CN101502914A - 用于喷油嘴微孔加工的皮秒激光加工装置 - Google Patents
用于喷油嘴微孔加工的皮秒激光加工装置 Download PDFInfo
- Publication number
- CN101502914A CN101502914A CN 200910025481 CN200910025481A CN101502914A CN 101502914 A CN101502914 A CN 101502914A CN 200910025481 CN200910025481 CN 200910025481 CN 200910025481 A CN200910025481 A CN 200910025481A CN 101502914 A CN101502914 A CN 101502914A
- Authority
- CN
- China
- Prior art keywords
- processing
- picosecond laser
- speculum
- laser
- picosecond
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003754 machining Methods 0.000 title description 10
- 230000003287 optical effect Effects 0.000 claims abstract description 19
- 239000000446 fuel Substances 0.000 abstract description 13
- 230000000694 effects Effects 0.000 abstract description 6
- 238000000034 method Methods 0.000 description 14
- 239000007921 spray Substances 0.000 description 14
- 241000196324 Embryophyta Species 0.000 description 8
- 239000000463 material Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 238000002485 combustion reaction Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 241000425571 Trepanes Species 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 241000931526 Acer campestre Species 0.000 description 1
- 241001074085 Scophthalmus aquosus Species 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000009760 electrical discharge machining Methods 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 230000005226 mechanical processes and functions Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Images
Landscapes
- Fuel-Injection Apparatus (AREA)
- Laser Beam Processing (AREA)
Abstract
本发明提供一种用于喷油嘴微孔加工的皮秒激光加工装置，包括皮秒激光器、校准系统和螺旋光学加工系统，皮秒激光器的输出端布置有第一反射镜，第一反射镜衔接第二反射镜，第二反射镜的输出端设置光闸，光闸的输出端连接有扩束镜，扩束镜的输出端衔接有第三反射镜，第三反射镜通过校准系统与螺旋光学加工系统相衔接。该装置适用于加工喷油嘴微孔，加工所产生的热效应小，喷孔边缘光滑，内壁无毛刺，加工效率及精度高，喷孔直径大小可调，最小可达60um；形状可保证为圆柱形，其径深比可达1∶20，大大提高喷孔加工精度与质量。
Description
技术领域
本发明涉及一种皮秒激光加工装置，用于加工喷油嘴上的微孔。
背景技术
喷油器装在发动机气缸盖上，作用是将燃油雾化成较细的颗粒，并喷入到燃烧室中和空气形成良好的可燃混合汽，从而提高燃烧效率。喷油器由上部的喷油器体和下部的喷油嘴组成，高压燃油经喷油器体从喷油嘴上小孔出射形成雾化颗粒，颗粒大小由燃油压力与小孔直径决定，因而小孔的质量对最终的燃烧效率有至关重要的作用。根据喷油嘴种类的不同，其小孔的形状也不同。小孔直径在0.15～1mm之间，目前常用喷油嘴上的小孔直径一般在0.15～0.55mm之间，小孔深度小于1mm，小孔数量小于15个。
目前，现有的机械加工技术在材料上打微型小孔一般只能加工孔径大于0.25mm的小孔，利用高端机械钻孔机虽然可以钻孔径0.1mm左右的孔，但其缺点在于价格昂贵、寿命较短，难以加工硬质合金，加工后的小孔内壁有毛刺等缺点。电火花加工技术也常用来加工小孔。电火花技术可加工直径0.1mm以下的微孔，其加工精度较高。缺点在于速度慢，电极寿命短且越小成本越高。目前激光已被应用在微孔加工领域。利用光学系统可以将激光聚焦到小于0.01mm的光点，光点处的功率密度可达到109W/cm2，加工时材料被熔化、汽化，从而形成小孔。相比于机械与电火花加工方式，激光加工技术有着显著的优势：其加工速度快，每秒钟可加工上千个孔，且孔一致性较好；成本较低，无工具损耗；寿命长，工作稳定。目前工业上激光钻微孔普遍使用的是光脉冲宽度为纳秒(10-9s)的激光器。由于纳秒激光器所产生的光脉冲宽度为纳秒级，与材料相互作用时热效应明显，孔边缘出现不光滑、烧焦、崩口、热裂纹等现象，导致加工精度降低。此外，通常使用的振镜扫描式光学系统虽然可加工0.1mm左右的微孔，但其缺点在于加工效率低，所能加工的小孔径深比有限，无法加工较深的小孔。
