provided near the functional component portion; dripping liquid sealing resin between the above-mentioned functional element and the above-mentioned embankment to fill the space between the above-mentioned functional element and the above-mentioned embankment; The structural member is in contact with the embankment in a state where the hole portion is opposed to the functional portion of the functional element, whereby the sealing structural member is brought into contact with the liquid sealing resin; the liquid sealing resin is cured to obtain Fixing the above-mentioned packaging structure components on the above-mentioned substrate; and removing the above-mentioned dike part.
本发明也可以是在上述发明中,将上述突堤部设置在上述功能元件的周围区域。In the present invention, in the above-mentioned invention, the above-mentioned jetty portion may be provided in the surrounding area of the above-mentioned functional element.
本发明也可以是在上述发明中,将上述突堤部形成为大致环状。In the present invention, in the above-mentioned invention, the above-mentioned jetty portion may be formed in a substantially annular shape.
本发明也可以是在上述发明中,将上述功能元件做成光功能元件。In the present invention, in the above-mentioned invention, the above-mentioned functional element may be made into an optical functional element.
本发明也可以是在上述发明中,作为上述功能元件,采用在该功能部附近具有用于阻挡上述密封树脂的阻挡部的功能元件。In the present invention, in the above invention, a functional element having a blocking portion for blocking the sealing resin in the vicinity of the functional portion may be used as the functional element.
本发明也可以是在上述发明中,具有将覆盖上述封装结构部件的孔部的保护用覆盖部件设置在该封装结构部件上的工序。In the above invention, the present invention may include a step of providing a protective cover member covering the hole of the package component on the package component.
在本发明的功能元件安装模块的情况下,可提供一种功能元件安装模块,其中由于功能元件的功能部呈露出状态,所以无需使用施加了特殊涂敷的昂贵玻璃就能无衰减地可靠地输入输出例如蓝紫色激光这样的短波长的光,此外散热性也优越。In the case of the functional element mounting module of the present invention, it is possible to provide a functional element mounting module in which since the functional part of the functional element is in an exposed state, it can be reliably mounted without attenuation without using expensive glass to which a special coating is applied. It inputs and outputs short-wavelength light such as blue-violet laser light, and is also excellent in heat dissipation.
另外,按照本发明,由于无需框状的衬垫,所以可提供一种非常小型的功能元件安装模块。In addition, according to the present invention, since a frame-shaped spacer is not required, a very small functional component mounting module can be provided.
另一方面,在覆盖封装结构部件的孔部的保护用覆盖部件设置在该封装结构部件上的情况下,可防止异物向功能元件的功能部的附着。On the other hand, when the protective cover member covering the hole of the package component is provided on the package component, it is possible to prevent foreign matter from adhering to the functional portion of the functional element.
此时,如果在封装结构部件与保护用覆盖部件之间设置与功能部露出用空间连通的排气口,则由于使熔焊(reflow)时在功能部露出用空间内膨胀的气体(空气)经排气口逃逸,故可提高耐熔焊性。另外,通过设置该排气口,还可防止功能部露出用空间内的结露。At this time, if an exhaust port communicating with the space for exposing the functional part is provided between the package structural member and the covering member for protection, the gas (air) that expands in the space for exposing the functional part during reflow will Escape through the exhaust port, so it can improve the resistance to fusion welding. In addition, by providing the exhaust port, dew condensation in the space for exposing the functional part can also be prevented.
另外,作为保护用覆盖部件,如果使用可从上述封装结构部件剥离的保护膜,则通过在使用时剥掉保护膜,从而可在使用了例如光功能元件的情况下使光信号无衰减地输入输出。In addition, if a protective film that can be peeled off from the above-mentioned package structural member is used as the protective cover member, the optical signal can be input without attenuation when, for example, an optical functional element is used, by peeling off the protective film during use. output.
另一方面,按照本发明的方法,能够以极简单的工序来制造上述功能元件安装模块。On the other hand, according to the method of the present invention, the above-mentioned functional component mounting module can be manufactured with an extremely simple process.
特别是,在本发明的方法中,如果在功能元件的周围区域设置突堤部,或将突堤部形成为大致环状,就能在功能元件的周围可靠地阻挡液态密封树脂,能可靠地密封功能元件的功能部以外的部分。In particular, in the method of the present invention, if the dike is provided in the peripheral region of the functional element, or the dike is formed into a substantially ring shape, the liquid sealing resin can be reliably blocked around the functional element, and the functional element can be reliably sealed. The part other than the functional part of the component.
