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CN101246917A - Method for increasing light absorption of thin film solar cell - Google Patents

Method for increasing light absorption of thin film solar cell Download PDF

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Publication number
CN101246917A
CN101246917A CNA2007100049696A CN200710004969A CN101246917A CN 101246917 A CN101246917 A CN 101246917A CN A2007100049696 A CNA2007100049696 A CN A2007100049696A CN 200710004969 A CN200710004969 A CN 200710004969A CN 101246917 A CN101246917 A CN 101246917A
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transparent
electrode
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李沅民
马昕
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Beijing Xingzhe Multimedia Technology Co ltd
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    • Y02E10/548Amorphous silicon PV cells

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Abstract

The invention discloses a method for increasing light absorption of a thin film solar cell. Glass beads with a diameter of less than 1 micrometer are first deposited on a glass substrate to give a surface with a suitable micrometer-sized relief structure, and then a transparent front electrode is deposited to give a similar surface structure with a pronounced light scattering effect. The thin film photovoltaic device formed on the transparent front electrode has higher light absorption capacity and conversion efficiency.

Description

增加薄膜太阳能电池光吸收的方法 Method to increase light absorption in thin-film solar cells

技术领域 technical field

本发明属于太阳能光伏器材领域,特别涉及到基于薄膜硅的光伏器件的制造技术。The invention belongs to the field of solar photovoltaic devices, in particular to the manufacturing technology of thin-film silicon-based photovoltaic devices.

背景技术 Background technique

最近几年,光伏电池和大面积光伏模块的发展引起了世人的广泛关注。尤其是氢化非晶硅和纳米晶硅,它们随着光伏器件在商业和住宅设施中的广泛应用,显示出巨大的潜力。在260℃以下这样较低的温度下生产薄膜硅光伏器件一个显著特点是,大面积沉积的与硅相关的半导体膜层和电接触膜层具有优良性能。同时,使用良好成熟的镀膜设备和程序,可以工业化地制成低成本的模板。施加在同一玻璃基板上的不同薄膜的激光划线成型工艺(laserpatterning)允许多个太阳能电池元件在薄膜沉积过程中直接形成集成式的大面积光伏模块,减少了加工步骤也改善了产品的可靠性。In recent years, the development of photovoltaic cells and large-area photovoltaic modules has attracted widespread attention in the world. Hydrogenated amorphous silicon and nanocrystalline silicon, in particular, have shown great potential with the widespread adoption of photovoltaic devices in commercial and residential installations. A notable feature of producing thin-film silicon photovoltaic devices at such a low temperature below 260°C is that the large-area deposited silicon-related semiconductor film layers and electrical contact film layers have excellent performance. At the same time, using well-established coating equipment and procedures, low-cost stencils can be produced industrially. The laser patterning of different thin films applied on the same glass substrate allows multiple solar cell elements to directly form an integrated large-area photovoltaic module during the thin film deposition process, reducing processing steps and improving product reliability .