发明内容
本发明的目的是克服现有技术存在的不足，提供一种用于喷油嘴微孔加工的皮秒激光加工装置，旨在有效提高加工效率，增加喷孔径深比，提高喷孔加工精度与质量。
本发明的目的通过以下技术方案来实现：
用于喷油嘴微孔加工的皮秒激光加工装置，包括皮秒激光器、校准系统和螺旋光学加工系统，特点是：所述皮秒激光器的输出端布置有第一反射镜，第一反射镜衔接第二反射镜，第二反射镜的输出端设置光闸，光闸的输出端连接有扩束镜，扩束镜的输出端衔接有第三反射镜，第三反射镜通过校准系统与螺旋光学加工系统相衔接。
进一步地，上述的用于喷油嘴微孔加工的皮秒激光加工装置，所述皮秒激光器输出的激光为皮秒级绿色激光，波长为532nm。
更进一步地，上述的用于喷油嘴微孔加工的皮秒激光加工装置，所述扩束镜的放大倍率为3～10倍可调。
本发明技术方案突出的实质性特点和显著的进步主要体现在：
本发明采用波长为532nm、光脉冲宽度为皮秒级的激光器与螺旋光学加工系统相结合组成加工装置，用于加工喷油嘴微孔，加工所产生的热效应小，喷孔边缘光滑，内壁无毛刺，加工效率及精度高。喷孔直径大小可调，最小可达60um；形状可保证为圆柱形，其径深比可达1：20。显著减少了加工过程中的热效应，提高加工效率，大大改善喷孔加工精度与质量。
附图说明
下面结合附图对本发明技术方案作进一步说明：
图1：本发明光路结构的示意图；
图2：本发明装置的结构示意图。
图中各附图标记的含义见下表：
| 附图标记 | 含义 | 附图标记 | 含义 | 附图标记 | 含义 |
| 1 | 皮秒激光器 | 2 | 第一反射镜 | 3 | 第二反射镜 |
| 4 | 光闸 | 5 | 扩束镜 | 6 | 第三反射镜 |
| 7 | 校准系统 | 8 | 螺旋光学加工系统 | 9 | 工作平台 |
具体实施方式
本发明设计一种激光微孔加工装置，利用皮秒激光与螺旋光学加工系统相结合加工喷油嘴上的微孔，皮秒激光经光学传输与校准系统后进入螺旋光学加工系统，由软件控制螺旋光学系统将光束聚焦后进行微孔加工。
如图1、图2所示，用于喷油嘴微孔加工的皮秒激光加工装置，包括皮秒激光器1、校准系统7和螺旋光学加工系统8，皮秒激光器1的输出端布置有第一反射镜2，第一反射镜2衔接第二反射镜3，第二反射镜3的输出端设置光闸4，光闸4的输出端连接有扩束镜5，扩束镜5的输出端衔接有第三反射镜6，第三反射镜6通过校准系统7与螺旋光学加工系统8相衔接。
皮秒激光器1输出的激光波长为532nm绿色激光，金属物质对于此波段的光束具有较高的吸收率，从而使聚焦光斑处能量得到充分利用，可减少加工时的热效应。激光的脉冲宽度为皮秒级，其单脉冲功率是纳秒脉冲功率的1000倍，材料直接被气化而不经过熔融态，可有效的减少热效应的发生。从而使小孔边缘光滑，内壁无毛刺等残留。
光路传输中光闸4起到激光通断的外部控制，不处于加工状态时可对激光进行阻拦，也起到一定的保护作用，防止操作人员受到意外伤害。
扩束镜5的放大倍率从3～10倍可调，其作用是将激光光束的直径扩大并进行准直，使出射光束的平行度更佳，有利于将光束在后续的系统中进行聚焦。扩束镜5的倍率与聚焦光斑的直径成反比，因此倍率可调能有效的控制聚焦光斑的直径与能量大小。
光路校准系统7用于双光路的光路校准，其原理是使激光通过处在同一轴线上相隔一定距离的两个小孔以确定其传输路径，从而确保光束以最佳路径进入螺旋光学加工系统8。
螺旋光学加工系统8出射的光线高速绕自身的轴线旋转，这样避免了因光束本身圆度不佳导致的喷孔圆度下降。光束经聚焦后出射光束沿一圆锥面对加工材料进行高速环锯，使喷孔的加工径深比达到1：20。在此过程中，旋转的速度可以由软件控制进行实时调节。环锯圆的直径即为所需加工喷孔的直径，可通过软件设置其大小，可加工喷孔的最小直径为60um。与普通振镜式激光钻孔所钻出的孔呈锥形相比，螺旋光学加工系统出射的光束与加工表面的夹角也可由软件进行控制，从而保证加工出的喷孔为圆柱型孔。
反射镜主要起到光路偏转的作用，反射镜与反射镜及反射镜与扩束镜之间的距离没有特定的限制，但是其位置在机械设计时镜片的中心尽量保持水平一致或是垂直一致(图中光路转角为直角)，以方便光路的调节。
具体应用时，如图1，由皮秒激光器1输出脉冲宽度为皮秒级的绿色532nm波长激光束，经过第一反射镜2、第二反射镜3后，通过光闸4进入扩束镜5，经扩束后通过第三反射镜6进入校准系统7，使光速经过确定路径进入螺旋光学加工系统8，最后经螺旋光学加工系统8聚焦于工作平台9上的喷油嘴，将聚焦点处的材料直接气化剥除，从而加工出喷孔。
综上所述，选用532nm、光脉冲宽度达到皮秒级，功率密度达到1012W/cm2的激光，可有效减少激光加工金属时产生的热效应。螺旋光学加工系统不仅使加工喷孔的效率得到显著提高，同时喷孔直径的精度、喷孔形状以及喷孔的加工深度，也都能得到很好的满足，其应用前景十分看好。
需要理解到的是：上述说明并非是对本发明的限制，在本发明构思范围内，所进行的添加、变换、替换等，也应属于本发明的保护范围。
Claims (3)
1.用于喷油嘴微孔加工的皮秒激光加工装置，包括皮秒激光器、校准系统和螺旋光学加工系统，其特征在于：所述皮秒激光器的输出端布置有第一反射镜，第一反射镜衔接第二反射镜，第二反射镜的输出端设置光闸，光闸的输出端连接有扩束镜，扩束镜的输出端衔接有第三反射镜，第三反射镜通过校准系统与螺旋光学加工系统相衔接。
2.根据权利要求1所述的用于喷油嘴微孔加工的皮秒激光加工装置，其特征在于：所述皮秒激光器输出的激光为皮秒级绿色激光，波长为532nm。
3.根据权利要求1所述的用于喷油嘴微孔加工的皮秒激光加工装置，其特征在于：所述扩束镜的放大倍率为3～10倍可调。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910025481 CN101502914A (zh) | 2009-03-06 | 2009-03-06 | 用于喷油嘴微孔加工的皮秒激光加工装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910025481 CN101502914A (zh) | 2009-03-06 | 2009-03-06 | 用于喷油嘴微孔加工的皮秒激光加工装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101502914A true CN101502914A (zh) | 2009-08-12 |