另一方面,在本发明中,如果在功能元件的功能部附近设置阻挡部,就能在功能部附近可靠地阻挡密封树脂,由此,可实现产品品质的提高和成品率的提高。On the other hand, in the present invention, if the blocking portion is provided near the functional portion of the functional element, the sealing resin can be reliably blocked near the functional portion, thereby improving product quality and yield.
此时,如果在该功能元件的功能部的周围区域设置阻挡部,或将突堤部形成为大致环状,就能在功能部的周围可靠地阻挡液态密封树脂,能可靠地密封功能部以外的部分。At this time, if a blocking portion is provided around the functional portion of the functional element, or the embankment portion is formed into a substantially annular shape, the liquid sealing resin can be reliably blocked around the functional portion, and the area other than the functional portion can be reliably sealed. part.
另外,如果阻挡部采用形成为突出于功能元件上的突堤部的结构,就可适用于例如光接收元件等在功能部上不欲被阻挡材料遮光的模块。In addition, if the blocking portion is formed as a dike portion protruding from the functional element, it can be applied to a module whose functional portion does not want to be shielded from light by the blocking material, such as a light receiving element.
进而,在阻挡部是通过设置于功能元件上的保护膜所形成的沟槽部的情况下,可通过保护膜来保护功能部以防止异物的附着。Furthermore, when the blocking portion is a groove portion formed by a protective film provided on the functional element, the functional portion can be protected by the protective film to prevent adhesion of foreign matter.
按照本发明,无需使用施加了特殊涂敷的昂贵玻璃就能无衰减地可靠地输入输出如蓝紫色激光这样的短波长的光。According to the present invention, short-wavelength light such as blue-violet laser light can be reliably input and output without attenuation without using expensive glass with a special coating.
另外,按照本发明,可提供一种散热性优越并且非常小型的功能元件安装模块。In addition, according to the present invention, it is possible to provide a very compact functional component mounting module which is excellent in heat dissipation.
附图说明 Description of drawings
图1(a)~(d)是表示本发明的光功能元件安装模块的制造方法的实施方式的剖面图。1( a ) to ( d ) are cross-sectional views showing an embodiment of a method of manufacturing an optical functional element mounting module according to the present invention.
图2是表示本发明的光功能元件安装模块的实施方式的剖面结构图。Fig. 2 is a cross-sectional structural view showing an embodiment of the optical functional element mounting module of the present invention.
图3(a)~(d)是表示本发明的另一实施方式的主要部分的剖面结构图。3( a ) to ( d ) are sectional structural views showing main parts of another embodiment of the present invention.
图4(a)~(d)是表示本发明的又一实施方式的主要部分的剖面结构图。4( a ) to ( d ) are cross-sectional structural diagrams showing main parts of still another embodiment of the present invention.
图5(a)~(d)是表示本发明的功能元件安装模块的又一实施方式的制造方法的剖面结构图。5( a ) to ( d ) are cross-sectional structural views showing a manufacturing method of still another embodiment of the functional element mounting module of the present invention.
图6(a)是该功能元件安装模块的剖面结构图,(b)是表示该功能元件安装模块在密封前的外观结构的俯视图。Fig. 6(a) is a sectional structural view of the functional element installation module, and Fig. 6 (b) is a top view showing the appearance structure of the functional element installation module before sealing.
图7(a)是表示本发明的功能元件安装模块的又一实施方式的剖面结构图,(b)是表示该功能元件安装模块在密封前的外观结构的俯视图。7( a ) is a sectional structural view showing still another embodiment of the functional component mounting module of the present invention, and FIG. 7( b ) is a plan view showing the appearance structure of the functional component mounting module before sealing.
图8(a)、(b)是表示本发明的功能元件安装模块的又一实施方式的剖面结构图。8( a ), ( b ) are sectional structural views showing still another embodiment of the functional element mounting module of the present invention.
图9是表示本发明的功能元件安装模块的又一实施方式的剖面结构图。Fig. 9 is a cross-sectional structural view showing still another embodiment of the functional element mounting module of the present invention.
图10是现有的光功能元件安装模块的剖面结构图。Fig. 10 is a cross-sectional structure diagram of a conventional optical functional element installation module.