对于光伏器件,特别是薄膜光伏器件来讲,使其性能优良的关键是优化半导体光电转换层对光能的吸收,并同时减少器件中的光损耗。在很薄的吸收层里能够最大限度的吸收光能,是高转换效率的必备条件。氢化薄膜硅所构成的太阳能电池通常具有p-i-n结构,其中p层和n层是不活跃的“死层”,它们在非掺杂的i层中建立一个内置电场,从而使得光致载流子被有效的收集。其吸收层的厚度一般只有几百个微米,最多不超过大约2000微米。而且氢化硅薄膜的红光和红外光的吸收系数都比较低,所以有很大部分的阳光不能被有效的利用起来。基于氢化硅薄膜的p-i-n结构被夹在前后两个电极(电接触层)中,而形成完整的光伏元件。通常使用的前电极必须具有良好的透明度和导电性,它通常是由透明导电氧化物(TCO)构成,譬如厚度为600-900纳米的被掺杂的氧化锡或氧化锌薄膜。后电极通常由一个TCO和金属薄膜共同组成,其一个重要作用就是将未被吸收的光反射回p-i-n结构之中。已经尝试过各种各样的办法来改善对光的吸收,其中包括使用粗糙的透明前电极。另外,也使用过反光率很高的背电极,使得未被吸收的光再一次被投回到电池中。对于非晶硅电池来讲吸收层i层也不能做得很厚,原因是该材料具有光质衰减的缺陷。所以卓越的光学设计对于像氢化硅这样的薄膜太阳能电池的转换效率起有决定性作用。For photovoltaic devices, especially thin-film photovoltaic devices, the key to their excellent performance is to optimize the absorption of light energy by the semiconductor photoelectric conversion layer and reduce the light loss in the device at the same time. The ability to absorb light energy to the maximum in a very thin absorbing layer is a necessary condition for high conversion efficiency. Solar cells made of hydrogenated thin-film silicon usually have a p-i-n structure, in which the p-layer and n-layer are inactive "dead layers", which establish a built-in electric field in the non-doped i-layer, so that photo-induced carriers are effective collection. The thickness of the absorbing layer is generally only a few hundred micrometers, at most not more than about 2000 micrometers. Moreover, the absorption coefficient of red light and infrared light of silicon hydrogenated film is relatively low, so a large part of sunlight cannot be effectively used. The p-i-n structure based on the hydrogenated silicon film is sandwiched between the front and rear electrodes (electrical contact layers) to form a complete photovoltaic element. The commonly used front electrode must have good transparency and conductivity, and it is usually made of transparent conductive oxide (TCO), such as a doped tin oxide or zinc oxide film with a thickness of 600-900 nm. The rear electrode is usually composed of a TCO and a metal film, and one of its important functions is to reflect unabsorbed light back into the p-i-n structure. Various approaches have been tried to improve light absorption, including the use of rough transparent front electrodes. In addition, a highly reflective back electrode is also used, so that the unabsorbed light is thrown back into the cell again. For amorphous silicon cells, the i-layer of the absorption layer cannot be made very thick, because the material has the defect of light quality attenuation. So excellent optical design plays a decisive role in the conversion efficiency of thin-film solar cells like hydrogenated silicon.

通常所使用的前电极TCO,譬如氧化锡,在其厚度不超过1000纳米时很难被做得具有高度的表面纹理结构或粗糙度,也就是说,它对光的散射能力往往不令人满意。具有粗糙表面的TCO经常具有较差的导电性能和较高的光损耗,这个缺陷限制了薄膜光伏器件光电效率进一步的提高。曾经有各种尝试,使得TCO的表面结构(texture)变得更明显,譬如对沉积好的TCO薄膜进行化学或机械处理,使其表面变得更粗糙,但这种做法所得到的粗糙性没有很好的控制性和重复性,从而经常导致薄膜光伏器件的缺陷。另外一种做法就是将TCO厚度增大,使得其表面粗糙性随厚度增加,但是增厚的TCO导致其对入射光的吸收增加,同时也延长了光伏器件的制作周期。所以,有必要寻求一种使厚度适中的TCO具有较高的、可控的表面结构的方法。而这种利于光散射的表面结构最好是由基板本身提供,而不依赖于TCO薄膜的形成过程。The commonly used front electrode TCO, such as tin oxide, is difficult to make with a high degree of surface texture or roughness when its thickness does not exceed 1000 nm, that is, its ability to scatter light is often unsatisfactory . TCOs with rough surfaces often have poor electrical conductivity and high light loss, which limits the further improvement of the photoelectric efficiency of thin-film photovoltaic devices. There have been various attempts to make the surface texture of TCO more obvious, such as chemically or mechanically treating the deposited TCO film to make the surface rougher, but the roughness obtained by this method is not as good as Very good control and repeatability, which often lead to defects in thin-film photovoltaic devices. Another approach is to increase the thickness of the TCO, so that the surface roughness increases with the thickness, but the thickened TCO increases the absorption of incident light, and also prolongs the production cycle of photovoltaic devices. Therefore, it is necessary to find a way to make TCO with a moderate thickness have a high and controllable surface structure. The surface structure that facilitates light scattering is preferably provided by the substrate itself, rather than relying on the formation process of the TCO film.

发明内容 Contents of the invention

基于上述考虑,申请人拟订了本发明的首要目的:提高基于氢化硅的薄膜太阳能光伏器件的转换效率。Based on the above considerations, the applicant formulated the primary purpose of the present invention: to improve the conversion efficiency of hydrogenated silicon-based thin-film solar photovoltaic devices.

本发明的进一步目的是,改善薄膜太阳能电池的制作工艺,从而增强该器件的光学特性,特别是对长波光的响应。A further object of the present invention is to improve the manufacturing process of thin-film solar cells, thereby enhancing the optical properties of the device, especially the response to long-wave light.

