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CN101295123B - Display system based on blazed grating photomodulator - Google Patents

Display system based on blazed grating photomodulator Download PDF

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CN101295123B
CN101295123B CN 200710098737 CN200710098737A CN101295123B CN 101295123 B CN101295123 B CN 101295123B CN 200710098737 CN200710098737 CN 200710098737 CN 200710098737 A CN200710098737 A CN 200710098737A CN 101295123 B CN101295123 B CN 101295123B
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blazed grating
light
light source
green
blue
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CN101295123A (en
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毕勇
王斌
赵江山
亓岩
成华
郑光
房涛
周翊
颜博霞
宫武鹏
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Academy of Opto Electronics of CAS
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Abstract

The invention discloses a display system based on a blazed grating light modulator, which comprises a light source (10), an illuminating lens device (11) arranged on a path of rays at the light emission port of the light source and used for reshaping light beams and shimming, the blazed grating light modulator (12) arranged on the output path of rays of the illuminating lens device (11) and used for reflecting the light beams and a projection lens device (13) arranged on the reflection path of rays of the blazed grating light modulator (12), and the emergent light of the projection lens device (13) is launched onto a projection screen (14). The display system of the invention has high utilization rate of the light source, higher brightness and higher resolution factor, and the diffraction efficiency of work, namely, the utilization rate of luminous energy can achieve above 90 percent.

Description

一种基于闪耀光栅光调制器的显示系统A Display System Based on Blazed Grating Light Modulator

技术领域 technical field

本发明涉及一种显示装置,特别是涉及一种基于由微机电系统(Micro-Electrical-Mechanical System简称MEMS)控制的闪耀光栅光调制器的显示系统。  The present invention relates to a display device, in particular to a display system based on a blazed grating light modulator controlled by a Micro-Electrical-Mechanical System (MEMS for short). the

背景技术 Background technique

现有的显示技术可分为主动发光和被动发光两大类。  Existing display technologies can be divided into two categories: active luminescence and passive luminescence. the

主动发光显示技术包括阴极射线管(CRT)、等离子屏(PDP)、表面传导发射(SED)、碳纳米管场发射(CNT)和有机电致发光二极管(OLED)等;被动发光显示技术包括液晶显示(LCD)、硅基液晶显示(LCOS)、数字微镜器件显示(DMD)、干涉调节iMoD(Interfer-Omitric-Modulation Device,简称iMoD)显示和光栅光阀(GLV)显示等。其中,在被动发光显示技术中,LCOS借助液晶的偏光效应显示会损失掉50%的光源能量,光利用率不高,而且制造工艺复杂。iMoD显示技术利用干涉原理产生彩色,但画面的亮度和对比度远远不足以产生较大的投影影像。DLP是最成功的全数字显示技术之一,适用于影院和背投电视,但由于采用UHP(超高压汞灯)、氙灯等作为光源,其分光及合光系统造成光能量的大量损失,光能利用率仅为20%~30%。GLV是基于衍射原理的唯一成功的彩色显示技术,具有较高的光利用率,采用激光光源可产生大屏幕投影影像,但这种普通结构的衍射光栅发生衍射时,由于0级次衍射光占有衍射光的绝大部分能量,因此,利用1级次衍射光产生画面的GLV所具有的最高理论衍射效率仅为40.5%。  Active luminescent display technologies include cathode ray tube (CRT), plasma panel (PDP), surface conduction emission (SED), carbon nanotube field emission (CNT) and organic electroluminescent diode (OLED), etc.; passive luminescent display technologies include liquid crystal Display (LCD), liquid crystal display on silicon (LCOS), digital micromirror device display (DMD), interferometric adjustment iMoD (Interfer-Omitric-Modulation Device, referred to as iMoD) display and grating light valve (GLV) display, etc. Among them, in the passive light-emitting display technology, LCOS will lose 50% of the energy of the light source by means of the polarization effect of the liquid crystal, the light utilization rate is not high, and the manufacturing process is complicated. iMoD display technology utilizes the principle of interference to produce color, but the brightness and contrast of the screen are far from enough to produce larger projected images. DLP is one of the most successful all-digital display technologies, suitable for theaters and rear-projection TVs, but due to the use of UHP (Ultra High Pressure Mercury Lamp) and xenon lamps as light sources, its light splitting and light combining systems cause a large loss of light energy. The energy utilization rate is only 20% to 30%. GLV is the only successful color display technology based on the principle of diffraction. It has a high light utilization rate and can produce large-screen projection images by using a laser light source. Most of the energy of the diffracted light, therefore, the highest theoretical diffraction efficiency of the GLV that uses the 1st order diffracted light to generate a picture is only 40.5%. the

因此就需要一种光源利用率更高、亮度更高和分辨率更高的显示系统。  Therefore, a display system with higher light source utilization rate, higher brightness and higher resolution is required. the

发明内容 Contents of the invention

本发明的目的是克服现有技术的不足,提供一种光源利用率更高、亮度更高和分辨率更高的基于闪耀光栅光调制器的显示系统。  The purpose of the present invention is to overcome the deficiencies of the prior art and provide a display system based on a blazed grating light modulator with higher light source utilization, higher brightness and higher resolution. the

为了达到上述目的,本发明采取如下技术方案。 In order to achieve the above object, the present invention adopts the following technical solutions.