符号说明Symbol Description
1…光功能元件安装模块;2…基板;3…光功能元件(功能元件);4…布线图形;6…外部连接端子;7…突堤部;8…密封树脂;9…封装结构部件;9a…光透过用孔部(孔部);30…光功能部(功能部)1... Optical functional element mounting module; 2... Substrate; 3... Optical functional element (functional element); 4... Wiring pattern; 6... External connection terminal; 7... Embankment; 8... Sealing resin; ...the hole for light transmission (hole); 30...the light function part (function part)
具体实施方式 Detailed ways
以下,参照附图详细地说明本发明的优选实施方式。Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.
图1(a)~(d)是表示作为本发明的功能元件安装模块的例子的、光功能元件安装模块的制造方法的实施方式的剖面结构图,图2是表示该光功能元件安装模块的实施方式的剖面结构图。Fig. 1 (a) - (d) are the sectional structure diagrams showing the embodiment of the manufacturing method of the optical functional element mounting module as the example of the functional element mounting module of the present invention, Fig. 2 shows the structure of the optical functional element mounting module A cross-sectional structure diagram of an embodiment.
如图1(a)所示,在本实施方式中,首先,在形成有规定的布线图形4的基板2上,安装光接收元件或发光元件等具有光功能部(功能部)30的光功能元件(功能元件)3。As shown in FIG. 1(a), in this embodiment, first, on the
在本实施方式中,用金线5对基板2上的布线图形4的连接部和光功能元件3的连接部进行电连接,并从基板2背侧的外部连接端子6引出。In this embodiment, the connecting portion of the
然后,在基板2上的光功能元件的周围区域(例如基板2的边缘部)设置用于阻挡液态密封树脂8的突堤部7。Then, the
另一方面,突堤部7的形状虽不作特别限定,但从可靠地阻挡密封树脂8的观点来看,优选形成为环状(例如矩形)。On the other hand, although the shape of the
再有,优选对突堤部7的高度进行条件设定以使其上端部分在后述的封装结构部件9的按压时成为比金线5的上端部的位置高的位置。In addition, it is preferable to conditionally set the height of the
接着,如图1(b)所示,在光功能元件3与突堤部7之间滴注液态密封树脂8,以在光功能元件3与上述突堤部7之间充填该密封树脂8。Next, as shown in FIG. 1( b ), a
此时,优选使密封树脂8达不到光功能元件3的光功能部30,并且密封树脂8的顶部成为与突堤部7的上端部大致相等的形状。At this time, it is preferable that the sealing
再有,在本发明的情况下,虽然密封树脂8的种类不作特别限定,但从确保密封品质的观点来看,优选使用环氧类树脂。In addition, in the case of the present invention, although the type of sealing
进而,如图1(c)所示,将封装结构部件9抵接配置在突堤部7上,以规定的压力向基板2的方向进行整体按压。Furthermore, as shown in FIG. 1( c ), the package
该封装结构部件9是由例如印刷布线板、塑料板等构成的板状部件,例如在其中央部分设置与光功能元件3的光功能部30相对应的光透过用孔部(孔部)9a,并将该光透过用孔部9a配置在该光功能部30的正上方进行按压。This packaging
然后,通过该工序,充填密封树脂8,使得封装结构部件9的基板2一侧的面(下表面)与密封树脂8接触,并覆盖光功能元件3的光功能部30以外的部分。Then, through this step, the sealing
即,虽然充填于光功能元件3与突堤部7之间的密封树脂8通过毛细现象沿着封装结构部件9的下表面向光透过用孔部9a扩展,但在封装结构部件9的下表面与光功能元件3之间的微小间隙(空隙)中,在光透过用孔部9a的边缘部受到密封树脂8的表面张力的阻挡,形成止住状态,不会侵入光功能部30。That is, although the sealing
在本发明的情况下,虽然封装结构部件9的光透过周孔部9a的大小不作特别限定,但如考虑到密封树脂8向光透过用空间10的流入,则优选在光功能元件3的光功能部30周围设定光透过用孔部9a的大小,使得其与光功能部30的距离为100~800μm,最好为500~700μm。In the case of the present invention, although the size of the light transmission
另外,按照同样的观点,优选将光功能元件3的上表面与封装结构部件9的下表面的空隙设定为100~600μm。Also, from the same viewpoint, it is preferable to set the gap between the upper surface of the optical
而且,在例如采用热固化型树脂作为密封树脂8的情况下,在该状态下通过以规定的温度进行加热使密封树脂8固化,从而使封装结构部件9固接在基板2上。Furthermore, when a thermosetting resin is used as the sealing
