CN101551659A - Warehouse location monitoring system integrating wireless radio frequency identification - Google Patents

Abstract

An in-warehouse monitoring system integrating Radio Frequency Identification (RFID) technology for a semiconductor factory, comprising: a plurality of carriers, each carrier carrying at least one semiconductor object; a storage position monitoring host; and a plurality of RFID tags and RFID readers. A plurality of RFID tags respectively arranged on each carrier and the semiconductor object, each RFID tag having tag information; the RFID reader may read or write tag information from or to the RFID tag. The storehouse position monitoring host computer contains: a database storing data relating to the bin position monitoring system; the RFID intermediate software is used for processing the operation between the RFID reader and the RFID label; a web interface for processing the instruction issued by the operator connected with the network between enterprises and outputting the corresponding result; an output/input interface for processing the instruction issued by the operator connected via the enterprise internal network and outputting the corresponding result; and a library controller for processing the data access between the database and the RFID intermediate software, the web interface and the input/output interface to execute the operation of library monitoring.

Description

Storage location monitoring system integrated with radio frequency identification

technical field

The invention relates to a storage location monitoring system, in particular to a storage location monitoring system integrating radio frequency identification (RFID) technology.

Background technique

The prior art about using RFID technology to store or ship wafers has been disclosed in US Patent US6330971, US Early Published Application US20060043197, and Taiwan Patent TWI267029. Among them, U.S. Patent No. US6330971 discloses a system that uses RFID technology to track wafers. As shown in FIG. RFID tag 14 and controller 13, wherein RFID reader 12 reads the RFID tag 14 attached on each carrier 11 through a plurality of antennas 15 thereon, and RFID reader 12 will read the The tag information is sent to the controller 13 through the RS232 interface to provide the current location of the carrier 11 and the wafers it carries.

In addition, US early published application US2006004319 discloses a system using RFID carriers for wafer transportation. As shown in FIG. The reader 116 and the machine controller 117, when the carrier 111 is transported to the processing machine 115 through the transport device 110, the RFID reader 116 installed on the processing machine 115 reads the RFID tag 114 of the carrier body 112 , so as to send the carrier identification code recorded in the RFID tag 114 to the machine controller 117 to provide the processing machine 115 for processing the wafers in the carrier 111 .

In addition, Taiwan's invention patent TW I267029 discloses a system using RFID carriers for wafer transportation. As shown in FIG. , RFID reader 1050, host 1060 and trigger 1070, when the RFID tag 1020 of a wafer box 1010 appears near the processing machine 1040, the transport device 1030 is automatically activated due to the RFID sensor directly receiving the RFID tag 1020, possibly The operator is accidentally injured by transferring the wafer cassette 1010 to the loading and unloading section through the robot arm, but the operator directly operates the trigger 1070 to issue commands to the host 1060 to control when the RFID sensor responds, preventing the RFID sensor from inappropriately sensing the RFID The robot arm is activated accidentally and endangers the safety of the operator.

The content of the above-mentioned prior art is mainly to use RFID for wafer delivery or tracking, but the RFID technology is not effectively integrated with the warehouse position monitoring information system to provide operators with real-time monitoring of wafer-based (wafer) Based) warehouse location monitoring, so providing an information system that integrates RFID technology into warehouse location monitoring, so that operators can grasp the inventory location management of semiconductor goods and the scheduling planning of semiconductor testing in real time online, is an urgent issue in the industry. .

Contents of the invention

In order to provide a warehouse location monitoring system capable of real-time monitoring of wafer-based carriers or semiconductor objects to solve the unsatisfactory problems of the above-mentioned prior art, the present invention provides a warehouse location monitoring system with integrated RFID technology , including multiple carriers, a location monitoring host for monitoring the location of each carrier or object, multiple RFID tags (tags) and multiple RFID readers (RFID readers). Wherein, the carrier is placed in a predetermined space of the manufacturer, and each carrier is used to carry at least one semiconductor object. RFID tags (tags) are set on each carrier or object respectively, and each RFID tag has a tag information (tag information). The RFID reader is configured in the manufacturer's preset space, and reads or writes tag information from the RFID tag through radio frequency. The location monitoring host is used to monitor the location of each carrier or semiconductor object, including: a database (legacy database), which stores data related to the location monitoring system; an RFID intermediary software, used to process RFID readers and The operation between RFID tags; a web interface, used to process the instructions issued by the operator through the inter-enterprise (B2B) network connection (internet) and the corresponding output results; ) operator to issue instructions and output corresponding results; and a location controller to handle data access between the database and RFID intermediary software, web interface, and I/O interface, so as to perform the operation of location monitoring. Accordingly, The operator of the semiconductor factory can manage the location monitoring of wafer-based carriers or semiconductor objects on-line.

