CN101071726B - Flat-panel display device with multi-section bent line cathode structure and its preparing process - Google Patents
Flat-panel display device with multi-section bent line cathode structure and its preparing process Download PDFInfo
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Abstract
本发明涉及一种多段弯线型阴极结构的平板显示器及其制作工艺，包括由阳极玻璃面板、阴极玻璃面板和四周玻璃围框所构成的密封真空腔；在阳极玻璃面板上有阳极导电层以及制备在阳极导电层上面的荧光粉层；在阴极玻璃面板上有阴极导电层、碳纳米管以及多段弯线型阴极结构；位于阳极玻璃面板和阴极玻璃面板之间的支撑墙结构以及消气剂附属元件，能够进一步增强栅极结构的控制功能，降低栅极结构的工作电压，提高碳纳米管阴极的电子发射效率和电子发射数量，具有制作过程稳定可靠、制作工艺简单、制作成本低廉、结构简单的优点。
The invention relates to a flat panel display with a multi-segment curved cathode structure and its manufacturing process, which includes a sealed vacuum chamber composed of an anode glass panel, a cathode glass panel and surrounding glass frames; an anode conductive layer is arranged on the anode glass panel and A phosphor layer prepared on the anode conductive layer; a cathode conductive layer, carbon nanotubes and a multi-segment curved cathode structure on the cathode glass panel; a support wall structure and a getter attached between the anode glass panel and the cathode glass panel The component can further enhance the control function of the grid structure, reduce the working voltage of the grid structure, improve the electron emission efficiency and the number of electron emission of the carbon nanotube cathode, and has the advantages of stable and reliable manufacturing process, simple manufacturing process, low manufacturing cost and simple structure The advantages.
Description
Technical field
The invention belongs to the mutual crossing domain in technical field of flat panel display, microelectronics science and technology field, vacuum science and technical field and nanometer science and technology field, relate to the element manufacturing of panel field emission display, be specifically related to the content of element manufacturing aspect of the panel field emission display of carbon nanotube cathod, particularly a kind of flat-panel monitor of multi-section bent line cathode structure and manufacture craft thereof.
Background technology
The field-emitter display of carbon nanotube cathod is a kind of emerging flat device, and it has merged the two advantage of cathode-ray tube display and LCD on displaying principle, and better in the performance of aspects such as power consumption, display quality and cost.Carbon nano-tube has little tip curvature radius, can launch a large amount of electronics under the alive outside effect, is a kind of quite outstanding cold cathode emissive material, and utilizes this principle, has carried out the research and the making of field emission flat-panel display.This display has that volume is little, in light weight, the visual angle is big and advantage such as operation temperature area is big, is representing the developing direction in following international flat panel display field.
In order to reduce the total device cost, so that can interrelate with the integrated drive electronics of routine, the field emission flat-panel display of making three-stage structure has become a kind of inevitable choice.Wherein, grid structure is one of element of comparison key, and can it directly determining carbon nanotube cathod carry out the electronics emission, and further reduce operating voltage of grid structure, also meets the requirement of low pressure flat device quality system.This will take up to carry out the work from many aspects obviously, need reduce the distance between grid structure and the carbon nanotube cathod structure on the one hand as much as possible, makes and utilizes lower grid voltage just to be enough to force carbon nanotube cathod to launch a large amount of electronics; Also need on the other hand the shape of carbon nanotube cathod is improved, further strengthen the electric field strength on top, carbon nanotube cathod surface; Also to make the Electric Field Distribution of whole carbon nanotube cathod want homogenizing and stabilisation simultaneously, improve the luminous uniformity of device.So, in the manufacturing process of practical devices, how on earth come further to strengthen the controlled function of grid structure, how on earth come further to improve the electronic transmitting efficiency of carbon nanotube cathod, and how on earth come further to reduce operating voltage of grid or the like, all be urgent problem.
In addition, in the middle of the panel field emission display spare of three-stage structure, guaranteeing that grid structure has carbon nanotube cathod under the prerequisite of good control action, also need to reduce as much as possible the total device cost, carry out reliable and stable, with low cost, function admirable, high quality devices is made.
Summary of the invention
The objective of the invention is to overcome the shortcoming and defect that exists in the above-mentioned flat-panel display device and provide a kind of with low cost, manufacturing process is reliable and stable, be made into the power height, the flat-panel monitor and the manufacture craft thereof of multi-section bent line cathode structure simple in structure.
