CN101303532B - Six-degree-of-freedom precision positioning table with switchable stations - Google Patents
Six-degree-of-freedom precision positioning table with switchable stations Download PDFInfo
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- CN101303532B CN101303532B CN 200810038759 CN200810038759A CN101303532B CN 101303532 B CN101303532 B CN 101303532B CN 200810038759 CN200810038759 CN 200810038759 CN 200810038759 A CN200810038759 A CN 200810038759A CN 101303532 B CN101303532 B CN 101303532B
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Abstract
本发明公开了一种可切换工位的六自由度精密定位台，所述精密定位台包括吸版台、气浮板、水平向微调机构、底座和垂向调节机构，所述吸版台通过一工位切换机构安装在气浮板的上方，用于承载掩模版，所述水平向微调机构和气浮板连接，用于驱动气浮板在水平方向上移动，所述气浮板下方连接底座，所述垂向调节机构安装在所述底座下方。本发明的精密定位台具有工位切换功能、水平向微调功能和垂向调节功能，可实现六自由度精密调节和定位，并可满足更多工作位置的要求。
The invention discloses a six-degree-of-freedom precision positioning table with switchable stations. The precision positioning table includes a plate suction table, an air floating plate, a horizontal fine-tuning mechanism, a base and a vertical adjustment mechanism. The plate suction table passes through A station switching mechanism is installed on the top of the air floating plate to carry the reticle. The horizontal fine-tuning mechanism is connected to the air floating plate to drive the air floating plate to move in the horizontal direction. The bottom of the air floating plate is connected to the base , the vertical adjustment mechanism is installed under the base. The precision positioning table of the present invention has the function of station switching, horizontal fine-tuning and vertical adjustment, can realize six-degree-of-freedom precise adjustment and positioning, and can meet the requirements of more working positions.
Description
Technical field
The present invention relates to a kind of work stage, particularly be used for the 6 freedom degree precision positioning station of changeable station on semiconductor equipment or the liquid crystal display production equipment.
Background technology
Positioning table is mainly used in the very high occasion of positioning accuracy request, especially little stroke fine setting and location under a plurality of stations, as semiconductor manufacturing and optics and image alignment, positioning table is as one of subsystem, usually to integrate work with other subsystems, very limited on installing space, particularly in height, on May 3rd, 2006 China disclosed " a kind of three-freedom degree precision locating platform " (publication number: CN2777335Y), contact by plane sliding bearing between its lower platform and the motion platform, by being installed on the flexible piece support on the lower platform, be linked to be an integral body with the resilient flexibility part at three steering handle lower platforms and motion platform, this motion platform and X are to driving cam, Y is to fully closely contact of driving cam, the relative lower platform of electric rotating machine actuation movement platform that is subjected to three vertical installations in level to fine setting, its compact overall structure, be easy to realize high precision, but lack the station handoff functionality, and motor is vertically to install, in height taken than large space, in addition, adopt plane sliding bearing to connect between its double-layer structure, be difficult in vertical direction and level between decoupling zero, be difficult to assembling and control.
Summary of the invention
In view of this, technical matters solved by the invention provides a kind of band station handoff functionality, level to fine adjustment function and vertical regulatory function, can realize six degree of freedom minute adjustment and location, and can satisfy the precision positioning platform that multiplex (MUX) more makes status requirement.
For solving the problems of the technologies described above, the present invention has adopted following technical scheme: a kind of 6 freedom degree precision positioning station of changeable station, comprise and inhale bed, air supporting plate, level to micro-adjusting mechanism, base and vertical governor motion, described suction bed is installed in the top of air supporting plate by a station switching mechanism, be used to carry mask, described level connects to the gentle kickboard of micro-adjusting mechanism, being used to drive the air supporting plate moves in the horizontal direction, described air supporting plate below connects base, and described vertical governor motion is installed in described base below.
Described station switching mechanism comprises a cylinder and two guide rails, and described cylinder is affixed to the suction bed by an adaptor, and described guide rail is fixed on air supporting plate upper surface, and described suction bed bottom also is provided with two slide blocks, and can slide along guide rail by slide block.Described station switching mechanism also can comprise electric cylinder and guide rail or linear electric motors and guide rail.
