CN101051511A - Combination of microactuator, microactuator cantilever and magnetic head flap - Google Patents

Abstract

The invention discloses a micro-actuator for a magnetic head folding piece combination, which comprises a support frame, a balance block and a pair of piezoelectric elements, wherein the support frame and a cantilever flexible piece of the magnetic head folding piece combination are integrally formed. The support frame comprises a bottom support piece, a top support piece and a pair of side arms, wherein the top support piece is used for supporting the magnetic head of the magnetic head folding piece combination, and the side arms are used for connecting the bottom support piece and the top support piece. The side arms extend perpendicularly from respective sides of the bottom and top support members. The block is mounted on the bottom support for resonance balancing. Each piezoelectric element is arranged on the side surface of the side arm corresponding to the support frame, which corresponds to the block. The piezoelectric element may be activated to cause selective movement of the side arm.

Description

Combination of microactuator, microactuator cantilever and magnetic head flap

technical field

The present invention relates to an information recording disk drive unit, and more particularly to a microactuator, a microactuator cantilever, and a head gimbal assembly (HGA) or head drive arm for a disk drive device. Combination (head stack assembly).

Background technique

A common type of information storage device is a magnetic disk drive system that uses magnetic media to store data and a moveable read/write head positioned over the magnetic media to selectively read data from and write data to the magnetic media superior.

Consumers have always expected increasing storage capacity from such disk drive systems, while at the same time expecting faster and more accurate read and write speeds. Therefore, disk manufacturers have been devoting themselves to developing disk systems with higher storage capacity, such as increasing the density of magnetic tracks by reducing the track width or track spacing on the disk, thereby indirectly increasing the storage capacity of the disk. However, as the track density increases, the accuracy of the position control of the read/write head must also be correspondingly improved in order to achieve faster and more accurate read and write operations in high-density magnetic disks. As track density increases, it becomes more difficult to achieve faster and more precise positioning of the read/write head on the proper track on the disk using traditional techniques. As a result, disk manufacturers are constantly looking for ways to increase control over the position of the read/write head in order to take advantage of the benefits of increasing track densities.

One method often used by disk manufacturers to improve the accuracy of position control of the read/write head on high-density disks is to use a second drive, also called a microdrive. The micro drive cooperates with a main drive to jointly realize the position control accuracy and speed of the read-write head. Disk systems that contain microdrives are known as dual-drive systems.

Many dual drive systems have been developed in the past to increase the access speed and positioning accuracy of the read/write heads on the tracks of high-density magnetic disks. This dual-driver system usually includes a main voice coil motor driver and a secondary micro-driver, such as a piezoelectric micro-driver (ie, a piezoelectric micro-driver, hereinafter referred to as a piezoelectric micro-driver). The voice coil motor drive is controlled by a servo control system that causes the rotation of the drive arm carrying the read-write head for positioning the read-write head on the track of the storage disk. The piezoelectric micro-driver is used in conjunction with the voice coil motor driver to improve the access speed and realize the fine adjustment of the position of the read-write head on the magnetic track. The voice coil motor driver provides coarse adjustment of the position of the read-write head, while the piezoelectric micro-actuator provides fine adjustment of the position of the read-write head relative to the disk. Through the cooperation of the two drives, the efficient and accurate read and write operations of data on the storage disk are jointly realized.

A known microactuator for fine-tuning the position of a read/write head contains piezoelectric elements. The piezoelectric microactuator has associated electronics that cause selective contraction or expansion of the piezoelectric element on the microactuator. The piezoelectric microactuator is structured such that contraction or expansion of the piezoelectric element causes movement of the microactuator, which in turn causes movement of the read/write head. This head movement enables faster and more precise adjustments to the head position relative to magnetic disk systems that use only voice coil motor drives. Exemplary piezoelectric micro-actuators of this type are disclosed in many patents, such as Japanese Patent JP 2002-133803 entitled "Micro-actuator and Head Gap Combination" and "HGA Assembly with Actuator Achieving Fine Position Adjustment" , a magnetic disk system comprising the head gimbal assembly and a manufacturing method of the head gimbal assembly" Japanese Patent JP 2002-074871.