一种基于闪耀光栅光调制器的显示系统,包括光源;在所述光源的出光口处的光路上设置的用于对光束整形、匀场的照明透镜装置(11),在所述照明透镜装置(11)的输出光路上设置的用于将光束反射的闪耀光栅光调制器(12),在所述闪耀光栅光调制器(12)的反射光路上设置的一个投影透镜装置(13),投影透镜装置(13)的出射光入射到一个投影屏幕(14)上。  A display system based on a blazed grating light modulator, comprising a light source; an illumination lens device (11) arranged on the light path at the light outlet of the light source for beam shaping and shimming, the illumination lens device The blazed grating light modulator (12) that is arranged on the output light path of (11) is used for beam reflection The exit light from the lens arrangement (13) is incident on a projection screen (14). the

在上述技术方案中,进一步地,所述光源(10)包括三个单色光源,分别为红色(Red,简称R)光源、绿色(Green,简称G)光源和蓝色(Blue,简称B)光源;所述红色、绿色、蓝色光源通过合束装置形成白光从所述光源中输出;所述合束装置包括棱镜合束装置和光纤耦合束合束装置;所述闪耀光栅光调制器(12)是面阵闪耀光栅光调制器,闪耀光栅的每个像素单元具有分别对应于红、绿、蓝光的三个闪耀角,所述闪耀光栅光调制器(12)控制每个像素单元分时改变闪耀角用于按照红、绿、蓝色循环调制显示。  In the above technical solution, further, the light source (10) includes three monochromatic light sources, which are red (Red, referred to as R) light source, green (Green, referred to as G) light source and blue (Blue, referred to as B) light source. Light source; described red, green, blue light source forms white light output from described light source through beam combiner; Described beam combiner comprises prism beam combiner and fiber coupling beam combiner; Described blazed grating light modulator ( 12) is an area array blazed grating light modulator, each pixel unit of the blazed grating has three blaze angles respectively corresponding to red, green, and blue light, and the blazed grating light modulator (12) controls each pixel unit time-sharing Changing the blaze angle is used to modulate the display in red, green and blue cycles. the

在上述技术方案中,进一步地,所述光源(10)包括三个单色光源,分别为红色光源、绿色光源和蓝色光源;所述红色、绿色、蓝色光源组合通过合束装置形成白光从所述光源中输出;所述合束装置包括棱镜合束装置和光纤耦合束合束装置;所述闪耀光栅光调制器(12)是面阵闪耀光栅光调制器;每个闪耀光栅的像素单元由三个子像素构成,三个子像素各自具有一个闪耀角,分别是对应于红、绿、蓝光的闪耀角,所述闪耀光栅光调制器(12)控制每个像素单元的三个子像素改变其闪耀角和保持闪耀角的时间用于输出所需要的亮度。  In the above technical solution, further, the light source (10) includes three monochromatic light sources, namely a red light source, a green light source and a blue light source; the combination of the red, green and blue light sources forms white light through a beam combiner Output from the light source; the beam combining device includes a prism beam combining device and an optical fiber coupling beam combining device; the blazed grating light modulator (12) is an area array blazed grating light modulator; the pixel of each blazed grating The unit is composed of three sub-pixels, and each of the three sub-pixels has a blaze angle corresponding to red, green, and blue light respectively. The blazed grating light modulator (12) controls the three sub-pixels of each pixel unit to change its The blaze angle and the time to maintain the blaze angle are used to output the desired brightness. the

在上述技术方案中,进一步地,所述光源(10)包括三个单色光源,分别为红色光源、绿色光源和蓝色光源;所述闪耀光栅光调制器(12)包括三个独立的面阵闪耀光栅光调制器组成,分别为第一、第二、第三面阵闪耀光栅光调制器;所述照明透镜装置包括三个照明透镜单元,分别为第一、第二、第三照明透镜单元;所述红色、绿色、蓝色光源发出的光束分别经过各自光路上的用于对光束整形、匀场的第一、第二、第三照明透镜单元后,分别入射到所述第一、第二、第三面阵闪耀光栅光调制器上被反射后进入一个用于将红绿蓝三束光合成为一束的合色装置(30),该合色装置设置在所述投影透镜装置(13)的输入端部分;所述第一面阵闪耀光栅光调制器的每个像素具有对应于红光的闪耀角,所述第二面阵闪耀光栅光调制器的每个像素具有对应于绿光的闪耀角,所述第三面阵闪耀光栅光调制器的每个像素具有对应于蓝光的闪耀角。 In the above technical solution, further, the light source (10) includes three monochromatic light sources, namely red light source, green light source and blue light source; the blazed grating light modulator (12) includes three independent surface The array blazed grating light modulators are composed of the first, second, and third area blazed grating light modulators; the illumination lens device includes three illumination lens units, which are respectively the first, second, and third illumination lenses unit; the light beams emitted by the red, green, and blue light sources respectively pass through the first, second, and third illumination lens units used for beam shaping and shimming on their respective optical paths, and then enter the first, second, and third illumination lens units respectively. The second and third area array blazed grating light modulators are reflected and then enter a color combining device (30) for synthesizing the three beams of red, green and blue light into one beam. The color combining device is arranged on the projection lens device ( 13) input end part; each pixel of the first area blazed grating light modulator has a blaze angle corresponding to red light, and each pixel of the second area blazed grating light modulator has a value corresponding to green A blaze angle of light, each pixel of the third area blazed grating light modulator has a blaze angle corresponding to blue light.

在上述技术方案中,进一步地,所述光源(10)包括三个单色光源,分别为红色光源、绿色光源和蓝色光源;所述红色、绿色、蓝色光源通过合束装置形成白光从所述光源中输出;所述合束装置包括棱镜合束装置和光纤耦合束合束装置;所述闪耀光栅光调制器(12)是线阵闪耀光栅光调制器,每个闪耀光栅的像素单元具有分别对应于红、绿、蓝光的三个闪耀角,所述闪耀光栅光调制器(12)控制每个像素单元分时改变闪耀角用于按照红、绿、蓝循环调制显示;还包括一个位于所述投影透镜装置(13)和所述投影屏幕(14)之间的振镜(15),用于将投影透镜装置(13)发出的光反射到所述投影屏幕(14)上;所述线阵闪耀光栅光调制器和所述振镜协调动作以在所述投影屏幕上实现扫描成像。  In the above technical solution, further, the light source (10) includes three monochromatic light sources, which are respectively a red light source, a green light source, and a blue light source; the red, green, and blue light sources form white light from the Output in the light source; the beam combining device includes a prism beam combining device and an optical fiber coupling beam combining device; the blazed grating light modulator (12) is a linear array blazed grating light modulator, and the pixel unit of each blazed grating There are three blaze angles respectively corresponding to red, green, and blue light, and the blazed grating light modulator (12) controls each pixel unit to time-divisionally change the blaze angle for display according to red, green, and blue cyclic modulation; it also includes a A galvanometer (15) positioned between the projection lens device (13) and the projection screen (14) is used to reflect light emitted by the projection lens device (13) onto the projection screen (14); The linear blazed grating light modulator and the galvanometer act in coordination to realize scanning imaging on the projection screen. the