Described precision positioning platform comprises that three levels are to micro-adjusting mechanism, all level is installed on the base, these three levels serve as that group is installed in both sides adjacent on the air supporting plate respectively to micro-adjusting mechanism with two, one, and two groups of levels are vertical mutually to micro-adjusting mechanism, and described three levels overlap with employed centre of figure on the mask to the center of micro-adjusting mechanism.
Described level is connected in sequence by electric rotating machine, shaft coupling, leading screw and screw rod to micro-adjusting mechanism.Also be provided with a plate between described electric rotating machine and the shaft coupling, an end of described extension spring is fixed on the web joint, and the other end is fixed on the air supporting plate, and the pulling force by extension spring makes screw front end contact air supporting plate.
Further, the front end of described screw rod is the bulb shape, and gentle kickboard contact also can be in air supporting plate side slip.The front end of described screw rod also can be a roller structure, can roll in air supporting plate side.
Described precision positioning platform comprises three vertical governor motions, is distributed in described base below by triangle.Described vertical governor motion is made of cam and roller, and the central shaft of described roller is level to setting, and this central shaft is fixed to base by fixture, the mutual interlock of described roller and cam, and described cam also is connected to a drive motor.Further, described roller is barrel-shaped.In addition, but described vertical governor motion also can be the pad of reconditioning.
Described air supporting plate links to each other with base with vacuum by air supporting.
The present invention makes it compared with prior art owing to adopted above-mentioned technical scheme, has following advantage and good effect:
1, band station handoff functionality, level can realize the minute adjustment and the location of six degree of freedom to fine adjustment function and vertical regulatory function, and can satisfy the requirement that multiplex (MUX) more does the position;
2, three levels are to micro-adjusting mechanism following one deck at the station switching mechanism, make three levels always will reduce the error of control aspect with the center of mask figure in photoetching to the center of micro-adjusting mechanism, can effectively improve the bearing accuracy of system;
3, electric rotating machine is a level to installing, and can save vertically the space of (Z to) greatly;
4, only depend on the effect of extension spring to link together between screw rod and the air supporting plate, there are not other constraints, screw front end is made bulb, can be in air supporting plate side slip, this make whole governor motion not only in level to inner decoupling zero, also make level to and vertical between decoupling zero, help the assembling and control;
5, couple together by air supporting and vacuum between air supporting plate and the base, make assembling and adjusting level to the time with level to vertical decoupling zero, almost not friction has improved the efficient of whole mechanism in the course of the work, does not produce pollution, and easy to maintenance;
6, vertical governor motion adopts cam to add the structure of roller, and the Z that can reach sub-micron is to degree of regulation.
Description of drawings
The concrete structure of the 6 freedom degree precision positioning station of changeable station of the present invention is provided by following embodiment and accompanying drawing.
Fig. 1 is the side-looking structural representation of positioning table of the present invention;
Fig. 2 is the plan structure synoptic diagram of positioning table of the present invention;
Fig. 3 is the air supporting plate structure synoptic diagram of positioning table of the present invention;
Fig. 4 is the schematic side view of the another kind of structure of positioning table of the present invention.
Embodiment
Be described in detail below in conjunction with the 6 freedom degree precision positioning station of accompanying drawing changeable station of the present invention.
Referring to Fig. 1 and Fig. 2, the 6 freedom degree precision positioning station of changeable station of the present invention comprises from top to down and inhales bed 34, air supporting plate 21, base 22 and vertical governor motion.Inhale bed 34 and be used to carry mask 35, be printed on the figure that is used to expose on the mask 35, as shown in Figure 2, have two different figures 41 and 42 on this mask 35, can certainly be one or more figures, can use these figures respectively during operate as normal, the effect of whole positioning table is exactly to carry mask and the figure that will expose navigates to appointed positions.Inhale bed 34 usefulness vacuum suction and fix mask 35, the strain that produces when as far as possible reducing permanent mask version 35.
Inhale bed 34 and be installed in the top of air supporting plate 21 by the station switching mechanism, in present embodiment, owing to have only two figures on the mask 35, so only require two stations, precision and repeatable accuracy are less demanding.Therefore, this station switching mechanism adopts double-acting cylinder 31 and guide rail 33 to realize, cylinder 31 is connected with inhaling bed 34 in a side by an adaptor 32, inhales bed 34 belows and slide block and is connected, and slide along two guide rails 33 by slide block, realize along Y to the mask figure switch.The stator of cylinder 31 and guide rail 33 all is fixed on the air supporting plate 21, and 33 pairs on guide rail is inhaled bed 34 and played the effect of supporting and leading.Limit the stroke that switches figure by the impact damper of regulating 31 two end of travels of cylinder,, and finally guarantee repetitive positioning accuracy at two ends as 50mm.According to different accuracy requirements, also can select for use linear electric motors or electric cylinder to replace cylinder.