The object of the present invention is achieved like this, comprise by anode glass panel, cathode glass faceplate and all around glass enclose sealed vacuum chamber that frame constitutes, at phosphor powder layer on anode conductive layer of the anode conductive layer that is provided with on the anode glass panel and preparation, supporting wall structure and the getter subsidiary component between anode glass panel and cathode glass faceplate, cathode conductive layer, carbon nano-tube and multi-section bent line cathode structure are arranged on cathode glass faceplate.
The backing material of described multi-section bent line cathode structure is a glass, as soda-lime glass, Pyrex, just cathode glass faceplate; The insulation paste of the printing on the cathode glass faceplate forms insulating barrier; Metal level after the etching above the insulating barrier forms the cathode leg layer; Metal level after the etching above the cathode leg layer forms the cathode substrate layer; The cathode substrate layer is a hexagon rib type shape, and its lower surface closely contacts with the cathode leg layer; Metal level after the etching above the cathode substrate layer forms cathode conductive layer; Cathode conductive layer presents the multi-section bent line shape, and promptly one section curved line is a two halves, and per half part all is a bit of straight line, and the angle of two halves is 135 degree, and three sections curved lines are one group, and whole cathode conductive layer has three groups, and skew symmetry arrangement; The insulation paste of the printing above the insulating barrier forms and divides alternating floor; Divide the upper and lower surface of alternating floor to be the plane, lower surface will cover cathode leg layer and vacant insulating barrier part; Divide in the alternating floor and have circular apertures, expose the cathode substrate layer and the cathode conductive layer of bottom; Dividing the madial wall of circular apertures in the alternating floor is the arc-shaped recess shape, the cross section that promptly divides the circular apertures at alternating floor upper surface place is round, from upper surface, and the inner recess of oblique gradually minute alternating floor, its diameter enlarges gradually, till arriving the lower surface that divides alternating floor; Metal level after the etching in the branch alternating floor on the madial wall of circular apertures forms the adjustable grid layer; The adjustable grid layer presents bent face circular ring type shape, depends on the circular apertures madial wall near the position of dividing the alternating floor upper surface; Divide the insulation paste layer of the printing above the alternating floor to form two layers of separations; The upper and lower surface of separating two layers is the plane, and the upper surface of its lower surface and branch alternating floor is in contact with one another; Also have circular apertures in separating two layers, the diameter of the top of circular apertures is identical in the lowermost end of its circular apertures and the branch alternating floor; The madial wall of circular apertures is a plagiohedral shape in separating two layers, separates the diameter maximum of two layers of upper surface place circular apertures, and diameter diminishes gradually successively, and till arriving the lower surface of separating two layers, its madial wall forms a slope; The circular apertures of separating two layers of bottom overlaps fully with the circular apertures of dividing the alternating floor top; Metal level after the etching of two layers of upper surface of separation forms the grid lead layer; The whole inclined-plane madial wall of circular apertures during the grid lead layer will cover and separate two layers, and and divide the adjustable grid layer of circular apertures in the alternating floor to be interconnected; The insulation paste layer of the printing above the grid lead layer forms the grid cover layer; The grid cover layer is wanted complete cover grid trace layer, comprises the chamfered portion of circular apertures in separating two layers; Made of carbon nanotubes is on cathode conductive layer.
The fixed position of described multi-section bent line cathode structure is for being fixed on the cathode glass faceplate; The cathode leg layer can be metallic gold, silver, copper, aluminium, molybdenum, chromium, tin, lead, indium; The cathode substrate layer can be metallic gold, silver, aluminium, molybdenum, chromium, tin; Cathode conductive layer can be metallic iron, cobalt, nickel; The adjustable grid layer can be metallic gold, silver, aluminium, molybdenum, chromium, copper, tin, indium; The trend of the trend of grid lead layer and cathode leg layer is orthogonal; The grid lead layer can be metallic gold, silver, aluminium, molybdenum, chromium.