Family
ID=40975352
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200910025481 Pending CN101502914A (zh) | 2009-03-06 | 2009-03-06 | 用于喷油嘴微孔加工的皮秒激光加工装置 |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101502914A (zh) |
Cited By (44)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102233483A (zh) * | 2010-04-30 | 2011-11-09 | 博世汽车柴油系统股份有限公司 | 用于加工喷嘴本体的设备和方法 |
| CN102756396A (zh) * | 2012-07-16 | 2012-10-31 | 刘天镐 | 一种微型喇叭支架激光打孔方法 |
| CN103111824A (zh) * | 2013-01-31 | 2013-05-22 | 中国南方航空工业(集团)有限公司 | 流量调试与孔径加工同步工艺 |
| CN106735942A (zh) * | 2016-11-29 | 2017-05-31 | 沈阳黎明航空发动机(集团)有限责任公司 | 一种燃烧室喷油杆微孔冷成形工艺方法 |
| US9676167B2 (en) | 2013-12-17 | 2017-06-13 | Corning Incorporated | Laser processing of sapphire substrate and related applications |
| US9701563B2 (en) | 2013-12-17 | 2017-07-11 | Corning Incorporated | Laser cut composite glass article and method of cutting |
| US9815144B2 (en) | 2014-07-08 | 2017-11-14 | Corning Incorporated | Methods and apparatuses for laser processing materials |
| US9815730B2 (en) | 2013-12-17 | 2017-11-14 | Corning Incorporated | Processing 3D shaped transparent brittle substrate |
| CN107378266A (zh) * | 2017-08-31 | 2017-11-24 | 湖北天明粮油设备有限公司 | 一种机架两侧定位打孔装置 |
| US9850159B2 (en) | 2012-11-20 | 2017-12-26 | Corning Incorporated | High speed laser processing of transparent materials |
| US9850160B2 (en) | 2013-12-17 | 2017-12-26 | Corning Incorporated | Laser cutting of display glass compositions |
| CN107598381A (zh) * | 2017-08-28 | 2018-01-19 | 大族激光科技产业集团股份有限公司 | 一种除去铝合金加工件上刀纹的方法及装置 |
| US10047001B2 (en) | 2014-12-04 | 2018-08-14 | Corning Incorporated | Glass cutting systems and methods using non-diffracting laser beams |
| US10144093B2 (en) | 2013-12-17 | 2018-12-04 | Corning Incorporated | Method for rapid laser drilling of holes in glass and products made therefrom |
| US10173916B2 (en) | 2013-12-17 | 2019-01-08 | Corning Incorporated | Edge chamfering by mechanically processing laser cut glass |
| US10233112B2 (en) | 2013-12-17 | 2019-03-19 | Corning Incorporated | Laser processing of slots and holes |
| US10252931B2 (en) | 2015-01-12 | 2019-04-09 | Corning Incorporated | Laser cutting of thermally tempered substrates |
| US10280108B2 (en) | 2013-03-21 | 2019-05-07 | Corning Laser Technologies GmbH | Device and method for cutting out contours from planar substrates by means of laser |
| US10335902B2 (en) | 2014-07-14 | 2019-07-02 | Corning Incorporated | Method and system for arresting crack propagation |