What electric rotating machine 11 directly drove is the air supporting plate 21 that is carrying cylinder 31 and guide rail 33, after the figure change action is finished, mask 35, cylinder 31, suction bed 34 maintain static with guide rail 33 relative air supporting plates 21, finely tune along with air supporting plate 21 is being driven on X, Y, three directions of Rz, mask 35 is also just by adjusted in concert.
Level will be with air supporting plate 21 in vertical decoupling zero when regulating, so adopt air floating structure that air supporting plate 21 is floated, level is after fine setting finishes, and air supporting plate 21 tightly is adsorbed on the base 22 of positioning table with vacuum, and vacuum on the air supporting plate 21 and air supporting topology layout are as shown in Figure 3.Adopt vacuum air supporting mode, make assembling and adjusting level to the time can decoupling zero between this both direction, almost not friction has improved the efficient of whole mechanism in the course of the work, does not produce pollution, and easy to maintenance.
The below of base 22 is vertical governor motions.As shown in Figure 1, there are three vertical governor motions 20 to be distributed in 3 points of base 22 belows by triangle, this vertical governor motion 20 is made up of cam 202, motor and roller 201, cam 202 is by motor-driven, come lifting base 22 by friction roller 201 during rotation, 3 drives structure of locating can be at Z to independent lifting with reduce base 22 to certain height, and 3 interlocks can reach final adjusting mask 35Rx, Ry and the Z purpose to the position, and can reach the degree of regulation of sub-micron.In addition, because when regulating Rx and Ry, roller 201 and cam 202 can relative tilts, so that the profile of roller 201 is made is barrel-shaped.
Referring to Fig. 4, in another embodiment of the present invention, also three vertical governor motions shown in Figure 1 can be changed into three and regulate pad 20 ', reach the purpose of adjusting whole positioning table Z, Rx and Ry three degree of freedom by the thickness of three pads 20 ' of difference reconditioning.Satisfying under the prerequisite of function, make simple in structure, easier realization.
By said structure as can be seen, this positioning table band station handoff functionality, level can realize the minute adjustment and the location of six degree of freedom to fine adjustment function and vertical regulatory function, comprise satisfying the requirement that multiplex (MUX) more does the position.
That more than introduces only is based on preferred embodiment one by one of the present invention, can not limit scope of the present invention with this.Any method of the present invention is done replacement, the combination, discrete of step well know in the art, and the invention process step is done well know in the art being equal to change or replace and all do not exceed exposure of the present invention and protection domain.
Claims (12)
1. the 6 freedom degree precision positioning station of a changeable station, it is characterized in that: comprise and inhale bed, air supporting plate, level to micro-adjusting mechanism, base and vertical governor motion, described suction bed is installed in the top of air supporting plate by a station switching mechanism, be used to carry mask, described level connects to the gentle kickboard of micro-adjusting mechanism, be used to drive the air supporting plate and move in the horizontal direction, described air supporting plate below connects base, and described vertical governor motion is installed in described base below; Described station switching mechanism comprises a cylinder and two guide rails, and described cylinder is affixed to the suction bed by an adaptor, and described guide rail is fixed on air supporting plate upper surface, and described suction bed bottom also is provided with two slide blocks, and can slide along guide rail by slide block.
2. precision positioning platform as claimed in claim 1, it is characterized in that: described precision positioning platform comprises that three levels are to micro-adjusting mechanism, all level is installed on the base, these three levels serve as that group is installed in both sides adjacent on the air supporting plate respectively to micro-adjusting mechanism with two, one, and two groups of levels are vertical mutually to micro-adjusting mechanism.
3. precision positioning platform as claimed in claim 2 is characterized in that: described three levels overlap with employed centre of figure on the mask to the center of micro-adjusting mechanism.
4. precision positioning platform as claimed in claim 2 is characterized in that: described level is connected in sequence by electric rotating machine, shaft coupling, leading screw and screw rod to micro-adjusting mechanism.