A kind of manufacture craft that has the flat-panel monitor of multi-section bent line cathode structure, its manufacture craft is as follows:
1) making of cathode glass faceplate: whole plate glass is carried out scribing, produce cathode glass faceplate;
2) making of insulating barrier: on cathode glass faceplate, print insulation paste, behind baking, sintering process, form insulating barrier;
3) making of cathode leg layer: on insulating barrier, prepare a metal level, form the cathode leg layer after the etching;
4) making of cathode substrate layer: on the cathode leg layer, prepare a metal level, form the cathode substrate layer after the etching;
5) making of cathode conductive layer: on the cathode substrate layer, prepare a metal level, form cathode conductive layer after the etching;
6) making of branch alternating floor: printing insulation paste on insulating barrier forms behind baking, sintering process and divides alternating floor;
7) making of adjustable grid layer: on minute madial wall of alternating floor circular apertures, prepare a metal level, form the adjustable grid layer after the etching;
8) separate two layers making: on the upper surface of minute alternating floor, print insulation paste, behind baking, sintering process, form and separate two layers;
9) making of grid lead layer: on the upper surface of two layers of separations, prepare a metal level, form the grid lead layer after the etching;
10) the tectal making of grid: printing insulation paste on the grid lead layer forms the grid cover layer behind baking, sintering process;
11) cleaning surfaces of multi-section bent line cathode structure is handled: clean is carried out on the surface to multi-section bent line cathode structure, removes impurity and dust;
12) preparation of carbon nano-tube: with made of carbon nanotubes on cathode conductive layer;
13) making of anode glass panel: the dull and stereotyped soda-lime glass of integral body is carried out scribing, produce the anode glass panel;
14) making of anode conductive layer: evaporation one deck tin indium oxide rete on the anode glass panel; Form anode conductive layer after the etching;
15) making of insulation paste layer: at the non-display area printing insulation paste layer of anode conductive layer;
16) making of phosphor powder layer: the viewing area printing phosphor powder layer on anode conductive layer;
17) device assembling: with cathode glass faceplate, anode glass panel, supporting wall structure and all around glass enclose frame and be assembled together, and getter is put in the middle of the cavity, fix with glass powder with low melting point.Around face glass, smeared glass powder with low melting point, fixed with clip;
18) finished product is made: the device that has assembled is carried out packaging technology form finished parts.
Described step 15 is specially the non-display area printing insulation paste layer at anode conductive layer, is used to prevent the parasitic electrons emission; Through overbaking (baking temperature: 150 ℃, retention time: 5 minutes) afterwards, be placed on and carry out high temperature sintering (sintering temperature: 580 ℃, retention time: 10 minutes) in the sintering furnace.
Described step 16 is specially the viewing area printing phosphor powder layer on anode conductive layer; In the middle of baking oven, toast (baking temperature: 120 ℃, the retention time: 10 minutes).
The device that described step 18 is specially having assembled carries out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter of device inside bake and disappears, install pin formation finished parts at last additional.
The present invention has following good effect:
At first, in described multi-section bent line cathode structure, with made of carbon nanotubes above the multi-section bent line cathode conductive layer.Like this, made full use of the phenomenon that marginal position can be launched a large amount of electronics in the field-causing electron emission of carbon nanotube cathod, strong raising the electronic transmitting efficiency of carbon nanotube cathod; Simultaneously, greatly increase effective carbon nanotube cathod electron emission area and electronics emission quantity, made more carbon nanotube cathod all carry out the electronics emission, improved the display brightness of integral device.Grid structure and cathode construction height are integrated together, help lend some impetus to the Highgrade integration development of integral device.
Secondly, in described multi-section bent line cathode structure, adjustable grid layer and grid lead layer structure have been made respectively.The grid lead layer can be delivered to external voltage above the adjustable grid layer, come to form powerful electric field strength by the adjustable grid layer on top, carbon nanotube cathod surface, force carbon nano-tube to launch a large amount of electronics, embodied the strong control action of grid structure.Simultaneously,, voltage can be applied to the carbon nanotube cathod top uniformly, guarantee the uniformity of carbon nano electronic emission because the adjustable grid layer presents around curved ramp circular ring type shape is looped around; Carbon nanotube cathod can be approached as much as possible in the lower end of adjustable grid layer, shortens the distance between the two, thereby has greatly reduced operating voltage of grid structure.
In addition, in described multi-section bent line cathode structure, do not adopt special structure fabrication material, do not adopt special device making technics yet, this has just further reduced the cost of manufacture of whole flat-panel display device to a great extent, simplify the manufacturing process of device, can carry out large-area element manufacturing, helped carrying out business-like large-scale production.
Description of drawings
Fig. 1 has provided the vertical structure schematic diagram of multi-section bent line cathode structure;
Fig. 2 has provided the transversary schematic diagram of multi-section bent line cathode structure;
Fig. 3 has provided the schematic top plan view of cathode conductive layer in the multi-section bent line cathode structure;
Fig. 4 has provided and has had the structural representation multi-section bent line cathode structure emitting structural, the carbon nanotube field emission flat-panel screens.
Embodiment
Below in conjunction with drawings and Examples the present invention is further specified, but the present invention is not limited to these embodiment.
Described a kind of flat-panel monitor that has multi-section bent line cathode structure, comprise by anode glass panel [12], cathode glass faceplate [1] and all around glass enclose the straight cavity of sealing that frame [16] is constituted; Deposit anode conductive layer [13] and the phosphor powder layer [15] of preparation on anode conductive layer are arranged on the anode glass panel; Cathode conductive layer [5], carbon nano-tube [11] and multi-section bent line cathode structure are arranged on cathode glass faceplate; Supporting wall structure between anode glass panel and cathode glass faceplate [18] and getter subsidiary component [17].