其后,如图1(d)所示,通过沿着突堤部7的内侧附近的划线12进行切割,从而如图2所示,得到作为目的物的光功能元件安装模块1。Thereafter, as shown in FIG. 1( d ), by cutting along the
如以上所述,在本实施方式的光功能元件安装模块1中,由于光功能元件3的光功能部30呈露出的状态,所以能提供一种无需使用施加了特殊涂敷的昂贵玻璃就能无衰减地可靠地输入输出如蓝紫色激光这样的短波长的光11而且散热性也优越的光功能元件安装模块1。As described above, in the optical functional
另外,按照本实施方式,由于无需框状的衬垫,所以能提供一种非常小型的光功能元件安装模块1。In addition, according to this embodiment, since a frame-shaped spacer is unnecessary, it is possible to provide a very small optical functional
另一方面,按照本实施方式的方法,可用极简单的工序来制造上述光功能元件安装模块1。On the other hand, according to the method of this embodiment, the above-mentioned optical functional
特别是在本实施方式中,由于在光功能元件3的周围区域形成环状的突堤部7,所以能在光功能元件3的周围可靠地阻挡液态密封树脂8,能可靠地密封光功能元件3的光功能部30以外的部分。In particular, in this embodiment, since the ring-shaped
图3(a)~(d)是表示本发明的另一实施方式的主要部分的剖面结构图,以下,对与上述实施方式对应的部分标以同一符号并省略其详细的说明。3( a ) to ( d ) are cross-sectional structural diagrams showing main parts of another embodiment of the present invention. Hereinafter, parts corresponding to the above-mentioned embodiment are assigned the same reference numerals and detailed description thereof will be omitted.
在本实施方式中,首先,与上述实施方式同样地,在形成有规定的布线图形4的基板2上,安装具有规定的功能部30A的功能元件3A,在功能元件3A与突堤部7之间滴注液态密封树脂8,以在功能元件3A与上述突堤部7之间充填该密封树脂8。In the present embodiment, first, as in the above-mentioned embodiment, a
然后,如图3(a)所示,将封装结构部件9抵接配置在突堤部7上,以规定的压力向基板2的方向进行整体按压。Then, as shown in FIG. 3( a ), the
进而,如图3(b)所示,用例如粘结剂在封装结构部件9上贴合例如板状的保护用覆盖部件13,使之覆盖功能部露出用孔部9A。由此,在功能元件3A的功能部30A的上方形成功能部露出用空间10A。Furthermore, as shown in FIG. 3( b ), for example, a plate-shaped
在本发明的情况下,可用例如玻璃基板或树脂基板作为保护用覆盖部件13。在功能元件3A是发光元件或光接收元件等光功能元件的情况下,可用例如光透过性的玻璃基板。In the case of the present invention, for example, a glass substrate or a resin substrate can be used as the
另一方面,在本实施方式中,在保护用覆盖部件13的与封装结构部件9相对置的部分形成沟槽部,由此,在封装结构部件9与保护用覆盖部件13之间设置与功能部露出用空间10A连通的排气口14。On the other hand, in the present embodiment, a groove portion is formed in a portion of the
然后,如图3(c)、(d)所示,与上述实施方式同样地,沿突堤部7的内侧附近的划线12进行切割,从而得到作为目的物的功能元件安装模块1A。再有,在本实施方式中,也可在将保护用覆盖部件13贴合后,再进行上述封装结构部件9的按压。Then, as shown in FIG.3(c), (d), similarly to the above-mentioned embodiment, it cuts along the
如上所述,按照本实施方式,除了与上述实施方式同样的效果外,由于在封装结构部件9上设置覆盖功能部露出用孔部9A的保护用覆盖部件13,所以还可防止异物附着在功能元件3A的功能部30A上。As described above, according to this embodiment, in addition to the same effect as the above-mentioned embodiment, since the
另外,在本实施方式中,由于在封装结构部件9与保护用覆盖部件13之间设置有与功能部露出用空间10A连通的排气口14,所以熔焊时在功能部露出用空间10A内膨胀的气体(空气)经排气口14逃逸,从而可提高耐熔焊性。另外,通过设置该排气口14,还可防止功能部露出用空间10A内的结露。In addition, in the present embodiment, since the
关于其它的结构和作用效果,由于与上述的实施方式相同,故省略其详细的说明。The other configurations and effects are the same as those of the above-mentioned embodiment, so detailed description thereof will be omitted.