| US10377658B2 (en) | 2016-07-29 | 2019-08-13 | Corning Incorporated | Apparatuses and methods for laser processing |
| US10421683B2 (en) | 2013-01-15 | 2019-09-24 | Corning Laser Technologies GmbH | Method and device for the laser-based machining of sheet-like substrates |
| US10522963B2 (en) | 2016-08-30 | 2019-12-31 | Corning Incorporated | Laser cutting of materials with intensity mapping optical system |
| US10525657B2 (en) | 2015-03-27 | 2020-01-07 | Corning Incorporated | Gas permeable window and method of fabricating the same |
| US10526234B2 (en) | 2014-07-14 | 2020-01-07 | Corning Incorporated | Interface block; system for and method of cutting a substrate being transparent within a range of wavelengths using such interface block |
| US10611667B2 (en) | 2014-07-14 | 2020-04-07 | Corning Incorporated | Method and system for forming perforations |
| US10626040B2 (en) | 2017-06-15 | 2020-04-21 | Corning Incorporated | Articles capable of individual singulation |
| US10688599B2 (en) | 2017-02-09 | 2020-06-23 | Corning Incorporated | Apparatus and methods for laser processing transparent workpieces using phase shifted focal lines |
| US10730783B2 (en) | 2016-09-30 | 2020-08-04 | Corning Incorporated | Apparatuses and methods for laser processing transparent workpieces using non-axisymmetric beam spots |
| CN111531271A (zh) * | 2020-05-29 | 2020-08-14 | 青岛星成激光科技有限公司 | 飞秒激光炫彩打标装置 |
| US10752534B2 (en) | 2016-11-01 | 2020-08-25 | Corning Incorporated | Apparatuses and methods for laser processing laminate workpiece stacks |
| US11062986B2 (en) | 2017-05-25 | 2021-07-13 | Corning Incorporated | Articles having vias with geometry attributes and methods for fabricating the same |
| CN113146075A (zh) * | 2020-12-02 | 2021-07-23 | 温锦华 | 一种雾化结构的制作方法 |
| US11078112B2 (en) | 2017-05-25 | 2021-08-03 | Corning Incorporated | Silica-containing substrates with vias having an axially variable sidewall taper and methods for forming the same |
| US11111170B2 (en) | 2016-05-06 | 2021-09-07 | Corning Incorporated | Laser cutting and removal of contoured shapes from transparent substrates |
| US11114309B2 (en) | 2016-06-01 | 2021-09-07 | Corning Incorporated | Articles and methods of forming vias in substrates |
| US11186060B2 (en) | 2015-07-10 | 2021-11-30 | Corning Incorporated | Methods of continuous fabrication of holes in flexible substrate sheets and products relating to the same |
| CN115055842A (zh) * | 2022-06-09 | 2022-09-16 | 中国工程物理研究院激光聚变研究中心 | 一种激光打孔扫描控制系统 |
| US11542190B2 (en) | 2016-10-24 | 2023-01-03 | Corning Incorporated | Substrate processing station for laser-based machining of sheet-like glass substrates |