Described multi-section bent line cathode structure comprises cathode glass faceplate [1], insulating barrier [2], cathode leg layer [3], cathode substrate layer [4], cathode conductive layer [5], divides alternating floor [6], adjustable grid layer [7], separates two layers of [8], grid lead layer [9], grid cover layer [10] and carbon nano-tube [11] part.
The backing material of described multi-section bent line cathode structure is a glass, as soda-lime glass, Pyrex, just cathode glass faceplate; The insulation paste of the printing on the cathode glass faceplate forms insulating barrier; Metal level after the etching above the insulating barrier forms the cathode leg layer; Metal level after the etching above the cathode leg layer forms the cathode substrate layer; The cathode substrate layer is a hexagon rib type shape, and its lower surface closely contacts with the cathode leg layer; Metal level after the etching above the cathode substrate layer forms cathode conductive layer; Cathode conductive layer presents the multi-section bent line shape, and promptly one section curved line is a two halves, and per half part all is a bit of straight line, and the angle of two halves is 135 degree, and three sections curved lines are one group, and whole cathode conductive layer has three groups, and skew symmetry arrangement; The insulation paste of the printing above the insulating barrier forms and divides alternating floor; Divide the upper and lower surface of alternating floor to be the plane, lower surface will cover cathode leg layer and vacant insulating barrier part; Divide in the alternating floor and have circular apertures, expose the cathode substrate layer and the cathode conductive layer of bottom; Dividing the madial wall of circular apertures in the alternating floor is the arc-shaped recess shape, the cross section that promptly divides the circular apertures at alternating floor upper surface place is round, from upper surface, and the inner recess of oblique gradually minute alternating floor, its diameter enlarges gradually, till arriving the lower surface that divides alternating floor; Metal level after the etching in the branch alternating floor on the madial wall of circular apertures forms the adjustable grid layer; The adjustable grid layer presents bent face circular ring type shape, depends on the circular apertures madial wall near the position of dividing the alternating floor upper surface; Divide the insulation paste layer of the printing above the alternating floor to form two layers of separations; The upper and lower surface of separating two layers is the plane, and the upper surface of its lower surface and branch alternating floor is in contact with one another; Also have circular apertures in separating two layers, the diameter of the top of circular apertures is identical in the lowermost end of its circular apertures and the branch alternating floor; The madial wall of circular apertures is a plagiohedral shape in separating two layers, separates the diameter maximum of two layers of upper surface place circular apertures, and diameter diminishes gradually successively, and till arriving the lower surface of separating two layers, its madial wall forms a slope; The circular apertures of separating two layers of bottom overlaps fully with the circular apertures of dividing the alternating floor top; Metal level after the etching of two layers of upper surface of separation forms the grid lead layer; The whole inclined-plane madial wall of circular apertures during the grid lead layer will cover and separate two layers, and and divide the adjustable grid layer of circular apertures in the alternating floor to be interconnected; The insulation paste layer of the printing above the grid lead layer forms the grid cover layer; The grid cover layer is wanted complete cover grid trace layer, comprises the chamfered portion of circular apertures in separating two layers; Made of carbon nanotubes is on cathode conductive layer.
The fixed position of described multi-section bent line cathode structure is for being fixed on the cathode glass faceplate; The cathode leg layer can be metallic gold, silver, copper, aluminium, molybdenum, chromium, tin, lead, indium; The cathode substrate layer can be metallic gold, silver, aluminium, molybdenum, chromium, tin; Cathode conductive layer can be metallic iron, cobalt, nickel; The adjustable grid layer can be metallic gold, silver, aluminium, molybdenum, chromium, copper, tin, indium; The trend of the trend of grid lead layer and cathode leg layer is orthogonal; The grid lead layer can be metallic gold, silver, aluminium, molybdenum, chromium.