在上述技术方案中,进一步地,所述光源(10)包括三个单色光源,分别为红色光源、绿色光源和蓝色光源;所述红色、绿色、蓝色光源通过合束装置形成白光从所述光源中输出;所述合束装置包括棱镜合束装置和光纤耦合束合束装置;所述闪耀光栅光调制器(12)是线阵闪耀光栅光调制器;每个闪耀光栅的像素单元由三个子像素构成,三个子像素分别具有对应于红、绿、蓝光的一个闪耀角,所述闪耀光栅光调制器(12)控制每个像素单元的三个子像素改变其闪耀角和保持闪耀角的时间用于输出所需要的亮度;还包括一个位于所述投影透镜装置(13)和所述投影屏幕(14)之间的能够旋转的振镜(15),用于将投影透镜装置(13)发出的光反射到所述投影屏幕(14)上;所述线阵闪耀光栅光调制器和所述振镜协调动作以在所述投影屏幕(14)上实现扫描成像。  In the above technical solution, further, the light source (10) includes three monochromatic light sources, which are respectively a red light source, a green light source, and a blue light source; the red, green, and blue light sources form white light from the Output in the light source; the beam combining device includes a prism beam combining device and an optical fiber coupling beam combining device; the blazed grating light modulator (12) is a linear array blazed grating light modulator; the pixel unit of each blazed grating Consists of three sub-pixels, the three sub-pixels respectively have a blaze angle corresponding to red, green, and blue light, and the blazed grating light modulator (12) controls the three sub-pixels of each pixel unit to change its blaze angle and maintain the blaze angle The time is used to output the required brightness; also includes a rotatable galvanometer (15) between the projection lens device (13) and the projection screen (14), used for the projection lens device (13 ) is reflected onto the projection screen (14); the linear blazed grating light modulator and the galvanometer act in coordination to realize scanning imaging on the projection screen (14). the

在上述技术方案中,进一步地,所述光源(10)包括三个单色光源,分别为红色光源、绿色光源和蓝色光源;所述闪耀光栅光调制器(12)包括三个线阵闪耀光栅光调制器,分别为第一、第二、第三线阵闪耀光栅光调制器;所述照明透镜装置包括三个照明透镜单元,分别为第一、第二、第三照明透镜单元;所述红色、绿色、蓝色光源发出的光束分别经过各自光路上的用于对光束整形、匀场的第一、第二、第三照明透镜单元后,分别入射到所述第一、第二、第三线阵闪耀光栅光调制器上被反射后进入一个用于将红绿蓝三束光合成为一束的合色装置(30),该合色装置设置在所述投影透镜装置(13)的输入端部分;所述第一线阵闪耀光栅光调制器的每个像素有一个对应于红光的闪耀角,所述第二线阵闪耀光栅光调制器的每个像素有对应于绿光的闪耀角,所述第三线阵闪耀光栅光调制器的每个像素有对应于蓝光的闪耀角;还包括一个位于所述投影透镜装置(13)和所述投影屏幕(14)之间的能够旋转的振镜(15),用于将投影透镜装置(13)发出的光反射到所述投影屏幕(14)上;所述第一、第二、第三线阵闪耀光栅光调制器和所述振镜协调动作以在所述投影屏幕上实现扫描成像。  In the above technical solution, further, the light source (10) includes three monochromatic light sources, namely red light source, green light source and blue light source; the blazed grating light modulator (12) includes three linear array blazed The grating light modulators are the first, second, and third linear blazed grating light modulators; the illumination lens device includes three illumination lens units, which are respectively the first, second, and third illumination lens units; the The light beams emitted by the red, green, and blue light sources respectively pass through the first, second, and third illumination lens units used for shaping and shimming the light beams on their respective optical paths, and then enter the first, second, and third illumination lens units respectively. After being reflected on the three-line array blazed grating light modulator, it enters a color combining device (30) for combining three beams of red, green and blue lights into one beam, and the color combining device is arranged at the input end of the projection lens device (13) part; each pixel of the first linear blazed grating light modulator has a blaze angle corresponding to red light, and each pixel of the second linear blazed grating light modulator has a blaze angle corresponding to green light, Each pixel of the third linear blazed grating light modulator has a blaze angle corresponding to blue light; it also includes a rotatable vibrating mirror located between the projection lens device (13) and the projection screen (14) (15), used to reflect the light emitted by the projection lens device (13) onto the projection screen (14); the first, second, and third linear array blazed grating light modulators and the vibrating mirror act in coordination to realize scanning imaging on the projection screen. the

在上述技术方案中,进一步地,所述闪耀光栅光调制器有一个用于控制闪耀角的微机电系统。  In the above technical solution, further, the blazed grating light modulator has a micro-electromechanical system for controlling the blaze angle. the

在上述技术方案中,进一步地,所述光源包括红、绿或蓝单色激光器,红、绿或蓝单色LED(发光二极管)器件。  In the above technical solution, further, the light source includes a red, green or blue monochromatic laser, and a red, green or blue monochromatic LED (light emitting diode) device. the

与现有技术相比,本发明的优越性在于:  Compared with prior art, the advantage of the present invention is:

传统光栅由于单元衍射因子与单元间干涉因子主极大重叠,以致光能分散中各级光谱中,而采用闪耀光栅的衍射原理将光能集中到所需的某级光谱,从而提高光能的收集效率。本发明的基于微机电系统(MEMS)的闪耀光栅的闪耀角θ的大小可由MEMS控制,改变光栅的闪耀角θ,使光栅的衍射0级与干涉0级分开,从而使光能分别转移并集中到所需的光谱级次上,使得显示系统的光源利用率高、亮度更高和分辨率更高,工作的衍射效率即光能利用率可达到90%以上,工作于数字线扫描及面成像方式,适用于单色激光或单色LED(发光二极管)作为光源。  Due to the great overlap between the diffraction factor of the unit and the interference factor between the units of the traditional grating, the light energy is scattered in all levels of the spectrum, and the diffraction principle of the blazed grating is used to concentrate the light energy to a certain level of spectrum required, thereby improving the intensity of light energy. collection efficiency. The size of the blaze angle θ of the blazed grating based on micro-electromechanical systems (MEMS) of the present invention can be controlled by MEMS, and the blaze angle θ of the grating can be changed to separate the 0th order of diffraction and the 0th order of interference of the grating, so that light energy can be transferred and concentrated separately To the required spectral order, the light source utilization rate of the display system is high, the brightness is higher and the resolution is higher. The diffraction efficiency of the work, that is, the light energy utilization rate can reach more than 90%. It works in digital line scanning and surface imaging. way, suitable for monochromatic laser or monochromatic LED (Light Emitting Diode) as light source. the

附图说明 Description of drawings

图1是基于线阵MEMS闪耀光栅的显示系统示意图;  Figure 1 is a schematic diagram of a display system based on a linear array MEMS blazed grating;

图2是基于面阵MEMS闪耀光栅的显示系统示意图;  Figure 2 is a schematic diagram of a display system based on an area array MEMS blazed grating;

图3是基于具有一个闪耀角的面阵MEMS闪耀光栅的显示系统示意图;  Fig. 3 is a schematic diagram of a display system based on an area array MEMS blazed grating with a blaze angle;

图4是每个像素具有三个子像素的线阵闪耀光栅像素排列图;  Fig. 4 is a line array blazed grating pixel arrangement diagram with three sub-pixels per pixel;

图5是每个像素具有三个闪耀角的线阵闪耀光栅的像素剖面示意图;  Fig. 5 is a schematic cross-sectional view of a pixel of a linear array blazed grating with three blaze angles per pixel;

图6是每个像素具有三个闪耀角的线阵闪耀光栅像素的工作光路图;  Fig. 6 is the working light path diagram of the linear array blazed grating pixel with three blaze angles for each pixel;

图7是每个像素具有一个闪耀角的面阵闪耀光栅的像素剖面示意图;  Fig. 7 is the pixel sectional schematic diagram of the area array blazed grating that each pixel has a blaze angle;

图8是每个像素具有一个闪耀角的面阵(或线阵)闪耀光栅像素工作光路图。  Fig. 8 is a working light path diagram of an area (or line array) blazed grating pixel with each pixel having a blaze angle. the

图面说明:  Graphic description:

10—光源;                11---照明透镜装置;  10—light source; 11—lighting lens device;

12---闪耀光栅光调制器;   13---投影透镜装置;  12---blazed grating light modulator; 13---projection lens device;

14---投影屏幕;           15---振镜; 14---projection screen; 15---galvanometer;

30----合光装置。  30----light combining device. the

101---红色光源;102---绿色光源;103---蓝色光源;  101---red light source; 102---green light source; 103---blue light source;

111—第一照明透镜单元;112—第二照明透镜单元;113—第三照明透镜单元;  111—the first lighting lens unit; 112—the second lighting lens unit; 113—the third lighting lens unit;

121—第一面阵闪耀光栅光调制器;122—第二面阵闪耀光栅光调制器;123—第三面阵闪耀光栅光调制器;  121—the first area blazed grating light modulator; 122—the second area blazed grating light modulator; 123—the third area blazed grating light modulator;

具体实施方式 Detailed ways

下面结合附图和具体实施方式对本发明作进一步详细描述:  Below in conjunction with accompanying drawing and specific embodiment the present invention is described in further detail:

本发明中的闪耀光栅主要以平面反射光栅为例,槽面与光栅面之间的夹角θ称为闪耀角,基于微机电系统(MEMS)的闪耀光栅的闪耀角θ的大小是由MEMS控制,改变光栅的闪耀角θ,使光栅的衍射0级与干涉0级分开,从而使光能分别转移并集中到所需的光谱级次上。当用单色光源照射可转动的闪耀光栅时,改变光栅的闪耀角θ,可使光束在特定的方向上闪耀,用脉宽调制方式控制闪耀光栅光调制器像素转动到产生RGB三基色和暗态位置上的停留时间,可使各个象素所对应的三种颜色具有不同的亮度。利用人眼的视觉暂留现象,通过像素不同亮度、不同基色的组合,就可以产生一个象素所需的各种彩色,多个象素组成阵列,比如形成面阵,即可构成显示画面,或者形成线阵,通过投影扫描可以构成显示画面。  The blazed grating in the present invention mainly takes the planar reflective grating as an example, the angle θ between the groove surface and the grating surface is called the blaze angle, and the size of the blaze angle θ of the blazed grating based on microelectromechanical system (MEMS) is controlled by MEMS , change the blaze angle θ of the grating, so that the 0th order of diffraction and the 0th order of interference of the grating are separated, so that the light energy can be transferred and concentrated to the required spectral order respectively. When the rotatable blazed grating is irradiated with a monochromatic light source, changing the blaze angle θ of the grating can make the beam shine in a specific direction, and the pulse width modulation is used to control the rotation of the pixels of the blazed grating light modulator to produce RGB three primary colors and dark The dwell time on the state position can make the three colors corresponding to each pixel have different brightness. Using the persistence of vision of the human eye, through the combination of pixels with different brightness and different primary colors, various colors required by a pixel can be produced. Multiple pixels form an array, such as forming an area array, to form a display screen. Or form a line array, and the display screen can be formed by projection scanning. the