1-2 illustrate a conventional disk drive unit, a disk 101 is mounted on and rotated by a spindle motor 102 . A HGA 100 is carried on the voice coil motor arm 104 . The HGA 100 includes a micro-drive 105 including a magnetic head 103 on which a read/write head is installed. A voice coil motor controls the movement of the voice coil motor arm 104 , and then controls the movement of the magnetic head 103 between the magnetic tracks on the surface of the magnetic disk 101 , and finally realizes the reading and writing of data on the magnetic disk 101 by the read/write head.

However, due to the inherent error of the combination of the voice coil motor and the head suspension, the magnetic head 103 cannot achieve fast and precise position control. On the contrary, it affects the performance of the read-write head to accurately read and write data on the disk. For this reason, the above-mentioned piezoelectric micro-driver 105 is added to improve the position control accuracy of the magnetic head and the read/write head. More specifically, compared with the voice coil motor, the piezoelectric micro-actuator 105 adjusts the displacement of the magnetic head 103 in a smaller range, so as to compensate the resonance error of the voice coil motor and/or head suspension combination. The piezoelectric micro-actuator makes it possible to apply a smaller track pitch, and can increase the track density (TPI, the number of tracks per inch) of the magnetic disk system by 50%, while reducing the seeking time of the magnetic head (seeking time). time) and positioning time (settling time). Therefore, the piezoelectric microactuator can greatly increase the surface recording density of the storage disk.

FIG. 3 shows a conventional microactuator, such as the microactuator disclosed in US Pat. No. 6,198,606. Heads 112 (including read/write heads) are used to maintain a predetermined flying height above the disk surface. A micro-actuator may have flexible beams 114 for connecting a support device 116 to a head housing unit 118 . This structure enables the head 112 to move independently of the drive arm. An electromagnetic assembly or an electromagnetic/ferromagnetic assembly may be used to fine-tune the position of the magnetic head 112 relative to the drive arm.

The structure shown in Figure 3 has some drawbacks. First, fabrication of electromagnetic assemblies or electromagnetic/ferromagnetic assemblies is difficult due to the small location of the microactuators on the head suspension. Also, its weight may affect the performance of the head gimbal assembly, such as resonance performance. Second, the flexible beam 114 is difficult to manufacture, and its stiffness may greatly affect the performance of the microactuator, such as displacement and shock resistance. In addition, the flex beam 114 may have chipping and aging issues when operating conditions such as temperature and humidity change. In addition, the assembly of the flexible beam and the electromagnetic assembly or the electromagnetic/ferromagnetic assembly is a complete process, and the assembly process is not easy to control. This results in increased manufacturing costs and greater process variability.

Therefore it is necessary to provide an improved system to overcome the deficiencies of the prior art.

Contents of the invention

One aspect of the present invention relates to a microactuator for a HGA. The micro-actuator includes a support frame integrally formed with the cantilever flexible part combined with the magnetic head gimbal, a balance weight and a pair of piezoelectric elements. The support frame includes a bottom support, a top support for supporting the magnetic head of the HGA, and a pair of side arms connecting the bottom support and the top support to each other. The side arms extend perpendicularly from respective sides of the bottom support and the top support. The mass is mounted on the bottom support for providing resonance balance. Each of the piezoelectric elements is installed on the corresponding side arm of the support frame and the corresponding side of the block. The piezoelectric element is energizable to cause selective movement of the arm.

Another aspect of the present invention relates to a HGA, which includes a micro-actuator, a magnetic head, and a suspension supporting the micro-actuator and the magnetic head. The micro-actuator includes a support frame integrally formed with the cantilever flexible part combined with the magnetic head gimbal, a balance weight and a pair of piezoelectric elements. The support frame includes a bottom support, a top support for supporting the magnetic head of the HGA, and a pair of side arms connecting the bottom support and the top support to each other. The side arms extend perpendicularly from respective sides of the bottom support and the top support. The mass is mounted on the bottom support for providing resonance balance. Each of the piezoelectric elements is installed on the corresponding side arm of the support frame and the corresponding side of the block. The piezoelectric element is energizable to cause selective movement of the arm.