| US11556039B2 (en) | 2013-12-17 | 2023-01-17 | Corning Incorporated | Electrochromic coated glass articles and methods for laser processing the same |
| US11554984B2 (en) | 2018-02-22 | 2023-01-17 | Corning Incorporated | Alkali-free borosilicate glasses with low post-HF etch roughness |
| US11648623B2 (en) | 2014-07-14 | 2023-05-16 | Corning Incorporated | Systems and methods for processing transparent materials using adjustable laser beam focal lines |
| US11773004B2 (en) | 2015-03-24 | 2023-10-03 | Corning Incorporated | Laser cutting and processing of display glass compositions |
| US11774233B2 (en) | 2016-06-29 | 2023-10-03 | Corning Incorporated | Method and system for measuring geometric parameters of through holes |
| US12180108B2 (en) | 2017-12-19 | 2024-12-31 | Corning Incorporated | Methods for etching vias in glass-based articles employing positive charge organic molecules |
-
2009
- 2009-03-06 CN CN 200910025481 patent/CN101502914A/zh active Pending
Cited By (62)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102233483B (zh) * | 2010-04-30 | 2014-01-29 | 博世汽车柴油系统股份有限公司 | 用于加工喷嘴本体的设备和方法 |
| CN102233483A (zh) * | 2010-04-30 | 2011-11-09 | 博世汽车柴油系统股份有限公司 | 用于加工喷嘴本体的设备和方法 |
| CN102756396A (zh) * | 2012-07-16 | 2012-10-31 | 刘天镐 | 一种微型喇叭支架激光打孔方法 |
| CN102756396B (zh) * | 2012-07-16 | 2015-07-15 | 刘天镐 | 一种微型喇叭支架激光打孔方法 |
| US9850159B2 (en) | 2012-11-20 | 2017-12-26 | Corning Incorporated | High speed laser processing of transparent materials |
| US10421683B2 (en) | 2013-01-15 | 2019-09-24 | Corning Laser Technologies GmbH | Method and device for the laser-based machining of sheet-like substrates |
| US11028003B2 (en) | 2013-01-15 | 2021-06-08 | Corning Laser Technologies GmbH | Method and device for laser-based machining of flat substrates |
| US11345625B2 (en) | 2013-01-15 | 2022-05-31 | Corning Laser Technologies GmbH | Method and device for the laser-based machining of sheet-like substrates |
| CN103111824A (zh) * | 2013-01-31 | 2013-05-22 | 中国南方航空工业(集团)有限公司 | 流量调试与孔径加工同步工艺 |
| US10280108B2 (en) | 2013-03-21 | 2019-05-07 | Corning Laser Technologies GmbH | Device and method for cutting out contours from planar substrates by means of laser |
| US11713271B2 (en) | 2013-03-21 | 2023-08-01 | Corning Laser Technologies GmbH | Device and method for cutting out contours from planar substrates by means of laser |
| US10293436B2 (en) | 2013-12-17 | 2019-05-21 | Corning Incorporated | Method for rapid laser drilling of holes in glass and products made therefrom |
| US9701563B2 (en) | 2013-12-17 | 2017-07-11 | Corning Incorporated | Laser cut composite glass article and method of cutting |