实施例1  Example 1

如图1所示,实现本发明的基于线阵MEMS闪耀光栅光调制器的显示系统,具体包括:光源10;在所述光源10的出光口处的光路上设置一用于对光束整形、匀场照明透镜11,在所述照明透镜组11的输出光路上设置一用于将光束反射的闪耀光栅光调制器12,在所述闪耀光栅光调制器12的反射光路上设置一投影透镜装置13,投影透镜装置13输出端的前方设置一个投影屏幕14。闪耀光栅光调制器12为线阵闪耀光栅光调制器,该系统还包括一个能够快速转动的阵镜15位于投影透镜装置13和投影屏幕14之间,阵镜15将投影透镜装置13出射的光反射到投影屏幕14上。  As shown in Fig. 1, realize the display system based on the linear array MEMS blazed grating light modulator of the present invention, specifically include: a light source 10; Field illumination lens 11, a blazed grating light modulator 12 for reflecting light beams is arranged on the output optical path of the illumination lens group 11, and a projection lens device 13 is arranged on the reflected light path of the blazed grating light modulator 12 A projection screen 14 is arranged in front of the output end of the projection lens device 13 . The blazed grating light modulator 12 is a linear array blazed grating light modulator, and the system also includes a rapidly rotating array mirror 15 located between the projection lens device 13 and the projection screen 14, and the array mirror 15 transmits the light emitted by the projection lens device 13 reflected onto the projection screen 14. the

光源10由三种单色光源组成,分别为红色光源、绿色光源和蓝色光源;所述红色、绿色、蓝色光源通过合束装置(图中未示出)形成白光从所述光源10中输出;合束装置采用比如棱镜合束装置或光纤耦合束合束装置等;照明透镜装置11采用非 球面透镜组合并通过光棒匀场;闪耀光栅光调制器12是线阵闪耀光栅光调制器,每个闪耀光栅的像素单元具有分别对应于红、绿、蓝光的三个闪耀角,所述闪耀光栅光调制器12控制每个像素单元分时改变闪耀角用于按照红、绿、蓝循环调制显示。投影透镜装置13根据投影屏幕14的距离和尺寸采用市场所售的投影镜头,振镜15采用工作频率大于2KHz的市场所售振镜。  Light source 10 is made up of three kinds of monochromatic light sources, is respectively red light source, green light source and blue light source; Said red, green, blue light source forms white light from described light source 10 through beam combiner (not shown in the figure). Output; the beam combining device adopts such as a prism beam combining device or an optical fiber coupling beam combining device, etc.; the illumination lens device 11 adopts an aspheric lens combination and shimming through a light bar; the blazed grating light modulator 12 is a linear array blazed grating light modulator , each pixel unit of the blazed grating has three blaze angles respectively corresponding to red, green, and blue light, and the blazed grating light modulator 12 controls each pixel unit to time-divisionally change the blaze angle for cycling according to red, green, and blue Modulation display. The projection lens device 13 adopts a commercially available projection lens according to the distance and size of the projection screen 14 , and the vibrating mirror 15 adopts a commercially available vibrating mirror with a working frequency greater than 2KHz. the

每个像素单元的工作方式如图6所示,方向8为投影方向(即光出射的方向),白光6(即光入射的方向)垂直于光栅面5入射,当闪耀光栅在位置4处,光线沿原路返回,此时投影方向8处对应于暗场,根据三基色的波长,设计光栅的闪耀角,使得光栅微镜在MEMS的控制下转到位置1,2,3处时,方向8处分别对应着红、绿、蓝三色的闪耀角所产生的亮场。每个像素单元由单个如图6所示的光栅组成,用脉宽调制方式控制闪耀光栅单元转动到产生红、绿、蓝三基色和暗态四个固定位置上的停留时间,使单个象素具有不同的颜色和亮度。多个象素组成阵列,如图5所示是线阵闪耀光栅像素剖面图。  The working mode of each pixel unit is shown in Figure 6. The direction 8 is the projection direction (ie, the direction of light emission), and the white light 6 (ie, the direction of light incidence) is incident perpendicular to the grating surface 5. When the blazed grating is at position 4, The light returns along the original path. At this time, the projection direction 8 corresponds to the dark field. According to the wavelengths of the three primary colors, the blaze angle of the grating is designed so that when the grating micromirror turns to positions 1, 2, and 3 under the control of MEMS, the direction The 8 locations correspond to the bright fields produced by the blazing angles of the red, green, and blue colors respectively. Each pixel unit is composed of a single grating as shown in Figure 6. The pulse width modulation is used to control the dwell time of the blazed grating unit to rotate to produce four fixed positions of red, green, blue and dark state, so that a single pixel Available in different colors and brightness. A plurality of pixels form an array, as shown in Figure 5, which is a cross-sectional view of a line array blazed grating pixel. the

线阵闪耀光栅光调制器12和振镜15协调动作以在所述投影屏幕上实现扫描成像。每个闪耀光栅像素单元分时改变闪耀角,按照红、绿、蓝三种色光显示时间比例依次循环调制显示,其时间比例由显示时光源所配白光的色温决定。MEMS通过PWM(脉冲宽度调制)方式控制所述面阵闪耀光栅像素闪耀角转动到分别产生红、绿、蓝色场和暗态位置上的停留时间,使各个象素所对应的三种颜色具有不同的亮度。该系统工作时,线阵光调制器对应所显示图像的一列,当一列显示完毕,振镜控制光束到达下一列图像的位置,如此循环直至扫描显示完一幅单色图像(比如红色图像),然后依次显示蓝色图像和绿色图像,由于人眼当视觉暂留现象,观察者就会看到一幅色彩完整当图像。  The linear blazed grating light modulator 12 and the vibrating mirror 15 cooperate to realize scanning imaging on the projection screen. Each blazed grating pixel unit changes the blaze angle in time-sharing, and cyclically modulates the display according to the display time ratio of red, green, and blue colors, and the time ratio is determined by the color temperature of the white light matched with the light source during display. MEMS controls the blaze angle of the area blazed grating pixels to rotate to the dwell time of the red, green, blue field and dark state positions through PWM (Pulse Width Modulation), so that the three colors corresponding to each pixel have different brightness. When the system is working, the linear array light modulator corresponds to a column of displayed images. When a column is displayed, the galvanometer controls the light beam to reach the position of the next column of images, and so on until a monochromatic image (such as a red image) is scanned and displayed. Then the blue image and the green image are displayed in sequence, and the observer will see an image with complete color due to the persistence of vision of the human eye. the