为了达到上述目的,本发明采用一种增加薄膜太阳能电池光吸收的方法。首先在玻璃基板上沉积直径低于1微米的玻璃珠粒,使其表面具有适当的微米尺寸的起伏结构,然后沉积透明前电极TCO,使其获得具有明显光散射效应的表面结构或颗粒状态(粗糙性)。然后在这个TCO之上,形成基于氢化硅薄膜的p-i-n型光伏单元和反光背电极。这些随后沉积的半导体和背电极薄膜在极大程度上保持了TCO的粗糙表面结构。所以入射的太阳光在进入p-i-n光伏单元之前在玻璃与TCO及TCO与氢化硅薄膜的两个界面上,受到散射。而未被光伏元件吸收的长波光,在背电极的两个界面上也受到两次散射性的反射,以较大的角度回到光电转换区域。所以依照本发明制造的薄膜光伏器件具有良好的光学设计,它对于捕获弱吸收光和提高光电转换效率十分有效。In order to achieve the above object, the present invention adopts a method for increasing the light absorption of a thin film solar cell. First, glass beads with a diameter of less than 1 micron are deposited on the glass substrate to make the surface have a suitable micron-sized undulating structure, and then the transparent front electrode TCO is deposited to obtain a surface structure or particle state with obvious light scattering effect ( roughness). Then on top of this TCO, a p-i-n type photovoltaic unit and a reflective back electrode based on hydrogenated silicon film are formed. These subsequently deposited semiconductor and back electrode films largely preserve the rough surface structure of the TCO. Therefore, the incident sunlight is scattered at the two interfaces of glass and TCO and TCO and silicon hydrogenated film before entering the p-i-n photovoltaic unit. The long-wave light that is not absorbed by the photovoltaic element is also reflected twice by scattering on the two interfaces of the back electrode, and returns to the photoelectric conversion area at a relatively large angle. Therefore, the thin film photovoltaic device manufactured according to the present invention has a good optical design, which is very effective for capturing weakly absorbed light and improving photoelectric conversion efficiency.

在玻璃衬底镀上透明前电极之前,就使它拥有起伏的表面,这样使得下面镀上的透明导电层会更容易具有更高的起伏性,使其对光的折射能力大大增强。用这种方法来得到更高的光折射力,比在高温下镀金属氧化膜的办法要更可行,而且它对金属氧化膜的厚度要求也大大减小。我们的实验已经证实这个概念的可行性。Before the glass substrate is plated with a transparent front electrode, it has an undulating surface, which makes it easier for the transparent conductive layer plated below to have a higher undulation, and greatly enhances its ability to refract light. It is more feasible to use this method to obtain a higher light refraction than the method of plating metal oxide film at high temperature, and it also greatly reduces the requirement for the thickness of the metal oxide film. Our experiments have demonstrated the feasibility of this concept.

本发明同样适用于由单一p-i-n光伏单元构成的单结光伏器件,和由多个p-i-n光伏单元叠加而成的多结光伏器件。The invention is also applicable to a single-junction photovoltaic device composed of a single p-i-n photovoltaic unit, and a multi-junction photovoltaic device formed by stacking a plurality of p-i-n photovoltaic units.

附图说明 Description of drawings

下面结合附图和实施例对本发明做进一步说明。The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

图1显示了使得透明前电极具有粗糙表面的过程。Figure 1 shows the process of making a transparent front electrode with a rough surface.

图2显示了依据本发明制造的薄膜太阳能电池的层状结构。Figure 2 shows the layered structure of a thin film solar cell manufactured according to the present invention.

具体实施方式 Detailed ways

如图1所示,本发明的第一步是将平展的玻璃板1清洗干净,然后使用溶胶滞体沉积法(sol-gel)将玻璃球镀到玻璃基板的表层。具体做法是将玻璃板浸入含有玻璃珠粒和粘连剂的溶胶滞体,并不断的搅拌溶胶滞体或是不断移动基板本身,从而使玻璃珠粒均匀的粘附到玻璃基板外表,然后将玻璃基板从溶胶滞体中取出,在不高于500℃的温度下,进行热处理使粘连剂固化,使玻璃珠粒牢固的附着在玻璃基板上,形成一个具有起伏结构的膜层11。在此之后在表层11上沉积透明前电极2(TCO),譬如氧化锡或氧化锌,使它的表面27具有类似于玻璃表层11或程度更高的表面粗糙性。其表面结构的平均起伏度应当是在30-80纳米之间,最好是接近50纳米。As shown in Figure 1, the first step of the present invention is to clean the flat glass plate 1, and then use sol-gel deposition method (sol-gel) to coat glass balls on the surface of the glass substrate. The specific method is to immerse the glass plate in a sol containing glass beads and adhesives, and constantly stir the sol or move the substrate itself, so that the glass beads evenly adhere to the surface of the glass substrate, and then the glass The substrate is taken out from the sol stagnant body, and heat-treated at a temperature not higher than 500° C. to solidify the adhesive, so that the glass beads are firmly attached to the glass substrate, forming a film layer 11 with an undulating structure. Thereafter, a transparent front electrode 2 (TCO), such as tin oxide or zinc oxide, is deposited on the surface layer 11 so that its surface 27 has a surface roughness similar to that of the glass surface layer 11 or to a greater extent. The average undulation of the surface structure should be between 30-80 nanometers, preferably close to 50 nanometers.