Another aspect of the present invention relates to a disk drive, which includes a HGA, a drive arm connected to the HGA, a magnetic disk, and a spindle motor for driving the magnetic disk to rotate. The HGA includes a micro-actuator, a magnetic head, and a suspension supporting the micro-actuator and the magnetic head. The micro-actuator includes a support frame integrally formed with the cantilever flexible part combined with the magnetic head gimbal, a balance weight and a pair of piezoelectric elements. The support frame includes a bottom support, a top support for supporting the magnetic head of the HGA, and a pair of side arms connecting the bottom support and the top support to each other. The side arms extend perpendicularly from respective sides of the bottom support and the top support. The mass is mounted on the bottom support for providing resonance balance. Each of the piezoelectric elements is installed on the corresponding side arm of the support frame and the corresponding side of the block. The piezoelectric element is energizable to cause selective movement of the arm.

Another aspect of the invention relates to a method of manufacturing a piezoelectric microactuator. The method includes integrally forming the microactuator support frame and the cantilever flexible part of the cantilever; installing the resonant balance weight to the bottom support part of the microactuator support frame; installing the piezoelectric unit to the microactuator On the actuator supporting frame, each piezoelectric element is extended along the corresponding side arm of the microactuator supporting frame and the corresponding side of the resonance balance weight; the magnetic head is installed on the microactuator on the top support of the support frame; electrically connecting the piezoelectric unit and the magnetic head with the cantilever wire of the cantilever; and visually inspecting.

The present invention will become clearer through the following description in conjunction with the accompanying drawings, which are used to explain the embodiments of the present invention.

Description of drawings

FIG. 1 is a perspective view of a conventional disk drive unit.

FIG. 2 is a partial perspective view of the conventional disk drive unit shown in FIG. 1 .

Fig. 3 is a plan view of a microactuator in the prior art.

FIG. 4 is a perspective view of a HGA including a piezoelectric microactuator according to an embodiment of the present invention.

FIG. 5 is a partial perspective view of the HGA shown in FIG. 4 viewed from the front.

FIG. 6 is a partial perspective view of the HGA shown in FIG. 4 viewed from the rear.

FIG. 7 is a partial side view of the HGA shown in FIG. 4 .

FIG. 8 is a partial perspective view of the magnetic head flap assembly shown in FIG. 4 after removing the magnetic head in the piezoelectric microactuator.

FIG. 9 is an exploded view of the head gimbal assembly shown in FIG. 4 .

FIG. 10 is a perspective view of the piezoelectric microactuator shown in FIG. 4 with the balance weight removed.

FIG. 11 is a perspective view of the piezoelectric microactuator shown in FIG. 4 after the balance weight is installed.

FIG. 12 shows a partial perspective view of the balance weight shown in FIG. 4 aligned with the side arm of the piezoelectric microactuator.

FIG. 13 shows a partial perspective view of installing the piezoelectric element on the balance weight and the side arm of the piezoelectric microactuator shown in FIG. 4 .

Figures 14-15 illustrate a typical process for forming the arm of the piezoelectric microactuator shown in Figure 4 .

Figure 16 shows a flow diagram of a fabrication and assembly method according to one embodiment of the invention.

Figures 17a-17c are a series of views illustrating the flow of the method of manufacture and assembly shown in Figure 16 .

Figure 18 shows the resonance test data of the piezoelectric microactuator shown in Figure 4.

19-20 are perspective views of a piezoelectric microactuator according to another embodiment of the present invention.

21-22 are perspective views of the piezoelectric microactuator according to another embodiment of the present invention.

Detailed ways

Various embodiments of the present invention will now be described with reference to the drawings, wherein like numerals in different figures represent similar parts. The invention aims at improving the resonance performance of the magnetic head gimbal assembly while using a micro actuator to accurately drive the magnetic head. By improving the resonance performance of the head gimbal assembly, its working characteristics are improved.