图4(a)~(d)是表示本发明的又一实施方式的主要部分的剖面结构图,以下,对与上述实施方式对应的部分标以同一符号并省略其详细的说明。4( a ) to ( d ) are cross-sectional structural diagrams showing main parts of still another embodiment of the present invention. Hereinafter, parts corresponding to the above-mentioned embodiment are given the same reference numerals and detailed description thereof will be omitted.
在本实施方式中,首先,也与上述实施方式同样地,在形成有规定的布线图形4的基板2上,安装具有规定的功能部30A的功能元件3A,在功能元件3A与突堤部7之间滴注液态密封树脂8,以在功能元件3A与上述突堤部7之间充填该密封树脂8。In the present embodiment, first, as in the above-mentioned embodiment, a
然后,如图4(a)所示,将封装结构部件9抵接配置在突堤部7上,以规定的压力向基板2的方向进行整体按压。Then, as shown in FIG. 4( a ), the
进而,如图4(b)所示,用例如粘结剂在封装结构部件9上贴合由例如树脂材料构成的保护膜15,使之覆盖功能部露出用孔部9A。由此,在功能元件3A的功能部30A的上方形成功能部露出用空间10A。Furthermore, as shown in FIG. 4( b ), a
此时,用于保护膜15的粘结的粘结剂,可用粘结力弱且可使保护膜15从封装结构部件9剥离的粘结剂。At this time, the adhesive used for bonding the
其后,如图4(d)所示,与上述实施方式同样地,沿突堤部7的内侧附近的划线12进行切割,从而得到作为目的物的功能元件安装模块1B。Thereafter, as shown in FIG. 4( d ), similarly to the above-mentioned embodiment, cutting is performed along the
如上所述,按照本实施方式,除了与上述实施方式同样的效果外,由于在封装结构部件9上设置覆盖功能部露出用孔部9A的保护膜15,所以还可防止异物附着在功能元件3A的功能部30A上。As described above, according to this embodiment, in addition to the same effect as the above-mentioned embodiment, since the
而且,在本实施方式中,由于采用可从封装结构部件9剥离的保护膜15,所以在使用时通过剥掉保护膜15(参照图4(d)),可在使用了例如光功能元件的情况下无衰减地输入输出光信号。Moreover, in this embodiment, since the
图5(a)~(d)是表示本发明的功能元件安装模块的又一实施方式的制造方法的剖面结构图。5( a ) to ( d ) are cross-sectional structural views showing a manufacturing method of still another embodiment of the functional element mounting module of the present invention.
另外,图6(a)是该功能元件安装模块的剖面结构图,图6(b)是表示该功能元件安装模块在密封前的外观结构的俯视图。In addition, FIG. 6( a ) is a sectional structural view of the functional component mounting module, and FIG. 6( b ) is a plan view showing the appearance structure of the functional component mounting module before sealing.
以下,对与上述实施方式对应的部分标以同一符号并省略其详细的说明。Hereinafter, parts corresponding to the above-mentioned embodiment are assigned the same reference numerals, and detailed description thereof will be omitted.