实施例2  Example 2

在实施例1的基础上,与实施例1不同的是:  On the basis of embodiment 1, different from embodiment 1 is:

闪耀光栅光调制器12是线阵闪耀光栅光调制器;每个闪耀光栅的像素单元由三个子像素构成,三个子像素分别具有对应于红、绿、蓝光的一个闪耀角,所述闪耀光栅光调制器12控制每个像素单元的三个子像素改变其闪耀角和保持闪耀角的时间用于输出所需要的亮度;线阵闪耀光栅光调制器和所述振镜协调动作以在所述投影屏幕上实现扫描成像。 The blazed grating light modulator 12 is a linear array blazed grating light modulator; the pixel unit of each blazed grating is composed of three sub-pixels, and the three sub-pixels respectively have a blaze angle corresponding to red, green and blue light, and the blazed grating light The modulator 12 controls the three sub-pixels of each pixel unit to change its blaze angle and maintain the blaze angle for outputting the required brightness; the linear array blazed grating light modulator and the vibrating mirror act in coordination to create a blaze angle on the projection screen. Realize scanning imaging.

如图8所示,每个子像素只有一个闪耀角,方向8为投影方向即闪耀光栅的光出射方向,单色光6垂直于光栅面5入射,当闪耀光栅像素单元位于位置2时,光线按原路返回,此时投影方向8是处于暗场的;当闪耀光栅像素单元位于位置1时,投影方向8处于亮场,通过PWM(脉冲宽度调制)方式控制线阵闪耀光栅的各个子像素在亮场和暗场停留的时间,使各个子象素所对应的三种颜色具有不同的亮度,从而形成不同的色彩;其中位置1和位置2的夹角为对应单色光的闪耀角,三个子像素各自对应红、绿、蓝色光工作需要的闪耀角。图4是基于线阵闪耀光栅微镜的像素排列图,多个像素排成一个线阵,每个像素1,2,3……,都由三个紧靠的子像素组成,比如像素1由子像素1-1,1-2和1-3组成。  As shown in Figure 8, each sub-pixel has only one blaze angle, the direction 8 is the projection direction, that is, the light emission direction of the blazed grating, and the monochromatic light 6 is incident perpendicular to the grating surface 5. Going back the same way, the projection direction 8 is in the dark field at this time; when the blazed grating pixel unit is at position 1, the projection direction 8 is in the bright field, and each sub-pixel of the linear blazed grating is controlled by PWM (pulse width modulation). The stay time of bright field and dark field makes the three colors corresponding to each sub-pixel have different brightness, thus forming different colors; the angle between position 1 and position 2 is the blaze angle corresponding to monochromatic light, and the three colors Each of the sub-pixels corresponds to the blaze angle required for red, green, and blue light work. Figure 4 is a pixel arrangement diagram based on a linear array blazed grating micromirror. Multiple pixels are arranged in a linear array, and each pixel 1, 2, 3... is composed of three adjacent sub-pixels. For example, pixel 1 is composed of sub-pixels. Pixels 1-1, 1-2 and 1-3 are composed. the

其它技术特征同实施例1。  Other technical features are the same as in Embodiment 1. the

实施例3  Example 3

如图2所示,实现基于MEMS面阵闪耀光栅光调制器的显示系统,具体包括:光源10;在所述光源10的出光口处的光路上设置一用于对光束整形、匀场照明透镜11,在所述照明透镜组11的输出光路上设置一用于将光束反射的闪耀光栅光调制器12,在所述闪耀光栅光调制器12的反射光路上设置一投影透镜装置13,投影透镜装置13输出端的前方设置一个投影屏幕14;闪耀光栅光调制器12为面阵闪耀光栅光调制器,闪耀光栅的每个像素单元具有分别对应于红、绿、蓝光的三个闪耀角,闪耀光栅光调制器12控制每个像素单元分时改变闪耀角用于按照红、绿、蓝循环调制显示。光源10包括三种单色光源,分别为红色光源、绿色光源和蓝色光源;所述红色、绿色、蓝色光源配合形成白光从光源10中输出;照明透镜装置11采用非球面透镜组合并通过光棒匀场;光源10发出的光束经过各用于对光束整形、匀场的照明透镜装置11后分时配合面阵闪耀光栅光调制器12反射后,经过投影透镜装置13投影在显示屏幕14上形成三幅叠加的红、绿、蓝图像;按照闪耀光栅光调制器12的时序分时开关工作,所述分时为按照红、绿、蓝三种色光显示时间比例依次循环调制显示,其时间比例由显示时所配白光的色温决定。通过PWM(脉冲宽度调制)方式控制所述面阵闪耀光栅像素转动到分别产生红、绿、蓝色场和暗态位置上的停留时间,使各个象素所对应的三种颜色具有不同的亮度。投影透镜装置13采用根据投影屏幕14的距离和尺寸采用市场所售的投影镜头。  As shown in Figure 2, the display system based on the MEMS area blazed grating light modulator is realized, which specifically includes: a light source 10; on the optical path at the light outlet of the light source 10, a lens for beam shaping and shim lighting is set 11. A blazed grating light modulator 12 for reflecting light beams is set on the output light path of the illumination lens group 11, and a projection lens device 13 is set on the reflection light path of the blazed grating light modulator 12. The projection lens A projection screen 14 is arranged in front of the output end of the device 13; the blazed grating light modulator 12 is an area array blazed grating light modulator, and each pixel unit of the blazed grating has three blaze angles respectively corresponding to red, green, and blue light. The light modulator 12 controls each pixel unit to time-divisionally change the blaze angle for red, green and blue cyclic modulation display. The light source 10 includes three kinds of monochromatic light sources, which are red light source, green light source and blue light source respectively; the red, green and blue light sources cooperate to form white light output from the light source 10; the illuminating lens device 11 adopts an aspheric lens combination and passes Light rod shimming; the light beam emitted by the light source 10 passes through the illumination lens devices 11 used for beam shaping and shimming, and then is reflected by the area array blazed grating light modulator 12 in time-sharing, and then projected on the display screen 14 through the projection lens device 13 Three superimposed red, green and blue images are formed on the top; the time-sharing switch works according to the time sequence of the blazed grating light modulator 12, and the time-sharing is sequentially modulated and displayed according to the display time ratio of the three color lights of red, green and blue. The time ratio is determined by the color temperature of the white light used for display. By means of PWM (Pulse Width Modulation) to control the residence time of the area blazed grating pixels to rotate to the positions where red, green, blue fields and dark states are generated respectively, so that the three colors corresponding to each pixel have different brightness . The projection lens device 13 adopts a commercially available projection lens according to the distance and size of the projection screen 14 . the