| US11556039B2 (en) | 2013-12-17 | 2023-01-17 | Corning Incorporated | Electrochromic coated glass articles and methods for laser processing the same |
| US10597321B2 (en) | 2013-12-17 | 2020-03-24 | Corning Incorporated | Edge chamfering methods |
| US10144093B2 (en) | 2013-12-17 | 2018-12-04 | Corning Incorporated | Method for rapid laser drilling of holes in glass and products made therefrom |
| US10173916B2 (en) | 2013-12-17 | 2019-01-08 | Corning Incorporated | Edge chamfering by mechanically processing laser cut glass |
| US10179748B2 (en) | 2013-12-17 | 2019-01-15 | Corning Incorporated | Laser processing of sapphire substrate and related applications |
| US10183885B2 (en) | 2013-12-17 | 2019-01-22 | Corning Incorporated | Laser cut composite glass article and method of cutting |
| US9850160B2 (en) | 2013-12-17 | 2017-12-26 | Corning Incorporated | Laser cutting of display glass compositions |
| US10233112B2 (en) | 2013-12-17 | 2019-03-19 | Corning Incorporated | Laser processing of slots and holes |
| US11148225B2 (en) | 2013-12-17 | 2021-10-19 | Corning Incorporated | Method for rapid laser drilling of holes in glass and products made therefrom |
| US10442719B2 (en) | 2013-12-17 | 2019-10-15 | Corning Incorporated | Edge chamfering methods |
| US9676167B2 (en) | 2013-12-17 | 2017-06-13 | Corning Incorporated | Laser processing of sapphire substrate and related applications |
| US10611668B2 (en) | 2013-12-17 | 2020-04-07 | Corning Incorporated | Laser cut composite glass article and method of cutting |
| US10392290B2 (en) | 2013-12-17 | 2019-08-27 | Corning Incorporated | Processing 3D shaped transparent brittle substrate |
| US9815730B2 (en) | 2013-12-17 | 2017-11-14 | Corning Incorporated | Processing 3D shaped transparent brittle substrate |
| US11697178B2 (en) | 2014-07-08 | 2023-07-11 | Corning Incorporated | Methods and apparatuses for laser processing materials |
| US9815144B2 (en) | 2014-07-08 | 2017-11-14 | Corning Incorporated | Methods and apparatuses for laser processing materials |
| US10526234B2 (en) | 2014-07-14 | 2020-01-07 | Corning Incorporated | Interface block; system for and method of cutting a substrate being transparent within a range of wavelengths using such interface block |
| US11648623B2 (en) | 2014-07-14 | 2023-05-16 | Corning Incorporated | Systems and methods for processing transparent materials using adjustable laser beam focal lines |
| US10335902B2 (en) | 2014-07-14 | 2019-07-02 | Corning Incorporated | Method and system for arresting crack propagation |
| US10611667B2 (en) | 2014-07-14 | 2020-04-07 | Corning Incorporated | Method and system for forming perforations |