5. precision positioning platform as claimed in claim 4 is characterized in that: also be provided with a plate between described electric rotating machine and the shaft coupling, described web joint is connected by extension spring with described air supporting plate, and makes screw front end contact air supporting plate by the pulling force of extension spring.
6. precision positioning platform as claimed in claim 4 is characterized in that: the front end of described screw rod is the bulb shape, and gentle kickboard contact also can be in air supporting plate side slip.
7. precision positioning platform as claimed in claim 4 is characterized in that: the front end of described screw rod is a roller structure, can roll in air supporting plate side.
8. precision positioning platform as claimed in claim 1 is characterized in that: described precision positioning platform comprises three vertical governor motions, is distributed in described base below by triangle.
9. precision positioning platform as claimed in claim 1, it is characterized in that: described vertical governor motion is made of cam and roller, the central shaft of described roller is level to setting, and this central shaft is fixed to base by fixture, the mutual interlock of described roller and cam, and described cam also is connected to a drive motor.
10. precision positioning platform as claimed in claim 9 is characterized in that: described roller is barrel-shaped.
11. precision positioning platform as claimed in claim 1 is characterized in that: but the pad that described vertical governor motion is reconditioning.
12. precision positioning platform as claimed in claim 1 is characterized in that: described air supporting plate links to each other with base with vacuum by air supporting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN 200810038759 CN101303532B (en) | 2008-06-10 | 2008-06-10 | Six-degree-of-freedom precision positioning table with switchable stations |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 200810038759 CN101303532B (en) | 2008-06-10 | 2008-06-10 | Six-degree-of-freedom precision positioning table with switchable stations |
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| CN101303532A CN101303532A (en) | 2008-11-12 |
| CN101303532B true CN101303532B (en) | 2010-06-09 |
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| CN102377289B (en) * | 2010-08-17 | 2013-05-22 | 上海微电子装备有限公司 | Lateral locking device |
| CN102678748B (en) | 2011-03-07 | 2014-07-16 | 上海微电子装备有限公司 | Split type air foot |
| CN102678749B (en) * | 2011-03-15 | 2014-08-20 | 上海微电子装备有限公司 | Air floatation structure of separated type air foot |
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| CN107093768B (en) * | 2017-04-14 | 2019-04-09 | 鹤壁市诺信电子有限公司 | A kind of secondary positioning trimming device of laminating machine |
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| CN109015546B (en) * | 2018-10-16 | 2024-03-01 | 天津中精微仪器设备有限公司 | Air-floatation four-dimensional adjusting table |
| DE102018220565A1 (en) * | 2018-11-29 | 2020-06-04 | Carl Zeiss Smt Gmbh | Projection exposure system for semiconductor lithography with a semi-active spacer and method for using the semi-active spacer |
| CN109491201B (en) * | 2018-12-26 | 2024-01-19 | 仪晟科学仪器(嘉兴)有限公司 | High-precision two-dimensional movement mechanism for mask |
| CN111722475B (en) * | 2019-03-22 | 2021-11-23 | 上海微电子装备（集团）股份有限公司 | Adjusting component and fine adjustment device |
| CN112756996A (en) * | 2020-12-29 | 2021-05-07 | 中国科学院长春光学精密机械与物理研究所 | Six-degree-of-freedom adjusting device |
| CN116093014B (en) * | 2023-03-20 | 2023-07-07 | 快克智能装备股份有限公司 | Working platform, presintering device and presintering method |
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Address after: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Co-patentee after: Shanghai Nanpre Mechanics Co.,Ltd. Patentee after: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) Co.,Ltd. Address before: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Co-patentee before: Shanghai Nanpre Mechanics Co.,Ltd. Patentee before: SHANGHAI MICRO ELECTRONICS EQUIPMENT Co.,Ltd. |
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Effective date of registration: 20250807 Address after: 3 / F, building 19, building 8, No. 498, GuoShouJing Road, China (Shanghai) pilot Free Trade Zone, Pudong New Area, Shanghai, 201203 Patentee after: Shanghai Xinshang Microelectronics Technology Co.,Ltd. Country or region after: China Patentee after: Shanghai Nanpre Mechanics Co.,Ltd. Address before: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Patentee before: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) Co.,Ltd. Country or region before: China Patentee before: Shanghai Nanpre Mechanics Co.,Ltd. |