实施例4 Example 4

在实施例3的基础上,与实施例3不同的是:  On the basis of embodiment 3, different from embodiment 3 is:

闪耀光栅光调制器12是面阵闪耀光栅光调制器;每个闪耀光栅的像素单元由三个子像素构成,三个子像素分别具有对应于红、绿、蓝光的一个闪耀角,所述闪耀光栅光调制器12控制每个像素单元的三个子像素改变其闪耀角和保持闪耀角的时间用于输出所需要的亮度。每个子像素的结构和工作方式与实施例2相同。  The blazed grating light modulator 12 is an area array blazed grating light modulator; the pixel unit of each blazed grating is composed of three sub-pixels, and the three sub-pixels respectively have a blaze angle corresponding to red, green and blue light, and the blazed grating light The modulator 12 controls the time for the three sub-pixels of each pixel unit to change its blaze angle and maintain the blaze angle to output the required brightness. The structure and working mode of each sub-pixel are the same as those in Embodiment 2. the

其它技术特征同实施例3。  Other technical characteristics are the same as embodiment 3. the

实施例5  Example 5

如图3所示,实现基于MEMS面阵闪耀光栅光调制器的显示系统,其中,光源10包括三个单色光源,分别为红色光源101、绿色光源102和蓝色光源103;闪耀光栅光调制器12包括三个独立的面阵闪耀光栅光调制器组成,分别为第一、第二、第三面阵闪耀光栅光调制器121、122、123,每个闪耀光栅光调制器有一个用于控制闪耀角的微机电系统;照明透镜装置11包括三个照明透镜单元,分别为第一、第二、第三照明透镜单元111、112、113;红色、绿色、蓝色光源101、102、103发出的光束分别经过各自光路上的用于对光束整形、匀场的第一、第二、第三照明透镜单元111、112、113后,分别入射到所述第一、第二、第三面阵闪耀光栅光调制器121、122、123上被反射后进入一个用于将红绿蓝三束光合成为一束的合色装置30,该合色装置30设置在投影透镜装置13的输入端部分;所述第一面阵闪耀光栅光调制器121的每个像素有一个对应于红光的闪耀角,所述第二面阵闪耀光栅光调制器122的每个像素有一个对应于绿光的闪耀角,所述第三面阵闪耀光栅光调制器123的每个像素有一个对应于蓝光的闪耀角;投影物镜装置13投影在显示屏幕14上形成三幅叠加的红、绿、蓝图像;每种色光从相同角度入射并按照闪耀光栅光调制器的时序同时工作,通过PWM(脉冲宽度调制)方式控制所述第一、第二、第三面阵闪耀光栅像素转动到分别产生红、绿、蓝色场和暗态位置上的停留时间,使各个象素所对应的三种颜色具有不同的亮度。  As shown in Figure 3, a display system based on a MEMS area blazed grating light modulator is realized, wherein the light source 10 includes three monochromatic light sources, which are respectively a red light source 101, a green light source 102, and a blue light source 103; The device 12 includes three independent area array blazed grating light modulators, which are respectively the first, second and third area array blazed grating light modulators 121, 122, 123, and each blazed grating light modulator has one for A micro-electro-mechanical system for controlling the blaze angle; the lighting lens device 11 includes three lighting lens units, which are respectively first, second and third lighting lens units 111, 112, 113; red, green, and blue light sources 101, 102, 103 The emitted light beams respectively pass through the first, second, and third illumination lens units 111, 112, and 113 on their respective optical paths for shaping and shimming the light beams, and then enter the first, second, and third surfaces respectively. After being reflected by the blazed grating light modulators 121, 122, 123, it enters a color combining device 30 for combining the three beams of red, green and blue lights into one beam. The color combining device 30 is arranged at the input end part of the projection lens device 13 ; Each pixel of the first area blazed grating light modulator 121 has a blaze angle corresponding to red light, and each pixel of the second area blazed grating light modulator 122 has a blaze angle corresponding to green light Blaze angle, each pixel of the third area blazed grating light modulator 123 has a blaze angle corresponding to blue light; the projection objective device 13 is projected on the display screen 14 to form three superimposed red, green, and blue images; Each color light is incident from the same angle and works at the same time according to the timing of the blazed grating light modulator. The first, second, and third area blazed grating pixels are controlled to rotate to generate red and green respectively by means of PWM (pulse width modulation). , the blue field and the dwell time on the dark state position, so that the three colors corresponding to each pixel have different brightness. the