在这之后所形成的薄膜光伏器件结构如图2所示,该结构包括:一个玻璃基板1,它具有非镜面的表层11;一个透明前电极2;一个或多个由基于氢化硅的薄膜构成的p-i-n型光伏单元8;第二透明导电氧化物7和一个或多个金属薄膜45。由于前电极2具有良好的表面结构,其后生长的氢化硅薄膜8及其后的透明导电氧化物7,大体上保持了这种表面结构。也就是说,入射光在进入p-i-n光伏单元之前,在玻璃基板与透明前电极的界面17和前电极与薄膜硅的界面27,两次受到较大的散射,使光以较大的角度进入半导体光电转换区域8。未被p-i-n光伏单元吸收的长波光也在薄膜硅与第二透明导电氧化物的界面87和第二透明导电氧化物与金属膜的界面77两次受到大角度的散射性反射。从而使大部分的弱吸收光以超过全部内反射的临界角度的方向再次进入p-i-n光伏单元。从而极大的提高了它们被吸收的机率。所以,本发明所描述的光散射增加效应,随着基板玻璃表面粗糙性的增加而更加明显,因为它提高了后面所有膜层界面的光散射效应。The thin-film photovoltaic device structure formed after this is shown in Figure 2, and the structure includes: a glass substrate 1, which has a non-specular surface layer 11; a transparent front electrode 2; one or more thin films based on hydrogenated silicon The p-i-n type photovoltaic unit 8; the second transparent conductive oxide 7 and one or more metal thin films 45. Since the front electrode 2 has a good surface structure, the hydrogenated silicon thin film 8 and the transparent conductive oxide 7 grown thereafter generally maintain this surface structure. That is to say, before the incident light enters the p-i-n photovoltaic unit, it is scattered twice at the interface 17 between the glass substrate and the transparent front electrode and the interface 27 between the front electrode and the thin-film silicon, so that the light enters the semiconductor at a larger angle. Photoelectric conversion region 8. The long-wave light not absorbed by the p-i-n photovoltaic unit is also subjected to large-angle scattering reflection twice at the interface 87 between the thin film silicon and the second transparent conductive oxide and the interface 77 between the second transparent conductive oxide and the metal film. Therefore, most of the weakly absorbed light re-enters the p-i-n photovoltaic unit in a direction exceeding the critical angle of total internal reflection. Thereby greatly improving their chances of being absorbed. Therefore, the increased light scattering effect described in the present invention is more pronounced as the surface roughness of the substrate glass increases, because it enhances the light scattering effect at the interface of all subsequent film layers.

Claims (3)

1. p-i-n type photovoltaic device, its structure comprises successively: a glass substrate; A transparent preceding electrode; One or more p-i-n type photovoltaic cells that constitute by film based on silane; Back electrode with light reflective properties, it can comprise a transparent conductive oxide and one or more metallic film.It is characterized in that: be coated with the glass beads of one deck diameter between the 0.5-1 micron on the glass substrate, make one surface have relief fabric, electrode before the deposit transparent on the glass beads top layer then, comprise tin oxide and zinc oxide, electrode also has similar or more tangible relief fabric before making this transparent, thereby increase sunlight in photovoltaic device scattering and to weak light absorbing capture ability, improve photoelectric conversion efficiency simultaneously.
2. p-i-n type photovoltaic device according to claim 1 is characterized in that: described transparent preceding electrode is the zinc oxide that is no more than 800 nanometers with the thickness that magnetically controlled sputter method forms.
3. p-i-n type photovoltaic device according to claim 1 is characterized in that: described back electrode with light reflective properties is made of a transparent conductive oxide and a non-conductive ultrawhite reverberation.
CNA2007100049696A 2007-02-14 2007-02-14 Method for increasing light absorption of thin film solar cell Pending CN101246917A (en)

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