A kind of manufacture craft that has the flat-panel monitor of multi-section bent line cathode structure, its manufacture craft is as follows:
1) making of cathode glass faceplate [1]: the dull and stereotyped soda-lime glass of integral body is carried out scribing, produce cathode glass faceplate;
2) making of insulating barrier [2]: on cathode glass faceplate, print insulation paste, behind baking, sintering process, form insulating barrier;
3) making of cathode leg layer [3]: on insulating barrier, prepare a metal molybdenum layer, form the cathode leg layer after the etching;
4) making of cathode substrate layer [4]: on the cathode leg layer, prepare a metallic chromium layer, form the cathode substrate layer after the etching;
5) making of cathode conductive layer [5]: on the cathode substrate layer, prepare a metal nickel dam, form cathode conductive layer after the etching;
6) making of branch alternating floor [6]: printing insulation paste on insulating barrier forms behind baking, sintering process and divides alternating floor;
7) making of adjustable grid layer [7]: on minute madial wall of alternating floor circular apertures, prepare a metallic chromium layer, form the adjustable grid layer after the etching;
8) making of separation two layers [8]: on the upper surface of minute alternating floor, print insulation paste, behind baking, sintering process, form and separate two layers;
9) making of grid lead layer [9]: on the upper surface of two layers of separations, prepare a metallic chromium layer, form the grid lead layer after the etching;
10) making of grid cover layer [10]: printing insulation paste on the grid lead layer forms the grid cover layer behind baking, sintering process;
11) cleaning surfaces of multi-section bent line cathode structure is handled: clean is carried out on the surface to multi-section bent line cathode structure, removes impurity and dust;
12) preparation of carbon nano-tube [11]: with made of carbon nanotubes on cathode conductive layer;
13) reprocessing of carbon nano-tube: carbon nano-tube is carried out reprocessing, improve field emission characteristics;
14) making of anode glass panel [12]: the dull and stereotyped soda-lime glass of integral body is carried out scribing, produce the anode glass panel;
15) making of anode conductive layer [13]: evaporation one deck tin indium oxide rete on the anode glass panel; Form anode conductive layer after the etching;
16) making of insulation paste layer [14]: at the non-display area printing insulation paste layer of anode conductive layer;
17) making of phosphor powder layer [15]: the viewing area printing phosphor powder layer on anode conductive layer;
18) device assembling: with cathode glass faceplate, anode glass panel, supporting wall structure [18] and all around glass enclose frame [16] and be assembled together, and getter [17] is put in the middle of the cavity, fix with glass powder with low melting point.Around face glass, smeared glass powder with low melting point, fixed with clip;
19) finished product is made: the device that has assembled is carried out packaging technology form finished parts.
Described step 16 is specially the non-display area printing insulation paste layer at anode conductive layer, is used to prevent the parasitic electrons emission; Through overbaking (baking temperature: 150 ℃, retention time: 5 minutes) afterwards, be placed on and carry out high temperature sintering (sintering temperature: 580 ℃, retention time: 10 minutes) in the sintering furnace.
Described step 17 is specially the viewing area printing phosphor powder layer on anode conductive layer; In the middle of baking oven, toast (baking temperature: 120 ℃, the retention time: 10 minutes).
The device that described step 19 is specially having assembled carries out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter of device inside bake and disappears, install pin formation finished parts at last additional.
Claims (6)
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| CN2007100545893A CN101071726B (en) | 2007-06-19 | 2007-06-19 | Flat-panel display device with multi-section bent line cathode structure and its preparing process |
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| CN2007100545893A CN101071726B (en) | 2007-06-19 | 2007-06-19 | Flat-panel display device with multi-section bent line cathode structure and its preparing process |
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| CN101071726A CN101071726A (en) | 2007-11-14 |
| CN101071726B true CN101071726B (en) | 2011-03-23 |
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| CN101593687B (en) * | 2008-05-30 | 2011-11-30 | 中芯国际集成电路制造(北京)有限公司 | Polysilicon grid, side wall, and semiconductor device and forming method thereof |
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| US6538367B1 (en) * | 1999-07-15 | 2003-03-25 | Agere Systems Inc. | Field emitting device comprising field-concentrating nanoconductor assembly and method for making the same |
| CN1794408A (en) * | 2005-12-27 | 2006-06-28 | 中原工学院 | Panel display having adulterated polycrystal silicon field emission cathode array structure and its manufacturing technology |
| CN1909156A (en) * | 2006-08-02 | 2007-02-07 | 中原工学院 | Flexural probe type grid control cathode structural panel display device and its production technique |
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| US6538367B1 (en) * | 1999-07-15 | 2003-03-25 | Agere Systems Inc. | Field emitting device comprising field-concentrating nanoconductor assembly and method for making the same |
| CN1794408A (en) * | 2005-12-27 | 2006-06-28 | 中原工学院 | Panel display having adulterated polycrystal silicon field emission cathode array structure and its manufacturing technology |
| CN1909156A (en) * | 2006-08-02 | 2007-02-07 | 中原工学院 | Flexural probe type grid control cathode structural panel display device and its production technique |
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| Title |
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| JP特开2001-43792A 2001.02.16 |
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