Several embodiments of the HGA are now described. It should be noted that the microactuator can be used in any suitable disk drive device containing a microactuator to improve its resonance performance, and is not limited to the specific structure of the HGA illustrated in the accompanying drawings. That is, the present invention can be used in any industry in suitable devices containing microactuators.

4-17c shows an HGA 210 including a piezoelectric microactuator 212 according to an embodiment of the present invention. The HGA 210 includes a micro-actuator 212 , a magnetic head 214 , and a suspension 216 for carrying or suspending the piezoelectric micro-actuator 212 and the magnetic head 214 .

As shown in FIGS. 4-9 , the cantilever component 216 includes a base plate 218 , a load bar 220 , a pivot component 222 , a flexible component 224 and inner and outer cantilever wires 226 , 227 on the flexible component 224 . The pivot member 222 is mounted on the base plate 218 and the load bar 220 by means such as laser welding. Both the base plate 218 and the pivot member 222 are provided with a hole 228 for connecting the suspension member 216 to the driving arm of the voice coil motor of the disk drive. The base plate 218 is made of a relatively hard or rigid material such as metal, so as to stably support the cantilever 216 on the driving arm of the voice coil motor. Both the base plate 218 and the pivot member 222 are provided with additional holes 230 for reducing weight. In addition, the pivot member 222 further includes a holding bar 232 for supporting the load bar 220 .

A bump 234 is formed on the load bar 220 for supporting a cantilever tongue 238 (see FIG. 7 ). The load bar 220 may also have a lift tab 236 on it to separate the HGA 210 from the disk when the disk stops rotating.

The flexible member 224 is mounted on the pivot member 222 and the load bar 220 by eg laser welding. The cantilever tongue 238 is mounted to the flexure 224 by, for example, mechanical welding. The cantilever tongue 238 connects the piezoelectric microactuator 212 and the cantilever 216 together (refer to FIG. 7 ). In addition, the cantilever wires 226, 227 are formed on the flexible member 224 to connect the plurality of connection contacts 240 (which are connected to the external control system) with the magnetic head 214 and the piezoelectric element on the piezoelectric micro-actuator 212. 242 and 243 are electrically connected.

As shown in Figures 10-11, the piezoelectric microactuator 212 includes a microactuator support frame 252, a balance weight 260 installed on the microactuator support frame 252, and a The piezoelectric elements 242, 243 on the frame 252 and the balance weight 260.

The microactuator supporting frame 252 is integrally formed with the flexible member 224 or integrated therein. The microactuator supporting frame 252 includes a top support 254 , a bottom support 256 and side arms 258 , 259 connecting the top support 254 and the bottom support 256 to each other. The microactuator support frame 252 can be made of relatively hard material such as metal.

A plurality of connection contacts 244 are formed on the bottom support member 256, for example two contacts 244 are formed on each side. The connection contacts 244 are directly connected to the inner cantilever wires 226, so as to connect the inner cantilever wires 226 to the connection contacts 246 provided on the piezoelectric elements 242, 243, for example, each piezoelectric element 242 The two connecting contacts 246 on , 243 are electrically connected. The top support member 254 is also provided with connection contacts 248 , for example four connection contacts 248 . The connection contacts 248 are directly connected to the outer cantilever wires 227 so as to electrically connect the outer cantilever wires 227 to the connection contacts 250 on the magnetic head 214 , for example, four connection contacts 250 .

The side arms 258 , 259 are formed perpendicularly from respective sides of the top and bottom supports 254 , 256 . In one embodiment, as shown in FIG. 14 , the side arms 258 , 259 are initially in a substantially flat state and then vertically brought into an operative position as shown in FIG. 15 . As shown, notches or spaces 257, such as four notches, are formed between the top support member 254, the bottom support member 256, and the corresponding side arms 258, 259. This configuration will allow the side arms 258, 259 to move more freely.

The balance weight 260 is mounted on the bottom support member 256 of the micro-actuator support frame 252 by, for example, welding. The balance weight 260 is used for resonance balancing. As shown in FIGS. 11 and 12 , the balance weight 260 is mounted on the bottom support 256 such that the side 262 of the balance weight 260 is fully aligned with the outer surface 264 of the corresponding side arms 258 , 259 . This structure facilitates the installation of piezoelectric elements 242,243.