如图5(a)和图6(a)、(b)所示,在本实施方式中,作为规定的功能元件3A,采用在功能部30A的附近设置有用于阻挡密封树脂8的阻挡部31的功能元件。As shown in FIG. 5(a) and FIG. 6(a), (b), in this embodiment, as a predetermined
在本发明的情况下,虽然阻挡部31的制作方法不作特别限定,但从沿用现有的半导体通用工艺的观点来看,优选采用用于形成保护膜(钝化膜)的材料(例如聚酰亚胺),以公知的光刻法制作。In the case of the present invention, although the fabrication method of the
另外,在本发明的情况下,虽然阻挡部31的大小和形状不作特别限定,但如考虑到密封树脂8向功能部露出用空间10A的流入,则优选以与封装结构部件9的功能部露出用孔部9A的形状对应的方式形成,例如形成与功能部露出用孔部9A大致相同大小的矩形环状。In addition, in the case of the present invention, although the size and shape of the blocking
具体地说,优选在功能元件3A的功能部30A的周围,设定阻挡部31的大小,使得其与功能部30A的距离为100~800μm,最好为500~700μm。Specifically, it is preferable to set the size of the
另外,按照同样的观点,优选将阻挡部31的宽度设定为50~300μm,将高度设定为1~50μm,将阻挡部31的上部与封装结构部件9的下表面的空隙设定为100~500μm。In addition, from the same point of view, it is preferable to set the width of the
在本实施方式中,如图5(a)、(b)所示,与上述实施方式同样地,在形成有规定的布线图形4的基板2上,安装上述功能元件3A,在功能元件3A与突堤部7之间滴注液态密封树脂8,以在功能元件3A与上述突堤部7之间充填密封树脂8。In this embodiment, as shown in Fig. 5 (a) and (b), similarly to the above-mentioned embodiment, the above-mentioned
然后,如图5(c)所示,将封装结构部件9抵接配置在突堤部7上,以规定的压力向基板2的方向进行整体按压。Then, as shown in FIG. 5( c ), the
由此,密封树脂8通过毛细现象沿着封装结构部件9的下表面向功能部露出用孔部9A扩展,在功能部露出用孔部9A的边缘部与功能元件3A上的阻挡部31的台阶的部分受到表面张力阻挡,形成止住状态,不会侵入功能部30A。As a result, the sealing
而且,在例如采用热固化型树脂作为密封树脂8的情况下,在该状态下通过以规定的温度加热使密封树脂8固化,从而使封装结构部件9固接在基板2上。Furthermore, when a thermosetting resin is used as the sealing
其后,如图5(d)所示,沿着突堤部7的内侧附近的划线12进行切割,从而如图6(a)所示,得到作为目的物的功能元件安装模块1C。Thereafter, as shown in FIG. 5( d ), cutting is carried out along the
如以上所述,按照本实施方式,除了与上述实施方式同样的效果外,由于在功能元件3A的功能部30A的附近设置阻挡部31,所以能在功能部30A的附近可靠地阻挡密封树脂8,从而能提高产品品质并能提高成品率。As described above, according to this embodiment, in addition to the same effect as the above-mentioned embodiment, since the blocking
图7(a)是表示本发明的功能元件安装模块的又一实施方式的剖面结构图,图7(b)是表示该功能元件安装模块在密封前的外观结构的俯视图,以下,对与上述实施方式对应的部分标以同一符号并省略其详细的说明。Fig. 7 (a) is the sectional structure diagram showing another embodiment of the functional element mounting module of the present invention, Fig. 7 (b) is the top view showing the appearance structure of the functional element mounting module before sealing, below, with the above-mentioned The corresponding parts in the embodiments are denoted by the same symbols, and detailed description thereof will be omitted.
如图7(a)、(b)所示,在本实施方式的功能元件安装模块1D中,作为规定的功能元件3A,采用在功能部30A的附近设置有用于阻挡密封树脂8的沟槽部(阻挡部)32的功能元件。As shown in FIGS. 7( a ) and ( b ), in the functional
在本发明的情况下,虽然沟槽部32的制作方法不作特别限定,但从沿用现有的半导体通用工艺的观点来看,优选在功能元件3A的功能部30A上及其周围的区域,以公知的光刻法分别形成并制作保护膜(钝化膜)33、34。In the case of the present invention, although the manufacturing method of the
另外,在本发明的情况下,虽然沟槽部32的大小和形状不作特别限定,但如考虑到密封树脂8向功能部露出用空间10A的流入,则优选以与封装结构部件9的功能部露出用孔部9A的形状对应的方式形成,例如形成与功能部露出用孔部9A大致相同大小的矩形环状。In addition, in the case of the present invention, although the size and shape of the
具体地说,优选在功能元件3A的功能部30A的周围,设定沟槽部32的大小,使得其与功能部30A的距离为100~800μm,最好为500~700μm。Specifically, it is preferable to set the size of the
进而,按照同样的观点,优选将沟槽部32的宽度设定为50~300μm,将深度设定为1~50μm,将保护膜的上部与封装结构部件9的下表面的空隙设定为100~500μm。Furthermore, from the same viewpoint, it is preferable to set the width of the
再有,本实施方式的功能元件安装模块1D例如可用与图5所示的实施方式相同的方法制作。In addition, the functional
如以上所述,按照本实施方式,除了与上述实施方式同样的效果外,由于在功能元件3A的功能部30A的附近设置沟槽部32,所以能在功能部30A的附近可靠地阻挡密封树脂8,从而能提高产品品质并能提高成品率。As described above, according to this embodiment, in addition to the same effect as the above-mentioned embodiment, since the
图8(a)、(b)和图9是表示本发明的功能元件安装模块的又一实施方式的剖面结构图,以下,对与上述实施方式对应的部分标以同一符号并省略其详细的说明。Fig. 8 (a), (b) and Fig. 9 are the cross-sectional structure diagrams showing still another embodiment of the functional element mounting module of the present invention, and hereinafter, the parts corresponding to the above-mentioned embodiment are denoted by the same symbols and their detailed descriptions are omitted. illustrate.