| US11014845B2 (en) | 2014-12-04 | 2021-05-25 | Corning Incorporated | Method of laser cutting glass using non-diffracting laser beams |
| US10047001B2 (en) | 2014-12-04 | 2018-08-14 | Corning Incorporated | Glass cutting systems and methods using non-diffracting laser beams |
| US10252931B2 (en) | 2015-01-12 | 2019-04-09 | Corning Incorporated | Laser cutting of thermally tempered substrates |
| US11773004B2 (en) | 2015-03-24 | 2023-10-03 | Corning Incorporated | Laser cutting and processing of display glass compositions |
| US10525657B2 (en) | 2015-03-27 | 2020-01-07 | Corning Incorporated | Gas permeable window and method of fabricating the same |
| US11186060B2 (en) | 2015-07-10 | 2021-11-30 | Corning Incorporated | Methods of continuous fabrication of holes in flexible substrate sheets and products relating to the same |
| US11111170B2 (en) | 2016-05-06 | 2021-09-07 | Corning Incorporated | Laser cutting and removal of contoured shapes from transparent substrates |
| US11114309B2 (en) | 2016-06-01 | 2021-09-07 | Corning Incorporated | Articles and methods of forming vias in substrates |
| US11774233B2 (en) | 2016-06-29 | 2023-10-03 | Corning Incorporated | Method and system for measuring geometric parameters of through holes |
| US10377658B2 (en) | 2016-07-29 | 2019-08-13 | Corning Incorporated | Apparatuses and methods for laser processing |
| US10522963B2 (en) | 2016-08-30 | 2019-12-31 | Corning Incorporated | Laser cutting of materials with intensity mapping optical system |
| US11130701B2 (en) | 2016-09-30 | 2021-09-28 | Corning Incorporated | Apparatuses and methods for laser processing transparent workpieces using non-axisymmetric beam spots |
| US10730783B2 (en) | 2016-09-30 | 2020-08-04 | Corning Incorporated | Apparatuses and methods for laser processing transparent workpieces using non-axisymmetric beam spots |
| US11542190B2 (en) | 2016-10-24 | 2023-01-03 | Corning Incorporated | Substrate processing station for laser-based machining of sheet-like glass substrates |
| US10752534B2 (en) | 2016-11-01 | 2020-08-25 | Corning Incorporated | Apparatuses and methods for laser processing laminate workpiece stacks |
| CN106735942A (zh) * | 2016-11-29 | 2017-05-31 | 沈阳黎明航空发动机(集团)有限责任公司 | 一种燃烧室喷油杆微孔冷成形工艺方法 |
| US10688599B2 (en) | 2017-02-09 | 2020-06-23 | Corning Incorporated | Apparatus and methods for laser processing transparent workpieces using phase shifted focal lines |
| US11062986B2 (en) | 2017-05-25 | 2021-07-13 | Corning Incorporated | Articles having vias with geometry attributes and methods for fabricating the same |