Each piezoelectric element 242 , 243 is mounted on a corresponding side of the corresponding side arm 258 , 259 and counterweight 260 . Specifically, as shown in FIGS. 8 and 13 , the piezoelectric elements 242 and 243 are respectively mounted on the outer surfaces 264 of the corresponding side arms 258 and 259 and the corresponding side surfaces 262 of the balance weight 260 . Each piezoelectric element 242, 243 is provided with a connecting contact 246, for example two connecting contacts, for electrically connecting the piezoelectric element 242, 243 to the connecting contact 244 directly connected to the inner cantilever wire 226. sexual connection.

As shown in FIG. 9 , the cantilever tongue 238 is formed independently of the flexure 224 and includes a middle region 270 and two arm members 272 . The cantilever tongue 238 is mounted together with the flexure 224 by mounting the two arm elements 272 on the corresponding side regions 225 of the flexure 224 by eg laser welding. As shown in FIG. 6 , the load rod 220 is provided with a limiter 268 for limiting the movement of the cantilever tongue 238 .

The bottom support 256 is mounted on the cantilever tongue 238 as shown in FIGS. 7-8 . In this embodiment, bottom support 256 is mounted to cantilever tongue 238 by epoxy 274 . However, the bottom support 256 may also be mounted to the cantilever tongue 238 by other suitable means, such as by anisotropic conductive film (ACF) or laser welding.

In addition, the piezoelectric connection contacts 246 formed on the corresponding piezoelectric elements 242, 243, such as two connection contacts, are connected to the bottom support by means of electrical connection balls (gold ball bonding or solder ball bonding, GBB or SBB) 276. The corresponding connection contacts 244 on the component 256 are electrically connected. This allows power to be applied to the piezoelectric elements 242 , 243 through the inner cantilever wire 226 .

The top support 254 has a suitable structure so that the microactuator support frame 252 is connected with the magnetic head 214 . Specifically, the magnetic head 214 has connecting contacts 250 corresponding to the magnetic head connecting contacts 248 on the top support 254 at one end thereof, for example, four connecting contacts. The top supporting member 254 supports the magnetic head 214 thereon, and the magnetic head connection contacts 248 are electrically connected to the corresponding connection contacts 250 on the magnetic head 214 via, for example, electrical connection balls 278 . Thereby, the top support 254 is connected with the magnetic head 214 , and the magnetic head 214 and its read/write elements are electrically connected with the outer suspension wire 227 .

As shown in FIG. 7 , the microactuator support frame 252 is installed on the cantilever tongue 238 in parallel, and a gap 280 is formed between them. This structure allows the microactuator support frame 252 to move smoothly and freely during use.

In addition, one end of the cantilever tongue 238 is supported by the protruding point 234 on the load bar 220 , the protruding point is located below the center of the magnetic head 214 . The other end of the cantilever tongue 238 is mounted to the side region 225 of the flexure 224 by, for example, welding. This configuration allows maintaining a mechanical step and supports the cantilever tongue 238 parallel to the load bar 220, thereby maintaining a good static posture of the cantilever member 216.

Figure 16 and Figures 17a-17c show the main steps of the manufacturing and assembly process of the piezoelectric microactuator 212 according to an embodiment of the present invention. After the flow process starts (step 1 among Fig. 16), as shown in Fig. 17a, piezoelectric elements 242, 243 and balance weight 260 are installed on the microactuator support frame 252 integrally formed with cantilever flexible part 224 ( Step 2 among Fig. 16); Next, as shown in Fig. 17b, magnetic head 214 is installed on the microactuator supporting frame 252 (step 3 among Fig. 16); Then, as shown in Fig. 17c, piezoelectric Components 242, 243 are electrically connected to the cantilever wire 226 (step 4 in FIG. 16); the magnetic head 214 is electrically connected to the cantilever wire 227 (step 5 in FIG. 16); visual inspection (step 5 in FIG. 16) Step 6), thereby completing the manufacturing and assembly process (step 7 in FIG. 16).