Therefore, the main purpose of the present invention is to provide a storage location monitoring system integrating RFID technology, which can provide operators or system online real-time monitoring of storage location information of semiconductor objects through RFID technology.

In addition, the secondary purpose of the present invention is to provide a storage location monitoring system integrating RFID technology, which can further use the code of the RFID tag as a search index to provide upstream and downstream manufacturers with real-time control of the current location, status, and location of semiconductor objects from the internal network. with test results.

In addition, another object of the present invention is to provide a storage location monitoring system integrating RFID technology, which can further use the code of the RFID tag as a search index to provide operators with real-time access to semiconductor goods from the internal network.

In addition, another object of the present invention is to provide a warehouse position monitoring system integrating RFID technology, which can further provide operators with real-time control of the current testing status of semiconductor objects and scheduling management of production lines from the internal network.

In addition, another object of the present invention is to provide a storage location monitoring system integrated with RFID technology, which can further provide the operator of the entry and exit control area in the entry and exit of the building space to control the entry and exit of semiconductor goods in real time from the internal network .

Description of drawings

1A to 1C are schematic diagrams of a chip system using RFID in the prior art.

Fig. 2 is a schematic diagram of a storage location monitoring system integrating RFID according to the first preferred embodiment of the present invention.

FIG. 3 is a schematic diagram of a second preferred embodiment of another RFID-integrated storage location monitoring system proposed according to FIG. 2 .

Detailed ways

Since the present invention discloses a storage location monitoring system integrating RFID technology, the operator can monitor the storage location management and production line control of wafer-based carriers or semiconductor objects in real time, wherein the The technical principles of semiconductor testing and radio frequency identification have been understood by those with ordinary knowledge in the relevant technical fields, so the following explanations will not be fully described. At the same time, the drawings compared below are schematic structural representations related to the features of the present invention, and are not and need not be completely drawn according to the actual size.

Please refer to FIG. 2 at first, which shows the first preferred embodiment proposed by the present invention, which is a storage location monitoring system 20 integrating radio frequency identification (RFID) technology, used in a semiconductor factory 21, and this storage location monitoring system 20 It includes: a plurality of carriers 22 , a location monitoring host 26 , a plurality of RFID tags 24 and a plurality of RFID readers 23 . Wherein the carrier 22 is placed in the preset space of the semiconductor factory 21 (referring to a specific factory building or operation area), in order to carry at least one semiconductor object 220, and this semiconductor object 220 can be a wafer, a probe card or a mask, and The carrier 22 carrying the semiconductor object 220 may be a wafer pod, a wafer transfer box (FOUP), a wafer transport box (FOSB), a trolley, or a probe card box (Probe Card Box). In addition, a plurality of RFID readers 23 are arranged in this semiconductor factory 21, and a plurality of RFID tags 24 are installed in different positions of each carrier and object, so as to ensure that the tag information recorded in each RFID tag 24 can be preset here In the radio frequency range of the space, it is read or written by the RFID reader 23, and the tag information includes tag ID, carrier or lot number (carrier or LotID), customer number (customer ID), chip type (wafer part ID), wafer number (wafer ID), wafer quantity (wafer Q'ty), good die quantity (Good Die Q'ty) and probe card number (probe cardID), etc. In addition, the above RFID tags 24 can Is passive (passive) or active (active). Accordingly, the location monitoring host 26 can provide the operator with real-time monitoring information about the locations of the carriers or semiconductor objects.

In the above embodiment, the location monitoring host 26 is characterized by including a database 260 , an RFID intermediary software 261 , a web interface 262 , a location controller 263 , and an I/O interface 264 . Wherein the above-mentioned database 260 stores location data such as number, quantity, status and location related to carriers or semiconductor objects, such as: carrier or chip lot number, customer number, chip model, chip number, chip quantity, good die quantity and probe card number, carrier or object storage location, wafer processing information, wafer test results, and probe card use records and other related location data; In addition, the RFID intermediary software 261 uses a data transmission protocol and driver 230, such as selecting one of various wired or wireless transmission methods such as RS232, Ethernet, USB or WLAN, to read the location monitoring host 26 and RFID Data transmission between the machine 23, while processing the data reading and writing between the RFID reading machine 23 and the RFID tag 24; the web interface 262 provides the operator to issue instructions and output corresponding results through the inter-enterprise network (B2Binternet), For example: the operator searches for the location information or process information of the semiconductor object 220 belonging to a specific customer through the inter-enterprise network; the input/output interface 264 can be connected with multiple output and input devices to provide an interface for the operator to issue instructions and output corresponding results; The storage location controller 263 handles the data transmission between the database 260, the RFID intermediary software 261, the web interface 262, and the input/output interface 264, so as to perform the operations of the storage location monitoring.