每个像素的闪耀角及工作方式如图8所示,每个像素只有一个闪耀角,方向8为投影方向即闪耀光栅的光出射方向,单色光6垂直于光栅面5入射,当闪耀光栅像素单元位于位置2时,光线按原路返回,此时投影方向8是处于暗场的;当闪耀光栅像素单元位于位置1时,投影方向8处于亮场。图7是基于面阵闪耀光栅的像素剖面图。  The blaze angle and working method of each pixel are shown in Figure 8. Each pixel has only one blaze angle. When the pixel unit is at position 2, the light returns along the original path, and at this time the projection direction 8 is in the dark field; when the blazed grating pixel unit is at position 1, the projection direction 8 is in the bright field. Fig. 7 is a cross-sectional view of a pixel based on an area blazed grating. the

本实施例中光源10的红色光源101、绿色光源102和蓝色光源103分别采用红、 绿、蓝单色的LED光源,照明透镜装置11的第一、第二、第三照明透镜单元111、112、113采用非球面透镜组合并通过光棒匀场,投影透镜装置13采用根据投影屏幕14的距离和尺寸采用市场所售投影镜头,合色装置30采用X-CUBE合色棱镜。  In this embodiment, the red light source 101, the green light source 102 and the blue light source 103 of the light source 10 respectively adopt red, green and blue monochromatic LED light sources, and the first, second and third lighting lens units 111, 111, and 11 of the lighting lens device 11 112 and 113 are combined by aspherical lenses and shimmed by light rods. The projection lens device 13 is a commercially available projection lens according to the distance and size of the projection screen 14. The color combination device 30 is an X-CUBE color combination prism. the

实施例6  Example 6

在实施例5的基础上,与实施例5不同的是:  On the basis of embodiment 5, different from embodiment 5 is:

闪耀光栅光调制器12包括三个独立的线阵闪耀光栅光调制器组成,分别为第一、第二、第三线阵闪耀光栅光调制器;第一线阵闪耀光栅光调制器的每个像素有一个对应于红光的闪耀角,第二线阵闪耀光栅光调制器的每个像素有一个对应于绿光的闪耀角,第三线阵闪耀光栅光调制器的每个像素有一个对应于蓝光的闪耀角;还增加一个能够快速转动的阵镜设置在位于投影透镜装置13和投影屏幕14之间,阵镜将投影透镜装置13出射的光反射到投影屏幕14上;线阵闪耀光栅光调制器和振镜协调动作以在所述投影屏幕上实现扫描成像。阵镜采用工作频率大于2KHz的市场所售振镜。  The blazed grating light modulator 12 includes three independent linear array blazed grating light modulators, which are respectively the first, second and third linear array blazed grating light modulators; each pixel of the first linear array blazed grating light modulator There is a blaze angle corresponding to red light, each pixel of the second linear blazed grating light modulator has a blaze angle corresponding to green light, and each pixel of the third linear blazed grating light modulator has a blaze angle corresponding to blue light. Blaze angle; an array mirror that can rotate quickly is also added between the projection lens device 13 and the projection screen 14, and the array mirror reflects the light emitted by the projection lens device 13 onto the projection screen 14; the linear array blazed grating light modulator Coordinated with the vibrating mirror to realize scanning imaging on the projection screen. The array mirror adopts a vibrating mirror sold in the market with a working frequency greater than 2KHz. the

其它同实施例5。  Others are the same as embodiment 5. the

最后所应说明的是,以上实施例仅用以说明本发明的技术方案而非限制。尽管参照实施例对本发明进行了详细说明,本领域的普通技术人员应当理解,对本发明的技术方案进行修改或者等同替换,都不脱离本发明技术方案的精神和范围,其均应涵盖在本发明的权利要求范围当中。 Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than limit them. Although the present invention has been described in detail with reference to the embodiments, those skilled in the art should understand that modifications or equivalent replacements to the technical solutions of the present invention do not depart from the spirit and scope of the technical solutions of the present invention, and all of them should be included in the scope of the present invention. within the scope of the claims.

Claims (6)

1. the display system based on blazed grating photomodulator comprises light source (10), and said light source (10) is made up of redness, green and blue-light source, and said redness, green and blue-light source form white light output through beam merging apparatus; What on the light path at the light-emitting window place of said light source, be provided with is used for the illuminating lens device (11) to beam shaping, shimming; What on the output light path of said illuminating lens device (11), be provided with is used for the blazed grating photomodulator (12) with beam reflection, and said blazed grating photomodulator (12) shifts luminous energy respectively and focuses on the required spectral order time through the blazing angle that changes blazed grating; Each pixel cell of blazed grating has three blazing angles that correspond respectively to red, green, blue, and said blazed grating photomodulator (12) is controlled each pixel cell timesharing change blazing angle and is used for showing according to red, green, blue look circulation modulation; A projecting lens apparatus (13) that on the reflected light path of said blazed grating photomodulator (12), is provided with, the emergent light of projecting lens apparatus (13) incides on the projection screen (14).
2. according to the said display system based on blazed grating photomodulator of claim 1, wherein, said light source (10) comprises three monochromatic sources, is respectively red light source, green light source and blue-light source; Said redness, green, blue-light source form white light through beam merging apparatus and from said light source, export; Said beam merging apparatus comprises prism beam merging apparatus or optical fiber coupling bundle beam merging apparatus.
3. according to the said display system based on blazed grating photomodulator of claim 2, wherein, said blazed grating photomodulator (12) is a face battle array blazed grating photomodulator.
4. according to the said display system based on blazed grating photomodulator of claim 2, wherein, said blazed grating photomodulator (12) is the linear array blazed grating photomodulator; Also comprise a galvanometer (15) that is positioned between said projecting lens apparatus (13) and the said projection screen (14), be used for the light that projecting lens apparatus (13) sends is reflexed to said projection screen (14); Said linear array blazed grating photomodulator and said galvanometer coordination realize scanning imagery to go up at said projection screen (14).
5. according to each said display system based on blazed grating photomodulator of claim 1-4, wherein, said blazed grating photomodulator has a MEMS that is used to control blazing angle.
6. according to the said display system based on blazed grating photomodulator of claim 5, wherein, said light source comprises red, green and blue mono-colour laser, and perhaps said light source comprises red, green and blue single color LED device.
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