FIG. 18 shows the resonance test data before and after the balance weight 260 is installed on the micro-actuator support frame 252 . Specifically, curve 290 shows the resonance performance before the weight 260 is installed, and curve 292 shows the resonance performance after the weight 260 is installed. As shown in the figure, when the balance weight 260 is installed on the micro-actuator support frame 252, both the resonance frequency and the gain characteristics are improved.

19-20 illustrate a piezoelectric microactuator 312 according to another embodiment of the present invention. In this embodiment, resonance balancing is provided by two separate components 385 . Each member 385 includes first and second arm portions 387, 389 bent at 90 degrees to each other. As shown in FIG. 20, the member 385 is mounted on the bottom support member 256 of the microactuator support frame 252 such that the arm portion 387 of the member 385 is fully aligned with the outer surface 264 of the corresponding side arm 258, 259. . The remaining structure of the piezoelectric microactuator 312 is substantially similar to that of the piezoelectric microactuator 212 and is denoted by similar reference numerals.

21-22 illustrate a piezoelectric microactuator 412 according to another embodiment of the present invention. Resonance balancing is provided by component 485 in this embodiment. The member 485 includes a bottom arm 486 and first and second side arms 487, 489 bent at 90 degrees to each other. As shown in FIG. 22, the member 485 is mounted on the microactuator support frame 252 such that the two side arms 487, 489 of the member 485 are substantially aligned with the outer surfaces 264 of the corresponding side arms 258, 259, respectively. The remaining components of the piezoelectric microactuator 412 are substantially similar to the piezoelectric microactuator 212 and are designated by like reference numerals.

According to an embodiment of the present invention, the HGA 210 including the micro-actuator 212, 312 or 412 may be used in a disk drive (HDD). The disk drive may be of the type described in connection with FIGS. 1 and 2 . Since the structure, operation and assembly process of the disk drive are familiar to ordinary technical personnel in the industry, no detailed description is given here. The piezoelectric microactuator of the present invention may be used with any suitable disk drive having a microactuator, or any other device having a microactuator.

The present invention has been described above in conjunction with the best embodiments, but the present invention is not limited to the above-disclosed embodiments, but should cover various modifications and equivalent combinations made according to the essence of the present invention.

Claims (20)

1. micro-actuator that is used for magnetic head fold piece combination comprises:

The bracing frame integrally formed with the cantilever flexible element of described magnetic head fold piece combination, support frame as described above comprises: end support member; Be used to support the top support member of the magnetic head of described magnetic head fold piece combination; And the opposite side arm that support member of the described end and top support member are connected to each other; Wherein said limit arm vertically extends from the respective side edge of end support member and top support member;

Be installed in the piece that is used to provide the resonance balance on the support member of the described end; And

On the limit arm that a pair of piezoelectric element, each piezoelectric element are installed in the support frame as described above correspondence and the described corresponding side, wherein said piezoelectric element can be energized and cause the selectivity motion of described limit arm.

2. micro-actuator according to claim 1, it is characterized in that: support frame as described above is formed by metal material.

3. micro-actuator according to claim 1 is characterized in that: support member of the described end comprises the connecting terminal that links to each other with the cantilever lead of described cantilever flexible element, and described connecting terminal electrically connects with the corresponding connecting terminal of described piezoelectric element.

4. micro-actuator according to claim 1 is characterized in that: described top support member comprises the connecting terminal that links to each other with the cantilever lead of described cantilever flexible element, and described connecting terminal electrically connects with the corresponding connecting terminal of described magnetic head.

5. micro-actuator according to claim 1 is characterized in that: described has and the surperficial aligned with each other side of corresponding side arms towards the outside.

6. magnetic head fold piece combination, it comprises:

Micro-actuator;

Magnetic head; And

Support the cantilever part of described micro-actuator and magnetic head,

Wherein, described micro-actuator comprises:

The bracing frame integrally formed with the cantilever flexible element of described magnetic head fold piece combination, support frame as described above comprises: end support member; Be used to support the top support member of the magnetic head of described magnetic head fold piece combination; And the opposite side arm that support member of the described end and top support member are connected to each other; Wherein, described limit arm vertically extends from the respective side edge of end support member and top support member;

Be installed in the piece that is used to provide the resonance balance on the support member of the described end; And

On the limit arm that a pair of piezoelectric element, each piezoelectric element are installed in the support frame as described above correspondence and the described corresponding side, wherein said piezoelectric element can be energized and cause the selectivity motion of described limit arm.