In the above embodiment, the RFID intermediary software 261 can further provide an index key (not shown) to the above-mentioned location controller 263, so that the location controller 263 can access the database 260 according to the index key, such as an operator Carrier batch number and chip number can be used as the primary index key and secondary index key to search the online database 260 to find out the current location information of the chip, and the index key is determined by the RFID The middleware 261 extracts from the tag information, that is, the index key can be composed of tag identification code, carrier or wafer lot number, customer number, chip model, chip number, and probe card number. In addition, a warning device 25 can be further installed adjacent to the RFID reader 23 , such as at the entrance and exit of the semiconductor factory 21 , to provide operators with real-time security monitoring and tracking of the latest status of the semiconductor object 220 and the carrier 22 .

Please refer to FIG. 3 , which is the second preferred embodiment of the present invention, which is another storage location monitoring system 30 integrating radio frequency identification (RFID) technology. Used in a semiconductor factory 31 , the location monitoring system 30 includes: a plurality of carriers 32 , a location monitoring host 36 , a plurality of RFID tags 34 , a plurality of RFID readers 33 and a testing machine area 37 . Wherein the carrier 32 is placed in the predetermined space of the semiconductor factory 31 (referring to a specific factory building or operation area), in order to carry at least one semiconductor object 320, and this semiconductor object 320 can be a wafer, a probe card or a mask, The carrier 32 carrying the semiconductor object 320 may be a wafer box, a wafer transfer box (FOUP), a wafer transport box (FOSB), a trolley, or a probe card box (Probe Card Box). In addition, a plurality of RFID readers 33 are arranged in the semiconductor factory 31, and a plurality of RFID tags 34 are arranged in different positions of each carrier or semiconductor object, so as to ensure that the tag information recorded in each RFID tag 34 can be preset here. It is read or written by the RFID reader 33 within the radio frequency range of the space, and the tag information includes tag ID, carrier or lot ID, customer ID, Wafer model (wafer part ID), wafer number (wafer ID), wafer quantity (wafer Q'ty), good die quantity (Good Die Q'ty) and probe card number (probe card ID), etc. Tag 34 may be passive or active. In addition, the above-mentioned location monitoring host computer 36 is further connected to the test machine area 37, and this test machine area 37 includes a plurality of test machines 38, an online test system 39 and a test database 40, the online test system 39 is used To provide the test parameters required by each test machine 38 and monitor the usage status of the wafer/probe card, the test database 40 is used to store the test parameters or processing information of the wafer process, and the wafer test results, so that the online test system 39 can be Provide the operator with the current operating status of the test equipment in real time, and at the same time integrate the real-time storage location information of the chip and probe card generated by the storage location monitoring host 36 through RFID, and then produce an available resource report 366, so that the operator can arrange in advance Scheduling of wafer testing and completing the automatic test setup (Setup) operation at the same time.

In the above embodiment, the location monitoring host 36 includes a database 360 , an RFID intermediary software 361 , a web interface 362 , a location controller 363 , and an I/O interface 364 . Among them, the above-mentioned database 360 stores location data such as number, quantity, status and location related to carriers or semiconductor objects, such as: carrier or chip lot number, customer number, chip model, chip number, chip quantity, good die Relevant data such as quantity and probe card number, carrier or object storage location, wafer processing information, wafer test results, and probe card usage records. The RFID intermediary software 361 is used to handle the operation between the RFID reader 33 and the RFID tag 34. In addition, the RFID intermediary software 361 and the driver 330 through a data transmission protocol, such as various wired or One of the wireless transmission methods is selected for data transmission between the location monitoring host 36 and the RFID reader 33 , and at the same time, data reading and writing between the RFID reader 33 and the RFID tag 34 are processed. The web interface 362 provides the operator through the inter-enterprise network (B2B internet) to issue instructions and output corresponding results, for example: the operator searches for the storage location information or process information of the semiconductor object 320 belonging to a specific customer through the inter-enterprise network; The interface 364 can be connected with multiple output and input devices, providing an interface for the operator to issue instructions and output corresponding query results. The storage location controller 363 handles the data transmission between the database 360, the RFID intermediary software 361, the web interface 362, and the input/output interface 364, so as to perform the operations of the storage location monitoring.