图8(a)所示的功能元件安装模块1E是在上述功能元件安装模块1C的封装结构部件9上设置上述保护用覆盖部件13后的模块。The functional
另外,图8(b)所示的功能元件安装模块1F是在上述功能元件安装模块1C的封装结构部件9上设置没有排气口14的保护用覆盖部件13后的模块。In addition, the functional
在这些情况下,保护用覆盖部件13可用与上述实施方式相同的方法设置。In these cases, the
按照具有这种结构的本实施方式,由于在封装结构部件9上设置有覆盖功能部露出用孔部9A的保护用覆盖部件13,所以可防止异物附着在功能元件3A的功能部30A上。关于其它的结构和作用效果,由于与上述的实施方式相同,故省略其详细的说明。According to the present embodiment having such a structure, since the
另一方面,图9所示的功能元件安装模块1G是在上述功能元件安装模块1D的封装结构部件9上设置上述可剥离的保护膜15后的模块。On the other hand, a functional
此时,保护膜15可用与上述实施方式相同的方法设置。At this time, the
按照具有这种结构的本实施方式,由于用保护膜33覆盖功能部3A,所以即使在使用时剥掉保护膜15的情况下也可防止异物附着在功能元件3A的功能部30A上。关于其它的结构和作用效果,由于与上述的实施方式相同,故省略其详细的说明。According to this embodiment having such a structure, since the
再有,本发明不限于上述实施方式,可进行各种变更。In addition, this invention is not limited to the said embodiment, Various changes are possible.
例如,在上述实施方式中,虽然将突堤部形成为环状,但只要能可靠地阻挡液态密封树脂,也可形成为其它形状。For example, in the above-mentioned embodiment, although the embankment is formed in a ring shape, it may be formed in another shape as long as it can reliably block the liquid sealing resin.
另外,在本发明中,也可用电子束(例如紫外线)固化型树脂作为密封树脂,用电子束使之固化。此时,由光透过性材料构成封装结构部件9,使电子束经该封装结构部件9照射到密封树脂上。In addition, in the present invention, an electron beam (for example, ultraviolet) curable resin may be used as the sealing resin, which is cured by an electron beam. At this time, the encapsulating
进而,本发明不仅可适用于光功能元件安装模块,还可适用于各种MEMS(Micro Electro Mechanical System:微机电系统)用零件。Furthermore, the present invention is applicable not only to optical functional element mounting modules, but also to various MEMS (Micro Electro Mechanical System: Micro Electro Mechanical System) parts.
此外,本发明可将上述各实施方式任意进行组合而构成。In addition, the present invention can be configured by arbitrarily combining the above-described embodiments.
Claims (17)
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US9448102B2 (en) | 2011-10-31 | 2016-09-20 | Aoi Electronics Co., Ltd. | Photoreception device with an insulating resin mass, and method for producing photoreception device |
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| CN100573862C (en) * | 2008-01-25 | 2009-12-23 | 苏州固锝电子股份有限公司 | A kind of semiconductor device of novel package structure |
| JP2009239106A (en) * | 2008-03-27 | 2009-10-15 | Sony Corp | Semiconductor device and method of producing the same |
| CN103794576A (en) * | 2014-01-26 | 2014-05-14 | 清华大学 | Packaging structure and packaging method |
| CN111758168B (en) * | 2018-02-19 | 2024-05-17 | 昕诺飞控股有限公司 | Sealed device with light engine |
| CN115084341B (en) * | 2022-05-11 | 2025-07-04 | 弘凯光电(江苏)有限公司 | Light emitting diode packaging device and light emitting diode packaging method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US9448102B2 (en) | 2011-10-31 | 2016-09-20 | Aoi Electronics Co., Ltd. | Photoreception device with an insulating resin mass, and method for producing photoreception device |
| CN104025283B (en) * | 2011-10-31 | 2017-06-30 | 青井电子株式会社 | Photosensitive device and method of manufacturing photosensitive device |
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