| US11972993B2 (en) | 2017-05-25 | 2024-04-30 | Corning Incorporated | Silica-containing substrates with vias having an axially variable sidewall taper and methods for forming the same |
| US11078112B2 (en) | 2017-05-25 | 2021-08-03 | Corning Incorporated | Silica-containing substrates with vias having an axially variable sidewall taper and methods for forming the same |
| US10626040B2 (en) | 2017-06-15 | 2020-04-21 | Corning Incorporated | Articles capable of individual singulation |
| CN107598381A (zh) * | 2017-08-28 | 2018-01-19 | 大族激光科技产业集团股份有限公司 | 一种除去铝合金加工件上刀纹的方法及装置 |
| CN107378266A (zh) * | 2017-08-31 | 2017-11-24 | 湖北天明粮油设备有限公司 | 一种机架两侧定位打孔装置 |
| US12180108B2 (en) | 2017-12-19 | 2024-12-31 | Corning Incorporated | Methods for etching vias in glass-based articles employing positive charge organic molecules |
| US11554984B2 (en) | 2018-02-22 | 2023-01-17 | Corning Incorporated | Alkali-free borosilicate glasses with low post-HF etch roughness |
| CN111531271A (zh) * | 2020-05-29 | 2020-08-14 | 青岛星成激光科技有限公司 | 飞秒激光炫彩打标装置 |
| CN113146075A (zh) * | 2020-12-02 | 2021-07-23 | 温锦华 | 一种雾化结构的制作方法 |
| CN115055842A (zh) * | 2022-06-09 | 2022-09-16 | 中国工程物理研究院激光聚变研究中心 | 一种激光打孔扫描控制系统 |
| CN115055842B (zh) * | 2022-06-09 | 2024-02-27 | 中国工程物理研究院激光聚变研究中心 | 一种激光打孔扫描控制系统 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN201357287Y (zh) | 新型皮秒激光加工装置 | |
| CN101502914A (zh) | 用于喷油嘴微孔加工的皮秒激光加工装置 | |
| CN101569962A (zh) | 双光路绿光微孔加工装置 | |
| CN106363306A (zh) | 一种喷油嘴喷孔的加工方法及系统 | |
| CN108247201B (zh) | 一种高压水束发生装置及具有该装置的水导激光系统 | |
| US9284939B2 (en) | Laser-induced spark ignition for an internal combustion engine | |
| US9377003B2 (en) | Laser-induced spark ignition for an internal combustion engine | |
| CN211276517U (zh) | 一种高反射材料蓝绿激光微熔化成型装置 | |
| US20130104827A1 (en) | Laser-induced spark ignition for an internal combustion engine | |
| CN106312302B (zh) | 一种自聚焦激光加工装置 | |
| CN105891916B (zh) | 一种基于轴锥透镜与聚焦镜特性的非球面镜 | |
| CN104526892A (zh) | 晶圆切割装置 | |
| CN114682934B (zh) | 多脉宽复合的印制电路板激光加工装置 | |
| US20090294423A1 (en) | Manufacturing system having delivery media and grin lens | |
| CN110125532B (zh) | 一种水导引激光加工工件的方法、系统及其设备 | |
| WO2025086912A1 (zh) | 一种高表面质量的水导激光微孔加工装置及方法 | |
| CN106346141A (zh) | 一种基于复合激光束的金属切割装置 | |
| CN116372360B (zh) | 一种微孔旋切扫描加工光学系统 | |
| CN106141456A (zh) | 一种旋转式水导激光加工系统及方法 | |
| CN207071749U (zh) | 超快激光加工微细倒锥孔的装置 | |
| CN108115274A (zh) | 一种激光加工系统及方法 | |
| CN204545723U (zh) | 一种旋转式水导激光加工系统 | |
| CN201373947Y (zh) | 紫外激光光束整形装置 | |
| CN102939182B (zh) | 用于断离工件的方法和激光装置 | |
| KR102176312B1 (ko) | 형상홀을 만들기 위한 레이저 드릴링 방법 및 시스템 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20090812 |