In the above embodiment, the RFID intermediary software 361 can further provide an index key (not shown) to the above-mentioned location controller 363, so that the location controller 363 can access the database 360 according to the index key, such as an operator Carrier lot number and chip number can be used as the primary index key and secondary index key to search the online database 360 to find out the current location information of the chip, and the index key is determined by The RFID intermediary software 361 extracts from the tag information, that is, the index key can be composed of tag identification code, carrier or chip lot number, customer number, chip model, chip number, and probe card number.

The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the scope of rights of the present invention; at the same time, the above descriptions should be clear and implementable for those who are familiar with the technical field, so others do not depart from the disclosure of the present invention. Equivalent changes or modifications completed under the spirit of , shall be included in the scope of the patent application.

Claims (10)

1. A storage location monitoring system integrating radio frequency identification, used in semiconductor factories, including: A plurality of carriers are placed in the corresponding predetermined space of the semiconductor factory, and each carrier is used to carry at least one semiconductor object; a location monitoring host for monitoring the location of the carrier or semiconductor object; and a plurality of radio frequency identification tags and a plurality of radio frequency identification readers; It is characterized by: The plurality of radio frequency identification tags are respectively arranged on the respective carriers or semiconductor objects, and each radio frequency identification tag has a tag information; The plurality of radio frequency identification readers are arranged in the semiconductor factory to read or write the tag information from the radio frequency identification tag through radio frequency; The location monitoring host includes: a database storing location information related to the carrier or semiconductor object; a radio frequency identification intermediary software for processing the operation between these radio frequency identification readers and radio frequency identification tags; A web interface, which is used to process the instructions issued by the operators connected through the inter-enterprise network and the results corresponding to the output; An input and output interface, used to process the instructions issued by the operator connected through the enterprise internal network and the results corresponding to the output; and A storage location controller handles data access between the database, the radio frequency identification intermediary software, the web interface, and the input/output interface, so as to perform storage location monitoring operations. 2. The storage location monitoring system integrated with radio frequency identification according to claim 1, wherein the semiconductor object can be a mask, a wafer or a probe card, and the location information includes the carrier Or the location information of semiconductor objects located in a receiving station, a shipping station, a testing machine, a nitrogen cabinet, a rail car or a trolley or a vehicle, or in a building space. 3. The storage location monitoring system integrating radio frequency identification according to claim 1, wherein the tag information includes tag identification code, carrier or chip batch number, customer number, chip model, chip number, chip quantity, good crystal The number of grains and the number of the probe card. 4. The storage location monitoring system integrating radio frequency identification according to claim 1, characterized in that the radio frequency identification intermediary software further includes a data transmission protocol and a driver for performing the location monitoring host and the radio frequency identification Data transmission between readers, and the data transmission protocol is selected from a group consisting of transmission methods such as RS232, Ethernet, USB and WLAN. 5. The storage location monitoring system integrated with radio frequency identification according to claim 1, characterized in that the radio frequency identification tag can be passive or active, and the input/output interface can be connected with multiple output and input devices. 6. The storage location monitoring system integrating radio frequency identification according to claim 1, characterized in that the radio frequency identification intermediary software can further provide an index key to the storage location controller, and the index key can be selected from the label A group consisting of identification code, carrier or wafer lot number, customer number, wafer type, wafer number and probe card number, and the location controller accesses the database according to the index key. 7. The integrated radio frequency identification storage location monitoring system according to claim 1, wherein the radio frequency identification reader further comprises a warning device to provide real-time monitoring for operators. 8. The storage location monitoring system integrated with radio frequency identification according to claim 1, characterized in that the location monitoring host is further connected to a test machine area, so that the operator can pre-arrange the scheduling of wafer testing and automatic test racks machine work. 9. The storage location monitoring system integrating radio frequency identification according to claim 1, wherein the carrier is a carrier selected from a wafer boat box, a wafer transfer box, a wafer transport box, a trolley, and a probe card box formed groups. 10. The integrated radio frequency identification storage location monitoring system according to claim 1, characterized in that the preset space is the range where the radio frequency identification tag can be read by any adjacent radio frequency identification reader , and the vehicle or object may be configured with at least one radio frequency identification tag.

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