7. magnetic head fold piece combination according to claim 6 is characterized in that: support member of the described end is installed on the cantilever tongue piece of described cantilever part.

8. magnetic head fold piece combination according to claim 7 is characterized in that: described cantilever tongue piece comprises zone line and two arm element, and described two arm element are installed in the side area of described cantilever flexible element correspondence.

9. magnetic head fold piece combination according to claim 7 is characterized in that: support member of the described end is installed on the described cantilever tongue piece by epoxide-resin glue, anisotropic conductive film or laser bonding mode.

10. magnetic head fold piece combination according to claim 7 is characterized in that: described cantilever tongue piece is supported on the side area of the salient point of load beam of described cantilever part and described cantilever flexible element.

11. magnetic head fold piece combination according to claim 7 is characterized in that: described cantilever tongue piece has the step that supports described micro-actuator.

12. magnetic head fold piece combination according to claim 6 is characterized in that: support frame as described above is made by metal material.

13. magnetic head fold piece combination according to claim 6 is characterized in that: support member of the described end comprises the connecting terminal that links to each other with the cantilever lead of described cantilever flexible element, and described connecting terminal electrically connects with the corresponding connecting terminal of described piezoelectric element.

14. magnetic head fold piece combination according to claim 6 is characterized in that: described top support member comprises the connecting terminal that links to each other with the cantilever lead of described cantilever flexible element, and described connecting terminal electrically connects with the corresponding connecting terminal of described magnetic head.

15. magnetic head fold piece combination according to claim 6 is characterized in that: described has and the surperficial aligned with each other side of corresponding side arms towards the outside.

16. a magnetic disk drive comprises:

The magnetic head fold piece combination that constitutes by the cantilever part of described micro-actuator of micro-actuator, magnetic head and support and magnetic head;

The horse district swing arm that is connected with described magnetic head fold piece combination;

Disk; And

Drive the Spindle Motor of described disk rotation,

Wherein, described micro-actuator comprises:

The bracing frame integrally formed with the cantilever flexible element of described magnetic head fold piece combination, support frame as described above comprises: end support member; Be used to support the top support member of the magnetic head of described magnetic head fold piece combination; And the opposite side arm that support member of the described end and top support member are connected to each other; Described limit arm vertically extends from the respective side edge of end support member and top support member;

Be installed in the piece that is used to provide the resonance balance on the support member of the described end; And

On the limit arm that a pair of piezoelectric element, each piezoelectric element are installed in the support frame as described above correspondence and the described corresponding side, wherein said piezoelectric element can be energized and cause the selectivity motion of described limit arm.

17. the manufacture method of a piezoelectric micro-actuator comprises:

The cantilever flexible element of micro-actuator bracing frame and cantilever part is integrally formed;

The resonance counterbalance weight is installed to the end support member of described micro-actuator bracing frame;

Piezoelectric unit is installed on the described micro-actuator bracing frame, described each piezoelectric element is extended along the corresponding sides arm of described micro-actuator bracing frame and the respective side of described resonance counterbalance weight;

Magnetic head is installed on the top support member of described micro-actuator bracing frame;

The cantilever lead of described piezoelectric unit and magnetic head and described cantilever part is electrically connected; And

Visual inspection.

18. method according to claim 17 is characterized in that also comprising: cantilever tongue piece is installed on the described cantilever flexible element; The end support member that reaches described micro-actuator bracing frame is installed on the described cantilever tongue piece.

19. method according to claim 18 is characterized in that: described cantilever tongue piece is supported on the salient point of load beam of described cantilever part.

20. method according to claim 18 is characterized in that: described cantilever tongue piece is installed comprises that two arm element with described cantilever tongue piece are installed on the respective side edge zone of described cantilever flexible element.

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